JP2003037033A5 - - Google Patents
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- Publication number
- JP2003037033A5 JP2003037033A5 JP2001223454A JP2001223454A JP2003037033A5 JP 2003037033 A5 JP2003037033 A5 JP 2003037033A5 JP 2001223454 A JP2001223454 A JP 2001223454A JP 2001223454 A JP2001223454 A JP 2001223454A JP 2003037033 A5 JP2003037033 A5 JP 2003037033A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001223454A JP4148388B2 (ja) | 2001-07-24 | 2001-07-24 | 熱処理装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001223454A JP4148388B2 (ja) | 2001-07-24 | 2001-07-24 | 熱処理装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2003037033A JP2003037033A (ja) | 2003-02-07 |
| JP2003037033A5 true JP2003037033A5 (ja) | 2006-01-26 |
| JP4148388B2 JP4148388B2 (ja) | 2008-09-10 |
Family
ID=19056793
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001223454A Expired - Lifetime JP4148388B2 (ja) | 2001-07-24 | 2001-07-24 | 熱処理装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4148388B2 (ja) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4859229B2 (ja) | 2006-12-08 | 2012-01-25 | 東京エレクトロン株式会社 | 熱処理装置 |
| JP5003773B2 (ja) * | 2010-02-15 | 2012-08-15 | 東京エレクトロン株式会社 | 現像装置、現像方法及び記憶媒体 |
| JP6792368B2 (ja) * | 2016-07-25 | 2020-11-25 | 株式会社Ｓｃｒｅｅｎホールディングス | 熱処理装置、基板処理装置および熱処理方法 |
| JP7200638B2 (ja) * | 2018-12-05 | 2023-01-10 | 東京エレクトロン株式会社 | 熱処理装置及び熱処理方法 |
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2001
- 2001-07-24 JP JP2001223454A patent/JP4148388B2/ja not_active Expired - Lifetime