JP2003034028A - Liquid drop jet apparatus and its manufacturing method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a superiorly productive and highly reliable liquid drop jet apparatus which can be manufactured efficiently, and its manufacturing method. SOLUTION: The liquid drop jet apparatus jets ink in an ink channel 12 by changing the volume of the ink channel 12 formed like a groove to a piezoelectric member 27. In the apparatus, driving electrodes 13 and 13 are formed to an upper half of a side wall at a point where the volume of the ink channel 12 is changed, and are formed to a nearly entire face of the side wall at a point where a conductive member 26 is set (at a point where the volume of the ink channel 12 is not changed).

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a droplet ejecting apparatus for ejecting ink in an ink flow path formed in a piezoelectric member by changing the volume of the ink flow path, and a method for manufacturing the same. .

[0002]

2. Description of the Related Art Conventionally, as this type of droplet ejecting apparatus,
For example, JP-A-63-252750 and JP-A-2-1.
As described in Japanese Patent No. 50355, there is proposed an inkjet printer head having a structure in which a plurality of groove-shaped channels capable of pressurizing ink are arranged in parallel.

The above-mentioned prior art is excellent in that an ink jet printer head having a relatively high-density nozzle and a high-density nozzle can be realized. However, a flow path consisting of a large number of grooves is formed at a high density and each groove is formed. Therefore, there was a problem in practical use in particular because of the necessity of electrical wiring.

As a method of solving the problem, for example,
JP-A-4-307254 and JP-A-6-21891
No. 8, JP-A-6-218934, etc., one end of a flow path formed of a groove is sealed with a conductive member made of a solder material, plating, or a conductive paste, and the sealing member is used. A method for electrical wiring has been proposed.

The conventional technique will be described below with reference to FIGS. First, as shown in FIG. 9, the inkjet printer head 1 is composed of a piezoelectric plate 27, a cover plate 3, a nozzle plate 31, and a substrate 41, and the piezoelectric plate 27 has a ferroelectric property of lead zirconate titanate. It is made of a (PZT) -based ceramic material.

The piezoelectric plate 27 is polarized in the polarization direction indicated by arrow 5. In addition, a plurality of grooves 8 are formed on the piezoelectric plate 27 by cutting or the like by rotation of a diamond cutting disk, as shown in FIG. The grooves 8 ... Have the same depth,
And parallel to each other. Further, the side wall 11 which is the side surface of the groove 8 is polarized in the direction of arrow 5 by the polarization treatment.

A metal electrode 13 is formed on the inner surface of the side surface of the groove 8 by a vapor deposition method. As shown in FIG. 10, when the metal electrode 13 is formed, the piezoelectric plate 27 is arranged in a state of being inclined with respect to the direction of vapor emission from a target or vapor deposition source (not shown). When the vapor is released, the shadow effect of the side wall 11 forms the metal electrodes 13 and 10 on the upper half of the side surface of the groove 8 and the upper surface of the side wall 11.

Then, the piezoelectric plate 2 is rotated 180 degrees, and the metal electrodes 13 and 10 are formed in the same manner. Thus, the metal electrodes 13 and 10 are formed on the upper half of both side surfaces of the groove 8 and the upper surface of the side wall 11. The metal electrode 1
Aluminum, nickel, etc. are used for 3,10.

Then, as shown in FIG. 11, the conductive member 26 is filled in the groove 8 by the dispenser 25. Thereafter, heat is applied to the conductive member 26 by a device (not shown), and the conductive member 26 is solidified by the heat. The conductive member 26 is formed near the end portion 15 of the piezoelectric plate 27, and is filled so as to fill the entire depth of the groove 8.

The conductive member 26 thus filled is
After that, the surplus portion and the metal electrode 1 on the upper surface of the side wall 11
Zeros are removed by wrapping or the like.

Next, the cover plate 3 shown in FIG. 9 is formed of a ceramic material, a resin material or the like.
The cover plate 3 has an ink inlet 21 and a manifold 22 formed by grinding or cutting.

As shown in the sectional shape of the groove 11 in FIG. 12, the surface of the piezoelectric plate 27 on which the groove 8 is processed and the surface of the cover plate 3 on which the manifold 22 is processed are made of an epoxy adhesive 4 or the like. Glued by.

Therefore, the ink jet printer head 1
, The upper surface of the groove 8 is covered, and a plurality of ink flow paths 12 ... Which are arranged in parallel at intervals in the lateral direction are formed. Ink is filled in all the ink flow paths 12.

To the end faces of the piezoelectric plate 27 and the cover plate 3, a nozzle plate 31 having a nozzle 32 provided at a position corresponding to the position of each ink flow path 12 is adhered. The nozzle plate 31 is made of a plastic material such as polyalkylene (for example, ethylene), terephthalate, polyimide, polyetherimide, polyetherketone, polyethersulfone, polycarbonate, or cellulose acetate.

A substrate 41 is adhered to the surface of the piezoelectric plate 27 opposite to the processed side of the groove 8 with an epoxy adhesive or the like. A pattern 42 of a conductive layer is formed on the substrate 41 at a position corresponding to each ink flow path 12. The pattern 42 of the conductive layer and the conductive member 26 are electrically connected by wire bonding or the like.

Therefore, the metal electrode 13 on one side surface of the groove 8 and the metal electrode 13 on the other side surface are electrically connected by the conductive member 26. Therefore, when a voltage is applied to the conductive member 26, a voltage is simultaneously applied to the metal electrodes 13 on both side surfaces of the groove 8 through the conductive member 26, and at the same time, the side walls 11 on both side surfaces of the groove 8 form the groove 8. It deforms inward and ejects ink droplets.

The operation of the ink jet printer head 1 will be described with reference to FIGS. A drive control circuit (not shown) determines to eject ink from the ink flow path 12b of the inkjet printer head 1 according to required data. Then, a positive drive voltage V is applied to the metal electrodes 13e and 13f via the conductive layer pattern 42 corresponding to the ink flow path 12b and the conductive member 26, and the metal electrodes 13d and 13g are grounded.

As shown in FIG. 13, a driving electric field in the direction of arrow 14b is generated on the side wall 11b, and a driving electric field in the direction of arrow 14c is generated on the side wall 11c. Then, since the driving electric field directions 14b and 14c are orthogonal to the polarization direction 5, the side walls 11b and 11c are rapidly deformed inward in the ink flow path 12b due to the piezoelectric thickness sliding effect. Due to this deformation, the volume of the ink flow path 12b decreases, the ink pressure rapidly increases, a pressure wave is generated, and an ink droplet is ejected from the nozzle 32 communicating with the ink flow path 12b.

When the application of the driving voltage V is stopped,
Since the side walls 11b and 11c gradually return to the positions before the deformation, the ink pressure in the ink flow path 12b gradually decreases. Then, ink is supplied from the ink supply port 21 through the manifold 22 into the ink flow path 12b.

In this way, in order to eject ink droplets,
The central portions of the two side walls 11 on both sides of the groove 8 are
At the same time, it is deformed into a curved line in the inward direction.

[0021]

However, when the conductive member 26 is solidified in the groove, the conductive member 26 needs to undergo a phase change from a liquid phase state to a solid phase state. The plate 27 may be bent and the conductive member 26 may be cracked.

In particular, since cracks are concentrated on the upper portion of the groove 8 which is a joint between the metal electrode 13 on the side surface of the groove 8 and the conductive member 26, there is a problem with respect to reliability such that the both are not electrically connected to each other. was there.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a highly reliable droplet ejecting apparatus which can be efficiently manufactured, and has a high reliability.

[0024]

The present invention has means for solving the above-mentioned problems as follows.

(1) A groove formed on a piezoelectric member to form an ink flow path, and a drive electrode formed on the side surfaces of both side walls of the groove to which a voltage is applied to change the volume of the ink flow path. A wiring pattern for applying a voltage to the drive electrode; a conductive member provided at one end of the groove for electrically connecting the drive electrode and the wiring pattern; A cover plate that faces the bottom surface and is adhered to the side wall, and changes the volume of the ink flow path to eject ink in the ink flow path. It is characterized in that it is formed on the upper half of the side wall at the location where the volume of the ink flow path is changed, and is formed on substantially the entire side wall at the location where the conductive member is provided.

In this structure, the drive electrode is formed on the upper half of the side wall at the location where the volume of the ink flow path is changed, and is formed on substantially the entire side wall at the location where the conductive member is provided. The connection stability between the drive electrode and the wiring pattern can be improved.

(2) The drive electrode is formed so that both side walls can be electrically connected to each other on the bottom surface of the ink flow path at the location where the conductive member is formed.

In this structure, the drive electrode is formed so that the both side walls are electrically connected to each other at the bottom surface of the ink flow path at the place where the conductive member is provided, so that the connection of the both side walls to the drive electrode is ensured. It can be anything.

(3) Grooves formed on the piezoelectric member to form ink flow paths, and drive electrodes formed on the side surfaces of both side walls of the grooves to which a voltage is applied to change the volume of the ink flow paths. A wiring pattern for applying a voltage to the drive electrode; a conductive member provided at one end of the groove for electrically connecting the drive electrode and the wiring pattern; A cover plate that faces the bottom surface and is adhered to the side wall; and a method of manufacturing a droplet ejecting device that ejects ink in the ink flow path by changing the volume of the ink flow path, A first step of forming a groove serving as an ink flow path on the piezoelectric member, a second step of forming a coating groove in a direction orthogonal to the ink flow path, and forming the drive electrodes on both side walls of the groove. In the third step and the coating groove Characterized in that I have a, a fourth step of applying the conductive member.

In this method, it is possible to efficiently (easily) form the drive electrode in the ink flow path by forming a groove serving as the ink flow path in the piezoelectric member.

(4) Grooves formed on the piezoelectric member to form ink flow paths, and drive electrodes formed on the side surfaces of both side walls of the grooves to which a voltage is applied to change the volume of the ink flow paths. A wiring pattern for applying a voltage to the drive electrode; a conductive member provided at one end of the groove for electrically connecting the drive electrode and the wiring pattern; A cover plate that faces the bottom surface and is adhered to the side wall; and a method of manufacturing a droplet ejecting device that ejects ink in the ink flow path by changing the volume of the ink flow path, A first step of forming a coating groove on the piezoelectric member in a direction orthogonal to the ink flow path, a second step of forming a groove to be the ink flow path, and forming the drive electrodes on both side walls of the groove. In the third step and the coating groove Characterized in that I have a, a fourth step of applying the conductive member.

According to this method, it is possible to perform highly reliable processing without damaging the ink flow path or the like when forming the coating groove.

(5) In the third step, the metal material serving as the drive electrode is vapor-deposited in a direction inclined with respect to the side surfaces of both side walls of the coating groove so as to be formed on the inner surface of the ink flow path from the coating groove direction. It is characterized by

In this method, the metal electrode can be formed on the upper half of the side surface of the groove and the upper surface of the side wall by the shadow effect of the side wall, and the metal electrode is formed on the entire side surface of the groove near the coating groove. can do.

[0035]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, a liquid droplet ejecting apparatus according to an embodiment of the present invention and a manufacturing method thereof will be described in detail with reference to the drawings. In the following description, the same parts or equivalent parts as those of the conventional example are designated by the same reference numerals, and the description thereof will be omitted.

As shown in FIG. 1, the ink jet printer head (droplet ejecting device) 1 is composed of a piezoelectric plate 27, a cover plate 3, a nozzle plate 31, and a substrate 41. The piezoelectric plate (piezoelectric member) 27 shown in FIG. 2 is made of a lead zirconate titanate (PZT) -based ceramic material having ferroelectricity.

The piezoelectric plate 27 is a plate having a thickness of about 1 mm which is polarized in the direction of arrow 5. Further, the piezoelectric plate 27 is provided with a plurality of grooves 8 serving as ink flow paths, which are formed by cutting the diamond cutting disk by rotation. The grooves 8 are parallel and of the same depth. The depth of the grooves 8 is about 300 μm,
The width is about 70 μm and the pitch is 140 μm.

Next, as shown in FIG. 4, the piezoelectric plate 2
In No. 7, a coating groove 68 having a depth of about 250 μm and a width of 500 μm is formed by cutting by rotating the diamond cutting disk 30 in the direction perpendicular to the ink flow path direction. A cross-sectional view of the ink flow path at this time is shown in FIG.

A metal electrode (driving electrode) 13 is formed on the inner surface of the side surface of the groove 8 by a vapor deposition method. Metal electrode 13
When forming the piezoelectric plate 27, as shown in FIG.
Is inclined with respect to the direction of vapor emission from a target or vapor deposition source (not shown), and serves as an ink channel.
The flow path is also inclined so that steam may flow from the coating groove 68 side.

When the vapor is discharged, the shadow effect of the side wall 11 causes the metal electrodes 13 and 10 to be formed on the upper half of the side surface of the groove 8 and the upper surface of the side wall 11. A metal electrode is formed on the entire side surface. Next, the piezoelectric plate 2 is rotated 180 degrees, and the metal electrodes 13 and 10 are similarly formed.

Thus, as shown in FIG. 5B, the groove 8
The metal electrodes 13 and 10 are formed on the upper half of both side surfaces, the upper surface of the side wall 11, the side surface and the entire bottom surface of the groove 8 near the coating groove 68. Aluminum, nickel or the like is used for the metal electrodes 13 and 10.

Here, the metal electrode 10 on the upper surface of the side wall 11
Are removed by lifting off the resist film previously attached to the cut surface of the piezoelectric plate 27 before lapping or cutting the groove 8. And FIG.
As shown in (c), the coating groove 68 on the piezoelectric plate 27.
Then, the conductive member 26 is applied to a height of 180 μm by a dispenser (not shown).

Here, the conductive member 26 is first coated with the coating groove 68.
Applied to the inside of the groove 8 by the capillary action of the groove 8 after that.
Therefore, the conductive member 26 is not formed on the upper surface of the side wall 11 since the conductive member 26 is formed inside. For this reason, when the conductive member 26 is solidified, it is possible to press the piezoelectric plate 27 from the application surface with a flat plate or the like in order to suppress the deflection of the piezoelectric plate 27 by the conductive member 26, and unnecessary conductivity due to the wrapping of the upper surface of the side wall 11 is achieved. There is no need to remove members. In actual manufacturing, a plurality of dispensers are provided, and the dispensers are arranged above each coating groove 68.

After that, the conductive member 2 of the piezoelectric plate 27
A flat plate or the like presses down the coated surface of 6 and heat is applied by a device (not shown), and the conductive member 2 is heated by the heat.
6 solidifies. As the conductive member 26, gold paste, silver paste, copper paste containing an epoxy-based resin component, gold plating based on a plating solution, nickel plating, or the like is used.

Then, as shown in FIG. 5D, the surface of the piezoelectric plate 27 on the side where the groove 8 is processed and the cover plate 3 are adhered to each other by an adhesive such as an epoxy-based adhesive.
As shown in (e), the cover plate 3 and the piezoelectric plate 27 are cut in a range that is wider than the width of the coating groove and the metal electrode on the entire side surface of the groove near the coating groove remains.

As a result, the conductive member 26 is separated for each ink flow path, and as shown in the sectional view taken along the ink flow path 12 of the ink jet printer head 1 shown in FIG. A plurality of ink flow passages 12 are formed so as to cover the upper surfaces of the grooves 8 and have a space between each other in the lateral direction. At the time of ink filling, ink is filled in all the ink flow passages 12 through the space above the conductive member 26. It

Next, a substrate 41 (see FIG. 1) having a wiring pattern (not shown) of a conductive layer formed at a position corresponding to the position of each ink flow path 12 is formed at the end of the piezoelectric plate 27. It is connected to the conductive member 26. The wiring pattern of the conductive layer and the conductive member 26 are connected to each other by forming a bump (not shown) on the anisotropic conductive adhesive or the wiring pattern and inserting the bump into the conductive member 26. It

After that, when a conductive ink, for example, a water-based ink is used, the above-mentioned joint is insulated and protected by an organic protective film such as polyparaxylylene (trade name: Parylene). However, a protective film is not necessary depending on the characteristics of the adhesive used for forming the ink jet printer head including the ink used and the anisotropic conductive adhesive.

Next, nozzles 32 are provided at positions corresponding to the positions of the ink flow paths 12 on the end surface of the integrated piezoelectric plate 27 and cover plate 3 on the side where the conductive member 26 is not provided. The nozzle plate 31 is adhered.

Finally, the manifold 22 is joined with the substrate 41 sandwiched between the end faces of the piezoelectric plate 27 and the cover plate 3 on which the conductive members 26 are provided. At this time, reliability is improved by sealing with resin so that ink does not leak from the joint portion.

With the above structure, the metal electrode 13 on one side of the groove 8 is electrically joined to the metal electrode 13 on the other side at the bottom of the groove near the coating groove, and the metal electrode 1 on the entire inner surface of the groove 1
3 electrically connected by a conductive member 26. Therefore, when a voltage is applied to the conductive member 26,
A voltage is simultaneously applied to the metal electrodes 13 on both sides of the groove 8 through the conductive member 26, and at the same time, the side walls 11 on both sides of the groove 8 are deformed toward the inside of the groove 8 to eject ink droplets.

In this embodiment, the cover plate 3 is adhered after the conductive member 26 is solidified. However, the cover plate 3 is adhered before the solidifying, and the conductive member 26 is solidified and the cover plate 3 and the piezoelectric plate 27 are adhered. The agents may be solidified at the same time. In this case, it is necessary to select the solidification conditions and the like of the adhesive and the conductive member 26, but since the solidification can be performed simultaneously, the process is facilitated and the deflection of the piezoelectric plate 27 when the conductive member 26 is solidified is also covered. The rigidity can be reduced.

In addition, the coating groove 68 is formed by forming the ink flow path 12
It may be performed before the formation of the groove 8 to be formed. In this case, the groove 8 is not damaged during the cutting process of the coating groove 68, and a highly reliable process is possible.

If a cover groove 67 having a width slightly larger than the width of the coating groove 68 is formed on the cover plate 3 as shown in FIG. Even if the height is higher than the upper surface of the side wall 11, the cover plate 3 can be adhered without removing the unnecessary conductive member 26 by lapping.

In particular, when the cover plate 3 is adhered before the conductive member 26 is solidified, the conductive member 26 is rubbed against the facing surface of the coating groove 68 of the cover plate 3 to adhere to the upper surface of the side wall 11, It is possible to avoid the occurrence of a defect such as a short circuit when a voltage is applied to the metal electrode 13.

Similarly, as shown in FIG. 7, the surface of the cover plate 3 facing the conductive member 26 has a depth of 500 μm and a recess 66 having a width extending to the ink flow path 12 is formed on the cover plate 3 by grinding or cutting. You may.

By using such a cover plate 3, the number of processing steps of the cover plate 3 is increased.
As shown in FIG. 8A, the conductive member 26 is embedded to a position equivalent to the groove depth, and then the cover plate 3 is bonded as shown in FIG. By cutting the cover plate 3 and the piezoelectric plate 27, it is possible to form the inkjet printer head 1 having the configuration as shown in FIG. 8C.

In such a structure, the gap between the conductive member 26 and the cover plate 3 that contributes to ink supply is increased as compared with the case of the previous embodiment, the ink supply amount can be further increased, and high speed printing and Even if a large amount of ink is consumed due to the increase in the number of nozzles, reliable ink supply can be performed. Further, the electrical bondability between the conductive member 26 and the metal electrode 13 can be further improved, and the reliability during driving is improved.

The present invention is not limited to the above-mentioned embodiments, and within the scope of the present invention,
Design changes, improvements, etc. are free. For example, the values of the pitch, width, depth, etc. of the grooves 8 formed in the piezoelectric plate 27 may be appropriately selected and set.

[0060]

As is apparent from the above description, the present invention is
The following effects are achieved.

According to the first aspect, the drive electrode is formed in the upper half of the side wall at the position where the volume of the ink flow passage is changed,
In addition, since the conductive member is formed on substantially the entire side wall at the place where the conductive member is provided, the connection stability between the drive electrode and the wiring pattern can be improved.

According to the second aspect, since the drive electrode is formed so that the both side walls can be electrically connected to each other at the bottom surface of the ink flow path at the place where the conductive member is provided, the connection of the both side walls to the drive electrode is performed. It can be assured.

According to the third aspect, a groove serving as an ink flow path can be formed in the piezoelectric member by a series of steps, and the drive electrode can be efficiently formed in the ink flow path, which is excellent in productivity. It is possible to provide a highly reliable droplet ejection device.

According to the fourth aspect, a groove serving as an ink flow path can be formed in the piezoelectric member by a series of steps, and the drive electrode can be efficiently formed in the ink flow path, which is excellent in productivity. It is possible to provide a highly reliable droplet ejection device.

Since the step of forming the coating groove is preceded by the step of forming the groove which becomes the ink flow path, there is no damage such as breakage of the ink flow path when forming the coating groove, Highly reliable processing is possible.

According to the fifth aspect, the metal material to be the drive electrode is vapor-deposited in the inclined direction with respect to the side surfaces of both side walls of the coating groove so as to be formed on the inner surface of the ink flow path from the coating groove direction. Due to the shadow effect of the side wall, a metal electrode can be formed on the upper half of the side surface of the groove and the upper surface of the side wall,
In addition, the metal electrode can be formed over the entire side surface of the groove near the coating groove.

[Brief description of drawings]

FIG. 1 is a perspective view showing a configuration of an inkjet printer head according to an embodiment of the present invention.

FIG. 2 is a perspective view of the piezoelectric plate.

FIG. 3 is a perspective view of the piezoelectric plate.

FIG. 4 is an explanatory diagram of a coating groove forming step of the piezoelectric plate.

FIG. 5 is an explanatory diagram of a manufacturing process of the inkjet printer head.

FIG. 6 is a cross-sectional view showing another configuration of the inkjet printer head.

FIG. 7 is a perspective view showing another configuration of the cover plate.

FIG. 8 is an explanatory diagram of another manufacturing process of the inkjet printer head.

FIG. 9 is a perspective view showing an example of the configuration of a conventional inkjet printer head.

FIG. 10 is an explanatory diagram of an electrode forming step of the same piezoelectric plate.

FIG. 11 is a sectional view of a step of forming a conductive member of the piezoelectric plate.

FIG. 12 is a cross-sectional view of the inkjet printer head.

FIG. 13 is an explanatory diagram of an operating state of the inkjet printer head.

[Explanation of symbols] 3-Cover plate 8-groove 12-ink flow path 13-Drive electrode (metal electrode) 26-Conductive member 27-Piezoelectric member 68-Coating groove

   ─────────────────────────────────────────────────── ─── Continued front page    (72) Inventor Yasuhiro Sakamoto             22-22 Nagaikecho, Abeno-ku, Osaka-shi, Osaka             Inside the company F-term (reference) 2C057 AF93 AG45 AG89 AG91 AP22                       AP25 AP54 AP57 BA03 BA14

Claims (5)

[Claims] 1. A groove formed on a piezoelectric member to form an ink flow path, and a drive electrode formed on side surfaces of both side walls of the groove to which a voltage is applied to change a volume of the ink flow path. A wiring pattern for applying a voltage to the drive electrode, a conductive member provided at one end of the groove for electrically connecting the drive electrode and the wiring pattern, and a bottom surface of the groove A cover plate that is opposed to the side wall and is adhered to the side wall, and that changes the volume of the ink flow path to eject ink in the ink flow path, wherein the drive electrode is Droplet ejection characterized in that it is formed on the upper half of the side wall of the groove at a location where the volume of the ink flow path is changed, and is formed on substantially the entire side wall at a location where the conductive member is provided. apparatus. 2. The driving electrode is formed so that the both side walls can be electrically connected to each other at a bottom surface of the ink flow path at a position where the conductive member is formed. Droplet ejector. 3. A groove formed on a piezoelectric member to form an ink flow path, and a drive electrode formed on side surfaces of both side walls of the groove to which a voltage is applied to change the volume of the ink flow path. A wiring pattern for applying a voltage to the drive electrode, a conductive member provided at one end of the groove for electrically connecting the drive electrode and the wiring pattern, and a bottom surface of the groove A cover plate that is opposed to the side wall and is adhered to the side wall, and that changes the volume of the ink flow path to eject ink in the ink flow path. A first step of forming a groove to be an ink flow path on a member, and a second step of forming a coating groove in a direction orthogonal to the ink flow path
And a third step of forming the drive electrodes on both side walls of the groove, and a fourth step of applying the conductive member along the application groove. A method for manufacturing an injection device. 4. A groove formed on a piezoelectric member to form an ink flow path, and a drive electrode formed on side surfaces of both side walls of the groove to which a voltage is applied to change the volume of the ink flow path. A wiring pattern for applying a voltage to the drive electrode, a conductive member provided at one end of the groove for electrically connecting the drive electrode and the wiring pattern, and a bottom surface of the screen A cover plate that is opposed to the side wall and is adhered to the side wall, and that changes the volume of the ink flow path to eject ink in the ink flow path. A first step of forming a coating groove on a member in a direction orthogonal to the ink flow path, a second step of forming a groove to be the ink flow path, and a step of forming the drive electrode on both side walls of the groove Step 3 along with the coating groove Method of manufacturing a liquid droplet jet apparatus characterized by having a fourth step of applying the conductive member Te. 5. In the third step, a metal material to be the drive electrodes is vapor-deposited in an inclined direction with respect to side surfaces of both side walls of the coating groove so as to be formed on the inner surface of the ink flow path from the coating groove direction. The method for manufacturing a droplet jetting device according to claim 3 or 4, characterized in that.