JP2003028603A - Dimension measuring device - Google Patents

Dimension measuring device

Info

Publication number
JP2003028603A
JP2003028603A JP2001217802A JP2001217802A JP2003028603A JP 2003028603 A JP2003028603 A JP 2003028603A JP 2001217802 A JP2001217802 A JP 2001217802A JP 2001217802 A JP2001217802 A JP 2001217802A JP 2003028603 A JP2003028603 A JP 2003028603A
Authority
JP
Japan
Prior art keywords
rod
cam
resistant layer
measuring device
gage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001217802A
Other languages
Japanese (ja)
Inventor
Wasaku Tezuka
和作 手塚
Seigo Takahashi
誠悟 高橋
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Original Assignee
Mitutoyo Corp
Mitsutoyo Kiko Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitutoyo Corp, Mitsutoyo Kiko Co Ltd filed Critical Mitutoyo Corp
Priority to JP2001217802A priority Critical patent/JP2003028603A/en
Publication of JP2003028603A publication Critical patent/JP2003028603A/en
Pending legal-status Critical Current

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Landscapes

  • Length-Measuring Instruments Using Mechanical Means (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a dimension measuring device whose high accuracy and durability can be guaranteed. SOLUTION: A cylinder gage comprises a rod 3 which is housed inside an outer tube 1 so as to be slidable; a pair of gage heads 2a, 2b which are connected to one end of the rod 3 via a cam 6, which are installed so as to be movable to a direction at right angles to the longitudinal direction of the rod 3, and which come into contact with the inner wall of a hole or a groove in a specimen; and a display 5 which is installed on the side of the other end of the rod 3 and which displays a displacement amount converted to the rod 3 via the cam 6 at the gage head 2a. The rod 3, the gage heads 2a, 2b and the cam 6 are formed of carbon tool steel, and their outer circumferential faces are wholly coated with a thin layer 22 by an ion plating operation as an abrasion-resistant layer.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】この発明は、孔径や溝幅等を
測定する寸法測定器に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dimension measuring instrument for measuring hole diameter, groove width and the like.

【0002】[0002]

【従来の技術】被測定物の孔径や溝幅等を測定する寸法
測定器として、シリンダゲージが知られている。シリン
ダゲージは、測定子の変位をこれと直角方向のロッドの
変位に変換して測定する。この変位の変換のためにカム
を用いる方式や、クサビを用いる方式がある。
2. Description of the Related Art A cylinder gauge is known as a size measuring instrument for measuring the hole diameter, groove width and the like of an object to be measured. The cylinder gauge converts the displacement of the contact point into the displacement of the rod in the direction perpendicular to this and measures the displacement. There are a method of using a cam and a method of using a wedge to convert this displacement.

【0003】[0003]

【発明が解決しようとする課題】カム式シリンダゲージ
の場合、高精度を保証するために、測定子及びロッドと
カムとの接触部の平面が変位方向に垂直であること、カ
ムの接触部の形状が完全球形であること等が要求され
る。また耐久性については、カムとロッドや測定子との
接触面の滑り摩擦による摩耗が問題になる。更にロッド
は外筒内に摺動するように収められ、測定子も取り付け
部に摺動可能に収められるので、ロッドや測定子の耐摩
耗性も要求される。
In the case of the cam type cylinder gauge, in order to ensure high accuracy, the contact point and the plane of the contact portion between the rod and the cam are perpendicular to the displacement direction, and the contact portion of the cam is It is required that the shape is a perfect sphere. Further, regarding durability, wear due to sliding friction of the contact surface between the cam and the rod or the contact point becomes a problem. Further, since the rod is slidably accommodated in the outer cylinder, and the probe is also slidably accommodated in the mounting portion, wear resistance of the rod and the probe is also required.

【0004】この発明は、上記事情を考慮してなされた
もので、高精度と耐久性を保証できる寸法測定器を提供
することを目的としている。
The present invention has been made in consideration of the above circumstances, and an object of the present invention is to provide a dimension measuring instrument capable of ensuring high accuracy and durability.

【0005】[0005]

【課題を解決するための手段】この発明は、外筒内に摺
動可能に収められたロッドと、このロッドの一端にカム
を介して連結されてロッドの長手方向と直交する方向に
移動可能に設けられて被測定物の孔又は溝の内壁に当接
する一対の測定子と、前記ロッドの他端側に設けられ
て、前記測定子の前記カムを介して前記ロッドに変換さ
れた変位量を表示する表示器とを備えた寸法測定器にお
いて、前記ロッド、測定子及びカムは、炭素工具鋼によ
り形成され且つ、それらの外周面全面に物理蒸着法によ
る耐摩耗性層がコーティングされていることを特徴とす
る。
According to the present invention, a rod slidably accommodated in an outer cylinder and one end of the rod are connected via a cam so as to be movable in a direction orthogonal to the longitudinal direction of the rod. A pair of measuring elements provided on the inner wall of the hole or groove of the object to be measured, and the displacement amount converted to the rod via the cam of the measuring element provided on the other end side of the rod. In the dimension measuring instrument having an indicator for displaying, the rod, the probe and the cam are formed of carbon tool steel, and the entire outer peripheral surface thereof is coated with a wear resistant layer by physical vapor deposition. It is characterized by

【0006】この発明によると、カム式シリンダゲージ
のロッド、測定子及びこれらを連結するカムを炭素工具
鋼により形成し、且つこれらの全てについて、その外周
面全面に物理蒸着法による耐摩耗性層をコーティングす
る。これにより、カムとロッド及び測定子との間の摩擦
による摩耗、ロッドや測定子の摺動面の摩耗が防止さ
れ、高精度と耐久性を保証することが可能になる。
According to the present invention, the rod of the cam type cylinder gauge, the measuring element, and the cam for connecting them are made of carbon tool steel, and all of them have a wear-resistant layer formed by physical vapor deposition on the entire outer peripheral surface thereof. Coating. As a result, wear due to friction between the cam and the rod and the probe and wear on the sliding surfaces of the rod and the probe are prevented, and high accuracy and durability can be guaranteed.

【0007】[0007]

【発明の実施の形態】以下、図面を参照して、この発明
の実施例を説明する。図1は、この発明の実施の形態に
よるシリンダゲージの外観図を示し、図2はその要部の
断面構造を示している。
BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 shows an external view of a cylinder gauge according to an embodiment of the present invention, and FIG. 2 shows a sectional structure of a main part thereof.

【0008】このシリンダゲージは、外筒1の一端部に
一対の測定子2a,2bが設けられ、他端部には表示器
5が取り付けられている。表示器5の直下には握り部4
が設けられている。測定子2a,2bの一方2bは固定
であり、他方2aは、被測定物10の孔或いは溝の内壁
11に当接して変位するようになっている。測定子2a
の変位量は、外筒1内に摺動可能に収められたロッド3
に直角に伝達される。
In this cylinder gauge, a pair of gauge heads 2a, 2b is provided at one end of an outer cylinder 1, and a display 5 is attached at the other end. Just below the display 5 is the grip 4.
Is provided. One of the measuring elements 2a and 2b is fixed, and the other 2a abuts on the inner wall 11 of the hole or groove of the DUT 10 and is displaced. Probe 2a
The displacement amount of the rod 3 is slidably housed in the outer cylinder 1.
Transmitted at a right angle to.

【0009】測定子2aは、外筒1の先端部に形成され
たガイド10に、取り付け部材7に摺動可能な状態で収
められている。被測定物に当接すると、ガイド10が引
っ込み、バネ9aにより戻る。取り付け部材7と測定子
2aの間には測定子2aを戻すための小さいバネ9bが
入っている。測定子2aの変位をロッド3に伝達する変
換機構として、図2に示すようにカム6が用いられてい
る。カム6のロッド1及び測定子2aとの接触面には、
球面8a,8bが形成されている。
The tracing stylus 2a is slidably accommodated in the mounting member 7 in the guide 10 formed at the tip of the outer cylinder 1. When it comes into contact with the object to be measured, the guide 10 retracts and returns by the spring 9a. A small spring 9b for returning the probe 2a is inserted between the mounting member 7 and the probe 2a. As a conversion mechanism for transmitting the displacement of the probe 2a to the rod 3, a cam 6 is used as shown in FIG. On the contact surface of the cam 6 with the rod 1 and the probe 2a,
Spherical surfaces 8a and 8b are formed.

【0010】ロッド3、測定子2a,2b及びカム6の
全ては、焼き入れされた炭素工具鋼を研削加工して形成
される。そしてこれらの外周面全面には耐摩耗性層とし
て、イオンプレーティングによって窒化チタン(Ti
N)層がコーティングされている。図2(b)は、測定
子2aについてその要部拡大断面図を示しているが、炭
素工具鋼21は円柱状に加工され、先端の半球状部、カ
ム6と接触する端面を含めて全面にTiN層22がコー
ティングされている。その他図示しないが、固定側の測
定子2bも同様である。ロッド3も側周面及びカム6と
の接触端面を含めて全面に同様にTiN層がコーティン
グされる。カム6についても、球面部8a,8bを含む
全面にTiN層がコーティングされる。
The rod 3, the measuring elements 2a and 2b and the cam 6 are all formed by grinding hardened carbon tool steel. As a wear resistant layer, titanium nitride (Ti
N) layer is coated. FIG. 2B shows an enlarged cross-sectional view of the main part of the probe 2a. The carbon tool steel 21 is processed into a cylindrical shape, and the entire surface including the hemispherical part at the tip and the end surface in contact with the cam 6 Is coated with a TiN layer 22. Although not shown, the same applies to the fixed-side measuring element 2b. Similarly, the entire surface of the rod 3, including the side peripheral surface and the contact end surface with the cam 6, is coated with a TiN layer. Also on the cam 6, the TiN layer is coated on the entire surface including the spherical surfaces 8a and 8b.

【0011】以上のように、ロッド3、測定子2a,2
b及びカム6の全体にTiN層をコーティングすること
により、これら相互間の摩擦面や摺動面、測定子の被測
定物との接触面が十分に高硬度となり、摩耗が防止され
て、長寿命の高精度特性が得られる。
As described above, the rod 3, the measuring elements 2a, 2
By coating the entire b and the cam 6 with a TiN layer, the frictional surface and sliding surface between them and the contact surface of the probe with the object to be measured have sufficiently high hardness, wear is prevented, and Highly accurate life characteristics can be obtained.

【0012】なお上記実施の形態では、耐摩耗性層とし
てTiNを用いたが、耐摩耗性と共に潤滑性を付与する
ために、他の材料を用いることができる。例えば、モリ
ブデン(Mo)とチタン(Ti)の積層構造、具体的に
は、Ti/Mo/Tiの3層構造を用いることができ
る。この様な積層構造もイオンプレーティングにより形
成することができる。また、物理蒸着法として、スパッ
タ法を利用することもできる。
Although TiN is used as the wear resistant layer in the above embodiment, other materials may be used to impart wear resistance and lubricity. For example, a laminated structure of molybdenum (Mo) and titanium (Ti), specifically, a three-layer structure of Ti / Mo / Ti can be used. Such a laminated structure can also be formed by ion plating. A sputtering method can also be used as the physical vapor deposition method.

【0013】[0013]

【発明の効果】以上述べたようにこの発明によれば、ロ
ッド、測定子及びこれらを連結するカムの全てに耐摩耗
性層をコーティングすることにより、シリンダゲージの
長寿命の高精度特性を得ることができる。
As described above, according to the present invention, the wear resistance layer is coated on all of the rod, the probe, and the cam connecting them, thereby obtaining a long-life and highly accurate characteristic of the cylinder gauge. be able to.

【図面の簡単な説明】[Brief description of drawings]

【図1】 この発明の実施の形態によるシリンダゲージ
の外観図である。
FIG. 1 is an external view of a cylinder gauge according to an embodiment of the present invention.

【図2】 同シリンダゲージの要部断面図である。FIG. 2 is a sectional view of a main part of the cylinder gauge.

【符号の説明】[Explanation of symbols]

1…外筒、2a,2b…測定子、3…ロッド、4…握り
部、5…表示器、6…カム、7…取り付け部、8a,8
b…球面、21…炭素工具鋼、22…TiN層。
DESCRIPTION OF SYMBOLS 1 ... Outer cylinder, 2a, 2b ... Measuring element, 3 ... Rod, 4 ... Grip part, 5 ... Indicator, 6 ... Cam, 7 ... Attachment part, 8a, 8
b ... spherical surface, 21 ... carbon tool steel, 22 ... TiN layer.

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 2F061 AA25 AA26 FF07 FF34 FF36 FF61 FF73 GG01 HH02 HH45 JJ02 JJ11 JJ23 JJ51 JJ67 SS07 SS13 SS26 2F062 AA34 AA36 BC48 CC10 EE01 EE14 EE63 FF04 FF07 FF09 FF25 GG90 HH13 HH22 LL02 LL03    ─────────────────────────────────────────────────── ─── Continued front page    F term (reference) 2F061 AA25 AA26 FF07 FF34 FF36                       FF61 FF73 GG01 HH02 HH45                       JJ02 JJ11 JJ23 JJ51 JJ67                       SS07 SS13 SS26                 2F062 AA34 AA36 BC48 CC10 EE01                       EE14 EE63 FF04 FF07 FF09                       FF25 GG90 HH13 HH22 LL02                       LL03

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 外筒内に摺動可能に収められたロッド
と、このロッドの一端にカムを介して連結されてロッド
の長手方向と直交する方向に移動可能に設けられて被測
定物の孔又は溝の内壁に当接する一対の測定子と、前記
ロッドの他端側に設けられて、前記測定子の前記カムを
介して前記ロッドに変換された変位量を表示する表示器
とを備えた寸法測定器において、 前記ロッド、測定子及びカムは、炭素工具鋼により形成
され且つ、それらの外周面全面に物理蒸着法による耐摩
耗性層がコーティングされていることを特徴とする寸法
測定器。
1. A rod slidably accommodated in an outer cylinder, and a rod which is connected to one end of the rod through a cam so as to be movable in a direction orthogonal to the longitudinal direction of the rod. A pair of measuring elements that come into contact with the inner wall of the hole or groove, and a display that is provided on the other end side of the rod and that displays the amount of displacement converted to the rod through the cam of the measuring element. In the dimension measuring instrument, the rod, the tracing stylus and the cam are formed of carbon tool steel, and the entire outer peripheral surface thereof is coated with an abrasion resistant layer by a physical vapor deposition method. .
【請求項2】 前記耐摩耗性層は、イオンプレーティン
グによる窒化チタン層であることを特徴とする請求項1
記載の寸法測定器。
2. The wear-resistant layer is a titanium nitride layer formed by ion plating.
Dimensional measuring device described.
【請求項3】 前記耐摩耗性層は、イオンプレーティン
グによるチタン/モリブデン/チタンの積層構造である
ことを特徴とする請求項1記載の寸法測定器。
3. The dimension measuring device according to claim 1, wherein the wear resistant layer has a laminated structure of titanium / molybdenum / titanium formed by ion plating.
JP2001217802A 2001-07-18 2001-07-18 Dimension measuring device Pending JP2003028603A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001217802A JP2003028603A (en) 2001-07-18 2001-07-18 Dimension measuring device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001217802A JP2003028603A (en) 2001-07-18 2001-07-18 Dimension measuring device

Publications (1)

Publication Number Publication Date
JP2003028603A true JP2003028603A (en) 2003-01-29

Family

ID=19052068

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001217802A Pending JP2003028603A (en) 2001-07-18 2001-07-18 Dimension measuring device

Country Status (1)

Country Link
JP (1) JP2003028603A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009115586A (en) * 2007-11-06 2009-05-28 Maeda Corp Apparatus and method for irregularity measurement
JP2010243350A (en) * 2009-04-07 2010-10-28 Mitsutoyo Corp Device for measuring internal size
JP2016151441A (en) * 2015-02-16 2016-08-22 株式会社ミツトヨ Inside measuring device
WO2016184232A1 (en) * 2015-05-18 2016-11-24 苏州国量量具科技有限公司 Improved plug gauge
CN106537081A (en) * 2014-08-07 2017-03-22 伊利诺斯工具制品有限公司 Automatic transverse strain extensometer architecture
CN112880526A (en) * 2021-04-28 2021-06-01 四川仨川航空机械设备有限公司 Deep blind hole annular groove measuring device and using method thereof
CN113324460A (en) * 2021-05-28 2021-08-31 浙江德稻工程咨询有限公司 Supervision pile hole aperture detection device

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009115586A (en) * 2007-11-06 2009-05-28 Maeda Corp Apparatus and method for irregularity measurement
JP2010243350A (en) * 2009-04-07 2010-10-28 Mitsutoyo Corp Device for measuring internal size
CN106537081A (en) * 2014-08-07 2017-03-22 伊利诺斯工具制品有限公司 Automatic transverse strain extensometer architecture
JP2017525954A (en) * 2014-08-07 2017-09-07 イリノイ トゥール ワークス インコーポレイティド Automatic lateral strain extensometer architecture
CN112525675A (en) * 2014-08-07 2021-03-19 伊利诺斯工具制品有限公司 Automatic transverse strain extensometer architecture
JP2016151441A (en) * 2015-02-16 2016-08-22 株式会社ミツトヨ Inside measuring device
CN105890495A (en) * 2015-02-16 2016-08-24 株式会社三丰 Inside measuring instrument
CN105890495B (en) * 2015-02-16 2020-11-13 株式会社三丰 Internal measuring instrument
WO2016184232A1 (en) * 2015-05-18 2016-11-24 苏州国量量具科技有限公司 Improved plug gauge
CN112880526A (en) * 2021-04-28 2021-06-01 四川仨川航空机械设备有限公司 Deep blind hole annular groove measuring device and using method thereof
CN112880526B (en) * 2021-04-28 2021-07-27 四川仨川航空机械设备有限公司 Deep blind hole annular groove measuring device and using method thereof
CN113324460A (en) * 2021-05-28 2021-08-31 浙江德稻工程咨询有限公司 Supervision pile hole aperture detection device

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