JP2003021648A - Manufacturing method of anisotropic conductive sheet - Google Patents

Manufacturing method of anisotropic conductive sheet

Info

Publication number
JP2003021648A
JP2003021648A JP2002102631A JP2002102631A JP2003021648A JP 2003021648 A JP2003021648 A JP 2003021648A JP 2002102631 A JP2002102631 A JP 2002102631A JP 2002102631 A JP2002102631 A JP 2002102631A JP 2003021648 A JP2003021648 A JP 2003021648A
Authority
JP
Japan
Prior art keywords
sheet
inspected
anisotropic conductive
conductive sheet
insulating
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2002102631A
Other languages
Japanese (ja)
Other versions
JP3589228B2 (en
Inventor
Kazumi Hanawa
一美 塙
Shinichi Suyama
伸一 須山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JSR Corp
Original Assignee
JSR Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JSR Corp filed Critical JSR Corp
Priority to JP2002102631A priority Critical patent/JP3589228B2/en
Publication of JP2003021648A publication Critical patent/JP2003021648A/en
Application granted granted Critical
Publication of JP3589228B2 publication Critical patent/JP3589228B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a method capable of manufacturing, easily and highly accurately, an anisotropic conductive sheet having high connection reliability, capable of performing sufficiently electric inspection while securing the required position accuracy, even when an electrode to be inspected of an inspection object circuit board has a minute electrode pitch and a fine, high-density and complex pattern. SOLUTION: In this manufacturing method of the anisotropic conductive sheet, a molding material layer comprising polymer material containing conductive particles having magnetism is arranged between a pair of insulating sheet bodies having an opening part corresponding to the electrode to be inspected of the inspection object circuit board, and a parallel magnetic field is applied thereto in the thickness direction to move and simultaneously pressurize the conductive particles, and the polymer material in the molding material layer is fluidized, to thereby change the external shape thereof, and the polymer material is hardened to acquire a polymer substance. Hereby, the anisotropic conductive sheet body is formed, and the state where either of the pair of insulating sheet bodies is bonded to the anisotropic conductive sheet body is acquired.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明は、例えばプリント回
路基板などを検査対象としてその電気的性能を検査する
ため、当該検査対象回路基板と電気的検査装置との間の
電気的接続を達成するために用いられる異方導電性シー
トの製造方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention is intended to achieve electrical connection between a circuit board to be inspected and an electrical inspection device in order to inspect the electrical performance of the printed circuit board or the like as an inspection object. The present invention relates to a method for manufacturing an anisotropic conductive sheet used in.

【0002】[0002]

【従来の技術】一般に、プリント回路基板などの回路基
板は、電極数が増加し、高密度化し、それに応じて配線
が複雑化する傾向にある。このため、内層回路基板と外
層回路基板とからなる多層基板が多く用いられるように
なってきている。また、生産性を高める意味から、製造
の際は、同一回路基板複数枚を一枚の基材上に形成して
製造を進める、多面づけが行なわれている。このような
内層回路基板のリード電極と、これに接続すべき他の回
路端子などとの電気的な接続を達成するために、従来、
各リード電極領域上に異方導電性シートを介在させるこ
とが行なわれている。この異方導電性シートは、厚さ方
向にのみ導電性を示すもの、または加圧されたときに厚
さ方向にのみ導電性を示す多数の加圧導電性導電部を有
するものであり、種々の構造のものが、例えば特公昭5
6−48951号公報、特開昭51−93393号公
報、特開昭53−147772号公報、特開昭54−1
46873号公報などにより知られている。上記異方導
電性シートはいずれもシート上任意の点に加圧導電性導
電部を有するものであった。
2. Description of the Related Art Generally, a circuit board such as a printed circuit board tends to have an increased number of electrodes and a higher density, and the wiring tends to be complicated accordingly. For this reason, a multilayer substrate including an inner layer circuit board and an outer layer circuit board has been widely used. In addition, in order to improve productivity, in manufacturing, a plurality of identical circuit boards are formed on one base material to proceed with the manufacturing, which is a multifaceted process. In order to achieve electrical connection between the lead electrode of the inner layer circuit board and other circuit terminals to be connected to the lead electrode, conventionally,
An anisotropic conductive sheet is interposed on each lead electrode region. This anisotropically conductive sheet is one that exhibits conductivity only in the thickness direction, or one that has a large number of pressed conductive parts that exhibit conductivity only in the thickness direction when pressed, and various For example, Japanese Patent Publication Sho 5
6-48951, JP-A-51-93393, JP-A-53-147772, JP-A-54-1.
It is known from Japanese Patent No. 46873. Each of the above anisotropic conductive sheets had a pressure conductive portion at any point on the sheet.

【0003】[0003]

【発明が解決しようとする課題】しかし、従来のシート
上任意の点に加圧導電性導電部を有する異方導電性シー
トは、内層回路基板のような配線部が露出している回路
基板の検査に対しては、必ずしも十分な性能を発揮し得
なかった。さらに、近年における内層回路基板の配線密
度の微細化および製造の際の多面づけに伴なうサイズの
増大化傾向に対しては、従来の異方導電性シートによる
検査が益々困難なものとなってきている。本発明は以上
のような問題点を解決するものであって、その目的は、
検査対象である回路基板におけるリード電極などの被検
査電極が電極ピッチ微小であり、かつ微細で高密度の複
雑なパターンのものであり、これらのリード電極に接続
された微細な配線が露出されている場合にも、当該回路
基板について所要の電気的接続を確実に達成することが
でき、従って接続信頼性が高く、しかも所要の位置精度
を確保しながら当該回路基板の検査を十分に行なうこと
ができる異方導電性シートを容易に、かつ、高い精度で
製造することのできる方法を提供することにある。
However, an anisotropic conductive sheet having a pressure conductive conductive portion at an arbitrary point on a conventional sheet is used for a circuit board such as an inner layer circuit board where a wiring portion is exposed. It did not always exhibit sufficient performance for inspection. Furthermore, with respect to the tendency of increasing the wiring density of the inner layer circuit board in recent years and increasing the size accompanying the multifaceting during manufacturing, it becomes more and more difficult to inspect using a conventional anisotropic conductive sheet. Is coming. The present invention solves the above problems, and its purpose is to:
The electrodes to be inspected such as the lead electrodes on the circuit board to be inspected have a fine electrode pitch and have a fine and high-density complex pattern, and the fine wiring connected to these lead electrodes is exposed. In this case, the required electrical connection can be reliably achieved for the circuit board, and therefore the connection reliability is high, and the circuit board can be sufficiently inspected while ensuring the required positional accuracy. An object of the present invention is to provide a method capable of easily producing an anisotropic conductive sheet that can be produced with high accuracy.

【0004】[0004]

【課題を解決するための手段】本発明の異方導電性シー
トの製造方法は、検査対象回路基板の被検査電極に対応
した開口部を有する一対の絶縁シート体を用い、当該一
対の絶縁シート体の間に、磁性を有する導電性粒子を含
有する高分子材料よりなる成形材料層を配し、当該成形
材料層に対してその厚さ方向に平行磁場をかけてその磁
力によって導電粒子を移動させながら加圧して成形材料
層の高分子材料を流動させてその外形を変化させると共
に、高分子材料を硬化させて高分子物質とし、これによ
り、異方導電性シート体を形成すると共に、前記一対の
絶縁シート体のうちの少なくとも一方が当該異方導電性
シート体と接合された状態とすることを特徴とする。
A method of manufacturing an anisotropic conductive sheet according to the present invention uses a pair of insulating sheet bodies having openings corresponding to electrodes to be inspected of a circuit board to be inspected, and the pair of insulating sheets. A molding material layer made of a polymer material containing conductive particles having magnetism is arranged between the bodies, and a parallel magnetic field is applied to the molding material layer in the thickness direction to move the conductive particles by the magnetic force. While applying pressure, the polymeric material of the molding material layer is caused to flow to change its outer shape, and the polymeric material is cured to form a polymeric substance, thereby forming an anisotropic conductive sheet body, and At least one of the pair of insulating sheet members is joined to the anisotropic conductive sheet member.

【0005】また、本発明の異方導電性シートの製造方
法は、検査対象回路基板の被検査電極に対応した開口部
を有する一対の絶縁シート体に当該開口部が覆われるよ
う開口部被覆シートを設け、この開口部被覆シートが設
けられた一対の絶縁シート体を、対応する開口部が向き
合うように位置合わせし、この状態で、磁性を有する導
電性粒子を含有する高分子材料よりなる成形材料層を配
し、開口部被覆シートが設けられた一対の絶縁シート体
と成形材料層とからなる混合物シートを加圧して成形材
料層の高分子材料を流動させてその外形を変化させると
共に、当該成形材料層に対してその厚さ方向に平行磁場
をかけてその磁力によって導電粒子を移動させながら高
分子材料を硬化させて高分子物質とし、これにより、異
方導電性シート体に、開口部被覆シートが設けられた絶
縁シート体が一体的に接合された異方導電性シート用材
料層一体化物を得、この異方導電性シート用材料層一体
化物から両方の開口部被覆シートを除去すると共に片方
の絶縁シート体を除去することを特徴とする。
Further, in the method for manufacturing an anisotropic conductive sheet of the present invention, the opening covering sheet is covered by a pair of insulating sheet bodies having openings corresponding to the electrodes to be inspected of the circuit board to be inspected. And a pair of insulating sheet bodies provided with the opening covering sheet are aligned so that the corresponding openings face each other, and in this state, a molding made of a polymer material containing conductive particles having magnetism is formed. A material layer is arranged, and a mixture sheet composed of a pair of insulating sheet bodies provided with an opening covering sheet and a molding material layer is pressed to flow the polymer material of the molding material layer and change its outer shape, By applying a parallel magnetic field to the molding material layer in the thickness direction and moving the conductive particles by the magnetic force, the polymer material is cured into a polymer substance, whereby an anisotropic conductive sheet body is formed. , An anisotropic conductive sheet material layer integrated product in which an insulating sheet body provided with an opening covering sheet is integrally joined, and both opening covering sheets are obtained from the anisotropic conductive sheet material layer integrated product And removing one insulating sheet body.

【0006】本発明の方法によれば、製造される異方導
電性シートは、絶縁部により相互に絶縁された状態で厚
さ方向に伸びる複数の導電部を有し、当該導電部が一面
側において検査対象回路基板の被検査電極に対応した突
出部を形成し、かつ絶縁性で弾性を有する高分子物質中
に導電性粒子が密に充填されてなる異方導電性シート体
と、この異方導電性シート体の前記一面側に一体的に接
合された、検査対象回路基板の被検査電極に対応した開
口部を有する絶縁シート体とよりなり、前記異方導電性
シート体の導電部に係る突出部が前記絶縁シート体の開
口部中に突出して当該突出部の端部の表面が絶縁シート
体の表面とほぼ同一レベルとされているものを製造する
ことができる。従って、検査対象である回路基板におけ
るリード電極などの被検査電極が電極ピッチ微小であ
り、かつ微細で高密度の複雑なパターンのものであり、
これらのリード電極に接続された微細な配線が露出され
ている場合にも、当該回路基板について所要の電気的接
続を確実に達成することができ、従って接続信頼性が高
く、しかも所要の位置精度を確保しながら当該回路基板
の検査を十分に行なうことができる異方導電性シート
を、容易に、かつ高い精度に製造することができる。
According to the method of the present invention, the anisotropic conductive sheet produced has a plurality of conductive portions extending in the thickness direction while being insulated from each other by the insulating portions, and the conductive portions are on one surface side. And an anisotropic conductive sheet body in which conductive particles are densely filled in a polymeric substance which is insulative and elastic and which forms a protrusion corresponding to the electrode to be inspected of the circuit board to be inspected. A conductive sheet integrally bonded to the one surface side of the anisotropic conductive sheet body, the insulating sheet body having an opening corresponding to the electrode to be inspected of the circuit board to be inspected. It is possible to manufacture a structure in which such a protruding portion protrudes into the opening of the insulating sheet body and the surface of the end portion of the protruding portion is at substantially the same level as the surface of the insulating sheet body. Therefore, the electrodes to be inspected such as the lead electrodes on the circuit board to be inspected have a fine electrode pitch, and have a fine and high-density complex pattern,
Even if the fine wiring connected to these lead electrodes is exposed, it is possible to reliably achieve the required electrical connection of the circuit board, and therefore the connection reliability is high and the required position accuracy is high. It is possible to easily and highly accurately manufacture the anisotropic conductive sheet capable of sufficiently inspecting the circuit board while ensuring the above.

【0007】[0007]

【発明の実施の形態】以下、図面によって本発明を具体
的に説明する。先ず、本発明の方法によって製造される
異方導電性シートの構成について説明する。図9および
図10は、本発明の方法によって製造される異方導電性
シート11の具体的構成例を示すものであって、絶縁シ
ート体1が異方導電性シート体8の一面上に配置されて
一体的に接合されている。この異方導電性シート体8に
おいては、その厚さ方向に伸びる複数の導電部10が、
絶縁部12により相互に絶縁された状態で、検査対象回
路基板の被検査電極に対応して配置され、各導電部10
は絶縁シート体1の開口部2中に突出し、この突出した
導電部10の端部の表面は、絶縁シート体1の表面とほ
ぼ同一レベルになる形状で形成されている。
BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below with reference to the drawings. First, the structure of the anisotropic conductive sheet manufactured by the method of the present invention will be described. 9 and 10 show a specific example of the configuration of the anisotropic conductive sheet 11 manufactured by the method of the present invention, in which the insulating sheet body 1 is arranged on one surface of the anisotropic conductive sheet body 8. Are joined together. In this anisotropic conductive sheet body 8, a plurality of conductive portions 10 extending in the thickness direction are
The conductive portions 10 are arranged corresponding to the electrodes to be inspected on the circuit board to be inspected while being insulated from each other by the insulating portion 12.
Is projected into the opening 2 of the insulating sheet body 1, and the surface of the protruding end portion of the conductive portion 10 is formed in a shape having substantially the same level as the surface of the insulating sheet body 1.

【0008】各導電部10は、絶縁性で弾性を有する高
分子物質4中に導電性粒子5が密に充填されて構成さ
れ、通常、加圧により抵抗値が減少する加圧導電性を有
する。導電部10における導電性粒子5の充填率は3体
積%以上30体積%以下、好ましくは5体積%以上20
体積%以下である。なお、導電性粒子5の充填率が低い
ときは、加圧力を大きくしても抵抗値が減少せず、従っ
て信頼性の高い電気的接続が困難となる。導電部10の
厚さDは、0.1〜5mm、特に0.3〜3mmである
ことが好ましい。導電部10の厚さDがこの範囲にあれ
ば、小さな圧力でも有効な導電性が確実に得られる。
Each of the conductive parts 10 is formed by densely filling conductive particles 5 in a polymeric substance 4 which is insulative and has elasticity, and usually has a pressure conductivity in which a resistance value is reduced by pressurization. . The filling rate of the conductive particles 5 in the conductive portion 10 is 3 vol% or more and 30 vol% or less, preferably 5 vol% or more 20
Volume% or less. When the filling rate of the conductive particles 5 is low, the resistance value does not decrease even if the applied pressure is increased, and thus reliable electrical connection becomes difficult. The thickness D of the conductive portion 10 is preferably 0.1 to 5 mm, particularly 0.3 to 3 mm. If the thickness D of the conductive portion 10 is within this range, effective conductivity can be reliably obtained even with a small pressure.

【0009】また、絶縁シート体1の厚さdは、実用的
には0.01〜0.8mm、特に好ましくは0.02〜
0.2mmである。絶縁シート体1の厚さdがこの範囲
にあれば、異方導電性シート体8の製造における成形の
際に生じる成形歪みに基づく導電部の位置ずれを回路基
板検査に十分耐える範囲内に抑えることができ、なおか
つ、小さな圧力でも有効な導電性が確実に得られる。絶
縁シート体1の開口部2中に突出した導電部10の高さ
hは、絶縁シート体1の厚さdと同一であることが好ま
しい。
The thickness d of the insulating sheet 1 is practically 0.01 to 0.8 mm, particularly preferably 0.02.
It is 0.2 mm. When the thickness d of the insulating sheet body 1 is within this range, the displacement of the conductive portion due to the molding strain generated during the molding in the production of the anisotropic conductive sheet body 8 is suppressed within the range that can sufficiently withstand the circuit board inspection. In addition, effective conductivity can be reliably obtained even with a small pressure. The height h of the conductive portion 10 protruding into the opening 2 of the insulating sheet body 1 is preferably the same as the thickness d of the insulating sheet body 1.

【0010】導電部10を構成する導電性粒子5として
は、例えばニッケル、鉄、コバルトなどの磁性を示す金
属の粒子もしくはこれらの合金の粒子、またはこれらの
粒子に金、銀、パラジウム、ロジウムなどのメッキを施
したもの、非磁性金属粒子もしくはガラスビーズなどの
無機質粒子またはポリマー粒子にニッケル、コバルトな
どの導電性磁性体のメッキを施したものなどを挙げるこ
とができる。製造コストの低減化を図る観点からは、特
にニッケル、鉄またはこれらの合金の粒子が好ましく、
また接触抵抗が小さいなどの電気的特性の点で金メッキ
された粒子を好ましく用いることができる。
The conductive particles 5 constituting the conductive portion 10 are, for example, particles of a metal exhibiting magnetism such as nickel, iron and cobalt, particles of an alloy thereof, or gold, silver, palladium, rhodium and the like. And non-magnetic metal particles or glass beads or other inorganic particles or polymer particles plated with a conductive magnetic material such as nickel or cobalt. From the viewpoint of reducing the manufacturing cost, particles of nickel, iron or alloys thereof are particularly preferable,
In addition, gold-plated particles can be preferably used in terms of electrical characteristics such as low contact resistance.

【0011】導電性粒子5の粒径は、導電部10におい
て導電性粒子間の電気的な接触を十分なものとし、かつ
導電部10の接触安定性を十分保つ観点から、10〜4
00μmが好ましく、特に20〜100μmが好まし
い。
The particle size of the conductive particles 5 is 10 to 4 from the viewpoint of ensuring sufficient electrical contact between the conductive particles in the conductive portion 10 and maintaining sufficient contact stability of the conductive portion 10.
00 μm is preferable, and 20 to 100 μm is particularly preferable.

【0012】導電部10を構成する絶縁性で弾性を有す
る高分子物質としては、架橋構造の高分子物質が好まし
く、かかる架橋構造の高分子物質を得るために用いるこ
とができる未架橋の高分子材料としては、シリコーンゴ
ム、ポリブタジエン、天然ゴム、ポリイソプレン、スチ
レン−ブタジエン共重合体ゴム、アクリロニトリル−ブ
タジエン共重合体ゴム、エチレン−プロピレン共重合体
ゴム、ウレタンゴム、ポリエステル系ゴム、クロロプレ
ンゴム、エピクロルヒドリンゴムなどを挙げることがで
きる。
As the insulating and elastic polymer substance forming the conductive portion 10, a polymer substance having a crosslinked structure is preferable, and an uncrosslinked polymer that can be used to obtain the polymer substance having such a crosslinked structure. Materials include silicone rubber, polybutadiene, natural rubber, polyisoprene, styrene-butadiene copolymer rubber, acrylonitrile-butadiene copolymer rubber, ethylene-propylene copolymer rubber, urethane rubber, polyester rubber, chloroprene rubber, epichlorohydrin. Examples thereof include rubber.

【0013】また、絶縁シート体1としては、異方導電
性シート体8の導電部10を構成するものとして挙げら
れた前記の絶縁性で弾性を有する高分子物質や、熱可塑
性樹脂、例えばポリエチレンテレフタレート樹脂、塩化
ビニル樹脂、ポリスチレン樹脂、ポリアクリロニトリル
樹脂、ポリエチレン樹脂、アクリル樹脂、ポリブタジエ
ン樹脂などや、熱硬化性樹脂、例えばポリイミド樹脂、
エポキシ樹脂などが用いられる。
Further, as the insulating sheet body 1, the above-mentioned insulating and elastic polymer substance, which is mentioned as a constituent of the conductive portion 10 of the anisotropic conductive sheet body 8, or a thermoplastic resin such as polyethylene. Terephthalate resin, vinyl chloride resin, polystyrene resin, polyacrylonitrile resin, polyethylene resin, acrylic resin, polybutadiene resin, etc., thermosetting resin such as polyimide resin,
Epoxy resin or the like is used.

【0014】次に、本発明の異方導電性シートの製造方
法について説明する。図1は、検査対象回路基板の被検
査電極に対応した開口部が形成された状態の2枚の絶縁
シート体を示す説明用斜視図、図2は同じく説明用断面
図、図3は、開口部が形成された2枚の絶縁シート体に
粘着シートが貼付された状態を示す説明用断面図、図4
は、磁性を有する導電性粒子と高分子材料との混合物か
らなる成形材料の層を、粘着シートが貼付された2枚の
絶縁シート体の間に配置した状態を示す説明用断面図、
図5は、図4の成形材料の層に、加圧力および平行磁場
を作用させる状態を示す説明用断面図である。
Next, a method for manufacturing the anisotropic conductive sheet of the present invention will be described. 1 is an explanatory perspective view showing two insulating sheet bodies in which openings corresponding to electrodes to be inspected of a circuit board to be inspected are formed, FIG. 2 is a sectional view for the same explanation, and FIG. 4 is an explanatory cross-sectional view showing a state in which the adhesive sheet is attached to the two insulating sheet bodies in which the parts are formed.
Is an explanatory cross-sectional view showing a state in which a layer of a molding material made of a mixture of conductive particles having magnetic properties and a polymer material is arranged between two insulating sheet bodies to which an adhesive sheet is attached,
FIG. 5 is an explanatory sectional view showing a state in which a pressing force and a parallel magnetic field are applied to the layer of the molding material of FIG.

【0015】図1および図2に示すように、絶縁シート
体1には、検査対象回路基板の被検査電極に対応する部
分に、被検査電極の幅とほぼ同一の径を有する円形の開
口部2が、NC制御のドリル穴あけ装置、またはエキシ
マレーザー光を光源とするレーザー加工装置などを用い
て形成されている。このような絶縁シート体1を2枚用
意する。6はガイド穴である。
As shown in FIGS. 1 and 2, in the insulating sheet body 1, a circular opening having a diameter substantially the same as the width of the electrode to be inspected is formed in a portion of the circuit board to be inspected corresponding to the electrode to be inspected. 2 is formed by using an NC controlled drilling device, a laser processing device using an excimer laser beam as a light source, or the like. Two such insulating sheet bodies 1 are prepared. 6 is a guide hole.

【0016】次に、図3に示すように、これらの絶縁シ
ート体1の開口部2上およびその周辺を、表面が平滑で
厚みが均一な粘着シート3で覆い、ガイドピンなどによ
り、2枚の絶縁シート体1の対応する開口部2が向き合
うように位置合わせをした状態で、図4に示すように、
磁性を有する導電性粒子5と、高分子物質4となる高分
子材料4Aとの混合物からなる成形材料の層(「混合物
シート」ともいう。)を形成して異方導電性シート用材
料層20を得る。
Next, as shown in FIG. 3, an adhesive sheet 3 having a smooth surface and a uniform thickness covers the opening 2 of the insulating sheet body 1 and its periphery, and two sheets are formed by a guide pin or the like. In a state in which the corresponding openings 2 of the insulating sheet body 1 are aligned so as to face each other, as shown in FIG.
An anisotropic conductive sheet material layer 20 is formed by forming a layer of a molding material (also referred to as a “mixture sheet”) made of a mixture of magnetically conductive particles 5 and a polymer material 4A serving as a polymer substance 4. To get

【0017】次いで、図5に示すように、2枚の絶縁シ
ート体1と成形材料の層からなる異方導電性シート用材
料層20を加圧して成形材料を流動させて当該混合物シ
ートの外形を変化させつつ、平行磁場を当該混合物シー
トの厚さ方向にかけて、その磁力によって導電性粒子5
を当該混合物シートの厚さ方向に配向させながら当該成
形材料を硬化させて、2枚の絶縁シート体1と硬化した
成形材料層が一体化した図8に示す異方導電性シート用
材料層一体化物20Aを製造する。なお、混合物シート
の外形を変化させた後に成形材料を硬化させるための手
段としては、一般的には架橋が用いられる。次に、図9
に示すように、粘着シート3の両方および絶縁シート体
1の片方を除去して異方導電性シート11を製造する。
Next, as shown in FIG. 5, the anisotropic conductive sheet material layer 20 composed of the two insulating sheet bodies 1 and the layer of the molding material is pressed to flow the molding material and the outer shape of the mixture sheet. And a parallel magnetic field is applied in the thickness direction of the mixture sheet while changing the
The anisotropically conductive sheet material layer integrated as shown in FIG. 8 in which two insulating sheet bodies 1 and the cured molding material layer are integrated by curing the molding material while orienting the mixture sheet in the thickness direction of the mixture sheet. Compound 20A is manufactured. Cross-linking is generally used as a means for curing the molding material after changing the outer shape of the mixture sheet. Next, FIG.
As shown in FIG. 3, both the adhesive sheet 3 and one of the insulating sheet bodies 1 are removed to manufacture the anisotropic conductive sheet 11.

【0018】図5の金型は、各々電磁石を構成する上型
21と下型22よりなり、上型21と下型22には、検
査対象回路基板の被検査電極に対応したパターンの強磁
性体部分Mと、それ以外の非磁性体部分Nとよりなる、
表面が平坦面である磁極板23および磁極板24が設け
られている。
The mold shown in FIG. 5 is composed of an upper mold 21 and a lower mold 22, each of which constitutes an electromagnet. The upper mold 21 and the lower mold 22 have a ferromagnetic pattern of a pattern corresponding to the electrodes to be inspected of the circuit board to be inspected. The body portion M and the other non-magnetic body portion N,
A magnetic pole plate 23 and a magnetic pole plate 24 having flat surfaces are provided.

【0019】磁極板23および磁極板24の代わりに、
図6に示すように、検査対象回路基板の被検査電極に対
応したパターンの強磁性体部分Mと、それ以外の非磁性
体部分Nとよりなり、当該上型21の下面および下型2
2の上面において、強磁性体部分Mが非磁性体部分Nよ
り突出した磁性板25および26を用いることもでき
る。この場合には、異方導電性シート用材料層20に対
しては、検査対象回路基板の被検査電極に対応して配置
された導電部において、より強い平行磁場が作用される
ことになる。
Instead of the pole plate 23 and the pole plate 24,
As shown in FIG. 6, a ferromagnetic material portion M having a pattern corresponding to the electrodes to be inspected of the circuit board to be inspected and a non-magnetic material portion N other than the pattern are formed.
It is also possible to use the magnetic plates 25 and 26 in which the ferromagnetic material portion M projects from the non-magnetic material portion N on the upper surface of 2. In this case, a stronger parallel magnetic field is applied to the anisotropic conductive sheet material layer 20 in the conductive portion arranged corresponding to the electrode to be inspected of the circuit board to be inspected.

【0020】また、磁極板23および磁極板24の代わ
りに、図7に示すように、表面が平滑で厚みの均一な強
磁性体の板27および28を用いることもできる。この
場合には、異方導電性シート用材料層20の任意の点に
おいて均一な平行磁場が作用されることになる。この場
合、形成された異方導電性シートにおける検査対象回路
基板の被検査電極に対応して配置された導電部における
電気抵抗値は、磁極板23および磁極板24または磁極
板25および磁極板26を用いて成形した場合に比べ
て、やや高い値を示す。
Instead of the magnetic pole plate 23 and the magnetic pole plate 24, ferromagnetic plates 27 and 28 having a smooth surface and a uniform thickness can be used as shown in FIG. In this case, a uniform parallel magnetic field is applied at any point on the anisotropic conductive sheet material layer 20. In this case, the electric resistance value in the conductive portion of the formed anisotropically conductive sheet, which is arranged corresponding to the electrode to be inspected of the circuit board to be inspected, is the magnetic pole plate 23 and the magnetic pole plate 24 or the magnetic pole plate 25 and the magnetic pole plate 26. It shows a slightly higher value than the case of molding using.

【0021】以下、本発明の実施例を説明するが、本発
明はこれらの実施例に限定されるものではない。
Examples of the present invention will be described below, but the present invention is not limited to these examples.

【0022】[0022]

【実施例】厚さ0.05mm、縦300mm、横400
mmのポリエチレンテレフタレートシートを2枚重ね
て、NC制御のドリル穴あけ装置で、検査対象回路基板
の被検査電極に対応した位置に、0.2mmの径を有す
る穴による開口部2と、シートの四隅に3.0mmの径
を有するガイド穴6を4点あけ(図1、2参照)、2枚
の絶縁シート体1を形成した。次に、この2枚の絶縁シ
ート体1のガイド穴6を除く開口部2上およびその周辺
を、それぞれ厚さ0.05mmのポリイミド製粘着シー
ト3で覆った(図3参照)。次に、2枚の絶縁シート体
1のうち1枚には、その表面を#600のサンドペーパ
ーで粗面化した後、その表面に熱硬化型のシリコーンゴ
ムを薄く塗布した。
[Example] Thickness 0.05 mm, length 300 mm, width 400
2 sheets of polyethylene terephthalate sheet are piled up, and an NC controlled drilling device is used to form an opening 2 with a hole having a diameter of 0.2 mm at the position corresponding to the electrode to be inspected on the circuit board to be inspected and four corners of the sheet. Four guide holes 6 having a diameter of 3.0 mm were punched (see FIGS. 1 and 2) to form two insulating sheet bodies 1. Next, the opening 2 excluding the guide hole 6 of the two insulating sheet bodies 1 and the periphery thereof were covered with a polyimide adhesive sheet 3 having a thickness of 0.05 mm (see FIG. 3). Next, the surface of one of the two insulating sheet bodies 1 was roughened with # 600 sandpaper, and a thermosetting silicone rubber was thinly applied to the surface.

【0023】次に、室温硬化型シリコーンゴムに平均粒
径40μmの金メッキしたニッケルよりなる磁性体導電
性粒子5を12体積%となる割合で混合してなる成形材
料を調製し、これを上記の一対の絶縁シート体間に配置
して異方導電性シート用材料層20を形成し、これを金
型のキャビティ内に配置した。この金型は、各々電磁石
を構成する上型21と下型22よりなり、上型21と下
型22には、検査対象回路基板の被検査電極に対応した
パターンの強磁性体部分Mと、それ以外の非磁性体部分
Nとよりなる、表面が平坦面である磁極板23および磁
極板24が設けられたものである。この磁極板23およ
び磁極板24の強磁性体部分Mと、異方導電性シート用
材料層20の絶縁シート体1の開口部2とが重なるよう
にガイドピンにより位置合わせを行なった(図5参
照)。この状態で上型21と下型22の電磁石を動作さ
せ、これにより異方導電性シート用材料層20の厚さ方
向に加圧力と平行磁場を作用させて、この状態で60℃
で8時間放置して硬化させた後、ポリイミド製粘着テー
プ3および一対の絶縁シート体1の片方を除去し、1枚
の絶縁シート体1と、硬化した成形材料による異方導電
性シート体8が一体化した異方導電性シート11を製造
した。
Next, a molding material is prepared by mixing room temperature curable silicone rubber with magnetic conductive particles 5 made of gold-plated nickel having an average particle diameter of 40 μm at a ratio of 12% by volume, and this is prepared as described above. The anisotropic conductive sheet material layer 20 was formed by arranging it between a pair of insulating sheet bodies, and this was arranged in the cavity of the mold. This mold is composed of an upper mold 21 and a lower mold 22 which respectively form an electromagnet, and the upper mold 21 and the lower mold 22 each have a ferromagnetic portion M having a pattern corresponding to an electrode to be inspected of a circuit board to be inspected. The magnetic pole plate 23 and the magnetic pole plate 24, which are made of the other non-magnetic material portion N and have a flat surface, are provided. The ferromagnetic pin portions M of the magnetic pole plate 23 and the magnetic pole plate 24 and the openings 2 of the insulating sheet body 1 of the anisotropic conductive sheet material layer 20 were aligned by the guide pin so as to overlap with each other (FIG. 5). reference). In this state, the electromagnets of the upper die 21 and the lower die 22 are operated, thereby applying a pressing force and a parallel magnetic field in the thickness direction of the anisotropic conductive sheet material layer 20, and in this state, 60 ° C.
After being left for 8 hours to cure, the polyimide adhesive tape 3 and one of the pair of insulating sheet bodies 1 are removed, and one insulating sheet body 1 and an anisotropic conductive sheet body 8 made of the cured molding material are removed. An anisotropic conductive sheet 11 was manufactured.

【0024】以上の実施例で得られた異方導電性シート
を用いて、図11に示した構成で電気的検査を行なっ
た。図11において、61は検査ヘッド、62は異方導
電性シート、63はオフグリッドアダプター、64は検
査対象のプリント回路基板、64Aは被検査電極、65
は検査電極である。この例の異方導電性シート62は、
厚さ方向に複数の導電部を有し、表面が平坦なものであ
る。検査対象のプリント回路基板64の配線部はすべて
露出されており、配線および被検査電極の最小ピッチが
0.5mmと微細であったが、十分な性能をもって検査
対象回路基板の電気的導通およびショートの検査を行な
うことができた。
Using the anisotropic conductive sheet obtained in the above example, an electrical inspection was conducted with the constitution shown in FIG. In FIG. 11, 61 is an inspection head, 62 is an anisotropic conductive sheet, 63 is an off-grid adapter, 64 is a printed circuit board to be inspected, 64A is an electrode to be inspected, 65
Is an inspection electrode. The anisotropic conductive sheet 62 of this example is
It has a plurality of conductive parts in the thickness direction and has a flat surface. All the wiring parts of the printed circuit board 64 to be inspected are exposed, and the minimum pitch of the wiring and the electrodes to be inspected was as small as 0.5 mm, but the electrical continuity and short circuit of the circuit board to be inspected with sufficient performance. Could be inspected.

【0025】[0025]

【発明の効果】本発明の方法によれば、製造される異方
導電性シートは、絶縁部により相互に絶縁された状態で
厚さ方向に伸びる複数の導電部を有し、当該導電部が一
面側において検査対象回路基板の被検査電極に対応した
突出部を形成し、かつ絶縁性で弾性を有する高分子物質
中に導電性粒子が密に充填されてなる異方導電性シート
体と、この異方導電性シート体の前記一面側に一体的に
接合された、検査対象回路基板の被検査電極に対応した
開口部を有する絶縁シート体とよりなり、前記異方導電
性シート体の導電部に係る突出部が前記絶縁シート体の
開口部中に突出して当該突出部の端部の表面が絶縁シー
ト体の表面とほぼ同一レベルとされているものを製造す
ることができる。従って、検査対象である回路基板にお
けるリード電極などの被検査電極が電極ピッチ微小であ
り、かつ微細で高密度の複雑なパターンのものであり、
これらのリード電極に接続された微細な配線が露出され
ている場合にも、当該回路基板について所要の電気的接
続を確実に達成することができ、従って接続信頼性が高
く、しかも所要の位置精度を確保しながら当該回路基板
の検査を十分に行なうことができる異方導電性シート
を、容易に、かつ高い精度に製造することができる。
According to the method of the present invention, the anisotropic conductive sheet produced has a plurality of conductive portions extending in the thickness direction while being insulated from each other by the insulating portions, and the conductive portions are An anisotropic conductive sheet body, in which conductive particles are densely filled in a polymeric substance having insulation and elasticity, forming a protrusion corresponding to the electrode to be inspected of the circuit board to be inspected on one surface side, The anisotropic conductive sheet body is integrally joined to the one surface side, and the insulating sheet body has an opening corresponding to the electrode to be inspected of the circuit board to be inspected. It is possible to manufacture a structure in which the projecting part of the projecting part projects into the opening of the insulating sheet body and the surface of the end of the projecting part is at substantially the same level as the surface of the insulating sheet body. Therefore, the electrodes to be inspected such as the lead electrodes on the circuit board to be inspected have a fine electrode pitch, and have a fine and high-density complex pattern,
Even if the fine wiring connected to these lead electrodes is exposed, it is possible to reliably achieve the required electrical connection of the circuit board, and therefore the connection reliability is high and the required position accuracy is high. It is possible to easily and highly accurately manufacture the anisotropic conductive sheet capable of sufficiently inspecting the circuit board while ensuring the above.

【図面の簡単な説明】[Brief description of drawings]

【図1】本発明の方法において用いられる、検査対象回
路基板の被検査電極に対応した開口部が形成された状態
の2枚の絶縁シート体を示す説明用斜視図である。
FIG. 1 is an explanatory perspective view showing two insulating sheet bodies used in a method of the present invention in a state where openings corresponding to electrodes to be inspected of an inspection target circuit board are formed.

【図2】本発明の方法において用いられる、検査対象回
路基板の被検査電極に対応した開口部が形成された状態
の2枚の絶縁シート体を示す説明用断面図である。
FIG. 2 is an explanatory cross-sectional view showing two insulating sheet bodies used in the method of the present invention in a state where openings corresponding to electrodes to be inspected of an inspection target circuit board are formed.

【図3】2枚の絶縁シート体に、粘着シートが貼付され
た状態を示す説明用断面図である。
FIG. 3 is an explanatory cross-sectional view showing a state in which an adhesive sheet is attached to two insulating sheet bodies.

【図4】磁性を有する導電性粒子と高分子材料との混合
物からなる成形材料の層を、粘着シートが貼付された2
枚の絶縁シート体の間に配置した状態を示す説明用断面
図である。
FIG. 4 is a view showing a case where a pressure-sensitive adhesive sheet is attached to a layer of a molding material made of a mixture of magnetic conductive particles and a polymer material.
It is an explanatory sectional view showing a state of being arranged between a plurality of insulating sheet bodies.

【図5】図4の成形材料の層に、加圧力および平行磁場
を作用させる状態を示す説明用断面図である。
5 is an explanatory cross-sectional view showing a state in which a pressing force and a parallel magnetic field are applied to the layer of the molding material of FIG.

【図6】他の磁極板を有する金型を用いた場合におけ
る、図5と同様の状態を示す説明用断面図である。
FIG. 6 is an explanatory sectional view showing a state similar to that of FIG. 5 when a mold having another magnetic pole plate is used.

【図7】磁極板の代わりに強磁性体の板を有する金型を
用いた場合における、図5と同様の状態を示す説明用断
面図である。
FIG. 7 is an explanatory cross-sectional view showing a state similar to that of FIG. 5 when a die having a ferromagnetic plate is used instead of the magnetic pole plate.

【図8】絶縁シート体と異方導電性シート体とが一体化
成形された異方導電性シート用材料層一体化物を示す説
明用断面図である。
FIG. 8 is an explanatory cross-sectional view showing an integrated material layer for anisotropically conductive sheet in which an insulating sheet body and an anisotropically conductive sheet body are integrally molded.

【図9】図8の異方導電性シート用材料層一体化物より
粘着シートの両方および絶縁シート体の片方が除去され
て、完成した異方導電性シートを示す説明用断面図であ
る。
9 is an explanatory cross-sectional view showing a completed anisotropically conductive sheet obtained by removing both the pressure-sensitive adhesive sheet and one of the insulating sheet members from the material layer integrated product for anisotropically conductive sheet of FIG.

【図10】図8の異方導電性シート用材料層一体化物よ
り粘着シートの両方および絶縁シート体の片方が除去さ
れて、完成した異方導電性シートを示す説明用斜視図で
ある。
FIG. 10 is an explanatory perspective view showing a completed anisotropic conductive sheet obtained by removing both the pressure sensitive adhesive sheet and one of the insulating sheet bodies from the material layer integrated product for anisotropic conductive sheet of FIG.

【図11】実施例において製造された異方導電性シート
を用いた電気的検査を行なう装置の構成を示す説明用断
面図である。
FIG. 11 is an explanatory cross-sectional view showing the configuration of an apparatus that performs an electrical inspection using the anisotropic conductive sheet manufactured in the example.

【符号の説明】[Explanation of symbols]

1 絶縁シート体 2 開口部 3 粘着シート 4 絶縁性で弾性を有する高分子物質 4A 高分子材料 5 導電性粒子 6 ガイド穴 7 スペーサー 8 異方導電性シート体 10 導電部 11 異方導電性シート 12 絶縁部 20 異方導電性シート用材料層 20A 異方導電性シート用材料層一体化物 21 上型 22 下型 23 磁極板 24 磁極板 25 磁極板 26 磁極板 27 磁極板 28 磁極板 M 強磁性体部分 N 非磁性体部分 61 検査ヘッド 62 異方導電性シート 63 オフグリッドアダプター 64 プリント回路基板 64A 被検査電極 65 検査電極 1 Insulation sheet body 2 openings 3 Adhesive sheet 4 Insulating and elastic polymer substances 4A polymer material 5 Conductive particles 6 guide holes 7 Spacer 8 Anisotropically conductive sheet body 10 Conductive part 11 Anisotropically conductive sheet 12 Insulation part 20 Material layer for anisotropic conductive sheet 20A Anisotropically conductive sheet material layer integrated product 21 Upper mold 22 Lower mold 23 Magnetic pole plate 24 pole plate 25 pole plate 26 pole plate 27 Magnetic pole plate 28 Magnetic pole plate M Ferromagnetic part N Non-magnetic material part 61 Inspection head 62 Anisotropically conductive sheet 63 Off-grid adapter 64 printed circuit board 64A Inspected electrode 65 inspection electrodes

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) // B29K 105:16 B29K 105:16 B29L 31:00 B29L 31:00 Fターム(参考) 2G011 AA16 AB06 AB08 AC14 AE01 AE03 2G014 AA02 AA03 AB59 AC06 4F204 AA33 AA45 AB13 AB16 AD05 AD08 AD24 AE03 AE04 AG05 AH36 AM29 FA01 FB01 FB11 FF01 FN11 FN17 FN30 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI theme code (reference) // B29K 105: 16 B29K 105: 16 B29L 31:00 B29L 31:00 F term (reference) 2G011 AA16 AB06 AB08 AC14 AE01 AE03 2G014 AA02 AA03 AB59 AC06 4F204 AA33 AA45 AB13 AB16 AD05 AD08 AD24 AE03 AE04 AG05 AH36 AM29 FA01 FB01 FB11 FF01 FN11 FN17 FN30

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】 検査対象回路基板の被検査電極に対応し
た開口部を有する一対の絶縁シート体を用い、当該一対
の絶縁シート体の間に、磁性を有する導電性粒子を含有
する高分子材料よりなる成形材料層を配し、当該成形材
料層に対してその厚さ方向に平行磁場をかけてその磁力
によって導電粒子を移動させながら加圧して成形材料層
の高分子材料を流動させてその外形を変化させると共
に、高分子材料を硬化させて高分子物質とし、これによ
り、異方導電性シート体を形成すると共に、前記一対の
絶縁シート体のうちの少なくとも一方が当該異方導電性
シート体と接合された状態とすることを特徴とする異方
導電性シートの製造方法。
1. A polymer material comprising a pair of insulating sheet bodies having openings corresponding to electrodes to be inspected of a circuit board to be inspected, and containing conductive particles having magnetism between the pair of insulating sheet bodies. A molding material layer made of, and applying a parallel magnetic field in the thickness direction to the molding material layer to move the conductive particles by the magnetic force and pressurize to flow the polymer material of the molding material layer While changing the outer shape, the polymer material is cured into a polymer substance, thereby forming an anisotropic conductive sheet body, and at least one of the pair of insulating sheet bodies is the anisotropic conductive sheet body. A method for producing an anisotropically conductive sheet, characterized in that the sheet is joined to a body.
【請求項2】 検査対象回路基板の被検査電極に対応し
た開口部を有する一対の絶縁シート体に当該開口部が覆
われるよう開口部被覆シートを設け、この開口部被覆シ
ートが設けられた一対の絶縁シート体を、対応する開口
部が向き合うように位置合わせし、この状態で、磁性を
有する導電性粒子を含有する高分子材料よりなる成形材
料層を配し、開口部被覆シートが設けられた一対の絶縁
シート体と成形材料層とからなる混合物シートを加圧し
て成形材料層の高分子材料を流動させてその外形を変化
させると共に、当該成形材料層に対してその厚さ方向に
平行磁場をかけてその磁力によって導電粒子を移動させ
ながら高分子材料を硬化させて高分子物質とし、これに
より、異方導電性シート体に、開口部被覆シートが設け
られた絶縁シート体が一体的に接合された異方導電性シ
ート用材料層一体化物を得、この異方導電性シート用材
料層一体化物から両方の開口部被覆シートおよび片方の
絶縁シート体を除去することを特徴とする異方導電性シ
ートの製造方法。
2. An opening covering sheet is provided on a pair of insulating sheet bodies having openings corresponding to electrodes to be inspected of a circuit board to be inspected, the pair of insulating sheet bodies being provided with the opening covering sheet. The insulating sheet body is aligned such that the corresponding openings face each other, and in this state, a molding material layer made of a polymer material containing conductive particles having magnetism is arranged, and an opening covering sheet is provided. A mixture sheet composed of a pair of insulating sheet bodies and a molding material layer is pressed to flow the polymer material of the molding material layer to change its outer shape and to be parallel to the molding material layer in its thickness direction. An insulating sheet body in which an opening covering sheet is provided on an anisotropic conductive sheet body by curing a polymer material while moving conductive particles by applying a magnetic field to move the conductive particles. Is obtained by integrally joining the anisotropic conductive sheet material layer integrated product, and removing both opening covering sheets and one insulating sheet body from the anisotropic conductive sheet material layer integrated product. And a method for producing an anisotropically conductive sheet.
【請求項3】 製造される異方導電性シートが、絶縁部
により相互に絶縁された状態で厚さ方向に伸びる複数の
導電部を有し、当該導電部が一面側において検査対象回
路基板の被検査電極に対応した突出部を形成し、かつ絶
縁性で弾性を有する高分子物質中に導電性粒子が密に充
填されてなる異方導電性シート体と、この異方導電性シ
ート体の前記一面側に一体的に接合された、検査対象回
路基板の被検査電極に対応した開口部を有する絶縁シー
ト体とよりなり、前記異方導電性シート体の導電部に係
る突出部が前記絶縁シート体の開口部中に突出して当該
突出部の端部の表面が絶縁シート体の表面とほぼ同一レ
ベルとされているものであることを特徴とする請求項1
または請求項2に記載の異方導電性シートの製造方法。
3. An anisotropic conductive sheet to be produced has a plurality of conductive parts extending in the thickness direction while being insulated from each other by an insulating part, and the conductive parts are on one surface side of a circuit board to be inspected. An anisotropic conductive sheet body, in which conductive particles are densely filled in a polymeric substance having insulating properties and elasticity, which forms a protrusion corresponding to an electrode to be inspected, and the anisotropic conductive sheet body. An insulating sheet body integrally bonded to the one surface side and having an opening corresponding to the electrode to be inspected of the circuit board to be inspected, wherein the protrusion of the conductive portion of the anisotropically conductive sheet body is the insulating layer. 2. The sheet body protruding into the opening of the sheet body, and the surface of the end portion of the projecting portion is at substantially the same level as the surface of the insulating sheet body.
Alternatively, the method for manufacturing the anisotropic conductive sheet according to claim 2.
【請求項4】 一対の絶縁シート体における検査対象回
路基板の検査電極に対応した開口部分に対応して強磁性
体部分を配置した磁極板を使用して、平行磁場をかける
ことを特徴とする請求項1〜請求項3のいずれかに記載
の異方導電性シートの製造方法。
4. A parallel magnetic field is applied by using a magnetic pole plate in which a ferromagnetic material portion is arranged corresponding to an opening portion corresponding to an inspection electrode of a circuit board to be inspected in a pair of insulating sheets. A method for manufacturing the anisotropically conductive sheet according to claim 1.
【請求項5】 表面が平坦面である磁極板を使用するこ
とを特徴とする請求項4に記載の異方導電性シートの製
造方法。
5. The method for producing an anisotropically conductive sheet according to claim 4, wherein a magnetic pole plate having a flat surface is used.
【請求項6】 強磁性体部分を突出させた磁性板を用い
ることを特徴とする請求項4に記載の異方導電性シート
の製造方法。
6. The method for producing an anisotropic conductive sheet according to claim 4, wherein a magnetic plate having a ferromagnetic portion projected is used.
JP2002102631A 2002-04-04 2002-04-04 Method for producing anisotropic conductive sheet Expired - Fee Related JP3589228B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
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Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2002102631A JP3589228B2 (en) 2002-04-04 2002-04-04 Method for producing anisotropic conductive sheet

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP27504293A Division JP3456235B2 (en) 1993-10-06 1993-10-06 Anisotropic conductive sheet, circuit board electrical inspection method and electrical inspection apparatus

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Publication Number Publication Date
JP2003021648A true JP2003021648A (en) 2003-01-24
JP3589228B2 JP3589228B2 (en) 2004-11-17

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7601281B2 (en) * 2004-09-27 2009-10-13 Nitto Denko Corporation Production method of anisotropic conductive sheet
KR101606284B1 (en) 2014-10-29 2016-03-25 주식회사 아이에스시 Electrical connection device having porous insulating sheet with through hole and test socket

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7601281B2 (en) * 2004-09-27 2009-10-13 Nitto Denko Corporation Production method of anisotropic conductive sheet
KR101606284B1 (en) 2014-10-29 2016-03-25 주식회사 아이에스시 Electrical connection device having porous insulating sheet with through hole and test socket
WO2016068541A1 (en) * 2014-10-29 2016-05-06 주식회사 아이에스시 Electrical connector including porous insulation sheet having through-hole and manufacturing method therefor

Also Published As

Publication number Publication date
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