JP2003017828A - Method for cutting board - Google Patents

Method for cutting board

Info

Publication number
JP2003017828A
JP2003017828A JP2001199735A JP2001199735A JP2003017828A JP 2003017828 A JP2003017828 A JP 2003017828A JP 2001199735 A JP2001199735 A JP 2001199735A JP 2001199735 A JP2001199735 A JP 2001199735A JP 2003017828 A JP2003017828 A JP 2003017828A
Authority
JP
Japan
Prior art keywords
cutting
pattern
laser beam
laminated plate
laminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2001199735A
Other languages
Japanese (ja)
Inventor
Nobuyuki Sato
信之 佐藤
Hideaki Fukuju
英明 福寿
Masanobu Yanagihara
昌伸 柳原
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Chemical Corp
Original Assignee
Kyocera Chemical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Chemical Corp filed Critical Kyocera Chemical Corp
Priority to JP2001199735A priority Critical patent/JP2003017828A/en
Publication of JP2003017828A publication Critical patent/JP2003017828A/en
Withdrawn legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a method for cutting board, capable of obtaining boards which are small in percentage of rejects, reducing the wastage of manufacturing facilities to irreducible minimum, very accurately forming a board, even into a complicated shape by cutting in a short time, and producing no swarf. SOLUTION: When a wiring pattern 5a is formed by etching a metal foil 2 on the surface of a laminate 1, a cut pattern 3a is previously formed around the wiring pattern 2a, a wear plate 10 is superposed on the under surface of the laminate 1, and the laminate 1 is irradiated with a laser beam along the cutting pattern 3a, from the side above the top surface of the laminate 1.

Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【発明の属する技術分野】本発明はプリント配線基板等
の積層板の切断方法に係り、更に詳細にはレーザー光線
を用いた積層板の切断方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for cutting a laminated board such as a printed wiring board, and more particularly to a method for cutting a laminated board using a laser beam.

【0002】[0002]

【従来の技術】従来より、プリント配線基板のような積
層板を製造するには、絶縁基板と導体箔とを積層して加
熱下に加圧したものにエッチングなどにより配線パター
ンを形成し、しかる後に切断して1個ずつの製品に切り
分けている。そしてこの切断には、積層板の表面に型板
を押し当てて打ち抜くプレス法や、積層板表面の法線方
向の軸の回りに回転させた細いカッターに当接させて製
品の外周縁を辿りながら切り分けるルーターと呼ばれる
切削装置を用いている。
2. Description of the Related Art Conventionally, in order to manufacture a laminated board such as a printed wiring board, a wiring pattern is formed by laminating an insulating board and a conductor foil and pressurizing them under heating to form a wiring pattern by etching or the like. After that, they are cut into individual products. This cutting is performed by pressing a die plate against the surface of the laminated plate and punching it out, or by contacting with a thin cutter rotated around an axis in the normal direction of the laminated plate surface and tracing the outer peripheral edge of the product. While using a cutting device called a router.

【0003】[0003]

【発明が解決しようとする課題】しかし、プレスやルー
ターを用いる方法では切り分けた製品の外周縁部にバリ
が残ったり、製品の配線パターンを構成する導体箔が剥
がれて不良品が生じるという問題がある。更に、積層板
の内部にガラス繊維やアラミト゛繊維等の補強材が充填さ
れていると、プレスやルーターの刃を傷めやすいという
問題がある。また、ルーターでは線状に切削してゆくの
で切断に長時間かかるという工程上の問題がある。更
に、薄い積層板に複雑な形状の切断を行おうとすると、
プレスやルーターでは残すべき部分が積層板の法線方向
に揺動して正確な切断を行うことが出来ないという精度
上の問題がある。また、ルーターで切断する場合には切
削屑が発生し、このような切削屑を処理するための廃棄
物処理の問題がある。
However, in the method using a press or a router, there are problems that burrs are left on the outer peripheral edge of the cut product, or the conductive foil forming the wiring pattern of the product is peeled off to produce a defective product. is there. Further, when the laminated plate is filled with a reinforcing material such as glass fiber or aramid fiber, there is a problem that the blade of the press or the router is easily damaged. In addition, since the router cuts linearly, it takes a long time to cut, which is a process problem. Furthermore, when trying to cut a complicated shape on a thin laminated plate,
In a press or a router, there is a problem in accuracy that the portion that should be left oscillates in the normal direction of the laminated plate and accurate cutting cannot be performed. Further, when cutting with a router, cutting chips are generated, and there is a problem of waste treatment for processing such cutting chips.

【0004】本発明は上記従来の問題を解消するために
なされた発明である。即ち、本発明は、不良率が低く、
設備の消耗を最小限に抑え、複雑な形状でも短時間かつ
高精度に切断でき、切削屑の発生しない切断方法を提供
することを目的とする。
The present invention has been made to solve the above-mentioned conventional problems. That is, the present invention has a low defect rate,
It is an object of the present invention to provide a cutting method in which the consumption of equipment can be minimized, a complex shape can be cut in a short time with high accuracy, and no cutting chips are generated.

【0005】[0005]

【課題を解決するための手段】本発明の切断方法は、積
層板表面の導体板をエッチングすることにより所定の切
断パターンを形成する工程と、前記積層板を当板上にセ
ットする工程と、前記切断パターンに沿ってレーザー光
線を照射することにより前記積層板を切断する工程とを
具備する。
A cutting method of the present invention comprises a step of forming a predetermined cutting pattern by etching a conductor plate on the surface of a laminated plate, a step of setting the laminated plate on a plate, Cutting the laminated plate by irradiating a laser beam along the cutting pattern.

【0006】上記切断方法において、前記当板の例とし
て、表面が黒化処理された表面を備えた当板を挙げるこ
とができる。上記切断方法において、前記切断する工程
の例として、エネルギー密度3.5×10−13〜2.
5J/cmのレーザー光線を照射する工程を挙げるこ
とができる。上記切断方法において、前記積層板が、ア
ラミド繊維を補強材として含んでいてもよい。上記切断
方法において、前記切断する工程の例として、幅0.0
5〜5.0mmのレーザー光線を照射する工程を挙げる
ことができる。上記切断方法において、前記切断パター
ンの例として、幅0.05〜5.0mmの切断パターン
を挙げることができる。
In the above cutting method, an example of the contact plate is a contact plate having a blackened surface. In the above cutting method, an energy density of 3.5 × 10 −13 to 2.
A step of irradiating a laser beam of 5 J / cm 2 can be mentioned. In the above cutting method, the laminated plate may contain aramid fibers as a reinforcing material. In the above cutting method, as an example of the cutting step, a width of 0.0
A step of irradiating a laser beam of 5 to 5.0 mm can be mentioned. In the above cutting method, examples of the cutting pattern include a cutting pattern having a width of 0.05 to 5.0 mm.

【0007】本発明の他の切断方法は、積層板表面の導
体板を選択的に黒化処理することにより所定の切断パタ
ーンを形成する工程と、前記切断パターンに沿ってレー
ザー光線を照射することにより前記積層板を切断する工
程とを具備する。
Another cutting method of the present invention comprises the steps of forming a predetermined cutting pattern by selectively blackening the conductor plate on the surface of the laminated plate, and irradiating a laser beam along the cutting pattern. Cutting the laminate.

【0008】本発明では、レーザー光線を用いて積層板
の切断を行うので、不良率が低く、設備の消耗を最小限
に抑え、複雑な形状でも短時間かつ高精度に切断でき、
切削屑を発生することなく切断することができる。
In the present invention, since the laminated plate is cut by using a laser beam, the defect rate is low, the consumption of equipment is minimized, and even complicated shapes can be cut in a short time and with high precision,
It is possible to cut without generating cutting chips.

【0009】[0009]

【発明の実施の形態】(第1の実施形態)以下、本発明
の第1の実施形態について説明する。図1は本実施形態
に係る切断方法のフローチャートであり、図2及び図3
は本実施形態に係る切断方法の途中の様子を図示した斜
視図である。
BEST MODE FOR CARRYING OUT THE INVENTION (First Embodiment) A first embodiment of the present invention will be described below. FIG. 1 is a flowchart of the cutting method according to the present embodiment, and FIGS.
FIG. 4 is a perspective view illustrating a state in the middle of the cutting method according to the present embodiment.

【0010】本実施形態に係る切断方法を実施するに
は、図1に示したように、まず最初に図2(a)に示し
たような、表面に銅箔などの金属箔2をエポキシ樹脂や
ポリイミド樹脂等の絶縁基板3表面に貼り着けた積層板
1を用意する。この積層板1の内部にはガラス繊維やア
ラミト゛繊維などの補強材が内包されていても良い。
In order to carry out the cutting method according to the present embodiment, as shown in FIG. 1, first, a metal foil 2 such as a copper foil, as shown in FIG. A laminated plate 1 which is attached to the surface of an insulating substrate 3 such as polyimide resin or the like is prepared. A reinforcing material such as glass fiber or aramid fiber may be included inside the laminated plate 1.

【0011】この積層板1の絶縁基板3は厚さ0.03
〜0.5mmのものを用いるのが好ましい。この範囲の
厚さを上回るとレーザー光線が裏面側まで到達しにくく
なるからであり、この範囲の厚さを下回ると絶縁特性や
機械的強度が不足するからである。
The insulating substrate 3 of this laminated plate 1 has a thickness of 0.03.
It is preferable to use one having a thickness of 0.5 mm. This is because if the thickness exceeds this range, it becomes difficult for the laser beam to reach the back surface side, and if the thickness falls below this range, the insulating properties and mechanical strength become insufficient.

【0012】また、金属箔2は厚さ1〜18μmのもの
を用いるのが好ましい。この範囲を下回ると機械的強度
や配線の信頼性が低下するからであり、この範囲を上回
ると加工しにくくなるからである。このような積層板1
の金属箔2の表面全体に感光性樹脂(レジスト)を塗布
して図2(b)に示したようなレジスト層4を形成する
(ステップ1)。ここで用いる感光性樹脂としてはポジ
型、ネガ型のいずれでも良い。
The metal foil 2 preferably has a thickness of 1 to 18 μm. This is because if it is less than this range, the mechanical strength and the reliability of the wiring are deteriorated, and if it exceeds this range, it becomes difficult to process. Such a laminated board 1
A photosensitive resin (resist) is applied to the entire surface of the metal foil 2 to form a resist layer 4 as shown in FIG. 2B (step 1). The photosensitive resin used here may be either a positive type or a negative type.

【0013】レジスト層4を形成したら、図2(c)に
示したように、レジスト層4の上にマスクパターン5を
被せてマスキングを施す(ステップ2)。このマスクパ
ターン5には同型の配線パターン5aが4つ、マスクパ
ターン5の四隅に配設されており、各配線パターン5a
の外周縁部に切断パターン5bが形成されている。マス
キングが完了したら、図2(d)に示すようにマスクパ
ターン5の上から露光して、レジスト層4上に配線パタ
ーン5aと切断パターン5bとを写し取る(ステップ
3)。
After the resist layer 4 is formed, as shown in FIG. 2C, a mask pattern 5 is covered on the resist layer 4 for masking (step 2). In this mask pattern 5, four wiring patterns 5a of the same type are arranged at the four corners of the mask pattern 5, and each wiring pattern 5a
A cutting pattern 5b is formed on the outer peripheral edge of the. When the masking is completed, the mask pattern 5 is exposed as shown in FIG. 2D to copy the wiring pattern 5a and the cutting pattern 5b on the resist layer 4 (step 3).

【0014】次に露光後の積層板1を例えば溶剤中に浸
漬することによりレジスト層4を現像して不要な部分の
レジストを除去すると、図3(a)に示したように配線
パターン5aと切断パターン5bが積層板1の金属箔2
上に現れる(ステップ4)。この切断パターン5bでは
レジストが現像により除去され、金属箔2の表面が露出
している。この配線パターン5aと切断パターン5bを
載置した状態の積層板1を、例えばエッチング液の入っ
たエッチング槽に浸漬してエッチングを施すと、図3
(b)に示したように、積層板1の表面に金属箔2で形
成された配線パターン2aと、金属箔2の下の絶縁基板
表面が露出した切断パターン3aとが現れる(ステップ
5)。
Next, the resist layer 4 is developed by immersing the laminated plate 1 after exposure in, for example, a solvent to remove an unnecessary portion of the resist, and as shown in FIG. 3A, the wiring pattern 5a is formed. The cutting pattern 5b is the metal foil 2 of the laminate 1.
Appears on top (step 4). In this cutting pattern 5b, the resist is removed by development, and the surface of the metal foil 2 is exposed. When the laminated plate 1 on which the wiring pattern 5a and the cutting pattern 5b are placed is immersed in, for example, an etching bath containing an etching solution to perform etching, FIG.
As shown in (b), the wiring pattern 2a formed of the metal foil 2 on the surface of the laminate 1 and the cutting pattern 3a exposing the surface of the insulating substrate under the metal foil 2 appear (step 5).

【0015】次に図3(c)に示したように、積層板1
の下面側に鉄板表面に酸化膜などの黒化膜を形成した当
板10を重ねる(ステップ6)。なお当板10表面の黒
化膜は無くても良い。
Next, as shown in FIG. 3C, the laminated plate 1
The contact plate 10 having a blackened film such as an oxide film formed on the surface of the iron plate is superposed on the lower surface side of the plate (step 6). The blackened film on the surface of the contact plate 10 may be omitted.

【0016】この状態で、図3(d)に示したように積
層板1の上面側から切断パターン3aに沿ってレーザー
光線を照射する(ステップ7)。ここで用いるレーザー
光線としては、エネルギー密度が3.5×10−13
2.5J/cmのレーザー光線を用いるのが好まし
い。エネルギー密度が上記範囲を下回ると切削能力が不
十分で十分な切断速度を得ることができないからであ
り、上記範囲を上回ると切断パターン自体を焼き切った
り、切断面が粗くなるなどの弊害を生じるからである。
In this state, as shown in FIG. 3D, a laser beam is irradiated from the upper surface side of the laminated plate 1 along the cutting pattern 3a (step 7). The laser beam used here has an energy density of 3.5 × 10 −13
It is preferable to use a laser beam of 2.5 J / cm 2 . This is because if the energy density is less than the above range, the cutting ability is insufficient and a sufficient cutting speed cannot be obtained, and if the energy density exceeds the above range, the cutting pattern itself is burned out, or the cut surface becomes rough. Because.

【0017】また、ここで用いるレーザー光線の線幅は
0.05〜5.0mmのレーザー光線を用いるのが好ま
しい。レーザー光線の線幅が上記範囲を下回ると十分な
切断能力を得るために高いエネルギー密度のレーザー光
線を用いる必要が生じてエネルギー的に不利だからであ
り、上記範囲を上回ると、1枚の積層板から複数の製品
を切り出す場合に隣接する切断パターンどうしの間隔を
広くしなければならず、積層板1枚当たりの製品形成密
度が低下して収率が低下するからである。
The line width of the laser beam used here is preferably 0.05 to 5.0 mm. This is because if the line width of the laser beam is less than the above range, it is necessary to use a laser beam having a high energy density in order to obtain sufficient cutting ability, which is disadvantageous in terms of energy. This is because, when the product is cut out, the interval between adjacent cutting patterns must be widened, and the product formation density per laminated plate decreases, and the yield decreases.

【0018】レーザー光線を積層板1に向けて照射する
とき、光源(図示省略)から発射されたレーザー光線は
配線パターン2aと切断パターン3aとの境界に沿って
積層板1の厚さ方向に進む。レーザー光線の一部は配線
パターン2a表面に当たるが、配線パターン2aは金属
箔2でできているため、配線パターン2aの表面で反射
する。そのため配線パターン2aの下側の絶縁基板3に
はレーザー光線は到達しない。一方、配線パターン2a
がない切断パターン3aの部分に当たったレーザー光線
は絶縁基板3を透過し、積層板1下側に当てた当板10
に到達する。このときレーザー光線が当板10の表面に
到達したときに発熱し、この熱により積層板1の絶縁基
板3が切断される。このようにして配線パターン2aと
切断パターン3aとの境界線に沿って積層板1が綺麗に
切断される。
When the laminated plate 1 is irradiated with a laser beam, the laser beam emitted from a light source (not shown) advances in the thickness direction of the laminated plate 1 along the boundary between the wiring pattern 2a and the cutting pattern 3a. A part of the laser beam hits the surface of the wiring pattern 2a, but since the wiring pattern 2a is made of the metal foil 2, it is reflected by the surface of the wiring pattern 2a. Therefore, the laser beam does not reach the insulating substrate 3 below the wiring pattern 2a. On the other hand, the wiring pattern 2a
The laser beam that hits the portion of the cutting pattern 3a without the light penetrates the insulating substrate 3 and hits the lower side of the laminated plate 1 with the hitting plate 10.
To reach. At this time, when the laser beam reaches the surface of the contact plate 10, heat is generated, and this heat cuts the insulating substrate 3 of the laminated plate 1. In this way, the laminated plate 1 is neatly cut along the boundary line between the wiring pattern 2a and the cutting pattern 3a.

【0019】以上説明したように、本実施形態に係る切
断方法では、レーザー光線を用いて非接触で切断を行う
ので、積層板表面の金属箔が剥離したり、バリが生じる
ことが無く、不良率を低減することができる。また、レ
ーザー光線を用いて切断するのでルーターのカッターや
プレスの刃を傷めることがなく、加工設備の消耗を最小
限に抑えることができる。更に線幅を小さくできるレー
ザー光線を用いるので複雑な形状でも高精度に切断する
ことができる。また同じ理由から、隣接する切断パター
ンどうしの間隔を狭くすることができ、1枚の積層板上
に形成する製品の密度を上げることにより収率を向上さ
せることができる。更に、切削速度の高いレーザー光線
を用いて切断するので短時間で切断することができる。
また、回転するカッターを使用しないので切削屑の発生
を抑えることができる。
As described above, in the cutting method according to the present embodiment, the cutting is carried out in a non-contact manner using the laser beam, so that the metal foil on the surface of the laminated plate is not peeled off or burrs are generated, and the defect rate is reduced. Can be reduced. Further, since cutting is performed using a laser beam, the cutter of the router and the blade of the press are not damaged, and the consumption of processing equipment can be minimized. Furthermore, since a laser beam that can reduce the line width is used, even a complicated shape can be cut with high accuracy. For the same reason, the interval between adjacent cutting patterns can be narrowed, and the yield can be improved by increasing the density of the products formed on one laminated plate. Furthermore, since cutting is performed using a laser beam having a high cutting speed, it is possible to cut in a short time.
Further, since a rotating cutter is not used, generation of cutting chips can be suppressed.

【0020】(実施例)以下、本発明の実施例について
説明する。上記第1の実施形態の手順に従って基板の切
断を行った。使用した積層板は厚さ0.5mm、縦10
0mm×横100mmの2層板、即ち絶縁基板の両面に
厚さ18μmの銅箔をそれぞれ貼り付けたものを用い
た。絶縁基板としてはガラス繊維マットに絶縁性樹脂と
してエポキシ樹脂(DIC社製、品名1121 75
M)を含浸させて硬化させたものを使用した。
(Examples) Examples of the present invention will be described below. The substrate was cut according to the procedure of the first embodiment. The laminate used has a thickness of 0.5 mm and a length of 10
A two-layer board having a size of 0 mm and a width of 100 mm, that is, an insulating substrate to which copper foil having a thickness of 18 μm was attached, was used. The insulating substrate is a glass fiber mat and an epoxy resin (manufactured by DIC, product name 112175
What was hardened by impregnating M) was used.

【0021】切断の条件としては、レーザーマスク径
5.4mm、エネルギー30mJ/cmの条件で行っ
た。レーザー光線の幅は約5〜6mmであった。上記の
積層板をこのレーザー光線を用いて切断したところ、約
0.8秒で一辺を直線状に切断することができた。
The cutting conditions were a laser mask diameter of 5.4 mm and an energy of 30 mJ / cm 2 . The width of the laser beam was about 5-6 mm. When the above laminated plate was cut using this laser beam, one side could be cut straight in about 0.8 seconds.

【0022】(比較例)上記実施例と同じ積層板を用い
てルータでの切断を行った。ルータとしては、日立ビア
メカニクス社製の型式NR−1V212の装置を使用し
た。ルータのカッターの直径は2.0mmで、カッター
の回転数は25×10r.p.m.であった。上記実
施例と全く同様に一辺を直線状に切断したところ、約2
0秒の時間を必要とした。
(Comparative Example) The same laminated plate as in the above example was used to perform cutting with a router. As the router, a device of model NR-1V212 manufactured by Hitachi Via Mechanics was used. The diameter of the cutter of the router is 2.0 mm, and the rotation speed of the cutter is 25 × 10 3 r. p. m. Met. When one side was cut in a straight line in the same manner as in the above embodiment, about 2
It took 0 seconds.

【0023】ここで、上記実施例と比較例とを比較した
ところ、レーザー光線を用いて切断する場合の利点とし
て、加工スピードが速い、加工幅を最小50μmまで細
くでき、狭くて済むため製品の枚取り数が向上する、薄
物や形状が複雑な積層板の加工が可能である、切削端面
が滑らかで美麗、切削屑などのゴミが発生しない、等の
利点が得られることが判明した。
The comparison between the above example and the comparative example shows that the advantages of cutting with a laser beam are that the processing speed is fast, the processing width can be thinned to a minimum of 50 μm, and the product can be made narrower. It has been found that advantages such as an increase in the number of cuts, the ability to process a thin plate or a laminated plate having a complicated shape, a beautiful cutting end surface, and the absence of dust such as cutting chips are obtained.

【0024】一方、ルータを使用した場合、ドリル(カ
ッター)の消耗が早く、交換が必要となる、切削ゴミが
多量に生じる、加工幅が約2mmと大きい幅が必要とな
る、加工端面にバリが生じる、薄物の加工が困難である
等の欠点が確認された。
On the other hand, when a router is used, the drill (cutter) is consumed quickly, needs to be replaced, a large amount of cutting dust is generated, and a wide working width of about 2 mm is required. It has been confirmed that there are problems such as the occurrence of defects and the difficulty in processing thin products.

【0025】[0025]

【発明の効果】本発明では、レーザー光線を用いて積層
板の切断を行うので、不良率が低く、設備の消耗を最小
限に抑え、複雑な形状でも短時間かつ高精度に切断で
き、切削屑を発生することなく切断することができる。
According to the present invention, since the laminated plate is cut by using a laser beam, the defective rate is low, the consumption of equipment is minimized, and even complicated shapes can be cut in a short time and with high accuracy. It can be cut without causing.

【図面の簡単な説明】[Brief description of drawings]

【図1】第1の実施形態に係る切断方法のフローチャー
トである。
FIG. 1 is a flowchart of a cutting method according to a first embodiment.

【図2】第1の実施形態に係る切断方法の途中の様子を
図示した斜視図である。
FIG. 2 is a perspective view illustrating a state in the middle of the cutting method according to the first embodiment.

【図3】第1の実施形態に係る切断方法の途中の様子を
図示した斜視図である。
FIG. 3 is a perspective view illustrating a state in the middle of the cutting method according to the first embodiment.

【符号の説明】[Explanation of symbols]

1…積層板、2a…配線パターン、3…絶縁基板、5…
マスクパターン、5a…配線パターン、3a…切断パタ
ーン、5b…切断パターン、6…切断パターン、10…
当板。
1 ... Laminated board, 2a ... Wiring pattern, 3 ... Insulating substrate, 5 ...
Mask pattern, 5a ... Wiring pattern, 3a ... Cutting pattern, 5b ... Cutting pattern, 6 ... Cutting pattern, 10 ...
Hit plate.

───────────────────────────────────────────────────── フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) B23K 101:42 B23K 101:42 (72)発明者 柳原 昌伸 埼玉県川口市領家5丁目14番25号 東芝ケ ミカル株式会社川口工場内 Fターム(参考) 4E068 AE01 CA02 DA11 DB14 5E339 AB02 AC05 AD01 AE02 BC02 BD11 BE11 DD03 EE10 ─────────────────────────────────────────────────── ─── Continuation of front page (51) Int.Cl. 7 Identification code FI theme code (reference) B23K 101: 42 B23K 101: 42 (72) Inventor Masanobu Yanagihara 5-14-14 Ryoke, Kawaguchi City, Saitama Prefecture Toshiba F term in Kawaguchi factory of Chemical Co., Ltd. (reference) 4E068 AE01 CA02 DA11 DB14 5E339 AB02 AC05 AD01 AE02 BC02 BD11 BE11 DD03 EE10

Claims (4)

【特許請求の範囲】[Claims] 【請求項1】 積層板表面の導体板を選択的にエッチン
グすることにより所定の切断パターンを形成する工程
と、 前記積層板を当板上にセットする工程と、 前記切断パターンに沿ってレーザー光線を照射すること
により前記積層板を切断する工程とを具備する基板の切
断方法。
1. A step of forming a predetermined cutting pattern by selectively etching a conductor plate on the surface of the laminated plate, a step of setting the laminated plate on a plate, and a laser beam along the cutting pattern. And a step of cutting the laminated plate by irradiating.
【請求項2】 請求項1に記載の基板の切断方法であっ
て、前記切断する工程がエネルギー密度3.5×10
−3〜2.5J/cmのレーザー光線を照射する工程
であることを特徴とする切断方法。
2. The substrate cutting method according to claim 1, wherein the cutting step has an energy density of 3.5 × 10 5.
-3 The cutting method characterized by a process of irradiating with a laser beam of 2.5 to 2.5 J / cm 2 .
【請求項3】 請求項1又は2に記載の基板の切断方法
であって、前記切断する工程が幅0.05mm〜5.0
mmのレーザー光線を照射する工程であることを特徴と
する基板の切断方法。
3. The substrate cutting method according to claim 1, wherein the cutting step has a width of 0.05 mm to 5.0 mm.
A method for cutting a substrate, which is a step of irradiating a laser beam of mm.
【請求項4】 請求項1〜3の何れか1項に記載の基板
の切断方法であって、前記切断パターンが、幅0.01
〜5.0mmの切断パターンであることを特徴とする基
板の切断方法。
4. The method of cutting a substrate according to claim 1, wherein the cutting pattern has a width of 0.01.
A method of cutting a substrate, which has a cutting pattern of ˜5.0 mm.
JP2001199735A 2001-06-29 2001-06-29 Method for cutting board Withdrawn JP2003017828A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001199735A JP2003017828A (en) 2001-06-29 2001-06-29 Method for cutting board

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001199735A JP2003017828A (en) 2001-06-29 2001-06-29 Method for cutting board

Publications (1)

Publication Number Publication Date
JP2003017828A true JP2003017828A (en) 2003-01-17

Family

ID=19036988

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001199735A Withdrawn JP2003017828A (en) 2001-06-29 2001-06-29 Method for cutting board

Country Status (1)

Country Link
JP (1) JP2003017828A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100775260B1 (en) * 2006-03-17 2007-11-12 홍성국 Cutting method of the plate including the flexible printed circuit board mounting the electronic parts and the printed circuit board mounting cutted by the same method
KR20220142345A (en) 2021-04-14 2022-10-21 오퓨나 테크놀러지 주식회사 Method of forming a cutout or notch in a printed circuit board by laser processing
KR102642626B1 (en) * 2023-02-24 2024-03-04 (주) 시에스텍 Sleeve manufacturing method using dissimilar metal bonding sheet applied with etching clad method

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100775260B1 (en) * 2006-03-17 2007-11-12 홍성국 Cutting method of the plate including the flexible printed circuit board mounting the electronic parts and the printed circuit board mounting cutted by the same method
KR20220142345A (en) 2021-04-14 2022-10-21 오퓨나 테크놀러지 주식회사 Method of forming a cutout or notch in a printed circuit board by laser processing
KR102642626B1 (en) * 2023-02-24 2024-03-04 (주) 시에스텍 Sleeve manufacturing method using dissimilar metal bonding sheet applied with etching clad method

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