JP2003016686A - Inspecting device and inspecting method for mispositioning of cap of semiconductor laser device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To inspect the mispositioning of the cap of a semiconductor laser device with good accuracy. SOLUTION: The mispositioning inspecting device for the cap of the semiconductor laser device 12 provided with a glass plate for correcting the astigmatism of the exit light from a semiconductor laser element at an inclined top surface 14 of the cap for covering and hermetically sealing the semiconductor laser element has an inclined caul 72 fact-to-face contactable with the inclined top surface 14 of the semiconductor laser device, is provided with a rotatably supported rotating angle meter 70, brings this caul 72 into fact-to-face contact with the inclined surface 14 of the cap of the semiconductor device under specified pressure and inspects the mispositioning of the cap from the rotating angle before the caul comes into fact-to-face contact from the reference position at the rotating angle meter 70.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an apparatus and method for inspecting a positional deviation of an oblique cap of a laser diode device used for an optical pickup of a mini disk for reproduction, for example.

[0002]

2. Description of the Related Art A flat glass plate is obliquely arranged in a divergent light beam from a semiconductor laser, and astigmatism is adjusted by adjusting the angle of the flat glass plate to significantly improve the recording / reproducing characteristics of an optical head. Known from the past. FIG. 4 shows an example of a laser diode (referred to as LD) device applied to this principle, which is used in, for example, an optical pickup of a mini disk. The LD device 10 includes a stem 16 on which a laser oscillator 13 is mounted, a cap 12 for protecting the laser oscillator 13, and a top surface 1 of the cap 12.
4 is composed of a transparent flat glass 15 for correcting astigmatism of the emitted laser light, and an outer lead 18 for connecting the LD device to a circuit board. The cap 12 has a cylindrical shape as shown in the drawing. The top surface 14 has a shape cut obliquely and is made of a transparent resin such as PPS (polyphenyl sulfide). The inclination is adjusted to a predetermined angle (for example, 45 °) at which the astigmatism is corrected by the laser light emitted from the laser oscillator 13 passing through the transparent glass plate 15 on the top surface of the cap. ing.

The cap 12 is fitted in, for example, a step portion provided on the upper surface of the stem 15 in the manufacturing process of the LD device 10. If the fitted cap 12 has a deviation of a mounting angle from a prescribed position (rotational angle deviation). Since the angle of the laser beam of the laser beam with respect to the glass plate 15 is changed and the predetermined aberration correction cannot be performed, the reproduction characteristics of the mini disk or the like are adversely affected.

For example, it is known that this positional deviation (rotational angle deviation) must be controlled within ± 5 ° from the specified position in order to ensure stable reproducing performance in a mini disk reproducing system. For this reason, at present, an operator inspects the displacement of the cap as compared with a limit sample. However, in this inspection method that relies on the visual inspection of the operator, the inspection accuracy is not always sufficient due to individual variations.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in view of such a situation, and an object thereof is to mechanize a positional deviation inspection of an oblique type cap 12 in an LD apparatus and perform a constant inspection. This is to enable more accurate position shift detection under the conditions.

[0006]

According to a first aspect of the present invention, there is provided a cap displacement inspection device for a semiconductor laser device having an astigmatism correction plate on an inclined top surface, wherein the semiconductor laser device is placed at the inspection position. Positioning means, position deviation detecting means having an inclined surface capable of making surface contact with the inclined top surface of the cap and rotatably supported with respect to a reference position, and the inclined surface of the position deviation detecting means of the semiconductor device. An apparatus for inspecting a positional deviation of a cap of a semiconductor laser device, comprising: means for making surface contact with an inclined surface of the cap; and means for displaying a rotation angle of the positional deviation detecting means from a reference position.

According to a second aspect of the present invention, in the apparatus for inspecting the positional deviation of the cap of the semiconductor laser device according to the first aspect, the means for bringing the inclined surface of the rotation deviation detecting means into surface contact with the inclined surface of the cap of the semiconductor device. Is a device for inspecting the position deviation of a cap of a semiconductor laser device, which is provided with a means for exerting a constant pressing force on the contact surface.

According to a third aspect of the present invention, there is provided a method for inspecting a positional deviation of a cap of a semiconductor laser device in which an astigmatism correction plate is provided on an inclined top surface, the semiconductor laser device being positioned at an inspection position and positioned. The inclined top surface of the cap is brought into surface contact with an inclined surface capable of making surface contact with the top surface and rotatable with respect to a reference position, and the angle of rotation of the inclined surface from the reference position after the surface contact is displayed. Is a method for inspecting the positional deviation of the cap of the semiconductor laser device, which comprises each step.

According to a fourth aspect of the present invention, in the method for inspecting the displacement of the cap of the semiconductor laser device according to the fourth aspect, the surface contact between the top surface and the inclined surface applies a constant pressing force to the contact surface. This is a method for inspecting the positional deviation of the cap of the semiconductor laser device, which is performed by performing the method.

[Detailed Description of the Invention] A description will be given of an embodiment shown in the drawings of a device for inspecting a displacement of a cap of an LD device according to the present invention.
FIG. 1 is a perspective view schematically showing an example of a displacement inspection device for a cap of an LD device, and FIG. 2 is a side view of a main part thereof. The inspection apparatus according to the present embodiment includes an inspection table 26 and an LD, which are arranged on a base 20 and on which the LD apparatus 10 is mounted.
A position fixing member 24 for fixing the device 10 on the inspection table 26,
A column 30 having an L-shaped cross section, a first column provided on the column 30
Slide member 40 vertically movably mounted along the guide rail 32, a tool support member 50 vertically movably mounted on the slide member 40, a rotation angle meter 70 mounted on the tool support member 50, and the guide member. It comprises a stopper member 60 for limiting the lowering of 40.

Position fixing members 24 slidably arranged on the guide rails 22 are arranged on both sides of the inspection table 26, and the LD device 1 is attached to the tip of the position fixing member 24.
A wedge-shaped portion 25 is provided which engages the zero positioning notch 17. The position fixing member 24 is fixed to the guide rail 22, for example, by an arbitrary means such as a screw (not shown).

The column 30 having an L-shaped cross section is provided with a ridge 32 which serves as a guide rail in the vertical direction on the inner side surface thereof. For example, a dovetail-shaped recess having the same sectional shape as that of the projection 32 of the slide member 40 is engaged with the projection 32. As shown in FIG. 2, the slide member 40 has an upper flange portion 41 and a lower flange 45, and has a substantially U-shaped cross section. Further, a pin-shaped stopper 46 and a spring locking member 44 are formed on both side surfaces thereof, and when the slide member 40 is lowered, the stopper 46 is placed on the base 20 and the stopper 60 has a contact surface. Abut against 62 to limit further descent. Further, a return spring member 36 is provided between the spring locking member 44 and the similar spring locking member 34 of the support column 30 so as to always act in the direction of pulling up the slide member 40.

The tool support member 50 has a substantially L-shaped cross section,
On the back surface thereof, for example, a dovetail-shaped groove is formed which engages with a guide ridge 47 which is provided so as to project in the vertical direction of the slide member. Further, the lower surface thereof is supported by the supporting surface 48 of the lower flange 45 of the slide member 40, and between the upper surface 54 and the lower surface of the flange 41 of the slide member 40, as shown in FIG. Are arranged. The compression spring member 52 constantly presses the lower surface of the tool support member 50 against the support surface 48 of the slide member 40, and supports the tool support member 50 so that the tool support member 50 can move up and down integrally with the slide member 40.

The rotation angle meter 70 is rotatably attached to the flange surface 56 of the tool support member 50 via a bearing (not shown), and as shown in FIG. 3, has a circular scale plate on its upper portion. , The lower part is the inclined top surface 1 of the cap 12 of the LD device 10 placed on the measuring table 26.
It is composed of a cylindrical body that serves as means for detecting the displacement of the cap having four contact surfaces 72.

Next, the inspection of the displacement of the cap of the LD device 10 will be described. In FIG. 1, first, the LD device 10 to be inspected is placed on the inspection table 26, and the fixtures 24 slidably arranged on both sides of the inspection table 26 are attached to the guide rails 2.
2 along with the wedge-shaped portion 25 of the tip of the fixture 24.
Is engaged with the notch 17 of the stem 16 of the LD device, and the fixture 24 is fixed to the guide rail 22 in this state.

After the LD device 24 is fixed on the inspection table 26 as described above, the slide member 40 is lowered along the support column 30 against the spring force of the return spring 36 by, for example, pushing down the slide member 40 by hand. As a result, the tool support member 50 moves down together with the slide member 40, and the cap contact surface 72 at the lower end of the rotation angle meter 70 attached to the tip of the tool support member 50 is attached to the inspection table
It contacts the inclined top surface 14 of the cap 10 fixed to the. Here, the abutting surface 72 is formed on the same inclined surface as the top surface 14 of the cap 12, and when the top surface 14 of the cap 12 fixed on the inspection table is in a prescribed correct rotation angle position. That is, it is set so that surface contact can be made as it is at the rotation angle position where the astigmatism of the laser light from the LD device can be corrected. Therefore, the top surface 1 of the cap 12 fixed on the inspection table
If 4 is deviated from the prescribed rotation angle position, the two cannot be in surface contact as they are, and the contact surface 72 is slightly rotated while making a surface contact.

As described above, the contact surface 72 is the cap 12
When it comes into full surface contact with the top surface 14 of the above, the descent of the contact surface 72 is stopped at that point, and therefore the tool support member 50 also stops at that position, but the slide member 40 does not move.
The compression spring 52 is further compressed and compressed until it comes in contact with the contact surface 62 of the stopper member 60. During this descent, the support surface 48 of the lower flange of the guide member 40 separates from the bottom surface of the support member 50. In this state, the contact surface 72
The force acting on the top surface 14 of the cap 12 is only the spring force of the compression spring irrespective of the external pressing force acting on the slide member 40. Therefore, for example, when pushing down the slide member 40 manually, Even if a strong force is applied, there is no risk of damaging the LD device and the like, the inspection can always be performed safely and easily in a stable state, and highly reliable measurement results without measurement error can be obtained.

When the pressing force applied to the slide member 40 is released, the slide member 40 is pulled upward by the spring force of the return spring 36, and at the same time, by the action of the compression spring 52,
The bottom surface of the support member 50 is again the support surface 4 of the slide member 40.
It is pressed against 8 and returns to the initial position.

The rotation of the contact surface 72 until the surface contact with the cap 12 of the LD device is detected as the rotation angle of the rotation angle meter shown in FIG. 3, and the scale 74 pointed by the pointer 78 shown in FIG. 3 is read. Thus, the displacement of the cap from the specified position can be inspected. In addition, the rotation angle meter,
As shown in the figure, a scale 74 is provided on the rotary shaft head coaxial with the contact surface 72, and the contact surface 72 is at the specified position where the astigmatism correction as set can be performed. When it comes into surface contact with the
It is preset to point to. An allowable range of angular deviation in the scale 74, for example, a scale 76 at ± 5 °
Is displayed by distinguishing it from other scales, for example, by changing the bold line or changing the color, and confirming whether or not the displacement of the cap is within the allowable range and whether the pointer 78 is within the range between the scales 76. It can be read easily and surely.

After the displacement of the cap of the LD device is detected, the rotation angle meter is set at the reference position (position at a rotation angle of 0 °).
However, the contact surface 72 is rotated when the contact surface 72 comes into surface contact with the top surface 14 of the cap 12 in the next displacement inspection of the cap 12, so it is correct by reading the rotation angle from the scale. An inspection can be done. As described above, by using the present inspection apparatus, it is possible to continuously and easily perform accurate inspection. In the above embodiment, the scale of the rotation angle meter may be provided on the fixed side and the pointer 78 may be provided on the rotation side, and by adopting any automatic return mechanism, the rotation angle meter after the inspection is completed. It is also possible to configure so as to always automatically return to the reference position.

[0021]

According to the present invention, there is no individual difference in the inspection accuracy as in the conventional visual inspection, and the inspection accuracy of the displacement of the cap of the semiconductor laser device can be greatly improved.
Further, since the inclined surface is in contact with the top surface of the cap of the semiconductor laser device to be inspected with a constant force for inspection, there is no risk of damaging the cap or the like, and stable and easy high precision Can be inspected.

[Brief description of drawings]

FIG. 1 is a perspective view showing an example of a device for inspecting a displacement of a cap of a semiconductor laser device according to the present invention.

FIG. 2 is a side view of a main part of the apparatus shown in FIG.

3 is a plan view showing a rotation angle meter in the device of FIG. 1. FIG.

FIG. 4 is a perspective view showing the entire semiconductor laser device.

[Explanation of symbols]

10 ... Semiconductor laser device, 12 ... Cap, 13 ...
Laser oscillation part, 14 ... Cap top surface, 15 ... Astigmatism correction glass plate, 16 ... Stem, 17 ... Positioning notch, 18 ... Outer lead, 20 ... Base, 24
... Fixing device, 25 ... Wedge portion, 26 ... Measuring stand, 30 ...
Prop, 32 ... Projection, 34 ... Spring locking tool, 36 ... Return spring, 40 ... Slide member, 41 ... Flange section, 43
... Spring locking tool, 45 ... Lower flange, 46 ... Stopper, 47 ... Guide ridge, 48 ... Support surface, 50 ... Tool support member, 52 ... Compression spring, 54 ... Top surface, 56 ... Flange surface, 60 ... Stopper member, 62 ... Stopper contact surface, 70 ... Rotation angle meter, 72 ... Cap contact surface, 7
4, 76 ... Angle scale, 78 ... Pointer,

Claims (4)

[Claims] 1. An apparatus for inspecting a positional deviation of a cap of a semiconductor laser device, wherein an astigmatism correction plate is provided on an inclined top surface, said means for positioning the semiconductor laser device at an inspection position, said inclined top surface of said cap. A misalignment detecting means having an inclinable surface capable of making surface contact with and rotatably supported with respect to a reference position; An apparatus for inspecting a positional deviation of a cap of a semiconductor laser device, comprising: a means for displaying a rotation angle of a positional deviation detecting means from a reference position. 2. The cap displacement inspection apparatus for a semiconductor laser device according to claim 1, wherein the means for bringing the inclined surface of the rotation deviation detection means into surface contact with the inclined surface of the cap of the semiconductor device is the contact surface. An apparatus for inspecting the positional deviation of a cap of a semiconductor laser device, characterized in that it is provided with means for applying a constant pressing force to the. 3. A method for inspecting a displacement of a cap of a semiconductor laser device, wherein an astigmatism correction plate is provided on an inclined top surface, wherein the semiconductor laser device is positioned at an inspection position, and the positioned cap is inclined. Each step of making a surface contact between a top surface and an inclined surface capable of making surface contact with the top surface and rotatable with respect to a reference position, and displaying a rotation angle of the inclined surface from the reference position after the surface contact. Method for inspecting displacement of cap of semiconductor laser device. 4. The method for inspecting the displacement of a cap of a semiconductor laser device according to claim 3, wherein the surface contact between the top surface and the inclined surface is performed by applying a constant pressing force to the contact surface. A method for inspecting a displacement of a cap of a semiconductor laser device which is a feature.