JP2003014820A - Electric connection device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an electric connection device in which a pinboard and a plate member are made small, in which their flexure is reduced and which is made lightweight as a whole. SOLUTION: The electric connection device comprises a support plate which has an opening in the center, the pinboard which is arranged on the support plate so as to close the opening and which has one or more probes passing through in the thickness direction of the support plate, and the plate member which is arranged on the upper side of the pinboard by keeping an interval and which has one or more holes through which tips of the probes can be passed.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an electrical connection device used to electrically connect a substrate under test to a test electric circuit in a current test device for a wiring substrate.

[0002]

2. Description of the Related Art Generally, a wiring board is subjected to an energization test for inspecting electrical characteristics such as whether the wiring of the wiring board is good or bad, and the quality of the wiring board and electronic components mounted on the wiring board. Such energization test is performed using an electrical connection device called an energization test jig. The electrical connection device includes a plurality of probes each of which has a tip (needle tip) in contact with a predetermined portion of the wiring board, and the rear end side of the probe is connected to an electric circuit of the current test device.

As one of the electrical connection devices of this type, a plurality of probes are attached to a plate-shaped pin board in a state of penetrating in the thickness direction of the pin board, and the pin board is opened upward. A cube-shaped box body is horizontally arranged so as to close the open portion of the box body, and a plate member such as a movable plate having a plurality of holes through which the tip end of the probe penetrates is arranged above the pin board. Some of them are arranged horizontally.

In the above-mentioned prior art, the box is made up of various electrical parts such as wiring and connectors connected to the probe,
Since various kinds of mechanical instruments such as mechanical parts must be housed and mounted, the planar shape of the box body must be significantly larger than that of the substrate to be tested, that is, the substrate under test.

[0005]

Therefore, in the above-mentioned prior art, since the pinboard and the plate member have the same planar shape as the opening of the box body, those planar shapes correspond to those of the substrate under test. It will be significantly larger, resulting in greater deflection of the pinboard and plate members, and there will be probes that do not contact the substrate. Moreover, since the pinboard and the plate member are large, the weight of the entire apparatus is large.

In order to solve the above problems, if the thickness of the pin board and the plate member is increased, the weight of the entire device becomes heavier, and the electrical connection device is attached to and detached from the current test device, and the electrical connection device is transported. Inconvenience arises in the handling of the electrical connection device, such as storage and storage of the electrical connection device.

An object of the present invention is to reduce the size of the pin board and the plate member so as to reduce the bending of the pin board and the plate member and to reduce the weight of the entire device.

[0008]

An electrical connection device according to the present invention comprises a support plate having an opening in the center and a pin board arranged on the support plate so as to close the opening and having a thickness. A pin board having one or more probes penetrating in the direction, and a plate member having a space above the pin board and having a space for allowing the tip of the probe to penetrate. Including.

The probe is connected at its rear end (lower end) side to an electric circuit of the electric current test device by an appropriate electric connecting tool such as a wiring or a cable. The substrate under test is placed on the plate member, and a predetermined portion is brought into contact with the tip of the probe to be energized.

When an opening is formed in the center of the support plate and the pinboard is arranged on the support plate so as to close the opening of the support plate,
Since the size of the opening of the support plate can be reduced according to the size of the board under test regardless of the size of the planar shape of the box body, the pin board that closes the opening of the support plate and the pin board that is placed above the pin board The size of the plate member can be significantly reduced, and as a result, the bending of the pin board and the plate member is reduced, and the overall weight of the device is reduced.

The electrical connection device further comprises a box body which opens upward, and in which the support plate is mounted so as to open and close the open portion of the box body, and the open portion is closed by the support plate. And one or more fasteners that maintain the spilled condition and releasable. By doing so, even though it is possible to open and open the opening of the box with the support plate and check and operate the wiring and equipment arranged in the box, the support plate does not come out during the energization test and when transporting the device. It is possible to prevent the opening of the box body from being opened.

The electrical connection device may further include a plurality of rolling members disposed on at least one side wall of the box body to allow the box body to move on the floor. By doing so, the device can be transported while rolling the rolling member on the floor, which facilitates the transportation of the device.

The box body may further include a handle disposed on each of two opposing side walls of the box body. By doing so, since the electrical connection device can be attached to and detached from the electrical test device by using the handle, the attachment and detachment work of the device becomes easy.

The electrical connecting device further comprises a plurality of guide pins assembled to the pin board, and penetrates the plate member in the thickness direction so that the tip ends thereof are inserted into the holes of the substrate under test. A plurality of extending guide pins can be included. By doing so, not only the relative positioning of the pin board and the plate member in the horizontal direction is performed, but also the board under test is placed on the board member so that the tips of the guide pins are received in the holes of the board under test. The substrate to be tested is positioned with respect to the pinboard simply by arranging the substrate under test.

The electrical connection device further includes a first elastically deformable member arranged between the pin board and the plate member.
And a second sealing member arranged on the plate member to receive the substrate under test, the first and second sealing members corresponding to the probe arrangement area. It can extend continuously around the location in a rectangular shape.
By doing so, the space formed by the pin board, the plate member, and the first sealing member is connected to the vacuum pump or the vacuum tank, so that the substrate under test is intervened via the second sealing member. The plate member is vacuum-sucked and maintained in that state, and the plate member is brought closer to the pin board to press the substrate under test against the tip (needle tip) of the probe.

The electrical connecting device further comprises a holding frame extending continuously in a rectangular shape around the pin board and the plate member so as to press the plate member against the pin board, and the box body or A holding frame mounted on the pin board may be included. By doing so, the plate member is prevented from moving in the horizontal direction with respect to the pinboard, even though the pressing frame acts as a guide for the vertical movement of the plate member.

The electrical connection device further comprises a second pin board which is arranged above the plate member at a distance and which has one or more second probes penetrating in the thickness direction thereof. A second pin board, and a second plate member arranged between the second pin board and the plate member, the second plate member having one or more holes through which the tip of the second probe can penetrate. And a plate member. That way,
It is possible to carry out a current-carrying test of a substrate under test having a portion to be brought into contact with the probe on both sides.

The electrical connecting device may further include a protective cover arranged on the second plate member so as to cover the protruding portion of the second probe protruding upward from the second pin board. . By doing so, the protective cover prevents the human body and other objects from coming into contact with the second probe and prevents damage to the second probe.

The electrical connecting device further includes a third sealing member arranged between the plate member and the second pin board, the second pin board and the second plate member. An elastically deformable fourth sealing member disposed between
The third and fourth sealing members may continuously extend in a rectangular shape around the area where the second probe is arranged. By doing so, as described above, the space formed by the pin board, the plate member, and the sealing member is connected to the vacuum pump or the vacuum tank, so that the second plate member and the second pin board are connected. Is approached to the support plate side, and the substrate under test on the plate member described above is pressed against the tip of the second probe.

The electrical connecting device may further include an opening / closing mechanism for connecting the second plate member and the second pin board to the support plate so as to open / close the space between the plate members. it can. By doing so, the space between both plate members can be opened and the substrate under test can be attached to and detached from the plate member.

[0021]

BEST MODE FOR CARRYING OUT THE INVENTION Referring to FIGS. 1 to 4, an electrical connection device 10 connects a substrate 12 to be inspected and an electric circuit of an electric conduction test device in an electrical characteristic test of the substrate 12 to be inspected. Used as a device or jig. The inspected substrate 12 is an unmounted substrate on which no electronic component is mounted or a mounted substrate on which an electronic component is mounted.

The electrical connection device 10 has a box body 14 that opens upward and a box body 14 that closes the open portion of the box body 14.
A support plate 16 disposed on the pin board 18, a pin board 18 disposed on the support plate 16, a plate member 20 disposed above the pin board 18 at a distance, and a pin board 18 in the vertical direction. A plurality of probes 22 arranged to extend
, The sealing member 24 arranged between the pin board 18 and the plate member 20, and the plate member 20 for receiving the substrate under test 12.
The sealing member 26 and the plate member 20 arranged on the support plate 16
And a rectangular frame 28 to be coupled to the.

The box 14 has the shape of a shallow cube that opens upward. A handle 30 is attached to each of a pair of side wall portions of the box body 14 which face each other.
A plurality of rolling members 32 are attached to one of the other pair of side wall portions facing each other at intervals in the longitudinal direction of the side wall portions. Each rolling member 32 is a roller in the illustrated example, but may be another member such as a ball or a caster.

A connector 34, which is electrically connected to the probe 22 by a connector (not shown) such as a cable, is attached to the bottom wall of the box body 14, and a plurality of protective feet 36 are provided on the connector 34. It is assembled with a space around. The protective foot 36 projects from the bottom wall beyond the connector 34 so as to jointly protect the connector 34.

The support plate 16 is made of a hard resin material having electrical insulation in the shape of a rectangular plate, and has a thickness dimension that does not cause bending due to the load applied from the pin board 18. . The support plate 16 is manufactured in the same size as the planar shape of the box body 14 so as to completely close the open portion of the box body 14, and has a rectangular opening 38 larger than the substrate 12 under test in the center. ing.

The support plate 16 is openably and closably attached to the remaining side wall of the box body 14 at one edge of the rectangle by a plurality of hinges 40, and is arranged on each side wall of the box body 14 having a handle 30. The fastener 42 thus maintained keeps the upper opening of the box 14 closed and releasable. As a result, although the open portion of the box body 14 can be opened to check and operate the wirings, instruments, etc. arranged in the box body 14, the support plate 16 is not attached to the box during the energization test and the transportation of the device. It is possible to prevent the opening of the body 14 from being opened.

The pin board 18 is made of an electrically insulative material in the shape of a rectangular plate larger than the opening 38 of the support plate 16. The pin board 18 is appropriately screwed to close the opening 38 of the support plate 16. It is assembled to the support plate 16 by various methods.

The plate member 20 is formed of an electrically insulating material into a rectangular shape having substantially the same size as the pin board 18, and is supported by the pin board 18 via the first sealing member 24. A plurality of spacers 44 are arranged on the plate member 20 at intervals so as not to contact the electronic components mounted on the board under test 12. The plate member 20 may be a movable plate.

The spacer 44 is made of an electrically insulating material, and is attached to the plate member 44 with the plate member 20 protruding vertically. The amount of protrusion of the portion of the spacer 44 that protrudes below and above the plate member 20 is
It is smaller than the first and second sealing members 24 and 26, respectively.

The probe 22 penetrates the pin board 18 in the vertical direction and slightly projects the tip (that is, the upper end or the needle tip) upward from the plate member 20. Along with this, it is supported by the pin board 18 so as to be able to largely project above the plate member. Probe 2
No. 2 is arranged such that the tip portion corresponds to the wiring pattern of the substrate under test 12 or the arrangement pattern of electronic components.

The rear end (lower end) of the probe 22 is connected to the connector 34 by an appropriate electrical connecting tool such as wiring or cable.
Electrically connected to. The connector 34 is connected to the electric circuit of the electric current test device by an appropriate electric connecting tool such as a cable.

Each of the sealing members 24 and 26 is made of an elastically deformable material such as rubber. Although the sealing members 24 and 26 have a rectangular cross-sectional shape in the illustrated example, they may have other cross-sectional shapes such as a circle and an ellipse.

The sealing member 24 continuously extends in a rectangular shape around a portion between the pin board 18 and the plate member 20 and corresponding to the arrangement area of the probe 22. The sealing member 26 continuously extends in a rectangular shape around a portion corresponding to the arrangement region of the probe 22 on the upper surface of the plate member 20.

The sealing member 24 may be adhered to the upper surface of the pin board 18 or the lower surface of the plate member 20, or may be fixed to the pin board 18 or the plate member 20 by an appropriate method such as screwing. Good. Similarly, the sealing member 26 may be adhered to the upper surface of the plate member 20, or the plate member 20.
It may be fixed by an appropriate method such as screwing.

The holding frame 28 has an inverted L-shaped cross section, extends continuously around the pin board 18 and the plate member 20 in a rectangular shape, and supports the plate member 20. 1
It is attached to the box body 14 so as to be pressed against the body 6. As a result, the plate member 20 is pressed against the pin board 18 and prevented from moving in the horizontal direction. However, the holding frame 28 acts as a guide for the vertical movement of the plate member.

A plurality of guide pins 46 are attached to the pin board 18. The guide pins 46 are arranged so that they extend through the plate member 20 in the thickness direction,
The pin board 18 extends upward, and its tip (upper end) is projected upward from the plate member 20. As a result, not only the relative positioning of the pin board 18 and the plate member 20 in the horizontal direction is performed, but also the board under test 12 is placed so that the tip end of the guide pin 46 is received in the hole of the board under test 12. Just place it on the member 20,
The board 12 to be tested is positioned with respect to the pin board 18.

Pin board 18, plate member 20 and sealing member 2
The space 48 formed by 4 and 4 communicates with an exhaust source such as a vacuum pump or a vacuum tank via an elbow 50, a pipe 52, a coupler 54, a valve (not shown), and the like. These mechanical parts are housed in the box body 14. The space 56 formed by the substrate under test 12, the plate member 20, and the sealing member 26 communicates with the space 48.

During the energization test, the substrate 12 to be tested is first placed on the sealing member 26 so as to receive the tip of the guide pin 46 in its hole, and then the space 48 is evacuated by a vacuum pump such as a vacuum tank. Connected to the source.

As a result, the space 48 is evacuated, so that the space 56 is evacuated, so that the plate member 20 is attracted toward the pinboard 18 side while elastically deforming the sealing member 24, and at the same time the test object is tested. The substrate 12 is attracted toward the plate member 20 while elastically deforming the sealing member 26, and the substrate 12 under test is tested.
Is pressed against the tip of the probe 22. In this state, the probe 22 is energized from the electric circuit of the energization test apparatus, so that the energization test of the substrate under test 12 is performed.

When the spaces 48 and 56 are evacuated as described above, the plate member 20 is elastically deformed by the sealing members 24 and 26.
And the substrate under test 12 contacts the pinboard 18 and the plate member 20, respectively. However, such a thing is prevented in the electrical connection device 10 by the spacers 44 protruding vertically of the plate member 20 coming into contact with the pin board 18 and the substrate under test 12.

Instead of projecting the spacers 44 above and below the plate member 20, independent spacers may be arranged on the upper surface and the lower surface of the plate member 20, respectively.
It may be arranged on each of the upper surface of 8 and the upper surface of the plate member 20. Those spacers are the plate member 20 and the pin board 1.
8 or may be attached to the plate member 20 or the pin board 18 by an appropriate means.

When the energization test of the substrate under test 12 is completed,
The vacuum in the space 48 is released. Thereby, the plate member 20
The substrate 12 to be tested is returned to its original height position by the elastic force of the sealing members 24 and 26, the substrate 12 to be tested is removed from the plate member 20, and instead the substrate 12 to be tested to be tested next. Are arranged on the plate member 20.

Since the support plate 16 has the opening 38 in the center thereof and the pinboard 18 is arranged on the support plate 16 so as to close the opening 38, the electrical connection device 10 has a size of the opening 38. Becomes smaller according to the size of the substrate under test 12, and the planar shapes of the pinboard 18 and the plate member 20 that close the opening 38 become significantly smaller, and as a result, the bending of the pinboard 18 and the plate member 20 becomes smaller. At the same time, the weight of the entire electrical connecting device 10 is reduced.

Electrical connection device 1 to be mounted on the current test device
When replacing the 0, the electrical connection device 10 has a handle 30
Is attached to and detached from the current test device. Therefore, the work of attaching and detaching the electrical connection device 10 is facilitated.

When the electrical connecting device 10 is transported, the electrical connecting device 10 is erected so that the rolling member 32 is on the lower side, the rolling member 32 is brought into contact with the floor, and the rolling member 32 is placed on the floor. It is transported while rolling. For this reason, the electrical connection device 10 can be easily transported.

As shown in FIG. 5, the electrical connecting device 10 is in a state where the rolling member 32 is erected so as to be on the lower side.
It can be stored in the storage 58.

With reference to FIGS. 6 to 8, the electrical connecting device 60 is arranged in addition to the various members provided in the electrical connecting device 10 and above the plate member 20 at a distance. The second pinboard 62 and the second pinboard 62
And a second plate member 64 disposed between the plate member 20 and the plate member 20,
A plurality of second probes 66 supported by the second pin board 62 in a state of penetrating in the thickness direction thereof, and both plate members 2
Elastically deformable sealing member 68 disposed between 0 and 64
An elastically deformable sealing member 70 arranged between the second pin board 62 and the second plate member 64; a protective cover 72 arranged on the second pin board 62; An opening / closing mechanism 74 for the second pin board 62 and the second plate member 64 is included.

The pin board 62 is made of an electrically insulating material in the form of a rectangular plate having substantially the same size as the pin board 18, and the opening / closing mechanism 74 serves to support the support plate 1.
It is supported by 6. The plate member 64 is formed of an electrically insulating material into a rectangular shape having substantially the same size as the pin board 62, and is supported by the pin board 62 via the sealing member 70. The plate member 64 may also be a movable plate.

The probe 66 vertically penetrates the pin board 62 so that its tip (lower end) projects downward from the plate member 64, and the plate member 64 moves vertically as the plate member 64 moves vertically. Pinboard 6 that can project downwards greatly
Supported by 2.

The tip of the probe 66 is the substrate under test 12
Are arranged so as to correspond to the wiring pattern on the upper surface side or the arrangement pattern of the electronic components. The rear end portion (upper end portion) of the probe 66 is electrically connected to the connector 34 or the electric circuit of the conduction test apparatus by an appropriate electrical connecting tool such as a wiring or a cable.

Both the sealing members 68 and 70 are made of an elastically deformable material, and the sealing member 2
It has a cross-sectional shape similar to that of Nos. 4 and 26, and further extends continuously in a rectangular shape around the portion corresponding to the arrangement region of the probe 66.

The sealing member 68 may be adhered to the upper surface of the plate member 20 or the lower surface of the plate member 64, or the plate member 20.
Alternatively, it may be fixed to 64 by an appropriate method such as screwing. Similarly, the sealing member 70 is joined to the lower surface of the pin board 62 and the upper surface of the plate member 64 by an appropriate means such as an adhesive or a screw member.

When the second pin board 62 and the second plate member 64 are stacked on the plate member 20 as shown in FIG. 8, the sealing members 68 and 70 are respectively the plate member 20 and the second plate member. Spaces 76 and 78 are formed together with the pin board 62 and the second plate member 64.

The protective cover 72 is the second pinboard 62.
The second probe 66 protruding upward from the second probe 66 is covered by an appropriate means such as a screw member or a locking member so as to cover the second probe 66.
It is detachably attached to the upper surface of the pin board 62. The protective cover 72 prevents the human body and other objects from coming into contact with the second probe 66 and prevents damage to the second probe 66.

In the opening / closing mechanism 74, a pair of elongated members having an L-shaped cross section, that is, a channel member 80, receives a pair of rectangular end edges of the second plate member 64, and receives each channel member 80. It is assembled to one end of the air steering 82, and the other end of the air steering 82 is attached to the support plate 1.
6 is pivotally connected to a support 84 rising from 6.

As a result, the second pin board 62 and the second plate member 64 are connected to the air steering 82 and the support plate 1.
6 is pivotally attached to the support plate 16 so as to be rotatable angularly about a pivotal connection point with the opening 6 to open and close the space 76.

In each air steering 82, when the second pinboard 62 and the second plate member 64 are opened and closed, the movement of the second pinboard 62 and the second plate member 64 becomes rapid. It has the function of a damper to prevent. The opening / closing movement of the second pin board 62 and the second plate member 64 is performed by the pin 86 attached to the channel member 80.
It is releasably limited by a fastener 88 that releasably engages with. One end of each air steering 82 is connected to the pin 86.

A handle 90 is also attached to the second pin board 62. The handle 90 is used when opening and closing the second pin board 62 and the second plate member 64. Further, as shown in FIG. 7, the handle 90 holds the electrical connection device 60 in a standing state,
The electrical connection device 60 is prevented from collapsing by contacting the floor surface together with the two rolling members 32 at three points, whereby stability is maintained.

The electrical connecting device 60 also includes a plurality of spacers 92 and 94 having the same function as the spacer 44 in the electrical connecting device 10 on the upper surfaces of the pin board 18 and the plate member 20, respectively. Similar spacers may be provided on the lower surface or the upper surface of the pin board 62 and the plate member 64.

During the energization test, first, with the space 76 open, the substrate 12 to be tested is placed on the sealing member 26 so as to receive the tip of the guide pin 46 in the hole thereof.
The space 76 is then closed by the second pin board 62 and the second plate member 64, and then the space 48 is connected to a vacuum pump such as a vacuum tank.

As a result of the above, since the space 48 is evacuated, the spaces 48, 56, 76 and 78 are also evacuated, so that the plate member 20, the substrate 12 to be tested, the second plate member 64 and the second plate member The pinboard 62 of the sealing member 24, 2 respectively.
6, 68 and 70 are elastically deformed and sucked to the pinboard 18 side, and the substrate 12 to be tested is elastically deformed to the plate member 20 side while being elastically deformed. The portions on the other surface side are pressed against the tips of the probes 22 and 66, respectively. In this state, the probes 22 and 66 are energized from the electric circuit of the energization test apparatus, so that the energization test of the substrate under test 12 is performed.

As described above, the electrical connection device 60 can carry out the energization test of the substrate under test having the portions to be brought into contact with the probe on both sides. The electrical connection device 60 is
The board 12 to be tested can be attached to and detached from the plate member 20 with the space 76 open. The electrical connecting device 60, like the electrical connecting device 10, can be attached to and detached from, and can be transported and housed in, the electrical test device.

The present invention is not limited to the above-described embodiments, and various modifications can be made without departing from the spirit of the invention.

[Brief description of drawings]

FIG. 1 is a perspective view showing an embodiment of an electrical connection device according to the present invention.

FIG. 2 is a perspective view of the electrical connecting device shown in FIG. 1 in a standing state.

FIG. 3 is a plan view of the electrical connection device shown in FIG.

4 is a sectional view taken along line 4-4 in FIG.

5 is a perspective view showing an example of a housed state of the electrical connection device of FIG. 1. FIG.

FIG. 6 is a perspective view showing another embodiment of the electrical connecting device according to the present invention.

7 is a perspective view of the electrical connecting device shown in FIG. 6 in a standing state.

FIG. 8 is a sectional view taken along line 8-8 in FIG.

[Explanation of symbols]

10,60 Electrical connection device 12 Board under test 14 boxes 16 Support plate 18,62 pin board 20,64 Plate member 22,66 probe 24, 26, 68, 70 Sealing member 28 Presser frame 30,90 handle 32 Rolling member 34 connector 36 Protective feet 38 Support plate opening 40 hinges 42,88 Fasteners 44 Spacer 46 guide pin 48,56,76,78 space 50 Elbow 52 pipes 54 Combiner 58 storage 72 Protective cover 74 Opening / closing mechanism 80 channel members 82 Air steering 84 Support 86 pin

Claims (11)

[Claims] 1. A support plate having an opening in the center, and a pinboard arranged on the support plate so as to close the opening and having one or more probes penetrating in the thickness direction thereof. , A plate member which is arranged above the pin board at a distance and has one or more holes through which the tip of the probe can penetrate. 2. A box body which is opened upward and in which the support plate is attached to the open portion of the box body so as to be able to open and close, and the open portion is released to a state in which it is closed by the support plate. An electrical connection device according to claim 1, comprising one or more fasteners that remain enabled and releasable. 3. The electrical connection of claim 2, further including a plurality of rolling members disposed on at least one sidewall of the box to allow the box to move on the floor. apparatus. 4. The electrical connection device according to claim 3, further comprising a handle disposed on each of two opposing side walls of the box body. 5. A plurality of guide pins assembled to the pin board, the plurality of guide pins extending through the plate member in the thickness direction so that the tip portions thereof are inserted into the holes of the substrate under test. The electrical connection device according to claim 1, further comprising a pin. 6. An elastically deformable first sealing member disposed between the pin board and the plate member, and a second sealing member disposed on the plate member to receive the substrate under test.
6. The sealing member according to claim 1, wherein the first and second sealing members continuously extend in a rectangular shape around a portion corresponding to the placement region of the probe. The electrical connection device according to item 1. 7. A holding frame which continuously extends in a rectangular shape around the pin board and the plate member so as to hold the plate member against the pin board, the holding frame being provided on the box body or the pin board. The electrical connection device according to any one of claims 1 to 4, further comprising an assembled holding frame. 8. A second pinboard, which is disposed above the plate member at a distance and has one or more second probes penetrating in the thickness direction of the second pinboard. And a second plate member arranged between the second pin board and the plate member, the second plate member having one or more holes through which the tip of the second probe can penetrate. The electrical connection device according to claim 1, further comprising: 9. The method according to claim 8, further comprising a protective cover disposed on the second pin board so as to cover a protruding portion of the second probe protruding upward from the second pin board. Electrical connection device. 10. A third sealing member arranged between the plate member and the second pin board, and the second sealing member.
And a fourth sealing member which is elastically deformable and is arranged between the pin board and the second plate member, wherein the third and fourth sealing members are arranged areas of the second probe. The electrical connection device according to claim 8 or 9, which continuously extends in a rectangular shape around the. 11. The opening / closing mechanism for connecting the second plate member and the second pin board to the support plate so as to open and close the space between the plate members, 11.
The electrical connection device according to 9 or 10.