JP2003004655A5 - - Google Patents

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Publication number
JP2003004655A5
JP2003004655A5 JP2001189205A JP2001189205A JP2003004655A5 JP 2003004655 A5 JP2003004655 A5 JP 2003004655A5 JP 2001189205 A JP2001189205 A JP 2001189205A JP 2001189205 A JP2001189205 A JP 2001189205A JP 2003004655 A5 JP2003004655 A5 JP 2003004655A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Application number
JP2001189205A
Other versions
JP4662194B2 (ja
JP2003004655A (ja
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Publication date
Application filed filed Critical
Priority to JP2001189205A priority Critical patent/JP4662194B2/ja
Priority claimed from JP2001189205A external-priority patent/JP4662194B2/ja
Publication of JP2003004655A publication Critical patent/JP2003004655A/ja
Publication of JP2003004655A5 publication Critical patent/JP2003004655A5/ja
Application granted granted Critical
Publication of JP4662194B2 publication Critical patent/JP4662194B2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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JP2001189205A 2001-06-22 2001-06-22 検査装置 Expired - Lifetime JP4662194B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001189205A JP4662194B2 (ja) 2001-06-22 2001-06-22 検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001189205A JP4662194B2 (ja) 2001-06-22 2001-06-22 検査装置

Publications (3)

Publication Number Publication Date
JP2003004655A JP2003004655A (ja) 2003-01-08
JP2003004655A5 true JP2003004655A5 (ja) 2008-07-24
JP4662194B2 JP4662194B2 (ja) 2011-03-30

Family

ID=19028162

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001189205A Expired - Lifetime JP4662194B2 (ja) 2001-06-22 2001-06-22 検査装置

Country Status (1)

Country Link
JP (1) JP4662194B2 (ja)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005040776A1 (ja) * 2003-10-27 2005-05-06 Nikon Corporation 表面検査装置および表面検査方法
JP4696607B2 (ja) * 2005-03-14 2011-06-08 株式会社ニコン 表面検査装置
KR100663195B1 (ko) 2006-04-25 2007-01-05 (주) 랩시스템 광학식 현미경의 편광필터구동장치
JP4873231B2 (ja) * 2006-06-02 2012-02-08 株式会社テック電子工業 偏光選択型撮像装置
JP6095359B2 (ja) * 2012-12-25 2017-03-15 オリンパス株式会社 顕微鏡
CN117462280A (zh) * 2023-12-28 2024-01-30 华科精准（北京）医疗科技有限公司 一种可减少过曝的外视镜系统

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0961718A (ja) * 1995-08-24 1997-03-07 Nikon Corp 微分干渉顕微鏡
JP4171937B2 (ja) * 1998-06-08 2008-10-29 株式会社ニコン 測定検査用顕微鏡
JP4148586B2 (ja) * 1999-03-08 2008-09-10 カシオ計算機株式会社 画像合成装置

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