JP2002525691A5 - - Google Patents

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Publication number
JP2002525691A5
JP2002525691A5 JP2000571445A JP2000571445A JP2002525691A5 JP 2002525691 A5 JP2002525691 A5 JP 2002525691A5 JP 2000571445 A JP2000571445 A JP 2000571445A JP 2000571445 A JP2000571445 A JP 2000571445A JP 2002525691 A5 JP2002525691 A5 JP 2002525691A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2000571445A
Other languages
Japanese (ja)
Other versions
JP2002525691A (ja
JP4619538B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/US1999/021682 external-priority patent/WO2000017865A1/en
Publication of JP2002525691A publication Critical patent/JP2002525691A/ja
Publication of JP2002525691A5 publication Critical patent/JP2002525691A5/ja
Application granted granted Critical
Publication of JP4619538B2 publication Critical patent/JP4619538B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2000571445A 1998-09-18 1999-09-17 伸張可能な回復力部材を有する微細加工ミラー Expired - Fee Related JP4619538B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10098998P 1998-09-18 1998-09-18
US60/100,989 1998-09-18
PCT/US1999/021682 WO2000017865A1 (en) 1998-09-18 1999-09-17 Micromachined mirror with stretchable restoring force member

Publications (3)

Publication Number Publication Date
JP2002525691A JP2002525691A (ja) 2002-08-13
JP2002525691A5 true JP2002525691A5 (xx) 2006-11-09
JP4619538B2 JP4619538B2 (ja) 2011-01-26

Family

ID=22282566

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2000571445A Expired - Fee Related JP4619538B2 (ja) 1998-09-18 1999-09-17 伸張可能な回復力部材を有する微細加工ミラー

Country Status (7)

Country Link
JP (1) JP4619538B2 (xx)
KR (1) KR100473693B1 (xx)
CN (1) CN1128440C (xx)
AU (1) AU6254999A (xx)
DE (1) DE19983566T1 (xx)
GB (1) GB2362224B (xx)
WO (1) WO2000017865A1 (xx)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7002215B1 (en) * 2002-09-30 2006-02-21 Pts Corporation Floating entrance guard for preventing electrical short circuits

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5153870A (en) * 1989-06-29 1992-10-06 Digital Equipment Corporation Rotary head actuator for optical disk
US5202875A (en) * 1991-06-04 1993-04-13 International Business Machines Corporation Multiple data surface optical data storage system
US5629794A (en) * 1995-05-31 1997-05-13 Texas Instruments Incorporated Spatial light modulator having an analog beam for steering light
US5661591A (en) * 1995-09-29 1997-08-26 Texas Instruments Incorporated Optical switch having an analog beam for steering light
JPH09152505A (ja) * 1995-11-30 1997-06-10 Sharp Corp 変形可能ミラー及びその製造方法及び光学装置並びに記録再生装置
US6044056A (en) * 1996-07-30 2000-03-28 Seagate Technology, Inc. Flying optical head with dynamic mirror
JP2001525972A (ja) * 1996-08-27 2001-12-11 クインタ・コーポレイション 微細加工を使用した光学ヘッド
JPH10188319A (ja) * 1996-12-26 1998-07-21 Sharp Corp 変形可能ミラーおよびその変形可能ミラーを用いた光記録再生装置
WO2000013210A2 (en) * 1998-09-02 2000-03-09 Xros, Inc. Micromachined members coupled for relative rotation by torsional flexure hinges

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