JP2002525691A5 - - Google Patents
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- Publication number
- JP2002525691A5 JP2002525691A5 JP2000571445A JP2000571445A JP2002525691A5 JP 2002525691 A5 JP2002525691 A5 JP 2002525691A5 JP 2000571445 A JP2000571445 A JP 2000571445A JP 2000571445 A JP2000571445 A JP 2000571445A JP 2002525691 A5 JP2002525691 A5 JP 2002525691A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10098998P | 1998-09-18 | 1998-09-18 | |
US60/100,989 | 1998-09-18 | ||
PCT/US1999/021682 WO2000017865A1 (en) | 1998-09-18 | 1999-09-17 | Micromachined mirror with stretchable restoring force member |
Publications (3)
Publication Number | Publication Date |
---|---|
JP2002525691A JP2002525691A (ja) | 2002-08-13 |
JP2002525691A5 true JP2002525691A5 (xx) | 2006-11-09 |
JP4619538B2 JP4619538B2 (ja) | 2011-01-26 |
Family
ID=22282566
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2000571445A Expired - Fee Related JP4619538B2 (ja) | 1998-09-18 | 1999-09-17 | 伸張可能な回復力部材を有する微細加工ミラー |
Country Status (7)
Country | Link |
---|---|
JP (1) | JP4619538B2 (xx) |
KR (1) | KR100473693B1 (xx) |
CN (1) | CN1128440C (xx) |
AU (1) | AU6254999A (xx) |
DE (1) | DE19983566T1 (xx) |
GB (1) | GB2362224B (xx) |
WO (1) | WO2000017865A1 (xx) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7002215B1 (en) * | 2002-09-30 | 2006-02-21 | Pts Corporation | Floating entrance guard for preventing electrical short circuits |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5153870A (en) * | 1989-06-29 | 1992-10-06 | Digital Equipment Corporation | Rotary head actuator for optical disk |
US5202875A (en) * | 1991-06-04 | 1993-04-13 | International Business Machines Corporation | Multiple data surface optical data storage system |
US5629794A (en) * | 1995-05-31 | 1997-05-13 | Texas Instruments Incorporated | Spatial light modulator having an analog beam for steering light |
US5661591A (en) * | 1995-09-29 | 1997-08-26 | Texas Instruments Incorporated | Optical switch having an analog beam for steering light |
JPH09152505A (ja) * | 1995-11-30 | 1997-06-10 | Sharp Corp | 変形可能ミラー及びその製造方法及び光学装置並びに記録再生装置 |
US6044056A (en) * | 1996-07-30 | 2000-03-28 | Seagate Technology, Inc. | Flying optical head with dynamic mirror |
JP2001525972A (ja) * | 1996-08-27 | 2001-12-11 | クインタ・コーポレイション | 微細加工を使用した光学ヘッド |
JPH10188319A (ja) * | 1996-12-26 | 1998-07-21 | Sharp Corp | 変形可能ミラーおよびその変形可能ミラーを用いた光記録再生装置 |
WO2000013210A2 (en) * | 1998-09-02 | 2000-03-09 | Xros, Inc. | Micromachined members coupled for relative rotation by torsional flexure hinges |
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1999
- 1999-09-17 CN CN99812840A patent/CN1128440C/zh not_active Expired - Fee Related
- 1999-09-17 GB GB0109131A patent/GB2362224B/en not_active Expired - Fee Related
- 1999-09-17 DE DE19983566T patent/DE19983566T1/de not_active Withdrawn
- 1999-09-17 AU AU62549/99A patent/AU6254999A/en not_active Abandoned
- 1999-09-17 WO PCT/US1999/021682 patent/WO2000017865A1/en active IP Right Grant
- 1999-09-17 JP JP2000571445A patent/JP4619538B2/ja not_active Expired - Fee Related
- 1999-09-17 KR KR10-2001-7003528A patent/KR100473693B1/ko not_active IP Right Cessation