JP2002518167A - 浄化組立体及び浄化方法 - Google Patents
浄化組立体及び浄化方法Info
- Publication number
- JP2002518167A JP2002518167A JP2000555686A JP2000555686A JP2002518167A JP 2002518167 A JP2002518167 A JP 2002518167A JP 2000555686 A JP2000555686 A JP 2000555686A JP 2000555686 A JP2000555686 A JP 2000555686A JP 2002518167 A JP2002518167 A JP 2002518167A
- Authority
- JP
- Japan
- Prior art keywords
- purification
- block
- assembly
- passage
- cleaning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000000746 purification Methods 0.000 title claims abstract description 134
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000004140 cleaning Methods 0.000 claims abstract description 67
- 239000012530 fluid Substances 0.000 claims abstract description 67
- 239000004065 semiconductor Substances 0.000 claims description 9
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 239000011800 void material Substances 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 19
- 238000004891 communication Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 8
- 239000002184 metal Substances 0.000 description 8
- 229910052751 metal Inorganic materials 0.000 description 8
- 238000003466 welding Methods 0.000 description 8
- 230000000712 assembly Effects 0.000 description 7
- 238000000429 assembly Methods 0.000 description 7
- 238000004519 manufacturing process Methods 0.000 description 7
- 230000001788 irregular Effects 0.000 description 5
- 239000013618 particulate matter Substances 0.000 description 4
- 229910001220 stainless steel Inorganic materials 0.000 description 4
- 239000010935 stainless steel Substances 0.000 description 4
- 238000011144 upstream manufacturing Methods 0.000 description 4
- 238000007796 conventional method Methods 0.000 description 3
- 239000000835 fiber Substances 0.000 description 3
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 229910000856 hastalloy Inorganic materials 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 239000002861 polymer material Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 230000004308 accommodation Effects 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000005219 brazing Methods 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000000084 colloidal system Substances 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000002788 crimping Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000011152 fibreglass Substances 0.000 description 1
- 239000002657 fibrous material Substances 0.000 description 1
- 239000000499 gel Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000010943 off-gassing Methods 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000007787 solid Substances 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/34—Chemical or biological purification of waste gases
- B01D53/74—General processes for purification of waste gases; Apparatus or devices specially adapted therefor
Landscapes
- Engineering & Computer Science (AREA)
- Environmental & Geological Engineering (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- Biomedical Technology (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physical Or Chemical Processes And Apparatus (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US9044998P | 1998-06-24 | 1998-06-24 | |
| US9327398P | 1998-07-17 | 1998-07-17 | |
| US60/090,449 | 1998-07-17 | ||
| US60/093,273 | 1998-07-17 | ||
| PCT/US1999/014377 WO1999067007A1 (en) | 1998-06-24 | 1999-06-24 | Purification assemblies and purification methods |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002518167A true JP2002518167A (ja) | 2002-06-25 |
| JP2002518167A5 JP2002518167A5 (enExample) | 2006-03-09 |
Family
ID=26782283
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000555686A Pending JP2002518167A (ja) | 1998-06-24 | 1999-06-24 | 浄化組立体及び浄化方法 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6514323B1 (enExample) |
| JP (1) | JP2002518167A (enExample) |
| WO (1) | WO1999067007A1 (enExample) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010501336A (ja) * | 2006-08-25 | 2010-01-21 | ポール・コーポレーション | 浄化要素を備える流体アセンブリ |
| JP2010501335A (ja) * | 2006-08-25 | 2010-01-21 | ポール・コーポレーション | 浄化アセンブリ及び浄化アセンブリの組立方法 |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7115152B2 (en) * | 2004-01-12 | 2006-10-03 | Friday David K | Four bed regenerable filter system |
| US7410519B1 (en) | 2005-08-16 | 2008-08-12 | Ewald Dieter H | Sandwich filter block |
| US7575616B2 (en) * | 2006-02-10 | 2009-08-18 | Entegris, Inc. | Low-profile surface mount filter |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5849394Y2 (ja) * | 1977-12-13 | 1983-11-11 | アイシン精機株式会社 | 塵埃濾過負圧管路継手 |
| US4382808A (en) * | 1981-06-26 | 1983-05-10 | Beckman Instruments, Inc. | Assembly for holding a filter |
| US5234165A (en) * | 1992-02-25 | 1993-08-10 | Tri-Tech Services, Inc. | Agricultural sprayers |
| US6015444A (en) * | 1998-02-27 | 2000-01-18 | Eaton Corporation | Apparatus and system for venting a transmission |
| US6447565B1 (en) * | 2001-05-03 | 2002-09-10 | General Motors Corporation | Transmission vent assembly |
-
1999
- 1999-06-24 WO PCT/US1999/014377 patent/WO1999067007A1/en not_active Ceased
- 1999-06-24 JP JP2000555686A patent/JP2002518167A/ja active Pending
- 1999-06-24 US US09/720,203 patent/US6514323B1/en not_active Expired - Lifetime
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010501336A (ja) * | 2006-08-25 | 2010-01-21 | ポール・コーポレーション | 浄化要素を備える流体アセンブリ |
| JP2010501335A (ja) * | 2006-08-25 | 2010-01-21 | ポール・コーポレーション | 浄化アセンブリ及び浄化アセンブリの組立方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| US6514323B1 (en) | 2003-02-04 |
| WO1999067007A1 (en) | 1999-12-29 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| A524 | Written submission of copy of amendment under article 19 pct |
Free format text: JAPANESE INTERMEDIATE CODE: A524 Effective date: 20060119 |
|
| A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20060119 |
|
| RD03 | Notification of appointment of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7423 Effective date: 20070913 |
|
| RD04 | Notification of resignation of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: A7424 Effective date: 20071001 |
|
| A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090303 |
|
| A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20090728 |