JP2002505518A5 - - Google Patents
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- Publication number
- JP2002505518A5 JP2002505518A5 JP2000533890A JP2000533890A JP2002505518A5 JP 2002505518 A5 JP2002505518 A5 JP 2002505518A5 JP 2000533890 A JP2000533890 A JP 2000533890A JP 2000533890 A JP2000533890 A JP 2000533890A JP 2002505518 A5 JP2002505518 A5 JP 2002505518A5
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US09/031,887 US5931666A (en) | 1998-02-27 | 1998-02-27 | Slip free vertical rack design having rounded horizontal arms |
| US09/031,887 | 1998-02-27 | ||
| PCT/US1999/003625 WO1999044222A1 (en) | 1998-02-27 | 1999-02-19 | Slip free vertical rack design having rounded horizontal arms |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002505518A JP2002505518A (ja) | 2002-02-19 |
| JP2002505518A5 true JP2002505518A5 (enExample) | 2006-03-30 |
Family
ID=21861930
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2000533890A Pending JP2002505518A (ja) | 1998-02-27 | 1999-02-19 | 曲線的水平アームを有するスリップ・フリーの垂直ラック |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US5931666A (enExample) |
| EP (1) | EP1064673B1 (enExample) |
| JP (1) | JP2002505518A (enExample) |
| KR (1) | KR100404032B1 (enExample) |
| CN (1) | CN1126149C (enExample) |
| AU (1) | AU3303199A (enExample) |
| CA (1) | CA2318968C (enExample) |
| DE (1) | DE69939648D1 (enExample) |
| WO (1) | WO1999044222A1 (enExample) |
Families Citing this family (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20000002833A (ko) * | 1998-06-23 | 2000-01-15 | 윤종용 | 반도체 웨이퍼 보트 |
| US6171400B1 (en) | 1998-10-02 | 2001-01-09 | Union Oil Company Of California | Vertical semiconductor wafer carrier |
| US6225594B1 (en) | 1999-04-15 | 2001-05-01 | Integrated Materials, Inc. | Method and apparatus for securing components of wafer processing fixtures |
| US6196211B1 (en) | 1999-04-15 | 2001-03-06 | Integrated Materials, Inc. | Support members for wafer processing fixtures |
| US6205993B1 (en) | 1999-04-15 | 2001-03-27 | Integrated Materials, Inc. | Method and apparatus for fabricating elongate crystalline members |
| US7055702B1 (en) * | 2000-06-06 | 2006-06-06 | Saint-Gobain Ceramics & Plastics, Inc. | Slip resistant horizontal semiconductor wafer boat |
| US6455395B1 (en) * | 2000-06-30 | 2002-09-24 | Integrated Materials, Inc. | Method of fabricating silicon structures including fixtures for supporting wafers |
| US6450346B1 (en) | 2000-06-30 | 2002-09-17 | Integrated Materials, Inc. | Silicon fixtures for supporting wafers during thermal processing |
| WO2002003428A2 (en) | 2000-06-30 | 2002-01-10 | Integrated Materials, Inc. | Silicon fixtures for supporting wafers during thermal processing and method of fabrication |
| US20020130061A1 (en) * | 2000-11-02 | 2002-09-19 | Hengst Richard R. | Apparatus and method of making a slip free wafer boat |
| US6727191B2 (en) * | 2001-02-26 | 2004-04-27 | Integrated Materials, Inc. | High temperature hydrogen anneal of silicon wafers supported on a silicon fixture |
| JP3931578B2 (ja) * | 2001-03-30 | 2007-06-20 | 信越半導体株式会社 | 気相成長装置 |
| US6629994B2 (en) * | 2001-06-11 | 2003-10-07 | Advanced Cardiovascular Systems, Inc. | Intravascular stent |
| US6835039B2 (en) * | 2002-03-15 | 2004-12-28 | Asm International N.V. | Method and apparatus for batch processing of wafers in a furnace |
| US6582221B1 (en) | 2002-07-19 | 2003-06-24 | Asm International N.V. | Wafer boat and method for treatment of substrates |
| US7256375B2 (en) * | 2002-08-30 | 2007-08-14 | Asm International N.V. | Susceptor plate for high temperature heat treatment |
| US6939132B2 (en) * | 2002-09-30 | 2005-09-06 | Samsung Austin Semiconductor, L.P. | Semiconductor workpiece apparatus |
| US7033126B2 (en) * | 2003-04-02 | 2006-04-25 | Asm International N.V. | Method and apparatus for loading a batch of wafers into a wafer boat |
| US7749196B2 (en) * | 2003-07-02 | 2010-07-06 | Cook Incorporated | Small gauge needle catheterization apparatus |
| US7181132B2 (en) | 2003-08-20 | 2007-02-20 | Asm International N.V. | Method and system for loading substrate supports into a substrate holder |
| US20050205502A1 (en) * | 2004-03-18 | 2005-09-22 | Brown Steven A | Rails for semiconductor wafer carriers |
| US7520566B2 (en) * | 2004-05-26 | 2009-04-21 | Braun Seating Incorporated | Stowable vehicle seat apparatus and method |
| US20060065634A1 (en) * | 2004-09-17 | 2006-03-30 | Van Den Berg Jannes R | Low temperature susceptor cleaning |
| US20060060145A1 (en) * | 2004-09-17 | 2006-03-23 | Van Den Berg Jannes R | Susceptor with surface roughness for high temperature substrate processing |
| US20060150906A1 (en) * | 2005-01-07 | 2006-07-13 | Selen Louis J M | Wafer boat for reduced shadow marks |
| US7972703B2 (en) * | 2005-03-03 | 2011-07-05 | Ferrotec (Usa) Corporation | Baffle wafers and randomly oriented polycrystalline silicon used therefor |
| JP5184040B2 (ja) * | 2007-10-12 | 2013-04-17 | コバレントマテリアル株式会社 | 縦型ウエハボート |
| US20110259840A1 (en) * | 2010-04-23 | 2011-10-27 | Advanced Semiconductor Engineering, Inc. | Semiconductor package magazine |
| FI122720B (fi) | 2010-07-13 | 2012-06-15 | Tamturbo Oy | Turbokompressorin säätöratkaisu |
| US9153466B2 (en) * | 2012-04-26 | 2015-10-06 | Asm Ip Holding B.V. | Wafer boat |
| JP6770461B2 (ja) * | 2017-02-21 | 2020-10-14 | クアーズテック株式会社 | 縦型ウエハボート |
| KR102768950B1 (ko) | 2020-02-06 | 2025-02-19 | 삼성디스플레이 주식회사 | 기판용 카세트 |
| KR102709165B1 (ko) * | 2021-10-29 | 2024-09-24 | 솔믹스 주식회사 | 웨이퍼 보트 |
Family Cites Families (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3660886A (en) * | 1969-02-20 | 1972-05-09 | Ginori Ceramica Ital Spa | Method of making firing setters for tiles and other ceramic articles |
| JPS6216516A (ja) * | 1985-07-15 | 1987-01-24 | Mitsubishi Electric Corp | 半導体製造装置 |
| US5169453A (en) * | 1989-03-20 | 1992-12-08 | Toyoko Kagaku Co., Ltd. | Wafer supporting jig and a decompressed gas phase growth method using such a jig |
| GB9021873D0 (en) * | 1990-10-09 | 1990-11-21 | Groom Bryan Ltd | Ware support apparatus |
| JP3204699B2 (ja) * | 1990-11-30 | 2001-09-04 | 株式会社東芝 | 熱処理装置 |
| JPH05102056A (ja) * | 1991-10-11 | 1993-04-23 | Rohm Co Ltd | ウエハー支持具 |
| JP3234617B2 (ja) * | 1991-12-16 | 2001-12-04 | 東京エレクトロン株式会社 | 熱処理装置用基板支持具 |
| JPH06163440A (ja) * | 1992-11-16 | 1994-06-10 | Shin Etsu Chem Co Ltd | 半導体縦型拡散炉用治具 |
| US5492229A (en) * | 1992-11-27 | 1996-02-20 | Toshiba Ceramics Co., Ltd. | Vertical boat and a method for making the same |
| JP3245246B2 (ja) * | 1993-01-27 | 2002-01-07 | 東京エレクトロン株式会社 | 熱処理装置 |
| JPH07147258A (ja) * | 1993-11-25 | 1995-06-06 | Hitachi Ltd | 半導体ウェハの熱処理装置 |
| JP3316068B2 (ja) * | 1993-12-01 | 2002-08-19 | 東京エレクトロン株式会社 | 熱処理用ボート |
| CA2218518C (en) * | 1995-05-05 | 2002-10-01 | Saint-Gobain Industrial Ceramics, Inc. | Slip free vertical rack design |
| US5534074A (en) * | 1995-05-17 | 1996-07-09 | Heraeus Amersil, Inc. | Vertical boat for holding semiconductor wafers |
| US5725101A (en) * | 1995-06-26 | 1998-03-10 | Kakizaki Manufacturing Co., Ltd. | Thin-plate supporting container |
| JPH09251961A (ja) * | 1996-03-15 | 1997-09-22 | Toshiba Corp | 熱処理用ボート |
| JPH09260296A (ja) * | 1996-03-21 | 1997-10-03 | Sumitomo Sitix Corp | ウェーハ支持装置 |
| JPH09306980A (ja) * | 1996-05-17 | 1997-11-28 | Asahi Glass Co Ltd | 縦型ウエハボート |
| JPH10321543A (ja) * | 1997-05-20 | 1998-12-04 | Sumitomo Metal Ind Ltd | ウェハ支持体及び縦型ボート |
-
1998
- 1998-02-27 US US09/031,887 patent/US5931666A/en not_active Expired - Lifetime
-
1999
- 1999-02-19 AU AU33031/99A patent/AU3303199A/en not_active Abandoned
- 1999-02-19 CA CA002318968A patent/CA2318968C/en not_active Expired - Lifetime
- 1999-02-19 JP JP2000533890A patent/JP2002505518A/ja active Pending
- 1999-02-19 CN CN99803417A patent/CN1126149C/zh not_active Expired - Lifetime
- 1999-02-19 DE DE69939648T patent/DE69939648D1/de not_active Expired - Lifetime
- 1999-02-19 KR KR10-2000-7009357A patent/KR100404032B1/ko not_active Expired - Lifetime
- 1999-02-19 EP EP99936141A patent/EP1064673B1/en not_active Expired - Lifetime
- 1999-02-19 WO PCT/US1999/003625 patent/WO1999044222A1/en not_active Ceased