JP2002372504A - X-ray fluoroscope - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an X-ray fluoroscope capable of carrying out the fluoroscopic inspection of one or two test specimens simultaneously by a single X-ray tube, and obtaining a sharp image. SOLUTION: A shutter opening/closing device 2 having shutters 2a and 2b for independently shielding X-ray from both sides is provided on a radiation aperture for storing the X-ray tube 1, one test specimen 3 or two test specimens 3 on the right and left sides are set on a table 13, I. I. 5s of two X-ray image detection units are arranged across the test specimens, and a partition 4 for shielding the scattered radiation is provided before a boundary thereof to perform the X-ray fluoroscopic inspection.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an X-ray fluoroscope for nondestructive inspection and the like, and more particularly, to an X-ray fluoroscope using one X-ray tube.
X for inspecting the specimens simultaneously by seeing through with the X-ray image detector
The present invention relates to a fluoroscope.

[0002]

2. Description of the Related Art As an industrial non-destructive inspection apparatus, for example, a non-destructive X-ray inspection apparatus used for inspection of foreign substances in food, conditions in cans, casting nests, welding of pipes, air cargo and the like. Is a state in which the X-ray tube and the X-ray image detector are fixed,
An NDT object is set on a table or a belt conveyor, and X-rays are emitted from an X-ray tube across the NDT object. The image is detected by a detection unit, processed by an image processing device, displayed on an output device such as a monitor, or stored in a storage device, and the nondestructive inspection object is checked for any abnormality. A method in which a cassette or the like with a film attached thereto is closely attached to the back side of the specimen and X-rays are radiated from the opposite side to inspect details is also used depending on the shape of the specimen, as shown in FIG. In general, an image intensifier (I.I.5) and a CC
An inspection method using an apparatus provided with an X-ray image detection unit combined with a D camera is often used. Pipe welding, food inspection, baggage inspection, and the like are performed by continuous perspective. This shortens inspection time, improves defect identification,
Reduction of the burden on the operator by automation, improvement of safety from X-ray exposure, and the like are being attempted.

Further, in order to inspect the details of a specimen,
Using the X-ray tube 1 with a smaller focal point,
X-ray tube and X-ray
It is set on the platform 13 in the middle of the line image detection unit,
The X-ray transmission image is taken into the X-ray image detection unit by 2.5 times geometrical magnification, and the details are inspected. For example, for the purpose of semiconductor packaging development, mounting inspection, and quality assurance, internal defects and the like are examined using an X-ray tube having a minute focus. This X-ray tube has an open structure, uses a thin tungsten plate as a target, shoots a focused electron beam into the target, and radiates X-rays generated therethrough from the back side. In addition, even in the case of the ordinary reflection type X-ray tube 1, one having a small focal size is used in order to observe the fine structure of the inspection component. In addition, a filter 14 is provided at an emission port of the X-ray tube 1 for cutting soft X-rays, thereby improving image quality.

[0004] Further, the specimen 3 is set on the table 13 and
There is also an X-ray CT apparatus that rotates 0 degrees. Specimen 3 is the table 1
3 is set on a sample stage which is rotated at a constant speed by a motor provided in the X-ray tube 1 with the test piece 3 interposed therebetween. I. In order to protect the scattered X-rays from entering, slits for X-rays whose opening degree is variable in the horizontal direction are I.5.
I. 5 and the X-ray tube 1 and I. I. 5 is fixed,
The test body 3 is rotating at a predetermined speed on the rotating sample table. The rotation axis of the specimen 3 is the X-ray tube 1 and I. I. It is set on the line connecting the centers of 5. With such an arrangement of each unit, the principle is the same as that of a medical X-ray CT apparatus. Then, the X-ray transmission signal from the rotating nondestructive test object 3 is sent to the data processing device through the preamplifier.
The data processing device includes an A / D converter, a DAS (data collection unit), a high-speed processing unit, a controller, a CP
U, a magnetic disk, and the like. The image is reconstructed from the acquired data, and a horizontal tomographic image of the specimen is displayed on a monitor. Then, if the rotational scanning of the specimen is performed while changing the height of the rotating sample table, a tomographic image of each layer can be obtained. X-rays from the X-ray tube 1 penetrate the rotating test specimen 3 and pass through the I.D. I. As a method for reconstructing an image from the X-ray transmission signal projected on the X-ray image 5, a convolution back projection (CBP) method is used. In the CPB method, image reconstruction is performed by obtaining two stages of a convolution (convolution) operation and a back projection (back projection) operation.

[0005]

The conventional X-ray fluoroscope is constructed as described above. In recent years, however, the amount of non-destructive inspection objects has increased and a large number of specimens have to be inspected by X-rays. There is a need to add an X-ray fluoroscope. When the X-ray fluoroscope is added, the cost increases, and there is a problem that it is desired to reduce capital investment as much as possible. In addition, I.P. I. 5 is used, two specimens 3 are arranged on the table 13 side by side, and the inspection is performed while seeing through at the same time. However, the scattered X-rays generated from one specimen 3 Superimposed on the fluoroscopic image of body 3 I. Input to 5 and 2
There is a problem in that the scattered rays generated by the individual test pieces 3 interfere with each other, deteriorating the image quality of the X-ray transmission image, resulting in an image without contrast.

The present invention has been made in view of such circumstances, and in order to suppress capital investment, two or one specimen can be inspected simultaneously with a single X-ray tube. It is an object of the present invention to provide an X-ray fluoroscope capable of obtaining a sharp image.

[0007]

In order to achieve the above object, an X-ray fluoroscope according to the present invention comprises an X-ray tube and an X-ray image detecting unit disposed in front of and behind a test object on a table. An X-ray fluoroscope for irradiating an X-ray radiated from an X-ray tube to the specimen to obtain an X-ray transmission image from an X-ray image detection unit, wherein the X-ray tube is provided at an X-ray emission port of a storage container of the X-ray tube, Shutter opening and closing device that independently shields X-rays from
2 specimens and 2 specimens on both left and right sides can be seen through
An X-ray image detection unit adjacent to the table and a partition plate for shielding scattered radiation that interferes with each other in front of the boundary between the two X-ray image detection units are provided so that the X-ray image can be seen through.

The X-ray fluoroscope of the present invention is constructed as described above, and is provided with a shutter opening / closing device for independently blocking X-rays from both sides at the X-ray emission opening of the storage container of the X-ray tube. One specimen and the two specimens on the left and right sides set above are viewed through two X-ray image detectors, and a scattered radiation shielding partition is provided in front of the boundary between the two X-ray image detectors. By providing a plate, scattered X-rays that interfere with each other can be shielded and seen through. for that reason,
With a shutter opening and closing device and a scattered radiation shielding partition plate,
The scattered X-rays generated in one specimen are not superimposed on the X-ray fluoroscopic images of the other specimens, and mutual interference of scattered rays is eliminated. I. Thus, a clear X-ray image with improved contrast can be obtained.

[0009]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of the X-ray fluoroscope according to the present invention will be described with reference to FIG. FIG. 1 shows an X-ray tube 1 of an X-ray fluoroscope according to the present invention, a table 13 of a test body 3, an I.D. I. FIG. 5 is a diagram showing an arrangement of No. 5; The present X-ray fluoroscopic apparatus includes an X-ray tube 1 housed in a storage container, and shutters 2a, 2 which can be opened and closed independently from both sides provided in an X-ray emission opening of the storage container.
b, a table 13 for setting the test body 3, and two I.Bs for detecting an X-ray image transmitted through the set test body 3. I. (Image intensifier) 5 and its two I.O. I. 5 and a partition plate 4 for shielding scattered X-rays provided on the adjacent front boundary surface.

In the present X-ray fluoroscope, a shutter opening / closing device 2 having shutters 2a and 2b operating independently on the left and right is provided at an emission port portion of an X-ray tube 1, and two or one test specimens are mounted on a table 13. 3 and set both shutters 2a and 2b open when inspecting two specimens 3 simultaneously, and when inspecting one specimen 3, either one of the shutters (2a
Or 2b) is opened and the transmission X-ray image is obtained from both I.D. I. 5
Or any I. I. 5 to detect. At that time, the scattered X-rays scattered by the specimen 3 are shielded by the partition plate 4 and the other I.D. I. 5 is not input. Thereby, a contrast X-ray image can be obtained. One X
Two specimens 3 are simultaneously placed in two I.D. I. 5 can be seen through, and the table 13 is connected to the X-ray tube 1 and the I.D. I.
By changing the position back and forth between the five positions, it is possible to change the magnification and perform the magnified fluoroscopy. I. I. Depending on the input field of view and the magnification, the X-ray fluoroscopic angle may be about 28 ° with both shutters 2a and 2b fully open. Also, one large test piece 8 is set on the table 13 and both I.D. I. 5, it is also possible to see through.

FIG. 2 shows a shutter opening / closing device 2 of the X-ray fluoroscopic apparatus. (A) shows a top view and (b) shows a front view. In the shutter opening / closing device 2, a container storing the X-ray tube 1 is mounted on a table 10, and the X-ray tube 1
A guide plate 7a is attached to a radiation port portion on the front surface of the X-ray tube protective cover 14 covering the X-ray tube. The shutter opening / closing cylinders 9a are provided on both sides of the guide plate 7a.
And a shutter opening / closing cylinder 9b. A shutter 2a for shielding X-rays and a shutter 2b are mounted at the tip of the cylinder via a connecting bush 11, respectively. The filter opening / closing cylinder 8 is mounted on the cylinder mounting plate 15.
Is attached, and the filter 8a can be taken in and out vertically.

The operation of the shutter opening / closing device 2 is performed as follows. The shutter 2a attached to the guide plate 7a is opened and closed by the reciprocating motion of a piston of an air cylinder attached to the shutter opening / closing cylinder 9a. Similarly, the shutter 2b is opened and closed by the reciprocating motion of the piston of the air cylinder attached to the shutter opening / closing cylinder 9b. Then, for example, when seeing through only the left test body 3, the shutter opening / closing cylinder 9b is operated,
The operation is performed with the shutter 2b opened. At that time, the shutter 2a is in a closed state. Similarly, when only the right specimen 3 is to be seen through, the shutter opening / closing cylinder 9a is operated and the shutter 2a is opened. At that time, the shutter 2b is in a closed state. When two right and left test specimens 3 are to be seen through at the same time, the left and right shutter opening / closing cylinders 9a and 9b are operated to open both shutters 2a and 2b. At this time, the partition plate 4 can prevent interference by scattered X-rays generated by the right and left test specimens 3. That is, in the present apparatus, it is possible to perform the fluoroscopy of the left and right test specimens 3 independently and to perform the fluoroscopy of the left and right test specimens 3 simultaneously.

Further, the test piece 3 allows the filter 8a
To the emission port of the X-ray tube 1 and the filter opening / closing cylinder 8
By cutting the soft X-ray component, a clear X-ray image can be obtained. Also, both shutters 2
The tips of a and 2b are in the form of a step that meshes with each other so that when both shutters 2a and 2b are closed, there is no leakage of X-rays.

In the above embodiment, the I.D.
I. 5 has been described. I. Reference numeral 5 denotes an image intensifier which receives transmitted X-rays from the test body 3 and forms an X-ray image. The image intensifier 5 may be replaced with a semiconductor flat panel imaging device. As an imaging device for a semiconductor flat panel, the imaging device is generally composed of an X-ray conversion film that converts X-rays into light, a photodiode array arranged immediately below the X-ray conversion film, and a switching element connected to each photodiode array, After the X-ray irradiation, by sequentially turning on each switching element, the signal charges stored in each pixel are read out to form an X-ray image. It has a radiation sensor array consisting of a conversion film that directly outputs, and switching elements are connected to the electrodes arranged in a matrix just below it, and the signal charges accumulated in each pixel by sequentially turning on each switching element at the time of irradiation For reading X-rays and forming an X-ray image.
In either type, there is a type in which a data storage device is built in and an image is formed by an OFF line, and a type in which a signal is transmitted from the X-ray image detection unit 3 by an ON line. The use of this semiconductor flat panel does not occupy a space unlike an image intensifier, so that the X-ray fluoroscope becomes compact.

[0015]

The X-ray fluoroscope according to the present invention is constructed as described above, and uses one X-ray tube and two X-ray image detectors, and is provided at the radiation outlet of the storage container of the X-ray tube. A shutter opening / closing device that independently shields X-rays from both sides is provided, and a partition plate for shielding scattered radiation is provided in front of the boundary between the two X-ray image detection units, and one specimen set on the table or the left and right Since the two specimens on both sides are seen through, the scattered X-rays generated by one specimen do not overlap with the X-ray fluoroscopic images of other specimens, and mutual interference of scattered rays can be eliminated. it can. Thereby, a clear X-ray image with improved contrast can be obtained. Further, since two specimens can be inspected simultaneously by one X-ray tube, it is possible to cope with a large amount of X-ray inspections and to improve the inspection efficiency. Further, since only one X-ray tube needs to be installed, the cost of capital investment can be reduced.

[Brief description of the drawings]

FIG. 1 is a view showing one embodiment of an X-ray fluoroscope according to the present invention.

FIG. 2 is a view showing a structure of a shutter opening / closing device of the X-ray fluoroscopic apparatus according to the present invention.

FIG. 3 is a diagram showing a conventional X-ray fluoroscope.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 ... X-ray tube 2 ... Shutter opening / closing device 2a, 2b ... Shutter 3 ... Specimen 4 ... Partition plate 5 ... I. I. 6 Opening 7a, 7b Guide plate 8 Filter opening / closing cylinder 8a, 14 Filter 9a, 9b Shutter opening / closing cylinder 10 Stand 11 Connection bush 13 Stand 14 X-ray tube protection cover 15 Cylinder mounting plate

Claims (1)

[Claims] An X-ray tube and an X-ray image detecting unit are disposed in front of and behind a test object on a table, and X-rays emitted from the X-ray tube are irradiated on the test object to form an X-ray image. In an X-ray fluoroscopic apparatus that obtains an X-ray transmission image from a detection unit, an X-ray of a storage container of the X-ray tube is used.
A shutter opening / closing device provided at a radiation opening for independently blocking X-rays from both sides; and two adjacent Xs capable of seeing through one test object set on a table and two test objects on both the left and right sides. An X-ray fluoroscope, comprising: a line image detecting unit; and a partition plate for shielding scattered radiation that interferes with each other in front of a boundary between the two X-ray image detecting units so as to allow the X-ray to be viewed.