JP2002372413A - Terminal holder for measurement - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a terminal holder for measurement capable of exchanging and holding a terminal for measurement easily, simply and accurately and preventing distortion of the terminals for measurement. SOLUTION: The holder comprises a terminal pushing axis 2 where a pushing recess 2a touching the terminal for measurement 1 is formed at the tip end and an attaching part 2c for detachably attaching to a measurement apparatus is formed at the other end, and a cylindrical holder member 3 which contains the terminal for measurement 1 inside detachably and has an opening 3a at the tip with projection of part of the terminal for measurement 1 and on which a female screw 3b fitting to a male screw 2b of the terminal pushing axis 2 is formed. A plurality of screw penetration holes 3e are formed in the chin part 3d of one end of the cylindrical holder member 3 and a fixing member 4 having a plurality of screw holes 4a at the portion facing the chin part 3d is arranged on the terminal pushing axis 2. Alignment control screws 6 are screwed in the screw holes 4a of the fixing member 4 via the screw penetration holes 3e of the chin part 3d to fix the holder.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring terminal holder for exchangeably holding measuring terminals used for measuring equipment such as a lens for measuring an object to be measured.

[0002]

2. Description of the Related Art In various measuring instruments for measuring the surface shape, three-dimensional shape, wall thickness, etc. of an object to be measured, such as a lens, a measuring device for contacting the surface of the object to be scanned and scanning the surface is provided. Terminals are used, and this type of measurement terminal
In general, the measuring terminal 101 is formed in a spherical shape with steel, sapphire, ruby, Delrin, or the like. As shown in FIG.
No. 03 is bonded via an adhesive 104, and is used for measurement without any damage on the surface.

[0003]

In a measuring instrument having the measuring terminal as described above, the measuring frequency and the number of times of measurement and the number of measurement surfaces are measured in order to make the measuring terminal contact and scan the object to be measured. Depending on measurement conditions such as roughness, wear of the measurement terminals occurs, which affects measurement accuracy.

[0004] Therefore, when the measuring terminal is worn, it is necessary to replace the measuring terminal. As a procedure for replacing the measuring terminal, usually, the terminal holding shaft 102 is removed from the measuring device, The measuring terminal 101 is peeled off from the concave portion 103 by giving an impact to a part of the terminal holding shaft 102, and the adhesive remaining on the surface of the concave portion 103 is removed.
Is applied to bond a new measuring terminal 101. Thereafter, the terminal holding shaft 10 to which the measuring terminal 101 is adhered and fixed is attached.
2 is attached to the measuring instrument, and the dial indicator confirms that the measuring terminal 101 is coaxial with the measuring axis. When the measurement terminal 101 is not coaxial with the measurement axis, it is necessary to perform a coaxial adjustment operation for adjusting the measurement terminal 101 to be within the accuracy.

As described above, in order to replace the measuring terminal, it is necessary to accurately bond the measuring terminal to the terminal holding shaft and accurately attach the terminal holding shaft to the measuring device. Work involving skill and skill has been required to check the bonding accuracy when bonding and the accuracy when attaching the terminal holding shaft to the measuring device. Therefore, there has been a need for a measuring terminal holder that can easily and accurately replace measuring terminals by eliminating these skills and operations requiring skill.

A conventional measuring terminal is a measuring terminal 1.
01 is fixed by the adhesive 104, the holding force of the measuring terminal 101 is weak, and a situation occurs in which the measuring terminal 101 is peeled off by an impact or the like during the measurement. Reuse was difficult due to adhesion of the adhesive.

In view of the foregoing, the present invention has been made in view of the above-mentioned unsolved problems of the prior art, and can easily and easily exchange and hold measurement terminals with high accuracy. It is an object of the present invention to provide a measuring terminal holder capable of preventing deformation of a terminal.

[0008]

In order to achieve the above object, a measuring terminal holder according to the present invention is configured to measure an object to be measured by scanning while contacting the surface of the object to be measured. A measuring terminal holder for holding the measuring terminal, the terminal having a holding concave portion at the distal end portion that abuts the measuring terminal, and a mounting portion detachably mounted to the measuring device at the other end portion. A holding shaft and a measurement terminal are detachably housed therein, and an opening from which a part of the measurement terminal protrudes is provided at a distal end, and is formed so as to be detachably attached to the terminal holding shaft. A cylindrical holding member is provided, and the measurement terminal is exchangeably fixed and held by a holding recess of the terminal holding shaft and an opening peripheral portion of the cylindrical holding member.

In the measuring terminal holder of the present invention, it is preferable that the cylindrical holding member is formed so as to taper in diameter toward a front end portion and has an opening at the front end portion.
Further, it is preferable that the holding recess at the tip of the terminal holding shaft is formed in a substantially conical shape.

In the measuring terminal holder according to the present invention, it is preferable that the terminal holding shaft and the cylindrical holding member are detachably mounted by screw connection.

In the measuring terminal holder of the present invention, a flange having a plurality of screw insertion holes is integrally formed at one end of the cylindrical holding member, and the flange is formed on the terminal pressing shaft. A fixing member having a plurality of screw holes is formed so as to face the alignment member, and an alignment adjusting screw can be screwed and fixed to the screw hole of the fixing member via the screw insertion hole of the flange portion. Is preferred.

[0012]

According to the measuring terminal holder of the present invention, in a measuring instrument for measuring an object to be measured by bringing the terminal for measurement into contact with the surface of the object to be measured and scanning the surface, the terminal for measuring is connected to the terminal. By configuring the holder so that it can be replaced and held between the holding recess of the holding shaft and the periphery of the opening of the cylindrical holding member, the measurement terminals can be easily replaced without the need for skill or skill as in the past. In addition, the measurement can be easily performed, the coaxial adjustment with respect to the measurement axis of the measurement device can be easily performed, and the measurement terminal can be accurately held without being deformed. Therefore,
Accurate measurement is always possible, and the measurement accuracy can be stabilized.

[0013]

Embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a sectional view showing a configuration of a measuring terminal holder of the present invention. FIG. 2 is a diagram showing a profile of an aspheric lens using a laser interferometer by using the measuring terminal holder of the present invention. FIG. 3 is a schematic diagram schematically illustrating a configuration of a three-dimensional shape measuring device to be measured. FIG. 3 is a configuration of a thickness measuring device that measures a thickness of a lens using a measuring terminal holder of the present invention. It is a schematic diagram which schematically illustrates.

As shown in FIG. 1, the measuring terminal holder of the present invention has a terminal pressing shaft portion 2 for holding the measuring terminal 1 in a replaceable manner and a cylindrical holding member 3, The terminal holding shaft 2 and the cylindrical holding member 3 are formed so as to have a fitting relationship of h7. For example, when the outer diameter of the terminal holding shaft 2 is Φ10 mm, the cylindrical holding member 3 is attached to the terminal holding shaft. The portion 2 is formed to have an inner diameter that is about 0 to 15 μm larger than the outer diameter.

The terminal holding shaft 2 has a male screw 2b which is screw-engaged with a female screw 3b formed on the inner peripheral surface of the cylindrical holding member 3 at a substantially middle portion in the vertical direction. A substantially conical holding recess 2a which is in contact with the measuring terminal 1 is formed at the tip thereof, and has a diameter such that it can be detachably attached to a measuring shaft (not shown) of the measuring instrument at the upper end. A mounting portion 2c provided with a screw is formed on the outer peripheral surface of which is enlarged.

The lower end portion of the cylindrical holding member 3 is tapered in a tapered shape toward the front end.
An opening 3a is formed in which the measuring terminal 1 is removably housed and a part of the measuring terminal 1 projects, and a cylindrical holding member 3 is provided near the opening 3a at the distal end. An air hole 3c is formed to allow the internal air to escape when fitted into the terminal holding shaft 2. On the inner peripheral surface above the cylindrical holding member 3, the male screw 2 of the terminal holding shaft 2 is provided.
b is formed with a female screw 3b which is detachably screw-engaged. An alignment adjusting screw 6 can be inserted into a flange 3d extending outward at the upper end of the cylindrical holding member 3 and the flange 3d (that is, the cylindrical holding member 3) is horizontally moved. Screw insertion hole 3e slightly larger than the outer diameter of alignment adjustment screw 6 so that movement adjustment can be performed.
Are formed.

A ring-shaped fixing member 4 having a plurality of screw holes 4a formed below the mounting portion 2c of the terminal pressing shaft 2 is fixed to the terminal pressing shaft 2 and has an L-shaped cross section. The ring-shaped fixing member 4 is held by the holding ring member 5 and is positioned so as to face the flange 3d of the cylindrical holding member 3, and the screw hole 4a has a screw insertion hole for the flange 3d. Alignment screw 6 to be inserted into through hole 3e
For tightening and fixing.

In the measuring terminal holder 10 constructed as described above, when the measuring terminal 1 is mounted, the measuring terminal 1 is inserted into the cylindrical holding member 3 and an opening at the tip thereof is opened. In a state where a part of the measurement terminal 1 is held so as to protrude from the terminal holding shaft 3a, the cylindrical holding member 3 is fitted into the terminal holding shaft 2, and the female screw 3b of the cylindrical holding member 3 is fitted into the male screw 2b of the terminal holding shaft 2. And screwed into it. At this time, the measuring terminal 1 has a substantially conical holding recess 2 a of the terminal holding shaft 2 and an opening 3 of the cylindrical holding member 3.
It is held by the inclined surface near a.

Thereafter, the alignment adjusting screw 6 is inserted into the screw insertion hole 3e of the flange 3d of the cylindrical holding member 3 and screwed into the screw hole 4a of the ring-shaped fixing member 4, thereby forming the cylindrical member. The holding member 3 and the terminal holding shaft 2 are fixed. The measurement terminal holder 10 assembled and fixed in this way is mounted on a measurement axis (not shown) of the measurement device via the screw of the mounting portion 2c.

After attaching the measuring terminal holder 10 to the measuring device, it is confirmed using a dial indicator that the measuring terminal 1 is coaxial with the measuring axis of the measuring device. When the coaxial adjustment is required, the cylindrical holding member 3 can be adjusted by loosening the alignment adjusting screw 6.
Can be moved in the horizontal direction with respect to the terminal holding shaft portion 2 to perform coaxial adjustment. That is, by loosening the alignment adjusting screw 6 and appropriately moving the cylindrical holding member 3 and the measuring terminal 1 horizontally in any of the front, rear, left, and right directions with respect to the terminal holding shaft 2, the predetermined accuracy is achieved. And then the alignment adjustment screw 6
To complete the coaxial adjustment.

As described above, by holding and holding the measuring terminal 1 by the terminal holding shaft portion 2 and the cylindrical holding member 3, the holding concave portion 2a for holding and holding the measuring terminal 1 is substantially conical. By making the shape, the peripheral portion of the opening 3a that comes into contact with the measuring terminal of the cylindrical holding member 3 is formed as an inclined surface, the measuring terminal 1 can be held with high accuracy, and the deformation of the measuring terminal 1 is prevented. Can also. In addition, the coaxial adjustment can be easily and easily performed.

When replacing the worn measuring terminal 1 with a new measuring terminal, the alignment adjusting screw 6 is removed from the ring-shaped fixing member 4 after the measuring terminal holder 10 is removed from the measuring device. The female screw 3b of the cylindrical holding member 3 and the terminal holding shaft 2 are unscrewed from the screw hole 4a.
By releasing the screw engagement of the male screw 2b, the cylindrical holding member 3 can be removed from the terminal holding shaft 2. The worn measuring terminal 1 is detached from the cylindrical holding member 3 and a new measuring terminal 1 is inserted. Thereafter, the cylindrical holding member 3 is fitted into the terminal holding shaft 2 in the above-described procedure, and the measurement is performed. The terminal holder 10 can be assembled.
When only a part of the worn measuring terminal 1 is worn, the measuring terminal may be rotated so that a part other than the worn part comes into contact with the surface to be measured. it can.

By using the measuring terminal holder of the present invention configured as described above, the replacement time of the measuring terminal can be reduced by about 50% as compared with the conventional measuring terminal of the bonding type. Also, there is no terminal peeling during measurement,
Accurate measurement has become possible. Furthermore, by using the measurement terminal holder of the present invention, the measurement terminal that has been partially worn is used by rotating the measurement terminal so that a portion other than the worn portion comes into contact with the surface to be measured. It is also possible to use the same measurement terminal six times by sequentially changing the use position of the measurement terminal.

Next, FIG. 2 shows a measuring instrument capable of performing measurement using the above-described measuring terminal holder of the present invention.
This will be described with reference to FIG.

In the three-dimensional shape measuring device 20 shown in FIG.
Is brought into contact with an aspheric lens 23 as an object to be measured, and the lens 23 to be measured is rotated around a point 24 a which is the center of the radius of curvature of the reference spherical surface 24, so that the lens 2 to be measured is
The movement of the measuring terminal 21 in contact with the surface of
The three-dimensional shape of the lens to be measured is measured by measuring with the movement of 2 and reading the amount of movement from the reference spherical surface 24.
At this time, the laser light emitted from the laser oscillator 25 is transmitted to the fixed mirror 26, the half mirror 27, and the filler 22.
The light and dark of the interference fringes are converted into a photocurrent by a laser interferometer composed of a mirror 22a and a light receiving element 28 attached to the light source. The three-dimensional shape of the lens 23 is measured.

In the measurement of the aspherical lens by such a three-dimensional shape measuring instrument 20, since the surface of the object to be measured has an aspherical shape, the lens 23 to be measured and the measuring terminal 21 are measured.
Since the contact points of the measurement terminals 21 shift, the measurement terminals 21 are easily worn, and accurate measurement cannot be performed with the worn measurement terminals 21. In particular, for confirmation of shape accuracy, sphericity of 1 μm
It is assumed that the following unworn measuring terminals are used. Therefore, by using the above-described measuring terminal holder of the present invention, it is possible to easily and easily replace the measuring terminal with a new non-wearing measuring terminal, and it is not always worn. Measurement can be performed using the measurement terminal, and measurement accuracy can be stabilized.

As shown in FIG. 3, in a thickness measuring device 30 for measuring the thickness of an object to be measured, a filler 3 is attached to a lens 33 to be measured whose lower side is held by a terminal 34.
The measurement terminal 31 attached to the front end of the lens 2 is brought into contact with the lens 33, and the measurement lens 33 is moved back and forth and left and right so that the measurement terminal 31 contacts the center of the lens 33 to be measured. The center position of the lens 33 is obtained and its numerical value is read. At this time, the filler 32 is connected to a gear (not shown) for rotating the scale, and reads the operation amount of the filler 32 from the scale plate 35 from the scale rotating via the gear.

Even when the thickness dimension is measured by such a method, the measuring terminal 31 and the terminal 34 are liable to be worn because the lens 33 to be measured is shifted back and forth and right and left. Good wall thickness measurements are not possible. Therefore, even in this type of thickness measuring instrument, by using the measuring terminal holder of the present invention, it is possible to easily and easily replace the measuring terminal with a new, unworn measuring terminal. The measurement can be performed using a measurement terminal which is not always worn, and the measurement accuracy can be stabilized.

[0030]

As described above, according to the present invention,
The measurement terminal can be replaced by using a measurement terminal holder that is configured to hold the measurement terminal interchangeably between the holding recess of the terminal holding shaft and the periphery of the opening of the cylindrical holding member. It can be done easily and easily without the need for skill or skill as in the past, it can also easily adjust the coaxial to the measuring axis of the measuring equipment, and it can also perform precision without deforming the measuring terminals Can hold well. Therefore, accurate measurement can always be performed, and the measurement accuracy can be stabilized.

[Brief description of the drawings]

FIG. 1 is a sectional view showing a configuration of a measuring terminal holder of the present invention.

FIG. 2 is a schematic diagram schematically illustrating a configuration of a three-dimensional shape measuring instrument for measuring a profile of an aspheric lens by a laser interferometer using the measuring terminal holder of the present invention.

FIG. 3 is a schematic diagram schematically illustrating a configuration of a thickness measuring device for measuring a thickness of a lens using the measuring terminal holder of the present invention.

FIG. 4 is a schematic diagram illustrating an example of a conventional measurement terminal holder.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Measurement terminal 2 Terminal holding shaft part 2a Holding concave part 2b Male screw 2c Attachment part 3 Cylindrical holding member 3a Opening 3b Female screw 3c Air hole 3d Flange part 3e Screw insertion hole 4 Fixing member 4a Screw hole 5 Holding ring member 6 Alignment Adjusting screw 10 Measurement terminal holder 20 Three-dimensional shape measuring instrument 21 Measurement terminal 22 Filler 22a Mirror 23 Object to be measured (lens) 24 Reference spherical surface 24a Center of curvature radius (point) 25 Laser oscillator 26 Fixed mirror 27 Half mirror 28 Light receiving Element 29 Counter 30 Thickness measuring device 31 Measurement terminal 32 Filler 33 Measurement object (lens) 34 Terminal 35 Scale plate

Claims (5)

[Claims] 1. A measuring terminal holder for holding a measuring terminal configured to measure an object by contacting and scanning the surface of the object. A terminal holding shaft portion having a holding concave portion in contact with the distal end portion and having an attaching portion detachably attached to the measuring device at the other end portion; a measuring terminal which detachably accommodates the measuring terminal inside and the measuring terminal; And a cylindrical holding member formed to be detachably attached to the terminal pressing shaft portion, the pressing concave portion of the terminal pressing shaft portion and the cylinder being provided. A measurement terminal holder for exchangeably fixing and holding a measurement terminal by an opening peripheral portion of a shape holding member. 2. The measuring terminal holder according to claim 1, wherein the cylindrical holding member is formed so as to taper in diameter toward a front end portion and has an opening at the front end portion. 3. The measuring terminal holder according to claim 1, wherein the holding recess at the tip of the terminal holding shaft is formed in a substantially conical shape. 4. The measuring terminal holder according to claim 1, wherein the terminal holding shaft and the cylindrical holding member are detachably mounted by screw connection. . 5. A flange-like portion having a plurality of screw insertion holes is integrally formed at one end of the cylindrical holding member, and a plurality of screws are formed on the terminal holding shaft so as to face the flange-like portion. 2. A fixing member having a hole is formed so that an alignment adjusting screw can be screwed into a screw hole of the fixing member through a screw insertion hole of the flange-shaped portion and fixed. 5. The measuring terminal holder according to any one of items 4 to 4.