CN109341943B - Calibration method of micro force sensor based on optical fiber - Google Patents
Calibration method of micro force sensor based on optical fiber Download PDFInfo
- Publication number
- CN109341943B CN109341943B CN201811187558.XA CN201811187558A CN109341943B CN 109341943 B CN109341943 B CN 109341943B CN 201811187558 A CN201811187558 A CN 201811187558A CN 109341943 B CN109341943 B CN 109341943B
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- force sensor
- optical fiber
- force
- laser
- probe
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- 239000013307 optical fiber Substances 0.000 title claims abstract description 31
- 238000000034 method Methods 0.000 title claims abstract description 18
- 238000001514 detection method Methods 0.000 claims abstract description 11
- 239000000523 sample Substances 0.000 claims description 22
- 238000004458 analytical method Methods 0.000 claims description 15
- 239000002184 metal Substances 0.000 claims description 11
- 239000000835 fiber Substances 0.000 claims description 5
- 230000002093 peripheral effect Effects 0.000 claims description 4
- 238000002474 experimental method Methods 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims description 3
- 238000001228 spectrum Methods 0.000 claims description 3
- 239000002131 composite material Substances 0.000 claims description 2
- 230000001105 regulatory effect Effects 0.000 claims 1
- 238000005260 corrosion Methods 0.000 abstract description 4
- 230000007797 corrosion Effects 0.000 abstract description 4
- 238000010586 diagram Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 238000012937 correction Methods 0.000 description 1
- 229920006335 epoxy glue Polymers 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 230000008092 positive effect Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000002035 prolonged effect Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 230000000007 visual effect Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L25/00—Testing or calibrating of apparatus for measuring force, torque, work, mechanical power, or mechanical efficiency
Abstract
The invention discloses a calibration method of a micro force sensor based on optical fibers, which comprises a mechanical unit and an optical fiber detection unit, wherein acting force is applied to the micro force sensor to be calibrated through a mechanical structure, then the parameter of the force applied by the mechanical unit is detected through the optical fiber detection unit, and then the calibration is performed through multiple tests and records. The detection method has unique advantages for the weight type calibration method, improves the precision, has longer service life, and avoids the error of corrosion on acting force.
Description
Technical Field
The invention belongs to the field of mechanics, in particular to a calibration method of a micro force sensor based on optical fibers, which is particularly suitable for high-precision physical experiments and industrial high-precision mechanical equipment correction.
Background
Because the calibration table of the weight has interference of various conditions, in practical situations, various factors can influence the quality of the weight, such as corrosion, dropping and the like, and physical limitations, so that the accuracy is reduced. In particular, in a sensor with a small force, the possibility of error increases, and the detection with a laser is capable of avoiding interference of various factors, and in particular, the detection accuracy is greatly improved, so that the detection of the current force parameter with a laser is particularly suitable.
Disclosure of Invention
One of the technical problems to be solved by the invention is to provide a calibration method capable of replacing a weight, improving the calibration precision of a micro force sensor, reducing the error influence caused by corrosion and improving the calibration efficiency.
The invention aims to solve the problem, and provides a calibration method of a micro force sensor based on an optical fiber, which is used for solving the problem of large weight error and improving the calibration precision.
The calibration device of the micro force sensor based on the optical fiber comprises a mechanical unit and an optical fiber detection unit;
the mechanical unit comprises a probe and a workbench, and the probe is arranged on the workbench;
the optical fiber detection unit comprises an optical fiber, laser analysis equipment, a computer and a software part;
the laser analysis apparatus includes a laser generating device capable of supplying a stable power and driving a laser source to emit laser light of a specific wavelength, and an acceptance analysis device capable of receiving the returned laser light and analyzing information thereof about illumination intensity, phase or spectrum.
The application method of the calibration device of the micro force sensor based on the optical fiber comprises the following application steps:
(1) the fixation needs to be calibrated with a tiny force sensor: the user needs to fix the calibrated micro force sensor on the calibration table;
(2) adjusting the position of the fixed workbench: the user needs to adjust the position of the fixed workbench to enable the micro force sensor to be calibrated to slightly contact with the probe;
(3) connection device: opening peripheral equipment such as laser analysis equipment, a computer and the like, and finishing initialization;
(4) adjusting the force parameters during operation: adjusting the force generator knob to watch the related parameters of the force generated at present on the computer display screen, stopping when the proper parameters are selected, and continuously adjusting and selecting other constants after the related data are recorded, and continuing the experiment;
(5) and (5) ending calibration: and closing the computer, the grating instrument and other peripheral equipment, then adjusting the workbench to enable the calibration object to leave the probe, and finally taking away the micro force sensor.
Preferably, the elastic element is used to apply a force to the object being calibrated, without the use of a weight.
Preferably, a uniquely designed probe structure is used.
Preferably, the force is measured by using a laser analysis method, so that errors caused by weights are avoided.
Preferably, the feedback probe is used to calibrate the force parameters of the object using diaphragm structure, differential structure or grating analysis method.
Preferably, computer-aided calculation is used to analyze and display what statistics are currently being performed for the various parameters.
Preferably, F-P resonator structures are used, not limited to intrinsic (sense integral), extrinsic, and complex types.
Compared with the prior art, the invention has the following advantages and positive effects:
1. the method for measuring the current applied to the calibrated micro force sensor by using the laser can greatly improve the calibration precision; 2. the invention adopts the computer to directly display the weight, is more efficient and visual, and has the recording function; 3. the invention does not generate excessive error due to corrosion.
Drawings
The accompanying drawings are included to provide a further understanding of the invention, and are incorporated in and constitute a part of this specification, illustrate the invention and together with the description serve to explain the invention. In the drawings:
FIG. 1 is a block diagram illustrating an overall structure according to an example of the present invention;
FIG. 2 is a schematic view of a simple workbench according to an embodiment of the invention;
FIG. 3 is a schematic view of a probe in a mechanical structure according to an example of the present invention;
FIG. 4 is a schematic diagram of the Fabry-Perot cavity principle of an optical fiber according to an embodiment of the present invention;
fig. 5 is a schematic diagram of one structure of an optical fiber fabry-perot cavity according to an embodiment of the present invention.
Detailed Description
Specific embodiments of the present invention will be described in detail below with reference to the accompanying drawings.
As shown in FIG. 1, the mechanical unit of the example consists of a probe 11 and a common workbench 12, and the optical fiber detection unit consists of laser analysis equipment and a computer. The main structure of the probe is shown in fig. 2, an optical fiber 111 is connected in the middle, and the tail end 118 of the optical fiber is subjected to unique treatment to reflect the reflected light with information. The metal block 112 is embedded into 113, the lower part is connected with an elastic element 116, the elastic element 116 is connected with another metal block 117, the optical fiber 111 passes through the middle of the elements, in addition, the elastic element 114 has supporting function on the inside, the influence of partial gravity on the elastic element 116 can be eliminated, the service life is prolonged, 115 is an adjusting knob used for adjusting the position of the metal block 112, when the position of the metal block 112 is changed, the pressure on the elastic element 116 can be changed, therefore, the elastic element 116 can be deformed, and therefore, the acting force can be generated on the metal block 117, finally, the acting force can be transmitted to the micro force sensor to be calibrated, and because the acting force is mutual, the acting force of the probe is equal to the acting force of the micro force sensor 121 to be calibrated, therefore, the acting force of the micro force sensor 121 can be measured by detecting the acting force of the probe.
As shown in fig. 3, the workbench 12 is mainly composed of a base 122, a bracket 124 and a sliding block 123, the probe 11 is mounted on the sliding block 123, the micro force sensor 121 to be calibrated is placed on the base, the base has enough weight to enable the workbench to be stable, the sliding block 123 is moved during calibration, and the probe 11 slightly contacts the micro force sensor 121 to be calibrated.
The present example uses a Fabry-Perot (F-P) sensor to detect the force applied by the probe, where the Fabry-Perot is a multi-beam interference structure consisting of two mirrors parallel to each other, and the light wave coupled into the F-P is reflected multiple times between the two mirrors M1 and M2, and a portion of the light is output from the other interface. By forming a fabry-perot cavity at the distal end of probe 11 as shown in fig. 4, the cavity length will change slightly as the force changes, i.e. the distance L between mirrors M1 and M2 will change, and we can detect the relevant information in the laser light, and by processing with the laser analysis device we can see the relevant parameters of the force currently applied to the sensor on the computer display screen, thus calibrating the miniature force sensor.
One of the structures of the fabry-perot cavity of the optical fiber end 118 of fig. 2 in this example is shown in fig. 5, where the front end 1181 and the rear end fiber segment 1183 of the optical fiber are separated, a layer of quartz tube 1182 is sleeved outside, and then the quartz tube is fixed on the metal block 117 by using epoxy glue, and other fabry-perot cavity structures including intrinsic type (sensing integral type), extrinsic type, composite type and various variants can also be adopted in this embodiment.
The above embodiments are merely preferred embodiments of the present invention, and any simple modification, modification and substitution changes made to the above embodiments according to the technical substance of the present invention are all within the scope of the technical solution of the present invention.
Claims (8)
1. The utility model provides a calibration device of little force transducer based on optic fibre which characterized in that: comprises a mechanical unit and an optical fiber detection unit;
the mechanical unit comprises a probe and a workbench, and the probe is arranged on the workbench;
the optical fiber detection unit comprises an optical fiber, laser analysis equipment, a computer and a software part;
the laser analysis device comprises a laser generating device and an accepting analysis device, wherein the laser generating device can provide a stable power supply and can drive a laser source to emit laser with specific wavelength, and the accepting analysis device can receive returned laser and can analyze information about illumination intensity, phase or frequency spectrum;
the middle of the structure of the probe is connected with an optical fiber, and the tail end of the optical fiber can reflect reflected light with information; the lower part of the first metal block is connected with an elastic element, the elastic element is connected with another second metal block, the optical fiber passes through the middle of the elements, and the adjusting knob is used for adjusting the position of the first metal block:
when the position of the first metal block is changed, the pressure on the elastic element is changed, the elastic element is deformed, acting force is generated on the second metal block and is transmitted to the micro force sensor to be calibrated, and the force magnitude born by the probe is equal to the force magnitude born by the micro force sensor to be calibrated.
2. A method for calibrating a miniature optical fiber-based force sensor, which uses the miniature optical fiber-based force sensor calibrating device according to claim 1, comprising the steps of:
(1) the fixation needs to be calibrated with a tiny force sensor: the user needs to fix the calibrated micro force sensor on the calibration table;
(2) adjusting the position of the fixed workbench: the user needs to adjust the position of the fixed workbench to enable the micro force sensor to be calibrated to slightly contact with the probe;
(3) connection device: opening peripheral equipment such as laser analysis equipment, a computer and the like, and finishing initialization;
(4) adjusting the force parameters during operation: adjusting the force generator knob to watch the related parameters of the force generated at present on the computer display screen, stopping when the proper parameters are selected, and continuously adjusting and selecting other constants after the related data are recorded, and continuing the experiment;
(5) and (5) ending calibration: closing the computer, grating instrument and other peripheral equipment, regulating the workbench to make the calibration object leave the probe,
and finally, taking away the micro force sensor.
3. The method of calibrating a miniature fiber optic based force sensor of claim 2, wherein the elastic element is used to apply a force to the object being calibrated.
4. The method for calibrating a miniature optical fiber-based force sensor according to claim 2, wherein the force is measured using a laser method.
5. The method for calibrating a miniature optical fiber-based force sensor according to claim 2, wherein the feedback probe uses a diaphragm type structure, a differential type structure or a method using grating analysis for the force parameter of the calibrated object.
6. The method of calibrating a fiber-based miniaturized force sensor of claim 2, wherein computer-aided computing is used to analyze and display current various parameters and statistics.
7. The method of calibrating a fiber-based miniaturized force sensor of claim 2, wherein an F-P resonator structure, an intrinsic type, an extrinsic type, or a composite type, and variants thereof are used.
8. The method for calibrating a miniature optical fiber-based force sensor according to claim 2, wherein the laser analysis device is capable of resolving information about illumination intensity, phase or spectrum in the laser.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811187558.XA CN109341943B (en) | 2018-10-12 | 2018-10-12 | Calibration method of micro force sensor based on optical fiber |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811187558.XA CN109341943B (en) | 2018-10-12 | 2018-10-12 | Calibration method of micro force sensor based on optical fiber |
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| CN109341943A CN109341943A (en) | 2019-02-15 |
| CN109341943B true CN109341943B (en) | 2024-02-09 |
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| CN201811187558.XA Active CN109341943B (en) | 2018-10-12 | 2018-10-12 | Calibration method of micro force sensor based on optical fiber |
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Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5915267A (en) * | 1997-12-09 | 1999-06-22 | Daewoo Electronics Co., Ltd. | Method for measuring piezoelectric constant of thin film shaped piezoelectric material |
| CN101063638A (en) * | 2007-06-12 | 2007-10-31 | 江西洪都航空工业集团有限责任公司 | Vertical type micro-force values measuring instrument |
| CN101319980A (en) * | 2008-07-11 | 2008-12-10 | 天津大学 | Micro/nano scale ultra-micro force measuring device and force value tracing method |
| CN101655353A (en) * | 2009-06-26 | 2010-02-24 | 南京师范大学 | Miniature extrinsic Fabry-Perot type optical fiber pressure transducer and manufacturing method thereof |
| CN101832832A (en) * | 2010-05-28 | 2010-09-15 | 天津大学 | Optical fiber Fabry-Perot pressure sensor and production method thereof |
| CN208984284U (en) * | 2018-10-12 | 2019-06-14 | 南昌大学 | A kind of caliberating device of the small force snesor based on optical fiber |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB0021976D0 (en) * | 2000-09-07 | 2000-10-25 | Optomed As | Multi-parameter fiber optic probes |
| US8183520B2 (en) * | 2009-11-13 | 2012-05-22 | Intuitive Surgical Operations, Inc. | Optical fiber shape sensor calibration |
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2018
- 2018-10-12 CN CN201811187558.XA patent/CN109341943B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5915267A (en) * | 1997-12-09 | 1999-06-22 | Daewoo Electronics Co., Ltd. | Method for measuring piezoelectric constant of thin film shaped piezoelectric material |
| CN101063638A (en) * | 2007-06-12 | 2007-10-31 | 江西洪都航空工业集团有限责任公司 | Vertical type micro-force values measuring instrument |
| CN101319980A (en) * | 2008-07-11 | 2008-12-10 | 天津大学 | Micro/nano scale ultra-micro force measuring device and force value tracing method |
| CN101655353A (en) * | 2009-06-26 | 2010-02-24 | 南京师范大学 | Miniature extrinsic Fabry-Perot type optical fiber pressure transducer and manufacturing method thereof |
| CN101832832A (en) * | 2010-05-28 | 2010-09-15 | 天津大学 | Optical fiber Fabry-Perot pressure sensor and production method thereof |
| CN208984284U (en) * | 2018-10-12 | 2019-06-14 | 南昌大学 | A kind of caliberating device of the small force snesor based on optical fiber |
Non-Patent Citations (1)
| Title |
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| MEMS三维微触觉力传感器标定方法;栗大超等;《纳米技术与精密工程》;第8卷(第04期);全文 * |
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