JP2002367930A - Dicing device provided with z correction - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a dicing device which can correct the position in Z direction of a blade with simple operation even when the suction board of a work table is exchanged. SOLUTION: The dicing device is provided with a map correction means 46 which corrects the error in straightness at the time of the blade 12 shifting in Y direction, and further is provided with an inclination correction means 48 which corrects the inclination of the suction board 24A of the work table 24.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a dicing apparatus, and more particularly to a dicing apparatus for cutting a semiconductor wafer, an electronic material (work), or the like in a grid pattern and performing a precise grooving process.

[0002]

2. Description of the Related Art A dicing apparatus is a rotary blade (blade).
Is an apparatus for processing the workpiece by rotating the workpiece at a high speed and moving the workpiece relative to the workpiece in the X direction as the cutting feed direction, the Y direction as the index feed direction, and the Z direction as the cut feed direction. By the way, some of these workpieces processed by the dicing apparatus require the groove to be processed to be finished with extremely high precision. The depth of the machining groove is determined by the position of the blade in the Z direction. Factors that change the position of the blade in the Z direction include Z-axis positioning error, Y-axis straightness error, and inclination of the upper surface of the work table with respect to the Y-axis. Etc. Of these factors, the Z-axis positioning error can be practically solved by performing closed-loop control using a linear scale on the Z-axis. The inclination of the upper surface of the worktable with respect to the Y axis is mechanically adjusted by an adjusting mechanism such as a screw provided on a leg of the worktable during the manufacturing process of the dicing apparatus, so that the worktable can be assembled within a range without any problem. I have. Further, the Y-axis straightness error cannot be solved by using a guide having a good straightness as much as possible and using a guide structure with a small pitch. Therefore, the straightness accuracy of the Y axis is measured in advance, the data is stored, and the position of the blade in the Z direction is corrected based on the data.

[0003]

In a dicing apparatus, a suction table for suction-fixing a work is incorporated on the upper surface of a work table on which the work is placed.
This suction disk is removably incorporated in the work table upper surface base, and the suction disk corresponding to the size of the work to be processed is changed every time. If the suction cup is scratched or otherwise damaged due to long-term use, it is replaced with a new suction cup.

However, in this conventional dicing apparatus,
Each time the suction cup is replaced, the inclination of the upper surface of the suction cup with respect to the Y axis changes. Therefore, each time the suction cup is replaced, it has to be mechanically adjusted by an adjusting mechanism such as a screw provided on the leg of the work table. Moreover, this adjustment work is difficult for an operator of the dicing apparatus, and even a maintenance technician has to burn his hand.

The present invention has been made in view of such circumstances, and has as its object to provide a dicing apparatus which can correct the position of the blade in the Z direction by a simple operation even when the suction cup is replaced.

[0006]

According to the present invention, in order to achieve the above object, according to the first aspect of the present invention, there is provided a spindle having a rotary blade for processing a work at a tip thereof, and a work table for mounting the work. A dicing apparatus for processing the work by relatively moving the rotary blade and the work table in the X direction as a cutting feed direction, the Y direction as an index feed direction, and the Z direction as a cutting feed direction. And a storage unit in which straightness data when the rotary blade relatively moves in the Y direction with respect to the work table and inclination data of the upper surface of the work table are stored in advance, and are stored in the storage unit. Map correction means for generating correction data for the Z-direction displacement of the rotary blade at each position in the Y-direction based on the straightness data; Tilt correction means for creating correction data of the Z direction at each position of the rotary blade in the Y direction based on the tilt data of the table upper surface, and the rotation based on the correction data of the map correction means and the tilt correction means. Z for controlling the Z-direction position at each position in the Y-direction of the blade
And control means.

According to the first aspect of the present invention, there is provided a map correcting means for creating correction data for displacement in the Z direction due to a Y-axis straightness error of the rotary blade, and an inclination correction for creating inclination correction data for the upper surface of the work table. Means at each position in the Y direction of the rotary blade based on each correction data.
Since the direction position is controlled, errors in the Z direction caused by the inclination of the upper surface of the work table can be corrected without mechanical adjustment.

According to a second aspect of the present invention, the inclination data stored in advance in the storage section is obtained by using data of a cutter set that detects contact between the rotary blade and the upper surface of the work table. Features.

According to the second aspect of the present invention, the inclination data is obtained by modifying the operation of the conventional cutter set for setting the reference of the Z direction position of the rotary blade. The operator can sufficiently update the inclination correction data.

The invention according to claim 3 is characterized in that the correction data of the inclination correcting means is created at both a reference position of the work table and a position rotated by 90 degrees from the reference position.

According to the third aspect of the present invention, the data for correcting the inclination of the upper surface of the work table is created at both the reference position (CH1 position) and the position rotated 90 degrees from the reference position (CH2 position). So each C
Accurate tilt correction can be performed at the H position.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A dicing apparatus with Z correction according to the present invention will be described below in detail with reference to the accompanying drawings. In the drawings, the same members are denoted by the same reference numerals.

FIG. 1 is a perspective view showing the structure of a dicing apparatus 10 with Z correction according to an embodiment of the present invention. FIG.
As shown in the figure, in the dicing apparatus 10 with Z correction, a spindle 14 provided with a blade (rotary blade) 12 at the tip is suspended and held on a Z table 16 via a holding block 22. The Z table 16 is guided by Z guides 16A, 16A provided on the Y table 18 and driven in the Z direction, which is a cutting feed direction, by a ball screw and a stepping motor (not shown). The Y table 18 is guided by Y guides 18A, 18A provided on a Y base 20, and is driven by a ball screw (not shown) and a stepping motor in the Y direction which is the index feed direction. In the driving in the Z direction and the driving in the Y direction, feedback control is performed by a position signal from a linear scale (not shown), and each of them is driven precisely. On the other hand, an X direction (not shown)
X table 2 driven by guide and linear motor
6, a work table 24 on which a work is placed
Is incorporated. A suction table 24A for suction-loading the work is detachably attached to the work table upper surface base 24B of the work table 24. The work table 24 is also driven to rotate in the θ direction by a drive mechanism (not shown), and is positioned at a reference position (CH1 position) and a position rotated by 90 degrees (CH2 position). With such a mechanism, the blade 12 performs the cutting feed in the Z direction and the index feed in the Y direction, and the workpiece performs the cutting feed in the X direction and the rotational feed in the θ direction.

FIG. 2 is a block diagram showing the configuration of the dicing apparatus 10 with Z correction according to the embodiment of the present invention.
The dicing apparatus with Z correction 10 is capable of performing the above-described X, Y, Z, θ
Has a dicer controller 30 for controlling each mechanism section. The dicer controller 30 includes the spindle 14
A spindle control means 34 for controlling the rotation of the spindle 14, a Y control means 38 for controlling the drive in the Y direction of the spindle 14, a Z control means 40 for controlling the drive in the Z direction of the spindle 14,
X control means 3 for controlling X-direction drive of X table 26
6, a θ control means 42 for controlling the θ-direction drive of the work table 24, a data input unit 44 for inputting various signals, a storage unit 45 for storing input data,
It is composed of a CPU 32 and the like, which perform comprehensive calculations and commands. The Z control unit 40 controls the spindle 14 based on the Z direction correction value corresponding to the Y direction position of the blade 12 created by the map correction unit 46 and the tilt correction unit 48.
Is driven in the Z direction. The map correction means 46 creates correction data for the displacement of the tip of the blade 12 due to the straightness error when the spindle 14 moves in the Y direction. The tilt correction means 48 is mounted on the upper surface of the work table 24. This is for creating displacement correction data in the Z direction due to the upper surface of the suction cup 24A being inclined with respect to the Y axis. FIG. 3 shows an example of the map correction and the tilt correction. In the graph of FIG. 3, the curve shows a straightness curve in the Z direction when the blade 12 moves from YA to YB on the Y axis. The straight line rising to the right is work table 2
4 shows the inclination of the upper surface of the suction cup with respect to the Y axis, and YA
Assuming that the value of Z at the position ZA = 0, Z at the YB position
Is ZB, and the tilt angle is represented by dθ. Therefore, the Z correction may be performed so that each point on the straightness curve of the graph in FIG. 3 is shifted to a straight line. That is, the Z correction values dz1, dz2,..., Dz10 at each position on the Y axis.
Is the direction and value indicated by each arrow on the graph.

Next, a procedure for creating a Z-correction correction value will be described with reference to the flowchart of FIG. As shown in FIG. 4, the procedure for creating a correction value starts with straightness measurement at the lower end of the blade 12 when the spindle 14 is moved in the Y direction (step 60). This step 60 is performed at the time of manufacture of the dicing apparatus. Here, as shown in FIG. 5, the work table leg portion is previously adjusted so that the work table upper surface base 24B above the work table 24 is parallel to the Y axis. Adjustment screw 24D provided on 24C is adjusted. In the straightness measurement, as shown in FIG. 5, a stretch 50 which is a straightness reference piece is placed on the work table upper surface base 24B with the suction table 24A of the work table 24 removed. On the other hand, a displacement detector 52 is attached to the tip of the spindle 14 via a holder 54 so that a position corresponding to the blade lower end position can be measured. In this state, the spindle 14 is moved in the Y direction, and the displacement detector 52 traces the upper surface of the stretch 50 (step 60). The straightness measurement data obtained corresponding to the Y-axis coordinate values is manually or automatically input to the dicer controller 30 (step 62). In the dicer controller 30, the map correction means 46 creates and stores a map correction data table associated with the Y-axis coordinate values based on the input data (step 64). On the other hand, the dicing apparatus determines whether the work table 24 is at the reference position (CH1 position) in the rotation direction or at the position rotated 90 degrees (CH2 position) (step 6).
6) If not at the CH1 position, set the work table 24 to 9
Rotate by 0 degrees to position at CH1 position (step 6
8). Next, as shown in FIG. 2, the suction plate 24A is attached to the work table upper surface base 24B of the work table 24, and the near side (upper left side in FIG. 2) and the rear side (FIG.
In the upper right), the rotating blade 12 is gradually lowered from above, the moment when the blade 12 contacts the suction plate 24A is detected by electrical conduction, and the so-called cutter setting operation for reading the Z position at that time is performed ( Step 70). The data at this time is automatically taken in and stored in the dicer controller 30 (step 7).
2). In the dicer controller 30, the inclination correcting means 48
Calculates the inclination angle of the upper surface of the suction plate 24A of the work table 24 in CH1 from the data of the two points on the near side and the back side, and creates and stores an inclination correction data table in CH1 (step 74). Next, the dicing apparatus rotates the work table 90 degrees and positions it at the CH2 position (step 76). Here also, the cutter setting operation is performed at two points on the near side and the far side of the suction plate 24A (step 78). This data is also automatically taken in and stored in the dicer controller 30 (step 80). In the dicer controller 30, the inclination correcting means 48 calculates the inclination angle of the upper surface of the suction plate 24A of the work table 24 in CH2 from this data. Calculate and CH2
Is created and stored (step 82). Further, the dicer controller 30 creates and stores a comprehensive correction data table for CH1 from the map correction data table and the tilt correction data table for CH1 (step 84), and also executes the map correction data table and the tilt correction for CH2. From data table to CH2
Is created and stored (step 86).

The procedure for creating the Z correction data is as described above.
The Z control means 40 corrects the Z-axis position at each coordinate position of the Y-axis based on the correction data table and controls the cutting feed of the spindle 14.

The cutter setting operation performed to create the above-described inclination correction data is an operation performed to set the origin position of the blade in the Z direction. This is an operation routinely performed by the operator to correct the depth of cut caused by the wear of the blade 12 caused by the use of the blade. Since the inclination correcting means of the present invention obtains the inclination correction data by this routinely performed cutter setting operation, even if the suction disk 24A of the work table 24 is exchanged according to the work size, the inclination correction is performed. Even when the board 24A is damaged and replaced with a new suction board 24A, the inclination correction of the suction board 24A can be easily performed on the operator side.

However, it is needless to say that the inclination data may be acquired by another method such as by attaching the displacement detector 52 to the tip of the spindle 14 without depending on the cutter set.

[0019]

As described above, according to the dicing apparatus with Z correction according to the present invention, there is provided a correcting means for generating inclination correction data on the upper surface of the work table together with straightness correction data on the Y axis. The Z position is controlled on the basis of the correction data, so even if the suction table of the work table is replaced, the correction data can be easily updated with the data from the cutter set operation at two places without performing difficult mechanical adjustment. Then, the inclination can be corrected.

[Brief description of the drawings]

FIG. 1 is a perspective view illustrating the structure of a dicing apparatus with Z correction according to an embodiment of the present invention.

FIG. 2 is a block diagram illustrating a configuration of a dicing apparatus with Z correction according to an embodiment of the present invention.

FIG. 3 is a graph showing straightness data, inclination data, and a correction amount;

FIG. 4 is a flowchart showing a correction data creating procedure of the dicing apparatus with Z correction according to the embodiment of the present invention.

FIG. 5 is a side view illustrating a method of measuring straightness.

[Explanation of symbols]

10 Dicing device with Z correction, 12 Blade (rotary blade), 14 Spindle, 24 Work table, 24
A: suction disk, 46: map correction means, 48: inclination correction means

 ──────────────────────────────────────────────────の Continued on the front page (72) Inventor Takayuki Kaneko 9-7-1, Shimorenjaku, Mitaka-shi, Tokyo

Claims (3)

[Claims] 1. A spindle having a rotary blade for processing a work at a tip thereof, and a work table on which the work is mounted, wherein the rotary blade and the work table are indexed in an X direction which is a cutting feed direction and an index. In a dicing apparatus for processing the work by relatively moving in the Y direction, which is a feeding direction, and the Z direction, which is a cutting feed direction, the straightness when the rotary blade is relatively moved in the Y direction with respect to the work table in advance. A storage unit in which data and inclination data of the upper surface of the work table are input, and correction data of Z-direction displacement at each position in the Y-direction of the rotary blade based on the straightness data stored in the storage unit. Map correction means to be created, and Z at each position in the Y direction of the rotary blade based on the inclination data of the upper surface of the work table stored in the storage unit. Tilt correction means for generating correction data of the orientation position, and Z control means for controlling the Z-direction position of each of the rotary blades in the Y-direction based on the correction data of the map correction means and the tilt correction means. A dicing apparatus, comprising: 2. The tilt data stored in the storage unit in advance is obtained using data of a cutter set that detects contact between the rotary blade and an upper surface of the work table. 2. The dicing apparatus according to 1. 3. The work table according to claim 1, wherein the correction data of the tilt correcting means is created at both a reference position of the work table and a position rotated by 90 degrees from the reference position. Dicing equipment.