JP2002357381A5 - - Google Patents

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Publication number
JP2002357381A5
JP2002357381A5 JP2001166244A JP2001166244A JP2002357381A5 JP 2002357381 A5 JP2002357381 A5 JP 2002357381A5 JP 2001166244 A JP2001166244 A JP 2001166244A JP 2001166244 A JP2001166244 A JP 2001166244A JP 2002357381 A5 JP2002357381 A5 JP 2002357381A5
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JP
Japan
Prior art keywords
gas
cooling
supply means
sample
zureka
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Pending
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JP2001166244A
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Japanese (ja)
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JP2002357381A (en
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Publication date
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Priority to JP2001166244A priority Critical patent/JP2002357381A/en
Priority claimed from JP2001166244A external-priority patent/JP2002357381A/en
Publication of JP2002357381A publication Critical patent/JP2002357381A/en
Publication of JP2002357381A5 publication Critical patent/JP2002357381A5/ja
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Claims (14)

対象物へ冷却用ガスを供給する第1ガス供給手段と、
前記冷却用ガスの周りに第2ガスを供給する第2ガス供給手段とを有し、
前記冷却用ガスはヘリウムガスであり、前記第2ガスは該ヘリウムガスよりも重いガスであることを特徴とする冷却装置。
First gas supply means for supplying a cooling gas to the object;
Second gas supply means for supplying a second gas around the cooling gas;
The cooling apparatus, wherein the cooling gas is helium gas, and the second gas is heavier than the helium gas.
請求項1において、前記第2ガスは前記冷却用ガスよりも高温のガスであることを特徴とする冷却装置。  2. The cooling device according to claim 1, wherein the second gas is a gas having a temperature higher than that of the cooling gas. 請求項1又は請求項2において、前記第2ガスは室温であることを特徴とする冷却装置。  The cooling device according to claim 1 or 2, wherein the second gas is at room temperature. 請求項1から請求項3のいずれか1つにおいて、前記第2ガスは窒素ガスであることを特徴とする冷却装置。In one claim 3 Neu Zureka claim 1, the cooling device, wherein the second gas is nitrogen gas. 請求項1から請求項4のいずれか1つにおいて、前記対象物は大気中に配置され、前記第2ガス供給手段は該大気と前記冷却用ガスとの間に前記第2ガスを供給することを特徴とする冷却装置。In claims 1 one claim 4 Neu Zureka, the object is placed in the atmosphere, the second gas supply means for supplying the second gas between the cooling gas and the atmosphere- A cooling device characterized by that. 請求項1から請求項5のいずれか1つにおいて、前記冷却用ガスを−200℃以下に冷却するガス冷却手段を有することを特徴とする冷却装置。In claims 1 one claim 5 Neu Zureka, cooling device and having a gas cooling means for cooling the cooling gas to -200 ° C. or less. 請求項1から請求項6のいずれか1つにおいて、
前記第1ガス供給手段は前記対象物に向けて開口する内管を有し、
前記第2ガス供給手段は前記内管の開口を中心とするリング状の開口が前記対象物に向けて形成されるように前記内管を包囲する外管を有する
ことを特徴とする冷却装置。
In Zureka one claims 6 Neu claim 1,
The first gas supply means has an inner tube that opens toward the object;
The cooling apparatus according to claim 1, wherein the second gas supply means includes an outer pipe that surrounds the inner pipe so that a ring-shaped opening centered on the opening of the inner pipe is formed toward the object.
X線を発生するX線源と、試料から発生する回折X線を検出するX線検出手段と、前記試料に冷却用ガスを供給して該試料を冷却する冷却手段とを有するX線装置において、
前記冷却手段は、
前記試料へ冷却用ガスを供給する第1ガス供給手段と、
前記冷却用ガスの周りに第2ガスを供給する第2ガス供給手段とを有し、
前記冷却用ガスはヘリウムガスであり、前記第2ガスは該ヘリウムガスよりも重いガスである
ことを特徴とするX線装置。
An X-ray apparatus comprising: an X-ray source that generates X-rays; an X-ray detection unit that detects diffraction X-rays generated from a sample; and a cooling unit that supplies a cooling gas to the sample to cool the sample ,
The cooling means is
First gas supply means for supplying a cooling gas to the sample;
Second gas supply means for supplying a second gas around the cooling gas;
The X-ray apparatus according to claim 1, wherein the cooling gas is helium gas, and the second gas is heavier than the helium gas.
請求項8において、前記第2ガスは前記冷却用ガスよりも高温のガスであることを特徴とするX線装置。  9. The X-ray apparatus according to claim 8, wherein the second gas is a gas having a temperature higher than that of the cooling gas. 請求項8又は請求項9において、前記第2ガスは室温であることを特徴とするX線装置。  10. The X-ray apparatus according to claim 8, wherein the second gas is at room temperature. 請求項8から請求項10のいずれか1つにおいて、前記第2ガスは窒素ガスであることを特徴とするX線装置。In claims 8 1 10. Neu Zureka, X-rays and wherein the second gas is nitrogen gas. 請求項8から請求項11のいずれか1つにおいて、前記試料は大気中に配置され、前記第2ガス供給手段は該大気と前記冷却用ガスとの間に前記第2ガスを供給することを特徴とするX線装置。In claims 8 one claims 11 Neu Zureka, said sample is placed in the atmosphere, the second gas supply means for supplying said second gas between the cooling gas and the atmosphere- X-ray apparatus characterized by this. 請求項8から請求項12のいずれか1つにおいて、前記冷却用ガスを−200℃以下に冷却するガス冷却手段を有することを特徴とするX線装置。In claims 8 one claims 12 Neu Zureka, X-rays apparatus characterized by having a gas cooling means for cooling the cooling gas to -200 ° C. or less. 請求項8から請求項13のいずれか1つにおいて、
前記第1ガス供給手段は前記試料に向けて開口する内管を有し、
前記第2ガス供給手段は前記内管の開口を中心とするリング状の開口が前記試料に向けて形成されるように前記内管を包囲する外管を有する
ことを特徴とするX線装置。
In one claims 13 Noi Zureka claims 8,
The first gas supply means has an inner tube that opens toward the sample;
The X-ray apparatus, wherein the second gas supply means has an outer tube surrounding the inner tube so that a ring-shaped opening centered on the opening of the inner tube is formed toward the sample.
JP2001166244A 2001-06-01 2001-06-01 Cooling equipment and x-ray equipment Pending JP2002357381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001166244A JP2002357381A (en) 2001-06-01 2001-06-01 Cooling equipment and x-ray equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001166244A JP2002357381A (en) 2001-06-01 2001-06-01 Cooling equipment and x-ray equipment

Publications (2)

Publication Number Publication Date
JP2002357381A JP2002357381A (en) 2002-12-13
JP2002357381A5 true JP2002357381A5 (en) 2005-05-26

Family

ID=19008806

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001166244A Pending JP2002357381A (en) 2001-06-01 2001-06-01 Cooling equipment and x-ray equipment

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Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100462652C (en) * 2006-10-18 2009-02-18 北京航空航天大学 Ice crystal granule gas generation device
JP5346057B2 (en) * 2011-04-26 2013-11-20 株式会社リガク Sample cooling device for X-ray analyzer and X-ray analyzer

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH04295782A (en) * 1991-03-26 1992-10-20 Hitachi Ltd Surface analyzer, surface analyzing method and measuring device for magnetic resonance phenomenon
JPH06241671A (en) * 1993-02-18 1994-09-02 Rigaku Corp Specimen cooling device
JPH08170948A (en) * 1994-12-16 1996-07-02 Rigaku Corp Sample atmosphere regulator for x-ray apparatus
JP3331089B2 (en) * 1995-05-15 2002-10-07 理学電機株式会社 Sample cooling nozzle
JP3355258B2 (en) * 1995-04-07 2002-12-09 理学電機株式会社 Cooling system
JPH09306693A (en) * 1996-05-10 1997-11-28 Nippon Telegr & Teleph Corp <Ntt> Laser plasma x-ray generating method and device
JP4059963B2 (en) * 1996-10-23 2008-03-12 株式会社フジクラ Manufacturing method of oxide superconductor
US6121570A (en) * 1998-10-28 2000-09-19 The Esab Group, Inc. Apparatus and method for supplying fluids to a plasma arc torch
JP2000260839A (en) * 1999-03-11 2000-09-22 Mitsubishi Electric Corp Low-temperature testing device
JP2000280087A (en) * 1999-03-30 2000-10-10 Hitachi Ltd Device and method of underwater laser welding

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