JP2002356791A - Surface treatment equipment - Google Patents

Abstract

PROBLEM TO BE SOLVED: To shorten the exposing time from the end of a first surface treating process before the start of a second surface treating process. SOLUTION: The lower side of a booth 10 which is opened in the upper part and is intermediately partitioned by an intermediate partition 50 to form a first surface treating vessel 20 and the ascending side thereof is formed as a shower chamber 30. The intermediate partition 50 is provided with an aperture 51 which allows the passage of a work W in a vertical direction and an opening/closing cap 55 which is capable of opening and closing the aperture 51. The equipment is so formed that the first surface treating process step can be executed in the state that the work W is immersed into the first treating liquid 28 prepared in the first surface treating vessel 20 and in the state that the opening/ closing cap 55 is held closed and the second surface treating process step can be executed while the work W is showered with the second treating liquid 38 in the shower chamber 30 in the state that the opening/closing cap 55 is held closed.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a first surface treatment step of performing a surface treatment on a work using a first treatment liquid, and a surface treatment using a second treatment liquid on the work after the first surface treatment. And a second surface treatment step of performing the above steps in this order.

[0002]

2. Description of the Related Art For example, as shown in FIG.
A first surface treatment step of performing a surface treatment on a work (object to be processed) W by using the first treatment, and a second surface treatment step of performing a surface treatment by using a second treatment liquid 38P on the work W after the completion of the first surface treatment Are performed in this order.

More specifically, in FIG. 6, a first surface treatment tank 20P and a second surface treatment tank 3
0P are arranged in series in the direction of conveyance (H... H1, H2, H3) of the work W. Note that the pretreatment tank (post-treatment tank), the upstream side (left side in the figure) of the first surface treatment tank 20P, and the downstream side (right side in the figure) of the second surface treatment tank 30P.
Other tanks are arranged in series.

The work W is lowered in the D1 direction after the horizontal transfer in the H1 direction from the pre-treatment tank (not shown), and
The treatment liquid 28P is immersed in the first surface treatment tank 20P in which the liquid is built, and the first surface treatment step is performed.

After the completion of the first surface treatment step, the work W is lifted in the U1 direction and then horizontally conveyed in the H2 direction.

Subsequently, the work W is lowered in the direction D2 and the second surface treatment tank 30 in which the second treatment liquid 38P is deposited.
P and a second surface treatment step is performed.

After the execution of the second surface treatment step, the work W is lifted in the U2 direction and is horizontally conveyed in the H3 direction for other processing steps and post-processing steps.

[0008]

On the other hand, at a manufacturing site of high-quality products (for example, electronic parts, etc.), it is desired that the work W after the completion of the first surface treatment step be subjected to the second surface treatment step as soon as possible. The demand is increasing. However, from the viewpoints of technical, equipment cost and layout-related circumstances, ascending unloading in the U1 direction, horizontal transfer in the H2 direction and D
There is also a limit in shortening each time for carrying in two directions.

Thus, when the first surface treatment is, for example, an etching treatment and the second surface treatment is, for example, a water washing treatment, the air standing time from the end of the first surface treatment step to the start of the second surface treatment step is a required time. If the length is longer than that, the reaction speed of the chemical solution is high, so that excessive etching occurs or unevenness occurs in the etching treatment liquid adhering and remaining on the surface of the work W, resulting in inconvenience (deterioration in quality) such as formation of an oxide film. Triggered. In other words, the quality cannot be further improved.

Further, since the first processing liquid adhering and remaining from the work W is scattered during the horizontal transfer in the H2 direction, there is a possibility that the surroundings are soiled and that there is a risk of human danger depending on the properties of the liquid. Further, depending on the composition of the first treatment liquid, a large amount of gas and mist is generated from the first surface treatment tank in the upper open state, so that the working environment is poor and improvement is required.

An object of the present invention is to provide a surface treatment apparatus capable of greatly reducing the time in air from the end of the first surface treatment step to the start of the second surface treatment step.

[0012]

According to the first aspect of the present invention, there is provided the following:
A first surface treatment step of performing a surface treatment on the work W using the treatment liquid, and a second surface treatment step of performing a surface treatment on the work after the completion of the first surface treatment using the second treatment liquid are performed in this order. In the surface treatment apparatus for performing, the first surface treatment step can be performed in a state where the first surface treatment step is immersed in the first treatment liquid buried in the first surface treatment tank, and the second surface treatment step is performed in the shower room by the work W The second processing liquid is formed so as to be executable while being showered, and the first surface treatment tank is disposed below and the shower room is disposed above, and an opening / closing lid is provided between the first surface treatment tank and the shower room. The work is allowed to descend into the first surface treatment tank by passing the work from above and outside through the shower room and the open / close lid, and the first surface is opened and closed with the open / close lid closed. That the process can be performed Moni, in a state where the lid is closed after raisable and this rises Shower passed through the opened lid to work after the end of the first surface treatment step second
The surface treatment apparatus is formed so that the surface treatment step can be executed, and the workpiece after the second surface treatment step can be lifted out of the shower room to the outside.

In this invention, the work is carried into the shower room from above and outside, passes through the openable lid, and is carried down into the first surface treatment tank. After dropping in, close the open / close lid. Then, the first surface treatment step is performed with the opening / closing lid closed and the work immersed in the first treatment liquid laid in the first surface treatment tank.

After the completion of the first surface treatment step, the opening / closing lid is opened, and the work immediately passes through the opened opening / closing lid and is raised into the shower room. After this rise, the opening / closing lid is closed. Then, the second surface treatment step is performed while the opening / closing lid is closed and the second treatment liquid is showered on the work surface. The work after the completion of the second surface treatment step is lifted and carried out of the shower room to the upper outside.

Therefore, it is possible to drastically shorten the time in air from the end of the first surface treatment step to the start of the second surface treatment step, and to improve the quality and the working environment. Since a large amount of gas and mist do not leak from the first surface treatment tank and scatter outside, the working environment can be further improved.

Further, according to the invention of claim 2, a first surface treatment step of subjecting the work W to a surface treatment using the first treatment liquid, and using the second treatment liquid for the work after completion of the first surface treatment. And a second surface treatment step of performing a surface treatment in this order, wherein the lower part of the middle of the upper open booth partitioned by an intermediate partition is formed in a first surface treatment tank, and the rising side thereof is a shower room. And the work W is formed in the intermediate partition.
And an opening / closing lid capable of opening and closing the opening, and the opening / closing lid is provided in a state where the workpiece is immersed in the first processing liquid laid in the first surface treatment tank. The first surface treatment step can be executed in a closed state, and the second surface treatment step can be executed while showering the second treatment liquid on a work in a shower room with an opening / closing lid closed. The formed surface treatment device.

In this invention, with the opening / closing lid opened and the opening of the intermediate partition opened, the work is passed down through the shower room and the opening from the outside to the first surface treatment tank, and is then carried down to the first surface treatment tank. Close the opening / closing lid and close the opening. That is, the first surface treatment step is performed in a state where the work is immersed in the first treatment liquid buried in the first surface treatment tank and the opening / closing lid is closed.

After the completion of the first surface treatment step, the work is immediately lifted and carried out to the shower room through the opened opening by opening the opening / closing lid. Then, the opening / closing lid is closed to close the opening. That is, the second surface treatment step is performed while the second treatment liquid is showered on the work in the shower room with the opening / closing lid closed. After the end of the second surface treatment step, the work is lifted and carried out to the outside. At this time, the opening / closing lid remains closed.

Therefore, in addition to providing the same operation and effect as the case of the first aspect of the present invention, since the shower room and the first surface treatment tank are constituted by an integrated booth, the liquid tightness is achieved. Can be held higher and the structure can be simplified and the cost can be reduced.

The invention according to claim 3 is a surface treatment apparatus in which the first treatment liquid is a drug melt and the second treatment liquid is water.

In this invention, since the first processing liquid is a chemical liquid and the second processing liquid to be subsequently subjected to surface treatment is water, the chemical liquid adhering and remaining on the workpiece after the execution of the first surface processing step is removed. Since it can be quickly washed away with water, the same operation and effect as those of the first and second aspects of the invention can be obtained, and the surface quality of each workpiece after the execution of the first surface treatment step can be kept constant. And can be maintained even better.

Further, in the invention according to claim 4, the first processing liquid is an etching processing liquid or a stripping processing liquid and the second processing liquid is a second processing liquid.
This is a surface treatment apparatus in which the treatment liquid is water.

In this invention, the first processing liquid is an etching processing liquid (or a stripping processing liquid) having a high reaction speed,
Since the second treatment liquid to be subsequently subjected to the surface treatment is water,
Since the etching treatment liquid (or the peeling treatment liquid) remaining on the work after the execution of the first surface treatment step can be quickly washed away with water, the same operation as in each of the first and second aspects of the present invention. In addition to achieving the effect, the workpiece after the etching process (or the peeling process) is over-processed (excessive etching or excessive peeling)
And higher quality can be achieved without causing unevenness or unevenness.

[0024]

Embodiments of the present invention will be described below in detail with reference to the drawings.

As shown in FIGS. 1 to 5, the present surface treatment apparatus has a first surface treatment step of performing a first surface treatment on a work W in the same manner as in the case of the conventional example (FIG. 6). And a second surface treatment step of subjecting the workpiece W after the first surface treatment to a second surface treatment in this order.
The first surface treatment step is performed in the first surface treatment tank 20.
The second surface treatment step can be executed while being immersed in the treatment liquid 28 and the second treatment liquid 38 can be executed while showering the second treatment liquid 38 on the work (workpiece) W in the shower room 30.
The surface treatment tank 20 is disposed on the lower side and the shower room 30 is disposed on the upper side, and a vertical partition structure (50) with an opening / closing lid 55 is provided between the first surface treatment tank 20 and the shower room 30;
The first surface treatment step can be performed in a state where the work W can be lowered and carried into the first surface treatment tank 20 through the shower room 30 and the openable opening / closing lid 55 from above and outside, and the opening / closing lid 55 is closed after the lowering. Feasible and the first
Opening / closing lid 55 that has opened the work W after the surface treatment step
Can be passed into the shower room 30 and the second surface treatment step can be executed with the opening / closing lid 55 closed after the rise, and the work W after the second surface treatment step is removed from the shower room 30 It is formed so that it can be lifted and carried out to the outside.

Specifically, in this embodiment, the lower side of the middle of the upper open booth 10 partitioned by the intermediate partition 50 is formed in the first surface treatment tank 20 and the rising side thereof is formed in the shower room 30. The intermediate partition 50 is provided with an opening 51 through which the work W can pass in the vertical direction and an opening / closing lid 55 capable of opening and closing the opening 51. The first processing liquid 28 built in the first surface processing tank 20 is provided. The first surface treatment step can be executed in a state where the work W is immersed in the work piece and the opening and closing cover 55 is closed, and the second processing is performed on the work W in the shower room 30 while the opening and closing cover 55 is closed. The second surface treatment step can be performed while showering the liquid 38.

In FIG. 1, a booth 10 is an integrated tank having an open top and a closed bottom. The open top of the booth 10 is covered with a canopy 11 having an opening 12. It is desirable to reduce the opening area of the opening 12 within a range that does not hinder the lowering in / in of the work W. This is for minimizing the amount of water droplets and mistakes scattered outside.

The intermediate partition 50 has a bent plate structure and is provided with an opening 51 at the center, and an upper and lower partition capable of liquid-tightly separating the lower first surface treatment tank 20 and the upper shower room 30. Form a structure (50). The opening area of the opening 51 is the same as the opening area of the opening 12.

That is, since the shower room 30 and the first surface treatment tank 20 have a structure in which the inside of the booth 10 is partitioned by the intermediate partition 50, the liquid tightness between the two (30, 20) can be kept high, and the structure is simple. It is understood that the cost can be reduced.

Reference numeral 52 denotes a waste liquid (drainage) guide portion which is inclined so as to become lower toward the outside, 53 denotes a waste liquid storage portion, and 54 denotes a drain valve.

The opening portion 51 is provided with an opening / closing lid 5 that is supported so as to be rotatable (clockwise rotation and counterclockwise rotation) about a hinge portion 56.
5 are provided. The opening / closing lid 55 is opened / closed by an opening / closing motor 58 (driver 58D) whose rotation is controlled by the drive control unit 60 shown in FIG.

In the closed state of the opening / closing lid 55, both (30,
The airtightness as well as the liquid tightness between 20) is perfect. That is, the shower water does not enter the lower first surface treatment tank 20, and the gas or mist generated from the first surface treatment tank 20 does not leak to the shower room 30 side.

The gas or mist leaking into the shower room 30 when the opening / closing lid 55 is opened is minimized by the canopy 11 from scattering upward and outside. Since it is captured by water droplets, it hardly scatters outside.

In the first surface treatment tank 20 for performing the first surface treatment on the lower side, a first treatment liquid 28 is liquid (composition, temperature,
The liquid amount and the like are filled in a controlled state. ) Has been.

In the present invention, when the first surface treatment step is performed using the first treatment solution 28 which has a high reaction speed and easily generates harmful gas or mist, the effect obtained is further enhanced. large.

In this sense, the target first processing liquid 2
8 is an etching solution or a stripping solution having a high reaction speed, or harmful (eg, rust-inducing, coughing-in)
This is a chemical liquid melt obtained by melting a chemical liquid that easily generates gas or mist.

In this embodiment, if the time during which the workpiece W is left in the air after the end of the first surface treatment step is prolonged, an excessively large amount of processing or unevenness may occur. Is adopted.)

The work W lowered by an elevating mechanism (not shown) driven by an elevating motor 67 (driver 67D) shown in FIG. 2 reaches a predetermined position (height) in the first surface treatment tank 20. (YE in ST12 of FIG. 4)
A lower limit sensor 25 for performing S) is provided in the first surface treatment tank 20.

In the shower room 30 above the intermediate partition (upper and lower partition structure) 50, a pair of nozzle boxes 31L and 31R shown by a chain line in FIG.
A second surface is provided on the work surface at the shower position detected by the shower position sensor 35 from the plurality of nozzles 32 of each of the nozzle boxes 31L and 31R (YES in ST19 of FIG. 5).
The processing liquid 38 is formed so as to be capable of showering.

The second processing liquid is water. This water includes hot water heated from room temperature. In addition, not only pure water but also an aqueous solution in which a certain cleaning agent is dissolved may be a target. That is, they are generally called washing water, washing water, washing liquid and hot water washing liquid.

A transport mechanism (not shown) included in the other mechanisms / devices 100 in FIG. 2 is capable of horizontally transporting the work W in the direction H1 shown in FIG. 3A and H2 shown in FIG.
Can be transported horizontally in any direction. Drive control unit 6
Drive control is performed at 0.

The lifting mechanism (not shown) lowers the work W, which has been horizontally conveyed in the H1 direction, from the upper limit (up position) to the lower limit shown in FIG. Until the lowering position), it can be lowered and carried in at a stretch (D1 direction). The ascending limit (ascending position) is detected by an ascending limit sensor 15 shown in FIG. 2 attached to the canopy 11, and the ascending limit (ascending position) is detected by a descending limit sensor 25.

Further, as regards ascending and unloading, from the lowering limit (lowering position) to the showering position in the shower room 30, FIG.
3D, it can be lifted and carried out in the U11 direction, and after the end of the shower, from the shower position to the upper limit, U1 shown in FIG.
It is lifted out in two directions. The shower position is detected by the shower position sensor 35 shown in FIG.

The lid opening and closing mechanism is controlled to be opened and closed by the drive control unit 60 controlling the opening and closing motor 57 to perform reversible rotation while monitoring the detection result of the opening and closing sensor 57.

In this embodiment, in the state shown in FIG. 3A, since the opening / closing lid 55 (opening 51) is in the closed state, the gas and mist that can be generated from the first surface treatment tank 20 are in the shower room. 30, and finally, there is no leakage from the shower room 30 to the outside.

When the work W is horizontally conveyed from the direction H1 shown in FIG. 3A, the drive control unit 60
The opening / closing cover 55 is rotated by driving the opening / closing motor 58 so that the opening / closing lid 55 is moved as shown in FIG.
As shown in (2), it is rotated clockwise around the hinge 56 to open (ST10 in FIG. 4). That is, the opening 51 is opened.

Incidentally, if the opening 51 can be fully opened by the time when the workpiece W being lowered and carried in passes through the opening 51, the opening operation may be started after the lowering of the workpiece is started. This is because the amount of gas or mist generated from the first surface treatment tank 20 leaking into the shower room 30 can be further reduced.

The drive control unit 60 drives the lift motor 67 to rotate and controls the drive of the lift mechanism. The work W is started to descend while being supported by an elevating support part (not shown) of the elevating mechanism (ST11). For details, see FIG.
As shown in (B), the work W is moved from the upper outside to the canopy 11.
Through the opening 12, the shower room 30, and the openable opening / closing lid 55 (opening 51).
, And can be carried down at a stretch in the D1 direction.

When the drive control unit 60 determines from the detection signal of the lower limit sensor 25 that the work W has reached the lower limit (YES in ST12), the lift mechanism (the lift motor 6)
7) is stopped (ST13). When the work W is delivered to a support (not shown) in the first surface treatment tank 20, the elevating support of the elevating mechanism is formed so as to be raised and lowered to the outside and stand by.

After the lower carry-in, the opening / closing motor 58 is driven to rotate in the opposite direction, and the opening / closing lid 55 (opening 51) is rotated counterclockwise to close (ST14). That is, the opening / closing lid 55
It can be understood that it is only necessary to keep the workpiece W in the open state while the workpiece W passes through the opening 51.

Then, with the opening / closing lid 55 (opening 51) shown in FIG. 3C closed, the workpiece W is an etching treatment liquid (first treatment liquid) 28 built in the first surface treatment tank 20. An etching process (first surface treatment process) is performed in a state of being immersed in the inside (ST15). The execution time is managed by the CPU of the drive control unit 60.

Therefore, after determining that the execution of the etching process (ST15) is completed (YES in ST16), the drive control unit 60 opens the opening / closing lid 55 (S15).
T17) to open the opening 51.

After the completion of the execution of the etching process, which is the drive start timing for opening the opening / closing lid 55, the invention is not limited to the physically strict solution, and may be immediately before the completion of the execution of the etching process. This is because there is a case where the benefit from shortening the time until the water washing process is more than the disadvantage due to a small amount of mist or the like leaking into the shower room 30.

Subsequently, the lifting / lowering motor 67 is driven to support the work W on the lifting / lowering support portion of the lowered lifting mechanism, and then the workpiece W is driven to rise. In other words, the workpiece W after the completion of the etching process is passed through the opening / closing lid 55 (opening 51) opened by rotating clockwise around the hinge 56 as shown in FIG. (ST in FIG. 5)
18).

When the work W reaches the predetermined shower processing position by the detection of the shower position sensor 57 (YES in ST19), the rotation of the elevating motor 67 is stopped, and the work W is moved to the position shown in FIGS. At the shower position shown in E), the ascent is stopped (ST20).

In the first surface treatment tank 20P shown in FIG. 6, the work W is raised in the U1 direction to the uppermost limit, and then horizontally conveyed in the H2 direction, and further lowered in the D2 direction to be moved to the second surface treatment tank. Since the shower can be started immediately as compared with the case of the conventional example in which the work W is carried into the 30P (FIG. 6), the time for leaving the workpiece W in the air after the first surface treatment step can be drastically reduced. It is.

After the ascent is stopped, the opening / closing lid 55 is closed (ST).
21) Then, the opening 51 is closed.

It should be noted that the lifted work W may be formed so as to start the closing operation of the opening / closing lid 55 immediately after passing through the opening 51. In this way, the amount of gas and mist generated from the first surface treatment tank 20 leaking into the shower room 30 can be further reduced.

Then, as shown in FIG. 3 (E), with the opening / closing lid 55 (opening 51) closed and showering with a washing liquid (water) [second processing liquid] spouted from the plurality of nozzles 32. Then, a water washing process (second surface treatment process) is performed (ST22). The execution time of the washing process is also managed by the CPU of the drive control unit 60.

It should be noted that the water droplets after the shower are applied to the shower room 3
Waste liquid guide 52 while absorbing mist floating inside
It flows down or is collected directly in the waste liquid reservoir 53.

Therefore, the water washing process is executed (ST2).
After it is determined that 2) has been completed (YES in ST23),
The drive control unit 60 drives the elevating motor 67 to start the ascending and unloading of the work W (ST24). When the drive control unit 60 determines that the work W has reached the ascending limit using the detection result of the ascending limit sensor 15 provided outside and above (YES in ST25), the work W is stopped ascending (ST26). Let it.

That is, the work W after the completion of the second surface treatment step is lifted out of the shower room 30 to the outside.
Thereafter, the wafer is horizontally transported in the H2 direction shown in FIG. 3E by the transport mechanism.

Accordingly, it is possible to drastically shorten the time in air from the end of the etching process (first surface treatment process) to the start of the water washing process (second surface treatment process), and to improve the quality and the working environment. Can be achieved.

Further, since there is no scattering of the first remaining treatment liquid 28 from the work W during the transportation, the surroundings of the apparatus are not polluted and the danger of human being can be eliminated. Furthermore, since a large amount of gas and mist do not leak from the first surface treatment tank 20 and do not scatter outside the apparatus, the working environment can be further improved.

The shower room 30 and the first surface treatment tank 2
0 is composed of a booth 10 having an integral structure,
The liquid tightness can be kept higher and the structure can be simplified and the cost can be reduced.

Further, mist and the like leaked into the shower room 30 from the first surface treatment tank 20 are trapped by the water film and water droplets after the shower and the upper part of the shower room 30 is covered with the canopy 11. Therefore, the surroundings of the apparatus are not contaminated and human dangers can be eliminated, and the working environment can be further improved.

The first processing liquid is an etching processing liquid (or a stripping processing liquid) 28 having a high reaction speed, and the second processing liquid is a second processing liquid.
Since the treatment liquid 38 is water, an etching treatment liquid (or a peeling treatment liquid) adhering and remaining on the work W can be quickly washed away with water immediately after the execution of the first surface treatment step. (Exfoliation processing) The work W after execution is not excessively processed (excessively etched or excessively peeled off), and unevenness does not occur, so that higher quality can be achieved.

If the first treatment liquid is selected as a medicine melt and the second treatment liquid is selected as water, the medicine melt adhering to and remaining on the workpiece W immediately after the execution of the first surface treatment step is quickly replaced with water. Since the washing can be performed, the surface quality of each workpiece after the execution of the first surface treatment step can be kept constant and excellent.

[0069]

According to the first aspect of the present invention, the first surface treatment step is performed in a state where the first surface treatment step is immersed in the first treatment liquid in the lower first surface treatment tank, and the second surface treatment step is performed in the upper side. The work is executed while showering the second processing liquid on the work in the shower room,
An opening / closing lid of a vertical partition structure provided between the first surface treatment tank and the shower room can be opened when the workpiece is raised and lowered and the first lid is opened.
Further, since the surface treatment apparatus is formed so as to be able to be closed during each execution of the second surface treatment step, the following excellent effects can be obtained.

It is possible to drastically reduce the time in air from the end of the first surface treatment step to the start of the second surface treatment step. Even when the reaction speed of the chemical solution is high, it is possible to prevent excessive processing and unevenness due to the first processing liquid adhering and remaining on the surface of the work W. Generation of an oxide film can also be avoided. Therefore, the quality can be further improved. Since there is no scattering of the adhered first treatment liquid from the work during the transportation, the surroundings are not polluted and human danger can be eliminated. Since a large amount of gas and mist do not leak from the first surface treatment tank and scatter outside, the working environment can be further improved.

According to the second aspect of the present invention, the middle of the upper open booth is partitioned by an intermediate partition, and the lower side is formed in the first surface treatment tank and the rising side thereof is formed in the shower room. The first surface treatment tank is immersed in the first treatment liquid, and the second surface treatment step is performed while showering the second treatment liquid on the work in the shower room. Since the surface treatment apparatus is formed so as to be openable and capable of being closed during the execution of each of the first and second surface treatment steps, the same effect as that of the first aspect of the invention can be obtained. The liquid tightness between the chamber and the first surface treatment tank can be kept high, and the structure can be simplified and the cost can be reduced.

According to the third aspect of the present invention, the first processing liquid is a chemical melt and the second processing liquid is water.
In addition to the effects similar to those of the inventions of the second aspect, the surface quality of each workpiece after the execution of the first surface treatment step can be kept constant and more excellently.

Further, according to the invention of claim 4, the first processing liquid is an etching processing liquid having a high reaction speed (or
Since the second treatment liquid is water and the second treatment liquid is water, the same effects as those of the first and second aspects of the invention can be obtained, and furthermore, the etching treatment (or the detachment treatment) is performed. The subsequent work is not excessively processed (excessive etching or excessive peeling) or unevenness does not occur, and higher quality can be achieved.

[Brief description of the drawings]

FIG. 1 is a configuration diagram for explaining an embodiment of the present invention.

FIG. 2 is also a block diagram for explaining a drive control unit.

FIG. 3 is a view for explaining an operation / processing step execution order.

FIG. 4 is also a flowchart (1) for explaining an operation / processing step execution order.

FIG. 5 is also a flowchart (2) for explaining an operation / processing step execution order.

FIG. 6 is a diagram for explaining a conventional example.

[Explanation of symbols]

 REFERENCE SIGNS LIST 10 booth 11 canopy 12 opening 15 ascent limit sensor 20 first surface treatment tank 25 ascent limit sensor 28 first treatment liquid 30 shower room (second surface treatment room) 31 nozzle box 32 nozzle 35 shower position sensor 38 second treatment liquid 39 Waste liquid 50 Intermediate partition (vertical partition structure) 51 Opening 52 Waste liquid guide part 53 Waste liquid storage part 54 Drain valve 55 Open / close lid 56 Hinge part 57 Open / close sensor 58 Open / close motor 60 Drive control unit 67 Lifting motor W Work

Continued on the front page F term (reference) 4D075 AB01 BB20Z BB66Y BB91Y 4K053 PA17 RA06 RA07 SA04 SA06 TA14 TA18 XA01 YA28 ZA04 4K057 WA01 WA20 WB20 WM03 WM06 WM18 WN01

Claims (4)

[Claims] 1. A first surface treatment step of subjecting a workpiece to a surface treatment using a first treatment liquid, and a second surface treatment of subjecting the work after the first surface treatment to a surface treatment using a second treatment liquid. And a second surface treatment step, wherein the first surface treatment step can be performed in a state where the first surface treatment step is immersed in the first treatment liquid buried in the first surface treatment tank. Is formed so as to be executable while showering the second treatment liquid on the work in the shower room, and the first surface treatment tank is disposed on the lower side and the shower room is disposed on the upper side. An upper / lower partition structure with an opening / closing lid is provided between them. The work can be passed down through the shower room and the opened / closed lid from above and outside and can be lowered into the first surface treatment tank, and closed after opening and closing. Execute the first surface treatment step It is possible to raise the work after completion of the first surface treatment step through the opened opening / closing lid into the shower room, and to execute the second surface treatment step with the opening / closing lid closed after this rise. A surface treatment apparatus wherein the work after the second surface treatment step is formed so as to be able to be lifted and carried out of the shower room to the upper outside. 2. A first surface treatment step of performing a surface treatment on a work using a first treatment liquid, and a second surface treatment of performing a surface treatment on the work after completion of the first surface treatment using a second treatment liquid. And a step for performing the steps in this order, wherein the lower side of the middle of the upper open booth is partitioned by an intermediate partition, the lower side is formed in a first surface treatment tank, and the rising side thereof is formed in a shower room. An opening capable of passing the work in the vertical direction and an opening / closing lid capable of opening / closing the opening are provided, and the work is immersed and opened / closed in the first processing liquid built in the first surface treatment tank. The first surface treatment step can be executed with the lid closed, and the second surface treatment step is executed while the second treatment liquid is being showered on the work in a shower room with the opening / closing lid closed. Surface treatment equipment formed as possible . 3. The surface treatment apparatus according to claim 1, wherein the first treatment liquid is a drug melt, and the second treatment liquid is water. 4. The processing liquid according to claim 1, wherein the first processing liquid is an etching liquid or a stripping liquid, and the second processing liquid is water.
Or the surface treatment apparatus according to claim 2.