JP2002354849A5 - - Google Patents

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Publication number
JP2002354849A5
JP2002354849A5 JP2001153741A JP2001153741A JP2002354849A5 JP 2002354849 A5 JP2002354849 A5 JP 2002354849A5 JP 2001153741 A JP2001153741 A JP 2001153741A JP 2001153741 A JP2001153741 A JP 2001153741A JP 2002354849 A5 JP2002354849 A5 JP 2002354849A5
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JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001153741A
Other versions
JP2002354849A (ja
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Publication date
Application filed filed Critical
Priority to JP2001153741A priority Critical patent/JP2002354849A/ja
Priority claimed from JP2001153741A external-priority patent/JP2002354849A/ja
Publication of JP2002354849A publication Critical patent/JP2002354849A/ja
Publication of JP2002354849A5 publication Critical patent/JP2002354849A5/ja
Pending legal-status Critical Current

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JP2001153741A 2001-05-23 2001-05-23 振動波駆動装置及び振動波駆動装置を備えた装置 Pending JP2002354849A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001153741A JP2002354849A (ja) 2001-05-23 2001-05-23 振動波駆動装置及び振動波駆動装置を備えた装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001153741A JP2002354849A (ja) 2001-05-23 2001-05-23 振動波駆動装置及び振動波駆動装置を備えた装置

Publications (2)

Publication Number Publication Date
JP2002354849A JP2002354849A (ja) 2002-12-06
JP2002354849A5 true JP2002354849A5 (ja) 2008-07-10

Family

ID=18998210

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001153741A Pending JP2002354849A (ja) 2001-05-23 2001-05-23 振動波駆動装置及び振動波駆動装置を備えた装置

Country Status (1)

Country Link
JP (1) JP2002354849A (ja)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4543723B2 (ja) * 2004-03-29 2010-09-15 株式会社ニコン 振動アクチュエータ
JP5376898B2 (ja) * 2008-10-27 2013-12-25 太平洋セメント株式会社 送り装置
KR200492868Y1 (ko) * 2019-04-16 2020-12-23 엘에스일렉트릭(주) 가스절연개폐장치 차단기용 전동 스프링 조작기

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2000344474A (ja) * 1999-06-01 2000-12-12 Canon Inc ステージ装置およびこれを備えた装置
JP4444395B2 (ja) * 1999-06-15 2010-03-31 キヤノン株式会社 振動波駆動装置
JP2001037265A (ja) * 1999-07-15 2001-02-09 Canon Inc 振動型駆動装置およびこれを用いた機器
JP4438029B2 (ja) * 1999-07-22 2010-03-24 キヤノン株式会社 振動波駆動装置及び振動波駆動装置に用いる振動子

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