JP2002350513A5 - - Google Patents
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- JP2002350513A5 JP2002350513A5 JP2002066275A JP2002066275A JP2002350513A5 JP 2002350513 A5 JP2002350513 A5 JP 2002350513A5 JP 2002066275 A JP2002066275 A JP 2002066275A JP 2002066275 A JP2002066275 A JP 2002066275A JP 2002350513 A5 JP2002350513 A5 JP 2002350513A5
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002066275A JP4255645B2 (en) | 2001-03-19 | 2002-03-12 | Inspection method and inspection apparatus |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001079598 | 2001-03-19 | ||
| JP2001-79598 | 2001-03-19 | ||
| JP2002066275A JP4255645B2 (en) | 2001-03-19 | 2002-03-12 | Inspection method and inspection apparatus |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2007032820A Division JP4757810B2 (en) | 2001-03-19 | 2007-02-14 | Semiconductor device, inspection device |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002350513A JP2002350513A (en) | 2002-12-04 |
| JP2002350513A5 true JP2002350513A5 (en) | 2005-10-27 |
| JP4255645B2 JP4255645B2 (en) | 2009-04-15 |
Family
ID=26611611
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002066275A Expired - Fee Related JP4255645B2 (en) | 2001-03-19 | 2002-03-12 | Inspection method and inspection apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4255645B2 (en) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7205986B2 (en) | 2002-12-18 | 2007-04-17 | Semiconductor Energy Laboratory Co., Ltd. | Image display device and testing method of the same |
| JP4624109B2 (en) | 2003-03-25 | 2011-02-02 | 株式会社半導体エネルギー研究所 | Semiconductor device inspection circuit |
| US7518602B2 (en) | 2004-12-06 | 2009-04-14 | Semiconductor Energy Laboratory Co., Ltd. | Test circuit and display device having the same |
| TWI560456B (en) * | 2009-03-20 | 2016-12-01 | Bravechips Microelectronics | Method of parallel ic test and wafer containing same function dies under test and ic chips containing same function blocks under test |
| CN111640219B (en) * | 2020-06-04 | 2022-11-18 | 许昌开普电气研究院有限公司 | Inspection robot control system and method based on overhead line |
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2002
- 2002-03-12 JP JP2002066275A patent/JP4255645B2/en not_active Expired - Fee Related