JP2002349459A - Manufacturing method of scroll type compressor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To increase precision by reducing camber and poor precision occurring in molding a movable scroll and a fixed scroll using material such as resin or metal, and to improve a pump characteristic and stabilize quality by reducing a clearance between scroll blades. SOLUTION: In a combination state of a movable scroll molding body 70 having molded scroll blades 71 and a fixed scroll molding body 60 having molded scroll blades 61 combinable with the movable scroll molding body 70, the scroll blades 71 and 61 are relatively moved with a polishing agent 73 movably interposed between them. A finishing state between both scroll blades 71 and 61, for example, an air pressure of compressed air fed out of a discharge port 64, is detected by a pressure gauge 110, and the scroll blades are polished while controlling a polishing condition such as polishing pressure, motion speed, grain size of the polishing agent 73, thereby providing the movable scroll 20 and the fixed scroll 10.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a scroll type pump. Specifically, the present invention relates to a method for manufacturing a movable scroll and a fixed scroll that constitute a scroll pump.

[0002]

2. Description of the Related Art In recent years, scroll pumps have been widely used because of their high driving efficiency and miniaturization. FIG. 30 is a schematic configuration diagram of a scroll type pump, in which a movable scroll 20 having a spiral movable scroll blade 21 and a fixed scroll blade 1 combined with the movable scroll blade 21 of the movable scroll 20 are shown.
1, a fixed scroll 10, an Oldham ring 30 for preventing the movable scroll 20 from rotating, and an Oldham ring 3.
0, a housing 40 that accommodates the orbiting scroll 10 in a revolvable manner, and a motor 5 that drives the orbiting scroll 20
0 and an eccentric shaft 51 for converting the driving force of the motor 50 into the revolving motion of the movable scroll 20. A claw 31 for preventing rotation of the movable scroll 20 is provided on the Oldham ring 30.
The movable scroll 20 is provided with a recess (not shown) for fitting with the claw 31. On the lower surface of the Oldham ring 30, a convex portion 32 for regulating the revolving motion of the movable scroll 20 is provided. The convex portion 32 is fitted in a revolution control groove 41 provided in the housing 40 to constitute a scroll pump. The eccentric cam 52 provided at the tip of the eccentric shaft 51 revolves the orbiting scroll 20 to perform a pump function. Reference numeral 55 denotes a hole for fitting a projection (not shown) provided on the lower surface of the movable scroll 20. Such a scroll type pump is disclosed, for example, in Japanese Patent Publication No. 6-8195.
No. 8 and Japanese Patent Publication No. Hei 8-30469,
These are disclosed in, for example, JP-A-199981 and JP-A-2-112688.

However, in the scroll type pumps disclosed in these publications, the movable scroll 20 and the fixed scroll 10 are formed of a resin molded product. For example, as shown in FIG. The gap between the blades 11 and 21 becomes large, and it is difficult to satisfy the pump characteristics.

Japanese Unexamined Patent Publication No. Sho 59-205266 discloses a method for finishing a curved surface. In this method, a method is used in which only the blade side surface, that is, the movable scroll blade 21 and the fixed scroll blade 11 are processed in the radial direction. There is no mention of the axial processing which originally affects the pump characteristics, and it is impossible to improve the deterioration of the characteristics due to the axial gap caused by warpage or the like.

Further, Japanese Patent Application Laid-Open No. 59-208187 discloses a method in which a spiral body having a polishing layer attached thereto is formed so as to have an optimum gap with the other spiral body. . However, in this method, removing the polishing layer from the spiral changes the dimensions of the spiral,
It is difficult to maintain accuracy, and the gap between the spiral body from which the polishing layer has been removed and the spiral body formed thereby is not as desired, and the pump characteristics cannot be optimized.

Further, Japanese Patent Application Laid-Open Nos. 55-157664 and 63-77612 disclose a method of forming both the movable scroll 20 and the fixed scroll 10 using a master processing tool. ing. However, when a machining tool is used, the movable scroll 20
And two working tools corresponding to the fixed scroll 10 are required. Further, it is not clear whether the combination accuracy of the two scrolls 10 and 20 when they are overlapped can be guaranteed. In addition, the working tool may be worn out over a long period of use, resulting in a change in the finishing accuracy and a loss of accuracy.

Japanese Patent Application Laid-Open No. 57-96762 discloses that a wrapping agent is applied to a movable scroll 20 and a fixed scroll 1.
A method of processing the scroll blades 11 and 21 by feeding the scroll blades with the scroll blades 11 and 21 is disclosed. However, in this method, the scroll blades are floated in the axial direction by the compressed air, that is, the gaps are generated and the processing is performed.
The fed lapping agent flows from the high-pressure side to the low-pressure side, so that the wrapping agent cannot be supplied uniformly to the entire blade, and processing variations occur. Further, a device such as a compressor for forcibly supplying air from the outside is required separately.

Further, in any of the above cases, the processing control is not performed while detecting the finished state of the processing surface in real time during the processing. It takes time to observe the state and repeat the processing while changing the processing conditions based on the measured dimensions. Moreover, if the detection is not performed in real time, there is a possibility that desired processing may not be performed due to a malfunction of the processing apparatus, an abnormality of the tool, or the like.

[0009]

SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned problems of the prior art, and occurs when a movable scroll or a fixed scroll is molded using a material such as resin or metal. It is an object of the present invention to improve the pump characteristics and stabilize the quality by reducing the warpage and the accuracy defect to increase the accuracy and reducing the gap between the scroll blades.

[0010]

A method of manufacturing a scroll type pump according to the present invention comprises a movable scroll having a spiral scroll blade and a fixed scroll having a spiral scroll blade combined with the scroll blade. A method for manufacturing a scroll type pump, comprising: a fixed scroll formed body having a formed movable scroll formed body and scroll blades that can be combined with the movable scroll formed body; In a state where the body and the movable scroll body having the scroll blades that can be combined are combined, the abrasive is movably interposed between the combined scroll blades to perform relative movement, and a finished state between the two scroll blades is performed. While controlling the processing conditions It is characterized in that processing.

In the present invention, as a method of detecting the finished state, for example, a method of detecting the pressure and flow rate of compressed air discharged from an exhaust port of the fixed scroll body or the fixed scroll formed body is used. .
Further, a flatness of a processing surface of the fixed scroll molded body or the movable scroll molded body is detected by a position sensor, or a force distribution pressed by the processed surface of the fixed scroll molded body or the movable scroll molded body. Is detected by a force sensor. Furthermore, the degree of deformation that occurs when pressed by the scroll blades of the fixed scroll molded body or the processing surface of the movable scroll molded body can be detected to detect the finished state.

[0012] In the present invention, it is preferable that the relative motion is alternately performed with a forward rotation and a reverse rotation. Also, it is convenient to supply the cleaning substance from the suction port of the fixed scroll body and discharge it from the discharge port of the fixed scroll body during the processing.

In the present invention, a processing force can be applied in the axial direction of the scroll blade, or a processing force can be applied in the radial direction of the scroll blade.

These processing forces can be applied to the fixed scroll molding or the movable scroll molding via an elastic body, and the processing force can be automatically controlled by the air pressure, the electromagnetic drive or the like. Can be given.

At this time, it is preferable that a detecting means for detecting the processing force is provided, and it is desirable to detect a finished state and automatically control the processing force. For example, a pneumatic device can be used as the automatically controllable means, and the detection means can be an air pressure detection means.

In the present invention, the relative movement of the fixed scroll molding or the movable scroll molding can be performed by magnetic driving means. In this case, it is preferable to provide relative speed detecting means for detecting a relative speed with respect to the fixed scroll body or the movable scroll body, and to control the relative movement by detecting the finished state. desirable. For example, the relative speed can be detected by position detecting means for detecting the relative position of the fixed scroll molded body or the movable scroll molded body.

In the manufacturing method according to the present invention, alumina powder or diamond powder can be used as the abrasive. Further, it is preferable to use a working liquid in combination with these abrasives. Further, it is desirable that ultrasonic vibration is applied to the abrasive and the working liquid to perform relative movement.

Further, the abrasive and the working liquid are sequentially supplied from the suction port of the fixed scroll body, or the abrasive and the working liquid are supplied to the discharge port of the fixed scroll formed body and the suction port of the fixed scroll formed body. Or between the discharge port of the fixed scroll body and the suction port of the fixed scroll body.

When these abrasives are used, the finished state can be detected to change the particle size of the abrasive or change the hardness of the abrasive.

[0020]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 is a schematic explanatory view showing a manufacturing method according to an embodiment of the present invention. The manufacturing method according to the present invention comprises a fixed scroll body having a formed movable scroll formed body and a scroll blade that can be combined with the movable scroll formed body, or a fixed scroll formed body formed and processed by the fixed scroll formed body. In a state where the movable scroll body having the scroll blades that can be combined is combined, an abrasive is movably interposed between the combined scroll blades to perform relative movement, and a finished state between the two scroll blades is detected. It is characterized in that co-rubbing is performed while controlling the processing conditions.

In the method shown in FIG. 1, the movable scroll molded body 70 and the fixed scroll molded body 60 are used as the scroll bodies to be combined. The movable scroll molded body 70 includes a disk-shaped scroll plate 72 and scroll blades 71, and is integrally formed of resin or metal. In addition, the fixed scroll molding 6
Reference numeral 0 also includes a scroll housing 62 having a lid shape that can be fitted to the housing 40 and a scroll blade 61, and is integrally formed of resin or metal. FIG. 1 shows a state before processing. The movable scroll molded body 70 and the fixed scroll molded body 60 are provided with scroll blades 71 and 61, respectively. The two scroll blades 71 and 61 are designed so as to have, for example, an involute curve or an Archimedes spiral shape, and the movable scroll molded body 70 and the fixed scroll molded body 60 are rubbed together to form a pump. The movable scroll 20 and the fixed scroll 10 are obtained.

In this method, an abrasive 73 is interposed between the scroll blade 71 of the movable scroll member 70 and the scroll blade 61 of the fixed scroll member 60 as shown in FIG. The abrasive 73 is in the form of a powder, for example, alumina powder or diamond powder, and is appropriately selected according to the material of the movable scroll molded body 70 and the fixed scroll molded body 60. The abrasive 73 is discharged from the fixed scroll molded body 60 after the two molded bodies 70 and 60 are combined.
Alternatively, it is injected from the inlet 63 or when being combined, and freely moves between the scroll blades 71 and 61. At this time, the polishing agent 73 can be used alone, but it is preferable to use the polishing agent together with a working liquid 74 made of a lubricating liquid such as water or oil.

In the present invention, as shown in FIG. 30, for example, the movable scroll molded body 70 is driven to revolve and the movable scroll molded body 70 and the fixed scroll molded body 60 are moved relative to each other by a configuration similar to the driving of the scroll pump. Then, the movable scroll molded body 70 and the fixed scroll molded body 60 are rubbed together. At this time, as relative motion,
It is desirable that the movable scroll molded body 70 not only performs the forward rotation as shown in FIG. 2A, but also performs the reverse rotation as shown in FIG. 2B. When the revolving motion is performed in only one direction, a larger amount of processed powder is deposited on the center side than on the outer sides of both scroll molded bodies 70 and 60,
Also, the abrasive 73 may be unevenly distributed toward the center. As a result, it is easy for excessive processing to proceed in the central portion, and to cause cracks and chips. Further, a part of the abrasive 73 is discharged from the discharge port 64 and both the scroll blades 71 and 61 are discharged.
It is also conceivable that the abrasive 73 interposed therebetween gradually decreases. Therefore, as described above, not only the one-way motion but also the revolving motion in the opposite direction are performed, so that even if the processing powder exists, the processing powder is deposited on a part to prevent excessive processing, and the discharge of the abrasive 73 is prevented. And the abrasive 73 can be distributed uniformly. As a result, both scroll blades 7
1, 61, the scroll plate 72, the scroll housing 62, and the like can be uniformly and accurately processed.

Also, as shown in FIG. 3, during the machining, the fixed scroll molded body 6 depends on the progress of the machining.
It is preferable that the cleaning substance is fed from a suction port 63 opened to zero, and processing powder generated by processing is discharged from a discharge port 64. By discharging the processing powder in this manner, the processing powder accumulates, and excessive processing can be prevented by the processing powder, and more accurate processing can be performed. As the cleaning substance, not only a liquid substance such as alcohol, liquid chlorofluorocarbon, water and oil but also a substance such as clean compressed air which does not damage the molded bodies 70 and 60 may be used. In this case, as shown in FIG. 4, it is desirable to apply ultrasonic vibration to the fixed scroll molding 60 or the movable scroll molding 70 in the vertical direction by the ultrasonic device 79. As a result, the polishing agent 73 is evenly dispersed between the moldings 70 and 60 together with the processing liquid 74, and the movement of the polishing agent 73 is activated, so that the processing can be performed efficiently.

Further, as shown in FIG. 5, a suction port 63 and a discharge port 64 are connected by a pipe 65, and an abrasive 73 and a working fluid 74 are connected.
Should be circulated. With such a configuration, it is possible to prevent the abrasive 73 and the processing powder from being localized.
A constant amount of the abrasive 73 can always be supplied between the two scroll blades 71 and 61, and the processing accuracy can be further improved.

As described above, in the present invention, the abrasive 73 is applied to the fixed scroll molding 60 and the movable scroll molding 70.
The movable scroll molded body 70 and the fixed scroll molded body 60 can be simultaneously and accurately processed by causing the abrasive 73 to intervene and perform relative movement. In the present invention, not only the combination of the fixed scroll molding 60 and the movable scroll molding 70 but also the relative movement by combining the movable scroll molding 70 and the standard fixed scroll 80 as shown in FIG. Alternatively, as shown in FIG. 7, the fixed scroll molded body 60 and the standard movable scroll body 90 can be combined for relative movement.

The standard fixed scroll body 80 has a desirable shape of the fixed scroll 10, and a scroll blade 81 and a scroll housing 82 are integrally formed as shown in FIG. In the standard fixed scroll body 80 as well, the suction port 83 and the discharge port 84 are opened to supply and circulate the abrasive 73 and the processing liquid 74 and discharge the processing powder as described above. The standard movable scroll body 90 also has a desirable movable scroll 20 shape, and as shown in FIG.
1 and the scroll plate 92 are integrally formed. The standard movable scroll body 90 and the standard fixed scroll body 80 can be combined with each other, and when combined, the gap size and dimensional accuracy between the scroll blades 91 and 81 are set to optimal conditions. The standard movable scroll body 90 and the standard fixed scroll body 80 are each in the form of a grindstone, and are formed by hardening abrasive grains such as alumina powder or diamond powder with an adhesive,
It is appropriately selected according to the material of the molding used. Of course, the standard movable scroll body 90 and the standard fixed scroll body 80 can be formed with high precision from a metal having high hardness instead of a whetstone shape.
Can also be prepared and used.

As described above, the standard scroll body 80,
90, the individual movable scroll 2
0, high precision can be achieved for each fixed scroll 10, and the gap between the scroll blades 21 and 11 can be reduced,
It is possible to improve the stability of the pump characteristics. Further, since the reference jig is used, the processing efficiency can be improved.

As described above, in the production method of the present invention,
The formed movable scroll formed body 70 is co-rubbed with the formed fixed scroll formed body 60 or the standard fixed scroll body 80.
Further, the fixed scroll molded body 60 that has been molded is co-rubbed with the movable scroll molded body 70 that has been molded or the standard movable scroll body 90.

In the present invention, co-rubbing is performed while detecting the finished state of the movable scroll 20 and the fixed scroll 10. For example, the fixed scroll molding 60
The detection can be performed by detecting the air pressure discharged from the discharge port 64. FIG. 10 is a schematic explanatory view. In the example of FIG. 10, a pipe 66 having an opening valve 111 at the tip thereof is provided at an outlet 64 of the fixed scroll molded body 60.
Is connected, and a pressure gauge 110 is provided in the pipe 66. Here, if the finished condition is not enough,
Movable scroll molding 70 and fixed scroll molding 60
The gap is large, and air easily leaks from the gap. Therefore, the detected pressure immediately after the start of molding is small. And the processing state improves as the co-rubbing process is continued,
Movable scroll molding 70 and fixed scroll molding 60
Is smaller, and the detected pressure is larger. That is, by detecting the air pressure from the outlet 64, the finished state can be determined. As a result, by performing co-rubbing with the detected air pressure as a target, the target pump pressure performance can be easily secured.

In the present invention, such a finished state is detected, and the processing conditions are controlled in accordance with the detected state. For example, as shown in FIG. 11, the processing is performed by controlling the processing force applied in the axial direction of the scroll moldings 70, 60. Thus, the warp of the upper surface of the scroll blade 71 (the lower surface of the fixed scroll blade 61) of the movable scroll molded body 70 (the fixed scroll molded body 60) to be processed and the upper surface of the scroll plate 72 (the scroll housing 6) are processed.
2 inner lower surface), undulations due to poor accuracy, and the like can be removed. Also, as shown in FIG.
Processing is performed by applying a processing force in the radial direction of 0,60. Thereby, the scroll blades 7 of the movable scroll molding 70 are
The warpage of the side surface 1 (the side surface of the scroll blade 61) and the undulations and unevenness due to poor accuracy can be removed.

When a working force is applied in the axial direction, for example, as shown in FIG. 13, an elastic body 75 such as a spring is arranged between the lower surface of the scroll plate 72 of the movable scroll formed body 70 and the housing 40. Can be considered. As a result,
A restoring force acts on the elastic body 75, and can generate a force that pushes the scroll plate 72 upward. Thereby, a processing force can be applied in the axial direction of the scroll blade 71.

FIG. 1 shows a method for applying a working force in the axial direction.
As shown in FIG. 4, compressed air generated by a pump (not shown) is sent to the air cylinder 101,
By the drive of No. 01, a working force in the axial direction can be applied to the fixed scroll formed body 60 (or the standard fixed scroll body 80). Reference numeral 102 denotes a drive shaft of the air cylinder 101.

At this time, as shown in FIG.
The processing force is changed according to the finished state obtained by detecting the air pressure from Step 4. When processing is performed by applying such a processing force, the processing amount and the finished state of the surface usually change according to the magnitude of the processing force. For example, if the processing force is large, the processing amount is large but the surface finish is poor. If the processing force is low, the processing amount is small and the surface finish is good. Therefore, as described above, the finished state is detected by detecting the air pressure from the discharge port 64, and the air pressure applied to the air cylinder 101 is changed accordingly. As a result, the fixed scroll 10 and the movable scroll 20 can be obtained in the most desirable processing state.

Further, in the present invention, it is desirable to have a detecting means for detecting the processing force. The processing pressure is feedback-controlled by such a detecting means, and the fixed scroll 10 and the movable scroll 2 are almost automatically controlled.
0 can be finished.

As the detecting means, for example, the one shown in FIG.
A force sensor 112 is arranged between the drive shaft 102 and one drive shaft 102. In this method, the processing pressure can be measured directly. In the configuration shown in FIG. 17, a pressure gauge 1 for measuring the pressure applied from the pump 103 to the air cylinder 101 is provided.
10 are provided. According to this method, the pressure gauge 11
If the measured value of 0 is P, the conversion to the processing force F is a conversion from the pressure unit to the force unit, so the air pressure may be multiplied by the cross-sectional area A acting on the fixed scroll molded body 60. F = P × A. Thus, the processing force can be detected by the pressure gauge 110. In this case, compared to a case where the processing pressure is directly detected by the force sensor 112,
The influence of vibration or the like generated on the fixed scroll molded body 60 can be eliminated, and more accurate control of the processing force can be performed.

When an axial working pressure is applied,
As shown in FIG. 18, an electromagnetic drive device 105 for pressing the upper surface of the fixed scroll molded body 60 can be used.
According to such an electromagnetic drive device 105, it is possible to automatically control the voltage and current applied to the electromagnetic drive device 105 by controlling them.

When a radial working pressure is applied, for example, as shown in FIG. 19, a slide bush 77 slidable in the hole 55 of the eccentric cam 52 in the radial direction of the hole 55 and the slide bush 77 An elastic body 53 such as a spring that biases 77 in the radial direction of the hole 55 is disposed. Further, the convex portion 76 of the movable scroll molded body 70 is fitted to the slide bush 77. As a result, the amount of movement (the amount of eccentricity) of the slide bush 77 is regulated by the restoring force of the elastic body 53, and a processing force can be applied in the radial direction of the movable scroll blade 71. Further, by adjusting the restoring force of the elastic body 53, the processing force can be adjusted. Also in this case, it is possible to apply a processing pressure in the radial direction by the air cylinder 101 or the electromagnetic driving means 105 as described above, and detect the processing pressure by an appropriate detection means to automatically control the processing.

As described above, the processing conditions can be changed by changing the processing pressure in the axial direction or the radial direction. In addition, the processing conditions can be controlled by changing the speed of the relative movement. . Generally, as shown in FIG. 20, a motor 50 having an eccentric cam 52 is used for the revolving motion of the orbiting scroll 20. Therefore, the processing conditions can be controlled by changing the rotation speed of the motor 50.

In this case, for example, as shown in FIG. 21, the housing 82 of the standard fixed scroll body 80 and the scroll blades 8
1, the position sensor 113 can be attached to detect the speed of the relative movement. That is, by attaching the position sensor 113 to the side surface of the housing 82, the position sensor 113 detects the movable scroll formed body 70 approaching the standard fixed scroll body 80 by the revolving motion, and outputs a detection signal (FIG. 21 ( a)). On the other hand, when the movable scroll molded body 70 moves away from the standard fixed scroll body 80 due to the orbital motion, the position sensor 113 does not detect and does not output a detection signal (FIG. 21B). Thus, by detecting the detection signal from the detection sensor, the number of revolutions and the linear velocity of the revolving motion (relative motion) of the orbiting scroll formed body 70 can be detected. As such a position sensor 113, any sensor that can detect the approach of an object, such as a photoelectric sensor, an eddy current sensor, a magnetic detection sensor using an ultrasonic wave, a laser, or a Hall element, is used. Can be used.

At this time, as shown in FIG.
It is preferable to change the processing force in accordance with the finished state obtained by detecting the air pressure from Step 4. When processing is performed by such relative movement, the processing amount and the finished state of the surface change according to the magnitude of the relative speed. That is, when the relative speed is large, the processing amount is large but the surface finish is poor. When the relative speed is low, the processing amount is small and the surface finish is good. Therefore, the finished state is detected by the method described above, and the rotation speed of the motor 50 is changed accordingly. As a result, the fixed scroll 10 and the movable scroll 20 can be obtained in the most desirable processing state.

Further, another processing condition is to change the particle size of the abrasive 73 to be used. When processing is performed with the abrasive 73 interposed, the processing amount and the finished state of the surface change according to the particle size of the abrasive 73.
If the particle size is large, the processing amount is large, but the surface finish is poor,
If the particle size is small, the processing amount is small and the surface finish is good. Therefore, as shown in FIG. 23, when the finished state is poor, the particle size is increased, and the particle size of the abrasive 73 is gradually changed so as to decrease the particle size as the finished state becomes better. As a result, as a result, the fixed scroll 10 and the movable scroll 20 can be obtained in the most desirable processing state.

The processing conditions can also be changed by changing the hardness of the polishing agent 73. In this case,
If the hardness of the abrasive 73 is high, the processing amount is large but the surface finish is poor. If the hardness is low, the processing amount is small and the surface finish is good. Therefore, as shown in FIG. 24, when the finished state is poor, the hardness may be increased, and the hardness of the abrasive 73 may be gradually changed so as to decrease the hardness as the finished state becomes better.

Further, the processing conditions can be changed depending on the viscosity of the processing liquid 74. In this case, if the viscosity is high, the processing amount is large but the surface finish is poor. If the viscosity is low, the processing amount is small and the surface finish is good. Therefore,
As shown in FIG. 25, when the finished state is poor, a processing liquid 74 having a high viscosity may be used, and the processing liquid 74 may be gradually changed so as to decrease the viscosity as the finished state becomes better.

As described above, according to the present invention, the movable scroll molded body 70 and the fixed scroll molded body 60 obtained by the molding process are mixed with the abrasive 73 while detecting the finished state of the process and changing various processing conditions. By performing the co-rubbing process with the interposition therebetween, the movable scroll 20 and the fixed scroll 10 with high precision can be obtained by a simple method. Thereby, the gap between the movable scroll blades 6121 and the fixed scroll blades 6111 can be reduced as much as possible, and the characteristics of the pump 103 and the stability of quality can be improved.

In the above embodiment, a method of measuring the air pressure from the outlet 64 is used as a method of detecting the processing state. However, as shown in FIG. 114. In this case, if the finished state is insufficient, the gap between the movable scroll formed body 70 and the fixed scroll formed body 60 is large, and air easily leaks from the gap. Therefore, the detection flow rate immediately after the start of molding is small, and the processing state is improved as the processing is continued, and the detection yield is increased. That is, by detecting the air flow rate from the outlet 64,
The finished state can be determined. As a result, by performing co-rubbing with the detected air flow rate as a target, the flow rate performance of the target pump can be easily secured.

When the working fluid 74 is used, the working fluid 74 jumps out of the outlet 64, and when the working fluid 74 is circulated, the pressure gauge 110 or the flow meter 11 is connected to the outlet 64.
4 cannot be arranged, and it is necessary to use another detection method. In this case, for example, the method shown in FIG. 27 is adopted. The method uses a standard movable scroll body 90
Are provided. A plurality of the position sensors 115 are arranged on the upper surface of the movable scroll blade 91 of the standard movable scroll body 90 and the upper surface of the scroll plate 92. When the distance from the fixed scroll molded body 60 becomes equal to or more than a certain value, a detection signal is output. Output. That is, the flatness of the inner surface of the scroll housing 62 can be detected from the distribution of the detection signal from the position sensor 115 disposed on the upper surface of the scroll blade 91. Further, the flatness of the lower surface of the scroll blade 61 can be detected from the distribution of the detection signal from the position sensor 115 disposed on the upper surface of the scroll plate 72. That is, in the initial stage of processing, it is determined that the flatness of the lower surface of the scroll blade 61 and the inner surface of the scroll housing 62 is poor and the finished state is low, and that the finished state is high if the flatness is improved. The above processing conditions can be changed according to the finished state determined in this way.

Further, a method shown in FIG. 28 is employed. In this method, the force sensor 116 is disposed on the entire upper surface of the scroll plate 92 of the standard movable scroll body 90. This force sensor 116 allows the scroll blade 61
The contact state of the lower surface can be detected. That is, in the initial stage of processing, the flatness of the lower surface of the scroll blade 61 is poor and there is a gap, and only a part of the region comes into contact with the force sensor 112 to generate a distribution of the contact force. If the processing proceeds and the flatness is improved, the entire fixed scroll blade 61 comes into uniform contact with the force sensor 112, the contact force distribution becomes uniform, and it can be determined that the finished state is high. The above processing conditions can be changed according to the finished state determined in this way.

Further, the processing state can be detected by using the strain sensor 118. As shown in FIG. 29, for example, the distortion sensor 118 is installed substantially at the center of the back surface of the standard movable scroll body 90, and the outer peripheral portion of the standard movable scroll body 90 is supported by a cylindrical support member 117. At this time, as shown in FIG.
In the case where the accuracy is poor such that the center portion of the zero is warped such that the center portion becomes convex, when the machining force in the axial direction is applied, the center portion of the scroll blade 61 is located at the center with the center portion of the standard movable scroll body 90 at the initial stage of the machining. Contact and flex downward. Therefore, tensile strain is detected by the strain sensor 118. If the processing proceeds and the flatness is improved, the convex warpage is reduced, and the entire lower surface of the scroll blade 61 uniformly comes into contact with the standard movable scroll body 90. In this case, the distortion detected by the distortion sensor 118 disappears. In this way, the finished state may be determined by detecting the degree of deformation of the fixed scroll molded body 60.

The position sensor 113 and the force sensor 11
2. By using the strain sensor 118 and performing the co-rubbing process with the detected detection signal as a target, a target allowable gap between the two blades 71 and 61 can be reliably ensured.

As described above, in the present invention, the finished state is detected by various methods, thereby changing the applied processing force, changing the relative speed, and changing various conditions such as the particle size and hardness of the abrasive 73. By changing the processing conditions, post-processing of the formed body is facilitated, and the movable scroll 20 and the fixed scroll 10 with higher precision can be obtained. Needless to say, the above-described method of detecting the finished state and the method of controlling the processing conditions can be appropriately combined and used.

[0052]

According to the present invention, the formed movable scroll molded body or the fixed scroll molded body is combined, or the movable scroll molded body is combined with the standard fixed scroll molded body, or the fixed scroll molded body and the standard movable scroll molded body are combined. In combination with the scroll body, the abrasive is movably interposed and co-rubbing is performed by relative motion, so that distortion due to molding can be easily removed and post-processing can be performed to a state closest to actual use. In addition, since it can be performed with the same configuration as the drive device of the scroll pump, post-processing after molding can be easily performed. Moreover, since the co-rubbing is performed while controlling the processing conditions by detecting the finished state between the scroll blades, it is possible to achieve higher precision. As a result, the gap between the scroll blades can be further reduced, and the pump characteristics can be improved and stabilized.

In particular, a scroll type pump can be obtained with almost no adjustment at the time of assembling the pump, since it can be processed as a pair of movable scroll and fixed scroll. Further, by using the standard fixed scroll body or the standard movable scroll body, it is possible to improve the accuracy of each scroll body, so that the movable scroll body and the fixed scroll body obtained using them can be combined. A scroll pump with less leakage can be configured and can be manufactured efficiently.

Since post-processing after molding is performed while performing the function of an actual pump, for example, it is possible to remove processing powder during processing or to circulate an abrasive and a processing liquid used therewith. Easy to do. As a result, the movable scroll and the fixed scroll can be obtained with more stable accuracy.

Further, the normal rotation motion and the reverse rotation motion can be easily performed, and a uniform machined surface can be obtained by combining both the motions.

In the present invention, the finished state can be detected by various methods, and various processing conditions can be set. In particular, since a working force can be applied to the movable scroll molded body and / or the fixed scroll molded body in the axial direction or the radial direction thereof, post-processing can be accurately performed not only on the upper and lower surfaces but also on the side surfaces of the scroll blade. it can. As a result, the gap between the scroll blades is reduced, and a high-precision scroll pump with less leakage can be easily obtained.

[Brief description of the drawings]

FIG. 1 is a schematic explanatory view showing a manufacturing method according to an embodiment of the present invention.

FIGS. 2 (a) and 2 (b) are diagrams showing relative motions in the above-described manufacturing method, respectively. FIG. 2 (a) is a diagram showing a forward motion, and FIG. 2 (b) is a diagram showing a reverse motion. .

FIG. 3 is an explanatory view showing one mode in the manufacturing method of the above.

FIG. 4 is an explanatory view showing another embodiment of the manufacturing method according to the embodiment.

FIG. 5 is an explanatory view showing still another mode in the manufacturing method of the above.

FIG. 6 is an explanatory view showing still another mode in the manufacturing method of the above, in which a standard fixed scroll body is used.

FIG. 7 is an explanatory view showing still another mode in the manufacturing method of the above, in which a standard movable scroll body is used.

FIG. 8 is a view showing a standard fixed scroll body used in the manufacturing method of the above, wherein FIG. 8 (a) is a perspective view thereof and FIG. 8 (b) is a sectional view thereof.

9A and 9B are views showing a standard movable scroll used in the manufacturing method of the above, wherein FIG. 9A is a perspective view thereof, and FIG. 9B is a sectional view thereof.

FIG. 10 is an explanatory view showing one mode of the manufacturing method, and is a view showing a specific example of a method for detecting a finished state of processing.

FIG. 11 is an explanatory view showing one mode in the manufacturing method of the above, and is an explanatory view of a processing force.

FIG. 12 is an explanatory view showing one mode of the manufacturing method of the above, and is an explanatory view of a processing force.

FIG. 13 is an explanatory view showing one embodiment of the above manufacturing method, and is a view showing a specific example of a case where an axial working force is applied.

FIG. 14 is an explanatory view showing one embodiment of the above manufacturing method, and is a view showing another specific example in a case where an axial working force is applied.

FIG. 15 is a diagram showing a relationship between a processing pressure and a finished state in the manufacturing method of the above.

FIG. 16 is an explanatory view showing one embodiment of the above manufacturing method, and is a view showing a specific example of a method for detecting a processing pressure.

FIG. 17 is an explanatory view showing one mode in the manufacturing method of the above, and is a view showing another specific example of a method of detecting a processing pressure.

FIG. 18 is an explanatory view showing one embodiment of the above manufacturing method, and is a view showing another specific example in a case where an axial working force is applied.

FIG. 19 is an explanatory view showing one embodiment of the above manufacturing method, and is a view showing a specific example in the case of applying a processing force in a radial direction.

FIG. 20 is an explanatory view showing one mode in the manufacturing method of the above, and is a view showing a specific example in the case of relative movement.

21 (a) and (b). It is explanatory drawing which shows one form in a manufacturing method same as the above, and is a figure which shows a specific example in the case of detecting a relative speed.

FIG. 22 is a diagram showing a relationship between a relative speed and a finished state in the same manufacturing method.

FIG. 23 is a diagram showing the relationship between the particle size of the abrasive and the finished state in the same manufacturing method.

FIG. 24 is a view showing the relationship between the hardness of the abrasive and the finished state in the same manufacturing method.

FIG. 25 is a diagram showing a relationship between a viscosity of a working fluid and a finished state in the same manufacturing method.

FIG. 26 is an explanatory view showing one mode in the manufacturing method of the above, and is a view showing another specific example of a method for detecting a finished state of processing.

FIG. 27 is an explanatory view showing one mode in the manufacturing method of the above, and shows still another method of detecting a finished state of processing, and FIG. 27 (a) is a perspective view of a standard movable scroll body, and FIG. (b) is an explanatory sectional view.

FIG. 28 is an explanatory view showing one embodiment of the above manufacturing method, and is a view showing still another specific example of a method for detecting a finished state of processing.

FIG. 29 is an explanatory view showing one mode in the manufacturing method of the above, and is a view showing still another specific example of a method of detecting a finished state of processing.

FIG. 30 is a schematic configuration diagram of a scroll pump.

FIG. 31 is a view showing a problem in a conventional scroll pump.

[Explanation of symbols]

 Reference Signs List 10 fixed scroll 20 movable scroll 50 motor 60 fixed scroll formed body 61 scroll blade 62 housing 70 movable scroll formed body 71 scroll blade 72 scroll plate 80 standard fixed scroll body 90 standard movable scroll body 101 air cylinder 103 pump for driving air cylinder 105 Electromagnetic drive 110 Pressure gauge 112 Force sensor 113 Position sensor 114 Flow meter 115 Position sensor 118 Strain sensor

Claims (26)

[Claims] 1. A method for manufacturing a scroll type pump comprising: a movable scroll having spiral scroll blades; and a fixed scroll having spiral scroll blades combined with the scroll blades. A fixed scroll body having a molded body and a scroll blade that can be combined with the movable scroll molded body, or a fixed scroll molded body that has been molded and a movable scroll body that has a scroll blade that can be combined with the fixed scroll molded body. In the state, the abrasive is interposed in a movable state between the combined scroll blades to perform a relative movement, and the finishing state between the two scroll blades is detected to control the processing conditions, and the joint rubbing is performed. A method for manufacturing a scroll pump. 2. The scroll pump according to claim 1, wherein a pressure of compressed air discharged from an exhaust port of the fixed scroll body or the fixed scroll formed body is detected to detect a finished state. Production method. 3. The scroll type pump according to claim 1, wherein a flow rate of compressed air discharged from an exhaust port of the fixed scroll body or the fixed scroll molded body is detected to detect a finished state. Production method. 4. The scroll type pump according to claim 1, wherein a flatness of a processing surface of the fixed scroll molded body or the movable scroll molded body is detected by a position sensor to detect a finished state. Production method. 5. The scroll according to claim 1, wherein a finished state is detected by detecting a distribution of a force pressed by a processing surface of the fixed scroll formed body or the movable scroll formed body by a force sensor. Manufacturing method of mold pump. 6. A finished state is detected by detecting a degree of deformation generated when the fixed scroll molded body is pressed by a scroll blade or a processing surface of the movable scroll molded body. A manufacturing method of the scroll pump according to the above. 7. The method of manufacturing a scroll pump according to claim 1, wherein the relative motion alternately performs forward rotation and reverse rotation. 8. The scroll according to claim 1, wherein a cleaning substance is supplied from a suction port of the fixed scroll body and discharged from a discharge port of the fixed scroll body during processing. Manufacturing method of mold pump. 9. The method for manufacturing a scroll pump according to claim 1, wherein a working force is applied in an axial direction of the scroll blade. 10. The method for manufacturing a scroll pump according to claim 1, wherein a working force is applied in a radial direction of the scroll blade. 11. The method according to claim 9, wherein a working force is applied to the fixed scroll molded body or the movable scroll molded body via an elastic body. 12. The method according to claim 9, wherein a working force is applied to the fixed scroll molded body or the movable scroll molded body by means of automatically controllable means such as air pressure or electromagnetic drive. Of manufacturing scroll type pump. 13. The method according to claim 12, further comprising detecting means for detecting the processing force. 14. The method for manufacturing a scroll pump according to claim 13, wherein the finishing state is detected and the processing force is automatically controlled. 15. The method according to claim 14, wherein the automatically controllable means is a pneumatic device, and the detecting means is an air pressure detecting means. 16. The method of manufacturing a scroll pump according to claim 9, wherein the relative movement of the fixed scroll molded body or the movable scroll molded body is performed by magnetic driving means. 17. The method according to claim 16, further comprising a relative speed detecting means for detecting a relative speed with respect to the fixed scroll body or the movable scroll body. 18. The method according to claim 17, wherein the relative movement is controlled by detecting the finished state. 19. The method according to claim 18, wherein a relative speed is detected by position detecting means for detecting a relative position of the fixed scroll molded body or the movable scroll molded body. 20. The abrasive according to claim 1, wherein the abrasive is made of alumina powder or diamond powder.
20. The method for manufacturing a scroll pump according to any one of 19 to 19. 21. The method according to claim 20, wherein a working fluid is used in combination with the abrasive. 22. The method for manufacturing a scroll pump according to claim 21, wherein ultrasonic motion is applied to the abrasive and the working fluid to perform relative motion. 23. The method of manufacturing a scroll type pump according to claim 20, wherein the abrasive and the working liquid are sequentially supplied from a suction port of the fixed scroll body. 24. The polishing agent and the working liquid are supplied between the discharge port of the fixed scroll molding and the suction port of the fixed scroll molding, or the discharge port of the fixed scroll body and the suction port of the fixed scroll body. The method for manufacturing a scroll type pump according to claim 21, wherein the scroll type pump is circulated between the pump. 25. The polishing apparatus according to claim 20, wherein said finishing state is detected to change the particle size of said abrasive.
25. The method of manufacturing a scroll pump according to any one of 24. 26. The polishing apparatus according to claim 20, wherein said finishing state is detected to change the hardness of said abrasive.
25. The method of manufacturing a scroll pump according to any one of 24.