JP2002340654A - Method and device for detecting liquid level by sound - Google Patents
Method and device for detecting liquid level by soundInfo
- Publication number
- JP2002340654A JP2002340654A JP2001149644A JP2001149644A JP2002340654A JP 2002340654 A JP2002340654 A JP 2002340654A JP 2001149644 A JP2001149644 A JP 2001149644A JP 2001149644 A JP2001149644 A JP 2001149644A JP 2002340654 A JP2002340654 A JP 2002340654A
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- Japan
- Prior art keywords
- container
- liquid level
- wall
- detecting
- sound
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- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Measurement Of Levels Of Liquids Or Fluent Solid Materials (AREA)
Abstract
Description
【0001】[0001]
【発明の属する技術分野】本発明は、容器の外から音響
的手段により容器内の液位を検出する音響による液位検
出方法及び装置の改良に関し、特に、圧力タンク内のエ
チレンの液位等の検出に好適な液位検出方法及び装置に
係る。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improved method and apparatus for detecting a liquid level in a container by detecting the liquid level in the container by acoustic means from outside the container, and more particularly, to an improvement in the liquid level of ethylene in a pressure tank. The present invention relates to a liquid level detection method and apparatus suitable for detecting a liquid level.
【0002】[0002]
【従来の技術】従来から、容器の外壁面から音響的手段
により内部の液位を計測する多くの方法が知られてい
る。まず、(1)特開昭61−3012号公報及び特開
平8−136320号公報では、超音波を入射した壁面
の対向側の内壁面反射波を容器内の液相を通して受信し
液相の有無を検出するとともに、この対向側内壁面から
の反射波のみを受信する工夫により、液位を確実に判定
しようとしている。また、(2)特開平5−13379
2号公報には、容器の外壁面から容器内液中の斜め上方
に向かって超音波を発射し、液面と容器内壁が接するコ
ーナ部から反射して戻ってきた超音波を検出し、その伝
播時間から液面を検出することが開示されている。更
に、(3)特開平11−218436号公報及び特開2
000−121410号公報には、超音波センサを設置
した側の内壁面からの反射波を受信し、容器内液相の有
無による壁内の多重反射波の減衰特性の違いから液位を
判定することが開示されている。2. Description of the Related Art Conventionally, there have been known many methods for measuring the liquid level inside a container from the outer wall surface by acoustic means. First, in (1) JP-A-61-3012 and JP-A-8-136320, a reflected wave of an inner wall surface on a side opposite to a wall surface on which an ultrasonic wave is incident is received through a liquid phase in a container and the presence or absence of a liquid phase is determined. In addition, the liquid level is determined with certainty by detecting only the reflected wave from the inner wall surface on the opposite side. Also, (2) JP-A-5-13379
No. 2, the ultrasonic wave is emitted from the outer wall surface of the container obliquely upward in the liquid in the container, and the ultrasonic wave reflected and returned from the corner where the liquid surface and the inner wall of the container come into contact is detected. It is disclosed that the liquid level is detected from the propagation time. Further, (3) JP-A-11-218436 and JP-A-2218436
Japanese Patent Application Laid-Open No. 000-12410 discloses a technique in which a reflected wave from an inner wall surface on a side where an ultrasonic sensor is installed is received, and a liquid level is determined from a difference in attenuation characteristics of multiple reflected waves in the wall depending on the presence or absence of a liquid phase in a container. It is disclosed.
【0003】[0003]
【発明が解決しようとする課題】上記従来技術(1)や
(2)では、超音波が容器内液相中を伝播して対向側の
内壁面またはコーナ部で反射して戻ってくることを利用
するものであるため、液相中に気相や固相があると、気
相または固相によって超音波が散乱・減衰し、対向側の
内壁面やコーナ部からの反射波が得られず、確実で安定
した液位判定はできない。In the above-mentioned prior arts (1) and (2), it is considered that the ultrasonic wave propagates in the liquid phase in the container and is reflected by the inner wall surface or the corner portion on the opposite side and returns. Because it is used, if there is a gas phase or solid phase in the liquid phase, ultrasonic waves are scattered and attenuated by the gas phase or solid phase, and reflected waves from the inner wall surface and corners on the opposite side cannot be obtained. However, reliable and stable liquid level determination cannot be performed.
【0004】また、従来技術(3)では、超音波センサ
を設置した側の内壁面からの(多重)反射波が液相の存
在で大きく減衰することを利用している。しかし、容器
の材質がプラスチック系で液体の音響インピーダンスと
の差が小さい場合には、容器内の液相により反射波は例
えば30%程度に減衰し顕著であるが、容器が鋼材のタ
ンクの場合には、液相の存在によっても94%までしか
減衰せず、判定が必ずしも確実ではない欠点がある。The prior art (3) utilizes the fact that the (multiple) reflected waves from the inner wall surface on the side where the ultrasonic sensor is installed are greatly attenuated by the presence of the liquid phase. However, when the material of the container is a plastic material and the difference from the acoustic impedance of the liquid is small, the reflected wave is attenuated to, for example, about 30% due to the liquid phase in the container. Has a drawback that it is attenuated only to 94% even by the presence of the liquid phase, and the determination is not always reliable.
【0005】本発明の目的は、容器内液相中に気相や固
相がある場合にも、確実で安定した判定が行える音響に
よる液位検出方法及び装置を提供することである。It is an object of the present invention to provide a method and an apparatus for detecting a liquid level by sound which can perform a reliable and stable judgment even when a gas phase or a solid phase exists in a liquid phase in a container.
【0006】[0006]
【課題を解決するための手段】本発明の第1の特徴とす
るところは、容器壁に配置した音波送受信器から容器内
に向けて音波を送信し、送受信器を配置した容器壁の内
壁からの反射波の受信とその対向する容器内壁からの反
射波の受信との間の時間内における音波の受信の有無か
ら液位を判定することである。According to a first feature of the present invention, a sound wave is transmitted from a sound wave transmitter / receiver disposed on a container wall toward the inside of a container, and a sound wave is transmitted from an inner wall of the container wall where the transmitter / receiver is disposed. The liquid level is determined based on the presence or absence of the sound wave within the time between the reception of the reflected wave from the container and the reception of the reflected wave from the opposing inner wall of the container.
【0007】また、本発明の他の特徴とするところは、
多数の音波送受信器を容器壁に沿って上下方向に列設
し、これらの音波送受信器から容器内に向けて音波を送
信し、送受信器を配置した側の容器内壁からの反射波の
受信とその対向する容器内壁からの反射波の受信との間
の時間内における音波の受信の有無を判定し、複数の送
受信器の音波の受信の有無の判定結果から液位を判定す
ることである。Another feature of the present invention is that
A number of sound wave transceivers are vertically arranged along the container wall, sound waves are transmitted from these sound wave transceivers toward the inside of the container, and the reflected wave from the container inner wall on the side where the transceiver is arranged and received. It is to determine the presence or absence of the sound wave within the time between the reception of the reflected wave from the opposed inner wall of the container, and the liquid level from the determination result of the presence or absence of the sound wave of the plurality of transceivers.
【0008】また、本発明の他の特徴とするところは、
音波送受信器を容器壁に沿って上下方向に移動させ、こ
の音波送受信器から容器内に向けて音波を送信し、送受
信器を配置した容器壁の内壁からの反射波の受信とその
対向する容器内壁からの反射波の受信との間の時間内に
おける音波の受信の有無を判定し、送受波器の上下方向
移動の前後における前記音波の受信の有無の判定結果か
ら液位を判定することである。Another feature of the present invention is that
The sound wave transceiver is moved up and down along the container wall, the sound wave is transmitted from the sound wave transceiver toward the inside of the container, the reflected wave is received from the inner wall of the container wall in which the transceiver is arranged, and the container facing the container. By determining the presence or absence of a sound wave within the time between the reception of the reflected wave from the inner wall, by determining the liquid level from the determination result of the presence or absence of the sound wave before and after the vertical movement of the transducer. is there.
【0009】更に、本発明の他の特徴とするところは、
容器内液面と容器内壁面が接するコーナ部の反射波を、
このコーナー部が接する容器壁側から受信して液位判定
を行うことである。Further, another feature of the present invention is that
The reflected wave at the corner where the liquid surface in the container and the inner wall surface of the container are in contact,
That is, the liquid level is determined by receiving from the container wall side in contact with the corner.
【0010】更にまた、本発明の他の特徴とするところ
は、容器内液相中の気相の発生音及び/又は破裂音を検
出して液位判定を行うことである。Still another feature of the present invention is that a liquid level is determined by detecting a generated sound and / or a bursting sound of a gas phase in a liquid phase in a container.
【0011】これらにより、気相や固相を含む液相であ
っても、その容器外部から音響的に液位を確実に判定す
る。Thus, even in the case of a gas phase or a liquid phase including a solid phase, the liquid level is reliably determined acoustically from outside the container.
【0012】[0012]
【発明の実施の形態】以下、図面を参照して本発明の実
施形態を説明する。Embodiments of the present invention will be described below with reference to the drawings.
【0013】図1は、本発明の一実施例における液位検
出方法の原理説明図である。図において、圧力タンク等
の容器1内にはエチレン等の液体(液相)2が存在し、
その液位は液面21である。超音波送受信器(以下、単
にセンサと呼ぶ)3は、図のセンサ31や32で示すよ
うに容器外壁に複数個設置され、あるいは1個のセンサ
が容器外壁に沿って上下方向に移動可能に配置される。
センサ3から容器内に向かって、ほぼ水平方向に超音波
を送信すれば、センサ3は液相2中の気相4や固相5に
よる散乱反射波Nを受信する。通常エチレンは沸騰して
おり、多くの気相4が存在する。FIG. 1 is a diagram illustrating the principle of a liquid level detection method according to an embodiment of the present invention. In the figure, a liquid (liquid phase) 2 such as ethylene exists in a container 1 such as a pressure tank,
The liquid level is the liquid level 21. A plurality of ultrasonic transceivers (hereinafter, simply referred to as sensors) 3 are installed on the outer wall of the container as shown by sensors 31 and 32 in the figure, or one sensor can move up and down along the outer wall of the container. Be placed.
When ultrasonic waves are transmitted in a substantially horizontal direction from the sensor 3 toward the inside of the container, the sensor 3 receives the scattered and reflected waves N due to the gas phase 4 and the solid phase 5 in the liquid phase 2. Normally, ethylene is boiling and there are many gaseous phases 4.
【0014】図2は、本発明の第1の実施例における液
位検出方法による受信波形説明図である。超音波センサ
3が容器1内液面21よりも下方に位置する、すなわち
センサ31の位置にあるときの受信波形は、図2(a)
液相有りに示すようになり、送信パルスTの後に、最初
の内壁面反射波B1以降に、液相2中の気相4や固相5
からの散乱反射波N(N1〜N4)が受信される。超音
波センサ3を上方に移動して、容器1内液相2の上面2
1より上の超音波センサ32の位置に移動させると、そ
の受信波形は図2(b)液相無しに示すようになり、内
壁面反射波B1及びその多重反射波B2、B3…のみが
受信される。従って、超音波センサ3を複数設けるか、
あるいは1個のセンサを移動させながら、内壁面反射波
B1及びその多重反射波B2、B3…の間に受信する気
相4や固相5からの散乱反射波N(N1,N2,N3
…)の有無を監視することによって、液相2内に気相4
や固相5を含む場合にも、容器1内の液位を検出でき
る。また、液相2内に気相4や固相5を含まない場合に
は、対向側の内壁面の反射波Aを検出することで液位を
検出できることは言うまでもない。FIG. 2 is an explanatory diagram of a reception waveform by the liquid level detection method in the first embodiment of the present invention. The reception waveform when the ultrasonic sensor 3 is located below the liquid level 21 in the container 1, that is, at the position of the sensor 31, is shown in FIG.
After the transmission pulse T, the gas phase 4 and the solid phase 5 in the liquid phase 2 appear after the first inner wall reflected wave B1.
Scattered and reflected waves N (N1 to N4) are received. The ultrasonic sensor 3 is moved upward, and the upper surface 2 of the liquid phase 2 in the container 1 is moved.
When the ultrasonic sensor 32 is moved to a position higher than 1, the received waveform becomes as shown in FIG. 2B without a liquid phase, and only the inner wall reflected wave B1 and its multiple reflected waves B2, B3. Is done. Therefore, whether a plurality of ultrasonic sensors 3 are provided,
Alternatively, while moving one sensor, the scattered reflected waves N (N1, N2, N3) from the gas phase 4 or the solid phase 5 received between the inner wall reflected wave B1 and the multiple reflected waves B2, B3.
…)) To monitor the presence or absence of
The liquid level in the container 1 can be detected even when the liquid contains the solid phase 5 or the solid phase 5. When the liquid phase 2 does not include the gas phase 4 or the solid phase 5, it is needless to say that the liquid level can be detected by detecting the reflected wave A on the inner wall surface on the opposite side.
【0015】図3は、容器壁が薄い場合の本発明の第1
の実施例における液位検出方法による液相が存在する場
合の受信波形説明図である。同図(a)、(b)に示す
ように、内壁面反射波B1及びその多重反射波B2、B
3…の受信時刻以降から、本来対向側の内壁面反射波A
が受信される時刻までの間に受信する液相2中の気相4
や固相5による散乱反射波N(N1,N2…)を監視す
れば、センサの高さ位置における液相2及び気相4や固
相5の有無を検出できるので、同様にして容器1内の液
位を判定できる。FIG. 3 shows a first embodiment of the present invention when the container wall is thin.
FIG. 7 is an explanatory diagram of a reception waveform when a liquid phase exists according to the liquid level detection method in the embodiment of FIG. As shown in FIGS. 3A and 3B, the inner wall reflected wave B1 and its multiple reflected waves B2, B
From the reception time 3 onward, the reflected wave A on the inner wall surface on the opposite side
Gas phase 4 in the liquid phase 2 received before the time when
Monitoring the scattered and reflected waves N (N1, N2...) Due to the liquid phase 2 and the gas phase 4 or the solid phase 5 at the height of the sensor. Can be determined.
【0016】図4は、本発明の第一実施例による液位検
出装置の全体構成ブロック図である。超音波センサ3と
して、多数(N個)のセンサ31,32,…3Nが容器
1の壁面に沿って上下方向に列設されている。切替え回
路6は、信号処理及び液位判定部9からの切替え信号に
よって、これらの超音波センサ3群を電気的に切替え、
順次タンク1内液相2中の気相4や固相5からの反射波
Nを受信する。反射波の受信状況は、超音波送受信部
7、受信信号観測部8を介して観測され、信号処理及び
液位判定部9にて液位を判定する。FIG. 4 is a block diagram showing the overall configuration of the liquid level detecting device according to the first embodiment of the present invention. As the ultrasonic sensor 3, a large number (N) of sensors 31, 32,... 3N are vertically arranged along the wall surface of the container 1. The switching circuit 6 electrically switches these ultrasonic sensors 3 according to a switching signal from the signal processing and liquid level determination unit 9,
The reflected waves N from the gas phase 4 and the solid phase 5 in the liquid phase 2 in the tank 1 are sequentially received. The reception status of the reflected wave is observed via the ultrasonic transmission / reception unit 7 and the reception signal observation unit 8, and the signal processing and the liquid level determination unit 9 determines the liquid level.
【0017】図5は、図4の本発明の第一実施例による
液位検出方法の処理フロー図である。まず、ステップ5
01で感度調整の後、センサ31をONにする初期条件
設定を行う。ステップ502では、気相4や固相5から
の反射波N波または対向内壁面反射波A波の有無を判断
し、無ければステップ503にて次のセンサをONして
再びステップ502の判断を行う。これをN波またはA
波を検出するまで繰り返し、ステップ504へ進む。ス
テップ504では、受信したセンサのナンバーすなわち
上下方向の位置を確認する。予め設定された複数のセン
サの取付位置から、どのセンサが受信したかが分かれば
液位を検出できる。これによってステップ505にて液
位を判定し、その結果を表示する。FIG. 5 is a processing flow chart of the liquid level detecting method according to the first embodiment of the present invention shown in FIG. First, step 5
After the sensitivity adjustment at 01, initial conditions for turning on the sensor 31 are set. In step 502, it is determined whether there is a reflected wave N wave from the vapor phase 4 or the solid phase 5 or an opposed inner wall reflected wave A wave. If not, the next sensor is turned on in step 503 and the determination in step 502 is performed again. Do. This is N wave or A
Repeat until a wave is detected, and proceed to step 504. In step 504, the number of the received sensor, that is, the position in the vertical direction is confirmed. The liquid level can be detected by knowing which sensor has received from the preset mounting positions of the plurality of sensors. Thus, the liquid level is determined in step 505, and the result is displayed.
【0018】本実施例によれば、順次センサを切替える
ことによって、気相4や固相5からの反射波Nあるいは
対向内壁面反射波Aが無くなりあるいは現れるセンサ位
置から、液位を知ることができ、気相4や固相5が多
く、対向内壁面反射波Aが得られにくい液体2であって
も、確実に液位を判定できる。According to this embodiment, by sequentially switching the sensors, the liquid level can be known from the sensor position where the reflected wave N from the gas phase 4 or the solid phase 5 or the reflected wave A on the opposed inner wall surface disappears or appears. Even if the liquid 2 has many gas phases 4 and solid phases 5 and it is difficult to obtain the reflected wave A on the opposed inner wall surface, the liquid level can be reliably determined.
【0019】図6は、本発明の第二実施例による液位検
出装置の全体構成ブロック図である。図4と同一符号は
ほぼ同様の機能を持つものであり重複説明は省略する。
この実施例においては、センサ3は1個とし、駆動及び
位置測定部10で上下方向に駆動するとともにその現在
位置を測定する。符号31及び32は、移動した1個の
センサの2つの位置を表すものである。FIG. 6 is a block diagram showing the overall arrangement of a liquid level detecting device according to a second embodiment of the present invention. The same reference numerals as those in FIG. 4 have substantially the same functions, and duplicate description will be omitted.
In this embodiment, the number of the sensors 3 is one, and the driving and position measuring unit 10 drives the sensor 3 in the vertical direction and measures the current position. Reference numerals 31 and 32 represent two positions of one moved sensor.
【0020】図7に、図6の本発明の第二実施例におけ
る液位判定のフローチャート図を示す。最初、ステップ
701において、超音波センサ3を容器外壁面に音響的
に接触し、容器内壁面反射波B等を受信して感度など装
置の初期設定を行う。次に、ステップ702で、受信波
形から容器1内液相2中の気相4や固相5による散乱反
射波Nまたは対向内壁面反射波Aの有無を判断する。反
射波NまたはAを確認した場合は、ステップ703に進
み、超音波センサ3を上方に移動させ、ステップ704
にて反射波NやAの消失を確認するまでセンサ3の移動
を繰返す。反射波NやAの消失を確認すれば、ステップ
705でその時点の超音波センサ位置を駆動及び位置測
定部10で測定する。前記ステップ702で、最初から
反射波NもAもが無かった場合には、ステップ706に
進んで、逆にセンサ3を下方へ移動させる。同様にステ
ップ707で反射波NまたはAの出現を確認するまでセ
ンサ3を移動させ、ステップ705でそのセンサ位置を
測定する。この結果によりステップ708にて液位を判
定する。FIG. 7 is a flowchart of the liquid level determination in the second embodiment of the present invention shown in FIG. First, in step 701, the ultrasonic sensor 3 is brought into acoustic contact with the outer wall surface of the container, receives the reflected wave B on the inner wall surface of the container, and performs initial setting of the apparatus such as sensitivity. Next, in step 702, the presence or absence of the scattered reflected wave N or the opposed inner wall surface reflected wave A due to the gas phase 4 or the solid phase 5 in the liquid phase 2 in the container 1 is determined from the received waveform. When the reflected wave N or A is confirmed, the process proceeds to step 703, where the ultrasonic sensor 3 is moved upward, and the process proceeds to step 704.
The movement of the sensor 3 is repeated until the disappearance of the reflected waves N and A is confirmed. If the disappearance of the reflected waves N and A is confirmed, the position of the ultrasonic sensor at that time is measured by the drive and position measurement unit 10 in step 705. If there is no reflected wave N or A from the beginning in step 702, the flow advances to step 706 to move the sensor 3 downward. Similarly, the sensor 3 is moved until the appearance of the reflected wave N or A is confirmed in step 707, and the sensor position is measured in step 705. At step 708, the liquid level is determined based on the result.
【0021】なお、超音波センサ3の移動や位置読み取
りは手動、自動いずれでもよい。The movement and position reading of the ultrasonic sensor 3 may be manual or automatic.
【0022】以上の図4〜7にて説明した本発明の第
一、第二実施例においては、特に、エチレン等の気泡4
の多い液相2の液位測定の場合には、散乱反射波Nのみ
を受信し、対向内壁面反射波Aはタイミング的に受信し
ないように構成しても、液位判定は十分に可能である。
この場合、あらかじめ超音波センサの位置と受信信号情
報から真の液位の位置を把握した状態で、データを収集
し、その結果により受信パターン情報と判定結果のモデ
ルを作っておき、実際の測定に当っては、このようなモ
デルデータと比較することで液位を判定するようにすれ
ば、液位をさらに精度良く判定できる。In the first and second embodiments of the present invention described with reference to FIGS.
In the case of measuring the liquid level of the liquid phase 2 having a large number of liquids, the liquid level determination is sufficiently possible even if only the scattered reflected wave N is received and the opposed inner wall reflected wave A is not received in a timely manner. is there.
In this case, the data is collected with the position of the true liquid level grasped in advance from the position of the ultrasonic sensor and the received signal information, and a model of the reception pattern information and the judgment result is created based on the result, and the actual measurement is performed. In this case, if the liquid level is determined by comparing with such model data, the liquid level can be determined with higher accuracy.
【0023】図8は、本発明の第三実施例による液位検
出装置の全体構成ブロック図である。斜角の超音波セン
サ3を容器外壁面に当て、超音波を容器1内の液面21
の下方側(液相側)から液面21方向に向かって送信し
ている。超音波は液面21が容器内壁11と接する境界
部(液面コーナ)12すなわち表面張力の接触角で成す
液面で反射し、その反射波Rは超音波センサ3(31ま
たは32)で受信できる。FIG. 8 is a block diagram showing the overall arrangement of a liquid level detecting device according to a third embodiment of the present invention. The oblique ultrasonic sensor 3 is applied to the outer wall surface of the container, and the ultrasonic wave is applied to the liquid surface 21 in the container 1.
Is transmitted from the lower side (liquid phase side) toward the liquid surface 21. The ultrasonic wave is reflected at a boundary (liquid level corner) 12 where the liquid surface 21 contacts the inner wall 11 of the container, that is, at the liquid surface formed by the contact angle of the surface tension, and the reflected wave R is received by the ultrasonic sensor 3 (31 or 32). it can.
【0024】図9は、図8の実施例における受信波形説
明図である。液面21の位置は、超音波センサ3を上下
方向に移動して前記反射波Rの最大受信強度位置におい
て、超音波送信時刻T1から反射波Rを受信する時刻T
2までの時間Thと、容器壁内への超音波入射角度θ、
容器壁の厚さL及び容器壁材中の超音波音速等から算出
できる。たとえば図8に示すように、容器壁中にθ度で
超音波を入射すると、超音波入射点位置から液面21ま
での距離ΔYは、式(1)で算出できる。FIG. 9 is an explanatory diagram of the reception waveform in the embodiment of FIG. The position of the liquid surface 21 is determined by moving the ultrasonic sensor 3 in the vertical direction and at the maximum reception intensity position of the reflected wave R, the time T from when the ultrasonic wave is transmitted to when the reflected wave R is received
2, the incident angle θ of the ultrasonic wave into the container wall,
It can be calculated from the thickness L of the container wall and the ultrasonic sound velocity in the container wall material. For example, as shown in FIG. 8, when an ultrasonic wave enters the container wall at θ degrees, the distance ΔY from the ultrasonic wave incident point position to the liquid surface 21 can be calculated by Expression (1).
【0025】 ΔY=(tan-1θ)×L …(1) したがって、液位Pは、センサ位置をP31とすれば、
(2)式で求められる。ΔY = (tan −1 θ) × L (1) Therefore, if the sensor position is P31, the liquid level P is
It is obtained by equation (2).
【0026】 液位P=P31+ΔY …(2) この場合、容器内壁面11から液面コーナ12までの距
離は無視しているが、必要に応じてこの距離を加味して
計算したり校正することもできる。また、超音波を送信
した時刻T1から反射波Rを受信するまでの時間Th
は、超音波センサ3内の距離とその音速、容器壁中の距
離とその音速及び容器内壁面から液面コーナ12までの
距離とその音速によって計算できる。Liquid level P = P31 + ΔY (2) In this case, the distance from the inner wall surface 11 of the container to the liquid level corner 12 is neglected, but it is necessary to calculate or calibrate by adding this distance as necessary. Can also. Further, a time Th from the time T1 when the ultrasonic wave is transmitted to the time when the reflected wave R is received.
Can be calculated from the distance in the ultrasonic sensor 3 and its sound speed, the distance in the container wall and its sound speed, and the distance from the container inner wall surface to the liquid level corner 12 and its sound speed.
【0027】図10は、図8,9の実施例における処理
フローチャートである。ステップ101で初期設定後、
ステップ102でセンサ3を液面21より下方から上方
に移動させ、ステップ103にてコーナ反射波Rの受信
を確認できるまで繰返す。反射波Rを検出すると、ステ
ップ104にて音響センサ3を上下に移動して、ステッ
プ105で反射波Rの振幅がピークを示す位置又は消滅
する位置を特定する。内壁11への超音波の到達点が液
面コーナ12を過ぎると、コーナ反射波Rは受信できな
くなる。したがって、コーナ反射波Rがピークとなる位
置又は消滅する位置を液位Pと判定する。ステップ10
7でセンサ位置P31と距離ΔYから前述のようにして
液位Pを判定する。FIG. 10 is a processing flowchart in the embodiment of FIGS. After the initial setting in step 101,
In step 102, the sensor 3 is moved upward from below the liquid level 21, and the process is repeated until the reception of the corner reflected wave R is confirmed in step 103. When the reflected wave R is detected, the acoustic sensor 3 is moved up and down in step 104, and the position where the amplitude of the reflected wave R shows a peak or disappears is specified in step 105. When the ultrasonic wave reaches the inner wall 11 past the liquid level corner 12, the corner reflected wave R cannot be received. Therefore, the position where the corner reflected wave R becomes a peak or disappears is determined as the liquid level P. Step 10
At 7, the liquid level P is determined from the sensor position P31 and the distance ΔY as described above.
【0028】図11は、本発明による第四実施例の液位
検出装置の全体構成ブロック図である。図8と同一符号
は殆ど同一機能を持つものであり重複説明は避ける。本
実施例では、容器壁中に横波で伝播し、内壁面で一種の
縦波にモード変換され、壁面に沿って伝播する波(クリ
ーピング波と呼ばれる)の反射を利用する。本構成では
音響センサの種類が異なり、今まで垂直に伝播する超音
波を利用していたが、ここでは超音波を特定の角度で斜
めに入射する。鋼中への縦波の入射角度θを70〜90
度で入射すると、30〜33度の横波が発生する。タン
ク(容器)1の内壁11に到達した横波は内壁11面に
沿って伝播するクリーピング波となる。クリーピング波
は液中に漏れ込みながら伝播し、液面21のコーナ12
の表面張力による曲線部で反射して散乱し、同じ経路を
戻る波を同じセンサ31で受信する。あるいは、散乱し
た反射波を別のセンサ32で受信しても良い。また、超
音波アレイセンサ等を用いて前記コーナ12からの反射
波を最適条件で常に効率良く受信しても良い。さらに、
液位が上下に揺動する場合や容器内壁面11と液面21
の接触角が鈍角になる場合には、超音波を容器1内液相
2の液面21の上方側(気相側)から送受信して液位を
検出することもできる。FIG. 11 is a block diagram showing the overall arrangement of a liquid level detecting device according to a fourth embodiment of the present invention. 8 have almost the same functions as those in FIG. In this embodiment, the reflection of a wave (called a creeping wave) that propagates as a transverse wave in the container wall, is mode-converted into a kind of longitudinal wave on the inner wall surface, and propagates along the wall surface is used. In this configuration, the type of the acoustic sensor is different, and a vertically propagating ultrasonic wave has been used until now. Here, the ultrasonic wave is obliquely incident at a specific angle. The incident angle θ of the longitudinal wave into the steel is 70 to 90
When incident in degrees, a transverse wave of 30 to 33 degrees is generated. The transverse wave that reaches the inner wall 11 of the tank (container) 1 becomes a creeping wave that propagates along the inner wall 11 surface. The creeping wave propagates while leaking into the liquid, and
The wave reflected and scattered by the curved portion due to the surface tension of the above and returned on the same path is received by the same sensor 31. Alternatively, the scattered reflected wave may be received by another sensor 32. Further, the reflected waves from the corners 12 may always be efficiently received under optimum conditions using an ultrasonic array sensor or the like. further,
When the liquid level swings up and down or when the inner wall surface 11 and the liquid surface 21
When the contact angle becomes an obtuse angle, an ultrasonic wave can be transmitted and received from above the liquid surface 21 of the liquid phase 2 in the container 1 (gas phase side) to detect the liquid level.
【0029】図12は、図11の実施例における液位検
出方法の処理フローチャートである。このフローチャー
トはセンサ31で受信する場合である。ステップ121
で初期設定後、ステップ122でセンサ3を液面21よ
り下方から上方に移動させ、ステップ123にてコーナ
反射波Rの受信を確認できるまで繰返す。反射波Rを検
出すると、ステップ124にて音響センサ3を上下に移
動して、ステップ125で反射波Rが消滅する位置を特
定する。受信したコーナ反射波はセンサが液面コーナ部
に近づくに連れて時間的に速く受信され、内壁面への超
音波の到達点がコーナ部を過ぎるとコーナ反射波は受信
できなくなる。従ってコーナ反射波が消滅する位置を持
って液位と判定する。ステップ126で、コーナ反射波
Rが消滅するセンサ位置を測定し、ステップ127でセ
ンサ位置P31と距離ΔYから前述のようにして液位P
を判定する。FIG. 12 is a flowchart of the liquid level detecting method in the embodiment of FIG. This flowchart is for the case of receiving by the sensor 31. Step 121
After the initial setting, the sensor 3 is moved upward from below the liquid level 21 in step 122, and the process is repeated until the reception of the corner reflected wave R can be confirmed in step 123. When the reflected wave R is detected, the acoustic sensor 3 is moved up and down in step 124, and the position where the reflected wave R disappears is specified in step 125. The received corner reflected wave is received in a timely manner as the sensor approaches the liquid level corner portion, and when the ultrasonic wave reaches the inner wall surface passes the corner portion, the corner reflected wave cannot be received. Therefore, it is determined that the liquid level has a position where the corner reflected wave disappears. In step 126, the sensor position at which the corner reflected wave R disappears is measured, and in step 127, the liquid level P is determined from the sensor position P31 and the distance ΔY as described above.
Is determined.
【0030】図13は、本発明による液位検出装置の第
五実施例の全体構成ブロック図である。本構成の音響セ
ンサ30は、数十ヘルツ〜数百キロヘルツ内の音波受信
器で、容器1の内部で発生する気相4の破裂音や発生音
を受信するのみで、自身では音波を発生しない。この実
施例においても類似物の重複説明は避ける。これまでの
実施例と構成は似ているが、異なるのは受信のみのセン
サ30(301,302、…30N)のほか、超音波送
受信部7に代えて単なる音波受信部70で良く、またセ
ンサ30の各位置における受信信号の基準パターンを蓄
積したデータ13を用意している。FIG. 13 is a block diagram showing the overall configuration of a fifth embodiment of the liquid level detecting device according to the present invention. The acoustic sensor 30 of this configuration is a sound wave receiver within a range of several tens of hertz to several hundreds of kilohertz, and only receives a plosive sound or a generated sound of the gas phase 4 generated inside the container 1 and does not generate a sound wave by itself. . Also in this embodiment, duplicate description of similar substances is avoided. Although the configuration is similar to that of the previous embodiments, the only difference is that in addition to the sensor 30 for receiving only (301, 302,... 30N), a simple sound wave receiving unit 70 may be used in place of the ultrasonic wave transmitting / receiving unit 7. Data 13 storing reference patterns of received signals at each of the 30 positions is prepared.
【0031】図14は、本発明の第五実施例による液位
検出方法の処理フローチャートである。ステップ141
で初期設定を行い、ステップ142で受信信号を取り込
む。ステップ143では、受信信号を前記の基準パター
ン13のどれかに合致するかどうかを照合し、合致しな
ければステップ145で次のセンサに切替える。合致す
ればステップ146にて仮の水位として判定し、ステッ
プ147ですべてのセンサでの終了を確認する。そして
ステップ148にて最終水位の判定を行い、結果を表示
する。このように、センサ301〜30Nを切替えて受
信信号を受信する度に前記の基準パターン13のどれか
に合致するかどうかを照合し、合致すれば仮の水位とし
て判定し、最終的には全部のセンサの受信信号の合致状
況を総合的に判断して水位を決定している。水位決定に
当っては、水位の付近に設置した2個以上のセンサの受
信信号パターンが基準パターンとほぼ合致することを確
認することが望ましい。このとき、受信信号に対して、
破裂音発生位置の位置標定、相関処理、周波数分析等の
処理法を適用しても良い。FIG. 14 is a processing flowchart of a liquid level detecting method according to a fifth embodiment of the present invention. Step 141
The initialization is performed in step 142, and the received signal is captured in step 142. In step 143, it is checked whether the received signal matches any of the reference patterns 13, and if not, the next sensor is switched in step 145. If they match, it is determined as a temporary water level in step 146, and the end of all the sensors is confirmed in step 147. Then, in step 148, the final water level is determined, and the result is displayed. In this way, each time the sensors 301 to 30N are switched and a received signal is received, it is checked whether or not it matches any of the above-described reference patterns 13, and if they match, it is determined as a tentative water level. The water level is determined by comprehensively judging the matching status of the received signals of the sensors. In determining the water level, it is desirable to confirm that the received signal patterns of two or more sensors installed near the water level substantially match the reference pattern. At this time, for the received signal,
Processing methods such as position determination of a plosive sound generation position, correlation processing, and frequency analysis may be applied.
【0032】以上の実施例において、容器が高温あるい
は低温状態にある場合には、高温用及び低温用の音響セ
ンサを使い分けて液位を検出することもできる。In the above-described embodiment, when the container is in a high or low temperature state, the liquid level can be detected by selectively using high and low temperature acoustic sensors.
【0033】以上の実施例によれば、容器内液相中に発
生する気相や固相からの反射波並びに容器内液面と内壁
面との境界部(液面コーナ)からの反射波を検出して液
位を検出することにより、容器内の液相中に気相や固相
が存在し、対向する容器の内壁面からの反射波を得にく
い場合にも、液位を容器外面から安定・確実かつ簡単な
構成で検出することができる。According to the above embodiment, the reflected wave from the gas phase or solid phase generated in the liquid phase in the container and the reflected wave from the boundary (liquid level corner) between the liquid surface and the inner wall surface in the container are formed. By detecting and detecting the liquid level, even if a gas phase or solid phase exists in the liquid phase in the container and it is difficult to obtain reflected waves from the inner wall surface of the opposite container, the liquid level can be detected from the outer surface of the container. It can be detected with a stable, reliable and simple configuration.
【0034】[0034]
【発明の効果】本発明によれば、容器内液相中に気相や
固相が存在しても、容器内液位を容器外面から安定して
確実に検出することができる。According to the present invention, even if a gas phase or a solid phase exists in the liquid phase in the container, the liquid level in the container can be detected stably and reliably from the outer surface of the container.
【図1】本発明の一実施例における液位検出方法の原理
説明図。FIG. 1 is a diagram illustrating the principle of a liquid level detection method according to an embodiment of the present invention.
【図2】本発明の一実施例における液位検出方法による
受信波形説明図。FIG. 2 is an explanatory diagram of a reception waveform according to a liquid level detection method in one embodiment of the present invention.
【図3】容器壁が薄い場合の本発明の一実施例の液位検
出方法による受信波形説明図。FIG. 3 is an explanatory diagram of a reception waveform by a liquid level detection method according to one embodiment of the present invention when a container wall is thin.
【図4】本発明の第一実施例による液位検出装置の全体
構成ブロック図。FIG. 4 is an overall configuration block diagram of a liquid level detection device according to a first embodiment of the present invention.
【図5】本発明の第一実施例による液位検出方法の処理
フロー図。FIG. 5 is a processing flowchart of a liquid level detection method according to the first embodiment of the present invention.
【図6】本発明の第二実施例による液位検出装置の全体
構成ブロック図。FIG. 6 is an overall configuration block diagram of a liquid level detection device according to a second embodiment of the present invention.
【図7】本発明の第二実施例による液位検出方法の処理
フロー図。FIG. 7 is a processing flowchart of a liquid level detection method according to a second embodiment of the present invention.
【図8】本発明の第三実施例による液位検出装置の全体
構成ブロック図。FIG. 8 is an overall configuration block diagram of a liquid level detection device according to a third embodiment of the present invention.
【図9】本発明の第三実施例の液位検出方法における受
信波形説明図。FIG. 9 is an explanatory diagram of a reception waveform in the liquid level detection method according to the third embodiment of the present invention.
【図10】本発明の第三実施例による液位検出方法の処
理フロー図。FIG. 10 is a processing flowchart of a liquid level detection method according to a third embodiment of the present invention.
【図11】本発明の第四実施例による液位検出装置の全
体構成ブロック図。FIG. 11 is an overall configuration block diagram of a liquid level detection device according to a fourth embodiment of the present invention.
【図12】本発明の第四実施例による液位検出方法の処
理フロー図。FIG. 12 is a processing flowchart of a liquid level detection method according to a fourth embodiment of the present invention.
【図13】本発明の第五実施例による液位検出装置の全
体構成ブロック図。FIG. 13 is an overall configuration block diagram of a liquid level detection device according to a fifth embodiment of the present invention.
【図14】本発明の第五実施例による液位検出方法の処
理フロー図。FIG. 14 is a processing flowchart of a liquid level detection method according to a fifth embodiment of the present invention.
1…容器、2…液相、21…液面、3,31,32,3
N…超音波送受信器(超音波センサ)、30,301,
302,30N…音波受信器(受信のみの音波セン
サ)、4…気相、5…固相、6…切替え回路、7…超音
波送受信部、70…音波受信部、8…受信信号観測部、
9…信号処理及び液位判定部、10…駆動及び位置測定
部、11…容器内壁、12…境界部(液面コーナ)、1
3…受信信号の基準パターン蓄積データ、T…送信波、
A…対向する容器内壁からの反射波、B…送受信器を配
置した容器壁の内壁からの反射波、N…気相や固相から
の反射波、R…境界部(液面コーナ)からの反射波。1 ... container, 2 ... liquid phase, 21 ... liquid level, 3, 31, 32, 3
N: Ultrasonic transceiver (ultrasonic sensor), 30, 301,
302, 30N: sound wave receiver (sonic wave sensor for reception only), 4: gas phase, 5: solid phase, 6: switching circuit, 7: ultrasonic transmission / reception section, 70: sound wave reception section, 8: reception signal observation section,
Reference numeral 9: signal processing and liquid level determination unit, 10: drive and position measurement unit, 11: container inner wall, 12: boundary part (liquid level corner), 1
3 ... stored data of reference pattern of received signal, T: transmitted wave,
A: a reflected wave from the inner wall of the container facing, B: a reflected wave from the inner wall of the container wall where the transmitter / receiver is arranged, N: a reflected wave from the gas phase or solid phase, R: from a boundary (liquid level corner) Reflected waves.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 小池 正浩 茨城県日立市大みか町七丁目2番1号 株 式会社日立製作所電力・電機開発研究所内 (72)発明者 松井 哲也 茨城県日立市大みか町七丁目2番1号 株 式会社日立製作所電力・電機開発研究所内 (72)発明者 深井 ▲慎▼司 東京都港区西新橋一丁目24番14号 日製産 業株式会社内 Fターム(参考) 2F014 AA07 AA08 FB01 GA05 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Masahiro Koike 7-2-1, Omika-cho, Hitachi City, Ibaraki Prefecture Inside Power and Electricity Research Laboratory, Hitachi, Ltd. (72) Inventor Tetsuya Matsui Omika-cho, Hitachi City, Ibaraki Prefecture 7-2-1, Hitachi, Ltd. Electric Power and Electrical Development Laboratory (72) Inventor Fukai ▲ Shin ▼ Tsukasa 24-24 Nishishinbashi, Minato-ku, Tokyo F-term in Nissan Industrial Co., Ltd. ) 2F014 AA07 AA08 FB01 GA05
Claims (9)
液位を検出する液位検出方法において、音波送受信器か
ら前記容器内に向けて音波を送信するステップと、この
送信後に容器内液相中の気相もしくは固相からの反射波
を受信するステップを含むことを特徴とする音響による
液位検出方法。In a liquid level detection method for detecting a liquid level in a container from outside of a container by an acoustic sensor, a step of transmitting a sound wave from a sound wave transceiver toward the inside of the container, and after the transmission, a liquid in the container A method for detecting a liquid level by sound, comprising a step of receiving a reflected wave from a gas phase in a phase or a solid phase.
液位を検出する液位検出方法において、音波送受信器か
ら前記容器内に向けて音波を送信するステップと、この
音波送信後に前記送受信器を配置した容器壁の内壁から
の反射波の受信とその対向する容器内壁からの反射波の
受信との間の時間内における音波の受信の有無を判定す
るステップを含むことを特徴とする音響による液位検出
方法。2. A liquid level detecting method for detecting a liquid level in a container from outside of a container by an acoustic sensor, wherein a sound wave is transmitted from a sound wave transceiver toward the inside of the container; Determining whether or not a sound wave has been received within a time period between the reception of the reflected wave from the inner wall of the container wall on which the vessel is disposed and the reception of the reflected wave from the opposite inner wall of the container. Liquid level detection method.
液位を検出する液位検出方法において、容器の外壁に沿
って上下方向に列設された多数の音波送受信器から前記
容器内に向けて音波を送信するステップと、前記送受信
器を配置した容器壁の内壁からの反射波の受信とその対
向する容器内壁からの反射波の受信との間の時間内にお
ける音波の受信の有無を前記各送受信器毎に判定するス
テップと、前記各送受信器毎の前記受信の有無の判定結
果から液位を判定するステップとを含むことを特徴とす
る音響による液位検出方法。3. A liquid level detecting method for detecting a liquid level in a container from outside of a container by using an acoustic sensor, wherein a plurality of sound wave transceivers vertically arranged along an outer wall of the container are used to detect a liquid level in the container. Transmitting a sound wave toward, and the presence or absence of sound wave reception within the time between the reception of the reflected wave from the inner wall of the container wall where the transceiver is arranged and the reception of the reflected wave from the opposite container inner wall. A liquid level detection method using sound, comprising: a step of determining for each of the transceivers; and a step of determining a liquid level from a determination result of the presence or absence of the reception for each of the transceivers.
液位を検出する液位検出方法において、音波送受信器を
容器の外壁に沿って上下方向に移動させるステップと、
この音波送受信器から前記容器内に向けて音波を送信す
るステップと、前記送受信器を配置した容器壁の内壁か
らの反射波の受信とその対向する容器内壁からの反射波
の受信との間の時間内における音波の受信の有無を前記
送受信器の移動位置毎に判定するステップと、前記移動
の前後における前記受信の有無の判定結果から液位を判
定するステップとを含むことを特徴とする音響による液
位検出方法。4. A liquid level detecting method for detecting a liquid level in a container from the outside of a container by an acoustic sensor, wherein a sound wave transceiver is moved up and down along an outer wall of the container.
Transmitting a sound wave from the sound wave transceiver toward the inside of the container, and receiving the reflected wave from the inner wall of the container wall on which the transceiver is arranged and receiving the reflected wave from the opposing container inner wall; Determining whether or not a sound wave has been received within a time period for each movement position of the transceiver; and determining a liquid level from a determination result of the presence or absence of the reception before and after the movement. Liquid level detection method.
液位を検出する液位検出方法において、容器の外壁に配
置した音波送受信器から前記容器壁内へ斜角に音波を送
信するステップと、この音波が容器壁内を伝播し,容器
内液面と容器内壁との境界部で反射した音波を前記送受
信器もしくは別の受信器で受信するステップと、その反
射波の受信タイミングから液位を判定するステップとを
含むことを特徴とする音響による液位検出方法。5. A liquid level detecting method for detecting a liquid level in a container from outside of a container by using an acoustic sensor, wherein a sound wave is transmitted from a sound wave transmitter / receiver disposed on an outer wall of the container into the container wall at an oblique angle. Receiving the sound wave reflected at the boundary between the liquid surface in the container and the inner wall of the container by the transceiver or another receiver, and detecting the sound wave from the reception timing of the reflected wave. Determining a liquid level using a sound.
る液位検出方法において、容器外壁に配置した数十ヘル
ツ〜数百キロヘルツ内の音波受信器による音波の受信に
より、容器内液相中の気相の発生音もしくは気相の破裂
音を受信するステップと、この受信信号の有無もしくは
この受信信号の周波数分析,位置評定,相関処理等の信
号分析処理結果に基づいて容器内の液位を判定するステ
ップを含むことを特徴とする音響による液位検出方法。6. A liquid level detecting method for detecting a liquid level in a container by an acoustic sensor, wherein the liquid phase in the container is received by receiving a sound wave by a sound wave receiver within several tens of hertz to several hundred kilohertz disposed on the outer wall of the container. Receiving the generated sound of the gaseous phase or the plosive sound of the gaseous phase, and detecting the presence or absence of the received signal or the result of the signal analysis processing such as frequency analysis, position estimation, and correlation processing of the received signal. A method for detecting a liquid level by sound, comprising the step of determining a level.
液位を検出する液位検出装置において、容器の外壁に沿
って上下方向に列設され、容器内に向けてそれぞれ超音
波を発射し、容器内からの超音波を受信する多数の超音
波送受信器と、これらの送受信器を配置した容器壁の内
壁からの反射波の受信とその対向する容器内壁からの反
射波の受信との間の時間内における音波の受信の有無を
前記各送受信器毎に観測する受信信号観測部と、前記各
送受信器毎の前記受信信号観測部の観測結果から液位を
判定する液位判定部とを備えたことを特徴とする音響に
よる液位検出装置。7. A liquid level detecting device for detecting a liquid level in a container from outside of a container by using an acoustic sensor, the ultrasonic sensors being arranged vertically along the outer wall of the container and emitting ultrasonic waves toward the inside of the container. Then, a number of ultrasonic transceivers for receiving ultrasonic waves from the inside of the container, the reception of reflected waves from the inner wall of the container wall where these transceivers are arranged, and the reception of reflected waves from the opposing inner wall of the container. A reception signal observation unit for observing the presence or absence of sound waves within the time period for each of the transceivers, and a liquid level determination unit for determining a liquid level from an observation result of the reception signal observation unit for each of the transceivers A liquid level detecting device using sound, comprising:
液位を検出する液位検出装置において、容器の外壁に配
置され,前記容器壁に斜角に超音波を送信しかつほぼ同
方向からの超音波を受信する超音波送受信器と、超音波
を送信後の所定の時間内における前記超音波の受信を観
測する受信信号観測部と、前記受信信号観測部の観測結
果から液位を判定する液位判定部とを備えたことを特徴
とする音響による液位検出装置。8. A liquid level detecting device for detecting a liquid level in a container from outside of the container by using an acoustic sensor, the ultrasonic sensor being disposed on an outer wall of the container, transmitting ultrasonic waves to the container wall at an oblique angle, and in substantially the same direction. An ultrasonic transmitter / receiver that receives ultrasonic waves from, a reception signal observation unit that observes reception of the ultrasonic waves within a predetermined time after transmitting the ultrasonic waves, and a liquid level from an observation result of the reception signal observation unit. A liquid level detection device using sound, comprising: a liquid level determination unit for determining.
液位を検出する液位検出装置において、容器の外壁に沿
って上下方向に列設され、容器内から発生する数十ヘル
ツ〜数百キロヘルツの音波を受信する多数の音波受信器
と、これらの多数の音波受信器の受信状況を前記各受信
器毎に観測する受信信号観測部と、前記受信信号観測部
の観測結果から液位を判定する液位判定部とを備えたこ
とを特徴とする音響による液位検出装置。9. A liquid level detecting device for detecting a liquid level in a container from outside of a container by using an acoustic sensor, wherein the liquid level detecting device is vertically arranged along an outer wall of the container, and has several tens of hertz to several tens of hertz generated from inside the container. A large number of sound wave receivers for receiving sound waves of 100 kilohertz, a reception signal observation unit for observing the reception status of these many sound wave receivers for each of the receivers, and a liquid level based on the observation result of the reception signal observation unit. And a liquid level determining unit for determining the liquid level.
Priority Applications (1)
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JP2001149644A JP2002340654A (en) | 2001-05-18 | 2001-05-18 | Method and device for detecting liquid level by sound |
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JP2001149644A JP2002340654A (en) | 2001-05-18 | 2001-05-18 | Method and device for detecting liquid level by sound |
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JP2007312154A Division JP2008070387A (en) | 2007-12-03 | 2007-12-03 | Liquid level detection method by means of sound and its device |
JP2007312155A Division JP2008070388A (en) | 2007-12-03 | 2007-12-03 | Liquid level detection method by means of sound and its device |
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JP2006016238A (en) * | 2004-06-30 | 2006-01-19 | Toshiba Corp | Hydrogen manufacturing unit |
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