JP2002334639A - Vacuum valve - Google Patents
Vacuum valveInfo
- Publication number
- JP2002334639A JP2002334639A JP2001137359A JP2001137359A JP2002334639A JP 2002334639 A JP2002334639 A JP 2002334639A JP 2001137359 A JP2001137359 A JP 2001137359A JP 2001137359 A JP2001137359 A JP 2001137359A JP 2002334639 A JP2002334639 A JP 2002334639A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- vacuum valve
- windmill
- arc
- conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、風車形電極を真空
容器内に接離可能に配置してなる真空バルブに関し、特
にその電極材料に関するものである。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a vacuum valve in which a windmill-shaped electrode is disposed in a vacuum vessel so as to be able to contact and separate therefrom, and more particularly to a material for the electrode.
【０００２】[0002]
【従来の技術】図６は、内部を高真空状態にした真空容
器中に一対の接点（電極）を気密に封入した真空バルブ
の全体構成を示す図である。図において、絶縁筒２１の
両端に端板２２ａ、２２ｂを取り付けて、内部を高真空
状態にした真空容器２３が構成されており、真空容器２
３内には、一方の端板２２ａを貫通した固定電極棒２４
ａの先端に固着された固定側の電極１ａと、他方の端板
２２ｂを貫通した可動電極棒２４ｂの先端に固着された
可動側の電極１ｂとが対向配置されている。2. Description of the Related Art FIG. 6 is a diagram showing the overall structure of a vacuum valve in which a pair of contacts (electrodes) is hermetically sealed in a vacuum vessel having a high vacuum inside. In the figure, a vacuum vessel 23 having end plates 22a and 22b attached to both ends of an insulating cylinder 21 to make the inside a high vacuum state is formed.
3, fixed electrode rods 24 penetrating through one end plate 22a.
The fixed-side electrode 1a fixed to the tip of the movable electrode 1a and the movable-side electrode 1b fixed to the tip of the movable electrode rod 24b penetrating the other end plate 22b are arranged to face each other.
【０００３】可動電極棒２４ｂと端板２２ｂとの間には
ベローズ２５が設けられている。ベローズ２５は、可動
電極棒２４ｂに接続された操作器（図示せず）を駆動し
て、可動電極棒２４ｂを軸方向に移動させる。そして、
この可動電極棒２４ｂの移動により、固定側の電極１ａ
と可動側の電極１ｂとが電気的に接離する。電極１ａ、
１ｂ間に点弧されたアークから拡散する金属蒸気が真空
容器２３の内壁に付着することを防止するために、シー
ルド２６がシールド支え２７により絶縁筒２１の内壁に
装着されている。A bellows 25 is provided between the movable electrode rod 24b and the end plate 22b. The bellows 25 drives an operating device (not shown) connected to the movable electrode rod 24b to move the movable electrode rod 24b in the axial direction. And
The movement of the movable electrode rod 24b causes the fixed electrode 1a to move.
The movable side electrode 1b electrically contacts and separates. Electrode 1a,
A shield 26 is attached to the inner wall of the insulating cylinder 21 by a shield support 27 in order to prevent metal vapor diffused from the arc ignited during 1b from adhering to the inner wall of the vacuum vessel 23.
【０００４】このような真空バルブにおける電極１ａ、
１ｂは同形状（正確には面対称）であって、何れも電極
自身に溝を設けた風車形をなしている。この溝の形成に
より電極内の電流経路を制限して、ほぼ円周方向に往復
ループ状の電路を構成し、それによって生じる磁界によ
りアークを駆動して電極の円周上を移動させることによ
り、アークの停滞を防止して、電極の局部溶解を避け、
遮断性能の向上を図っている。[0004] The electrodes 1a,
1b has the same shape (more precisely, plane symmetry), and each has a windmill shape in which a groove is provided in the electrode itself. By restricting the current path in the electrode by the formation of this groove, a reciprocating loop-like electric path is formed in a substantially circumferential direction, and the magnetic field generated thereby drives the arc to move on the circumference of the electrode. Prevent arc stagnation, avoid local melting of electrodes,
Improving the breaking performance.
【０００５】[0005]
【発明が解決しようとする課題】上記のように構成され
た風車形電極を有する真空バルブにおいて、さらなる遮
断性能の向上が望まれる。遮断性能の向上に関しては、
数々の研究がなされており、例えば特開平４−３６８７
３４号公報のように電極構造の改良もなされている。し
かしながら、電極材料については遮断性能に密接に関係
した的確な評価指標は提案されていない。In a vacuum valve having a windmill-shaped electrode configured as described above, it is desired to further improve the shutoff performance. Regarding the improvement of blocking performance,
Numerous studies have been made, for example, in JP-A-4-3687.
The electrode structure has been improved as in JP-A-34-34. However, no accurate evaluation index has been proposed for electrode materials that is closely related to the breaking performance.
【０００６】本発明は、電極材料についての的確な評価
指標を提案することにより、遮断性能がより向上した真
空バルブを提供することを目的としている。SUMMARY OF THE INVENTION It is an object of the present invention to provide a vacuum valve with improved shutoff performance by proposing an accurate evaluation index for an electrode material.
【０００７】[0007]
【課題を解決するための手段】本発明に係る第１の真空
バルブは、電極棒と接合される中心部と、前記中心部か
ら延びる複数の溝によって分画されて前記中心部から外
周部に指向する円弧状に湾曲する複数の羽根からなる羽
根部とを有する少なくとも１対の風車形電極を、真空容
器内に接離可能に配置してなる真空バルブにおいて、前
記風車形電極の少なくとも他方の風車形電極と接触する
部分を、熱伝導率が１９５Ｗ／ｍＫ以上、熱拡散率が
０．６ｃｍ２／ｓ以上、または導電率が５０％ＩＡＣＳ
以上であるＣｕＣｒ系材料によって形成したものであ
る。A first vacuum valve according to the present invention is divided from a central portion joined to an electrode rod and a plurality of grooves extending from the central portion from the central portion to an outer peripheral portion. A vacuum valve in which at least one pair of windmill-shaped electrodes having a plurality of blades each of which is directed to be curved in an arc shape is disposed so as to be capable of coming and going in a vacuum vessel; A portion having a thermal conductivity of 195 W / mK or more, a thermal diffusivity of 0.6 cm 2 / s or more, or a conductivity of 50% IACS
It is formed of the above CuCr-based material.
【０００８】本発明に係る第２の真空バルブは、羽根は
その外周部側が中心部側よりも対向電極の方に突出し、
閉極時に対向電極と接触するように構成されているもの
である。In the second vacuum valve according to the present invention, the outer peripheral portion of the blade protrudes toward the counter electrode from the central portion,
It is configured to be in contact with the opposing electrode when closing the electrode.
【０００９】[0009]
【発明の実施の形態】実施の形態１．本発明者らは、電
極（接点）材料の熱伝導率、熱拡散率、および導電率に
注目し、これらの物性値と遮断性能とに密接な関係があ
ることを見出し、本発明に至った。すなわち、風車形電
極の少なくとも他方の風車形電極と接触する部分を、熱
伝導率が１９５Ｗ／ｍＫ以上、熱拡散率が０．６ｃｍ２
／ｓ以上、または導電率が５０％ＩＡＣＳ以上であるＣ
ｕＣｒ系材料によって形成することにより、遮断性能が
より向上した真空バルブが得られる。なお、％ＩＡＣＳ
は、焼き鈍した純銅の導電率を１００とした比で表わさ
れる導電率の単位である。DESCRIPTION OF THE PREFERRED EMBODIMENTS Embodiment 1 The present inventors have paid attention to the thermal conductivity, thermal diffusivity, and conductivity of an electrode (contact) material, and have found that there is a close relationship between these physical property values and the breaking performance, leading to the present invention. . That is, at least a portion of the windmill-shaped electrode that is in contact with the other windmill-shaped electrode has a thermal conductivity of 195 W / mK or more and a thermal diffusivity of 0.6 cm 2.
/ S or C having a conductivity of 50% IACS or more
By forming with a uCr-based material, a vacuum valve with further improved shutoff performance can be obtained. In addition,% IACS
Is a unit of conductivity represented by a ratio of the conductivity of annealed pure copper to 100.
【００１０】図１は本発明の実施の形態１による真空バ
ルブの風車形電極の構造を示す斜視図、図２は同じくそ
の平面図、図３は図２のＡ−Ａ´線における断面図であ
る。図において、６は固定側または可動側の銅製の電極
棒であり、電極棒６には固定側または可動側の風車形電
極（以下単に電極という）１が固着されている。電極１
は、その中央に貫通する円形の接合穴７が設けられた偏
平円筒状をなしており、その接合穴７の中途まで、細く
絞られた電極棒６の先端部６ａが挿入された態様で、電
極１が電極棒６に固着されている。そして、外部から電
極棒６を介して、真空容器（図示せず）内の電極１に電
流が導かれるようになっている。FIG. 1 is a perspective view showing the structure of a windmill-shaped electrode of a vacuum valve according to a first embodiment of the present invention, FIG. 2 is a plan view thereof, and FIG. 3 is a cross-sectional view taken along line AA 'of FIG. is there. In the figure, reference numeral 6 denotes a fixed or movable copper electrode rod, and a fixed or movable windmill-shaped electrode (hereinafter simply referred to as an electrode) 1 is fixed to the electrode rod 6. Electrode 1
Has a flat cylindrical shape provided with a circular joining hole 7 penetrating at the center thereof, and a tip 6a of a finely narrowed electrode rod 6 is inserted halfway into the joining hole 7, The electrode 1 is fixed to the electrode rod 6. Then, a current is guided from the outside to the electrode 1 in a vacuum vessel (not shown) via the electrode rod 6.
【００１１】電極１の中心部から周縁部にわたって表面
から裏面まで到る概略渦巻き形状の４本の溝２が切られ
ている。電極１は、電極棒６と接合される中心部と、中
心部から延びる複数の溝２によって分画されて中心部か
ら外周部に指向する円弧状に湾曲する複数の羽根からな
る羽根部とを有している。また、本実施の形態では、羽
根はその外周部３側が中心部（腕部）４側よりも対向電
極の方に突出し、閉極時に対向電極と接触するように構
成されている。From the center to the periphery of the electrode 1, four generally spiral grooves 2 extending from the front surface to the back surface are cut. The electrode 1 includes a central portion joined to the electrode rod 6 and a wing portion composed of a plurality of wings which are divided by a plurality of grooves 2 extending from the central portion and curved in an arc shape directed from the central portion to the outer peripheral portion. Have. In the present embodiment, the blade is configured such that the outer peripheral portion 3 side protrudes toward the counter electrode from the center portion (arm portion) 4 side, and comes into contact with the counter electrode when the electrode is closed.
【００１２】電極１の裏面には、機械的強度を補うため
のステンレス製の補強板５が設けられている。また、電
極棒６の肩部と補強板５との間には、ステンレス製のス
ペーサ８が介在され、ロウ付けによって、これらの電極
棒６、補強板５及びスペーサ８が一体固着されている。
スペーサ８は、この電極１及び電極棒６の接合部の強度
を確保するために設けられており、電流の流れをその接
合部（接合穴７）の径以内に制限するために、電極棒６
の材料の銅より抵抗が大きいステンレス製としている。A reinforcing plate 5 made of stainless steel is provided on the back surface of the electrode 1 to supplement mechanical strength. A stainless steel spacer 8 is interposed between the shoulder of the electrode rod 6 and the reinforcing plate 5, and the electrode rod 6, the reinforcing plate 5 and the spacer 8 are integrally fixed by brazing.
The spacer 8 is provided in order to ensure the strength of the joint between the electrode 1 and the electrode rod 6. In order to restrict the flow of current to within the diameter of the joint (joining hole 7), the spacer 8 is used.
The material is made of stainless steel, which has higher resistance than copper.
【００１３】なお、このような構成において、電極１の
外径をＤ、羽根の外周部３の内径をＤi 、電極１の高さ
をＨ、羽根の外周部３と中心部４との厚さの差（羽根の
外周部３の突出高さ）をｈ、接合穴７の径をｄとする。In such a configuration, the outer diameter of the electrode 1 is D, the inner diameter of the outer peripheral portion 3 of the blade is Di, the height of the electrode 1 is H, and the thickness of the outer peripheral portion 3 and the center portion 4 of the blade. (The projecting height of the outer peripheral portion 3 of the blade) is h, and the diameter of the joint hole 7 is d.
【００１４】次に、動作について説明する。真空バルブ
の通電時には、固定側の電極１の羽根の外周部３と可動
側の電極１の羽根の外周部３とが接触しており、電流遮
断時には、その両電極１、１の羽根の外周部３、３は開
離して、各羽根の外周部３、３上にアークが発生する。
このアークは、羽根の外周部３上の任意の位置で発生し
うる。図２ではアークが位置９で発生した場合を例とし
て示している。Next, the operation will be described. When the vacuum valve is energized, the outer peripheral portion 3 of the blade of the fixed-side electrode 1 and the outer peripheral portion 3 of the blade of the movable-side electrode 1 are in contact. The parts 3,3 are separated and an arc is generated on the outer peripheral parts 3,3 of each blade.
This arc can occur at any position on the outer periphery 3 of the blade. FIG. 2 shows a case where an arc is generated at the position 9 as an example.
【００１５】電極棒６を流れる電流Ｉ1 は、接合穴７に
固着されたその先端部６ａを介して電極１へ流れ込み、
アーク９が発生している羽根の外周部３に対応した腕部
４を流れて羽根の外周部３のアーク９へ流入する。この
電流の流れを、図２では電流Ｉ2 として示している。こ
の電流Ｉ2 が発生する磁界の半径方向成分によってアー
ク９は円周方向への駆動力を受ける。The current I 1 flowing through the electrode rod 6 flows into the electrode 1 via the tip 6 a fixed to the joint hole 7,
It flows through the arm 4 corresponding to the outer peripheral portion 3 of the blade where the arc 9 is generated, and flows into the arc 9 of the outer peripheral portion 3 of the blade. This current flow is shown as a current I2 in FIG. The arc 9 receives a driving force in the circumferential direction due to the radial component of the magnetic field generated by the current I2.
【００１６】その結果、例えばアーク９はアーク９′の
位置の方向に向かって移動する。アーク９がアーク９'
の位置に達すると、今度はアーク９'に流れ込む電流が
発生する磁界によって駆動力を受け、アーク９′は図２
において時計回り方向の隣の羽根の外周部３へ移動す
る。よって、アークが羽根の外周部３の上で発生した直
後から駆動力が働いてアークが回転を始め、その後、こ
のような動作が連続的に行われて、アーク発生中は、羽
根の外周部３の上をアークが実質的に回転運動すること
になる。As a result, for example, the arc 9 moves toward the position of the arc 9 '. Arc 9 is Arc 9 '
Is reached, the driving force is applied by the magnetic field generated by the current flowing into the arc 9 '.
Moves to the outer periphery 3 of the next blade in the clockwise direction. Therefore, immediately after the arc is generated on the outer peripheral portion 3 of the blade, the driving force acts to start the rotation of the arc. Thereafter, such an operation is continuously performed. 3, the arc will rotate substantially.
【００１７】次に、電極１材料について説明する。電極
１はＣｕＣｒ系材料によって作成した。ＣｕＣｒ系材料
の製造は、焼結法で行った。すなわち、純度９９％以上
のＣｕ粉とＣｒ粉を用意し、これらの粉末を所定の比率
（Ｃｕ：Ｃｒ＝７５重量％：２５重量％）になるように
配合し、混合粉を得た。次に、この混合粉を金型に充填
して所定の圧力で加圧成形し、圧粉体を作製した。その
圧粉体を還元雰囲気中で焼結した。Next, the material of the electrode 1 will be described. The electrode 1 was made of a CuCr-based material. The production of the CuCr-based material was performed by a sintering method. That is, Cu powder and Cr powder having a purity of 99% or more were prepared, and these powders were blended in a predetermined ratio (Cu: Cr = 75% by weight: 25% by weight) to obtain a mixed powder. Next, the mixed powder was filled in a mold and pressed under a predetermined pressure to produce a green compact. The green compact was sintered in a reducing atmosphere.
【００１８】上記の焼結法において、加圧成形の圧力や
焼結条件を種々変化させて熱伝導率、熱拡散率、および
導電率を変化させたＣｕ−Ｃｒ系材料からなる同一形状
の複数の電極１を作製し、それらの各電極１を真空バル
ブに組み込んだ場合について、ＪＥＣ−２３００「交流
遮断器」に準じて定格電圧２４ｋＶ，定格遮断電流２５
ｋＡの合成遮断試験を行い、熱伝導率、熱拡散率、およ
び導電率と遮断性能（遮断限界電流）との関係を調べ
た。なお、遮断限界電流は、比較例３の値を基準とした
相対値で示した。なお、真空バルブは図６のような標準
的な構成のものを用いた。表１はこれらの試験結果をま
とめたものである。In the above-mentioned sintering method, a plurality of Cu-Cr-based materials having different thermal conductivity, thermal diffusivity, and electrical conductivity by variously changing the pressure and sintering conditions of the pressure molding are used. In the case where the electrodes 1 are manufactured and each of the electrodes 1 is incorporated in a vacuum valve, the rated voltage is 24 kV and the rated breaking current is 25 according to JEC-2300 “AC circuit breaker”.
A kA synthetic cutoff test was performed to examine the relationship between the thermal conductivity, the thermal diffusivity, and the conductivity and the cutoff performance (cutoff limit current). Note that the cut-off limit current is shown as a relative value based on the value of Comparative Example 3. The vacuum valve used had a standard configuration as shown in FIG. Table 1 summarizes the results of these tests.
【００１９】[0019]
【表１】 [Table 1]
【００２０】表１より、熱伝導率が１９５Ｗ／ｍＫ以上
である実施例１および２において、熱伝導率が１９５Ｗ
／ｍＫよりも小さい比較例１〜３に比べて、遮断性能が
向上していることが分かる。熱伝導率が大きいと遮断性
能が向上する原因について以下に述べる。我々は、例え
ば、刊行物（Toshinori Kimura, Atsushi Sawada, Keni
chi Koyama, Hiromi Koga, Tomotaka Yano,"Influence
of Vacuum Arc Behavior on Current Interrupting Lim
it of Spiral Contact," 19th ISDEIV, P443-446,Sep
t.,2000）に示したように、スパイラル電極の遮断性能
とアークの駆動特性に関して研究を行なった。接触部で
発弧するアークは発弧直後 数ｍｓは断面積を増加させ
ながら中心の位置はほとんど停滞し（停滞期間）、速度
が急速に増加（加速期間）した後、金属蒸気を吹き出し
ながら１００ｍ／ｓを超える高速で回転（高速期間）す
る。電極形状や電極材料を変えてアークの駆動特性の比
較を行った結果、遮断性能は初期停滞期間の長さと密接
な関係があることが分った。例えば、初期停滞期間の長
さが長くなると、停滞期間に電極表面に注入されるエネ
ルギーが大きくなるため、電極表面に溶融点が発生し、
この溶融状態がその後も継続するため電流零点における
金属蒸気密度に影響し、遮断失敗にいたると考えられ
る。この、電極表面に注入されるエネルギーは電極の内
部への熱伝導と蒸発熱による冷却によって消費されると
考えられる。ここで、電極材料の熱伝導率が高ければ、
電極表面に注入されるエネルギーの内、電極の内部へ拡
散する量が増加すると考えられる。このため、電極表面
からの金属蒸気の発生量（蒸発量）が減少し、遮断性能
が向上すると考えられる。According to Table 1, in Examples 1 and 2 where the thermal conductivity was 195 W / mK or more, the thermal conductivity was 195 W / mK.
It can be seen that the breaking performance is improved as compared with Comparative Examples 1 to 3 smaller than / mK. The reason why the breaking performance is improved when the thermal conductivity is large will be described below. We have published, for example, publications (Toshinori Kimura, Atsushi Sawada, Keni
chi Koyama, Hiromi Koga, Tomotaka Yano, "Influence
of Vacuum Arc Behavior on Current Interrupting Lim
it of Spiral Contact, "19 th ISDEIV, P443-446, Sep
t., 2000), research was conducted on the breaking performance of the spiral electrode and the driving characteristics of the arc. Immediately after the arc ignited at the contact part, the center position almost stagnates (stagnation period) for several ms while increasing the cross-sectional area, and the speed increases rapidly (acceleration period). / S high speed (high speed period). As a result of comparing the driving characteristics of the arc by changing the electrode shape and the electrode material, it was found that the breaking performance was closely related to the length of the initial stagnation period. For example, when the length of the initial stagnation period is increased, the energy injected into the electrode surface during the stagnation period increases, so that a melting point occurs on the electrode surface,
It is considered that since the melting state continues thereafter, the metal vapor density at the current zero point is affected, and the interruption fails. It is considered that the energy injected into the electrode surface is consumed by heat conduction into the inside of the electrode and cooling by heat of evaporation. Here, if the thermal conductivity of the electrode material is high,
It is considered that of the energy injected into the electrode surface, the amount diffused into the electrode increases. For this reason, it is considered that the generation amount (evaporation amount) of metal vapor from the electrode surface is reduced, and the blocking performance is improved.
【００２１】また、熱拡散率が０．６ｃｍ２／ｓ以上で
ある実施例１および２において、それよりも小さい比較
例１〜３に比べて、遮断性能が向上していることが分か
る。熱拡散率αは、Ｋを熱伝導率、Cpを定圧比熱、ρを
密度とすると、α＝Ｋ／Cp・ρ により求められ、温度の
移動速度に関係した量である。従って、熱伝導率の場合
と同様に、熱拡散率が大きいと遮断性能は向上すると考
えられる。また、導電率が５０％ＩＡＣＳ以上である実
施例１および２において、それよりも小さい比較例１〜
３に比べて、遮断性能が向上していることが分かる。固
体物性論によると、金属の熱伝導率と導電率（電気伝導
率）は比例関係にある（ヴィーデマン−フランツの法
則）。従って、熱伝導率の場合と同様に、導電率が大き
いと遮断性能は向上すると考えられる。Further, it can be seen that in Examples 1 and 2 in which the thermal diffusivity is 0.6 cm 2 / s or more, the breaking performance is improved as compared with Comparative Examples 1 to 3 which are smaller than that. The thermal diffusivity α is obtained by α = K / Cp · ρ, where K is thermal conductivity, Cp is constant-pressure specific heat, and ρ is density, and is a quantity related to the moving speed of temperature. Therefore, as in the case of the thermal conductivity, it is considered that the blocking performance is improved if the thermal diffusivity is large. Further, in Examples 1 and 2 in which the conductivity is 50% IACS or more, Comparative Examples 1 to 4 smaller than those were used.
It can be seen that the breaking performance is improved as compared with No. 3. According to the theory of solid state properties, the thermal conductivity and the electrical conductivity (electric conductivity) of a metal are in a proportional relationship (Wiedemann-Franz law). Therefore, as in the case of the thermal conductivity, it is considered that the blocking performance is improved when the conductivity is large.
【００２２】なお、表１では、Ｃｒを２５重量％含有す
るＣｕ−Ｃｒ系材料について示しているが、Ｃｒの含有
率はこれに限るものではなく、２０重量％〜６０重量％
においても同様の効果が得られる。Ｃｒの含有率が２０
重量％より少ないと、アークによる浸食を受けやすくな
り遮断可能回数が少なくなる、溶着しやすくなる、とい
う欠点がある。また、６０重量％より多いとかたくても
ろいという性質をもつようになり、加工性が悪い、閉極
時の衝撃などで割れやすくなるという欠点がある。また
さらに、Ｃｒの他に、Ｓｉ、Ｍｎ、Ｔｉ、Ａｌ、Ｚｎ、
Ｃなどを含有していてもよい。Table 1 shows a Cu-Cr-based material containing 25% by weight of Cr, but the content of Cr is not limited to this, and is 20% to 60% by weight.
The same effect can be obtained in Cr content of 20
When the amount is less than the weight%, there are disadvantages that the erosion is apt to be caused by the arc, the number of interruptable times is reduced, and welding is easily performed. Further, when the content is more than 60% by weight, the material has a property of being hard and brittle, and has disadvantages such as poor workability and liability to be broken by an impact at the time of closing. Furthermore, in addition to Cr, Si, Mn, Ti, Al, Zn,
C and the like may be contained.
【００２３】さらに、本実施の形態によれば、風車形電
極の少なくとも他方の風車形電極と接触する部分を、熱
伝導率が１９５Ｗ／ｍＫ以上、熱拡散率が０．６ｃｍ２
／ｓ以上、または導電率が５０％ＩＡＣＳ以上であるＣ
ｕＣｒ系材料によって形成したので、遮断直後の耐圧が
向上する、すなわち、高い再起電圧に耐えられるように
なるという効果があり、より定格電圧の高い遮断器に対
して本真空バルブを適用することが可能となる。すなわ
ち、上述したように（第２０段落で述べたように）、電
極材料の熱伝導率を高くすることにより金属蒸気の発生
量が減るため、遮断可能電流が増加するだけでなく、電
流ゼロ点での再起電圧に対する耐電圧が向上する。Further, according to the present embodiment, at least a portion of the windmill-shaped electrode which is in contact with the other windmill-shaped electrode has a thermal conductivity of 195 W / mK or more and a thermal diffusivity of 0.6 cm 2.
/ S or C having a conductivity of 50% IACS or more
Since it is formed of a uCr-based material, the withstand voltage immediately after the interruption is improved, that is, it has the effect of being able to withstand a high re-motive voltage, and the present vacuum valve can be applied to a circuit breaker having a higher rated voltage. It becomes possible. That is, as described above (as described in the twentieth paragraph), by increasing the thermal conductivity of the electrode material, the amount of generated metal vapor is reduced, so that not only the interruptable current increases but also the current zero point. The withstand voltage against the re-motive voltage at the time is improved.
【００２４】なお、本実施の形態では、本発明と同一出
願人による特開２００１−０５２５７６号公報に詳細に
記載されているように、風車形電極の周縁の羽根の外周
部３にアークを発生させ、アークに対して駆動力として
作用する磁束密度のうち、一方の電極１の腕部４を介し
てアークに流れ込む電流によって発生し、アークの足部
の自電極の接触面から０．５ｍｍの範囲に対してアーク
駆動力として作用する磁束密度の前記接触面に平行な成
分が、前記接触面のどの位置においても電流１ｋＡに対
して０．０１テスラ以上となるように構成した。すなわ
ち、具体的には、風車形電極１の外径をＤ、接触部の内
径をＤi 、電極棒の接合部の径をｄとした場合に、Ｄi
≧０．４Ｄ、かつｄ≦０．６Ｄiで、しかも、接触部の
突出高さｈを５ｍｍ以下となるようにした。風車形電極
をこのように構成することにより、アークが発生してか
ら回転を開始するまでの時間を短縮でき、その結果、よ
り高い遮断能力を得ることができるという効果が得られ
る。In this embodiment, as described in detail in Japanese Patent Application Laid-Open No. 2001-052576 filed by the same applicant as the present invention, an arc is generated at the outer peripheral portion 3 of the peripheral blade of the windmill-shaped electrode. Of the magnetic flux density acting as a driving force for the arc, the magnetic flux density is generated by a current flowing into the arc through the arm 4 of one of the electrodes 1 and is 0.5 mm from the contact surface of the own electrode of the foot of the arc. The component of the magnetic flux density acting as the arc driving force in the range parallel to the contact surface is set to be 0.01 tesla or more at a current of 1 kA at any position on the contact surface. That is, specifically, when the outer diameter of the windmill-shaped electrode 1 is D, the inner diameter of the contact portion is Di, and the diameter of the joint portion of the electrode rod is d, Di
.Gtoreq.0.4D and d.ltoreq.0.6Di, and the projecting height h of the contact portion is set to 5 mm or less. By configuring the windmill-shaped electrode in this manner, the time from when an arc is generated to when the arc is started can be reduced, and as a result, an effect that a higher breaking ability can be obtained can be obtained.
【００２５】また、本実施の形態では、本発明と同一出
願人による特願２０００−１７４１４３号明細書に詳細
に記載されているように、風車形電極１の中心部と羽根
部（羽根の中心部４および羽根の外周部３）とを一体に
形成し、かつ、一対の風車形電極１が開極された際に発
生するアークに、一方の電極１の中心部から腕部４を介
して流れ込む電流によって発生し、アークの足部の、自
電極の接触面から１ｍｍの範囲に対して、回転方向の駆
動力を生じさせる磁束密度の径方向で、かつ前記接触面
に平行な成分が、アークが前記接触面上の腕部４との境
界付近にある時に、電流１ｋＡに対して６．５ミリテス
ラ（ｍＴｅｓｌａ）以上となるように構成した。風車形
電極をこのように構成することにより、特にアークが接
触面上の腕部４との境界付近に発弧した時の、アークが
発生してから回転を開始するまでの時間が短縮され、そ
の結果、高い遮断能力を得ることができるという効果が
得られる。In the present embodiment, as described in detail in Japanese Patent Application No. 2000-174143 filed by the same applicant as the present invention, the center of the windmill-shaped electrode 1 and the blade (the center of the blade) Part 4 and the outer peripheral part 3) of the blade are integrally formed, and an arc generated when the pair of windmill-shaped electrodes 1 is opened is opened from the center of one of the electrodes 1 via the arm 4. A component that is generated by the flowing current and has a component parallel to the contact surface in the radial direction of the magnetic flux density that generates the driving force in the rotational direction for a range of 1 mm from the contact surface of the own electrode of the foot portion of the arc, When the arc was near the boundary with the arm 4 on the contact surface, the current was set to be 6.5 milliTesla (mTesla) or more for 1 kA of current. By configuring the windmill-shaped electrode in this way, particularly when the arc is fired near the boundary with the arm 4 on the contact surface, the time from the occurrence of the arc to the start of rotation is reduced, As a result, an effect that a high blocking ability can be obtained is obtained.
【００２６】但し、風車形電極を、必ずしも特開２００
１−０５２５７６号公報や特願２０００−１７４１４３
号明細書に記載されているように構成しなくても、電極
１を、熱伝導率が１９５Ｗ／ｍＫ以上、熱拡散率が０．
６ｃｍ２／ｓ以上、または導電率が５０％ＩＡＣＳ以上
であるＣｕＣｒ系材料によって形成することにより、遮
断性能の向上した真空バルブを得ることができる。However, the windmill-shaped electrode is not necessarily
No. 1-052576 and Japanese Patent Application No. 2000-174143.
The electrode 1 has a thermal conductivity of 195 W / mK or more and a thermal diffusivity of 0.1 even without being configured as described in the specification.
By forming the vacuum valve with a CuCr-based material having a conductivity of 6 cm 2 / s or more or a conductivity of 50% IACS or more, a vacuum valve with improved shutoff performance can be obtained.
【００２７】なお、本実施の形態では、電極１の全てを
上記のような所定の熱伝導率、熱拡散率、または導電率
を有するＣｕＣｒ系材料で形成した場合について説明し
たが、風車形電極の少なくとも他方の風車形電極と接触
する部分を、熱伝導率が１９５Ｗ／ｍＫ以上、熱拡散率
が０．６ｃｍ２／ｓ以上、または導電率が５０％ＩＡＣ
Ｓ以上であるＣｕＣｒ系材料によって形成すればよく、
遮断性能がより向上した真空バルブが得られる。但し、
特願２０００−１７４１４３号明細書でも記載している
ように、同一の材料によって一体に形成することによっ
て、異なる材料を接合するばあいのように接合部が弱点
となることもない。In this embodiment, the case where all the electrodes 1 are formed of the above-mentioned CuCr-based material having a predetermined thermal conductivity, thermal diffusivity, or electrical conductivity has been described. At least a portion in contact with the other windmill-shaped electrode has a thermal conductivity of 195 W / mK or more, a thermal diffusivity of 0.6 cm 2 / s or more, or a conductivity of 50% IAC.
What is necessary is just to form with CuCr-type material which is S or more,
A vacuum valve with more improved shutoff performance is obtained. However,
As described in Japanese Patent Application No. 2000-174143, by integrally forming the same material, the joint does not become a weak point as in the case of joining different materials.
【００２８】また、本実施の形態では溝２を４本とした
場合を例として示したが、４本に限るものではなく、複
数本であればよい。但し、特願２０００−１７４１４３
号明細書でも記載しているように、例えば６本や８本な
ど、４本以上がアーク駆動力として作用する時速密度の
径方向成分の増加を図り、高い遮断能力を得るという観
点からより望ましい。Further, in the present embodiment, the case where four grooves 2 are used has been described as an example, but the number is not limited to four, and a plurality of grooves may be used. However, Japanese Patent Application 2000-174143
As described in the specification, for example, four or more wires, such as six wires or eight wires, are more preferable from the viewpoint of increasing the radial component of an hourly speed density acting as an arc driving force and obtaining a high breaking ability.
【００２９】実施の形態２．図４は本発明の実施の形態
２による真空バルブの風車形電極の構造およびその作用
を説明するための図であり、（ａ）は平面図、（ｂ）は
（ａ）のＡ−Ａ´線における断面図である。なお、図４
（ｂ）では、エネルギーの拡散する方向を示す矢印が分
かりやすいようにハッチングを省略している。上記実施
の形態１では、羽根はその外周部３側が中心部４側より
も対向電極の方に突出し、閉極時に対向電極と接触する
ように構成されていたが、本実施の形態では、羽根の中
心部４側が外周部３側よりも対向電極の方に突出し、閉
極時に対向電極と接触する接触部となっている。このよ
うな構成を有する風車形電極を備えた真空バルブは例え
ば特開昭５５−３０１７４号公報に記載されており、こ
の場合においても、実施の形態１の場合と同様に、風車
形電極の少なくとも他方の風車形電極と接触する部分
（羽根の中心部４）を、熱伝導率が１９５Ｗ／ｍＫ以
上、熱拡散率が０．６ｃｍ２／ｓ以上、または導電率が
５０％ＩＡＣＳ以上であるＣｕＣｒ系材料によって形成
することにより、遮断性能がより向上した真空バルブが
得られる。Embodiment 2 4A and 4B are views for explaining the structure and operation of a windmill-shaped electrode of a vacuum valve according to Embodiment 2 of the present invention, wherein FIG. 4A is a plan view, and FIG. It is sectional drawing in a line. FIG.
In (b), hatching is omitted so that the arrow indicating the direction in which the energy is diffused is easy to understand. In the first embodiment, the blade is configured so that the outer peripheral portion 3 side projects toward the counter electrode from the center portion 4 side, and comes into contact with the counter electrode when the electrode is closed. However, in the present embodiment, the blade is The central part 4 side projects toward the counter electrode more than the outer peripheral part 3 side, and serves as a contact part that comes into contact with the counter electrode when closing the electrode. A vacuum valve provided with a windmill-shaped electrode having such a configuration is described in, for example, JP-A-55-30174. In this case, as in the case of the first embodiment, at least the windmill-shaped electrode is provided. The portion that contacts the other windmill-shaped electrode (central portion 4 of the blade) is made of CuCr having a thermal conductivity of 195 W / mK or more, a thermal diffusivity of 0.6 cm 2 / s or more, or a conductivity of 50% IACS or more. By forming the vacuum valve from a system material, a vacuum valve with further improved shutoff performance can be obtained.
【００３０】本実施の形態の場合、図４（ａ）に示すよ
うに、固定電極と可動電極の接触面である羽根の中心部
４側でアーク９が発弧する。その後、停滞期間および加
速期間を経ながら外周部３側に移動し、外周部３に到達
すると高速回転する（高速期間）。従って、他方の風車
形電極と接触する部分である羽根の中心部４側だけを熱
伝導率の高い材料としても、停滞期間に電極表面に注入
されたエネルギーの電極１内部へ拡散する速度が上昇
し、遮断性能が向上する効果がある。ただし、外周部も
熱伝導率の高い材料とすると一層効果が高いのは、実施
の形態１で説明したのと同様である。In the case of this embodiment, as shown in FIG. 4A, an arc 9 is emitted on the center 4 side of the blade, which is the contact surface between the fixed electrode and the movable electrode. Thereafter, it moves toward the outer peripheral portion 3 while passing through a stagnation period and an acceleration period, and when it reaches the outer peripheral portion 3, it rotates at high speed (high-speed period). Therefore, even if only the central portion 4 of the blade, which is the portion in contact with the other windmill-shaped electrode, is made of a material having high thermal conductivity, the speed at which the energy injected into the electrode surface during the stagnation period is diffused into the electrode 1 increases. This has the effect of improving the blocking performance. However, it is the same as described in the first embodiment that the effect is further enhanced if the outer peripheral portion is made of a material having a high thermal conductivity.
【００３１】次に、図４（ａ）（ｂ）、図２および図２
のＢ−Ｂ´線における断面図である図５を参考に、実施
の形態１と２を比較する。なお、図５では、エネルギー
の拡散する方向を示す矢印が分かりやすいようにハッチ
ングを省略している。図４（ｂ）および図５において、
矢印は発弧直後に電極表面に注入されたエネルギーが拡
散する方向を示すものである。図から明らかなように、
実施の形態１における方が、発弧直後に電極表面に注入
されたエネルギーが拡散する方向が限定されている。さ
らに、実施の形態１の場合、図２に示したように、アー
ク９の発弧と高速回転が同じ接触面上で起るので、発弧
点に再びアークが到達しエネルギーの再注入が起こる。
従って、実施の形態１における方が、電極を熱伝導率
（または熱拡散率または導電率）の高い材料によって構
成しエネルギー拡散を早めることによる、遮断性能向上
効果が大きい。Next, FIGS. 4 (a) and 4 (b), FIGS.
Embodiment 1 and Embodiment 2 are compared with reference to FIG. 5 which is a cross-sectional view taken along line BB ′ of FIG. In FIG. 5, hatching is omitted so that the arrow indicating the direction in which the energy is diffused is easy to understand. 4 (b) and FIG.
The arrow indicates the direction in which the energy injected into the electrode surface immediately after the firing is diffused. As is clear from the figure,
In the first embodiment, the direction in which the energy injected to the electrode surface immediately after firing is diffused is more limited. Further, in the case of the first embodiment, as shown in FIG. 2, the arc 9 and the high-speed rotation occur on the same contact surface, so that the arc reaches the arc point again and the energy is re-injected. .
Therefore, in the first embodiment, the effect of improving the blocking performance by forming the electrode from a material having a high thermal conductivity (or thermal diffusivity or conductivity) and accelerating the energy diffusion is greater.
【００３２】なお、上記各実施の形態では、羽根の外周
部３側（または中心部４側）が羽根の中心部４側（また
は外周部３側）よりも対向電極の方に突出し、羽根の外
周部３側（または中心部４側）が閉極時に対向電極と接
触する場合について説明したが、羽根の中心部４側と外
周部３側とが同一面上にある場合でもよく、いわゆる風
車形電極であれば、電極部を熱伝導率が１９５Ｗ／ｍＫ
以上、熱拡散率が０．６ｃｍ２／ｓ以上、または導電率
が５０％ＩＡＣＳ以上であるＣｕＣｒ系材料によって形
成することにより、遮断性能の向上した真空バルブを得
ることができる。In each of the above embodiments, the outer peripheral portion 3 (or the central portion 4 side) of the blade protrudes toward the counter electrode more than the central portion 4 (or the outer peripheral portion 3 side) of the blade. Although the case where the outer peripheral portion 3 side (or the central portion 4 side) is in contact with the counter electrode at the time of closing the electrode is described, the case where the central portion 4 side of the blade and the outer peripheral portion 3 side are on the same plane may be used. In the case of a shaped electrode, the electrode part has a thermal conductivity of 195 W / mK.
As described above, a vacuum valve with improved shut-off performance can be obtained by forming a heat diffusion coefficient of at least 0.6 cm 2 / s or a CuCr-based material having a conductivity of at least 50% IACS.
【００３３】[0033]
【発明の効果】以上のように、本発明の第１の真空バル
ブは、電極棒と接合される中心部と、前記中心部から延
びる複数の溝によって分画されて前記中心部から外周部
に指向する円弧状に湾曲する複数の羽根からなる羽根部
とを有する少なくとも１対の風車形電極を、真空容器内
に接離可能に配置してなる真空バルブにおいて、前記風
車形電極の少なくとも他方の風車形電極と接触する部分
を、熱伝導率が１９５Ｗ／ｍＫ以上、熱拡散率が０．６
ｃｍ２／ｓ以上、または導電率が５０％ＩＡＣＳ以上で
あるＣｕＣｒ系材料によって形成したので、遮断性能が
より向上した真空バルブが得られる。As described above, the first vacuum valve of the present invention is divided from the center portion to be joined to the electrode rod and the plurality of grooves extending from the center portion, from the center portion to the outer peripheral portion. A vacuum valve in which at least one pair of windmill-shaped electrodes having a plurality of blades that are directed to be curved in an arc shape is disposed so as to be capable of coming and going in a vacuum vessel; A portion having a thermal conductivity of 195 W / mK or more and a thermal diffusivity of 0.6
Since it is formed of a CuCr-based material having a conductivity of not less than cm 2 / s or a conductivity of not less than 50% IACS, it is possible to obtain a vacuum valve having more improved shutoff performance.
【００３４】本発明の第２の真空バルブは、第１の真空
バルブにおいて、羽根はその外周部側が中心部側よりも
対向電極の方に突出し、閉極時に対向電極と接触するよ
うに構成されているので、第１の真空バルブの効果がよ
り顕著となる。A second vacuum valve according to the present invention, in the first vacuum valve, is configured such that the outer peripheral side of the blade protrudes toward the opposing electrode from the central side and is in contact with the opposing electrode when the electrode is closed. Therefore, the effect of the first vacuum valve becomes more remarkable.
【図１】 本発明の実施の形態１による真空バルブの風
車形電極の構造を示す斜視図である。FIG. 1 is a perspective view showing a structure of a windmill-shaped electrode of a vacuum valve according to Embodiment 1 of the present invention.
【図２】 本発明の実施の形態１による真空バルブの風
車形電極の構造を示す平面図である。FIG. 2 is a plan view showing a structure of a windmill-shaped electrode of the vacuum valve according to the first embodiment of the present invention.
【図３】 図２のＡ−Ａ´線における断面図である。FIG. 3 is a sectional view taken along line AA ′ of FIG. 2;
【図４】 本発明の実施の形態２による真空バルブの風
車形電極の構造およびその作用を説明するための図であ
り、（ａ）は平面図、（ｂ）は（ａ）のＡ−Ａ´線にお
ける断面図である。4A and 4B are diagrams for explaining the structure and operation of a windmill-shaped electrode of a vacuum valve according to a second embodiment of the present invention, wherein FIG. 4A is a plan view, and FIG. It is sectional drawing in the 'line.
【図５】 本発明の実施の形態１による真空バルブの風
車形電極の作用を説明するための断面図である。FIG. 5 is a cross-sectional view for explaining the operation of the windmill-shaped electrode of the vacuum valve according to the first embodiment of the present invention.
【図６】 真空バルブの全体構成を示す断面図である。FIG. 6 is a cross-sectional view showing the overall configuration of the vacuum valve.
【符号の説明】 １ 風車形電極、２ 溝、３ 羽根の外周部、４ 羽根
の中心部、５ 補強板、６ 電極棒、７ 接合穴。[Description of Signs] 1 Windmill-shaped electrode, 2 grooves, 3 blade outer periphery, 4 blade center, 5 reinforcing plate, 6 electrode rod, 7 joint hole.
───────────────────────────────────────────────────── フロントページの続き (72)発明者 古賀 博美 東京都千代田区丸の内二丁目２番３号 三 菱電機株式会社内 (72)発明者 矢野 知孝 東京都千代田区丸の内二丁目２番３号 三 菱電機株式会社内 (72)発明者 伊藤 武文 東京都千代田区丸の内二丁目２番３号 三 菱電機株式会社内 (72)発明者 村上 省自 東京都千代田区丸の内二丁目２番３号 三 菱電機株式会社内 (72)発明者 佐藤 伸治 東京都千代田区丸の内二丁目２番３号 三 菱電機株式会社内 Ｆターム(参考） 5G026 DA02 DA03 DB06 5G050 AA12 AA13 BA01 CA01 DA03 FA10 ──────────────────────────────────────────────────続 き Continued on the front page (72) Inventor Hiromi Koga 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Mitsui Electric Co., Ltd. (72) Tomotaka Yano 2-3-2 Marunouchi, Chiyoda-ku, Tokyo 3 Within Rishi Electric Co., Ltd. (72) Inventor Takefumi Ito 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Sanritsu Electric Co., Ltd. Inside Electric Co., Ltd. (72) Inventor Shinji Sato 2-3-2 Marunouchi, Chiyoda-ku, Tokyo Mitsubishi Electric Co., Ltd. F-term (reference) 5G026 DA02 DA03 DB06 5G050 AA12 AA13 BA01 CA01 DA03 FA10
Claims (2)
部から延びる複数の溝によって分画されて前記中心部か
ら外周部に指向する円弧状に湾曲する複数の羽根からな
る羽根部とを有する少なくとも１対の風車形電極を、真
空容器内に接離可能に配置してなる真空バルブにおい
て、前記風車形電極の少なくとも他方の風車形電極と接
触する部分を、熱伝導率が１９５Ｗ／ｍＫ以上、熱拡散
率が０．６ｃｍ２／ｓ以上、または導電率が５０％ＩＡ
ＣＳ以上であるＣｕＣｒ系材料によって形成したことを
特徴とする真空バルブ。1. A wing portion comprising a center portion joined to an electrode bar, and a plurality of wing portions divided by a plurality of grooves extending from the center portion and curved in an arc shape extending from the center portion to an outer peripheral portion. In a vacuum valve in which at least one pair of windmill-shaped electrodes having the following structure is detachably arranged in a vacuum vessel, at least a portion of the windmill-shaped electrode that contacts the other windmill-shaped electrode has a thermal conductivity of 195 W / mK or more, thermal diffusivity of 0.6 cm 2 / s or more, or conductivity of 50% IA
A vacuum valve formed of a CuCr-based material of CS or higher.
向電極の方に突出し、閉極時に対向電極と接触するよう
に構成されていることを特徴とする請求項１記載の真空
バルブ。2. The vacuum valve according to claim 1, wherein the blade is configured such that an outer peripheral portion thereof protrudes toward the counter electrode from a central portion thereof, and comes into contact with the counter electrode when the electrode is closed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001137359A JP2002334639A (en) | 2001-05-08 | 2001-05-08 | Vacuum valve |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001137359A JP2002334639A (en) | 2001-05-08 | 2001-05-08 | Vacuum valve |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002334639A true JP2002334639A (en) | 2002-11-22 |
Family
ID=18984473
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001137359A Pending JP2002334639A (en) | 2001-05-08 | 2001-05-08 | Vacuum valve |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP2002334639A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009289660A (en) * | 2008-05-30 | 2009-12-10 | Mitsubishi Electric Corp | Vacuum valve |
Citations (8)
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|---|---|---|---|---|
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| JPH0552783A (en) * | 1991-08-28 | 1993-03-02 | Tokuyama Soda Co Ltd | Thermoelectric characteristic measuring device |
| JPH05128883A (en) * | 1991-10-30 | 1993-05-25 | Sharp Corp | Non-volatile recorder |
| JPH05223762A (en) * | 1991-11-01 | 1993-08-31 | Mitsui Toatsu Chem Inc | Thermal analysis method and device using temperature wave |
| JPH0890249A (en) * | 1994-09-20 | 1996-04-09 | Kobe Steel Ltd | Resistance spot welding method of aluminum |
| JPH09164449A (en) * | 1995-12-13 | 1997-06-24 | Honda Motor Co Ltd | Die and its production |
| JPH11340522A (en) * | 1998-05-22 | 1999-12-10 | Ube Ind Ltd | Heat exchanger using thermoelectric module |
| JP2001052576A (en) * | 1999-06-04 | 2001-02-23 | Mitsubishi Electric Corp | Vacuum valve |
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2001
- 2001-05-08 JP JP2001137359A patent/JP2002334639A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS617519A (en) * | 1984-06-21 | 1986-01-14 | 株式会社明電舎 | Vacuum interrupter |
| JPH0552783A (en) * | 1991-08-28 | 1993-03-02 | Tokuyama Soda Co Ltd | Thermoelectric characteristic measuring device |
| JPH05128883A (en) * | 1991-10-30 | 1993-05-25 | Sharp Corp | Non-volatile recorder |
| JPH05223762A (en) * | 1991-11-01 | 1993-08-31 | Mitsui Toatsu Chem Inc | Thermal analysis method and device using temperature wave |
| JPH0890249A (en) * | 1994-09-20 | 1996-04-09 | Kobe Steel Ltd | Resistance spot welding method of aluminum |
| JPH09164449A (en) * | 1995-12-13 | 1997-06-24 | Honda Motor Co Ltd | Die and its production |
| JPH11340522A (en) * | 1998-05-22 | 1999-12-10 | Ube Ind Ltd | Heat exchanger using thermoelectric module |
| JP2001052576A (en) * | 1999-06-04 | 2001-02-23 | Mitsubishi Electric Corp | Vacuum valve |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009289660A (en) * | 2008-05-30 | 2009-12-10 | Mitsubishi Electric Corp | Vacuum valve |
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