JP2002333713A5 - - Google Patents

Download PDF

Info

Publication number
JP2002333713A5
JP2002333713A5 JP2001138738A JP2001138738A JP2002333713A5 JP 2002333713 A5 JP2002333713 A5 JP 2002333713A5 JP 2001138738 A JP2001138738 A JP 2001138738A JP 2001138738 A JP2001138738 A JP 2001138738A JP 2002333713 A5 JP2002333713 A5 JP 2002333713A5
Authority
JP
Japan
Prior art keywords
group
formula
electron beam
acid
ray
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2001138738A
Other languages
English (en)
Japanese (ja)
Other versions
JP4174193B2 (ja
JP2002333713A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001138738A priority Critical patent/JP4174193B2/ja
Priority claimed from JP2001138738A external-priority patent/JP4174193B2/ja
Priority to TW091109156A priority patent/TW562999B/zh
Priority to KR1020020025232A priority patent/KR100886635B1/ko
Publication of JP2002333713A publication Critical patent/JP2002333713A/ja
Publication of JP2002333713A5 publication Critical patent/JP2002333713A5/ja
Application granted granted Critical
Publication of JP4174193B2 publication Critical patent/JP4174193B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

JP2001138738A 2001-05-09 2001-05-09 電子線またはｘ線用ポジ型レジスト組成物 Expired - Fee Related JP4174193B2 (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2001138738A JP4174193B2 (ja) 2001-05-09 2001-05-09 電子線またはｘ線用ポジ型レジスト組成物
TW091109156A TW562999B (en) 2001-05-09 2002-05-02 Positive resist composition for electronic or X-rays
KR1020020025232A KR100886635B1 (ko) 2001-05-09 2002-05-08 전자선 또는 엑스선용 포지티브 레지스트 조성물

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001138738A JP4174193B2 (ja) 2001-05-09 2001-05-09 電子線またはｘ線用ポジ型レジスト組成物

Publications (3)

Publication Number Publication Date
JP2002333713A JP2002333713A (ja) 2002-11-22
JP2002333713A5 true JP2002333713A5 (US07494231-20090224-C00006.png) 2006-01-19
JP4174193B2 JP4174193B2 (ja) 2008-10-29

Family

ID=18985629

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001138738A Expired - Fee Related JP4174193B2 (ja) 2001-05-09 2001-05-09 電子線またはｘ線用ポジ型レジスト組成物

Country Status (1)

Country Link
JP (1) JP4174193B2 (US07494231-20090224-C00006.png)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4149306B2 (ja) * 2003-04-30 2008-09-10 東京応化工業株式会社 ポジ型レジスト組成物およびレジストパターン形成方法
JP5039410B2 (ja) * 2007-03-29 2012-10-03 富士フイルム株式会社 ポジ型レジスト組成物およびこれを用いたパターン形成方法
JP5141106B2 (ja) * 2007-06-22 2013-02-13 住友化学株式会社 化学増幅型ポジ型レジスト組成物及びヒドロキシスチレン誘導体
JP5514583B2 (ja) * 2009-03-13 2014-06-04 富士フイルム株式会社 感活性光線性または感放射線性樹脂組成物及び該組成物を用いたパターン形成方法
JP5264654B2 (ja) * 2009-08-31 2013-08-14 富士フイルム株式会社 感活性光線性又は感放射線性樹脂組成物、及びそれを用いたパターン形成方法
WO2011104127A1 (en) 2010-02-24 2011-09-01 Basf Se Latent acids and their use
JP5141838B2 (ja) * 2012-01-17 2013-02-13 住友化学株式会社 化学増幅型ポジ型レジスト組成物
JP2012117073A (ja) * 2012-01-17 2012-06-21 Sumitomo Chemical Co Ltd ヒドロキシスチレン誘導体

Similar Documents

Publication Publication Date Title
JP2000187330A5 (US07494231-20090224-C00006.png)
JP2002049151A5 (US07494231-20090224-C00006.png)
JP2001312055A5 (US07494231-20090224-C00006.png)
JP2001330947A5 (US07494231-20090224-C00006.png)
JP2001174995A5 (US07494231-20090224-C00006.png)
JP2004004834A5 (US07494231-20090224-C00006.png)
JP2002268223A5 (US07494231-20090224-C00006.png)
JP2002202608A5 (US07494231-20090224-C00006.png)
JP2003114522A5 (US07494231-20090224-C00006.png)
JP2003122006A5 (US07494231-20090224-C00006.png)
JP2004101706A5 (US07494231-20090224-C00006.png)
JP2002090988A5 (US07494231-20090224-C00006.png)
JP2002169295A5 (US07494231-20090224-C00006.png)
JP2004310004A5 (US07494231-20090224-C00006.png)
JP2002049156A5 (US07494231-20090224-C00006.png)
JP2002333713A5 (US07494231-20090224-C00006.png)
JP2001318464A5 (US07494231-20090224-C00006.png)
JP2004101642A5 (US07494231-20090224-C00006.png)
JP2001075283A5 (US07494231-20090224-C00006.png)
JP2002236358A5 (US07494231-20090224-C00006.png)
JP2002323768A5 (US07494231-20090224-C00006.png)
JP2003192665A5 (US07494231-20090224-C00006.png)
JP2001100402A5 (US07494231-20090224-C00006.png)
JP2003177537A5 (US07494231-20090224-C00006.png)
JP2002278068A5 (US07494231-20090224-C00006.png)