JP2002328106A - Thermostat - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a thermostat capable of controlling a temperature of an object quickly and precisely, and excellent in productivity, by changing the temperature of the object using intermetallic heat conduction excellent in heat conduction efficiency. SOLUTION: In this thermostat 1, a tunnel structure 83 using aluminum alloy or the like excellent in heat conductivity is covered with a heat-insulation cover 70 for shielding heat conduction and heat radiation and for precluding natural convection to the utmost to conduct efficient heat insulation against a periphery, and a carrier 20 mounted with the object is moved inside a tunnel 82 by a carrier conveying device 30.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

TECHNICAL FIELD The present invention relates to a thermostat,
In particular, by transferring heat to the object by heat conduction between metals from a heating unit and / or a cooling unit having a tunnel structure, the temperature of the object can be controlled at high speed and with high accuracy. Related to the device.

[0002]

2. Description of the Related Art Among electronic components, quality assurance can be assured by setting electronic components such as quartz oscillators and thermistors to a predetermined temperature and measuring temperature characteristics at the predetermined temperature. There are electronic components. In addition, when performing measurement or inspection related to such temperature characteristics, depending on the target object, it is necessary to accurately control the temperature of the target object (by heating and cooling the target object to set the temperature to the set temperature). May not be. In such a case, for example, even if the object is directly placed on a heater or the like and heated to control the temperature, the temperature of the object is accurately controlled for heat radiation from the upper surface or side surface of the object. It is not possible.

For this reason, conventionally, an object which needs to be measured or inspected for temperature characteristics has been generally thrown into a thermostat comprising a thermostat to control the temperature. The thermostatic bath is generally configured to use a fluid in the bath such as a gas or a liquid as a heat medium, stabilize the fluid at a set temperature, and control the temperature of the object by convective heat transfer from the fluid. In addition, in a thermostatic oven using convection heat transfer from a fluid, if the temperature of the heat medium is stabilized at a constant temperature in the bath, the temperature of the target object will also be stabilized at a constant temperature. (Tolerance ±
(About 0.5 ° C.).

[0004]

However, in the case of a gas bath type thermostat using gas, there has been a problem that it takes time to stabilize the temperature of the gas inside the thermostat. For example, a constant temperature device of an air tank system, for example, cools down the temperature in the tank from room temperature to -35 ° C. when the temperature is lowered from room temperature in order to put an object to be subjected to a temperature characteristic test at about −35 ° C. It takes about an hour to do it.

[0005] Further, the air bath type constant temperature bath has a problem that it takes time to transfer heat from a gas as a heat medium to an object. In addition, although the time of heat transfer to the object is shortened in the liquid bath type constant temperature bath, a washing step for washing away the liquid is required, or the object cannot be immersed in the liquid, so-called, In the case of non-washable parts, there is a restriction that a liquid bath type constant temperature bath cannot be used.

[0006] The temperature stability of the air bath type thermostat is as follows.
Since the temperature is usually about ± 0.5 ° C., the temperature must be measured to the first decimal place with a thermometer, and a characteristic test must be performed using the measured value. Also, generally, the temperature distribution in the thermostat is set to ± 0.5 ° C.
Within this range, it is necessary to adjust the arrangement of the objects, the air volume and direction of the fan, and to conduct an evaluation test on the temperature distribution, and this adjustment work and the evaluation test require a great deal of labor. there were.

[0007] When the thermostatic device used for the temperature characteristic test measures the characteristics at a plurality of measurement temperatures, if a single air bath type thermostat is used, as described above, It takes time to stabilize the temperature of the internal gas. For this reason, as shown in FIG. 16, a constant temperature apparatus 100 having a structure in which air tank type constant temperature vessels 101 are connected by the number of measurement temperatures and in-lined by a line conveyor 102 or the like has been used. However, since the thermostat 100 is configured such that each thermostat 101 controls the temperature of the object by convective heat transfer from gas, it takes about 10 minutes or more before the object reaches the target temperature, and the There was a problem of poor sex. In addition, there is a problem that the size of the thermostat 100 is increased when an attempt is made to increase the number of objects to be charged.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described problem, and changes the temperature of an object by utilizing intermetallic heat conduction having high heat transfer efficiency, thereby achieving high-speed and high-precision object. It is an object of the present invention to provide a constant temperature apparatus which can control the temperature of the apparatus and which is excellent in productivity.

In Japanese Unexamined Patent Publication No. Sho 60-107117, a heat conductor substantially surrounding a temperature-controlled body, provided between the temperature-controlled body and the heat conductor, and having a lower thermal conductivity than the heat conductor. A technology of a thermostatic device including a heat buffer and a heat insulator provided on an outer periphery of a heat conductor is disclosed.This technology is a technology capable of controlling the temperature of an object at high speed by heat conduction by surface contact. However, the above problems cannot be solved. Further, Japanese Patent Application Laid-Open No. 03-006475 discloses a technique for attaching a temperature sensor to an object to be measured itself, and this technique is capable of accurately controlling the temperature of an object, but solves the above problem. Can not.

[0010]

To achieve this object, a constant temperature apparatus according to a first aspect of the present invention comprises a conveying means for conveying an object whose temperature is to be controlled, and the object by the conveying means. A heating unit and / or a cooling unit having a tunnel structure through which the object is transported, wherein the object is in contact with the heating unit and / or the cooling unit, and heat conduction or the object is provided. Is configured such that the temperature of the object is controlled by heat conduction caused by contact with the transfer unit that has contacted the heating unit and / or the cooling unit. By doing so, the temperature of the object can be controlled at high speed and with high accuracy by the heat conduction by contact, and furthermore, the object is transported in the tunnel, so that continuous transport becomes possible and the productivity is improved. be able to.

[0011] In this specification, the term "thermal conduction" refers to a phenomenon in which heat is transferred from one part to another in contact with the inside of an object by molecular motion. If so, the phenomenon that heat is transferred between different objects is included.

The invention according to claim 2 is the constant temperature device according to claim 1, wherein the heat conduction is intermetallic heat conduction. In this case, the temperature of the object can be controlled at higher speed and with higher accuracy due to the high thermal conductivity of the metal.

According to a third aspect of the present invention, in the thermostatic apparatus according to the first or second aspect, the heating means and / or
Alternatively, the gap between the cooling means and the heat insulating cover covering the heating means and / or the cooling means is configured to be a minimum gap, and the invention according to claim 4 is the thermostatic apparatus according to claim 3, wherein The surface of the heat insulating cover is configured to be a mirror surface or a state close to a mirror surface, and the invention according to claim 5 is the constant temperature device according to any one of claims 1 to 4, wherein the tunnel structure and the transport means are provided. Is set as a minimum gap. As described above, by setting the gap from the heating unit and / or the cooling unit to the target to be the minimum gap, it is possible to prevent the temperature control from becoming unstable due to the gas in the gap. Further, by setting the surface of the heat insulating cover to a mirror surface or a state close to the mirror surface, radiant heat from the surface can be reduced.

According to a sixth aspect of the present invention, there is provided the constant temperature apparatus according to any one of the first to fifth aspects, wherein a plurality of the heating means and / or the cooling means are provided.
In this way, a plurality of temperature regions can be secured in the thermostat, and the temperature change can be set gently, or one thermostat can measure temperature characteristics at a plurality of set temperatures. it can.

According to a seventh aspect of the present invention, in the constant temperature apparatus according to any one of the first to sixth aspects, the transport means includes a carrier that accommodates the object and moves in the tunnel structure. The carrier transport device transports the carrier. In this case, since the object is thermally conducted through the carrier, high-speed and high-precision temperature control can be performed, and by continuously charging the carrier, the production capacity of the thermostat can be increased. Can be.

According to an eighth aspect of the present invention, in the thermostatic apparatus according to the seventh aspect, the transport pins of the carrier transport device are moved by being inserted into feed pin holes formed in the carrier. Thus, the carrier is pitch-fed. In this case, the object mounted on the carrier is also pitch-fed, and the object sequentially moves to the same position. Therefore, the control of the measurement probe is facilitated by linking the measurement probe with the operation of the carrier. Can be done.

According to a ninth aspect of the present invention, in the thermostatic apparatus according to the eighth aspect, an opening formed in the heating means and / or the cooling means, in which the transfer pin moves, is provided. The configuration is provided with an air shutoff device. With this configuration, the air between the heating unit and / or the cooling unit and the carrier is not replaced with the outside air, so that the accuracy of the temperature control of the object can be further improved.

According to a tenth aspect of the present invention, in the constant temperature apparatus according to any one of the first to ninth aspects, the heating means and / or the cooling means is a Peltier element. In this way, especially when cooling,
It can be cooled to a predetermined cooling temperature in a short time.

The invention according to claim 11 is the constant temperature apparatus according to any one of claims 1 to 10, further comprising a measuring probe for measuring a temperature characteristic of the object. With this configuration, the temperature characteristic can be measured without removing the target object at the measurement temperature from the thermostat, so that productivity can be improved.

According to a twelfth aspect of the present invention, in the thermostatic apparatus according to the eleventh aspect, air blocked from outside air is inserted into the insertion port of the measuring probe formed in the heating means and / or the cooling means. It has a configuration in which a chamber is formed. In this way, the object whose temperature is controlled is
Since it does not directly touch the outside air, the accuracy of temperature control can be further improved.

According to a thirteenth aspect of the present invention, in the thermostatic apparatus according to the eleventh or twelfth aspect, a plurality of the measurement probes are provided. With this configuration, even when the target object has a plurality of measured temperatures,
Measurement can be performed sequentially with a measurement probe corresponding to the measurement temperature.

[0022]

Embodiments of the present invention will be described below with reference to the accompanying drawings. [First Embodiment] FIG. 1 is a schematic perspective view for explaining a basic configuration of a constant temperature apparatus according to a first embodiment of the present invention. FIG. 2 is a schematic front view of the thermostat according to the present embodiment, and FIG. 3 is a schematic plan view of the thermostat according to the present embodiment.

In FIG. 1, FIG. 2 and FIG.
Includes a thermostat 10 having a tunnel structure, a carrier 20 on which an object (crystal oscillator) is mounted and moves in a tunnel of the thermostat 10, a carrier transport device 30 moving the carrier 20 in the tunnel, and a slide. A measuring probe 40 movably supported in the vertical direction by the device 41 for measuring the frequency characteristics of the quartz oscillator, and a cooling unit 50 disposed below the constant temperature bath 10 for cooling the heating surface of the Peltier element. And a pedestal 60 disposed on both sides of the thermostat 10.

Here, in the thermostat 1, the object whose temperature is to be controlled is a quartz oscillator, and the quartz oscillator is cooled to a temperature of -35 ° C. or lower in order to perform a temperature characteristic test. In this case, although not shown, the constant temperature device 1 covers the entire device with a cover, and is filled with dry air to prevent dew condensation. Further, the thermostatic apparatus according to the present invention is not limited to an object to be a quartz oscillator, but may be, for example, a device that requires a temperature characteristic test of a capacitor, an optical semiconductor element, and the like, and an object to be measured is also limited to a frequency characteristic. It is needless to say that the object can be appropriately changed within the technical idea of the present invention.

Next, the thermostat 10 and the cooling unit 50
Will be described with reference to the drawings. FIG.
FIG. 5 shows a schematic side cross-sectional view along the line A, and FIG. 5 shows a schematic enlarged view of the thermostat 10 of FIG. 4. FIG.
Shows a schematic exploded view of the thermostat and the cooling unit.

In FIG. 4, a cooling unit 50 disposed below the thermostat 10 includes a water-cooling jacket 51 disposed in contact with the lower surface of the Peltier element 81 and cooling water from the outside to the water-cooling jacket 51. A heat insulating hose 52 for circulation and a heat insulating material 53 covering the water cooling jacket 51 and the heat insulating hose 52 are provided. This cooling unit 50
, Cooling water flows inside with a water cooling jacket method,
A system is used in which cooling water is cooled and circulated outside.
A heat insulating material 76 is inserted between the lower surface of the tunnel structure 83 and the water cooling unit 50 to prevent natural convection of air.

As shown in FIG. 6, three water cooling jackets 51 are arranged side by side in the transport direction, and the cooling performance can be adjusted by changing the water temperature and flow rate of each water cooling jacket 51. . In this way, the thermostat 10 adjusts the cooling performance of each water-cooling jacket 51 when different positions in the transport direction, for example, positions near the entrance, near the center, and near the exit, are set to different temperatures. Temperature setting can be easily performed.
Note that the number of the water cooling jackets 51 is not limited to three, but can be increased or decreased depending on cooling conditions and the like. The cooling unit 50 is in surface contact with the lower surface of the Peltier element 81 whose upper surface is cooled and whose lower surface is heated,
The lower surface of the Peltier element 81 is forcibly cooled.

In FIG. 5, the thermostat 10 comprises a heat insulating cover 70 and cooling means 80. Here, the cooling means 80 is provided with a Peltier element 81 whose upper surface is cooled and its lower surface is heated by energization, and a tunnel structure 83 in surface contact with a cooling surface (upper surface) of the Peltier element 81 and a tunnel 82 formed. It consists of This way,
The object is faster and faster than heat transfer using gas as a heat medium due to heat conduction caused by surface contact with the carrier 20 (not shown) as transporting means in contact with the tunnel structure 83 as cooling means. The temperature of the object can be controlled with high accuracy. In addition, the temperature control device 1 includes a tunnel 82.
Since the object mounted on the carrier 20 is transported in the inside, the object can be continuously charged, and the productivity can be improved.

The tunnel structure 83 is composed of a lower tunnel structure 84 having a flat upper surface and an upper tunnel structure 85 having a tunnel 82 (groove-shaped concave portion) formed on the lower surface for inserting the carrier 20. The structure is such that maintenance can be easily performed. The tunnel 82 is not limited to the case where the tunnel 82 is formed in the upper tunnel structure 85, and the tunnel 82 may of course be formed in the lower tunnel structure 84. In addition, the tunnel 82 may be formed in both the upper tunnel structure 85 and the lower tunnel structure 84, and the upper tunnel structure 85 and the lower tunnel structure 84 may of course be integrated. .

In this embodiment, the object is transferred to the tunnel structure 8 via a carrier 20 as a transporting means.
3, but may be in contact with the tunnel structure 83 without passing through the carrier 20, or may be partially in contact with the tunnel structure 83 and partially in contact with the transporting means. By doing so, the temperature of the object can be controlled at higher speed and with higher accuracy than the heat conduction through the carrier 20.

Here, preferably, the tunnel structure 83 is used.
The carrier 20 may be made of metal, and the heat conduction to the object may be made of intermetallic heat. In this case, the temperature of the object can be controlled at higher speed and with higher accuracy. In addition, the contact surface relating to the heat conduction between the metals is to reduce the surface roughness to increase the contact area, or to apply a grease having excellent thermal conductivity such as silicon grease. The heat conduction efficiency due to the contact is increased, and the temperature of the object can be controlled at high speed and with high accuracy.

Preferably, as the material of the tunnel structure 83 and the carrier 20, a metal material having high thermal conductivity such as aluminum alloy or copper is used, and in consideration of abrasion resistance due to transportation, for example, aluminum is used. May be subjected to a hardening treatment such as an alumite treatment.

It is preferable that the heat capacity of the tunnel structure 83 be larger than the heat capacity of the carrier 20.
When the heat capacity of the tunnel structure 83 is increased, the carrier 2
Even when the heat is transferred to zero, the temperature change of the tunnel structure 83 is reduced, and the temperature of the tunnel structure 83 can be easily controlled.

The outer surface of the tunnel structure 83 is preferably mirror-finished. In this case, radiant heat from the surface can be reduced, and the temperature of the tunnel structure 83 can be further stabilized.

Further, the sectional shape of the tunnel 82 is
The size of the tunnel 82 should be similar to the side shape of the carrier 20 in the transport direction, and the size of the tunnel 82 should be as small as possible to minimize the air in the gap between the carrier 20 and the carrier 20 transported in the tunnel 82. By doing so, it is possible to minimize the temperature change of the tunnel structure 83 due to the air in the tunnel 82 being replaced with the surrounding air (outside air) from the tunnel entrance, exit, and other gaps. it can.

The carriers 20 to be transported are preferably configured to be transported continuously without interruption so that no gap is formed between the carriers 20. In this case, air is generated between the carriers 20. Since the air cannot be interposed, the replacement of the air inside the tunnel 82 with the outside air can be prevented, and the temperature change of the air inside the tunnel 82 and the tunnel structure 83 can be suppressed.

The tunnel structure 83 has an upper surface and side surfaces,
The structure is covered with a heat insulating cover 70 for preventing heat radiation to the surroundings and heat absorption from the surroundings. The heat insulating cover 70 includes a heat insulating cover outer wall 71, a heat insulating material 72, and a heat insulating cover inner wall 73.

The heat-insulating cover outer wall 71 and the heat-insulating cover inner wall 73 are mirror-finished stainless steel plates, and the two wall surfaces 71 and 73 are heat reflecting plates, and have a structure for suppressing radiant heat. Further, the heat insulating material 72 is a rubber foam material having a low thermal conductivity, and the heat insulating cover outer wall 7 is provided.
1 and a structure sandwiched between the heat insulating cover inner wall 73.

The heat insulating cover 70 has a hinge 74 at the top.
The upper part can be opened and closed for maintenance and the like. This upper portion is fixed by the retainer 75 during operation.

Further, the gap between the heat insulating cover inner wall 73 and the tunnel structure 83 is preferably set to be the minimum gap. In this case, almost no air exists between the heat insulating cover inner wall 73 and the tunnel structure 83, The heat transfer by natural convection of the air can be neglected and the temperature of the tunnel structure 83 can be stabilized even when the temperature is high as well as when the temperature is low.

The minimum gap is 0.5 mm or more and 3 mm or more.
The reason is that the tunnel structure 83 is not less than 0.5 mm so that even when the tunnel structure 83 is thermally expanded, the tunnel structure 83 can be insulated by the heat insulating cover inner wall 73.
When the thickness is 3 mm or less, heat transfer due to natural convection of air can be suppressed, and an effect as a labyrinth for preventing outside air from entering can be exhibited.

As shown in FIG. 6, the Peltier element 81 is controlled by measuring the temperature of the tunnel structure 83 using a temperature measuring element 86 embedded in the lower tunnel structure 84 and feeding it back. In the present embodiment, six Peltier elements 81 are arranged on the lower surface of the tunnel structure 83 in a row from the entrance toward the exit, and the entrance is an entrance, which is an introduction section, in order to prevent a temperature drop at the entrance. Two Peltier elements 8 on the side
1 and four Peltier elements 81 at the central part and the outlet side, which are the measuring part, and the Peltier elements 8 between the introduction part and the measuring part.
1 are controlled separately.

Further, one thermometer 86 is provided for each of the two Peltier elements 81. For example, when the target set temperature is -35 ° C., the temperature at the entrance and the exit of the tunnel structure 83 The difference can be controlled within about 2 ° C. If a temperature measuring element 86 is provided for each Peltier element 81 and the temperature is controlled for each Peltier element 81, the temperature distribution of the tunnel structure 83 can be made more accurate and constant.

The temperature stability at the measurement point, which is important in the temperature characteristic test, is determined by comparing the temperature indicated by the temperature sensor 86 for feedback control with the actual tunnel structure 83.
The difference from the temperature of the tunnel 82 is about 0.
3 ° C., about 0.3 mm on the lower surface (transfer surface) of the tunnel 82.
The temperature is 1 ° C. or less, and the temperature of the object mounted on the carrier 20 placed in the tunnel 82 is about 0.1 ° C. or less, so that the temperature can be controlled very accurately. Note that this high accuracy is not limited to the case where the target set temperature is set to -35 ° C., and the same high accuracy temperature control is performed for the target set temperature in the range of about −40 ° C. to about 100 ° C. It can be performed.

Further, the temperature measuring element 87 for guaranteeing the absolute temperature in the temperature characteristic test is buried in the lower tunnel structure 84 one pitch before the fixed side point. That is, since the target object is measured immediately after one pitch is conveyed, it is necessary to guarantee the absolute temperature one pitch before the side fixed point.

Next, the carrier transport device 30 will be described with reference to the drawings. FIG. 7 is a schematic perspective view for explaining the structure of the carrier according to the present embodiment.
FIG. 8 is a schematic perspective view of a main part for describing the carrier transport device according to the present embodiment.

As shown in FIG. 7, the carrier 20 has a shape of a rectangular flat plate, and the work pockets 21 for accommodating the objects are arranged at equal pitches in the carrying direction and 10 × 10.
It is formed in two stages, and has ten feed pin holes 22 at the same pitch as the work pocket 21 in the loading direction. Therefore, 20 objects are mounted on one carrier 20 and are mounted side by side in two stages.
When measuring an object, two probes can be measured simultaneously by arranging the measurement probes 40 in two rows.

The work pocket 21 is formed with a recess so as to accommodate a rectangular flat object, and the bottom surface of the recess is in surface contact with the lower surface of the object to conduct heat.

Further, the side surface of the concave portion has a shape and a size capable of positioning the object, whereby the measuring probe 40 can easily come into contact with the measurement point of the object. Further, the carrier 20 reduces the gap between the side surface of the concave portion and the side surface of the object, and the gap from the upper surface of the object to the upper surface of the carrier 20 when the thickness of the object is smaller than the depth of the concave portion. The configuration is such that no extra air can be present, and by doing so, natural convection due to the extra air is suppressed, and the temperature of the object is stabilized.

The shape of the carrier 20 is not limited to the above-mentioned shape, but may be various shapes according to the shape of the object and the number of mounted objects. Also, the arrangement of the work pockets 21 is, of course, not limited to 10 × 2 rows. In the present embodiment, the number of rows is two.
The number of rows may be three or more.

The carrier 20 is, as shown in FIG.
The transport pins 33 arranged in a pair at six locations are lowered by the horizontal drive source 31 such as an air cylinder and the vertical drive source 32 (see FIG. 3) and fitted into the feed pin holes 22. The operation of moving the carrier 20 by one pitch in the carrying direction, moving up by one pitch in the carrying direction, and moving by one pitch in the direction opposite to the carrying direction is repeated.
Is pitch-fed. In FIG. 8, the upper tunnel structure 85 and the heat insulating cover 70 are not shown for easy understanding.

Here, the carrier 20 is set around the entrance of the tunnel structure 83 in parallel with the transport direction, and the carrier 20 (the next carrier in the figure) is
By a cylinder (not shown) that operates in conjunction with 3,
It moves to the entrance of the tunnel structure 83. The carrier pin 33 of the carrier 20 is inserted into the feed pin hole 22 in the insertion direction, and is carried into the tunnel 82.

Further, six carriers 20 enter the tunnel 82, and one carrier 2 enters at the entrance of the tunnel 82.
0 is set, and six sets of transport pins 3 are set.
3 are arranged at substantially equal intervals. This way,
The fifth carrier 20 from the entrance side in the tunnel 82
Is accurately moved by the distance the transport pin 33 moves. Note that, as described above, the transport pins 33 are not limited to the case where two pairs are provided at six locations, but one or a plurality of the transport pins 33 are provided at one location or at multiple locations. It is good also as a structure provided.

That is, as shown in FIG. 9, only one set of the transport pins 33 may be provided around the entrance of the tunnel structure 83. That is, the positioning of each carrier 20 is not performed, and the inner dimension of the tunnel 82 and the carrier 20 are not positioned.
By managing the external dimensions, a plurality of continuous carriers 20 are transported only by the transport pins 33 at the entrance without using the intermediate transport pins 33. In this way, when the positioning accuracy of the probe is rough, the structure of the carrier transport device can be simplified. Although not shown, a structure in which the carrier 20 is moved from the side surface of the carrier 20 instead of the transport pin 33 may be employed. In addition, direct conveyance in which an object is placed on a belt and conveyed without using the carrier 20 can also be employed.

As shown in FIGS. 8 and 10, the probe head 42 is disposed between the transport pins 33 of the fourth and fifth applications from the entrance side of the tunnel 82.
The transport pins 33 of the fourth and fifth applications are connected to the measuring probe 4.
It can also function as a positioning pin for zero.

Next, the air blocking device 90 provided in the upper tunnel structure 85 will be described with reference to the drawings. FIG. 11 is a schematic enlarged cross-sectional view for explaining the air blocking device. FIG. 12 is a schematic enlarged perspective view for explaining the air blocking device.

In FIG. 11, since the transport pins 33 move in the transport direction, the opposite transport direction, and the vertical direction, the heat insulating cover 70 and the upper tunnel structure 85 have elongated holes for the transport pins 33 to move. It is arranged.

The air blocking device 90 includes a shielding member 91 having a long hole formed therein, which covers the long hole of the upper tunnel structure 85 from above, and is fitted in the shielding member 91 so as to be reciprocally movable in the loading direction. An air-blocking member 92 is provided with a through-hole through which 33 passes.

As shown in FIG. 12, the shielding member 91 has a groove into which the air blocking member 92 is fitted, and a slot formed on the bottom surface of the groove to allow the transfer pin 33 to move. It comprises a member main body 93 and an upper cover 94 which is provided on the upper surface of the shielding member main body 93 and has an elongated hole formed in which the transport pin 33 moves.

In the air blocking device 90 having the above-described structure, the long hole formed in the upper tunnel structure 85 is blocked from the outside air by the bottom surface of the shielding member main body 93, and is further formed on the bottom surface of the shielding member main body 93. The long hole is the air blocking member 9
Blocked by 2. Therefore, the air shutoff device 90
Since the transport pin 33 always penetrates the through hole of the air blocking member 92, even if the transport pin 33 moves in the transport direction, the reverse transport direction, and the vertical direction, the outside air and the tunnel
2 can be almost completely shut off, and the temperature of the portion of the upper tunnel structure 85 where the elongated holes for the transfer pins 33 move can be controlled with high precision.

Next, the air chamber 96 of the measurement probe 40 will be described with reference to the drawings. FIG. 13 is a schematic enlarged view for explaining an air chamber of the measurement probe, and FIG. 13A is a cross-sectional view when no air chamber is formed.
(B) is a cross-sectional view of the state where the measurement probe is not measuring when the air chamber is formed, and (c) is a cross-sectional view of the state where the measurement probe is measuring when the air chamber is formed. Is shown.

In FIG. 10A, the insertion port 95 of the measurement probe 40 opened on the upper surface of the upper tunnel structure 85 and the heat insulating cover 70 is configured so as not to contact the measurement probe 40. , About 0.5mm on one side
Are formed. With this configuration, when the measurement probe 40 moves in the vertical direction, the insertion port 95
Are acting as cylinders, and the measurement probe 40 acts as a piston, the air inside the tunnel 82 is discharged to the outside of the tunnel structure 83, and the air outside the tunnel structure 83 is blown into the tunnel 82, and the temperature of the object is reduced. This was one of the factors that made control unstable.

On the other hand, as shown in FIGS. 9B and 9C, the insertion port 95 is expanded inside the upper tunnel structure 85 and an air chamber 96 is provided, so that the measuring probe 40 can be moved up and down. Moving in the direction, the air in the tunnel 82 will be replaced by the air in the air chamber 96, and the air temperature in the air chamber 96 is substantially equal to the air temperature in the tunnel 82, so that Temperature control can be performed with higher accuracy. Further, the gap between the outer periphery of the main body of the measurement probe 40 and the insertion port 95a is reduced, and the measurement probe 4
Even if 0 moves upward, it is preferable to secure the above-mentioned gap. In this case, the effect of the labyrinth seal can reduce the replacement of the air in the air chamber 96 with the outside air. That is, by forming the air chamber 96, the air in the air chamber 96 is replaced with the outside air, but the outside air is not directly replaced with the air in the tunnel 82.

Next, the operation of the constant temperature apparatus 1 having the above configuration will be described. When power is supplied to each Peltier element 81, the constant temperature device 1 cools the metal tunnel structure 83 that is in surface contact with the upper surface of the Peltier element 81, while the lower surface of the Peltier element 81 whose temperature rises is cooled by the cooling unit 50. You. Here, the tunnel structure 83 is a Peltier device 8
High-speed and high-precision temperature control is performed by the intermetallic heat conduction from the step (1).

When the temperature of the tunnel structure 83 is lowered to a predetermined temperature by each Peltier element 81, the carrier 20 carrying the object is carried to the entrance of the tunnel 82. The carrier 20 placed at the entrance of the tunnel 82 is moved downward by the transport pins 33 of the carrier transport device 30 being fitted into the feed pin holes 22 and subsequently moving by the pitch length in the transport direction. , Is transported into the tunnel 82 by the pitch length. Subsequently, the transport pin 33 is
The transport pin 33 rises and comes out of the feed pin hole 22,
It moves in the opposite direction to the transport direction and waits for the next transport time. By repeating this operation, the objects mounted on the carrier 20 are sequentially transported to the tunnel 82.

The transported object is first loaded into the carrier 20
Is temperature-controlled by the intermetallic heat conduction from the tunnel structure 83, and subsequently, the temperature of the object is controlled by the intermetallic heat conduction from the carrier 20. As described above, the temperature of the target object is controlled by the heat conduction between the metals, so that high-speed and high-precision temperature control is performed.

Further, the thermostat 1 includes a tunnel structure 83.
The gap between the carrier and the carrier 20 and the gap between the tunnel structure 83 and the heat insulating cover 70 are set to the minimum gap.
, That is, a configuration in which the bad influence of the outside air is completely eliminated. Further, since the constant temperature apparatus 1 is of the in-line type by providing the tunnel structure 83, there is no need to perform unnecessary work such as placing an object, and the productivity can be improved.

When the carrier 20 is transported immediately below the measurement probe 40, the measurement probe 40 descends, and the temperature characteristic of the object is measured. That is, the object in the carrier 20 starts cooling from the entrance of the tunnel 82 and reaches the position immediately below the measurement probe 40.
It is configured to reach the target set temperature. Therefore, the production capacity of the thermostat 1 is determined by the transport speed, the time required for controlling the temperature of the object, and the length of the thermostat 10.

The thermostat 1 is provided with a measuring probe 40.
Are arranged in two rows, and the objects are mounted on the carrier 20 in two rows, so that two objects can be measured at the same time, and the carrier 20 is continuously connected to the tunnel 8.
2, the temperature characteristics of the object can be measured in a short time without interruption.

As described above, according to the constant temperature apparatus 1 according to the first embodiment, the tunnel structure using an aluminum alloy or the like having a high thermal conductivity blocks heat conduction and radiant heat to generate natural convection as much as possible. Instead, by covering the object with a heat insulating cover that efficiently insulates the surroundings, the object can be rapidly heated and cooled, and highly accurate temperature control can be performed. Further, by using a Peltier element as a heating / cooling source, more accurate temperature control can be performed.

[Second Embodiment] Next, a second embodiment of a constant temperature apparatus according to the present invention will be described with reference to the drawings. FIG. 14 is a schematic perspective view for explaining the basic configuration of the constant temperature apparatus according to the second embodiment of the present invention. In the figure, the thermostat is an air-cooling system in which a cooling unit is used to blow and cool the fin-type heat sink 34 with a fan 35 or the like instead of the water-cooling jacket. Other structures and operations are the same as the thermostat of the first embodiment. Same as 1.

That is, if the target set temperature is within the temperature permitted by the Peltier element,
Even at a low temperature of about −40 ° C. or less, or about 100 ° C.
Although it functions well even at a high temperature of ℃ or more, if the target set temperature is not low enough to require a water-cooled jacket, the constant temperature device of the second embodiment shown in FIG. Instead, a method is used in which air is cooled by blowing air to the fin type heat sink 34 with a fan 35 or the like.

The cooling method is not limited to the above method, and is not shown. For example, a generally known cooling method such as a method of increasing the heat radiating area by using a heat pipe or the like for cooling is used. Is effective enough. Furthermore, a method of efficiently cooling the heat sink using a heat separator or the like is also effective.

In the above embodiment, the same effect can be obtained by using an electric heater such as a ceramic heater or a cartridge heater instead of the Peltier element in the case of heating. In other words, it is impossible or difficult to stabilize the temperature with the heater in the region from normal temperature to low temperature, but it can function sufficiently in the high temperature region. Also in the low temperature region, the same effect can be obtained by installing a heat medium such as cooling water or cooling gas on the lower surface or side surface of the tunnel. In this case, the responsiveness and the temperature stability are inferior to those of the Peltier element, but the thermostat itself can be simplified.

Further, in the thermostatic apparatus of the above embodiment, the measurement point is one in the thermostat, but as shown in FIG. 15, the measurement points in the thermostat are increased, and the measurement probe is set to a plurality of measurement points. By arranging 40, measurement under the same temperature and different measurement conditions, for example, in a quartz oscillator,
Resistance measurement, reference frequency measurement, and the like in a room temperature inspection can be performed. In addition, this thermostatic apparatus can measure characteristics at different temperatures by increasing the number of Peltier elements and controlling each Peltier element. In addition, this thermostat creates a temperature gradient in the tunnel,
By providing measurement points at a plurality of locations, it is possible to perform measurement with a temperature difference or measurement under different measurement conditions as described above.

In the above embodiment, the heat insulating cover is not in contact with the tunnel-type thermostat, but the same effect can be obtained by inserting a heat insulating material. Further, if vacuum heat insulation is used instead of heat insulation, the effect is further increased. In the present invention, the metal is mirror-finished to block radiant heat,
Instead, it is also effective to use a glass or resin mirror or a heat insulating sheet in which aluminum is deposited on a polyester film.

In the thermostatic apparatus according to the present invention, the thermostatic apparatus using heat conduction between metals, the thermostatic apparatus having a minimum gap between the heating means and / or the cooling means and the heat insulating cover, the tunnel structure and the transport means. A constant temperature device having a minimum gap, a constant temperature device having a plurality of heating means and / or cooling means, a constant temperature device having a transport means as a carrier transport apparatus, a constant temperature apparatus for feeding a carrier at a pitch, and an air shutoff apparatus. Constant temperature device, constant temperature device using Peltier element, constant temperature device with measuring probe, constant temperature device with air chamber,
The constant temperature apparatus provided with a plurality of measurement probes can be implemented independently, and can also be implemented as a combination of them, and it is needless to say that the respective effects can be exhibited.

[0078]

As described above, the thermostatic apparatus according to the present invention can perform high-speed and high-precision temperature control by utilizing heat conduction between metals having high heat transfer efficiency, and can perform tunnel control. By using the heating means and / or the cooling means having a structure, the temperature is controlled while the object is being conveyed, so that the productivity can be improved.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view for explaining a basic configuration of a thermostat according to a first embodiment of the present invention.

FIG. 2 is a schematic front view for explaining a basic configuration of the thermostat according to the first embodiment of the present invention.

FIG. 3 is a schematic plan view for explaining a basic configuration of the thermostat according to the first embodiment of the present invention.

FIG. 4 is a schematic side sectional view taken along the line AA of FIG. 3;

FIG. 5 is a schematic enlarged view of the thermostat of FIG. 4;

FIG. 6 is a schematic exploded view of a thermostat and a cooling unit of the thermostat according to the first embodiment of the present invention.

FIG. 7 is a schematic perspective view for explaining the structure of the carrier of the thermostat according to the first embodiment of the present invention.

FIG. 8 is a schematic perspective view of a main part for describing a carrier transport device of the constant temperature device according to the first embodiment of the present invention.

FIG. 9 is a schematic perspective view of a main part for describing an application example of the carrier transport device of the constant temperature device according to the first embodiment of the present invention.

FIG. 10 is a schematic enlarged perspective view of a main part for describing a positioning effect of a transport pin of the thermostatic apparatus according to the first embodiment of the present invention.

FIG. 11 is a schematic enlarged sectional view taken along line BB of FIG. 3;

FIG. 12 is a schematic enlarged perspective view illustrating an air shutoff device according to the first embodiment of the present invention.

FIGS. 13A and 13B are schematic enlarged views for explaining an air chamber of the measurement probe, wherein FIG. 13A is a cross-sectional view when no air chamber is formed, and FIG. FIG. 3C is a cross-sectional view showing a state where the measurement probe is not performing measurement, and FIG. 4C is a cross-sectional view showing a state where the measurement probe is performing measurement when an air chamber is formed.

FIG. 14 is a schematic perspective view for explaining a basic configuration of a thermostat according to a second embodiment of the present invention.

FIG. 15 is a schematic perspective view for explaining an application example of the thermostat according to the present invention.

FIG. 16 is a schematic diagram for explaining a thermostat according to a conventional example.

[Explanation of symbols]

 Reference Signs List 1 constant temperature device 10 constant temperature bath 11 Peltier element 20 carrier 21 work pocket 22 feed pin hole 30 carrier transport device 31 horizontal drive source 32 vertical drive source 33 transport pin 34 fin type heat sink 35 fan 40 measurement probe 41 slide device 42 Probe head 50 Cooling unit 51 Water cooling jacket 52 Insulation hose 53 Insulation material 60 Pedestal 70 Insulation cover 71 Insulation cover outer wall 72 Insulation material 73 Insulation cover inner wall 74 Hinge 75 Cage 76 Insulation material 80 Cooling means 81 Peltier element 82 Tunnel 83 Tunnel structure 84 Lower tunnel structure 85 Upper tunnel structure 86, 87 Temperature detector 90 Air blocking device 91 Shielding member 92 Air blocking member 93 Shielding member main body 94 Upper cover 95, 95a Insertion port 96 Air chamber Reference Signs List 100 constant temperature device 101 constant temperature bath 102 line conveyor

Claims (13)

[Claims] 1. A constant temperature apparatus comprising: transport means for transporting an object whose temperature is to be controlled; and heating means and / or cooling means having a tunnel structure in which the object is transported by the transport means. And the heat conduction by contacting the object with the heating means and / or the cooling means, or the heat conduction by contacting the object with the transfer means in contact with the heating means and / or the cooling means A temperature control device for controlling the temperature of the object. 2. The constant temperature apparatus according to claim 1, wherein said heat conduction is intermetallic heat conduction. 3. The constant temperature apparatus according to claim 1, wherein a gap between the heating unit and / or the cooling unit and a heat insulating cover that covers the heating unit and / or the cooling unit is a minimum gap. 4. The constant temperature apparatus according to claim 3, wherein a surface of the heat insulating cover is a mirror surface or a state close to a mirror surface. 5. The constant temperature apparatus according to claim 1, wherein a gap between the tunnel structure and the transfer means is a minimum gap. 6. The constant temperature apparatus according to claim 1, wherein a plurality of said heating means and / or cooling means are provided. 7. The carrier according to claim 1, wherein said transport means comprises a carrier that accommodates said object and moves in said tunnel structure, and a carrier transport device that transports said carrier. A thermostat according to claim 1. 8. A transport pin of the carrier transport device,
The constant temperature apparatus according to claim 7, wherein the carrier is pitch-fed by being inserted into a feed pin hole formed in the carrier and moving. 9. The constant temperature apparatus according to claim 8, further comprising an air shutoff device for shielding an opening formed in said heating means and / or cooling means, in which said transport pin moves. . 10. The constant temperature apparatus according to claim 1, wherein the heating unit and / or the cooling unit is a Peltier device. 11. The constant temperature apparatus according to claim 1, further comprising a measurement probe for measuring a temperature characteristic of the object. 12. The constant temperature apparatus according to claim 11, wherein an air chamber cut off from outside air is formed at an insertion port of the measuring probe formed in the heating means and / or the cooling means. 13. The constant temperature apparatus according to claim 11, wherein a plurality of said measurement probes are provided.