JP2001281294A - Device temperature characteristic measuring instrument - Google Patents

Abstract

PROBLEM TO BE SOLVED: To simplify measures against dew condensation and to shorten the time from word feeding to the start of inspection by improving the precision of measured temperature by suppressing a flow of circumferential air when temperature characteristics of a device (work) are measured. SOLUTION: A tunnel structure is formed by a precooling part and heating part 4 and a temperature test part 5, a Peltier element 8 is arranged on the reverse surface, and the temperature of the tunnel bottom surface that a carrier 1 comes into contact with and the temperature in the space in the tunnel that the work 3 contacts are measured by 1st and 2nd temperature sensors 6 and 7. The precooling part and heating part 4 is controlled by using those sensors 6 and 7 to make small the temperature difference nearby a measurement part in the tunnel, thereby setting the temperature of the work 2 with high precision.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a device temperature characteristic measuring device, and more particularly to a device temperature characteristic measuring device using a Peltier element.

[0002]

2. Description of the Related Art As such a device temperature characteristic measuring device, for example, a low and high temperature handler device using an electronic refrigerator (Japanese Patent Laid-Open No. 61-068568) is known. This document discloses that a Peltier element is used to contact the IC, cool the IC, and install an air curtain for preventing condensation during cooling.

In general, there is also known a technique in which when measuring the temperature characteristics of a device, a jig in which a large number of objects to be measured (workpieces) are mounted in a constant temperature bath and the temperature is stabilized is measured.

[0004]

In the conventional low-temperature and high-temperature handler described above, the air curtain is adjacent to the device, and when air is blown out from the blowout port, the surrounding air is entrained. As a result, In addition, an air flow is likely to occur near the device. In the measurement of such a device, if there is an air flow, the position where the flow is in contact will be more thermally affected, and as a result, it will be difficult to set the test temperature precisely, and it will have a temperature characteristic and Accurate measurement of strictly specified devices is not possible. In addition, when such an air curtain is used, it is necessary to take measures against dew condensation of a complicated structure.

In the case of using a constant temperature bath, since air is used as a medium for cooling / heating the work, there is a problem that the heat transfer coefficient is poor. Therefore, the heating / cooling time is required for the poor transmission rate, and a large amount of time is required from the input of the work to the start of the inspection.

An object of the present invention is to measure a workpiece,
It is an object of the present invention to provide a device temperature characteristic measuring device capable of suppressing the flow of air as much as possible, improving the accuracy of the measurement temperature, simplifying the measures against dew condensation, and shortening the time from the work input to the start of the inspection.

[0007]

According to the present invention, there is provided a device temperature characteristic measuring apparatus, comprising: a pre-cooling section / heating section formed in a tunnel structure for carrying a metal carrier on which an object to be measured is loaded and maintaining a constant temperature; The metal carrier is carried in after the pre-cooling unit / heating unit, and a temperature test unit formed in a tunnel structure for testing the characteristics of the work at a set temperature; A probe block for testing the workpiece, a first Peltier element mounted outside a bottom surface of the pre-cooling unit / heating unit and the temperature test unit, and a bottom surface of the pre-cooling unit / heating unit and the temperature test unit. A first temperature sensor provided inside the first temperature sensor; a second temperature sensor disposed in a space inside the temperature test unit and near a test position for testing the work; Configured to genus carrier and a transfer mechanism for carrying the pre-cooling unit / heating unit and the temperature test unit.

The pre-cooling section / heating section and the temperature test section of the present invention are formed by covering with a heat insulating cover in which the Peltier element is embedded.

The transport mechanism of the present invention transports the metal carrier one pitch at a time from the temperature test section using a transport claw having a pin engaging with a perforation formed in the metal carrier. It is formed so that.

The pre-cooling / heating unit and the temperature test unit of the present invention can be formed separately or integrally in a case of a gas having a low dew point.

In the precooling / heating unit and the temperature test unit according to the present invention, an intermediate plate made of a metal material is disposed between a bottom surface and an upper surface, and the metal carrier can be carried onto the intermediate plate. .

In the precooling / heating unit and the temperature test unit according to the present invention, a bottom plate made of a metal material is disposed on a bottom surface,
The metal carrier can be carried on the bottom plate.

Further, the middle plate or the bottom plate of the present invention is formed with a third temperature sensor built in near the test position.

Further, another device temperature characteristic measuring apparatus of the present invention carries in a metal carrier carrying an object to be measured,
Pre-cooling unit formed in a tunnel structure that maintains a constant temperature /
A heating section, a temperature test section formed in a tunnel structure for carrying in the metal carrier following the pre-cooling section / heating section, and testing the characteristics of the workpiece at a set temperature, and introduced into the temperature test section from outside. A probe block for testing the work on the metal carrier, a first Peltier element mounted outside a bottom surface of the pre-cooling unit / heating unit and the temperature test unit, a pre-cooling unit / heating unit and the first A first temperature sensor provided inside the bottom surface of the temperature test section, a fourth temperature sensor arranged in a space inside the probe block and near a test position for testing the work, And a transport mechanism for transporting the carrier into the preliminary cooling / heating unit and the temperature test unit.

The pre-cooling section / heating section and the temperature test section of the present invention are formed by covering with a heat insulating cover in which the first Peltier element is embedded.

Further, the transport mechanism of the present invention transports the metal carrier one pitch at a time from the temperature test section by using a transport claw having a pin engaging with a perforation formed in the metal carrier. It is formed so that.

Further, the pre-cooling section / heating section and the temperature test section of the present invention can be formed separately or integrally in a case of a gas having a low dew point.

In the pre-cooling section / heating section and the temperature test section of the present invention, a middle plate made of a metal material is arranged between a bottom surface and a top surface, and the metal carrier can be carried on the middle plate. .

In the precooling / heating unit and the temperature test unit according to the present invention, a bottom plate made of a metal material is disposed on a bottom surface.
The metal carrier can be carried on the bottom plate.

Further, the middle plate or the bottom plate of the present invention is formed with a fifth temperature sensor built in near the test position.

Further, the probe block according to the present invention may include a second Peltier element for controlling the measured value of the fourth temperature sensor to a predetermined value, outside the probe block.

[0022]

Next, an embodiment of the present invention will be described with reference to the drawings.

FIG. 1 is a perspective view of a device temperature characteristic measuring apparatus for explaining a first embodiment of the present invention. As shown in FIG. 1, the present embodiment is an apparatus for controlling the temperature of a device under test (work) 2 using a Peltier element 8 and measuring the characteristics, using a tunnel-like structure, and The tunnel-like structure is heated by the Peltier element 8 /
It is characterized in that the temperature is controlled by cooling, and the temperature of the work 2 is controlled by allowing the work 2 to pass therethrough. In particular, the tunnel is formed by the pre-cooling / heating unit 4 and the temperature test unit 5 to reduce the difference between the temperature of the air inside the tunnel and the temperature of the inner wall of the tunnel and measure the temperature of the air inside the tunnel. Is to improve the accuracy of the temperature of the work 2 by correcting the temperature of the work 2.

In FIG. 1, a carrier 1 made of a metal such as aluminum having high thermal conductivity has a work 2 mounted thereon.
The feed hole 3 is formed in the lateral direction. In addition, the pre-cooling / heating unit 4 and the temperature test unit 5 that constitute the tunnel structure
Is made of a metal such as aluminum having high thermal conductivity, and the metal carrier 1 is passed through the inside. The temperature of the tunnel structure is controlled by a Peltier element 8 connected to the lower surface so as to maintain a constant temperature. The Peltier element 8 includes a heat radiating section 11 at the lower portion, while the pre-cooling / heating section 4, the temperature test section 5, and the Peltier element 8 are covered with a panel-shaped heat insulating cover 9 made of a heat insulating material. A probe block 12 having a plurality of needles 13 for testing the characteristics of the work 2 when the metal carrier 1 is carried in is introduced into the center of the upper surface of the heat insulating cover 9 covering the temperature test section 5. A through-hole 10 is formed, and a transport claw introduction hole 14 for a transport claw (not shown) for feeding the metal carrier 1 at every pitch is formed on the side of the upper surface. Further, the pre-cooling / heating unit 4 and the temperature test unit 5 each include a first temperature sensor 6 for detecting a temperature near the bottom surface where the carrier 1 is in contact. These first temperature sensors 6 are both led out to the outside, and the detected temperature is used for controlling the temperature of the work 2. In addition, only the temperature test section 5 is provided with the second temperature sensor 7 for measuring the temperature of the gap near the probe inside the tunnel.

When the carrier 1 is conveyed inside the tunnel at a constant pitch and reaches just below the probe block 12, the probe block 12 is lowered and the probe needle 13
Makes contact with the work 2 and measures the electrical characteristics of the work 2. In addition, although it rises after the measurement, the through hole 10 is kept closed by the probe block 12. When the carrier 1 passes through the pre-cooling section / heating section 4 as a tunnel structure and the temperature test section 5, it is in contact with the lower surface of the tunnel structure, so that the work 2 is heated / cooled by the temperature inside the tunnel. , The set test temperature is reached. On the other hand, the gap in the tunnel, when the carrier 1 is inserted,
Since the work 2 is reduced as much as possible, the temperature of the work 2 considerably approaches the temperature of the tunnel. In short, since the lower surface of the work 2 is in contact with the carrier 1 and the upper surface is in contact with the air, the work 2 is determined based on the measured air temperature and the tunnel temperature.
Can be accurately calculated.

FIGS. 2 (a) and 2 (b) are a perspective view of the pre-cooling / heating unit and the temperature test unit and a perspective view of the transport claws in FIG. 1, respectively. First, as shown in FIG. 2A, the pre-cooling / heating unit 4 and the temperature test unit 5 forming the tunnel structure are very close to each other, but a gap is provided between them. So that the number of traffic is reduced. The pre-cooling section / heating section 4 includes a box-shaped section 4A and a lid section 4B. Similarly, the temperature test section 5 is also formed of a box-shaped section 5A and a lid section 5B, and both are fixed by fixtures 17 such as bolts. You. The lid 5B of the temperature test section 5 includes
A through-hole 15 through which the probe block passes and a transport claw introduction hole 16 are formed corresponding to the holes in the heat insulating cover 9 of FIG.

Usually, the carrier 1 is carried in at room temperature,
Since the test temperature ranges from about -30 degrees at low temperatures to about 80 degrees at high temperatures, the carrier 1 needs to be cooled / heated as quickly as possible. Therefore, pre-cooling /
The heating unit 4 is set at a temperature farther from room temperature than the test temperature, so that the temperature can be set quickly.

Next, as shown in FIG. 2 (b), the carrier 1 is transported by the transport claws 18. The transport claws 18 have an L-shaped structure. A pin 19 is provided for engaging the feed hole 3 to feed the carrier 1 in one direction by one pitch, and at the other end, a feed mechanism (not shown) for controlling the movement of the transport claws 18.
Is attached. The transport claw 18 has the pin 19 introduced into the transport claw introduction hole 16 in FIG. 2A, and operates in the order of A, B, C, and D shown in FIG. 2B by the feed mechanism. That is, A lowers the transport claw 18 and inserts it into the feed hole 3, B feeds the carrier 1 by one pitch, C pulls out the transport claw 18 from the feed hole, and D returns the transport claw 18 by one pitch. The transport claws 18 are also provided at the entrance / exit of the tunnel as required. In that case, the introduction hole 16 is also provided at the entrance / exit.

FIGS. 3A and 3B are cross-sectional views taken along lines AA and BB in FIG. 1, respectively. First, FIG.
As shown in (a), the pre-cooling / heating unit 4 has an insulating cover 10 attached to the outer wall to prevent the temperature of the tunnel from escaping to the outside air. Here, the Peltier element 8
Are arranged so as to be in close contact with the lower surface of the pre-cooling section / heating section 4 and to line up in the direction of travel of the carrier 1, and to radiate heat from the tunnel according to the direction of the applied current. To move to and vice versa. Although a control mechanism of the current applied to the Peltier element 8 is not shown, it can be performed by, for example, a temperature controller using PID control and a power amplifier. That is, the first temperature sensor 6 embedded in the lower surface of the pre-cooling section / heating section 4
Is input to the temperature controller, and the magnitude and direction of the current of the Peltier element 8 are controlled so that the temperature of the first temperature sensor 6 becomes constant by feedback control. The PID controller and the power amplifier use existing technologies. Further, the heat radiating section 9 is constituted by, for example, a water jacket or a heat radiating fin through which chiller water is passed.

Next, as shown in FIG. 3 (b), the air inside the temperature test section 5 can flow from the entrance and exit of the tunnel to the outside air. Moreover, since the temperature of the outside air is not particularly controlled, the temperature of the air in the tunnel is not always the same as the temperature of the tunnel itself. The temperature of the lower surface of the tunnel is controlled by a Peltier element 8, but the upper surface of the tunnel is covered with a heat insulating cover 9, but exchanges heat with the outside air at room temperature. To a steady state at a temperature close to room temperature. Therefore, since the upper surface of the work 2 comes into contact with air slightly above room temperature than the temperature of the first temperature sensor 6, if the temperature of the first temperature sensor 6 is used as the work temperature, the accuracy is not high. May be enough. Therefore, probe block 1
A second temperature / temperature sensor 7 is provided in the vicinity of 2 to measure the temperature of air.

The needle (probe) 13 of the probe block 12 directly contacts the terminal of the work 2, but is embedded in the probe block 12. Therefore, work 2
Is finally determined by the balance between the heat transfer from the air in the tunnel and the heat transfer by contact with the carrier 1. A temperature sensor is embedded in the work 2 to be inspected, and the ratio is determined by experiment. . Although it depends on the size and material of the work 2 and the set temperature, the heat transfer from the carrier 1 largely contributes about two to three to ten times as much as the heat transfer from the air. Once the ratios are determined by experiment, the actual test assumes that each heat transfer is contributing at that ratio and calculates the temperature. For example, carrier 1
If the air temperature is -18 degrees and the temperature of the first temperature sensor 6 is -20 degrees when the contribution from
Is calculated to be -19.5 degrees.

Further, when the test is performed at a low temperature of minus several tens degrees, the whole of the pre-cooling / heating unit 4 and the temperature test unit 5 or the part excluding the heat radiation unit 9 is put in a case made of resin or the like. By filling the inside of the case with dry air, frost formation on the inside of the tunnel can be prevented.

Next, FIG. 10 shows an example in which a case is further provided in the first embodiment of the present invention. FIG.
The unit 89 has the same structure as that shown in FIG. On the side surface of the case 90, a cover entrance 87 is provided near the tunnel entrance, and a cover exit 88 is provided near the tunnel exit.

The metal carrier 1 is introduced from the cover entrance 87 and is drawn out from the cover exit 88. As the transport mechanism, for example, a mechanism similar to the above-described transport claw 18 is provided inside and outside the cover.

On the other hand, dry air (84, 85) having a sufficiently low dew point is blown into the case 90 from the tube 86. Since the opening of the case 90 is limited to the cover entrance 87 and the cover exit 88, the air inside is replaced and frost is prevented from being formed on the tunnel.

For example, when the case is opened for maintenance, a strong blower of blower air is blown out to speed up the replacement of the inside of the case. On the other hand, when the inside is replaced and the dew point is sufficiently lowered, the air is weakened to prevent a strong wind from strongly hitting the outer wall (insulating cover) of the tunnel. At this time, as long as the gas has a sufficiently low dew point, dry nitrogen or other inert gas may be used instead of dry air.

FIG. 4 is a flowchart showing the measurement procedure in FIG. As shown in FIG. 4, when measuring the characteristics of the work 2, first, in step 101, predetermined target temperatures are set in the pre-cooling / heating unit 4 and the temperature test unit 5, respectively, and the temperature control is started. . After a certain period of time in such a state, each part reaches the target temperature.

Next, in step 102, the loading of the metal carrier 1 on which the work 2 is mounted is started. Further, in step 103, the interval of the work 2 on the carrier 1 is set to 1
The pitch is set as the pitch, and the above-described conveying claw 18 is operated to execute one pitch feed.

Thereafter, in step 104, it is determined whether or not the workpiece 2 has come to the position of the needle 13 provided on the probe block 12, that is, the measurement position. Perform a characteristic test of
Next, in step 105, it is determined whether or not the carrier 1 for which all the works 2 have been measured has come out of the tunnel, that is, whether or not the carrier 1 can be discharged. If possible, the carrier 1 is discharged.

Finally, in step 106, it is determined whether or not the next carrier 1 can be loaded.
If possible, the next carrier 1 is loaded. At this time, by inserting the carrier 1 without any gap so as to be in contact with the preceding carrier 1 as much as possible, the cycle of one pitch feed / measurement can be made regular and the efficiency can be increased. Note that when the first carrier is charged, there is no preceding carrier 1, so that measurement is performed with a wait time as if measurement had been performed, and sufficient time for the work 2 or the carrier 1 to reach the target temperature is secured. .

FIGS. 5A and 5B are perspective views of a pre-cooling unit / heating unit and a cross-sectional view of a probe insertion position in a device temperature characteristic measuring apparatus for describing a second embodiment of the present invention. It is. FIG. 5A shows a state in which the heat insulating cover is removed for easy understanding similarly to FIG. 2A, and FIG. 5B shows a state in which the heat insulating cover is attached. Represents the cross section of FIG.

First, as shown in FIGS. 5A and 5B,
In the present embodiment, a middle plate 20 made of a metal material is provided in a tunnel formed by the pre-cooling / heating unit 4 and the temperature test unit 5, and a third temperature sensor 21 is provided inside the middle plate 20. Has been arranged. This middle plate 20
It is provided for the purpose of reducing the temperature difference between the metal plate on the bottom surface of the tunnel with which the metal carrier 1 is in contact and the air in the tunnel, and divides the space in the tunnel into an upper space 22 and a bottom space 23. . As a result, feedback control by the Peltier element 8 near the bottom space 23 is performed by the first temperature sensor 6, and when the temperature of the work 2 located in the upper space 22 is calculated, the second temperature sensor 7 and the middle Board 2
The measurement is performed using the third temperature sensor 21 disposed inside the first temperature sensor 0. The transport surface of the metal carrier 1 is the same in the pre-cooling / heating unit 4 and the temperature test unit 5.

According to such a structure, since the bottom space portion 23 as an air layer exists below the middle plate 20, the temperature of the middle plate 20 is reduced to the structure of the above-described first embodiment (FIG. 3). In comparison, the temperature is close to the temperature of the air, that is, the temperature of the upper space portion 22. Therefore, the temperature of the work 2 on the metal carrier 1 can be determined more precisely.

FIG. 6 is a sectional view at a probe insertion position in a device temperature characteristic measuring apparatus for explaining a third embodiment of the present invention. As shown in FIG. 6, in the present embodiment, a bottom plate 24 made of a metal material is provided in a tunnel formed by the pre-cooling / heating unit 4 and the temperature test unit 5, and the bottom plate 24 is provided inside the bottom plate 24. A third temperature sensor 21 similar to that of the second embodiment is arranged. This bottom plate 24 is also provided for the purpose of reducing the temperature difference between the metal plate on the bottom surface of the tunnel where the metal carrier 1 is in contact and the air in the tunnel. A material having a lower thermal conductivity than the material of the tunnel formed by 5 is used. As a result, feedback control by the Peltier element 8 is performed by the first temperature sensor 6, and when calculating the temperature of the work 2,
The measurement is performed using the second temperature sensor 7 and the third temperature sensor 21 arranged inside the bottom plate 24. In this case as well, the transport surface of the carrier 1 is coincident between the preliminary cooling unit / heating unit 4 and the temperature test unit 5.

According to this structure, the temperature of the bottom plate 24 is closer to the temperature of the air as compared with the structure of the first embodiment. As a result, the temperature of the work 2 on the metal carrier 1 can be more precisely adjusted. Can be determined.

Next, a fourth embodiment of the present invention will be described with reference to the drawings.

FIG. 7 shows the second temperature sensor 7 shown in FIG.
FIG. 2 is a cross-sectional view taken along the line BB of FIG.

Referring to FIG. 7, in the fourth embodiment, the second temperature sensor 7 (see FIG. 1) provided in the first embodiment is removed, and the probe block 12 is provided inside the probe block 12. 12, a fourth temperature sensor 71 for measuring the temperature, and a lead line 72 for taking out the measured value to the outside.
And a second attached to the outside of the probe block 12.
Except for a configuration having a Peltier element 75 of the above and a heat dissipation plate 74 for dissipating heat of the second Peltier element 75, the same components as those of the first embodiment are provided.

The object of the fourth embodiment is to control the temperature of the probe itself to prevent heat from moving between the probe 13 and the work 2 during probing, thereby reducing the temperature fluctuation of the work 2. Is to do.

Thus, in the fourth embodiment, a fourth temperature sensor 71 is provided inside the probe block 12,
The temperature of the probe block 12 is measured, and the measured value is taken out via a lead line 72.

The present embodiment will be described in more detail. FIG.
In this embodiment, a Peltier element 75 and a heat radiating plate 74 are attached to the probe block 12 into which the probe 13 has been driven.

The current of the Peltier element 75 is controlled so that the measured value of the temperature sensor 71 driven into the probe block 12 becomes a predetermined constant value. The temperature controller and the power amplifier are not particularly shown. By controlling the temperature of the work 2 on the carrier 1 and the temperature of the probe 13 to be the same, the transfer of heat when the probe 13 contacts the work 2 is suppressed, and the measurement accuracy of the temperature characteristic of the work 2 is improved. Enhance.

As a method of determining the set temperature of the probe 13, the characteristics of the work 2 are continuously measured immediately after the probe 13 is brought into contact, and the measurement is performed at several temperature settings to obtain the most characteristic change. To a low temperature.

By using the above means, the set temperature of the probe block 12 is determined without installing a temperature sensor near the tip of the probe 13.

At this time, the probe block 12 is made of metal (eg, aluminum, copper, stainless steel, etc.) or resin (eg, glass epoxy, polyetherimide, polyimide, silicon, etc.). When the probe block 12 is made of a metal, it is desirable to insulate the periphery of the probe pin thinly in order to insulate the probe pin 13 from the probe block 12.

Since the probe block 12 made of metal has a high temperature coefficient, the temperature stability improves over time. In fact, an experimental result has been obtained that the variation in the temperature for a certain period of time from the probing contact of the probe block 12 made of metal to the stabilization of the temperature becomes 1/5 of that of the probe block 12 made of glass epoxy.

In the experimental results, the probe block 12 made of glass epoxy shows that
It takes a while for the temperature to stabilize,
It is also known that measurement can be started immediately after probing contact with the probe block 12 made of metal.

Next, the measurement procedure of the present embodiment will be described. This measurement procedure is almost the same as the measurement procedure of the first embodiment.

That is, first, as shown in FIG.
At 1, a predetermined target temperature is set in each of the pre-cooling / heating unit 4 and the temperature test unit 5, and the temperature control is started. After a certain period of time in such a state, each part reaches the target temperature.

Next, in step 102, the loading of the metal carrier 1 on which the work 2 is mounted is started. Further, in step 103, the interval of the work 2 on the carrier 1 is set to 1
The pitch is set as the pitch, and the above-described conveying claw 18 is operated to execute one pitch feed.

Thereafter, in step 104, it is determined whether or not the workpiece 2 has reached the position of the needle 13 provided on the probe block 12, that is, the measurement position. Perform a characteristic test of
Next, in step 105, it is determined whether or not the carrier 1 for which all the works 2 have been measured has come out of the tunnel, that is, whether or not the carrier 1 can be discharged. If possible, the carrier 1 is discharged.

Finally, in step 106, it is determined whether or not the next carrier 1 can be loaded.
If possible, the next carrier 1 is loaded. At this time, by inserting the carrier 1 without any gap so as to be in contact with the preceding carrier 1 as much as possible, the cycle of one pitch feed / measurement can be made regular and the efficiency can be increased. When the first carrier is loaded, since there is no preceding carrier 1, measurement is performed with a wait time as if there was a measurement, and a time sufficient for the work 2 or the carrier 1 to reach the target temperature is secured. .

Next, a procedure for determining the target temperature of the probe block according to the fourth embodiment will be described with reference to FIG.

Referring to FIG. 8, in step 201,
First, predetermined target temperatures are set in the preliminary cooling / heating unit 4 and the test temperature unit 5, respectively, and temperature control is started.

The temperature of the probe housing is set to an initial value (for example, the same temperature as the setting of the test temperature section), and the temperature control is started. Each part reaches the target temperature by leaving it for a certain period of time.

At step 202, the carrier carrying the work is conveyed by one pitch repeatedly in the same procedure as shown in FIG. 4 until the work comes under the probe.

In step 203, probe contact is made.

Next, in step 204, it is determined whether or not the predetermined number of times immediately after the probe contact is the MAX value.
In step 5, the measurement of the electrical characteristics of the work is repeatedly performed a predetermined number of times immediately after the probe contact.
At this time, the repetition cycle is made as fast as possible.

As a result, the total number of measurement times is one.
It is set to cover from 0 seconds to several minutes. For example, when one measurement is performed for 0.2 seconds and a fluctuation for 10 seconds is observed, the number is set to 50 times. The overall measurement time is determined by the materials of the probe and the probe housing and the heat capacity.
For example, when the probe housing is made of resin, it generally takes a long time to stabilize the temperature fluctuation because of its large thermal resistance, though it depends on the size. Therefore, measurement is performed for several minutes to about 10 minutes.

FIG. 9 shows an example of a change in the characteristic measured in the procedure of steps 204 and 205. Assuming that the measured value immediately after the probe is point P1 and the saturated state after multiple measurements is point P2, the characteristic change of the temperature fluctuation range P3 is P3 = P2−
Probably P1.

In step 206, the temperature fluctuation range P3 is
If it is smaller than the predetermined threshold value, it is determined that the temperature setting of the probe block 12 at that time is good, and the procedure for determining the temperature is terminated.

If the temperature fluctuation width P3 is large, the process proceeds to step 207, in which the probe contact is separated from the work 2, and the temperature control setting of the probe block 12 is changed by a predetermined temperature difference (for example, 0.1 degree) to stabilize. Wait until you do. When stabilized, the process returns to step 203.

As described above, in this embodiment, the temperature of the metal in contact with the carrier is controlled, the temperature of the probe is controlled, and the transfer of heat when the probe comes into contact is suppressed. The temperature can be set, and the characteristics of the workpiece can be measured immediately after probing. Also, when determining the probe temperature, changes in the characteristics of the workpiece are used,
It is not necessary to install a sensor at the tip of the probe.

As an example of the work in the embodiment using the characteristic change of the work, for example, a quartz device such as a quartz oscillator is suitable. Since a characteristic change per unit temperature of a crystal device or the like is remarkable, the temperature change appears in the characteristic change with a resolution substantially smaller than the resolution of the temperature sensor.

For example, the equivalent parameter of quartz depends on temperature, the temperature coefficient is between 0 and ± 5 ppm / ° C., and in order to obtain a frequency accuracy of about 0.1 ppm, the ambient temperature must be ± 0.1. It is necessary to control the temperature below ° C.

Although not shown, in the fifth embodiment of the present invention, the second temperature sensor 7 in the second embodiment is removed, and the temperature of the probe block 12 is set inside the probe block 12. Temperature sensor 7 for measuring the temperature
1, a lead wire 72 for taking out the measured value to the outside, a second Peltier element 75 attached to the outside of the probe block 12, and a heat radiating plate 74 for dissipating the second Peltier element 75. , The same components as those of the second embodiment can be provided.

The structure and procedure are the same as those of the fourth embodiment, and a detailed description thereof will be omitted.

Further, although not shown, in the sixth embodiment of the present invention, the second temperature sensor 7 in the third embodiment is removed, and the temperature of the probe block 12 is set inside the probe block 12. , A lead wire 72 for taking out the measured value to the outside, a second Peltier element 75 attached to the outside of the probe block 12, and a heat radiating the second Peltier element 75 Except for the configuration having the plate 74, the same components as those of the third embodiment can be provided.

The configuration and the procedure are the same as those of the fourth and fifth embodiments, and the detailed description is omitted.

[0080]

As described above, the device temperature characteristic measuring apparatus of the present invention has a pre-cooling section / heating section having a temperature sensor and a temperature sensor at a plurality of positions with respect to a metal carrier on which a work is mounted. And a tunnel-shaped structure is formed with a temperature test section for taking the probe block in and out, so that the air flow in the tunnel reaches a steady state close to the temperature of the tunnel itself by suppressing the flow of air as much as possible. The test section measures the temperature in the vicinity of the probe block and calculates the temperature of the work, thereby providing an effect of improving the accuracy of the work temperature.
In particular, it is suitable for measuring the temperature characteristics of a small passive device that generates less heat.

Further, the present invention has an effect that dew condensation can be prevented by putting a gas having a low dew point, such as dry air or dry nitrogen, in a case for each tunnel.

Further, according to the present invention, by providing the pre-cooling unit / heating unit, there is an effect that the time from the work input to the start of the inspection can be shortened.

[Brief description of the drawings]

FIG. 1 is a perspective view of a device temperature characteristic measuring device for describing a first embodiment of the present invention.

FIG. 2 is a perspective view of a pre-cooling unit / heating unit, a temperature test unit, and a transport claw in FIG.

FIG. 3 is a sectional view taken along lines AA and BB in FIG. 1;

FIG. 4 is a flowchart showing a measurement procedure in FIG. 1;

FIG. 5 is a diagram illustrating a perspective view of a pre-cooling unit / heating unit and a cross section at a probe insertion position in a device temperature characteristic measuring apparatus for describing a second embodiment of the present invention.

FIG. 6 is a cross-sectional view at a probe insertion position in a device temperature characteristic measuring apparatus for describing a third embodiment of the present invention.

FIG. 7 is a cross-sectional view at a probe insertion position in a device temperature characteristic measuring apparatus for describing a fourth embodiment of the present invention.

FIG. 8 is a flowchart showing a measurement procedure in FIG. 7;

9 is a diagram showing temperature characteristics measured by the measurement procedure in FIG.

FIG. 10 is a perspective view of a device temperature characteristic measuring apparatus in which a case is further provided in the first embodiment of the present invention.

[Explanation of symbols]

 REFERENCE SIGNS LIST 1 metal carrier 2 workpiece (workpiece) 3 feed hole 4 pre-cooling section / heating section 5 temperature test section 6 first temperature sensor 7 second temperature sensor 8,75 Peltier element 9 heat insulating cover 10,15 through hole 11 Heat dissipating part 12 Probe block 13 Needle 14, 16 Conveyor claw introduction hole 17 Fixture 18 Conveyor claw 19 Pin 20 Middle plate 21 Third temperature sensor 22 Upper space 23 Bottom space 24 Bottom plate 71 Fourth temperature sensor 72 Outgoing line 74 heat sink 84,85 dry air 86 tube 87 cover entrance 88 cover exit 89 unit shown in FIG. 1 90 case

 ──────────────────────────────────────────────────続 き Continuing from the front page (72) Yoshihiro Dogawa, Inventor 5-7-1 Shiba, Minato-ku, Tokyo Inside NEC Corporation (72) Inventor Toshinari Kokatsu 5-7-1 Shiba, Minato-ku, Tokyo NEC Corporation (72) Inventor Hiromitsu Yoshida 5-7-1 Shiba, Minato-ku, Tokyo NEC Corporation (72) Inventor Ryo Takeda 5-7-1 Shiba, Minato-ku, Tokyo NEC F-term within the company (reference) 2G003 AA07 AB01 AC03 AD01 AG03 AG11 AH04

Claims (18)

[Claims] 1. A pre-cooling unit / heating unit formed in a tunnel structure for maintaining a constant temperature by loading a metal carrier on which an object to be measured is mounted, and a metal carrier following the pre-cooling unit / heating unit. A temperature test unit formed in a tunnel structure for testing characteristics of the work at a set temperature; a probe block introduced into the temperature test unit from outside to test the work on the metal carrier; A first Peltier element mounted on the outside of the bottom surface of the heating / heating unit and the temperature test unit; a first temperature sensor provided inside the bottom surface of the pre-cooling unit / heating unit and the temperature test unit; A second temperature sensor disposed in a space inside the temperature test section and near a test position for testing the workpiece, and the metal carrier is connected to the pre-cooling section / heating section and the temperature test section. A device for transporting the device to a test section. 2. The device temperature characteristic measuring apparatus according to claim 1, wherein said pre-cooling section / heating section and said temperature test section are covered with a heat insulating cover in which said first Peltier element is embedded. 3. The transport mechanism according to claim 1, wherein the transport mechanism transports the metal carrier one pitch at a time from the temperature test unit using a transport claw having a pin that engages with a perforation hole formed in the metal carrier. Item 3. The device temperature characteristic measuring device according to Item 1 or 2. 4. The device temperature characteristic measuring apparatus according to claim 1, wherein the pre-cooling section / heating section and the temperature test section are separately or integrally housed in a gas case having a low dew point. 5. The pre-cooling section / heating section and the temperature test section, wherein a middle plate made of a metal material is arranged between a bottom surface and a top surface, and the metal carrier is carried into the middle plate. ,
5. The device temperature characteristic measuring apparatus according to 3 or 4. 6. The pre-cooling unit / heating unit and the temperature test unit, wherein a bottom plate made of a metal material is disposed on a bottom surface, and the metal carrier is carried into the bottom plate. The device temperature characteristic measuring device according to the above. 7. The device temperature characteristic measuring apparatus according to claim 5, wherein the middle plate or the bottom plate has a third temperature sensor built in near the test position. 8. A pre-cooling section / heating section formed in a tunnel structure for maintaining a constant temperature by loading a metal carrier on which an object to be measured is mounted, and the metal carrier following the pre-cooling section / heating section. A temperature test unit formed in a tunnel structure for testing characteristics of the work at a set temperature; a probe block introduced into the temperature test unit from outside to test the work on the metal carrier; A first Peltier element mounted on the outside of the bottom surface of the heating / heating unit and the temperature test unit; a first temperature sensor provided inside the bottom surface of the pre-cooling unit / heating unit and the temperature test unit; A fourth temperature sensor disposed in a space inside the probe block and near a test position for testing the workpiece, and the metal carrier is provided with the pre-cooling unit / heating unit and the fourth temperature sensor. A device temperature characteristic measuring device, comprising: a transport mechanism that carries the temperature into a temperature test unit. 9. The device temperature characteristic measuring apparatus according to claim 8, wherein the pre-cooling section / heating section and the temperature test section are covered with a heat insulating cover in which the first Peltier element is embedded. 10. The transport mechanism uses a transport claw having a pin that engages with a perforation hole formed in the metal carrier,
The device temperature characteristic measuring apparatus according to claim 8, wherein the metal carrier is conveyed in one direction by one pitch from the temperature test unit. 11. The device temperature characteristic measuring apparatus according to claim 8, wherein the pre-cooling section / heating section and the temperature test section are separately or integrally placed in a gas case having a low dew point. 12. The pre-cooling section / heating section and the temperature test section, wherein a middle plate made of a metal material is arranged between a bottom surface and a top surface,
9. The method according to claim 8, wherein the metal carrier is carried on the intermediate plate.
12. The device temperature characteristic measuring apparatus according to 9, 10, or 11. 13. The pre-cooling unit / heating unit and the temperature test unit, wherein a bottom plate made of a metal material is disposed on a bottom surface, and the metal carrier is carried on the bottom plate.
Or the device temperature characteristic measuring apparatus according to 11. 14. The device temperature characteristic measuring device according to claim 12, wherein the middle plate or the bottom plate has a fifth temperature sensor built in near the test position. 15. The probe block according to claim 8, further comprising a second Peltier element for controlling a measured value of the fourth temperature sensor to be a predetermined value, outside the probe block. , 11, 12, 13 or 14
The device temperature characteristic measuring device according to the above. 16. The device temperature characteristic measuring apparatus according to claim 15, wherein said probe block is made of metal. 17. The device temperature characteristic measuring apparatus according to claim 4, wherein the gas having a low dew point is blown at a low speed. 18. The device according to claim 1, wherein said device under test is a quartz device.
The device temperature characteristic measuring apparatus according to 12, 13, 14, 15, 16 or 17.