JP2002323037A - Fluid bearing unit - Google Patents

Fluid bearing unit

Info

Publication number
JP2002323037A
JP2002323037A JP2001128516A JP2001128516A JP2002323037A JP 2002323037 A JP2002323037 A JP 2002323037A JP 2001128516 A JP2001128516 A JP 2001128516A JP 2001128516 A JP2001128516 A JP 2001128516A JP 2002323037 A JP2002323037 A JP 2002323037A
Authority
JP
Japan
Prior art keywords
lubricant
bearing
film
fluorine
surface tension
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001128516A
Other languages
Japanese (ja)
Inventor
Katsushi Hirata
勝志 平田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP2001128516A priority Critical patent/JP2002323037A/en
Publication of JP2002323037A publication Critical patent/JP2002323037A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To provide a fluid bearing unit capable of achieving stable rotation by reducing the seizure of a bearing and the leakage of lubricant. SOLUTION: A lubricant 10 is filled between a shaft 2 and a bearing body which is rotatably supported by the shaft 2. A membrane 12a is formed on the inside of a hub 5 contacting with the lubricant 10 in order to suppress the wear of the bearing body. The difference between the surface tension of a fluorine lubricant and the critical surface tension of the membrane 12a is made to be less than 5 mN/m by using the fluorine lubricant as the lubricant 10.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、磁気ディスク装置
のスピンドルモータなどに用いられる動圧型の流体軸受
装置に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a hydrodynamic bearing device used for a spindle motor of a magnetic disk drive.

【0002】[0002]

【従来の技術】従来の流体軸受装置を図4に示す。外周
面に動圧発生溝4a,4bが形成された固定軸2の一端
がベース1に圧入され、他端にはスラストプレート3が
固定されて軸部が形成されている。磁気ディスク等を取
り付ける為のハブ6の内周面にはスリーブ5が圧入され
ており、このスリーブ5の一端にスラストフランジ11
が取り付けられて軸受体が形成されている。そして、ス
ラストフランジ11とスラストプレート3とが対向する
ように固定軸2にスリーブ5が装着され、軸部と軸受体
との間隙に潤滑剤10が充填される。
2. Description of the Related Art FIG. 4 shows a conventional hydrodynamic bearing device. One end of a fixed shaft 2 having dynamic pressure generating grooves 4a and 4b formed on its outer peripheral surface is press-fitted into a base 1, and a thrust plate 3 is fixed to the other end to form a shaft portion. A sleeve 5 is press-fitted on the inner peripheral surface of a hub 6 for mounting a magnetic disk or the like, and a thrust flange 11 is attached to one end of the sleeve 5.
Are attached to form a bearing body. Then, the sleeve 5 is mounted on the fixed shaft 2 so that the thrust flange 11 and the thrust plate 3 face each other, and the gap between the shaft portion and the bearing body is filled with the lubricant 10.

【0003】ベース1に形成された壁1aにはステータ
コイル9が設けられ、ステータコイル9と対向するハブ
6の内周面にはロータヨーク8を介してロータマグネッ
ト7が取り付けられて、モータ駆動部が構成される。
A stator coil 9 is provided on a wall 1 a formed on the base 1, and a rotor magnet 7 is mounted on an inner peripheral surface of a hub 6 facing the stator coil 9 via a rotor yoke 8. Is configured.

【0004】このモータ駆動部によりスリーブ5及びハ
ブ6が回転駆動すると、固定軸2に形成された動圧発生
溝4a,4bのポンピング作用により潤滑剤10に動圧
が発生し、軸受体が軸部から浮上して、軸部と軸受体と
が非接触で回転自在に支持される。
When the sleeve 5 and the hub 6 are driven to rotate by the motor driving section, a dynamic pressure is generated in the lubricant 10 by the pumping action of the dynamic pressure generating grooves 4a and 4b formed in the fixed shaft 2, and the bearing body is rotated. The shaft portion and the bearing body are rotatably supported in a non-contact manner.

【0005】[0005]

【発明が解決しようとする課題】上記のように構成され
た流体軸受装置において、固定軸2とスリーブ5の内周
面との間隙、スリーブ5とスラストフランジ11および
スラストプレート3との間隙に充填される潤滑剤10に
は、近年の軸受の高速回転化に伴う摩擦熱やモータ部の
発熱の増大によって、耐熱性や化学安定性の高いフッ素
系潤滑剤を使用することが望まれている。
In the hydrodynamic bearing device configured as described above, the gap between the fixed shaft 2 and the inner peripheral surface of the sleeve 5 and the gap between the sleeve 5 and the thrust flange 11 and the thrust plate 3 are filled. As the lubricant 10 to be used, it is desired to use a fluorine-based lubricant having high heat resistance and high chemical stability due to an increase in frictional heat and heat generation of the motor part due to recent high-speed rotation of the bearing.

【0006】しかし、フッ素系潤滑剤は、軸受表面への
吸着性や反応性に乏しく、境界潤滑性が低いという性質
を有している。そのため、十分な動圧が発生しない回転
の起動時や停止時に、スリーブ5及びスラストフランジ
11が固定軸2及びスラストプレート3と接触して摩耗
しやすく、軸受の回転精度が低下するという課題があっ
た。
However, fluorine-based lubricants have poor adsorbability and reactivity on the bearing surface and have low boundary lubricity. Therefore, when starting or stopping the rotation in which sufficient dynamic pressure is not generated, the sleeve 5 and the thrust flange 11 come into contact with the fixed shaft 2 and the thrust plate 3 to be easily worn, and there is a problem that the rotational accuracy of the bearing is reduced. Was.

【0007】そこで特公平8−30490号公報には、
軸受体の内面にポリフルオロアルキル重合体やフルオロ
ポリエーテル重合体などのフッ素系皮膜を形成して、軸
部および軸受体の摩耗を低減する方法が提案されてい
る。
Therefore, Japanese Patent Publication No. Hei 8-30490 discloses that
A method has been proposed in which a fluorine-based film such as a polyfluoroalkyl polymer or a fluoropolyether polymer is formed on the inner surface of a bearing body to reduce wear of the shaft portion and the bearing body.

【0008】しかし、低い表面エネルギーを持つフッ素
系皮膜は潤滑剤をはじきやすいため、軸受を組み立てる
際に軸部と軸受体との間隙に潤滑剤10を注入すること
が困難であり、潤滑剤10の注入量にばらつきが発生し
て軸受性能が安定しないという問題がある。
However, since a fluorine-based film having a low surface energy tends to repel the lubricant, it is difficult to inject the lubricant 10 into the gap between the shaft portion and the bearing body when assembling the bearing. However, there is a problem that the bearing performance is not stable due to the variation in the injection amount of the alloy.

【0009】また、この流体軸受装置を回転させると、
皮膜と潤滑剤の濡れ性が低いため油膜切れによる軸受の
焼き付きを引き起こしたり、軸受の内部に気泡が発生し
て、この気泡の熱膨張等により潤滑剤が軸受から漏洩し
やすくなる恐れがある。
When the hydrodynamic bearing device is rotated,
Since the wettability between the film and the lubricant is low, there is a possibility that the seizure of the bearing due to the oil film breakage may occur, or bubbles may be generated inside the bearing, and the lubricant may easily leak from the bearing due to thermal expansion of the bubbles.

【0010】本発明は前記問題点を解決し、軸受の焼き
付きや潤滑剤の漏洩を低減して安定した回転を実現でき
る流体軸受装置を提供することを目的とする。
An object of the present invention is to solve the above-mentioned problems and to provide a hydrodynamic bearing device capable of realizing stable rotation by reducing seizure of a bearing and leakage of a lubricant.

【0011】[0011]

【課題を解決するための手段】本発明の流体軸受装置
は、フッ素系潤滑剤の表面張力と皮膜の臨界表面張力の
差を適正な範囲に設定したことを特徴とする。
The hydrodynamic bearing device according to the present invention is characterized in that the difference between the surface tension of the fluorine-based lubricant and the critical surface tension of the film is set within an appropriate range.

【0012】この本発明によると、皮膜と潤滑剤の濡れ
性が向上するため軸受内部に潤滑剤を均一に充填でき、
軸受の焼き付きや潤滑剤の軸受からの漏洩を低減して安
定した回転を行え、信頼性の高い流体軸受装置を実現で
きる。
According to the present invention, since the wettability between the film and the lubricant is improved, the lubricant can be uniformly filled in the bearing,
It is possible to perform stable rotation by reducing seizure of the bearing and leakage of the lubricant from the bearing, and to realize a highly reliable hydrodynamic bearing device.

【0013】また、本発明の流体軸受装置は、皮膜の臨
界表面張力を潤滑剤の気液界面側よりも軸受の内部側を
高くするよう設定したことを特徴とする。この本発明に
よると、潤滑剤が軸受内部に引き付けられるため潤滑剤
の軸受からの漏洩を低減できる。
Further, the hydrodynamic bearing device of the present invention is characterized in that the critical surface tension of the film is set to be higher on the inner side of the bearing than on the gas-liquid interface side of the lubricant. According to the present invention, since the lubricant is attracted to the inside of the bearing, leakage of the lubricant from the bearing can be reduced.

【0014】[0014]

【発明の実施の形態】本発明の請求項1記載の流体軸受
装置は、一方が他方に対して回転自在に支持された軸部
と軸受体との間に潤滑剤を充填し、前記潤滑剤と接する
前記軸部の外面または前記軸受体の内面の少なくとも一
方の面に前記軸部および軸受体の摩耗を低減する皮膜を
形成した流体軸受装置であって、前記潤滑剤がフッ素系
潤滑剤であり、前記フッ素系潤滑剤の表面張力と前記皮
膜の臨界表面張力との差が5mN/m以下であることを
特徴とする。
A fluid bearing device according to a first aspect of the present invention is characterized in that a lubricant is filled between a bearing portion and a shaft portion, one of which is rotatably supported with respect to the other, and wherein the lubricant is filled. A fluid bearing device formed on at least one of an outer surface of the shaft portion or an inner surface of the bearing body in contact with the shaft portion and a coating that reduces wear of the bearing body, wherein the lubricant is a fluorine-based lubricant. The difference between the surface tension of the fluorine-based lubricant and the critical surface tension of the film is 5 mN / m or less.

【0015】この構成によると、フッ素系潤滑剤の表面
張力と皮膜の臨界表面表力との差を適正な範囲とするこ
とで潤滑剤と皮膜との濡れ性を向上し、軸部と軸受体と
の間の微小な隙間への潤滑剤の注入量が一定となって軸
受性能が安定するだけでなく、回転時には、皮膜と潤滑
剤の界面での気泡の発生を低減でき、油膜切れによる軸
受の焼き付きや気泡の熱膨張などによる潤滑剤の漏洩を
低減できる。
According to this configuration, the wettability between the lubricant and the film is improved by setting the difference between the surface tension of the fluorine-based lubricant and the critical surface force of the film in an appropriate range, and the shaft portion and the bearing body are improved. In addition to stabilizing the bearing performance by injecting a certain amount of lubricant into the small gap between the bearing and the bearing, it also reduces the generation of bubbles at the interface between the film and the lubricant during rotation, and reduces the oil film. Leakage of lubricant due to burn-in or thermal expansion of bubbles can be reduced.

【0016】本発明の請求項2記載の流体軸受装置は、
一方が他方に対して回転自在に支持された軸部と軸受体
との間に潤滑剤を充填し、前記潤滑剤と接する前記軸部
の外面または前記軸受体の内面の少なくとも一方の面に
前記軸部および軸受体の摩耗を低減する皮膜を形成した
流体軸受装置であって、前記潤滑剤がフッ素系潤滑剤で
あり、前記フッ素系潤滑剤の気液界面付近に形成された
皮膜の臨界表面張力よりも軸受の内部側に形成された皮
膜の臨界表面張力が大きいことを特徴とする。
According to a second aspect of the present invention, there is provided a hydrodynamic bearing device.
A lubricant is filled between a shaft part and a bearing body, one of which is rotatably supported with respect to the other, and at least one of an outer surface of the shaft part or an inner surface of the bearing body in contact with the lubricant is provided on the bearing body. A fluid bearing device having a film for reducing wear of a shaft portion and a bearing body, wherein the lubricant is a fluorine-based lubricant, and a critical surface of the film formed near a gas-liquid interface of the fluorine-based lubricant. It is characterized in that the critical surface tension of the film formed on the inner side of the bearing is larger than the tension.

【0017】この構成によると、潤滑剤は相対的に皮膜
の表面エネルギー即ち臨界表面張力が大きい軸受内部の
方向へ引きつけられるため、軸受からの潤滑剤の漏洩を
低減できる。
According to this configuration, since the lubricant is attracted toward the inside of the bearing where the surface energy of the film, that is, the critical surface tension is relatively large, leakage of the lubricant from the bearing can be reduced.

【0018】本発明の請求項3記載の流体軸受装置は、
一方が他方に対して回転自在に支持された軸部と軸受体
との間に潤滑剤を充填し、前記潤滑剤と接する前記軸部
の外面または前記軸受体の内面の少なくとも一方の面に
前記軸部および軸受体の摩耗を低減する皮膜を形成した
流体軸受装置であって、前記潤滑剤がフッ素系潤滑剤で
あり、前記フッ素系潤滑剤の表面張力と前記皮膜の臨界
表面張力との差が5mN/m以下であり、前記フッ素系
潤滑剤の気液界面付近に形成された皮膜の臨界表面張力
よりも軸受の内部側に形成された皮膜の臨界表面張力が
大きいことを特徴とする。
According to a third aspect of the present invention, there is provided a hydrodynamic bearing device.
A lubricant is filled between a shaft part and a bearing body, one of which is rotatably supported with respect to the other, and at least one of an outer surface of the shaft part or an inner surface of the bearing body in contact with the lubricant is provided on the bearing body. A fluid bearing device having a film for reducing wear of a shaft portion and a bearing body, wherein the lubricant is a fluorine-based lubricant, and a difference between a surface tension of the fluorine-based lubricant and a critical surface tension of the film. Is not more than 5 mN / m, and the critical surface tension of the coating formed on the inner side of the bearing is larger than the critical surface tension of the coating formed near the gas-liquid interface of the fluorine-based lubricant.

【0019】この構成によると、皮膜と潤滑剤との濡れ
性がよくなり、油膜切れによる軸受の焼き付き防止や気
泡の熱膨張などによる潤滑剤の漏洩をより確実に低減で
きる。
According to this structure, the wettability between the film and the lubricant is improved, and the seizure of the bearing due to the breakage of the oil film and the leakage of the lubricant due to the thermal expansion of bubbles can be more reliably reduced.

【0020】本発明の請求項4記載の流体軸受装置は、
請求項1から請求項3のいずれか1項において、前記皮
膜がフッ素含有物であることを特徴とする。この構成に
よると、フッ素含有物である皮膜は、フッ素系潤滑剤と
同種類の化合物であるため親和力による吸着作用によっ
て潤滑剤を保持しやすく、また低摩擦特性を有するため
潤滑性を向上できる。
The hydrodynamic bearing device according to claim 4 of the present invention is
The film according to any one of claims 1 to 3, wherein the film is a fluorine-containing material. According to this configuration, since the film containing fluorine is a compound of the same type as the fluorine-based lubricant, the film can easily hold the lubricant by an adsorption action by affinity, and has low friction characteristics, so that lubricity can be improved.

【0021】本発明の請求項5記載の流体軸受装置は、
請求項4において、前記フッ素含有物が樹脂であること
を特徴とする。この構成によると、樹脂皮膜は、樹脂成
分を溶解させたコーティング液を塗布、乾燥させること
などにより形成されるため、形成時に高温となる金属や
セラミックスなどより軸受母材の熱による寸法変化も小
さく寸法安定性に優れ、かつ低コストで実現できる。
According to a fifth aspect of the present invention, there is provided a hydrodynamic bearing device.
In claim 4, the fluorine-containing material is a resin. According to this configuration, since the resin film is formed by applying and drying a coating solution in which a resin component is dissolved, the dimensional change due to heat of the bearing base material is smaller than that of a metal or ceramic which is heated at the time of formation. It has excellent dimensional stability and can be realized at low cost.

【0022】本発明の請求項6記載の流体軸受装置は、
請求項1から請求項3のいずれかにおいて、前記フッ素
系潤滑剤が、パーフルオロポリエーテルまたはパーフル
オロポリエーテル誘導体の少なくとも一方を含むことを
特徴とする。
The hydrodynamic bearing device according to claim 6 of the present invention is
In any one of the first to third aspects, the fluorine-based lubricant contains at least one of a perfluoropolyether and a perfluoropolyether derivative.

【0023】この構成によると、これらはフッ素系潤滑
剤の中でもより耐熱性、化学安定性に優れ、動粘度の温
度変化が小さい特性を有するため、高温域での使用に耐
え、温度によるトルク変動の小さな流体軸受装置が実現
できる。
According to this structure, these are more excellent in heat resistance and chemical stability among fluorine-based lubricants and have a characteristic that kinematic viscosity has a small temperature change, so that they can withstand use in a high temperature range and torque fluctuation due to temperature. Hydrodynamic bearing device with a small size can be realized.

【0024】以下、本発明の各実施の形態を図1〜図3
を用いて説明する。なお、従来例を示す図4と同様の構
成をなすものについては同一の符号を用いて説明する。
Hereinafter, embodiments of the present invention will be described with reference to FIGS.
This will be described with reference to FIG. Components having the same configuration as that of FIG. 4 showing a conventional example will be described using the same reference numerals.

【0025】(実施の形態1)図1と図2は、本発明の
実施の形態1を示す。図1に示すように、図4と同様に
構成された流体軸受装置において、潤滑剤10には、高
速回転にも対応できるよう耐熱性や化学安定性の高いフ
ッ素系潤滑剤が使用されている。また、このフッ素系潤
滑剤は軸受表面への吸着性や反応性に乏しく、境界潤滑
性が低いため、軸部および軸受体の摩耗を低減するよう
スリーブ5の内面には、皮膜12aが形成されている。
(Embodiment 1) FIGS. 1 and 2 show Embodiment 1 of the present invention. As shown in FIG. 1, in the fluid dynamic bearing device configured in the same manner as in FIG. 4, a fluorine-based lubricant having high heat resistance and high chemical stability is used for the lubricant 10 so as to cope with high-speed rotation. . Further, since this fluorine-based lubricant has poor adsorbability and reactivity on the bearing surface and low boundary lubrication, a coating 12a is formed on the inner surface of the sleeve 5 so as to reduce wear of the shaft portion and the bearing body. ing.

【0026】この実施の形態1では、皮膜12aと潤滑
剤10の濡れ性の向上を図るために、皮膜12aの濡れ
性の指標として固有の物性である臨界表面張力に着目
し、潤滑剤10の表面張力と皮膜12aの臨界表面張力
の差を適正値に設定した点で上記従来例とは異なる。
In the first embodiment, in order to improve the wettability between the film 12a and the lubricant 10, attention is paid to the critical surface tension, which is an intrinsic physical property, as an index of the wettability of the film 12a. This is different from the above conventional example in that the difference between the surface tension and the critical surface tension of the film 12a is set to an appropriate value.

【0027】ここで、皮膜12aの濡れ性の指標として
臨界表面張力が用いられているのは、一般に、固液界面
において固体の表面エネルギー即ち臨界表面張力が液体
の表面張力より小さい場合に、固体は液体に濡れにくい
性質を持ち、固体の表面張力は測定が困難なためであ
る。なお、臨界表面張力は、固体面上で有機液体化合物
の同族列が示す接触角をθ、その液体の表面張力をγと
すると、cosθとγの関係は直線関係が得られ、その時
のθ=0即ちcosθ=1に相当するγの値となる。
Here, the critical surface tension is used as an index of the wettability of the film 12a because the surface energy of the solid at the solid-liquid interface, that is, the critical surface tension is smaller than the surface tension of the liquid. This is because they have a property that they are hardly wet by liquids, and it is difficult to measure the surface tension of solids. The critical surface tension is defined as follows: θ is the contact angle of the homologous series of the organic liquid compound on the solid surface, and γ is the surface tension of the liquid. A linear relationship is obtained between cos θ and γ. 0, that is, the value of γ corresponding to cos θ = 1.

【0028】潤滑剤10の表面張力と皮膜12aの臨界
表面張力との関係を調べるために、皮膜12aの上に一
定量のフッ素系の潤滑剤10を滴下し、一定時間が経過
した時の潤滑剤10と皮膜12aの接触角と、フッ素系
潤滑剤10の表面張力と皮膜12aの臨界表面張力との
差を20℃雰囲気下で測定した。潤滑剤10にはフッ素
系潤滑剤を用い、皮膜12aにはフッ素系皮膜を用い
た。
In order to examine the relationship between the surface tension of the lubricant 10 and the critical surface tension of the film 12a, a certain amount of fluorine-based lubricant 10 is dropped on the film 12a, and the lubrication after a certain period of time has passed. The contact angle between the agent 10 and the film 12a and the difference between the surface tension of the fluorine-based lubricant 10 and the critical surface tension of the film 12a were measured in a 20 ° C. atmosphere. A fluorine-based lubricant was used for the lubricant 10, and a fluorine-based film was used for the film 12a.

【0029】得られた測定結果を図2に示す。グラフか
ら明らかなように、フッ素系潤滑剤の表面張力とフッ素
系皮膜の臨界表面張力との差が5mN/mより大きいと
潤滑剤10は皮膜12aにはじかれ、フッ素系潤滑剤の
表面張力とフッ素系皮膜の臨界表面張力との差が大きい
ほど高い接触角を示す傾向となった。一方、両者の差が
5mN/m以下となると、潤滑剤10は濡れ広がり、接
触角を示さなくなった。また、ここでは図示されていな
いが、皮膜12aの臨界表面張力が潤滑剤10の表面張
力よりも大きい場合、すなわちフッ素系潤滑剤の表面張
力とフッ素系皮膜の臨界表面張力との差がマイナスとな
る場合にも潤滑剤10は濡れ広がり、接触角を示さなか
った。
FIG. 2 shows the obtained measurement results. As is clear from the graph, when the difference between the surface tension of the fluorine-based lubricant and the critical surface tension of the fluorine-based film is larger than 5 mN / m, the lubricant 10 is repelled by the film 12a, and the surface tension of the fluorine-based lubricant is reduced. The larger the difference from the critical surface tension of the fluorine-based coating, the higher the contact angle. On the other hand, when the difference between them was 5 mN / m or less, the lubricant 10 spread and spread, and did not show a contact angle. Although not shown here, when the critical surface tension of the film 12a is larger than the surface tension of the lubricant 10, that is, the difference between the surface tension of the fluorine-based lubricant and the critical surface tension of the fluorine-based film is minus. In some cases, the lubricant 10 spread out and did not show a contact angle.

【0030】なお、フッ素系以外の皮膜12a、例えば
シリコーン系についても同様の傾向が得られた。そこ
で、フッ素系潤滑剤として20℃の表面張力が23mN
/mのパーフルオロポリエーテルを用い、皮膜12aを
臨界表面張力が19mN/mの市販のフッ素系樹脂にて
形成し、図1に示す流体軸受装置を作成したところ、フ
ッ素系潤滑剤10は皮膜12aとなるフッ素系樹脂の上
で十分に濡れ広がり、軸受内に充填する際には、皮膜1
2aにはじかれることなく、また軸受内に気泡の発生な
どを生じることなく規定量の潤滑剤10を充填できた。
The same tendency was obtained for the coating 12a other than the fluorine type, for example, the silicone type. Therefore, as a fluorine-based lubricant, the surface tension at 20 ° C. is 23 mN.
/ M of perfluoropolyether and the film 12a was formed of a commercially available fluorine resin having a critical surface tension of 19 mN / m, and the hydrodynamic bearing device shown in FIG. 1 was prepared. The film 1a is sufficiently wetted and spread on the fluororesin which is to be used as the base material 12a, and the film 1
The specified amount of the lubricant 10 could be filled without being repelled by 2a and without generating bubbles or the like in the bearing.

【0031】また、この流体軸受装置を搭載したモータ
を高温環境下にて連続回転させたところ、安定した性能
が得られ、軸受の焼き付きや潤滑剤の漏洩も確認されな
かった。
When the motor equipped with the hydrodynamic bearing device was continuously rotated in a high-temperature environment, stable performance was obtained, and no seizure of the bearing or leakage of the lubricant was confirmed.

【0032】この実施の形態1で使用される皮膜12a
としては、軸受の摩耗を低減できる材料であれば特に限
定されるものではなく、金属含有物、セラミックス、炭
素材料、樹脂など種類に関わらず、潤滑性、摩耗性、耐
熱性、硬度、導電性、コスト等を考慮して便宜選択でき
る。中でも、フッ素系潤滑剤と親和性を持たせ、吸着作
用によって軸受内に潤滑剤10を保持しやすくするため
には、フッ素元素を含むフッ素含有物が好ましく、中で
もフッ素系樹脂がより好ましい。
The film 12a used in the first embodiment
The material is not particularly limited as long as it is a material that can reduce the wear of the bearing. Lubricity, abrasion, heat resistance, hardness, conductivity, regardless of the type of metal-containing material, ceramics, carbon material, resin, etc. , Cost and the like can be conveniently selected. Above all, a fluorine-containing substance containing a fluorine element is preferable, and a fluorine resin is more preferable, in order to have an affinity with the fluorine-based lubricant and to easily hold the lubricant 10 in the bearing by an adsorption action.

【0033】フッ素系樹脂としては、ポリテトラフルオ
ロエチレン(PTFE)、ポリフッ化ビニリデン(PV
DF)ポリフッ化ビニル(PVF)、エチレン/テトラ
フルオロエチレン共重合体(ETFE)、エチレン/ク
ロロトリフルオロエチレン共重合体(ECTFE)、ポ
リクロロトリフルオロエチレン(PCTFE)、テトラ
フルオロエチレン/パーフルオロアルキルビニルエーテ
ル共重合体(PFA)、テトラフルオロエチレン/ヘキ
サフルオロプロピレン共重合体(FEP)などが挙げら
れ、その一部は水酸基、カルボキシル基、アミノ基、イ
ソシアネート基、エポキシ基などの官能基で置換されて
いてもよく、これらを単独もしくは混合もしくは共重合
させて用いることができる。また、市販品として、住友
スリーエム社製フロラードFCやサカタインクス社製の
スミフルノンFP、旭ガラス社製のサイトップなどのフ
ッ素化合物であれば同様の効果が得られる。
As the fluororesin, polytetrafluoroethylene (PTFE), polyvinylidene fluoride (PV
DF) polyvinyl fluoride (PVF), ethylene / tetrafluoroethylene copolymer (ETFE), ethylene / chlorotrifluoroethylene copolymer (ECTFE), polychlorotrifluoroethylene (PCTFE), tetrafluoroethylene / perfluoroalkyl Vinyl ether copolymer (PFA), tetrafluoroethylene / hexafluoropropylene copolymer (FEP), and the like, some of which are substituted with functional groups such as a hydroxyl group, a carboxyl group, an amino group, an isocyanate group, and an epoxy group. These may be used alone, or in a mixture or copolymer. Similar effects can be obtained by using commercially available fluorine compounds such as Florado FC manufactured by Sumitomo 3M, Sumiflunon FP manufactured by Sakata Inx, and Cytop manufactured by Asahi Glass.

【0034】これらのフッ素系樹脂からなる皮膜12a
は、フッ素系樹脂を溶解あるいは分散したコーティング
液を皮膜12aの形成面に塗布した後、常温もしくは加
熱により乾燥するだけで容易に形成でき、比較的低温で
の膜形成が行えるため、金属やセラミックスなどのよう
に形成時に高温となるものよりも軸受母材の熱による寸
法変化が小さく寸法安定性に優れ、しかも低コストでの
実現が可能となるため、好適に使用できる。コーティン
グ液の塗布方法は、スピンコート、ディツプコート、ス
プレーコート、転写コート、ポッティングコート、刷毛
塗りなど、部材の大きさや形状に応じて任意に選択でき
る。
A film 12a made of these fluororesins
Can be easily formed by applying a coating solution in which a fluorine-based resin is dissolved or dispersed on the surface on which the film 12a is formed, and then drying the film at room temperature or by heating, and the film can be formed at a relatively low temperature. Thus, the bearing base material is less likely to change in size due to heat than a material having a high temperature at the time of formation, has excellent dimensional stability, and can be realized at low cost, so that it can be suitably used. The method of applying the coating liquid can be arbitrarily selected according to the size and shape of the member, such as spin coating, dip coating, spray coating, transfer coating, potting coating, and brush coating.

【0035】なお、皮膜12aをフッ素元素を含有しな
い樹脂にて形成する場合には、樹脂にて皮膜を形成した
後、フッ素化プラズマ処理、フッ素イオン注入などして
フッ素化してもよいが、コスト面からフッ素系樹脂を使
用することが好ましい。なお、皮膜の濡れ性をあげるた
め、フッ素系樹脂を形成後プラズマ処理やコロナ処理な
どの表面改質処理を行ってもよい。
When the film 12a is formed of a resin containing no elemental fluorine, the film may be formed of a resin and then fluorinated by fluorination plasma treatment, fluorine ion implantation, or the like. It is preferable to use a fluororesin from the surface. In order to increase the wettability of the film, a surface modification treatment such as a plasma treatment or a corona treatment may be performed after the formation of the fluororesin.

【0036】フッ素系潤滑剤としては、パーフルオロポ
リエーテル、パーフルオロポリエーテル誘導体、フルオ
ロエステルなどが挙げられ、中でも、耐熱性がよく、動
粘度の温度変化が小さいパーフルオロポリエーテルまた
はそれらの誘導体が好適に使用できる。パーフルオロポ
リエーテルの市販品として、アウジモント社製のフォン
ブリンY,M,Z、ダイキン工業社製のデムナムSなど
が用いられる。また、その一部を水酸基、カルボキシル
基、イソシアネート基、エステル基などの官能基で変成
させた誘導体を単独、混合して用いることができる。な
お、潤滑剤10はその表面張力により軸受に保持されて
いるため、表面張力が高い方が軸受からの漏れや滲みを
防ぐには望ましい。また、潤滑剤10の性能向上や補完
を目的として、その特性を損なわない程度であれば、極
圧剤、防錆剤、帯電付与剤など市販の添加剤を任意の組
み合わせで添加しても良い。
Examples of the fluorine-based lubricant include perfluoropolyethers, perfluoropolyether derivatives, fluoroesters, etc. Among them, perfluoropolyethers having good heat resistance and a small change in kinematic viscosity with temperature or derivatives thereof. Can be preferably used. As commercial products of perfluoropolyether, Fomblin Y, M, Z manufactured by Ausimont, Demnum S manufactured by Daikin Industries, and the like are used. In addition, derivatives in which a part thereof is modified with a functional group such as a hydroxyl group, a carboxyl group, an isocyanate group, or an ester group can be used alone or in combination. Since the lubricant 10 is held in the bearing by its surface tension, it is desirable that the surface tension is higher to prevent leakage or bleeding from the bearing. For the purpose of improving or complementing the performance of the lubricant 10, a commercially available additive such as an extreme pressure agent, a rust preventive, or a charge imparting agent may be added in any combination as long as the characteristics are not impaired. .

【0037】このように、潤滑剤10としてフッ素系潤
滑剤を用い、このフッ素系潤滑剤の表面張力と皮膜12
aの臨界表面張力との差を5mN/m以下に設定するこ
とで、潤滑剤10と皮膜12aとの濡れ性が向上し、軸
受を組み立てる際に軸部と軸受体との間隙に潤滑剤10
を容易にしかも均一に注入でき、安定した軸受性能が得
られる。また、油膜切れによる軸受の焼き付きを低減で
き、回転時には軸受の内部に気泡が発生しにくくなるた
め気泡の熱膨張等による潤滑剤の軸受からの漏洩を低減
でき、信頼性の高い軸受装置が実現できる。
As described above, a fluorine-based lubricant is used as the lubricant 10, and the surface tension of the fluorine-based lubricant and the film 12
a is set to 5 mN / m or less, the wettability between the lubricant 10 and the film 12a is improved, and the lubricant 10 is inserted into the gap between the shaft portion and the bearing body when assembling the bearing.
Can be easily and uniformly injected, and stable bearing performance can be obtained. In addition, seizure of the bearing due to oil film shortage can be reduced, and bubbles are less likely to be generated inside the bearing during rotation, so that leakage of lubricant from the bearing due to thermal expansion of bubbles can be reduced, realizing a highly reliable bearing device it can.

【0038】(実施の形態2)図2は、本発明の実施の
形態2を示す。この実施の形態2では、軸受内の3箇所
にそれぞれ臨界表面張力の異なる皮膜を形成した点で、
上記実施の形態とは異なる。
(Embodiment 2) FIG. 2 shows Embodiment 2 of the present invention. In the second embodiment, in that three films having different critical surface tensions are formed at three points in the bearing,
This is different from the above embodiment.

【0039】具体的には、図1と同様に構成された流体
軸受装置において、潤滑剤10と接するスリーブ5の内
周面に皮膜12aが形成され、スラストフランジ11の
表面に皮膜12bが形成され、固定軸2の表面に皮膜1
2cが形成されている。皮膜12aと皮膜12cは臨界
表面張力19mN/mのフッ素系樹脂からなり、皮膜1
2bは臨界表面張力25mN/mのフッ素系樹脂からな
る。フッ素系潤滑剤10aはパーフルオロポリエーテル
とパーフルオロポリエーテル誘導体の混合物であり、2
0℃の表面張力は21mN/mである。
Specifically, in the hydrodynamic bearing device constructed in the same manner as in FIG. 1, a coating 12a is formed on the inner peripheral surface of the sleeve 5 in contact with the lubricant 10, and a coating 12b is formed on the surface of the thrust flange 11. , Film 1 on the surface of fixed shaft 2
2c is formed. The coating 12a and the coating 12c are made of a fluororesin having a critical surface tension of 19 mN / m.
2b is made of a fluorine-based resin having a critical surface tension of 25 mN / m. The fluorine-based lubricant 10a is a mixture of a perfluoropolyether and a perfluoropolyether derivative,
The surface tension at 0 ° C. is 21 mN / m.

【0040】このような構成によっても、上記実施の形
態と同様にフッ素系潤滑剤の表面張力と皮膜12aの臨
界表面張力との差が5mN/m以下に設定されているた
め、フッ素系潤滑剤はフッ素系樹脂の上で十分に濡れ広
がり、油膜切れによる軸受の焼き付きを低減でき、気泡
の熱膨張等による潤滑剤の軸受からの漏洩を低減でき
る。
Also in such a configuration, the difference between the surface tension of the fluorine-based lubricant and the critical surface tension of the film 12a is set to 5 mN / m or less as in the above-described embodiment. Can sufficiently spread on the fluororesin to reduce seizure of the bearing due to oil film breakage, and reduce leakage of lubricant from the bearing due to thermal expansion of bubbles and the like.

【0041】また、フッ素系潤滑剤の気液界面側に形成
された皮膜12a,12cの臨界表面張力よりも軸受の
内部側に形成された皮膜12bの臨界表面張力が高く設
定されているため、潤滑剤10はエネルギー値の高い皮
膜12bの側へ引きつけられ、よりスムーズで、確実な
潤滑剤10の充填が可能となる。
The critical surface tension of the coating 12b formed on the inner side of the bearing is set higher than the critical surface tension of the coatings 12a and 12c formed on the gas-liquid interface side of the fluorine-based lubricant. The lubricant 10 is attracted to the side of the film 12b having a high energy value, and smoother and more reliable filling of the lubricant 10 becomes possible.

【0042】このように構成された流体軸受装置のモー
タを高温環境下にて、連続回転させたところ、消費電流
や回転精度など安定した性能が得られ、軸受の焼き付き
や潤滑剤の漏洩も確認されなかった。
When the motor of the hydrodynamic bearing device thus configured is continuously rotated under a high temperature environment, stable performance such as current consumption and rotational accuracy can be obtained, and seizure of the bearing and leakage of the lubricant have been confirmed. Was not done.

【0043】なお、上記説明では、皮膜を軸部と軸受体
の両方の側に設けたが、本発明はこれに限定されるもの
ではなく、性能やコストに応じて単数あるいは複数設け
てもよい。また、その形成場所も特に限定されるもので
はない。
In the above description, the film is provided on both the shaft portion and the bearing body. However, the present invention is not limited to this, and one or more films may be provided according to the performance and cost. . Further, the formation place is not particularly limited.

【0044】また、上記説明では軸部に形成された皮膜
12cと軸受体に形成された皮膜12a,12bにおい
て、皮膜12aと皮膜12bの臨界表面張力に差を設け
たが、軸部のみあるいは軸受体のみに皮膜を形成し、こ
の皮膜の臨界表面張力が潤滑剤10の気液界面側よりも
軸受の内部側で大きくなるよう構成してもよい。あるい
は、軸部に形成した皮膜と軸受体に形成した皮膜に臨界
表面張力の差をつけてもよい。
In the above description, the critical surface tension between the film 12a and the film 12b is different between the film 12c formed on the shaft and the films 12a and 12b formed on the bearing body. A film may be formed only on the body, and the critical surface tension of the film may be larger on the inner side of the bearing than on the gas-liquid interface side of the lubricant 10. Alternatively, a difference in critical surface tension between the film formed on the shaft portion and the film formed on the bearing body may be provided.

【0045】なお、上記各実施の形態では、軸部2の基
端部をベース1に固定した軸固定型の流体軸受装置を例
に挙げて説明したが、本発明はこれに限定されるもので
はなく、軸部2の両端を固定したものや、軸回転型の流
体軸受装置や、スリーブの内径穴を両側開放させたも
の、スラスト方向にピポット軸受が形成されたものなど
に適用しても同様の効果が得られる。
In each of the above embodiments, the fixed shaft type fluid bearing device in which the base end of the shaft portion 2 is fixed to the base 1 has been described as an example, but the present invention is not limited to this. Instead, the present invention can be applied to a structure in which both ends of the shaft portion 2 are fixed, a shaft-rotating type hydrodynamic bearing device, a structure in which the inner diameter holes of the sleeve are opened on both sides, and a structure in which a pivot bearing is formed in the thrust direction. Similar effects can be obtained.

【0046】[0046]

【発明の効果】以上のように本発明の流体軸受装置によ
ると、一方が他方に対して回転自在に支持された軸部と
軸受体との間に潤滑剤を充填し、前記潤滑剤と接する前
記軸部の外面または前記軸受体の内面の少なくとも一方
の面に前記軸部および軸受体の摩耗を低減する皮膜を形
成した流体軸受装置であって、前記潤滑剤がフッ素系潤
滑剤であり、前記フッ素系潤滑剤の表面張力と前記皮膜
の臨界表面張力との差を5mN/m以下とすることで、
潤滑剤と皮膜との濡れ性が向上し、軸部と軸受体との間
の微小な隙間への潤滑剤の注入量が一定となって軸受性
能が安定するだけでなく、回転時には、油膜切れによる
軸受の焼き付きを低減でき、皮膜と潤滑剤の界面での気
泡の発生を低減できるため気泡の熱膨張などによる潤滑
剤の漏洩を低減できる。
As described above, according to the hydrodynamic bearing device of the present invention, the lubricant is filled between the bearing and the shaft part, one of which is rotatably supported with respect to the other, and comes into contact with the lubricant. A fluid bearing device in which a coating that reduces wear of the shaft and the bearing is formed on at least one of an outer surface of the shaft and an inner surface of the bearing, wherein the lubricant is a fluorine-based lubricant, By making the difference between the surface tension of the fluorine-based lubricant and the critical surface tension of the film 5 mN / m or less,
Improves the wettability between the lubricant and the film, and the amount of lubricant injected into the minute gap between the shaft and the bearing body is constant, which not only stabilizes the bearing performance, but also breaks the oil film during rotation. Can reduce the seizure of the bearing, and can reduce the generation of bubbles at the interface between the film and the lubricant, so that the leakage of the lubricant due to the thermal expansion of the bubbles can be reduced.

【0047】また、皮膜を、フッ素系潤滑剤の気液界面
付近に形成された皮膜の臨界表面張力よりも軸受の内部
側に形成された皮膜の臨界表面張力が大きくなるよう形
成することで、潤滑剤は相対的に皮膜の表面エネルギー
即ち臨界表面張力が大きい軸受内部の方向へ引きつけら
れるため、軸受からの潤滑剤の漏洩を低減できる。
Further, the coating is formed such that the critical surface tension of the coating formed on the inner side of the bearing is greater than the critical surface tension of the coating formed near the gas-liquid interface of the fluorine-based lubricant, Since the lubricant is attracted toward the inside of the bearing where the surface energy of the film, that is, the critical surface tension is relatively large, leakage of the lubricant from the bearing can be reduced.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の(実施の形態1)における流体軸受装
置の縦断面図
FIG. 1 is a longitudinal sectional view of a hydrodynamic bearing device according to a first embodiment of the present invention.

【図2】同実施の形態における潤滑剤の表面張力と撥油
膜の臨界表面張力の関係を示す測定図
FIG. 2 is a measurement diagram showing a relationship between a surface tension of a lubricant and a critical surface tension of an oil-repellent film in the embodiment.

【図3】本発明の(実施の形態2)における流体軸受装
置の縦断面図
FIG. 3 is a longitudinal sectional view of a hydrodynamic bearing device according to the second embodiment of the present invention.

【図4】従来の流体軸受装置の縦断面図FIG. 4 is a longitudinal sectional view of a conventional hydrodynamic bearing device.

【符号の説明】[Explanation of symbols]

2 固定軸 4a,4b 動圧発生溝 5 スリーブ 10 潤滑剤 12a〜12c 皮膜 2 Fixed shaft 4a, 4b Dynamic pressure generating groove 5 Sleeve 10 Lubricant 12a to 12c Coating

フロントページの続き (51)Int.Cl.7 識別記号 FI テーマコート゛(参考) H02K 7/08 H02K 7/08 A // C10N 20:00 C10N 20:00 Z 30:06 30:06 40:02 40:02 50:08 50:08 Fターム(参考) 3J011 BA06 CA02 JA02 KA01 KA04 MA02 QA05 SC04 4H104 CD01A CD02A CD04A EA01A LA03 PA01 QA11 5H605 AA04 BB05 BB14 BB19 CC04 DD05 EB03 EB06 EB15 EB39 5H607 AA04 BB01 BB14 BB17 BB25 CC01 GG03 GG09 GG12 GG15 KK10 Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat II (reference) H02K 7/08 H02K 7/08 A // C10N 20:00 C10N 20:00 Z 30:06 30:06 40:02 40 : 02 50:08 50:08 F term (reference) 3J011 BA06 CA02 JA02 KA01 KA04 MA02 QA05 SC04 4H104 CD01A CD02A CD04A EA01A LA03 PA01 QA11 5H605 AA04 BB05 BB14 BB19 CC04 DD05 EB03 EB06 EB15 BB39 BB39 BB39 BB39 BB39 BB39 BB39 BB39 BB39 BB39 BB39 BB39 BB39 BB39 BB39 BB39 BB39 GG12 GG15 KK10

Claims (6)

【特許請求の範囲】[Claims] 【請求項1】一方が他方に対して回転自在に支持された
軸部と軸受体との間に潤滑剤を充填し、前記潤滑剤と接
する前記軸部の外面または前記軸受体の内面の少なくと
も一方の面に前記軸部および軸受体の摩耗を低減する皮
膜を形成した流体軸受装置であって、 前記潤滑剤がフッ素系潤滑剤であり、前記フッ素系潤滑
剤の表面張力と前記皮膜の臨界表面張力との差が5mN
/m以下である流体軸受装置。
A lubricant is filled between a shaft part and a bearing body, one of which is rotatably supported with respect to the other, and at least an outer surface of the shaft part or an inner surface of the bearing body which comes into contact with the lubricant. A fluid bearing device in which a film that reduces wear of the shaft portion and the bearing body is formed on one surface, wherein the lubricant is a fluorine-based lubricant, and the surface tension of the fluorine-based lubricant and the criticality of the film are 5mN difference from surface tension
/ M or less.
【請求項2】一方が他方に対して回転自在に支持された
軸部と軸受体との間に潤滑剤を充填し、前記潤滑剤と接
する前記軸部の外面または前記軸受体の内面の少なくと
も一方の面に前記軸部および軸受体の摩耗を低減する皮
膜を形成した流体軸受装置であって、 前記潤滑剤がフッ素系潤滑剤であり、 前記フッ素系潤滑剤の気液界面付近に形成された皮膜の
臨界表面張力よりも軸受の内部側に形成された皮膜の臨
界表面張力が大きい流体軸受装置。
2. A lubricant is filled between a shaft part and a bearing body, one of which is rotatably supported with respect to the other, and at least an outer surface of the shaft part or an inner surface of the bearing body in contact with the lubricant. A fluid bearing device in which a film that reduces wear of the shaft portion and the bearing body is formed on one surface, wherein the lubricant is a fluorine-based lubricant, and is formed near a gas-liquid interface of the fluorine-based lubricant. A hydrodynamic bearing device in which the critical surface tension of a film formed inside the bearing is greater than the critical surface tension of the film.
【請求項3】一方が他方に対して回転自在に支持された
軸部と軸受体との間に潤滑剤を充填し、前記潤滑剤と接
する前記軸部の外面または前記軸受体の内面の少なくと
も一方の面に前記軸部および軸受体の摩耗を低減する皮
膜を形成した流体軸受装置であって、 前記潤滑剤がフッ素系潤滑剤であり、 前記フッ素系潤滑剤の表面張力と前記皮膜の臨界表面張
力との差が5mN/m以下であり、 前記フッ素系潤滑剤の気液界面付近に形成された皮膜の
臨界表面張力よりも軸受の内部側に形成された皮膜の臨
界表面張力が大きい流体軸受装置。
3. A lubricant is filled between a shaft and a bearing, one of which is rotatably supported with respect to the other, and at least an outer surface of the shaft or an inner surface of the bearing which comes into contact with the lubricant. A fluid bearing device in which a film that reduces wear of the shaft portion and the bearing body is formed on one surface, wherein the lubricant is a fluorine-based lubricant, and the surface tension of the fluorine-based lubricant and the criticality of the film are A fluid having a difference from the surface tension of 5 mN / m or less, wherein the critical surface tension of the film formed on the inner side of the bearing is larger than the critical surface tension of the film formed near the gas-liquid interface of the fluorine-based lubricant. Bearing device.
【請求項4】前記皮膜がフッ素含有物である請求項1か
ら請求項3のいずれか1項に記載の流体軸受装置。
4. The hydrodynamic bearing device according to claim 1, wherein the coating is a fluorine-containing material.
【請求項5】前記フッ素含有物が樹脂である請求項4に
記載の流体軸受装置。
5. The hydrodynamic bearing device according to claim 4, wherein said fluorine-containing material is a resin.
【請求項6】前記フッ素系潤滑剤が、パーフルオロポリ
エーテルまたはパーフルオロポリエーテル誘導体の少な
くとも一方を含む請求項1から請求項3のいずれか1項
に記載の流体軸受装置。
6. The hydrodynamic bearing device according to claim 1, wherein the fluorine-based lubricant contains at least one of a perfluoropolyether and a perfluoropolyether derivative.
JP2001128516A 2001-04-26 2001-04-26 Fluid bearing unit Pending JP2002323037A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001128516A JP2002323037A (en) 2001-04-26 2001-04-26 Fluid bearing unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001128516A JP2002323037A (en) 2001-04-26 2001-04-26 Fluid bearing unit

Publications (1)

Publication Number Publication Date
JP2002323037A true JP2002323037A (en) 2002-11-08

Family

ID=18977192

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001128516A Pending JP2002323037A (en) 2001-04-26 2001-04-26 Fluid bearing unit

Country Status (1)

Country Link
JP (1) JP2002323037A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002295490A (en) * 2001-04-04 2002-10-09 Matsushita Electric Ind Co Ltd Fluid bearing device and magnetic disk storage unit using the same
JP2005142326A (en) * 2003-11-06 2005-06-02 Seiko Epson Corp Contact hole, method of forming the same, liquid crystal panel, semiconductor device, and electronic apparatus
JP2005344793A (en) * 2004-06-01 2005-12-15 Nippon Densan Corp Fluid dynamic pressure bearing, method of manufacturing fluid dynamic pressure bearing, spindle motor and recording disk driving device
US7650697B2 (en) 2004-06-01 2010-01-26 Nidec Corporation Methods of manufacturing fluid-dynamic-pressure bearing and spindle motor incorporating the bearing, and spindle motor and recording-disk drive incorporating the bearing

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002295490A (en) * 2001-04-04 2002-10-09 Matsushita Electric Ind Co Ltd Fluid bearing device and magnetic disk storage unit using the same
JP2005142326A (en) * 2003-11-06 2005-06-02 Seiko Epson Corp Contact hole, method of forming the same, liquid crystal panel, semiconductor device, and electronic apparatus
JP4645018B2 (en) * 2003-11-06 2011-03-09 セイコーエプソン株式会社 Contact hole formation method
JP2005344793A (en) * 2004-06-01 2005-12-15 Nippon Densan Corp Fluid dynamic pressure bearing, method of manufacturing fluid dynamic pressure bearing, spindle motor and recording disk driving device
US7650697B2 (en) 2004-06-01 2010-01-26 Nidec Corporation Methods of manufacturing fluid-dynamic-pressure bearing and spindle motor incorporating the bearing, and spindle motor and recording-disk drive incorporating the bearing
JP4649877B2 (en) * 2004-06-01 2011-03-16 日本電産株式会社 Fluid dynamic pressure bearing, fluid dynamic pressure bearing manufacturing method, spindle motor, and recording disk drive device.
US8087156B2 (en) 2004-06-01 2012-01-03 Nidec Corporation Methods of manufacturing fluid-dynamic-pressure bearing and spindle motor incorporating the bearing, and spindle motor and recording-disk drive incorporating the bearing

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