JP2002309376A - Catalyst impartation method for electroless copper plating - Google Patents

Catalyst impartation method for electroless copper plating

Info

Publication number
JP2002309376A
JP2002309376A JP2001110914A JP2001110914A JP2002309376A JP 2002309376 A JP2002309376 A JP 2002309376A JP 2001110914 A JP2001110914 A JP 2001110914A JP 2001110914 A JP2001110914 A JP 2001110914A JP 2002309376 A JP2002309376 A JP 2002309376A
Authority
JP
Japan
Prior art keywords
aqueous solution
solution containing
copper plating
compound
electroless copper
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001110914A
Other languages
Japanese (ja)
Inventor
Junichi Katayama
順一 片山
Chie Nakamoto
千絵 中元
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Okuno Chemical Industries Co Ltd
Original Assignee
Okuno Chemical Industries Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Okuno Chemical Industries Co Ltd filed Critical Okuno Chemical Industries Co Ltd
Priority to JP2001110914A priority Critical patent/JP2002309376A/en
Publication of JP2002309376A publication Critical patent/JP2002309376A/en
Pending legal-status Critical Current

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  • Manufacturing Of Printed Wiring (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a catalyst impartation method for electroless copper plating capable of forming an electroless plating film having a good appearance and an adhesion property without using expensive noble metals as catalytic metals. SOLUTION: This catalyst impartation method for electroless copper plating comprises bringing a material to be plated into contact with an aqueous solution containing a tin compound, into contact with the aqueous solution containing a copper compound, then into contact with the aqueous solution containing a reducing agent.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、無電解銅めっき用
触媒付与方法及び無電解銅めっき方法に関する。
[0001] The present invention relates to a method for applying a catalyst for electroless copper plating and a method for electroless copper plating.

【0002】[0002]

【従来の技術】従来、樹脂類やガラス、セラミック等の
非導電性材料に湿式法によって金属薄膜を形成する方法
としては、非導電性基材上に無電解めっき用の触媒を吸
着させた後、無電解めっき法によって金属薄膜を形成す
る方法が一般的な方法である。
2. Description of the Related Art Conventionally, a method of forming a metal thin film on a non-conductive material such as a resin, glass, or ceramic by a wet method is performed by adsorbing a catalyst for electroless plating on a non-conductive substrate. A method of forming a metal thin film by an electroless plating method is a general method.

【0003】この様な方法では、無電解めっき用触媒と
しては、パラジウムが非常に高い触媒活性を示すことか
ら広く用いられており、通常、センシタイザー・アクチ
ベーター法、キャタリスト・アクセレーター法等の方法
によって、Sn・Pd混合触媒を非導電性基材上に吸着
させる触媒付与方法が採用されている。
[0003] In such a method, palladium is widely used as a catalyst for electroless plating because of its extremely high catalytic activity, and is usually used as a sensitizer activator method, a catalyst accelerator method, or the like. According to the method described above, a catalyst application method in which a Sn / Pd mixed catalyst is adsorbed on a non-conductive substrate is adopted.

【0004】しかしながら、近年、金属パラジウムは、
自動車排ガス用触媒などへの需要が高まって価格が急激
に高騰していることから、パラジウム化合物以外の無電
解めっき用触媒への要望が高まっている。
However, in recent years, metallic palladium has
The demand for catalysts for automobile exhaust gas and the like has increased, and prices have risen sharply. Therefore, demand for catalysts for electroless plating other than palladium compounds has been increasing.

【0005】以前からパラジウムに代わる無電解めっき
用触媒について多くの研究、報告がなされているが、こ
れらの多くは、Pt、Au、Ag、Ruなどの高価な貴
金属を使用したものであり、より安価な触媒物質を用い
て良好な無電解めっき皮膜を形成できる方法が望まれて
いる。
[0005] Many studies and reports have been made on electroless plating catalysts that replace palladium, but many of them use expensive noble metals such as Pt, Au, Ag, and Ru. There is a demand for a method capable of forming a favorable electroless plating film using an inexpensive catalyst substance.

【0006】また、ステンレス鋼、チタンなどを被めっ
き物とする場合にも、触媒を付与することによって無電
解めっきを行うことが可能であるが、これらの素材には
酸化皮膜が生成し易いことから、形成される無電解めっ
き皮膜は密着性に乏しいという欠点がある。このため、
これらの材料に対して、密着性に優れた無電解めっき皮
膜を形成することが可能な前処理方法が要望されてい
る。
[0006] Further, even when stainless steel, titanium, or the like is to be plated, it is possible to perform electroless plating by adding a catalyst, but an oxide film is easily formed on these materials. Therefore, there is a disadvantage that the formed electroless plating film has poor adhesion. For this reason,
There is a demand for a pretreatment method capable of forming an electroless plating film having excellent adhesion to these materials.

【0007】[0007]

【発明が解決しようとする課題】本発明の主な目的は、
触媒金属として高価な貴金属類を使用することなく、外
観が良好で密着性に優れた無電解銅めっき皮膜を形成す
ることが可能な無電解銅めっき用触媒付与方法を提供す
ることである。
SUMMARY OF THE INVENTION The main object of the present invention is to:
An object of the present invention is to provide an electroless copper plating catalyst applying method capable of forming an electroless copper plating film having good appearance and excellent adhesion without using expensive noble metals as a catalyst metal.

【0008】[0008]

【課題を解決するための手段】本発明者は、上記した問
題点を解決すべく鋭意研究を重ねた結果、被めっき物
を、スズ化合物を含有する水溶液と銅化合物を含有する
水溶液に順次接触させた後、更に、還元剤を含有する水
溶液に接触させて活性化することにより、貴金属化合物
を触媒物質として用いることなく、外観が良好で密着性
に優れた無電解銅めっき皮膜を形成することが可能とな
ることを見出し、ここに本発明を完成するに至った。
The present inventors have conducted intensive studies to solve the above-mentioned problems, and as a result, the object to be plated was brought into contact with an aqueous solution containing a tin compound and an aqueous solution containing a copper compound sequentially. After that, by further contacting with an aqueous solution containing a reducing agent and activating it, an electroless copper plating film having a good appearance and excellent adhesion can be formed without using a noble metal compound as a catalyst substance. Have been found possible, and the present invention has been completed here.

【0009】即ち、本発明は、下記の無電解銅めっき用
触媒付与方法及び無電解銅めっき方法を提供するもので
ある。 1. 被めっき物をスズ化合物を含有する水溶液に接触
させ、次いで銅化合物を含有する水溶液に接触させた
後、還元剤を含有する水溶液に接触させることを特徴と
する無電解銅めっき用触媒付与方法。 2. スズ化合物を含有する水溶液が、水溶性スズ化合
物を、スズ金属量として0.001〜1mol/l含有
する水溶液であり、銅化合物を含有する水溶液が、水溶
性銅化合物を、銅金属量として、0.001〜2mol
/l含有する水溶液であり、還元剤を含有する水溶液
が、アミンボラン類、水素化ホウ素化合物、次亜リン酸
塩、アルデヒド類及びヒドラジンから選ばれた少なくと
も一種の化合物を0.001〜0.5mol/l含有す
る水溶液である上記項1に記載の無電解銅めっき用触媒
付与方法。 3. 上記項1又は2の方法によって被めっき物に無電
解銅めっき用触媒を付与した後、無電解銅めっき処理を
行うことを特徴とする無電解銅めっき方法。
That is, the present invention provides the following electroless copper plating catalyst application method and electroless copper plating method. 1. A method for applying a catalyst for electroless copper plating, comprising: bringing an object to be plated into contact with an aqueous solution containing a tin compound, then contacting with an aqueous solution containing a copper compound, and then contacting with an aqueous solution containing a reducing agent. 2. The aqueous solution containing a tin compound is an aqueous solution containing a water-soluble tin compound in an amount of 0.001 to 1 mol / l as a tin metal amount, and the aqueous solution containing a copper compound is an aqueous solution containing a water-soluble copper compound in an amount of copper metal, 0.001-2mol
/ L containing an aqueous solution containing at least one compound selected from amine borane, borohydride compound, hypophosphite, aldehyde and hydrazine in an amount of 0.001 to 0.5 mol. Item 1. The method for applying a catalyst for electroless copper plating according to Item 1, which is an aqueous solution containing 1 / l. 3. An electroless copper plating method, comprising: applying an electroless copper plating catalyst to an object to be plated by the method of the above item 1 or 2, and then performing an electroless copper plating treatment.

【0010】[0010]

【発明の実施の形態】本発明の無電解銅めっき用触媒付
与方法方法は、スズ化合物を含有する水溶液に被めっき
物を接触させた後、銅化合物を含有する水溶液に接触さ
せ、次いで、還元剤を含有する水溶液に接触させること
を特徴とする方法である。
BEST MODE FOR CARRYING OUT THE INVENTION In the method for applying a catalyst for electroless copper plating of the present invention, an object to be plated is brought into contact with an aqueous solution containing a tin compound, and then contacted with an aqueous solution containing a copper compound. The method is characterized by contacting with an aqueous solution containing an agent.

【0011】本発明の方法では、被めっき物の種類につ
いては特に限定はなく、金属などの導電性材料;アクロ
ニトリル・ブタジエン・スチレン樹脂(ABS樹脂)、
ポリイミド樹脂、エポキシ樹脂、ポリカーボネート(P
C)、ポリエチレンテレフタレート(PET)などの樹
脂類やガラス、セラミックス等の非導電性材料、プリン
ト配線基板等の各種の材料を被めっき物とすることがで
きる。特に、本発明の触媒付与方法によれば、ステンレ
ス鋼、チタンなどの酸化皮膜が生成し易い材料に対して
も、密着性の良好な無電解銅めっき皮膜を形成すること
が可能である。
In the method of the present invention, the type of the object to be plated is not particularly limited, and a conductive material such as metal; acrylonitrile / butadiene / styrene resin (ABS resin);
Polyimide resin, epoxy resin, polycarbonate (P
C), various kinds of materials such as resins such as polyethylene terephthalate (PET), non-conductive materials such as glass and ceramics, and printed wiring boards can be used as the objects to be plated. In particular, according to the method for applying a catalyst of the present invention, it is possible to form an electroless copper plating film having good adhesion even on materials such as stainless steel and titanium in which an oxide film is easily formed.

【0012】本発明の方法では、まず、被めっき物に対
して、必要に応じて、脱脂処理、コンディショニング処
理、エッチング処理等の前処理を行う。これらの処理方
法については、常法に従えばよい。
In the method of the present invention, first, a pretreatment such as a degreasing treatment, a conditioning treatment, and an etching treatment is performed on an object to be plated, if necessary. About these processing methods, you may follow a conventional method.

【0013】次いで、被めっき物をスズ化合物を含有す
る水溶液に接触させた後、銅化合物を含有する水溶液に
接触させる。
Next, after the object to be plated is brought into contact with an aqueous solution containing a tin compound, it is brought into contact with an aqueous solution containing a copper compound.

【0014】本発明では、スズ化合物としては水溶性の
化合物であれば特に限定なく使用できる。その具体例と
しては、硫酸第一スズ、塩化第一スズ等を挙げることが
できる。スズ化合物は、一種単独又は二種以上混合して
用いることができる。スズ化合物を含有する水溶液にお
けるスズ化合物の濃度は、スズ金属量として0.001
〜1mol/l程度とすることが好ましく、0.01〜
0.5mol/l程度とすることがより好ましい。
In the present invention, any tin compound can be used without particular limitation as long as it is a water-soluble compound. Specific examples thereof include stannous sulfate and stannous chloride. Tin compounds can be used alone or in combination of two or more. The concentration of the tin compound in the aqueous solution containing the tin compound is 0.001 as a tin metal amount.
To about 1 mol / l, preferably 0.01 to 1 mol / l.
More preferably, it is about 0.5 mol / l.

【0015】スズ化合物を含有する水溶液は、スズ化合
物を安定に溶解できるpH範囲で使用でき、通常、pH
3程度以下とすればよい。pH調整剤としては、例え
ば、硫酸、塩酸、酢酸等の無機酸を用いることができ
る。
The aqueous solution containing the tin compound can be used in a pH range in which the tin compound can be stably dissolved.
It may be about 3 or less. As the pH adjuster, for example, an inorganic acid such as sulfuric acid, hydrochloric acid, and acetic acid can be used.

【0016】スズ化合物を含有する水溶液に被めっき物
を接触させる方法については特に限定はなく、一般的に
は、処理液中に被めっき物を浸漬すればよいが、その
他、処理液を噴霧する方法等も採用可能である。
The method of bringing the object to be plated into contact with the aqueous solution containing the tin compound is not particularly limited. Generally, the object to be plated may be immersed in the processing solution. Methods and the like can also be adopted.

【0017】スズ化合物を含有する水溶液による処理条
件については、特に限定的ではなく、液温、処理時間等
については広い範囲から選択し得るが、処理液の液温を
10〜60℃程度とすることが好ましく、20〜40℃
程度とすることがより好ましい。この際、処理液の温度
を高くすることによって、被めっき物へのスズ化合物の
吸着量を増加させることが可能であるが、処理液の温度
が高くなりすぎると4価のスズ化合物が生成して沈殿が
生じ易くなるので好ましくない。処理時間は0.5〜1
0分間程度とすることが好ましく、1〜5分間程度とす
ることがより好ましい。
The conditions for the treatment with the aqueous solution containing the tin compound are not particularly limited, and the solution temperature and the treatment time can be selected from a wide range, but the solution temperature of the treatment solution should be about 10 to 60 ° C. Preferably, 20 to 40 ° C
It is more preferable to set the degree. At this time, by increasing the temperature of the processing solution, it is possible to increase the amount of the tin compound adsorbed on the object to be plated. However, if the temperature of the processing solution is too high, a tetravalent tin compound is generated. This is not preferable because precipitation easily occurs. Processing time is 0.5-1
It is preferably about 0 minutes, and more preferably about 1 to 5 minutes.

【0018】銅化合物を含有する水溶液に配合できる銅
化合物としては、水溶性の化合物であればよく、具体例
としては、硫酸銅、塩化銅、硝酸銅、酢酸銅などを挙げ
ることができる。銅化合物は、一種単独又は二種以上混
合して用いることができる。
The copper compound which can be added to the aqueous solution containing the copper compound may be any water-soluble compound, and specific examples thereof include copper sulfate, copper chloride, copper nitrate, and copper acetate. The copper compounds can be used alone or as a mixture of two or more.

【0019】銅化合物を含有する水溶液中における銅化
合物の濃度は、銅金属濃度として、0.001〜2mo
l/l程度とすることが好ましく、0.05〜0.5m
ol/l程度とすることがより好ましい。
The concentration of the copper compound in the aqueous solution containing the copper compound is 0.001 to 2 mol as the copper metal concentration.
1 / l, preferably 0.05 to 0.5 m
It is more preferably about ol / l.

【0020】銅化合物を含有する水溶液のpHは、該水
溶液中に含まれる銅化合物を安定に溶解できる範囲であ
れば良く、通常は、pH3〜9程度、好ましくは4〜6
程度とすればよい。また、pH調整の際には、水酸化物
の沈殿を防止するために、酢酸、コハク酸、マロン酸、
マレイン酸、酒石酸、クエン酸などの金属錯化剤を添加
しても良い。
The pH of the aqueous solution containing the copper compound may be within a range in which the copper compound contained in the aqueous solution can be stably dissolved, and is usually about pH 3 to 9, preferably 4 to 6.
It should be about the degree. In adjusting the pH, acetic acid, succinic acid, malonic acid,
A metal complexing agent such as maleic acid, tartaric acid or citric acid may be added.

【0021】銅化合物を含有する水溶液に被めっき物を
接触させる方法については特に限定はなく、一般的に
は、処理液中に被めっき物を浸漬すればよいが、その
他、処理液を噴霧する方法等も採用可能である。
The method of bringing the object to be plated into contact with the aqueous solution containing the copper compound is not particularly limited. Generally, the object to be plated may be immersed in the processing solution. Methods and the like can also be adopted.

【0022】銅化合物を含有する水溶液による処理条件
については特に限定的ではなく、液温、処理時間等につ
いては広い範囲から選択し得るが、通常、処理液の液温
を10〜80℃程度とすることが好ましく、20〜40
℃程度とすることがより好ましい。処理時間は、1〜1
0分間程度とすることが好ましく、2〜5分間程度とす
ることがより好ましい。
The conditions for the treatment with the aqueous solution containing the copper compound are not particularly limited, and the solution temperature, the treatment time and the like can be selected from a wide range. However, the solution temperature of the treatment solution is usually about 10 to 80 ° C. Preferably 20 to 40
It is more preferable to set the temperature to about ° C. Processing time is 1 to 1
The time is preferably about 0 minutes, more preferably about 2 to 5 minutes.

【0023】次いで、被めっき物を還元剤を含有する水
溶液に接触させることによって活性化処理を行う。還元
剤としては、還元作用を有する水溶性化合物を用いるこ
とができる。還元剤の具体例としては、ジメチルアミン
ボラン(DMAB)、トリメチルアミンボラン(TMA
B)等のアミンボラン類;水素化ホウ素カリウム、水素
化ホウ素ナトリウム等の水素化ホウ素化合物;次亜リン
酸ナトリウム、次亜リン酸カリウム等の次亜リン酸塩;
ホルマリン等のアルデヒド類;ヒドラジンなどを挙げる
ことができる。還元剤は、一種単独又は二種以上混合し
て用いることができる。還元剤の濃度は、0.001〜
0.5mol/l程度とすることが好ましく、0.01
〜0.2mol/l程度とすることがより好ましい。こ
の水溶液のpHは、特に限定的ではなく、使用する還元
剤の種類に応じて、還元性能が良好で還元剤の安定性が
阻害されない範囲に適宜設定すればよい。通常は、pH
3程度以上とすることが好ましい。
Next, an activation treatment is performed by bringing the object to be plated into contact with an aqueous solution containing a reducing agent. As the reducing agent, a water-soluble compound having a reducing action can be used. Specific examples of the reducing agent include dimethylamine borane (DMAB) and trimethylamine borane (TMA).
Amine borane such as B); borohydride compounds such as potassium borohydride and sodium borohydride; hypophosphites such as sodium hypophosphite and potassium hypophosphite;
Aldehydes such as formalin; hydrazine; The reducing agents can be used alone or in combination of two or more. The concentration of the reducing agent is 0.001 to
It is preferably about 0.5 mol / l, and 0.01
More preferably, it is about 0.2 mol / l. The pH of the aqueous solution is not particularly limited, and may be appropriately set according to the type of the reducing agent to be used, within a range where the reducing performance is good and the stability of the reducing agent is not hindered. Usually, pH
It is preferred to be about 3 or more.

【0024】還元剤を含有する水溶液に被めっき物を接
触させる方法については特に限定はなく、一般的には、
処理液中に被めっき物を浸漬すればよいが、その他、処
理液を噴霧する方法等も採用可能である。
The method for bringing the object to be plated into contact with an aqueous solution containing a reducing agent is not particularly limited.
What is necessary is just to immerse the object to be plated in the treatment liquid, but other methods such as spraying the treatment liquid can also be adopted.

【0025】還元剤を含有する水溶液による処理条件に
ついては、特に限定的ではなく、液温、処理時間等につ
いては広い範囲から選択し得るが、特に、処理液の液温
を20〜80℃程度とすることが好ましく、50〜70
℃程度とすることがより好ましい。処理時間は、1〜2
0分間程度とすることが好ましく、3〜10分間程度と
することがより好ましい。
The conditions for the treatment with the aqueous solution containing the reducing agent are not particularly limited, and the temperature of the solution, the treatment time and the like can be selected from a wide range. Preferably, 50 to 70
It is more preferable to set the temperature to about ° C. Processing time is 1-2
It is preferably about 0 minutes, more preferably about 3 to 10 minutes.

【0026】以上の方法によって触媒を付与した後、無
電解銅めっきを行うことによって、無電解銅めっき皮膜
を形成することができる。
After applying the catalyst by the above method, electroless copper plating is performed to form an electroless copper plating film.

【0027】無電解銅めっき液としては、公知の各種無
電解銅めっき液を用いることができる。この様な無電解
銅めっき液としては、例えば、銅化合物、還元剤として
のホルムアルデヒド、グリオキシル酸、ジメチルアミン
ボラン、次亜リン酸ソーダ等、錯化剤としてのエチレン
ジアミン四酢酸、酒石酸、これらの塩等の他に、必要に
応じて、pH調整剤、安定剤、その他の添加剤(シアン
化合物、ジピリジル、チオ尿素等)等を含有する水溶液
からなる自己触媒型の無電解銅めっき液を挙げることが
できる。銅めっきの条件については、使用するめっき液
の種類に応じて、一般的なめっき条件を適宜採用すれば
よい。
As the electroless copper plating solution, various known electroless copper plating solutions can be used. Examples of such an electroless copper plating solution include copper compounds, formaldehyde as a reducing agent, glyoxylic acid, dimethylamine borane, sodium hypophosphite, etc., ethylenediaminetetraacetic acid as a complexing agent, tartaric acid, and salts thereof. Other than the above, there may be mentioned, as necessary, a self-catalytic electroless copper plating solution composed of an aqueous solution containing a pH adjuster, a stabilizer, and other additives (cyan compound, dipyridyl, thiourea, etc.). Can be. Regarding the conditions for copper plating, general plating conditions may be appropriately adopted according to the type of plating solution to be used.

【0028】更に、無電解銅めっき皮膜を形成した後、
必要に応じて、常法に従って各種の電気めっきを行うこ
とも可能である。
Further, after forming an electroless copper plating film,
If necessary, various types of electroplating can be performed according to a conventional method.

【0029】尚、本発明方法では、通常、各処理の前に
は、前工程からの処理液の持ち込みを防止するために、
水洗処理を行う。
In the method of the present invention, usually before each treatment, in order to prevent the treatment liquid from being brought in from the preceding step,
Perform a water washing process.

【0030】本発明方法によって無電解銅めっき用触媒
を付与した後、無電解銅めっきを行うことによって、非
導電性材料、導電性材料等の各種の材料上に、外観が良
好で均一性に優れ、しかも密着性の良好な無電解銅めっ
き皮膜を形成することができる。特に、本発明の方法に
よれば、ステンレス鋼、チタン等の酸化皮膜が生成し易
い材料に対しても、密着性の良好な無電解銅めっき皮膜
を形成することが可能である。
After applying the electroless copper plating catalyst according to the method of the present invention, the electroless copper plating is carried out to obtain a good and uniform appearance on various materials such as a non-conductive material and a conductive material. An electroless copper plating film having excellent and good adhesion can be formed. In particular, according to the method of the present invention, it is possible to form an electroless copper plating film having good adhesion even on materials such as stainless steel and titanium in which an oxide film is easily formed.

【0031】[0031]

【発明の効果】本発明の触媒付与方法によれば、高価な
貴金属化合物を触媒物質として用いることなく、無電解
銅めっき対する優れた触媒活性を各種の被めっき物に付
与することができる。
According to the method for applying a catalyst of the present invention, excellent catalytic activity for electroless copper plating can be imparted to various objects to be plated without using an expensive noble metal compound as a catalyst substance.

【0032】本発明の触媒付与方法を用いて形成される
無電解銅めっき皮膜は、密着性に優れた均一なめっき皮
膜となる。
The electroless copper plating film formed using the catalyst application method of the present invention is a uniform plating film having excellent adhesion.

【0033】[0033]

【実施例】以下、実施例を挙げて本発明を更に詳細に説
明する。
EXAMPLES Hereinafter, the present invention will be described in more detail with reference to examples.

【0034】実施例1 ABS樹脂(三菱レーヨン(株)製、大きさ5×10c
m)を被めっき物とし、これを、CrO3を400g/
lとH2SO4を400g/l含有するクロム酸エッチン
グ液中に70℃で10分間浸漬してエッチング処理を行
なった。
Example 1 ABS resin (manufactured by Mitsubishi Rayon Co., Ltd., size 5 × 10c)
The m) and the object to be plated, this, CrO 3 400 g /
1 and H 2 SO 4 were immersed in a chromic acid etching solution containing 400 g / l at 70 ° C. for 10 minutes to perform an etching treatment.

【0035】その後、35%HClを10ml/lと下
記表1に示す量の塩化第一スズを含有する水溶液中に2
5℃で2分間浸漬した後、酢酸銅を含有する水溶液中に
25℃で2分間浸漬し、更に、還元剤としてジメチルア
ミンボラン(DMAB)を含有する水溶液中に60℃で
5分間浸漬した。
Thereafter, 2% of 35% HCl was added to an aqueous solution containing 10 ml / l of stannous chloride as shown in Table 1 below.
After immersion at 5 ° C. for 2 minutes, it was immersed in an aqueous solution containing copper acetate at 25 ° C. for 2 minutes, and further immersed in an aqueous solution containing dimethylamine borane (DMAB) as a reducing agent at 60 ° C. for 5 minutes.

【0036】次いで、無電解銅めっき浴(奥野製薬工業
(株)製、OPC−ビルドカッパー)中に50℃で10
分間浸漬して無電解銅めっきを行った後、めっき皮膜の
外観と密着性を調べた。めっき皮膜の外観は目視によっ
て評価し、めっき皮膜の密着性は、めっき皮膜上にセロ
ファンテープを貼りつけ、急激に剥離した際のめっき皮
膜の剥離の有無によって評価した。結果を下記表1に示
す。
Then, it was placed in an electroless copper plating bath (OPC-build copper, manufactured by Okuno Pharmaceutical Co., Ltd.) at 50 ° C. for 10 minutes.
After immersion in electroless copper plating by immersion for minutes, the appearance and adhesion of the plating film were examined. The appearance of the plating film was visually evaluated, and the adhesion of the plating film was evaluated by attaching a cellophane tape to the plating film and determining whether or not the plating film was peeled off when the film was rapidly peeled off. The results are shown in Table 1 below.

【0037】[0037]

【表1】 実施例2 エポキシ樹脂両面銅張スルホール基板(松下電工(株)
製、R−1705、大きさ5×10cm)を被めっき物
とし、過硫酸ソーダを10g/lと98%硫酸を1ml
/l含有するエッチング溶液中に25℃で2分間浸漬し
てエッチング処理を行った。次いで、98%硫酸100
ml/l溶液中に25℃で2分間浸漬して銅箔表面のス
マットを除去した。
[Table 1] Example 2 Copper-clad through-hole board with epoxy resin on both sides (Matsushita Electric Works, Ltd.)
Made, R-1705, size 5 × 10 cm) as an object to be plated, sodium persulfate at 10 g / l and 98% sulfuric acid at 1 ml.
1 / l for 2 minutes at 25 ° C. in an etching solution containing an etching solution. Then, 98% sulfuric acid 100
It was immersed in a ml / l solution at 25 ° C for 2 minutes to remove the smut on the surface of the copper foil.

【0038】その後、35%HClを10ml/lと下
記表2に示す量の塩化第一スズを含有する水溶液中に2
5℃で2分間浸漬した後、酢酸銅を含有する水溶液中に
25℃で2分間浸漬し、更に、還元剤としてジメチルア
ミンボラン(DMAB)を含有する溶液中に60℃で5
分間浸漬した。
Thereafter, 35% HCl was added to an aqueous solution containing 10 ml / l of stannous chloride in an amount shown in Table 2 below.
After immersion at 5 ° C. for 2 minutes, immersion in an aqueous solution containing copper acetate at 25 ° C. for 2 minutes, and further immersion in a solution containing dimethylamine borane (DMAB) as a reducing agent at 60 ° C.
Soak for minutes.

【0039】次いで、無電解銅めっき液(奥野製薬工業
(株)製、OPC−ビルドカッパー)中に50℃で10
分間浸漬して無電解銅めっきを行った後、スルーホール
内の析出性、及び銅箔表面の密着性を調べた。
Then, it was placed in an electroless copper plating solution (OPC-build copper, manufactured by Okuno Pharmaceutical Co., Ltd.) at 50 ° C. for 10 minutes.
After immersion in electroless copper plating by immersion for a minute, the deposition property in the through hole and the adhesion of the copper foil surface were examined.

【0040】スルーホール内の析出性については、目視
でめっき皮膜の析出状態を観察して評価した。銅箔表面
の密着性は、無電解銅めっき皮膜形成後に、電気銅めっ
き皮膜を30μm形成し、電気銅めっき皮膜の表面にエ
ポキシ樹脂面まで達するV字型の切り込みを入れてめっ
き皮膜を引き剥がした際に、剥離状態を目視で観察して
評価した。めっき皮膜と銅箔が密着したままエポキシ樹
脂表面から剥がれた場合には、銅箔と無電解銅めっき皮
膜の密着性が良いので、密着性良好と評価した。
The deposition property in the through-hole was evaluated by visually observing the deposition state of the plating film. The adhesion of the copper foil surface is as follows. After forming the electroless copper plating film, form an electrolytic copper plating film with a thickness of 30 μm, make a V-shaped cut in the surface of the electrolytic copper plating film to the epoxy resin surface, and peel off the plating film. At that time, the peeled state was visually observed and evaluated. When the plating film and the copper foil were peeled off from the epoxy resin surface while keeping the adhesion, the adhesion between the copper foil and the electroless copper plating film was good, and thus the adhesion was evaluated as good.

【0041】[0041]

【表2】 [Table 2]

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 4K022 AA02 AA03 AA04 AA13 BA08 CA04 CA06 CA18 CA19 DA01 DB02 DB03 DB05 DB06 5E343 AA01 AA11 BB24 BB71 CC71 DD33 ER02 ER07 GG02  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 4K022 AA02 AA03 AA04 AA13 BA08 CA04 CA06 CA18 CA19 DA01 DB02 DB03 DB05 DB06 5E343 AA01 AA11 BB24 BB71 CC71 DD33 ER02 ER07 GG02

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】被めっき物をスズ化合物を含有する水溶液
に接触させ、次いで銅化合物を含有する水溶液に接触さ
せた後、還元剤を含有する水溶液に接触させることを特
徴とする無電解銅めっき用触媒付与方法。
1. An electroless copper plating method comprising: bringing an object to be plated into contact with an aqueous solution containing a tin compound, then contacting with an aqueous solution containing a copper compound, and then contacting with an aqueous solution containing a reducing agent. Catalyst application method.
【請求項2】スズ化合物を含有する水溶液が、水溶性ス
ズ化合物を、スズ金属量として0.001〜1mol/
l含有する水溶液であり、銅化合物を含有する水溶液
が、水溶性銅化合物を、銅金属量として、0.001〜
2mol/l含有する水溶液であり、還元剤を含有する
水溶液が、アミンボラン類、水素化ホウ素化合物、次亜
リン酸塩、アルデヒド類及びヒドラジンから選ばれた少
なくとも一種の化合物を0.001〜0.5mol/l
含有する水溶液である請求項1に記載の無電解銅めっき
用触媒付与方法。
2. The aqueous solution containing a tin compound is prepared by converting a water-soluble tin compound to a tin metal amount of 0.001-1 mol / mol.
l containing aqueous solution, the aqueous solution containing a copper compound, the water-soluble copper compound, as a copper metal amount, 0.001 to
An aqueous solution containing 2 mol / l, and the aqueous solution containing a reducing agent contains at least one compound selected from an amine borane, a borohydride compound, a hypophosphite, an aldehyde, and hydrazine in an amount of 0.001 to 0.1. 5mol / l
The method for applying a catalyst for electroless copper plating according to claim 1, which is an aqueous solution.
【請求項3】請求項1又は2の方法によって被めっき物
に無電解銅めっき用触媒を付与した後、無電解銅めっき
処理を行うことを特徴とする無電解銅めっき方法。
3. A method for electroless copper plating, comprising applying an electroless copper plating catalyst to an object to be plated by the method according to claim 1 or 2, and then performing an electroless copper plating treatment.
JP2001110914A 2001-04-10 2001-04-10 Catalyst impartation method for electroless copper plating Pending JP2002309376A (en)

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Publications (1)

Publication Number Publication Date
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Family

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Country Status (1)

Country Link
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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007100164A (en) * 2005-10-04 2007-04-19 Alps Electric Co Ltd Catalyst treatment method, electroless plating method, and circuit forming method using electroless plating method
JP2008214706A (en) * 2007-03-06 2008-09-18 Kanto Gakuin Univ Surface Engineering Research Institute Catalytic solution used in electroless plating process, electroless plating process using the catalytic solution, and object to be plated on which metal film is formed using the electroless plating process
KR20160013261A (en) 2011-11-14 2016-02-03 이시하라 케미칼 가부시키가이샤 Pretreatment solution for electroless copper plating, and electroless copper plating method

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007100164A (en) * 2005-10-04 2007-04-19 Alps Electric Co Ltd Catalyst treatment method, electroless plating method, and circuit forming method using electroless plating method
WO2007043380A1 (en) * 2005-10-04 2007-04-19 Alps Electric Co., Ltd. Catalyst treatment method, electroless plating method, and method for formation of circuit by using the electroless plating method
JP4521345B2 (en) * 2005-10-04 2010-08-11 アルプス電気株式会社 Catalyst treatment method, electroless plating method, and circuit forming method using electroless plating method
JP2008214706A (en) * 2007-03-06 2008-09-18 Kanto Gakuin Univ Surface Engineering Research Institute Catalytic solution used in electroless plating process, electroless plating process using the catalytic solution, and object to be plated on which metal film is formed using the electroless plating process
KR20160013261A (en) 2011-11-14 2016-02-03 이시하라 케미칼 가부시키가이샤 Pretreatment solution for electroless copper plating, and electroless copper plating method

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