JP2002307367A - Compliance device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compliance device never to cause dispersion in motion due to a hitting state, simplified itself, easy to machine and assemble and high in repeating precision of a positional resetting means. SOLUTION: This compliance device is furnished with a connecting part 4 on an upper surface of which an opened first fitting groove 8 extends in the X axial direction and on a lower surface of which an opened second fitting groove 13 extends in the Y axial direction, a fixed part 2 to be connected to the connecting part 4 in the first fitting groove 8 through a first guide means 5, a movable part 3 connected to the connecting part 4 in the second fitting groove 13 through the second guide means 6 and the positional resetting means 7 to reset a relative position with the fixed part 2 and the movable part 3 at an initial position, the first guide means 5 is furnished with a circular arc first track surface 9 and a circular arc second track surface 10, the second guide means 6 is furnished with a third track surface 14 and a fourth track surface 15, and a curvature center of the first track surface 9 and the second track surface 10 and a curvature center of the third track surface 14 and the fourth track surface 15 match with each other.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a compliance device interposed between a robot arm and a hand in, for example, an automatic assembly device.

A compliance device displaces a movable portion relative to a fixed portion by a stress generated by abutting a transfer member such as an electronic component held by the movable portion against a member to be mounted such as a substrate. This corrects the relative displacement between the conveying member and the mounted member, the inclination of the shaft, the inclination of the surface, and the like.

[0003]

2. Description of the Related Art Hitherto, as a compliance device, there has been proposed a device in which a fixed portion and a movable portion are movably connected on a plane by a thrust ball bearing and rotatably connected by a spherical slide bearing. According to the apparatus, for example, when inserting the rotation axis of the motor as the mounted member into the center hole of the disk as the transport member, the disk is provided on the rotation axis even if the axis is slightly shifted or inclined. Since the guide member is guided by the tapered surface and is displaced in the X and Y directions, the insertion operation can be performed smoothly (see Japanese Patent Application Laid-Open No. 7-96487).

However, in a surface mounting device or the like,
When correcting the relative inclination of the surface between the IC chip as the transfer member and the substrate as the member to be mounted, the amount of rotation around the Z axis varies depending on the abutting state of the IC chip and the substrate. In addition, there is a disadvantage that the phase of the IC chip with respect to the substrate varies. Since the substrate is usually positioned on the basis of the end face or the hole, if the phase varies, the productivity in the next step is reduced. Therefore, the movable part holding the IC chip has the X-axis and the Y-axis.
It is preferable to translate in parallel to the axis. This is not limited to the case where the relative inclination of the surface is corrected. Even when the shaft is inserted into the hole, the rotation around the Z axis often hinders a smooth operation.

In the conventional compliance device, the posture of the movable portion is returned to the initial position by pressing three relatively small balls against the tapered surface. A position shift occurs between the position and the relative position of the tapered surface, and the ball and the tapered surface come into point contact with each other, so that the contact surface is unevenly worn and the repetition accuracy is deteriorated. In order to make the three balls and the tapered surface come into line contact, the clearance between the balls and the guide holes may be increased to some extent. However, if the clearance is increased in this manner, the positional accuracy of the repetition will be reduced accordingly. There is.

As another prior art, as shown in FIG. 12, a movable portion 52 and a fixed portion 53 are provided so as to be able to advance and retreat in the X-axis and Y-axis directions and to be rotatable around the X-axis and Y-axis. Are connected to each other.

However, according to this conventional technique, it is difficult to manufacture a curved track member and to process a curved track, and it is troublesome to perform assembly adjustment for adjusting the center of curvature.
There is a disadvantage that the production cost is very high. In addition, although it is preferable to correct the inclination of the opposing surface, there is an inconvenience that the positional deviation cannot be corrected.

[0008]

SUMMARY OF THE INVENTION In view of the foregoing, it is an object of the present invention to provide a compliance device in which the operation does not vary due to the abutting state, and simplifies the device itself and processes the device. And a compliance device that is easy to assemble. It is another object of the present invention to provide a compliance device with a high repeatability of the posture return means.

[0009]

To achieve the above object, a compliance device according to claim 1 of the present invention comprises:
A first fitting groove that opens in the upper surface extends in the X-axis direction and a second fitting groove that opens in the lower surface extends in the Y-axis direction; A fixed portion connected to the connecting portion in the mounting groove, a movable portion connected to the connecting portion in the second fitting groove via second guide means, and a relative position between the fixed portion and the movable portion. A posture returning means for returning a normal posture to an initial position, wherein the first guide means comprises: an arc-shaped first raceway surface provided in the first fitting groove; and An arc-shaped second raceway surface provided in the second fitting means, wherein the second guide means has an arc-shaped third raceway surface provided in the second fitting groove, and a circle provided in the movable portion. An arc-shaped fourth raceway surface, wherein the centers of curvature of the first raceway surface and the second raceway surface coincide in the first fitting groove, and In which the center of curvature of the third raceway surface and a fourth raceway surface and wherein the match in the second HamaSomizo.

According to a second aspect of the present invention, there is provided the compliance device according to the first aspect, wherein the first guide means includes a plurality of balls interposed between the first track surface and the second track surface. And a first cage for holding the ball, wherein a second guide means includes a plurality of balls interposed between a third raceway surface and a fourth raceway surface, and a second cage for holding the ball. Wherein the first cage and the second cage are engaged by notches facing each other.

According to a third aspect of the present invention, there is provided the compliance device according to the first or second aspect, wherein the posture return means includes a cylinder hole penetrating substantially in the center of the fixing portion in the Z-axis direction; A regulating member inserted into the cylinder hole so as to be able to advance and retreat, a regulating portion provided at one end of the regulating member, and a copying portion provided on an upper surface of the movable portion so as to face the regulating portion; And the copying portion are formed in a substantially conical shape, and the other is formed in a substantially conical or cylindrical shape that can be engaged with one of them.

According to a fourth aspect of the present invention, there is provided a compliance device, comprising: a fixed portion having a raceway surface that forms at least a part of a cylindrical surface; and a fixed portion that is relatively displaced along the raceway surface. The assembled connection portion, another track surface provided on the connection portion in a direction different from the track surface, and a movable assembly mounted on the connection portion so as to be relatively displaced along the other track surface. And a posture return means including a regulating part and a copying part, for returning the relative position of the fixed part and the movable part to the initial movement position.

[0013] In the compliance device according to the first aspect of the present invention having the above-described structure, the first guide means allows the fixed portion to move forward and backward in the X-axis direction with respect to the connecting portion.
The movable portion is connected to the connecting portion by the second guide means so as to be able to advance and retreat in the Y-axis direction and to be rotatable around the Y-axis. When the stress generated by abutting the transport member against the mounted member, that is, an external force acts on the movable portion, the movable portion moves in the X-axis and Y-axis directions without rotating the fixed portion around the Z-axis. And rotate around the X axis and the Y axis. These are not displaced independently but are displaced in a complex manner according to the point of action or the direction of action of the external force. Therefore, without changing the phase between the mounted member and the transport member,
It is possible to correct relative displacement, axis inclination, surface inclination, and the like. In addition, since the movable portion can be rotated around the abutting portion between the transport member held at the leading end and the mounted member, the movable member can be rotated when correcting the inclination of the axis or the surface of the transport member. There is no displacement. Therefore, it is possible to prevent the transport member and the mounted member from being damaged or damaged. Further, since the movable portion does not rotate around the Z axis with respect to the fixed portion, there is no need to separately provide a rotation preventing mechanism. Therefore, the apparatus can be simplified and the production cost can be kept low. In addition, since the movable part and the fixed part are fitted in the fitting grooves on the upper and lower sides of the connecting part, the movable part and the fixed part can be vertically overlapped, so that it is possible to manufacture a compact in the longitudinal direction. .

Further, the present invention has the above configuration.
In the compliance device according to the above, the first guide means and the second guide means are each a point contact rolling ball bearing having a finite track, so that the rolling resistance is extremely small. Therefore, the compliance device can be operated even if the stress generated by the contact between the transfer member and the mounted member is small, so that the transfer member and the mounted member are not damaged. Further, a notch is provided in each of the first retainer provided in the first guide means and the second retainer provided in the second guide means, and the first retainer and the second retainer are provided by the notch. Since they are engaged with each other, the retainer and the ball do not fall out of the compliance device without separately providing a fall prevention means. Therefore, it is possible to simplify the apparatus and to reduce the manufacturing cost.

[0015] Further, according to the present invention having the above configuration,
In one of the compliance devices, one of the regulating portion and the copying portion is formed in a substantially conical shape, and the other is formed in a substantially conical or cylindrical shape capable of engaging with one of the regulating portions. By doing so, it becomes possible to return the movable part to the initial position with respect to the fixed part. Further, since the regulating portion and the copying portion can be brought into surface contact or line contact with each other, and the regulating portion and the copying portion can be formed relatively large at substantially the center of the connecting portion, the uneven contact of the contact portion may result. It is possible to prevent deterioration of the repeat position accuracy. Further, since the repeat position accuracy is determined only by the clearance between the regulating member and the cylinder hole, the repeat position accuracy can be set high.

[0016]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is a front view of a compliance device 1 according to an embodiment of the present invention, FIG. 2 is a plan view, FIG.
FIG. 4 shows a bottom view. FIG. 5 shows FIG.
6, FIG. 6 is a sectional view taken along line BB in FIG. 3, FIG. 7 is a partial sectional view taken along line AA in FIG. 1, FIG.
FIG. 4 is a partial sectional view taken along line BB in FIG. 3.

The compliance device 1 according to the embodiment
The first guide means 5 connects the fixed part 2, the movable part 3, the connecting part 4, the fixed part 2 and the connecting part 3, and the second guiding means connects the movable part 3 and the connecting part 4. 6 and a posture returning means 7 for returning the relative posture of the fixed part 2 and the movable part 3 to the initial position.

A first fitting groove 8 extending in the X-axis direction is opened on the upper surface of the connecting portion 4, and an inner surface of the first fitting groove 8 has an arc-shaped first raceway surface 9 formed thereon. Are formed. Also,
An arc-shaped second raceway surface 10 is formed on the outer surface of the fixed portion 2 fitted in the first fitting groove 8. First track surface 9
A plurality of balls 12 held at required intervals by a first cage 11 are interposed between the first race 11 and the second raceway surface 10. Since the first raceway surface 9 and the second raceway surface 10 have the same center of curvature in the first fitting groove 8, the linear motion and the rotational motion can be performed in combination. Accordingly, the finite orbit rolling ball bearing having the above-described configuration connects the fixed portion 2 as the first guide means 5 to the connecting portion 4 so as to be able to advance and retreat in the X-axis direction and to be rotatable around the X-axis.

Similarly, a second fitting groove 13 extending in the Y-axis direction is opened on the lower surface of the connecting portion 4, and an arc-shaped second fitting groove 13 is formed on the inner surface of the second fitting groove 13. Three raceway surfaces 14 are formed. An arc-shaped fourth raceway surface 15 is formed on the outer surface of the movable part 3 fitted in the second fitting groove 13. Between the third raceway surface 14 and the fourth raceway surface 15, a plurality of balls 17 held at required intervals by a second cage 16 are interposed. Since the third raceway surface 14 and the fourth raceway surface 15 have the same center of curvature in the second fitting groove 13, the linear motion and the rotational motion can be performed in combination. Accordingly, the finite orbit rolling ball bearing having the above-described configuration connects the movable portion 3 to the connecting portion 4 as the second guide means 6 so as to be able to advance and retreat in the Y-axis direction and to be rotatable around the Y-axis.

When an external force acts on the movable member 3 by, for example, hitting a transfer member (not shown) held by the movable member 3 against a member to be mounted (not shown), the movable member 3 moves around the Z axis. Without rotating, it can be displaced in the X-axis and Y-axis directions with respect to the fixed part 2, and can rotate around the X-axis and the Y-axis. These are not displaced independently but are displaced in a complex manner according to the point of action or the direction of action of the external force.

The connecting portion 4 includes a first fitting groove 8 and a second fitting groove 1.
3 penetrates in the Z-axis direction at the intersection.
The height of the compliance device 1 is substantially equal to the sum of the heights of the fixed portion 2 and the movable portion 3 which are arranged vertically one above the other, so that the compliance device 1 is compactly formed in the height direction. Therefore, the operation accuracy of the automatic assembling apparatus can be improved, and the productivity can be improved by reducing the tact time caused by the inertial force.

The first cage 11 and the second cage 16 are provided with notches 11a and 16a facing each other. Since the notches 11a and 16a are engaged with each other, Cage 11, second cage 16, and balls 12, 1 held by these cages 11, 16
7 does not fall off from the compliance device 1. Therefore, since there is no need to separately provide a drop-out preventing means, the device 1 can be simplified and the manufacturing cost can be reduced.

The fixed portion 2, the movable portion 3 and the connecting portion 4 are each formed of a hard material such as high carbon chromium bearing steel or martensitic stainless steel in order to secure required strength. Fourth raceway 9, 10, 1
The hardness of each of Nos. 4 and 15 is increased by heat treatment, and a precise finishing process is performed by polishing or honing. In machining, a dedicated machining machine, dresser, tool, and the like are not required, and a general-purpose centerless grinding machine, an internal grinding machine, a honing machine, or the like can be used, so that machining cost can be reduced. Commercially available ball bearing steel balls can be used for the balls 12, 17, and the diameter of the commercially available ball bearing steel balls can be selected in increments of 1 μm. Track surface 9, 10, 14, 1
By interposing a required size according to the curvature of 5, the size of the gap can be freely set in units of microns.

The rolling ball bearing of the finite orbit is composed of balls 12,
17 and the raceway surfaces 9, 10, 14, 15 are in point contact with each other, so that the rolling resistance is extremely small. In addition, cages 11 and 16
Since the distance between the balls 12 and 17 is maintained, there is no resistance due to the contact between the balls 12 and 17.
Therefore, even if the stress generated by the abutment between the transport member and the mounted member is small, since the compliance device 1 operates, the transport member and the mounted member are not damaged by the stress.

At substantially the center of the fixed portion 2, a cylinder hole 18 penetrates in the Z-axis direction, and a piston-shaped regulating member 19 having a piston seal 20 mounted on the outer periphery is inserted therein so as to be able to advance and retreat in the Z-axis direction. ing. O-ring 2
2 is fixed by a hole retaining ring 23, and the cylinder member 1 is fixed by the closing member 21.
The upper opening 8 is closed. A pipe port 24 is formed on an end face of the fixed part 2 so as to communicate with the cylinder hole 18 through a flow path 25. A conical restricting portion 26 is formed at one end of the restricting member 19, and a conical copying portion 27 facing the restricting portion 26 is formed on the upper surface of the movable portion 3.

The posture returning means 7 having the above-described structure operates the regulating member 19 by supplying compressed air from the piping port 24 to the cylinder hole 18 so that the axis of the regulating section 26 coincides with the axis of the copying section 27. Thereby, the movable portion 3 can be returned to the initial position with respect to the fixed portion 2. The shape of the restricting portion 26 and the copying portion 27 is not limited to a conical shape. If at least one has an inclined surface having an axis, the other is formed in a cylindrical shape capable of engaging with one. May be. In the case of a cylindrical shape, rounded corners are provided,
The stress can be reduced by chamfering or the like. In addition to the cone, the inclined surface having an axis includes a paraboloid of revolution, a spheroid, or those having the curvatures thereof inverted ±. The position of the spherical surface cannot be regulated because there is no axis. Therefore, it is not suitable for posture returning means.

The restricting portion 26 and the copying portion 27 are in surface contact with each other, and are formed relatively large at substantially the center of the connecting portion 4. Therefore, the stress per unit area is small, and uneven wear due to contact is reduced. There is no point. Therefore, stable operation can be performed for a long time. Since the repeat position accuracy is determined only by the size of the clearance between the regulating member 19 and the cylinder hole 18, the repeat position accuracy can be set high.

Since the regulating portion 26 and the copying portion 27 are engaged with each other even at the retreating end of the regulating member 19, the relative displacement range of the movable portion 3 with respect to the fixed portion 2 can be regulated. 2 and the movable part 3 do not fall off the connecting part 4. Therefore, the fixed part 2 and the movable part 3
Since there is no need to separately provide a mechanism for regulating the relative displacement range with respect to the device 1, the device 1 can be simplified and the manufacturing cost can be reduced.

A spacer (not shown) is interposed between the closing member 21 and the regulating member 19, or a screw member (not shown) is screwed to the closing member 21 so as to be able to advance and retreat. The restricting member 1 is brought into contact with the restricting member 19, for example.
By changing the position of the retracted end of No. 9, the relative displacement range can be easily changed.

A female screw 28 and a circular hole 29 for positioning are provided on the upper surface of the fixing portion 2 so that the compliance device 1 is attached to a robot arm or the like, and a positional deviation after assembly is prevented. Ensure reproducibility of assembly.

On the upper surface of the movable portion 3, there are provided a female screw 30, a round hole 31 for positioning, and a long hole 32, which are used to hold a hand or the like for holding a conveying member such as an air chuck or a suction pad. Compliance device 1
To prevent misalignment after assembly and ensure reproducibility of assembly.

Next, the operation of the compliance device 1 will be described.

FIGS. 5 and 6 show a state in which compressed air is supplied to the cylinder hole 18 through a piping port 24 and a flow path 25 from a compressed air supply source and a switching valve (not shown). In this state, the regulating portion 26 of the regulating member 19 is pressed coaxially against the copying portion 27 of the movable portion 3 by the pressure of the compressed air, whereby the movable portion 3 is held at the initial position. The repeatability of the initial position is determined only by the clearance between the regulating member 19 and the cylinder hole 18.

Next, the switching valve (not shown) is switched to release the compressed air filled in the cylinder hole 18 to the atmosphere through the flow path 25, the piping port 24 and the switching valve (not shown). In this state, when an external force acts on the movable portion 3 by, for example, abutting of the conveying member and the mounted member, the copying portion 27 provided on the movable portion 3 pushes up the regulating member 19 while the movable portion 3 is fixed. Displaced three-dimensionally with respect to 2. FIG. 9 shows an example in which an external force is applied to the movable unit 3 by, for example, abutting of the conveying member and the mounted member. At the same time, the movable part 3 rotates around the Y axis with respect to the connecting part 4, and as a result of these displacements, the movable part 3 rotates about the abutting part as the center of rotation. Therefore, since the position of the conveying member does not move even if the movable portion 3 rotates, when correcting the inclination of the shaft and the inclination of the surface, the conveying member and the mounted member are brought into abutment with each other. Since the relative position does not change, there is no damage.

In this embodiment, the movable member 3 is returned to the initial position by pressing the regulating member 19 with compressed air. However, depending on the application, an external force of a certain magnitude or more acts on the movable member 3. It may be necessary to set the movable part 3 to move for the first time. In this case, the compressed air reduced to the required pressure by the regulator is always supplied to the cylinder hole 18, and the high pressure compressed air may be supplied by the switching valve when the posture returning means 7 is operated. When the preparation of the regulator and the switching valve is troublesome, an elastic member 33 such as a spring for urging the regulating member 19 toward the movable portion 3 may be provided in the cylinder hole 18 as shown in FIG. On the other hand, when it is necessary to set the movable portion 3 to move with an extremely small external force, FIG.
As shown in FIG. 1, if an elastic member 34 such as a spring for urging the regulating member 19 in the direction away from the movable portion 3 is provided, it is necessary for the copying portion 27 to push up the regulating member 19 when the movable portion 3 is displaced. The movable portion 3 can be displaced with a small force without being affected by frictional resistance.

When returning the displaced movable portion 3 to the initial position with respect to the fixed portion 2, the switching valve (not shown) is switched again, and the compressed air supply source and the switching valve are switched through the piping port 24 and the flow path 25. Thus, compressed air is supplied to the cylinder hole 18 to press the regulating portion 26 provided on the regulating member 19 against the copying portion 27 provided on the movable portion 3. Control member 1
With the displacement of 9, the movable portion 3 is relatively displaced with respect to the fixed portion 2 until the axis of the copying portion 27 coincides with the axis of the regulating portion 26, thereby returning to the initial position and maintaining that state. .

The regulating portion 26 and the copying portion 27 are connected to the regulating member 19.
The movable range of the movable part 3 with respect to the fixed part 2 is determined by the stroke of the regulating member 19 because the movable part 3 is engaged with each other even at the displacement retreat end of the movable member 3. Therefore, the fixed part 2 and the movable part 3 do not fall off from the connecting part 4 without separately providing a regulating mechanism.

Further, the compliance device 1 can provide the following effects in addition to the effects described above.

Since the force is transmitted from the movable portion 3 to the fixed portion 2 via the ball 17, the connecting portion 4, and the ball 12, and the number of related components is small, the device 1 itself is enlarged. Without this, the posture return means 7 can be built in. Since only the movable part 3 and the fixed part 2 overlap in the longitudinal direction, the device 1 can be manufactured compact in the longitudinal direction. Therefore, the accuracy of the automatic assembling apparatus can be improved, and the loss of tact time due to inertial force can be reduced. Since the diameters of the movable portion 3 and the fixed portion 2 can be set relatively large, the balls 12, 17 and the raceway surface 9,
The stress generated in the contact portions with the layers 10, 14, and 15 is reduced, and the load resistance and the life can be improved. Since each of the movable section 3 and the fixed section 2 is provided with an attachment surface, other members can be directly attached. An automatic assembling apparatus can be manufactured in a small and inexpensive manner.

[0041]

The present invention has the following effects.

That is, first, according to the compliance device of the present invention having the above-described structure, the relative displacement, the inclination of the shaft, and the surface inclination can be maintained without changing the phase between the mounted member and the transport member. Since the inclination or the like can be corrected, it is possible to correct an error in any use. In addition, since the movable portion can be rotated around the abutting portion between the transport member held at the leading end and the mounted member, the movable member can be rotated when correcting the inclination of the axis or the surface of the transport member. There is no displacement. Therefore, it is possible to prevent the transport member and the mounted member from being damaged or damaged. Further, since the movable portion does not rotate around the Z axis with respect to the fixed portion, there is no need to separately provide a rotation preventing mechanism. Therefore, the apparatus can be simplified and the production cost can be kept low.
In addition, since the movable part and the fixed part are fitted in the fitting grooves on the upper and lower sides of the connecting part, the movable part and the fixed part can be overlapped with each other up and down, and can be manufactured compact in the longitudinal direction. Therefore, the accuracy of the automatic assembling apparatus can be improved, and the productivity can be improved by reducing the tact time caused by the inertial force.

In addition to the above, according to the compliance device according to the second aspect of the present invention having the above-described structure, the first guide means and the second guide means are each formed by a point contact rolling ball bearing having a finite track. In addition, the compliance device operates even if the rolling resistance is extremely small and the stress generated by the abutment between the transfer member and the mounted member is small. Therefore, it is possible to prevent the transport member and the mounted member from being damaged. In addition, a notch is provided in each of the first holder provided in the first guide means and the second holder provided in the second guide means, and the first holder and the second holder are mutually separated by the notch. Because of the engagement, the retainer and the ball do not fall out of the compliance device without separately providing a fall prevention means. Therefore, the apparatus can be simplified and the production cost can be kept low.

Further, the present invention having the above-mentioned structure is characterized in that:
According to the compliance device, either one of the restricting portion and the copying portion is formed in a substantially conical shape, and the other is formed in a substantially conical or cylindrical shape that can be engaged with one of the restricting portion. , The movable portion can be returned to the initial position with respect to the fixed portion. In addition to surface or line contact between the regulating portion and the copying portion, the regulating portion and the copying portion can be formed relatively large at substantially the center of the connecting portion, so that the repeated position accuracy due to uneven wear of the contact portion. Degradation can be prevented. Further, since the repeat position accuracy is determined only by the clearance between the regulating member and the cylinder hole, the repeat position accuracy can be set high. In addition, since the restricting portion and the copying portion engage with each other even at the retreating end of the restricting member, the restricting portion and the movable portion can be connected to each other without separately providing a mechanism for restricting the relative displacement range of the movable portion relative to the fixed portion. The relative displacement range can be regulated, so that the fixed part and the movable part do not fall off the connecting part. Therefore, the apparatus can be simplified and the production cost can be kept low.

Further, the present invention has the above-mentioned structure.
Can also correct the relative displacement, axis tilt, surface tilt, etc. without changing the phase between the mounted member and the transport member. Can do it.

[Brief description of the drawings]

FIG. 1 is a front view of a compliance device according to an embodiment of the present invention;

FIG. 2 is a plan view of the apparatus.

FIG. 3 is a side view of the device.

FIG. 4 is a bottom view of the apparatus.

FIG. 5 is a sectional view taken along line AA in FIG. 1;

FIG. 6 is a sectional view taken along line BB in FIG. 3;

FIG. 7 is a sectional view taken along line AA of FIG. 1;

8 is a sectional view taken along the line BB in FIG. 3;

FIG. 9 is a sectional view showing an operation state of the device.

FIG. 10 is a sectional view of a compliance device according to another embodiment of the present invention.

FIG. 11 is a sectional view of a compliance device according to another embodiment of the present invention.

FIG. 12 is a perspective view of a conventional device.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Compliance device 2 Fixed part 3 Movable part 4 Connecting part 5 First guide means 6 Second guide means 7 Attitude return means 8 First fitting groove 9 First track surface 10 Second track surface (track surface) 11 First holding Container 11a, 16a Notch portion 12, 17 Ball 13 Second fitting groove 14 Third raceway surface (other raceway surface) 15 Fourth raceway surface 16 Second retainer 18 Cylinder hole 19 Restriction member 20 Piston seal 21 Closing member 22 O-ring 23 Retaining ring for hole 24 Piping port 25 Flow path 26 Restriction part 27 Copying part 28, 30 Female screw 29, 31 Round hole 32 Long hole 33, 34 Elastic member

Claims (4)

[Claims] A first fitting groove (8) opening on the upper surface extends in the X-axis direction and a second fitting groove (1) opening on the lower surface.
3) a connecting portion (4) extending in the Y-axis direction, and a fixing portion connected to the connecting portion (4) in the first fitting groove (8) via the first guide means (5). (2) a movable part (3) connected to the connecting part (4) in the second fitting groove (13) via a second guide means (6); and the fixed part (2).
A posture returning means (7) for returning a relative posture between the movable member (3) and the movable part (3) to an initial position, wherein the first guiding means (5) includes the first guiding means (5). An arc-shaped first raceway surface (9) provided in the fitting groove (8), and an arc-shaped second raceway surface (10) provided in the fixing portion (2); The means (6) may include the second fitting groove (1).
An arc-shaped third raceway surface (14) provided in 3) and an arc-shaped fourth raceway surface (15) provided in the movable portion (3).
The center of curvature of the first raceway surface (9) and the center of curvature of the second raceway surface (10) coincide in the first fitting groove (8), and the third raceway surface (14) and the fourth raceway surface (14) A compliance device, characterized in that the center of curvature of the raceway surface (15) coincides within the second fitting groove (13). 2. The compliance device according to claim 1, wherein the first guide means (5) comprises a plurality of balls (12) interposed between the first raceway surface (9) and the second raceway surface (10). And a first retainer (11) for holding the ball (12), and a second guide means (6) is interposed between the third raceway surface (14) and the fourth raceway surface (15). Multiple balls (17)
And a second retainer (16) for retaining the ball (17).
A compliance device, wherein the first cage (11) and the second cage (16) are engaged with notches (11a) (16a) facing each other. 3. The compliance device according to claim 1, wherein the posture return means (7) has a cylinder hole (18) penetrating in the Z-axis direction substantially at a center of the fixing portion (2), and the cylinder hole (18). A regulating member (19) inserted into and retractable from
A regulating portion (2) provided at one end of the regulating member (19).
6), and a copying section (27) provided on the upper surface of the movable section (3) so as to face the regulation section (26), and one of the regulation section (26) and the copying section (27) is provided. A compliance device characterized in that one is formed in a substantially conical shape and the other is formed in a substantially conical or cylindrical shape capable of engaging with one. 4. A fixed part (2) provided with a raceway surface (10) having at least a part of a cylindrical surface, and said raceway surface (1).
A connecting portion (4) assembled to the fixed portion (2) so as to be relatively displaced along the direction (0); And a movable portion (3) assembled to the connecting portion (4) so as to be relatively displaced along the other track surface (14), a regulating portion (26) and a copying portion ( 27. A compliance device comprising: 27) a posture returning means (7) for returning the relative position of the fixed part (2) and the movable part (3) to the initial movement position.