JP2001198743A - Compliance device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a compliance device that can lower wear occurring in a sliding portion of its relative position limiting mechanism and thereby prolong the parts life. SOLUTION: The compliance device comprises an immovable part 1 and a movable part 2 capable of relative displacement in a two-dimensional plane by external force application, and a relative position limiting mechanism 21 for returning the immovable and movable parts 1 and 2 after relative displacement to their initial positions. The relative position limiting mechanism 21 has a cylinder chamber 23 defined in the immovable part 1, a piston 24 fitted in the cylinder chamber 23 so as to be moved toward the movable part 2 by compressed air fed into the cylinder chamber 23, an immovable-side relative position limiting portion 38 integrally formed on the piston 24, and a movable- side relative position limiting portion 39 defined on the movable part 2 corresponding to the immovable-side relative position limiting portion 38. The immovable part 1 and the piston 24 are put in sliding surface contact near the opening of the cylinder chamber 23.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an automatic assembling machine and the like, in which a workpiece fixed to a movable portion and a tool for performing an operation on the workpiece or a workpiece to which the workpiece is to be assembled are arranged in a two-dimensional plane. The present invention relates to a compliance device that corrects a relative positional deviation in the above-mentioned manner by an external force.

[0002]

2. Description of the Related Art Conventionally, a compliance device 51 shown in FIG. 6 has been known and is configured as follows (see Japanese Patent Application Laid-Open No. Sho 59-110593).

That is, the compliance device 51
When inserting a mounting portion (corresponding to the work) 101 such as a lead terminal of an electronic component into a mounting portion (corresponding to the mounting object) 102 such as a hole of a printed circuit board,
When a slight displacement occurs between the mounting portion 101 and the mounted portion 102 and the mounting portion 101 comes into contact with the chamfered portion 103 provided on the peripheral edge of the opening of the mounted portion 102, the mounting is performed. When the movable part 53 of the device 51 holding the part 101 is automatically displaced following the chamfered part 103, the axis 101a of the mounting part 101 and the axis
2a, and the insertion is completed. As a configuration of the device 51, a fixing portion 52 attached to the robot arm 104 and the like, and a two-dimensional plane with respect to the fixing portion 52 (left and right directions in FIG. The movable portion 53 is mounted so as to be relatively displaceable in the orthogonal direction) and holds the mounting portion 101 via the chuck device 105 and the like, and the relative position restricting mechanism 54 for returning the relatively displaced fixed portion 52 and movable portion 53 to the initial movement position. And

However, in the conventional compliance device 51, the fixed-side relative position regulating portion, which is one of the engaging portions of the relative position regulating mechanism 54, is constituted by a ball 55 made of a steel ball. The structure is inserted into the cylinder chamber 56 provided in the fixed part 52 and slidably contacts the inner peripheral surface of the cylinder chamber 56, causing the following inconvenience.

That is, the ball 55 moves up and down in the cylinder chamber 56 when the device 51 is operated, and at this time slides in line contact with the inner peripheral surface of the cylinder chamber 56. When the position 53 is displaced relative to the fixed portion 52 in a two-dimensional plane, the position 53 is pushed by a concave-shaped copying surface 57 which is a movable-side relative position restricting portion, and is displaced in the radial direction with respect to the axis 56 a of the cylinder chamber 56. As a result, it is strongly pressed at one place on the circumference against the inner peripheral surface of the cylinder chamber 56, and moves up and down in this state. Therefore, the ball 55 that is in line contact with the fixed portion 52 is strongly pressed against the fixed portion 52 at one point on the circumference and moves up and down in this state. A relatively large sliding resistance occurs, and as this is repeated, the ball 55
In addition, the sliding portion 58 of the fixed portion 52 may be worn. Since the wear of the sliding portion 58 immediately leads to an operation error of the relative position regulating mechanism 54, when the wear occurs, the component must be immediately replaced with a new one. There is the disadvantage of being short.

[0006]

SUMMARY OF THE INVENTION In view of the above points, the present invention can reduce the abrasion generated in the sliding portion of the relative position regulating mechanism, thereby extending the life of parts. It is intended to provide a device.

[0007]

To achieve the above object, a compliance device according to claim 1 of the present invention comprises:
A compliance device comprising: a fixed portion and a movable portion that are relatively displaced in a two-dimensional plane by the action of an external force; and a relative position regulating mechanism that returns the relatively displaced fixed portion and the movable portion to an initial movement position. A position regulating mechanism, a cylinder chamber provided in the fixed part, a piston inserted into the cylinder chamber, and moved toward the movable part by compressed air supplied to the cylinder chamber, and a piston integrated with the piston. The molded fixed-side relative position restricting portion has a movable-side relative position restricting portion provided on the movable portion corresponding to the fixed-side relative position restricting portion, and the fixed portion and the piston are provided in the cylinder. It is characterized in that it is in slidable surface contact near the opening of the chamber.

According to a second aspect of the present invention, there is provided the compliance device according to the first aspect, wherein the fixing portion which slidably contacts the piston is a body forming a fixing portion main body. It is a feature.

According to a third aspect of the present invention, there is provided the compliance device according to the first or second aspect, wherein the relative position regulating mechanism is provided with a spring means for returning the piston in a direction away from the movable portion. It is characterized by having.

[0010] In the compliance device according to the first aspect of the present invention having the above-described configuration, the fixed-side relative position restricting portion forming one of the engaging portions of the relative position restricting mechanism moves the restricting portion toward the movable portion. The piston is integrally formed with the piston to be pressed, and the piston is slidably in surface contact with the fixed portion near the opening of the cylinder chamber. The area is set to be larger than the contact area between the ball and the sliding portion of the fixed portion in the above-described conventional technology. Therefore, the pressing load per unit area is reduced, and the sliding resistance is reduced accordingly. Therefore, it is possible to reduce the amount of wear generated in the sliding portion.

It is preferable that the piston integrally formed with the fixed-side relative position restricting portion is brought into direct contact with the body forming the fixed portion main body (claim 2), and the piston is made of, for example, SCM435 or SUS440C. Is preferred. The SCM435 has a feature that it is easy to process before quenching and has little deformation after quenching. The SUS440C has a feature that it is excellent in rust prevention. It is a material suitable for. Further, as a material of the body, for example, SUS440C is suitable as a material that is easily hardened.

[0012] In addition to the above, in the compliance device according to claim 3 of the present invention having the above configuration,
Since the relative position regulating mechanism is provided with spring means for returning the piston in a direction away from the movable part, when the compressed air is discharged from the cylinder chamber and the movable part is relatively displaced with respect to the fixed part, The fixed-side relative movement restricting portion integrally formed with the piston is lifted by the spring means together with the piston and completely separated from the movable portion. Therefore,
An extremely small external force was applied because the sliding resistance generated when the movable part was displaced relative to the fixed part while the fixed relative movement restricting part was in contact with the movable part was removed. Even in such a case, the movable portion can smoothly move relative to each other.

Further, in the compliance device according to the third aspect, the fixed portion and the movable portion slightly displaced relatively by the action of an external force, and compressed air are introduced into a cylinder chamber provided inside the fixed portion, and the regulating member is provided. By pressing the convex portion into the concave portion of the movable portion, a regulating mechanism that returns the movable portion that has been relatively displaced to the initial movement position, wherein the convex portion of the regulating member is released when compressed air is released. A spring means for separating from the recess of the movable part is provided on the fixed part.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 is an external perspective view of a compliance device (also referred to as a variable position device) according to the embodiment, and FIG. 2 shows an exploded state of the device. FIG. 3 is a bottom view of the device, FIG. 4 is a cross-sectional view, and FIG. 5 shows an operation state.

As shown in FIG. 1, the compliance device includes a fixed part 1 and a movable part 2. The fixed part 1 and the movable part 2 are displaced relative to the fixed part 1 in the x-axis direction. And are connected to each other via a connecting portion 3 which is displaced relative to the movable portion 2 in the y-axis direction.
Therefore, based on the fixed portion 1, the connecting portion 3 can be relatively displaced in the x-axis direction with respect to the fixed portion 1, and the movable portion 2 can be relatively displaced in the y-axis direction with respect to the connecting portion 3. The movable portion 2 is moved relative to the fixed portion 1 by x due to the combination of the relative displacement in the x-axis direction and the relative displacement in the y-axis direction.
It is relatively displaced in the axial direction and the y-axis direction (the x-axis and the y-axis are orthogonal to each other, and thus the above configuration ensures relative movement in a two-dimensional plane).

As shown in FIG. 2, the connecting portion 3 includes a planar substrate portion 3a, a pair of x-axis connecting portions (also referred to as sleeve portions) 4 which are linear and parallel to each other, and A pair of parallel y-axis connecting portions 5 are integrally provided. The x-axis connecting portion 4 linearly extends in the x-axis direction on two opposing sides of the upper surface of the substrate portion 3a, and the y-axis connecting portion 5 linearly extends in the y-axis direction on two opposing sides of the lower surface of the substrate portion 3a. And this x
The shaft connecting portion 4 and the shaft connecting portion 5 are arranged at right angles to each other when viewed in plan. Further, in a state where the x-axis connecting portion 4 and the y-axis connecting portion 5 have their respective longitudinal ends overlapped in the z-axis direction, they are integrally formed in a flat rectangular shape to form a cross-girder shape ( The z axis is orthogonal to both the x and y axes.) In addition, rolling grooves (also referred to as R grooves or rolling element guide grooves) 6 each having a substantially arc-shaped cross section are provided on the inner side surface of the x-axis connecting portion 4 along the x-axis direction. Rolling grooves 7 each having a substantially arc-shaped cross section are provided along the y-axis direction on the inner side surface of each of them.

A substantially rectangular fixed portion 1 is disposed between a pair of x-axis connecting portions 4. Rolling grooves 10 each having a substantially arc-shaped cross section are provided near the lower sides of both side surfaces thereof. It is provided so as to face the rolling groove 6 of the portion 4.
A plurality of balls 11, each of which is a rolling element, are interposed rotatably between 10 to form a pair of x-axis bearing portions 12. The x-axis bearing section 12 is a linear guide mechanism, and is a finite orbit linear bearing. The ball 11 is prevented from falling off between the pair of rolling grooves 6 and 10 by a pin-shaped stopper 13 attached to the end of the rolling groove 6 of the x-axis connecting portion 4. The only parts unique to the x-axis bearing portion 12 are the stopper 13 and the ball 11. The surfaces of the ball 11 and the rolling grooves 6 and 10 are precision-processed by polishing after heat treatment, thereby ensuring high-precision operation and high rigidity of the x-axis bearing portion 12. A dust seal 8 that slides on the side surface of the fixed portion 1 is screwed on the upper surface of the x-axis connecting portion 4 so that foreign matter such as dust does not enter the rolling grooves 6 and 10. .

A substantially rectangular movable portion 2 is disposed between the pair of y-axis connecting portions 5, and rolling grooves 14 are respectively formed on the side surfaces thereof so as to face the rolling grooves 7 of the y-axis connecting portion 5. A plurality of balls 15 as rolling elements are interposed rotatably between the rolling grooves 7 and 14 to form a pair of y-axis bearing portions 16. The y-axis bearing section 16 is a linear guide mechanism like the x-axis bearing section 12, and is a finite track type linear bearing.
The ball 15 is provided with a pair of rolling grooves 7 by a pin-shaped stopper 17 attached to an end of the rolling groove 7 of the y-axis connecting portion 5.
14 so that it does not fall off. The parts unique to the y-axis bearing portion 16 are the stopper 17 and the ball 1
There are only five. The surfaces of the balls 15 and the rolling grooves 7 and 14 are precision-processed by polishing after heat treatment, respectively.
Thereby, high-precision operation and high rigidity of the y-axis bearing portion 16 are ensured. A dust seal 9 that slides on the side surface of the movable portion 2 is screwed to the lower surface of the y-axis connecting portion 5 so that foreign matter such as dust does not enter the rolling grooves 7 and 14. .

Therefore, according to the above configuration, first, as described above, the connecting portion 3 can be relatively displaced in the x-axis direction with respect to the fixed portion 1, and the movable portion 2 can be moved in the y-axis direction with respect to the connecting portion 3. Since the relative displacement is possible, the movable portion 2 is relatively displaced in the x-axis direction and the y-axis direction with respect to the fixed portion 1 by the combination of the relative displacement in the x-axis direction and the relative displacement in the y-axis direction. Since the relative position of the fixed part 1 and the movable part 2 can be regulated by regulating one point, there is no need to separately provide a detent mechanism.

Although the x-axis bearing portion 12 and the y-axis bearing portion 16 are all ball type as described above, it is possible to use a retainer instead. Balls can be separated from each other, and contact friction between the balls when the balls roll can be avoided. Therefore, stable and smooth relative movement can be expected. If not much rigidity is required, a ball may be omitted from the central portion by using a retainer, or the holding pitch may be set large. The x-axis bearing section 12 and the y-axis bearing section 16, that is, the linear guide mechanism, may be a cross roller bearing instead of a linear ball bearing.

A required number of mounting screws 1
8, a round hole 19 and a long hole 20 are provided. These components are provided to fix the fixing portion 1 to the head portion and the base of the robot with bolts, to prevent a displacement after assembly by a positioning pin, and to regulate an assembly position.

As shown in FIG. 3, a required number of mounting screws 18, round holes 19 and elongated holes 20 are also provided on the lower surface of the movable portion. These are provided to fix the work and the tool to the movable portion 2 with bolts, to prevent a positional deviation after assembly by a positioning pin, and to regulate an assembly position.

As shown in FIG. 4, a relative position regulating mechanism 21 for returning the relatively displaced fixed part 1 and movable part 2 to the initial movement position is provided inside the fixed part 1, and is configured as follows. ing.

That is, first, a hole-shaped cylinder chamber 23 is provided inside a body 22 constituting a main body portion (also referred to as a fixed portion main body) of the fixed portion 1 so as to penetrate in the z-axis direction (vertical direction in the drawing). A piston (also referred to as a regulating member) 24 is movably inserted into the cylinder chamber 23 with a predetermined stroke in the z-axis direction. The cylinder chamber 23 is disposed substantially at the center of the body 22 of the fixing part 1 in a plane, and the upper opening of the cylinder chamber 23 is closed by a closing member 25, and the closing member 25 is fixed to the body 22 by a hole retaining ring 26. Have been. The outer periphery of the closing member 25 is sealed by a packing 27 such as an O-ring. A piston 24 is provided around the lower opening edge of the cylinder chamber 23.
In order to prevent a spring 34 to be described later from falling out of the cylinder chamber 23, an inward flange-shaped stopper portion 28 is provided integrally, and a hole-like air hole is provided at one location on the circumference of the stopper portion 28. Open part (also called exhaust hole)
29 are provided. Inner peripheral surface 28a of retaining portion 28
Is formed in a cylindrical shape as a part of the inner peripheral surface of the cylinder chamber 23, and a convex portion described later when the piston 24 is incorporated into the inner periphery of the retaining portion 28 from above the upper edge portion thereof. A chamfered portion 28b is provided so as not to damage the spherical surface 38a of 38.

The material of the body 22 is
In order to increase the wear resistance of the sliding portion 42 between the piston 2 and the piston 24, a material having high hardness is selected. However, since the rolling groove 10 of the bearing is formed integrally, the stability is further improved. It is preferable to select a material that can secure high hardness. Further, SUS440C may be selected as a material that is not easily rusted. The reason why SUS440C is preferable is not only the prevention of wear of the sliding portion 42 but also the rolling groove 1 of the bearing.
This is because it is also excellent as a material of No.

The piston 24 is slidably inserted on the inner peripheral side of the flange-shaped retaining portion 28 in the cylinder chamber 23, and is in contact with the inner peripheral surface 28a of the retaining portion 28 in a slidable manner. It has a planar outer peripheral surface (also referred to as a cylindrical outer peripheral surface) 24a. Therefore, the piston 24 is in slidable surface contact with the cylindrical inner peripheral surface (also referred to as a cylindrical inner peripheral surface) 28a of the retaining portion 28 on the cylindrical outer peripheral surface 24a. As described above, the retaining portion 28 is a part of the body 22 constituting the fixing portion main body,
The inner peripheral surface 28 a of the retaining portion 28 is a part of the inner peripheral surface of the cylinder chamber 23.

An outer flange-shaped first flange (also referred to as a spring receiver or a spring receiver, and further supports a packing (piston seal 33) with pressure on the outer peripheral surface 28a of the cylindrical surface on the outer periphery of the piston 24. 30 and the second flange 3
1 is provided integrally, and a piston seal 33 is mounted upward in a mounting groove 32 between both flanges 30 and 31. Also, between the first flange portion 30 and the retaining portion 28,
A coil-shaped spring 34 as a spring means for pushing up the piston 24 upward so as to separate the piston 24 from the movable portion 2 is interposed.
Although it is possible to oppose the own weight of the piston 24 and the friction of the piston seal 33, the spring force is set to a sufficiently small spring force with respect to the thrust by air pressure. The spring force in this case indicates a force when the piston 24 compresses and contracts. The first flange portion 30 is kept out of contact with the inner peripheral surface of the cylinder chamber 23, which contributes to reducing the sliding resistance between the piston 24 and the body 22. Piston 24
Is in contact with the body 22 with only the cylindrical outer peripheral surface 24a having a minimum gap. The second flange portion 31 above the first flange portion 30 is formed to have a smaller diameter than the first flange portion 30, so that the second flange portion 31 is also in non-contact with the inner peripheral surface of the cylinder chamber 23, and 22 contributes to the reduction of the sliding resistance. The difference between the outer diameters of the first flange portion 30 and the second flange portion 31 is set to prevent blow-through of the piston seal 33, that is, the tip of the lip portion of the piston seal 33 is The outer diameter of the second flange portion 31 is reduced so that the tip of the lip portion is opened above the piston 24 so that the blow-by phenomenon does not occur due to close contact with the side surface of the lip portion. That is, in order to secure a passage for introducing pressure into the mounting groove portion 32 in order to maintain the sealing property of the piston seal 33, the second flange portion 31 is configured to be relatively largely separated from the inner peripheral surface of the cylinder chamber 23. I have.

In the cylinder chamber 23, the space between the closing member 25 and the piston 24 is sealed by a packing 27 and a piston seal 33 to form a sealed pressure chamber 35. A communication hole communicating with the pressure chamber 35 is formed. 36 and a piping port 37 are provided in the body 22. Therefore, the pressure chamber 35 is connected from the piping port 37 through the communication hole 36.
When compressed air is supplied as a working fluid to the
Moves downward so as to approach the movable portion 2 while compressing and compressing the spring 34 against the elasticity of the spring 34 (the state shown in FIG. 4), and compresses the compressed air supplied to the pressure chamber 35 through the communication hole 36. When exhausted from the piping port 37,
The piston 24 moves upward so as to be separated from the movable portion 2 by the elasticity of the spring 34 (the state shown in FIG. 5).

At the lower end of the piston 24, a convex portion 38 is integrally provided as a fixed-side relative position restricting portion which is one engaging portion of the mechanism 21, and the movable portion 2 corresponds to the convex portion 38. A concave scanning surface (also referred to as a depression) 39 is provided on the upper surface as a movable-side relative position regulating portion that is the other engagement portion of the mechanism 21.
Is provided. The former convex portion 38 is formed as a hemisphere projecting downward from the lower end portion of the piston 24, and has a spherical surface 38a as an engagement surface. On the other hand, the latter copying surface 39 is formed in a concave shape so as to engage the male and female with the convex portion 38, and has a conical slope 39a as an engaging surface. The convex portion 38 and the copying surface 39
In the state where the fixed portion 1 and the movable portion 2 are relatively displaced, when the piston 24 moves downward by the supply of the compressed air and the convex portion 38 is pressed against the copying surface 39, the pressing force in the two-dimensional plane direction is reduced. The fixed component 1 and the movable component 2 are returned to the initial movement position by this component force. The initial movement position is convex 3
8 coincides with the central axis of the scanning surface 39, and the convex portion 3
8 is a position where the scanning surface 39 is in close contact with the entire circumference.

The movable portion 2 is provided with a hole-shaped through portion 40 penetrating the bottom of the copying surface 39 and the lower surface of the movable portion 2, and the through portion 40 is closed by a closing member 41. Have been. This is because the processing of the conical slope 39 a is facilitated, and the tip (lower end) of the convex portion 38 when the piston 24 moves downward so as to approach the movable portion 2.
This is to prevent the contact with the bottom of the copying surface 39. The reason why the closing member 41 is attached is that the
This is to prevent foreign matter such as dust from entering the mechanism 21 from the outside.

Even when the piston 24 is located at the upper end of its stroke and is in contact with the closing member 25 (the state shown in FIG. 5), the projection 38 has a leading end (lower end) of the copying surface 39 at the tip end (lower end). The projection and the copying surface can be engaged with each other two-dimensionally even if the fixed part and the movable part are relatively displaced in the two-dimensional plane in this state. Therefore, the relative displacement range of the movable portion 2 with respect to the fixed portion 1 can always be regulated, and there is no need to separately provide a displacement range regulating mechanism. Further, when a spacer having a required thickness is interposed between the closing member 25 and the piston 24, or when a through bolt is provided in the closing member 25 to adjust the screwing amount of the bolt, the displacement range is changed. You can also.

Next, the operation of the compliance device having the above configuration will be described.

FIG. 4 shows that compressed air as a working fluid is supplied from a compressed air supply source and a switching valve (not shown) to a pressure chamber 35 of the relative position regulating mechanism 21 via a piping port 37 and a communication hole 36, and the piston 24 A convex portion 38 integrally formed with the movable portion 2 is pressed concentrically against the copying surface 39, thereby showing a state in which the movable portion 2 is held at the initial movement position. The repeatability of the initial movement position is determined only by the radial clearance between the piston 24 and the retaining portion 28, and is therefore extremely high.

From the state shown in FIG.
When the compressed air introduced into the first pressure chamber 35 is released to the atmosphere through the communication hole 36 and the piping port 37, the piston 24 is lifted by the elasticity of the spring 34 and integrally formed with the piston 24 as shown in FIG. Convex part 38
Is separated from the conical slope 39 a of the scanning surface 39. When an external force acts on the movable part 2 in this state, the movable part 2 is relatively displaced in the xy two-dimensional plane with respect to the fixed part 1 as shown in FIG.

Depending on the work, it is necessary to set the movable portion 2 to be displaced only when an external force of a certain magnitude acts thereon. In such a case, the elasticity of the spring 34 is set to be small, Alternatively, it is conceivable to introduce compressed air adjusted to a low pressure by a regulator into the pressure chamber 35.

When the movable part 2 which has been relatively displaced is returned to the initial movement position with respect to the fixed part 1, the relative position regulating mechanism 21 is again supplied from the compressed air supply source and the switching valve via the piping port 37 and the communication hole 36. Compressed air is supplied to the pressure chamber 35, and the convex portion 3 formed integrally with the pressure chamber 35 through the piston 24.
8 is pressed against the copying surface 39 of the movable part 2. Then, as described above, the movable portion 2 is relatively displaced with respect to the fixed portion 1 so that the copying surface 39 is concentric with the convex portion 38, and returns to the initial movement position shown in FIG. .

The compliance device is characterized in that the following effects are achieved by the above configuration.

That is, first, the fixed portion 1 and the movable portion 2 are relatively displaced in the x-axis direction with respect to the fixed portion 1 and are displaced relative to the movable portion 2 in the y-axis direction.
, The relative displacement of the fixed portion 1 and the movable portion 2 is limited by the connecting portion 3 to relative displacements in the x-axis direction and the y-axis direction orthogonal to each other. Therefore, since the fixed unit 1 and the movable unit 2 do not rotate relative to each other, there is no need to separately provide a rotation preventing mechanism for preventing the relative rotation, and the configuration of the apparatus can be simplified.

The connecting portion 3 for connecting the fixed portion 1 and the movable portion 2 so as to be relatively displaceable is formed in a cross-girder shape, and the inner surface of the x-axis connecting portion 4 of the cross-shaped connecting portion 3 is formed. The fixed portion 1 and the movable portion 2 are connected to each other via the connecting portion 3 because the x-axis bearing portion 12 is provided on the inner side and the y-axis bearing portion 16 is provided on the inner surface of the y-axis connecting portion 5. Despite this, they are arranged in a state of being directly stacked in the z-axis direction. Therefore, even if the device is provided with the relative position regulating mechanism 21, the height of the device is
And the sum of the height of the movable part 2 and the size of the apparatus can be reduced in the height direction. Therefore, the accuracy of the automatic assembling machine itself can be improved, and the productivity can be improved by shortening the tact time caused by the inertial force.

Further, since the connecting portion 3 is formed in a cross-girder shape, a relatively large space is formed at the center of the plane. Therefore, the plane occupied by the relative position regulating mechanism 21 disposed in this space can be enlarged, and the contact area between the convex portion 38 of the relative position regulating mechanism 21 and the copying surface 39 can be set large. Can be prevented, and the repeat position accuracy can be improved. In addition, since the stress per unit area decreases due to the increase in the contact area, stable operation can be performed for a long time.

The fixed part 1, the movable part 2, and the connecting part 3
Since the rolling grooves 6, 7, 10, and 14 are directly formed in the respective members, there is no need to separately provide a guide member for guiding relative displacement. Accordingly, the size of the apparatus can be reduced accordingly, and the occurrence of positional displacement and play due to the fixing of the guide member can be prevented. Further, since the accumulated tolerance is reduced by the processing tolerance of the guide member, the operation accuracy of the device can be improved.

Further, since the convex portion 38 formed integrally with the piston 24 and the copying surface 39 provided on the movable portion 2 are engaged with each other even at the upper end of the stroke of the piston 24, The relative displacement range of the fixed unit 1 and the movable unit 2 can be regulated without providing a relative displacement range regulating mechanism. The relative displacement range is piston 24
By changing the position of the upper end of the stroke, the stroke can be easily changed.

Further, a convex portion 38 constituting one engaging portion of the relative position regulating mechanism 21 is formed integrally with the piston 24 which presses the convex portion 38 toward the movable portion 2, and the piston 24 is fixed. The contact area between the piston 24 and the sliding portion 42 of the fixed portion 1 is in the range described above because the structure is in slidable surface contact with the retaining portion 28 of the portion 1 near the opening of the cylinder chamber 23. The contact area is set to be larger than the contact area between the ball and the sliding portion of the fixed portion in the related art. Accordingly, the pressing load per unit area is reduced, and the sliding resistance is reduced accordingly, so that the amount of wear generated in the sliding portion 42 can be reduced by that much, and the life of the parts can be extended. Can be.

Further, a convex portion 38 constituting one engaging portion of the relative position regulating mechanism 21 is integrally formed with the piston 24 for pressing the convex portion 38 toward the movable portion 2, and this piston 24 is fixed. The structure is such that it comes into slidable surface contact near the opening of the cylinder chamber 23 with the retaining portion 28 of the body 22 that constitutes the main body, so that the piston 24 and the sliding portion 42 of the body 22 The contact area is set to be larger than the contact area between the ball and the sliding portion of the fixed portion in the above-described conventional technology. Accordingly, the pressing load per unit area is reduced, and the sliding resistance is reduced accordingly, so that the amount of wear generated in the sliding portion 42 can be reduced by that much, and the life of the parts can be extended. Can be.

The relative position regulating mechanism 21 has a convex portion 38.
3 for lifting a piston 24 integrally molded with
4, when the compressed air is discharged from the pressure chamber 35 and the movable part 2 is relatively displaced with respect to the fixed part 1, the convex part 38 integrally formed with the piston 24 becomes a spring together with the piston 24. It is lifted by 34 and completely separated from the copying surface 39 of the movable part 2. Therefore,
The movable portion 2 is kept in a state where the convex portion 38 is in contact with the copying surface 39.
The sliding resistance generated when the movable part 2 is displaced relative to the fixed part 1 is removed, so that the movable part 2
Move relatively smoothly. Therefore, it can be used without trouble even in applications where a delicate work is inserted.

Further, since the spring 34 is disposed adjacent to the piston seal 37 with the first flange 30 of the piston 24 as a boundary and effectively interacts with the piston seal 37, harmful stiffness due to the moment occurs. Can be prevented.

[0048]

The present invention has the following effects.

That is, first, in the compliance device according to the first aspect of the present invention having the above-described configuration, the fixed-side relative position restricting portion that forms one of the engaging portions of the relative position restricting mechanism connects the restricting portion to the movable portion. The piston is fixed to the fixed part, and the piston is slidably contacted with the fixed part near the opening of the cylinder chamber. The contact area of the part is set to be larger than the contact area of the ball and the sliding part of the fixed part in the conventional technique. Therefore, the pressing load per unit area is reduced, and the sliding resistance is reduced accordingly, so that the amount of wear generated on the sliding portion can be reduced by that much, and the life of parts can be extended. it can.

Further, the present invention having the above-mentioned structure is provided in claim 2 of the present invention.
In the compliance device according to the above, a fixed-side relative position restricting portion constituting one engaging portion of the relative position restricting mechanism is integrally formed with a piston that presses the restricting portion toward the movable portion, and the piston is fixed to the fixed portion. Because of the structure in which the body forming the main body is slidably contacted in the vicinity of the opening of the cylinder chamber, the contact area between the piston and the sliding portion of the body is smaller than the ball and the fixed portion in the above-described prior art. Is set to be larger than the contact area of the sliding portion. Therefore, the pressing load per unit area is reduced, and the sliding resistance is reduced accordingly, so that the amount of wear generated on the sliding portion can be reduced by that much, and the life of parts can be extended. it can.

In addition to the above, in the compliance device according to claim 3 of the present invention having the above-described structure,
Since the relative position regulating mechanism is provided with spring means for returning the piston in a direction away from the movable part, when the compressed air is discharged from the cylinder chamber and the movable part is relatively displaced with respect to the fixed part, The fixed-side relative movement restricting portion integrally formed with the piston is lifted by the spring means together with the piston and completely separated from the movable portion. Therefore,
The sliding resistance generated when the movable part is displaced relative to the fixed part while the fixed-side relative movement restricting part remains in contact with the movable part is removed, so that an extremely small external force is applied. Even if the movable part moves relatively smoothly. Therefore, it can be used without trouble even in applications where a delicate work is inserted.

[Brief description of the drawings]

FIG. 1 is an external perspective view of a compliance device according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view of the device.

FIG. 3 is a bottom view of the apparatus.

FIG. 4 is a sectional view of the apparatus.

FIG. 5 is a sectional view showing an operation state of the device.

FIG. 6 is a cross-sectional view of a compliance device according to a conventional example.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Fixed part 2 Movable part 3 Connection part 4 X-axis connection part 5 Y-axis connection part 6,7,10,14 Rolling groove 8,9 Dust seal 11,15 Ball 12 X-axis bearing part 13,17 Stopper 16 Y-axis bearing Part 18 Mounting screw 19 Round hole 20 Long hole 21 Relative position regulating mechanism 22 Body 23 Cylinder chamber 24 Piston 24a Cylindrical outer peripheral surface 25, 41 Closing member 26 Retaining ring for hole 27 Packing 28 Retaining portion 28a Cylindrical inner peripheral surface 28b Chamfered part 29 Atmospheric release part 30, 31 Flange part 32 Mounting groove 33 Piston seal 34 Spring (spring means) 35 Pressure chamber 36 Communication hole 37 Piping port 38 Convex part (fixed-side relative position regulating part) 38a Spherical surface 39 Movable side relative position regulating portion) 39a conical slope 40 penetrating portion 42 sliding portion

Continuation of the front page (72) Inventor Yoshiyuki Anana 4-3-1 Tsujido Shinmachi, Fukufujisawa-shi, Kanagawa F-term in NOK Co., Ltd. (reference) 3C030 BB02 BC29 3F060 FA12

Claims (3)

[Claims] 1. A fixed part (1) and a movable part (2) relatively displaced in a two-dimensional plane by the action of an external force, and the fixed part (1) and the movable part (2) relatively displaced return to an initial movement position. A relative position restricting mechanism (21), wherein the relative position restricting mechanism (21) includes a cylinder chamber (23) provided in the fixed part (1) and a cylinder chamber (2).
3) a piston (24) inserted into the cylinder chamber (23) and moved toward the movable portion (2) by compressed air supplied to the cylinder chamber (23); and a fixed side integrally formed with the piston (24). A relative position regulating portion (38), and the movable portion (2) corresponding to the fixed side relative position regulating portion (38).
The fixed portion (1) and the piston (24) are in slidable surface contact near the opening of the cylinder chamber (23). A compliance device characterized by: 2. The compliance device according to claim 1, wherein the fixed portion is in slidable surface contact with the piston.
Is a body (22) forming a fixing portion main body. 3. The compliance device according to claim 1, wherein the relative position regulating mechanism (21) returns the piston (24) in a direction away from the movable part (2).
4) A compliance device comprising: