JP2002305081A5 - - Google Patents
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- Publication number
- JP2002305081A5 JP2002305081A5 JP2002022983A JP2002022983A JP2002305081A5 JP 2002305081 A5 JP2002305081 A5 JP 2002305081A5 JP 2002022983 A JP2002022983 A JP 2002022983A JP 2002022983 A JP2002022983 A JP 2002022983A JP 2002305081 A5 JP2002305081 A5 JP 2002305081A5
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- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2002022983A JP4096568B2 (en) | 2001-01-31 | 2002-01-31 | Integrated mask assembling apparatus and assembling method, and organic EL element manufacturing method. |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001023475 | 2001-01-31 | ||
| JP2001-23475 | 2001-01-31 | ||
| JP2002022983A JP4096568B2 (en) | 2001-01-31 | 2002-01-31 | Integrated mask assembling apparatus and assembling method, and organic EL element manufacturing method. |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2002305081A JP2002305081A (en) | 2002-10-18 |
| JP2002305081A5 true JP2002305081A5 (en) | 2005-08-11 |
| JP4096568B2 JP4096568B2 (en) | 2008-06-04 |
Family
ID=26608626
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2002022983A Expired - Fee Related JP4096568B2 (en) | 2001-01-31 | 2002-01-31 | Integrated mask assembling apparatus and assembling method, and organic EL element manufacturing method. |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP4096568B2 (en) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR101936677B1 (en) * | 2012-07-03 | 2019-01-09 | 엘지디스플레이 주식회사 | Tray for Measuring, Driving Method of the Tray for Measuring, Deposition Appratus having a Tray for Measuring and Measuring Method of the same |
| JP6108544B2 (en) * | 2013-06-17 | 2017-04-05 | 新東エスプレシジョン株式会社 | Mask manufacturing equipment |
| JP6878032B2 (en) * | 2017-02-10 | 2021-05-26 | 株式会社ジャパンディスプレイ | Thin film mask fixing device |
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2002
- 2002-01-31 JP JP2002022983A patent/JP4096568B2/en not_active Expired - Fee Related