JP2002303649A - Component tester - Google Patents

Abstract

PROBLEM TO BE SOLVED: To efficiently perform tests and improve the availability for kinds of components. SOLUTION: A first transporting head 42A transports two components sucked by its two nozzles 60a, 60b to a test head 4, and positions the components to be fed to a component transfer position P2. The nozzles 60a, 60b are relatively movably supported. A component recognizing camera 64A for imaging the sucked components is disposed between the transfer position P2 and the test head 4. A means is provided for controlling the operation of the nozzles, etc., so as to recognize the images of the components sucked at the component transfer position P2 and position the components at predetermined positions on the test head at once, based on the recognition result.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a component testing apparatus for testing an electronic component such as an IC chip.

[0002]

2. Description of the Related Art In the manufacturing process of semiconductor devices, etc.,
It is necessary to perform various tests on electronic components such as an IC chip finally manufactured. As an apparatus for automatically performing such tests, a device disclosed in Japanese Patent Application Laid-Open No. H11-333775 has been proposed. There is a device.

In this apparatus, a pre-test IC chip stored in a tray is adsorbed by a first transfer device having a nozzle member for picking up components and placed on a first buffer device. After the transfer, the IC chip on the first buffer device is sucked by the second transfer device having the nozzle member for sucking the components, and the IC chip is transferred to the test head to perform the test. After the test, the IC chip is transferred from the test head to the second buffer device by the second transfer device and transferred to the tray mounting portion, and then the IC is placed on a predetermined tray according to the test result by the first transfer device. It is configured to transfer chips.

In this test apparatus, two IC chips are used.
The test head is provided with a pair of test sockets so as to be able to process (test) at the same time.
The transport device is provided with a pair of nozzle members for component suction, so that the IC chip test can be performed efficiently.

[0005]

In order to properly perform a test in this type of test apparatus, it is necessary to accurately position components in a predetermined direction with respect to a test socket provided on a test head. Yes, in the device of the above publication,
A chuck-type positioning mechanism is provided for each nozzle member of the second transfer device, and the suction state of the components is corrected before setting the components in the socket. That is, the picked-up component is gripped from the periphery thereof by a chuck, so that the position and direction of the picked-up component with respect to the nozzle member are mechanically corrected, and then the component is set in the socket.

However, since the shape and size of the chuck suitable for positioning differ depending on the type of component, a chuck-type positioning mechanism has a limitation in the type of component that can be handled by one type of chuck. Is low.

Therefore, it is conceivable to make the nozzle member replaceable (the chuck can be replaced) and perform the test while replacing the nozzle member according to the type of the component. Since it is necessary to temporarily suspend the test, it is not preferable in performing the test efficiently.
In addition, there is a concern that a mechanical error occurs due to the attachment and detachment of the nozzle member, and the positioning accuracy of the component with respect to the socket is reduced.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and it is an object of the present invention to improve the versatility with respect to the types of components while efficiently and appropriately testing the components in a test device such as an IC chip. The purpose is to be able to.

[0009]

SUMMARY OF THE INVENTION In order to solve the above-mentioned problems, the present invention is directed to a plurality of parts supplied at a predetermined supply part by a movable transport head having a plurality of holding means for holding parts. In a component test apparatus for holding and transporting the components to the test head and simultaneously positioning each component on the test head to perform the test, the holding means of the transport head are provided so as to be relatively movable. Imaging means for imaging the components held in each holding means of the head for use, recognition means for recognizing the holding state of the components based on the imaging result of the imaging means, and after holding the components in the supply unit, In order to image the component held by the holding means, the transport head is moved to the test head after passing through the position to be imaged by the imaging means, and the predetermined time of the test head is adjusted. And in which and a control means for controlling the operation of the transfer head or the holding means based on the recognition result by the recognition unit in order to position each part in position.

In this apparatus, after a plurality of components are taken out of the supply unit by the transport head, the held state of the components is image-recognized based on the image captured by the image capturing means, and then transported to the test head. If there is an error (shift) in the component holding state as a result of the image recognition, the operation of the transport head and each holding unit is controlled so as to correct the error. Each component is simultaneously positioned with respect to the test head in a state where is corrected. In other words, while a plurality of components are conveyed to the test head and positioned at the same time to efficiently test the components, while the holding state is corrected based on the image recognition of the components in a software manner, it is possible to exchange device components. It is possible to satisfactorily perform the correction of the suction state regardless of the type of the component without accompanying the above.

In this apparatus, a pair of supply units are provided, and a pair of transfer heads movable between each supply unit and the test head are provided, and each transfer head from each supply unit to the test head is provided. It is more preferable that the control means is configured to perform the component transport operation with the phases shifted from each other.

[0012] According to this configuration, the parts are conveyed (supplied) to the test head alternately by the respective conveying heads, so that the parts can be continuously supplied to the test head and the test can be performed more efficiently. Can be performed.

In this apparatus, it is preferable that the image pickup means is disposed between the test head and the supply section, and that the test head, the image pickup means and the supply section are arranged in a line in one axial direction.

According to this configuration, the component is picked up while moving the transport head from the supply section to the test head at the shortest distance, but the component can be transported by the transport head. It will be possible to do this quickly.

As a specific configuration for moving the respective holding units relatively in the transport head, a test head, an imaging unit, and a supply unit are arranged in a line in the X-axis direction, which is one axial direction, and A plurality of unit frames which are movable in the X-axis direction as a frame and are arranged in a line in the direction are provided, and these unit frames are connected to each other while being relatively movable in the X-axis direction. It is conceivable that the holding means is mounted on each frame, and each holding means can be moved in the Y-axis direction, which is a direction orthogonal to the X-axis direction and the horizontal plane with respect to the unit frame.

According to this configuration, each holding means can be relatively moved in the X-axis direction by moving another unit frame in the X-axis direction with respect to one unit frame. Then, by moving each holding means in the Y-axis direction, each holding means can be relatively moved in the Y-axis direction. Therefore, with respect to the holding means mounted on one unit frame, the other unit frames are
By moving the holding means mounted on the same unit frame in the Y-axis direction in the axial direction, it is possible to individually move the parts held by each holding means.

In this case, when the supply unit and the imaging unit are arranged on both sides of the test head, and the transport head is moved between each supply unit and the test head, each of It is preferable that the unit frame of the transport head is supported on a common rail member so as to be movable in the X-axis direction.

According to this configuration, a rational configuration in which the rail member is shared in each transport head is achieved.

In the above-described apparatus, the holding means may be of a type for holding the component by grasping it. However, when the responsiveness and reliability of the component holding operation are comprehensively taken into account, the holding means can hold the component. It is preferable that the device is configured to be held in a state of being adsorbed.

[0020]

Embodiments of the present invention will be described with reference to the drawings. It should be noted that the X-axis and the Y-axis are shown in the drawing to clarify the directionality.

FIGS. 1 and 2 schematically show a component testing apparatus according to the present invention. As shown in these drawings, a component test apparatus 1 (hereinafter, abbreviated as a test apparatus 1) has a handler 2 that plays a mechanical role of transporting components and holding (fixing) components during testing, and a And a test apparatus main body 3 to be incorporated.

The test apparatus main body 3 has a test head 4
A component set in a socket (not shown) provided in the test head 4 and receiving an output current from an output terminal of the component while supplying a test current to an input terminal of the component. To determine the quality of the parts.

The test apparatus main body 3 is configured to be detachable from the handler 2 and is not shown. For example, while the test apparatus main body 3 is mounted on a dedicated carriage, a predetermined amount is set from below the handler 2. Insert the test head 4
Is fixed to the handler 2 so as to face a test area Ta, which will be described later, from an opening formed in a base 2 a of the handler 2. It should be noted that the test head 4 and the test apparatus main body 3 do not necessarily have to be integrated, and only the test head 4 is assembled to the handler 2, and the other parts are arranged at positions separated from the handler 2 and May be electrically connected by an electric cable or the like. In this case, the handler 2 itself except the test apparatus main body 3 can be regarded as the component test apparatus of the present invention.

As shown in FIG. 1, the handler 2 is a substantially box-shaped device having an upper portion protruding sideways. The handler 2 takes out the components stored in a tray, transports the components to the test head 4, and further performs a test after the test. The components are configured to be sorted according to the test results. Hereinafter, the configuration will be specifically described.

The base 2a of the handler 2 is roughly divided into two areas: a tray storage area Sa in which the tray Tr is stored, and a test area Ta in which the test head 4 and the like are arranged.

In the tray storage area Sa, a plurality of tray storage sections are arranged in the X-axis direction. In the present embodiment, the first to fifth five tray storage sections 11 are sequentially arranged from the left side in FIG.
To 15 are juxtaposed. Then, the second tray storage unit 1
The tray Tr on which the components before the test (untested) are placed in the second and fourth tray storage units 14, the empty tray Tr in the first tray storage unit 11, and the components after the test in the third tray storage unit 13. The tray Tr on which the accepted product (Pass) is placed, and the tray Tr on which the rejected product (Fail) among the tested components is placed in the fifth tray storage unit 15, respectively. Each tray T
Although r has a common structure and is not shown, for example, a plurality of component storage sections partitioned in a lattice shape are provided on the surface thereof, and components such as IC chips are provided in each of the component storage sections. It is constituted so that it may be stored in.

Each of the tray storage sections 11 to 15 is configured to store a plurality of trays Tr in a stacked state on a table that can be moved up and down, and only the uppermost tray Tr faces the base 2a. The trays Tr are arranged in a state where they are placed in an upright position, and the other trays Tr are stored in a space below the base.

Specifically, as shown in FIGS. 3 and 4,
Each tray storage section 11 to 15 has a vertical direction (Z axis direction).
Is provided, and a table 16 is movably mounted on the rail 17. Further, a ball screw shaft 19 which is operated by a servo motor 18 and is parallel to the rail 17 is provided, and the ball screw shaft 19 is screwed to a nut portion 16 a of the table 16. A plurality of trays Tr are placed on the table 16 in a stacked state, and the table 16 is moved up and down with the rotation of the ball screw shaft 19 by the servo motor 18, whereby the trays Tr stacked on the table 16 are moved. The uppermost one is arranged on the base via the openings 11a to 15a in accordance with the number.

As shown in FIG. 1, doors 11b to 11b are provided on the side walls of the handler 2 so as to correspond to the tray storage sections 11 to 15, respectively.
A tray Tr is provided to open and close the doors 11b to 15b so that the tray Tr can be taken in and out of the tray storage units 11 to 15.

Considering that most of the parts to be tested are acceptable products, the tray storage units 11 to 11 are considered.
The storage capacity of the tray Tr is set to be larger in the third tray storage unit 13 for storing the acceptable parts among the trays 15 than in the other tray storage units 11, 12, 14, and 15. Thus, the configuration is such that the frequency of loading / unloading of the tray Tr with respect to the third tray storage unit 13 does not become too large as compared with other tray storage units.

As shown in FIGS. 1 and 2, a P & P robot (Pick & Place Robot) is provided in the tray storage area Sa.
t) 20 is provided.

The P & P robot 20 has a movable head 23. With this head 23, components are taken out from the tray Tr of the second or fourth tray storage section 12, 14, and transferred to shuttle robots 30A, 30B described later. In addition to the delivery, the parts after the test are transferred to the shuttle robot 30A,
30B, and is transferred to the tray Tr of the third tray storage section 13 or the fifth tray storage section 15. The first tray storage section 11 and the other tray storage sections 12 to 1 are further transferred.
5 is configured to also function as a tray transport device that transports an empty tray Tr between the first tray 5 and the second tray 5.

More specifically, Y is placed on the base 2a.
A pair of fixed rails 21 extending in the axial direction is provided, and a head support member 22 is movably mounted on these fixed rails 21. Although not shown, a ball screw shaft that is rotated by a servomotor and extends in parallel with the fixed rail 21 is provided on the base 2a, and the ball screw shaft is provided on the support member 22 by a nut member. (Not shown). Further, although not shown in detail, the support member 22 is provided with a fixed rail extending in the X-axis direction, and the head 23 is movably mounted on the fixed rail. A ball screw shaft extending in parallel with the shaft is provided, and this ball screw shaft is screwed to a nut portion provided on the head 23. The support member 22 moves in the Y-axis direction and the head 23 moves in the X-axis direction in response to the rotation drive of the ball screw shaft by each of the servo motors.
5 and the shuttle robots 30A and 30B are configured to be able to move two-dimensionally (move on the XY plane) in a range including the part delivery position P1 described later.

A plurality of nozzle members are mounted on the head 23. In this embodiment, a pair of nozzle members 24a and 24b (referred to as a first nozzle 24a and a second nozzle 24b) for sucking components and a tray sucking member are used. , A total of three nozzle members are mounted.

Each nozzle member 24a, 24b for picking up parts
Can move up and down and rotate (rotate around the nozzle axis) with respect to the head 23, and are configured to be operated by a drive mechanism using a servomotor as a drive source, though not shown. Then, on the tray Tr such as the second tray storage unit 12 or the shuttle robots 30A and 30B
In a state where the head 23 is arranged above the table 32 described later, components are taken in and out of the tray Tr as the nozzle members 24a and 24b move up and down. In addition, when components are stored in the tray Tr, in addition to such a nozzle elevating operation, each nozzle member 2
The components are stored in the tray Tr in a predetermined direction by rotating the components 4a and 24b.

The tray nozzle member 25 can only move up and down with respect to the head 23, and is configured to be operated by a drive mechanism using a servo motor as a drive source. Then, in a state where the tray Tr emptied due to the removal of the component is sucked, the first and second tray storage units 12 and 14 are moved from the second and fourth tray storage units 12 and 14 as the head 23 moves.
1 and transfer the tray Tr to the first
The empty tray Tr stored in the tray storage 11 is sucked and transferred to the third or fifth tray storage 13 or 15. The tray nozzle member 2
As for No. 5, a wide suction area is secured by, for example, attaching a rectangular plate-type suction pad to the tip (lower end) of the tray Tr in order to suction the tray Tr well.

In the tray storage area Sa, a component recognition camera 34 composed of a CCD area sensor is provided between the component transfer positions P1 of the shuttle robots 30A and 30B. The camera 34 captures an image of a component adsorbed on the head 23 of the P & P robot 20 from below, and is configured to capture an image of the component after the test before storing the component in the tray Tr. The component recognition camera 34 is provided with the nozzle members 24a and 24a of the head 23.
It is configured to be able to simultaneously image two components adsorbed on 4b.

On the other hand, in the test area Ta, the test head 4, a pair of shuttle robots 30A and 30B (first
Shuttle robot 30A, second shuttle robot 30
B) and a test robot 40 are provided.

The test head 4 is disposed so as to be exposed at the substantially central portion of the test area Ta from the opening formed in the base 2a as described above. A plurality of sockets (not shown) for setting components are provided on the surface of the test head 4. In the test apparatus 1, two sockets are provided in a state of being arranged in the X-axis direction. .

Each socket is provided with a contact portion (not shown) corresponding to each lead of a component (such as an IC chip). When the component is positioned in each socket,
Each lead of the component is brought into contact with a corresponding contact portion so that the component is subjected to an electrical test such as a continuity test or an output characteristic test for an input current.

The shuttle robots 30A and 30B transfer the parts between the tray storage area Sa and the test area Ta while the P & P robot 20 and the test robot 40.
2 is a device for delivering parts to and moving along the fixed rails 31 driven by a fixed rail 31 extending in the Y-axis direction and a driving mechanism using a servo motor as a drive source, as shown in FIG. And a table 32.
Then, the first tray storage unit 11 and the fifth tray storage unit 1
The table 32 is fixed to the fixed rail 31 between a part transfer position P1 for the P & P robot 20 set near the position 5 and a part transfer position P2 (supply unit) for the test robot 40 set on the side of the test head 4. The components are transported by the table 32 while reciprocating along the table.

In the table 32, an area for mounting components before the test and an area for mounting components after the test are predetermined. In this embodiment, as shown in FIG. 32, the tray storage area Sa side (the lower side in the figure) is a first area a1 for mounting the components after the test, and the opposite side is a second area a for mounting the components before the test.
It is defined as 2. In each of the areas a1 and a2, a pair of suction pads 33a and 33b are provided at predetermined intervals in the X-axis direction, specifically, each transport head 4 of the test robot 40.
A pair of head bodies 43a, 4 provided on 2A, 42B
3b, the pitch is greater than or equal to the minimum pitch, and is provided at an interval corresponding to the nozzle members 24a, 24b of the head 23 of the P & P robot 20. When the components are transported, the components are placed on these pads 33a, 33b. It is configured to be conveyed while being placed and sucked.

Each shuttle robot 30A, 30B
The delivery of parts between the P & P robot 20 and the test robot 40 is performed, for example, as follows.

First, when the parts before the test are transferred from the P & P robot 20 to the shuttle robots 30A and 30B, as shown in FIG. 6A, the P & P robot 20 is moved to a predetermined position of the part delivery position P1. Nozzle members 24a, 24
b (head 23) is positioned, and the nozzle members 24a,
The table 32 is set so that the second area a2 corresponds to 24b.
Is positioned (this position is referred to as a second position),
In this state, components are transferred onto the table 32 as the nozzle members 24a and 24b are raised and lowered. On the other hand, when transferring the parts after the test from the shuttle robot 30A (30B) to the P & P robot 20, the table is set so that the first areas a1 correspond to the nozzle members 24a and 24b as shown in FIG. 32 is positioned (this position is referred to as a first position), and in this state, the components on the table 32 are sucked as the nozzle members 24a and 24b move up and down.

When transferring the components after the test from the test robot 40 to the shuttle robot 30A (30B), as shown in FIG. 6C, the test robot 40 is moved to a predetermined position of the component transfer position P2. The nozzle member 60a described below,
60b (head bodies 43a, 43b) are positioned in the X-axis direction, respectively, and each nozzle member 60a, 60b
The table 32 is positioned so as to correspond to the first area a1 (first position). In this state (that is, the suction pad 33b and the nozzle member 60b located inside the both fixed rails 31 (the right side in FIG. 5)). Fixed rail 31
The components are placed on the table 32 as the nozzle members 60a and 60b move up and down with the suction pad 33a and the nozzle member 60a located outside (in FIG. 5, the left side) coincide with each other. On the other hand, shuttle robot 30A (30B)
When transferring the parts before the test to the test robot 40 from the nozzle members 60a and 60b as shown in FIG.
The table 32 is positioned so as to correspond to the second area a2 (second position).
The components are sucked from the table 32 as the components 0a and 60b move up and down.

The test robot 40 is operated by the shuttle robots 30A and 30B as described above.
a is transported (supplied) to the test head 4 from the a to the test head 4 and is held (fixed) while the component is pressed against the test head 4 during the test. After the test, the component is left as it is. This is a device for transferring (discharging) to the shuttle robots 30A and 30B.

The test robot 40 includes a pair of transport heads 42 that move along an elevated 2b provided on the base 2a so as to straddle the shuttle robots 30A and 30B.
A and 42B (referred to as a first transfer head 42A and a second transfer head 42A).
A pair of head bodies 43 respectively mounted on 2A and 42B
a, 43b (first head body 43a, second head body 4
3b) to supply and discharge components to and from the test head 4. Hereinafter, the transport heads 42A, 4A will be described with reference to FIGS. 1, 2, and 7 to 9.
The configuration of 2B will be specifically described.

The transport heads 42A and 42B are respectively
X-axis fixed rail 45 provided on the elevated 2b
Movable frame 46a, 46b movable along
(A first movable frame 46a and a second movable frame 46b; a unit frame). A servomotor 47 is fixed to the first movable frame 46a of the movable frames 46a and 46b, and a ball screw shaft 48 extending in the X-axis direction is integrally connected to an output shaft of the servomotor 47, and The ball screw shaft 48 is screwed to a nut portion 49 provided on the second movable frame 46b. In addition, a pair of ball screw shafts 51 parallel to the fixed rail 45 respectively driven by the servo motor 50 are provided on the base 2a, and these ball screw shafts 51 are connected to the first movable frames of the transport heads 42A and 42B. It is screwed into a nut portion 52 provided at 46a. That is, with the rotation of the ball screw shaft 51 by the servo motor 50, each of the transport heads 42A, 42B
Move along the fixed rail 45 in the X-axis direction, and the rotation of the ball screw shaft 48 by the servo motor 47 causes the respective transfer heads 42A and 42B to move as shown by the two-dot chain line in FIG. Second movable frame 46
b is configured to be movable in the X-axis direction relative to the first movable frame 46a.

On each of the movable frames 46a and 46b, a fixed rail 5 extending in the Y-axis direction is provided as shown in FIGS.
4 are provided respectively. A head support member 55 is movably supported by each rail 54, and the head main bodies 43a and 43b are respectively assembled to the distal ends (the left ends in FIG. 8) of these head support members 55. . A ball screw shaft 58 parallel to the fixed rail 54 driven by a servomotor 57 is supported on each of the movable frames 46a and 46b via a fixed base 56. These ball screw shafts 58 are attached to the head support member 55. Each of the nut portions 59 is screwed and mounted. Accordingly, each head body 43a, 43b is moved by the movable frame 46 with the rotation drive of the ball screw shaft 58 by each servo motor 57.
a and 46b are configured to move in the Y-axis direction, respectively.

As shown in FIG. 8, the head main bodies 43a and 43b are provided with nozzle members 60a and 60b (first nozzle member 60a and second nozzle member 60b; holding means) for sucking components, respectively. Each nozzle member 60a, 60
b can be raised and lowered and rotated (rotated around the nozzle axis) with respect to the frames of the head main bodies 43a and 43b, and is configured to be driven by a drive mechanism (not shown) using a servo motor as a drive source. I have.

Each of the head bodies 43a and 43b has
Socket recognition cameras 62 each comprising a CCD area sensor for imaging a reference mark attached to the socket when supplying components to the test head 4 are mounted.

In the test area Ta, between the component transfer position P2 of the shuttle robots 30A and 30B and the test head 4, component recognition cameras 64A and 64B each including a CCD area sensor are provided. These cameras 64A, 64B are provided with respective transport heads 42A, 4B.
The two components picked up by 2B can be simultaneously imaged from below, and as shown in FIG. 10, the components are picked up from each shuttle robot 30A (30B) by the head main bodies 43a and 43b. Then, the components are arranged above the component recognition camera 64A (64B) with the movement of the head main bodies 43a and 43b, so that the components are imaged. The component delivery position P2, the component recognition cameras 64A and 64B, and the test head 4 are arranged on the same axis parallel to the X axis.
Thus, the transport heads 42A and 42B are configured to be able to take an image of a component before the test while moving the transport heads 42A and 42B from the component delivery position P2 to the test head 4 at the shortest distance, respectively.

A dustproof cover 2c is mounted on the upper part of the handler 2 as shown in FIG. 1, and the space on the base 2a including the test area Ta and the tray storage area Sa is defined by the cover 2c. Covered.

FIG. 11 is a block diagram showing a control system of the test apparatus 1. As shown in FIG.
A well-known CPU 70a for executing a logical operation, and the CPU
The control unit 70 includes a ROM 70b in which various programs for controlling the device 70a are stored in advance, and a RAM 70c for temporarily storing various data during operation of the apparatus.

The control unit 70 is connected to the test apparatus main body 3 and the component recognition cameras 34 and 6 via an I / O unit (not shown).
4A, 64B and the socket recognition camera 62 are electrically connected, and the controllers 71, 72, 73A, 73B of the P & P robot 20, the test robot 40, and the shuttle robots 30A, 30B are also electrically connected. An operation unit 75 for inputting / outputting various information to / from the control unit 70 and a CRT 76 for notifying various information such as a test status are electrically connected to the control unit 70.

FIG. 12 is a functional block diagram of the control unit 70. The operation of mainly transferring the parts (parts before the test) to the test head 4 by the test robot 40 and the parts to the tray Tr by the P & P robot 20. 2 shows a part for controlling the storing operation of the (parts after the test).

As shown in this figure, the control unit 70 includes a main control unit 74 (control unit) and a head position error calculation unit 75.
And suction error calculating means 76 and 77 corresponding to each component before and after the test, and an image processing means 78.

The main control means 74 controls the operation of each robot and the like in the test apparatus 1 comprehensively. The P & P robot 20 performs a test operation described later in detail according to a program stored in advance. , Etc., to control each robot collectively. In particular, when the test robot 40 positions the component (the component before the test) to the test head 4 (socket), the error calculated by the head position error calculating means 75 and the suction error calculating means (before the test) 76 is reduced. Based on the correction amount, the test robot 40 (the transport heads 42A, 4A)
2B). Also, P
In storing parts (parts after the test) in the tray Tr by the & P robot 20, suction error calculating means (after the test)
A correction amount is calculated based on a later-described suction error of the component obtained in 77, and the P & P robot 20 is calculated based on the correction amount.
Is configured to be driven.

The image processing means 78 is a component recognition camera 3
A predetermined image processing is performed on signals from the image pickup devices of the 4, 64A, 64B and the socket recognition camera 62.

The head position error calculating means 75 calculates the respective transport heads 42A, 42A for the test head 4 (socket) based on the image taken by the socket recognizing camera 62.
The relative positional relationship between the transport heads 42A and 42B with respect to the test head 4 is calculated by comparing the relative positional relationship between the transport heads 42A and 42B with the proper value thereof. 74.

The suction error calculating means (before the test) 76 is based on the image of the component (the component before the test) picked up by the component recognition camera 64A or 64B, and based on the image of the transport heads 42A, 4B.
The suction error (deviation) of the components sucked by the nozzle members 60a and 60b of 2B is calculated, and the calculation result is output to the main control means 74. That is, the image processing means 78 and the suction error calculating means 76 constitute a recognition means of the present invention.

The suction error calculating means (after the test) 77 is based on the image of the component (after the test) picked up by the component recognition camera 34 and uses the nozzle members 24a, 24a,
The suction error (deviation) of the component picked up by 24b is calculated, and the calculation result is output to the main control means 74.

Next, an operation example of the test apparatus 1 based on the control of the control unit 70 will be described with reference to the timing chart of FIG.

This timing chart shows the operation from a specific time point (time point t0) during the test operation.
Each of the robots 20, 30A, 30B at the time t0,
The state of 40 (transport heads 42A and 42B) is as follows.

P & P robot 20: The head 23 is in a state of being moved in order to store the components after the test in the tray Tr. That is, the head 23 is moved to the first shuttle robot 30A.
From the component transfer position P1, passing above the component recognition camera 34 and moving toward the third tray storage unit 13 or the fifth tray storage unit 15. It should be noted that the imaging of the component by the component recognition camera 34 has been completed, and the suction error calculating means 77 has already set the nozzle members 24a, 24b
The suction error (deviation) of the component that is sucked is determined.

The first shuttle robot 30A is in a state of waiting at the component delivery position P1 while holding the component to be supplied to the first transport head 42A next time on the table 32.

The first transport head 42A; the components to be tested next are sucked by the head bodies 43a and 43b,
And each component is arranged above the component recognition camera 64A (standby).
In other words, the suction error calculating means 76 determines the suction error (deviation) of the component sucked by each of the nozzle members 60a and 60b based on the imaging of the component by the component recognition camera 64A.

Second shuttle robot 30B: The second shuttle robot 30B is in a state of waiting at the component delivery position P1 while holding the components to be supplied to the second transport head 42B on the table 32.

Second transport head 42B: The test head 4 is in a state immediately after the end of the test.

Under the above conditions, first, the second
The table 32 of the shuttle robot 30B moves to the component delivery position P2 (at time t1), and the nozzle members 60a and 60b of the second transport head 42B switch from pressing the component to the socket to sucking the component. Then, the component after the test is lifted while being sucked, and when the lifting is completed, the second transport head 42B starts moving to the component transfer position P2 of the second shuttle robot 30B in order to transfer the component after the test ( t3). At this time, if the pitch between the components sucked by the head bodies 43a and 43b of the second transport head 42B does not match the pitch of the suction pads 33a and 33b on the table 32 (the interval in the X-axis direction), The drive of the second transport head 42B is controlled such that the interval between the head bodies 43a and 43b coincides with the pitch between both sockets during the movement of the two transport head 42B.

The second transfer head 4 is located at the part delivery position P2.
When 2B arrives (at time t7), the table 32 of the second shuttle robot 30B is first moved from the second transport head 42B.
The parts after the test are transferred on the
The next part (the part before the test) pre-loaded on the
Delivered to the robot body 42B. More specifically, the table 32 of the second shuttle robot 30B is first positioned at the first position (see FIG. 6C) at the component transfer position P2, and the first area on the table 32 is raised as the nozzle members 60a and 60b are raised and lowered. The component is transferred to a1 (time t9). Thereafter, the table 32 is positioned at the second position (see FIG. 6D), and the second position on the table is
The components held in the area a2 are the nozzle members 60
It is adsorbed as a and 60b move up and down (time t12).

When the delivery of components between the second transport head 42B and the second shuttle robot 30B is completed, each component is placed on the component recognition camera 64B with the movement of the second transport head 42B ( At time t18), a process for checking the suction state based on the image of the component is performed, and when this process is completed, the process enters a standby state for transport to the test head 4.

On the other hand, as described above, the second transport head 42
When B moves to the component delivery position P2, the first transport head 42A starts moving to the test head 4 at the same timing as this to test the next component (time t3).
When the first transport head 42A reaches the test head 4 (time t5), the nozzle members 60a, 60b descend, and the components adsorbed by the nozzle members 60a, 60b are moved along with the downward movement. The components are positioned while being pressed against the respective sockets at the same time, whereby the test of the component is started (time t8).

Although not shown in detail in the timing chart, the positioning of the component in the socket is performed by first placing the first transport head 42A at the target position on the test head 4 and imaging the mark by the socket recognition camera 62. The position error (deviation) of the first transport head 42A with respect to the socket is obtained based on the above. And, as mentioned above,
The main control means 74 calculates a correction amount of each component with respect to the socket based on the error and the previously determined suction error (deviation) of the component.
After the position of the suction component of each head body 43a, 43b is corrected by controlling the drive of the transport head 42A, each component is positioned in the socket as the nozzle members 60a, 60b descend.

First, the servo motor 5
After the entire first transfer head 42A moves in the X-axis direction by the operation of 0, only the second movable frame 46b moves in the X-axis direction by the operation of the servomotor 47. As a result, the positions of the components adsorbed on the head bodies 43a and 43b are corrected in the X-axis direction. The operation of each servomotor 57 causes each of the head bodies 43a and 43b to be Y
By moving in the axial direction, the position of each component is corrected in the Y-axis direction, and each of the nozzle members 60a and 60b of the head main bodies 43a and 43b is rotated around the nozzle axis by a servo motor (not shown). Each position is corrected in the rotation direction. Thereby, each head body 43a, 4
The position of the component sucked by 3b is corrected in the X-axis direction, the Y-axis direction, and the rotation direction, respectively. Here, for convenience of explanation, the position correction of each component has been described in a time series while being divided into the X-axis direction, the Y-axis direction, and the rotation direction. However, in practice, the correction in each of these directions is performed in parallel. As a result, the position of each component is quickly corrected.

When the test of the components positioned on the test head 4 is completed (time t20), each nozzle member 60
The components are removed from the socket with the rise of a and 60b (time t23), and the components after the test are transported to the component transfer position P2 with the first shuttle robot 30A with the movement of the first transport head 42A. (At time t25). Then, in the same manner as the component transfer operation between the second transfer head 42B and the second shuttle robot 30B, the transfer of the component is performed between the first transfer head 42A and the first shuttle robot 30A.

Further, the second transfer head 42B moves to the test head 4 at the same timing as the start of the movement of the first transfer head 42A to the component delivery position P2 (time t23), and each of the second transfer heads 42B The head body 43a,
The next component sucked by 43b is positioned while being pressed against the test head 4 (t26).
Time). At this time, if the pitch of the components adsorbed on the head bodies 43a and 43b of the second transport head 42B is different from the pitch of the socket on the test head 4, the movement of the head bodies 43a and 43b during this movement is performed. The drive of the second transport head 42B is controlled so that the interval matches the pitch between both sockets.

On the other hand, for the P & P robot 20 and the shuttle robots 30A and 30B, the test robot 4
The operations thereof are controlled as follows so that the delivery of components to each of the zero transport heads 42A and 42B can be performed continuously.

First, as for the second shuttle robot 30B, the table 32 moves to the component delivery position P2 so as to receive the component after the test at the same time (time t7) when the second transport head 42B reaches the component delivery position P2. I do.
Then, as described above, the components after the test are first transferred from the second transport head 42B to the table 32 in a state where the table 32 is located at the first position (see FIG. 6C) (at time t9). The table 32 is arranged at the second position (see FIG. 6D) (time t10), and the components before the test are transferred from the table 32 to the second transport head 42B (time t12).

Thereafter, the table 32 stores the part delivery position P
1 (time t12). First, in a state where the table 32 is arranged at the second position (see FIG. 6B) (time t14), the table 32 is moved from the P & P robot 20 to the table 32.
The next part (part before the test) is delivered (t16).
Time). Next, the table 32 is moved to the first position (FIG. 6).
(See (a)) (at time t17), in this state, the components after the test are transferred from the table 32 to the P & P robot 20 (at time t19), and thereafter, in a standby state at the component delivery position P1 until the next component delivery. Put in. Although this is the operation control of the second shuttle robot 30B, the operation of the first shuttle robot 30A is similarly controlled in relation to the first transport head 42A.

On the other hand, the operation of the P & P robot 20 is controlled so that the components that have been previously tested are stored in the tray Tr according to the test results.

More specifically, each of the nozzle members 24a, 24b
If at least one of the two components (the components after the test) attracted to the device is a passed product, first, the head 23 is placed on the third tray storage unit 13 (at time t2), and
The accepted product is stored in the tray Tr as the nozzle member 24a moves up and down (time t4). Next, the second nozzle member 24
If the suction component b is a pass product, the head 23 is slightly moved to the next component storage unit on the same tray Tr, and if the suction component is a reject product, the head 23 is moved to the fifth tray storage unit. After moving upward, the remaining components are stored in the tray Tr as the second nozzle member 24b moves up and down (time t6). In this way, as the second nozzle member 24b moves up and down, the components are stored in the tray Tr of the third tray storage unit 13 or the fifth tray storage unit 15 according to the test result (time t8). If both parts are rejected, the head 23 is placed on the fifth tray storage part 15 (at time t2), and the first part is stored in the tray Tr as the first nozzle member 24a moves up and down. After that (time t4), the head 23 is placed on the next component storage portion on the tray Tr (time t6), and the remaining components are stored in the tray Tr as the second nozzle member 24b moves up and down. (T8
Time).

When the components are stored in each tray Tr, the movement of the head 23 and the movement of each nozzle member 24 are performed based on the suction error of each component based on the image captured by the component recognition camera 34.
By controlling the rotation of a and 24b, the components are accurately stored in the tray Tr.

When the storage of the components in the tray Tr after the test is completed, the head 23 is placed above the second tray storage unit 12 or the fourth tray storage unit 14 (at time t11), and a new component is moved from the tray Tr. It is taken out (time t13). Then, the head 23 is moved and arranged at the component delivery position P1 of the second shuttle robot 30B, and the new component is delivered to the second shuttle robot 30B as described above (time t16), and the component after the test is placed in the second shuttle robot 30B. It is transferred from the two shuttle robot 30B to the P & P robot 20 (time t19).

When the delivery of the component to the second shuttle robot 30B is completed, the head 23 is placed on the component recognition camera 34, and a process for checking the suction state of the component based on the image of the component after the test is performed. When this process is completed, the operation of the head 23 and the like is controlled to store the component in the tray Tr (time t22). Note that, from the time point t22 to the time point t27 (the time point when the head 23 is positioned above the third tray storage unit 13 or the like in order to store the next component after the test), the component is determined in accordance with the test result. After being stored in the tray Tr,
A new part is taken out from the second tray storage part 12 and the like, is delivered to the table 32 of the first shuttle robot 30A, and a series of operations for receiving the part after the test is completed is performed by the first first shuttle robot 30A and the first shuttle robot 30A. This is performed by the P & P robot 20. This series of operations is similar to the operation from the time point t2 to the time point t19. Also,
The test operation by the second transport head 42B from the time t26 to the time t28 (the time when the test of the next component is completed) is also performed similarly to the operation by the first transport head 42A from the time t8 to the time t20. The operation is controlled.

Thereafter, as shown in FIG. 10, the first transport head 42A (or the second transport head 4A) is used.
2B), the test is carried out by transporting and positioning two parts to the test head 4 at the same time, and in parallel with this, the second transport head 42B (or the first transport head 42A) and the second shuttle robot 30B (or) Second shuttle robot 30
B), the first transfer head 42A and the second transfer head 42B are further transferred while transferring the parts (ie, transferring the parts after the test and the next parts).
Shuttle robots 30A and 30B and the P & P robot 2 so that the transfer of parts to the
0 operation is controlled.

Although not shown in the timing chart of FIG. 13, the second tray storage 1
When the tray Tr (top tray) of the second or fourth tray storage unit 14 becomes empty, the empty tray Tr is
The operation of the P & P robot 20 is controlled so that the P & P robot 20 sucks and transfers the sheet from the second tray storage section 12 or the like to the first tray storage section 11. This makes it possible to take out components from the next tray Tr in the second tray storage section 12 or the like. Similarly, the third tray storage unit 13 or the fifth tray storage unit 15
When the components are fully loaded on the tray Tr (top tray), the empty tray Tr stored in the first tray storage unit 11 is sucked by the head 23 and transferred to the third tray storage unit 13 or the like. The operation of the P & P robot 20 is controlled as described above. As a result, the next component after the end of the test can be stored in the tray Tr in the third tray storage unit 13 or the like.

According to the test apparatus 1 of the present invention described above, the components supplied from the tray storage area Sa to the test area Ta are transferred to the respective head main bodies of the first transfer head 42A (or the second transfer head 42B). 43a and 43b make 2
At the same time, transport and position the test head 4,
Since the test head 4 is configured to be able to perform two tests at the same time, it is possible to efficiently test the components.

Further, in the test apparatus 1, when positioning the component on the test head 4, the suction state of the component is image-recognized, and each head main body 43a, 43
Since the suction error (deviation) of each component is corrected by controlling b and the like, that is, the suction error of each component is corrected in a software manner, so that the suction state can be corrected irrespective of the type of component. It can be carried out. Therefore, while a plurality of components are subjected to the test at the same time, the testing of the components can be performed efficiently, and the versatility for the types of the components can be improved.

In particular, in the device 1, regardless of the type of parts, the suction state can be corrected without any replacement of the device components, etc., so that the test can be performed efficiently and appropriately. There is an advantageous effect. That is, it is conceivable that a chuck-type positioning mechanism is incorporated in the nozzle member for component suction to mechanically correct a suction error, and the nozzle member is replaced according to the type of component. However, in this case, it is necessary to temporarily suspend the test when replacing the nozzle, which is inefficient, and
There is a possibility that a mechanical error may occur with the attachment / detachment of the nozzle member, and the positioning accuracy of the component with respect to the socket may be reduced. On the other hand, according to the test apparatus 1 described above, since there is no need to replace any component of the apparatus, no time is spent for such replacement of the components and the like. There is no possibility that a mechanical error occurs. Therefore, it is advantageous in performing the test efficiently and accurately.

In the test apparatus 1, each part transfer position P2 of the shuttle robots 30A and 30B (supply section)
Are provided on both sides of the test head 4, and each part delivery position P2
Component recognition cameras 64A, 6
4B and the shuttle robot 30
A, 30B, the component recognition cameras 64A, 64B, and the test head 4 are arranged on the same straight line parallel to the X axis, so that the transport heads 42A, 42B are moved to the component delivery position P2.
The component can be imaged in the middle while moving the shortest distance from the test head 4 to the test head 4. Accordingly, there is an advantage that the component can be conveyed as quickly as possible while capturing the component by the component recognition cameras 64A and 64B.

The test apparatus 1 described above is an embodiment of the component test apparatus according to the present invention, and its specific configuration can be changed as appropriate without departing from the gist of the present invention. . For example, the following configuration can be adopted.

In each of the transport heads 42 A and 42 B of the test robot 40, for example,
a, 43b, a common frame is provided, and each head body 43a, 43b is moved relative to this frame in the X-axis and Y-axis directions.
The moving mechanism 43b may be configured.

[0094] Each of the transport heads 42A, 42B may be provided with three or more heads so that more components can be transported simultaneously.

Each of the transport heads 42A and 42B includes a nozzle member 60a mounted on the head main bodies 43a and 43b.
Although the component is configured to be sucked and transported by 60b, the component may be transported while holding the component in a grasped state.

The component recognition cameras 34, 64A, 64B
Is not limited to the area sensor and may be a linear sensor. According to the linear sensor, since an image can be captured while moving the component, there is a merit that the component can be imaged more efficiently than an area sensor which needs to stop the component and take an image.

In the test apparatus 1, the transport head 42
Shuttle robot 30 common to A and 42B
A and 30B supply components and discharge components after the test. As shown in FIG. 14, a shuttle robot 80A dedicated to component supply and a shuttle robot 8 dedicated to component discharge are provided.
0B may be provided for each of the transport heads 42A and 42B.

Further, a test apparatus 1 as shown in FIG.
May be configured. That is, in the test apparatus 1, a first shuttle robot 81A dedicated to component supply is disposed at the left end (left end in the figure) of the test area Ta, and a second shuttle robot 81B dedicated to component discharge is disposed at the right end. 40, a pair of transport heads 82A and 82B (first transport head 82
A, a test robot 40 having a second transfer head 82B) is provided. Each transport head 82A, 82B
Is mounted with a plurality of nozzle members for component suction that are relatively movable (moving and rotating in the X-axis and Y-axis directions).

In this test apparatus, the operation of supplying and discharging components to and from the test head 4 is performed as follows.
That is, at the component transfer position P1, the component (the component before the test) is transferred from the P & P robot 20 to the table 32 of the first shuttle robot 81A, and then the table 32 moves to the component transfer position P2, for example, so that The component is delivered to one transport head 82A. Next, the first transfer head 82A moves to the test head 4 and the component is subjected to the test. When the test is completed, the first transfer head 82A moves to the component transfer position P3 of the second shuttle robot 81B, and The components are transferred to the table 32 of the shuttle robot 81B. Then, while the first transport head 82A moves to the part transfer position P2 with the first shuttle robot 81A to receive the next part, the table 32 of the second shuttle robot 81B moves to the part transfer position P4, and the shuttle The components after the test are transferred from the table 32 of the robot 81B to the P & P robot 20, and the components are stored in the tray Tr according to the test result.

Then, the supply of components from the component delivery position P2 to the test head 4 and the test head 4
Is discharged to the component delivery position P3 in a state where the phases are shifted by the respective transport heads 82A and 82B.

In the test apparatus 1 having such a configuration,
As shown in FIG.
The component recognition camera 83 is arranged between the
The same effect as the test apparatus 1 of the above-described embodiment can be obtained by performing image recognition of the suction state of the component and correcting it by software before the component is transported to the test device 1.

[0102]

As described above, the component testing apparatus of the present invention mounts a plurality of holding means which are relatively movable on the transport head, and transfers the plurality of components supplied in the supply section to the test head. At the same time, it is configured so that it can be conveyed and positioned at the same time, and in the operation of supplying the components to the test head, the holding state of each held component is image-recognized to correct the error (deviation) of the holding state. Because it is configured to control the operation, multiple parts can be simultaneously transferred to the test head and the test can be performed efficiently,
Further, it is possible to position the component with respect to the test head while satisfactorily correcting the error in the holding state without exchanging the components of the apparatus. Therefore, it is possible to efficiently and appropriately perform the test of the component, while increasing the versatility of the type of the component.

[Brief description of the drawings]

FIG. 1 is a schematic perspective view showing a component test apparatus according to the present invention.

FIG. 2 is a plan view showing a component test apparatus.

FIG. 3 is a cross-sectional view illustrating a configuration of a tray storage section in a tray storage area.

FIG. 4 is a cross-sectional view taken along line AA of FIG. 3, illustrating a configuration of a tray storage unit.

FIG. 5 is a schematic plan view showing a configuration of a table of the shuttle robot.

FIG. 6 is an arrow B diagram of FIG. 2 showing the position of the table at the part delivery position of the shuttle robot ((a),
(C) is a state where the table is arranged at the first position,
(B) and (d) show a state where the table is arranged at the second position.

FIG. 7 is a plan view showing a specific configuration of the test robot.

FIG. 8C shows a specific configuration of the test robot in FIG.
It is -C sectional drawing.

9 shows a specific configuration of the test robot in FIG.
It is -D sectional drawing.

FIG. 10 is a schematic diagram showing a configuration of a test area.

FIG. 11 is a block diagram illustrating a control system of the component test apparatus.

FIG. 12 is a block diagram illustrating a functional configuration of a control unit.

13 is a timing chart showing the operation of the component test apparatus based on the control of the control system shown in FIG.

FIG. 14 is a schematic view (plan view) showing a modification of the basic configuration of the component test apparatus.

FIG. 15 is a schematic view (plan view) showing a modification of the basic configuration of the component test apparatus.

[Description of Signs] 1 Component test apparatus 2 Handler 3 Test apparatus main body 4 Test head 11-15 Tray storage unit 30A First shuttle robot 30B Second shuttle robot 40 Test robot 42A First transfer head 42B Second transfer head 43a , 43b Head body 60a, 60b Nozzle member (holding means) 64A, 64B Component recognition camera (imaging means) 70 Control unit 74 Main control means 75 Head position error calculating means 76 Suction error calculating means (before test) 77 Suction error calculating means (After test) 78 Image processing means Sa Tray storage area Ta Test area P1, P2 Parts transfer position Tr Tray

Claims (6)

[Claims] 1. A plurality of parts supplied at a predetermined supply unit are held by a movable transfer head provided with a plurality of holding means for holding the parts and transferred to a test head, and each part is tested. In a component testing apparatus for simultaneously positioning and testing a head, a holding means is provided so as to be relatively movable in the transport head, and further, an image of a component held by each holding means of the transport head is taken. Imaging means, and recognition means for image-recognizing the holding state of the component based on the imaging result of the imaging means,
After holding the component in the supply unit, the transport head is moved to the test head after passing the imaging position of the imaging unit to image the component held by each holding unit, and the test head is A component testing apparatus, comprising: control means for controlling the operation of a transport head or each holding means based on a recognition result by the recognition means so as to position each component at a predetermined position. 2. The component test apparatus according to claim 1, wherein a pair of said supply units are provided, and a pair of said transport heads respectively movable between each supply unit and a test head are provided. The control means is configured to control the operation of each transport head so that the transport operation of each component by each transport head from each supply unit to the test head is performed with the phases shifted from each other. Parts testing equipment. 3. The component testing apparatus according to claim 1, wherein the imaging unit is disposed between a test head and a supply unit, and the test head, the imaging unit, and the supply unit are arranged in a line in one axial direction. A parts testing apparatus characterized by being performed. 4. The component testing apparatus according to claim 3, wherein the test head, the imaging unit, and the supply unit are uniaxial.
It is arranged in a line in the axial direction, the transport head is movable in the X-axis direction, and has a plurality of unit frames arranged in a line in the direction, these unit frames are mutually The unit frame is connected to the unit frame so as to be relatively movable in the X-axis direction, and the holding unit is mounted on each unit frame, and each holding unit is in a direction orthogonal to the X-axis direction and the horizontal plane with respect to the unit frame. A component testing apparatus characterized by being supported movably in the Y-axis direction. 5. The component test apparatus according to claim 4, wherein a supply unit and an imaging unit are arranged on both sides of the test head, and the transport head moves between each supply unit and the test head. A component testing apparatus, wherein the unit frame of each transport head is configured to be movable in the X-axis direction by being supported by a common rail member. 6. The component test apparatus according to claim 1, wherein the holding unit is configured to hold the component in a sucked state.