JP2002299819A - Method of manufacturing multilayer printed wiring board - Google Patents

Method of manufacturing multilayer printed wiring board

Info

Publication number
JP2002299819A
JP2002299819A JP2001104925A JP2001104925A JP2002299819A JP 2002299819 A JP2002299819 A JP 2002299819A JP 2001104925 A JP2001104925 A JP 2001104925A JP 2001104925 A JP2001104925 A JP 2001104925A JP 2002299819 A JP2002299819 A JP 2002299819A
Authority
JP
Japan
Prior art keywords
resin
substrate
wiring board
printed wiring
multilayer printed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001104925A
Other languages
Japanese (ja)
Inventor
Toshiyuki Kaneko
俊之 金子
Hideo Kikuchi
秀雄 菊地
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP2001104925A priority Critical patent/JP2002299819A/en
Publication of JP2002299819A publication Critical patent/JP2002299819A/en
Pending legal-status Critical Current

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  • Production Of Multi-Layered Print Wiring Board (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing a multilayer printed wiring board, restraining prepreg molten resin from flowing out from the periphery of the board in a lamination process, and making the board uniform in thickness. SOLUTION: Latticed or island-shaped resin patterns 4a and 4b of thermosetting resin or ultraviolet-curing resin are previously printed on the surfaces of inner circuits 2a and 2b of wiring boards 10 and 20 arranged on both the sides of a prepreg 5, getting gradually higher in pattern density from the centers to peripheries of the boards and then cured for the formation of a multilayer printed wiring board. The re-melted resin of the prepreg 5 is more restrained from flowing around the center than around the periphery of the board by the resin patterns 4a and 4b, so that an insulating layer 6 gets uniform in thickness from the center to periphery of the board, and the multilayer printed wiring board is improved in thickness uniformity.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は多層プリント配線板
の製造方法に関し、特に特性インピーダンスの精度を向
上するために内層の絶縁層の層間厚さの均一性を向上で
きる多層プリント配線板の製造方法に関する。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer printed wiring board, and more particularly to a method for manufacturing a multilayer printed wiring board capable of improving the uniformity of the interlayer thickness of an inner insulating layer in order to improve the accuracy of characteristic impedance. About.

【0002】[0002]

【従来の技術】一般に、多層プリント配線板は高速信号
処理が必要とされるコンピュータ等の電子装置に使用さ
れる。このような電子装置に使用される多層プリント配
線板に対しては、回路の信頼性およびその寸法精度が特
に厳しく要求され、このため、特性インピーダンス、す
なわち、絶縁層板厚を均一に調整する必要がある。
2. Description of the Related Art Generally, multilayer printed wiring boards are used in electronic devices such as computers that require high-speed signal processing. For a multilayer printed wiring board used in such an electronic device, the reliability of the circuit and its dimensional accuracy are particularly strictly required. Therefore, it is necessary to uniformly adjust the characteristic impedance, that is, the thickness of the insulating layer. There is.

【0003】多層プリント配線板は、一般的に回路が形
成された内層基板にプリプレグ(接着剤シート)を介し
て外層基板を加熱・加圧プレスで積層して製造される
が、板厚がばらつくことが知られていた。その第1の理
由は、プレスで加熱時に基板間のプリプレグが含有する
樹脂が、プレスの加圧力(数十kg/cm2)により流
出し、基板の周辺部で基板間の樹脂が少なくなるためで
ある。その第2の理由は、内層の基板の回路密度によっ
てプレス圧力が場所によって影響を受け、基板間の樹脂
量にバラツキが生ずるためである。
[0003] A multilayer printed wiring board is generally manufactured by laminating an outer layer substrate by a heat and pressure press via a prepreg (adhesive sheet) on an inner layer substrate on which a circuit is formed, but the thickness varies. It was known. The first reason is that the resin contained in the prepreg between the substrates when heated by the press flows out due to the pressing force of the press (several tens of kg / cm 2 ), and the resin between the substrates at the peripheral portion of the substrate decreases. It is. The second reason is that the pressing pressure is affected by the location depending on the circuit density of the substrate in the inner layer, and the amount of resin between the substrates varies.

【0004】[0004]

【発明が解決しようとする課題】基板周辺の樹脂量の減
少を抑制し、板厚の均一化させる技術として、特開平9
―148737号公報等には、基板の製造エリア外の周
辺部に、樹脂パターンを印刷し、あるいは、金属パター
ンを形成して基板外への樹脂の流れを抑止させることに
より基板の板厚を均一化する方法が開示されている。ま
た、特開平5―121876号公報等には、プレスで加
熱・加圧処理を行う際に温度勾配を持たせ、基板の中心
部分の樹脂フロー量が最も多く、周辺部分にいくにした
がって漸次樹脂フローの量を少なくする技術が開示され
ている。
As a technique for suppressing a decrease in the amount of resin around a substrate and making the thickness uniform, Japanese Patent Application Laid-Open No.
No. 148737 discloses that a resin pattern is printed on a peripheral portion of a substrate outside a manufacturing area, or a metal pattern is formed to suppress the flow of resin to the outside of the substrate to make the thickness of the substrate uniform. There is disclosed a method for converting the data. Japanese Patent Application Laid-Open No. 5-121876 discloses that a temperature gradient is provided when heating and pressurizing treatment is performed by a press so that the amount of resin flow in the central portion of the substrate is the largest, and the resin gradually flows toward the peripheral portion. Techniques for reducing the amount of flow have been disclosed.

【0005】上記の内層基板に存在する回路パターンの
影響による板厚のバラツキを改善する技術としては、特
公平3―65910号公報等には、内層回路板表面の回
路と基板面の段差間に樹脂を埋め込み表面平滑処理を施
した後、内層基板にプリプレグを介して外層基板を積層
する技術が開示されている。また、特開平11―233
938号公報には、樹脂を内層基板の導体回路間に印刷
するとともに、導体回路上にも樹脂をドット状に印刷
し、未硬化状態で、その上にフィルム状半硬化樹脂を接
着し、内層基板の回路密度による板厚のバラツキを低減
する技術が開示されている。
[0005] As a technique for improving the thickness variation due to the influence of the circuit pattern existing on the inner layer board, Japanese Patent Publication No. 3-65910 and the like disclose a technique between a circuit on the inner layer board surface and a step between the board surface. A technique of embedding a resin, performing a surface smoothing process, and laminating an outer layer substrate on the inner layer substrate via a prepreg is disclosed. Also, JP-A-11-233
No. 938 discloses that a resin is printed between conductive circuits on an inner layer substrate, a resin is also printed on the conductive circuits in a dot shape, and a film-like semi-cured resin is adhered thereon in an uncured state. A technique for reducing variations in plate thickness due to circuit density of a substrate has been disclosed.

【0006】これらの技術は、多層プリント配線板の絶
縁層板厚を均一化にそれなりの効果を得ているが、特別
な処理条件制御が必要であり、工程が複雑になり、製造
コスト増加の原因となっていた。
Although these techniques have achieved a certain effect in making the thickness of the insulating layer of the multilayer printed wiring board uniform, special processing condition control is required, the process becomes complicated, and the manufacturing cost increases. Was causing it.

【0007】従って、本発明は、上記の従来技術の課題
を解決し、多層プリント配線板の絶縁層板厚の制御が容
易な製造方法を提供することを目的とする。
Accordingly, it is an object of the present invention to solve the above-mentioned problems of the prior art and to provide a manufacturing method in which the thickness of an insulating layer of a multilayer printed wiring board can be easily controlled.

【0008】[0008]

【課題を解決するための手段】本発明の多層プリント配
線板の製造方法は、配線基板の上にプリプレグと導体層
基板を重ねて加熱加圧して多層配線板を製造する工程を
備え、前記プリプレグの両側の少なくとも一方の基板表
面には前記加熱加圧する前に予め格子状または島状の樹
脂パターンを該基板の中心部から周辺に行くほどパター
ン密度が大きくなるように印刷され、該樹脂パターンが
硬化されることを特徴とする。
A method of manufacturing a multilayer printed wiring board according to the present invention comprises a step of manufacturing a multilayer wiring board by superposing a prepreg and a conductor layer substrate on a wiring board and heating and pressing the prepreg. Before heating and pressurizing on at least one substrate surface on both sides of the substrate, a lattice-shaped or island-shaped resin pattern is printed in advance so that the pattern density increases from the center to the periphery of the substrate, and the resin pattern is formed. It is characterized by being cured.

【0009】前記格子状に形成された前記樹脂パターン
によって区画された前記基板表面領域は、前記樹脂パタ
ーンに設けられた開口により連結される。この開口の前
記樹脂パターンの長さ方向の幅は前記基板中心部から周
辺に行くほど小さく形成し、前記加熱加圧時に前記プリ
プレグの再溶融樹脂の流動が基板周辺に行くほど小さく
なるように制御される。
The substrate surface areas defined by the resin pattern formed in the lattice pattern are connected by openings provided in the resin pattern. The width of the resin pattern in the length direction of the opening is formed so as to decrease from the center of the substrate to the periphery, and the flow of the re-melted resin of the prepreg during the heating and pressing is controlled to decrease toward the periphery of the substrate. Is done.

【0010】前記樹脂パターンを形成する樹脂として熱
硬化性樹脂または紫外線硬化性樹脂が使用され、好まし
くは前記樹脂パターンを前記基板の中心部から周辺に行
くほど厚く形成される。
A thermosetting resin or an ultraviolet curable resin is used as the resin for forming the resin pattern. Preferably, the resin pattern is formed to be thicker from the center to the periphery of the substrate.

【0011】前記プリプレグの接着面に前記プリプレグ
の両側の前記基板が導体回路を有し、該導体回路間が前
記加熱加圧する前に、予め絶縁層を充填し、前記基板表
面を平坦化しておくこともできる。この場合には、薄い
プリプレグが使用できるために多層プリント配線板の板
厚を低減できる。
[0011] The substrate on both sides of the prepreg has a conductive circuit on the bonding surface of the prepreg, and an insulating layer is filled in advance and the surface of the substrate is flattened before the heating and pressing between the conductive circuits. You can also. In this case, since a thin prepreg can be used, the thickness of the multilayer printed wiring board can be reduced.

【0012】[0012]

【発明の実施の形態】次に、本発明の実施の形態につい
て図面を参照して詳細に説明する。
Next, embodiments of the present invention will be described in detail with reference to the drawings.

【0013】図1は、本発明の多層プリント配線板の第
1の実施の形態の製造方法の工程を説明するための基板
要部の断面図であり、図2は図1(d)に続く工程を説
明するための基板要部の断面図である。ここでは、4層
多層プリント配線板を製造する場合について説明する。
FIG. 1 is a sectional view of a main part of a substrate for explaining steps of a method of manufacturing a multilayer printed wiring board according to a first embodiment of the present invention, and FIG. 2 is a continuation of FIG. It is sectional drawing of the principal part of a board | substrate for demonstrating a process. Here, a case in which a four-layer multilayer printed wiring board is manufactured will be described.

【0014】まず、図1(a)のように、両面に銅箔を
貼った絶縁基板1aの片面の銅箔をフォトリソグラフィ
法でパターニングして内層回路2aを形成し、配線基板
10を製造する。エッチングしない銅箔は外層銅箔3a
となる。なお、絶縁基板1aとしては、ガラス繊維で強
化したエポキシ樹脂基板、ポリイミド樹脂基板やエポキ
シ樹脂で変性したポリイミド樹脂等の基板が使用できる
が、これらに限定されない。
First, as shown in FIG. 1A, an inner layer circuit 2a is formed by patterning a copper foil on one side of an insulating substrate 1a having copper foils on both sides by photolithography, thereby manufacturing a wiring board 10. . Copper foil not etched is outer layer copper foil 3a
Becomes In addition, as the insulating substrate 1a, an epoxy resin substrate reinforced with glass fiber, a polyimide resin substrate, or a substrate of a polyimide resin modified with an epoxy resin can be used, but is not limited thereto.

【0015】次いで、図1(b)のように、スクリーン
印刷法によって内層回路2a上に樹脂パターン4aを印
刷して硬化させる。樹脂パターン4aの材料にはエポキ
シ樹脂系の熱硬化性または紫外線硬化性の樹脂インクを
使用することができる。樹脂パターン4aの厚さと面積
はプリプレグ(絶縁基板を積層する場合の接着剤シート
で積層後の層間絶縁層の厚さを決定する)中の樹脂量と
多層プリント配線板の層間絶縁層の厚さ設計値により決
定される。樹脂パターン4aの厚さはインクの粘度、樹
脂量、印刷圧力等を制御することによりコントロールさ
れる。
Next, as shown in FIG. 1B, a resin pattern 4a is printed on the inner layer circuit 2a by a screen printing method and cured. As a material of the resin pattern 4a, a thermosetting or ultraviolet curable resin ink based on an epoxy resin can be used. The thickness and area of the resin pattern 4a are determined by the amount of resin in the prepreg (determining the thickness of the interlayer insulating layer after lamination with an adhesive sheet when the insulating substrate is laminated) and the thickness of the interlayer insulating layer of the multilayer printed wiring board. Determined by design values. The thickness of the resin pattern 4a is controlled by controlling the viscosity of the ink, the amount of the resin, the printing pressure, and the like.

【0016】ここで、重要なことは、積層時の基板の周
辺と中心での板厚が補正されるように、樹脂パターン4
aの密度が周辺に行くほど大きくなるように樹脂パター
ン4aを印刷形成することである。樹脂パターン4aで
区画された領域は連結し、積層時のプリプレグの流動が
適切に制御できるようにする。
It is important that the resin pattern 4 is adjusted so that the thickness at the periphery and the center of the substrate at the time of lamination is corrected.
That is, the resin pattern 4a is formed by printing such that the density of “a” becomes larger toward the periphery. The regions partitioned by the resin pattern 4a are connected so that the flow of the prepreg during lamination can be appropriately controlled.

【0017】図3は、この樹脂パターン4aの例を示す
平面図である。図3では樹脂パターン4aは、格子状パ
ターンに開口を設けて格子状パターンによって区画化さ
れた領域を連結したパターン形状であり、そのパターン
の密度は周辺に行くほど大きく、またその開口の広さは
周辺に行くほど狭くしたことを特徴としている。その他
樹脂パターン4aは島状に形成し、その密度を周辺に行
くほど大きくしてもよい。樹脂パターン4aをこのよう
な形状に形成することにより、積層時にプリプレグの流
動を周辺にいくほど小さく制御することができる。
FIG. 3 is a plan view showing an example of the resin pattern 4a. In FIG. 3, the resin pattern 4a has a pattern shape in which openings are formed in a lattice pattern and regions partitioned by the lattice pattern are connected, and the density of the pattern increases toward the periphery, and the width of the opening increases. Is characterized in that it becomes narrower toward the periphery. In addition, the resin pattern 4a may be formed in an island shape, and the density thereof may be increased toward the periphery. By forming the resin pattern 4a in such a shape, the flow of the prepreg during lamination can be controlled to be smaller toward the periphery.

【0018】また、樹脂パターン4aの厚さは周辺に行
くほど大きくすることが望ましい。周辺に行くほど樹脂
パターン4aの厚さを厚くすることにより、積層後の中
心部と周辺部の板厚の差をより小さくできる。
It is desirable that the thickness of the resin pattern 4a be increased toward the periphery. By increasing the thickness of the resin pattern 4a toward the periphery, the difference in plate thickness between the central portion and the peripheral portion after lamination can be further reduced.

【0019】樹脂パターン4aを周辺に行くほど厚くす
る形成する方法としては、次のような方法が使用でき
る。 (1)紫外線硬化性樹脂を内層回路層全面に塗布し、そ
の紫外線硬化樹脂を板端に行くほど紫外線の透過率が大
きいマスクを使用して紫外線露光し、現像する。基板端
ほど樹脂の硬化度が高くなり、基板端ほど樹脂の厚さを
厚くすることができる。 (2)図6に示すように、熱硬化性樹脂を内層回路2c
全面に島状か格子状に印刷し、半硬化させる。次に、そ
の基板の樹脂上に、凸球面状の面を有する鏡板70を押
し当て加圧する事で樹脂上面の高さを凹面上に形成す
る。次いで、樹脂を本硬化させ板端ほど厚さの厚い樹脂
パターン4eを形成する。なお、図6中、符号1cは絶
縁基板、3cは外層銅箔を示す。
As a method of forming the resin pattern 4a to be thicker toward the periphery, the following method can be used. (1) A UV-curable resin is applied to the entire inner circuit layer, and the UV-curable resin is exposed to ultraviolet rays using a mask having a higher transmittance of ultraviolet rays toward the edge of the board, and is developed. The degree of curing of the resin is higher at the end of the substrate, and the thickness of the resin can be increased at the end of the substrate. (2) As shown in FIG. 6, a thermosetting resin is applied to the inner layer circuit 2c.
Print the entire surface in an island or grid pattern and semi-cur. Next, the height of the resin upper surface is formed on the concave surface by pressing and pressing the end plate 70 having a convex spherical surface on the resin of the substrate. Next, the resin is fully cured to form a resin pattern 4e that is thicker toward the plate edge. In FIG. 6, reference numeral 1c denotes an insulating substrate, and 3c denotes an outer copper foil.

【0020】次に、配線基板10の製造と同様な工程に
よって絶縁基板1b上に内層回路2bを有する配線基板
20を準備し、図1(c)のように、プリプレグ5の両
側に両基板を配置した後、図1(d)のように、積層プ
レスで加熱加圧してプリプレグ5を溶融させて両基板を
プリプレグ5で接着させ、シールド板30を製造する。
図中、符号6はプリプレグ5中の半硬化状態の樹脂が再
溶融して硬化した絶縁層を示し、符号3bは外層銅箔を
示す。
Next, a wiring board 20 having an inner layer circuit 2b on an insulating substrate 1b is prepared by the same process as that for manufacturing the wiring board 10, and both boards are placed on both sides of the prepreg 5 as shown in FIG. After the disposition, as shown in FIG. 1D, the prepreg 5 is melted by heating and pressing with a lamination press, and the two substrates are adhered to each other with the prepreg 5, thereby manufacturing the shield plate 30.
In the drawing, reference numeral 6 denotes an insulating layer in which the resin in a semi-cured state in the prepreg 5 is re-melted and cured, and reference numeral 3b denotes an outer copper foil.

【0021】次に、図2(a)のように、シールド板3
0にドリリングして貫通孔11を形成した後、図2
(b)のように、無電解銅めっきと電気銅めっきによっ
て貫通孔を含むシールド板の全面に銅めっき膜12を形
成する。
Next, as shown in FIG.
After forming the through hole 11 by drilling to 0, FIG.
As shown in (b), a copper plating film 12 is formed on the entire surface of the shield plate including the through holes by electroless copper plating and electrolytic copper plating.

【0022】次いで、フォトリソグラフィ法によって銅
めっき膜12をパターニングし、図2(c)のように、
スルーホール13と外層回路14を形成し、層間厚が均
一に維持された多層プリント配線板40が製造される。
Next, the copper plating film 12 is patterned by a photolithography method, as shown in FIG.
The multilayer printed wiring board 40 in which the through holes 13 and the outer layer circuits 14 are formed and the interlayer thickness is maintained uniform is manufactured.

【0023】本実施の形態の多層プリント配線板の製造
方法では、樹脂パターン4a,4bにより、積層時に基
板周辺に行くほどプリプレグの溶融樹脂の流動が抑制さ
れるために、多層プリント配線板の周辺部と中心部の層
間の厚さの差を低減できる効果がある。
In the method for manufacturing a multilayer printed wiring board according to the present embodiment, the resin patterns 4a and 4b suppress the flow of the molten resin of the prepreg toward the periphery of the substrate during lamination. This has the effect of reducing the difference in thickness between layers between the central part and the central part.

【0024】なお、上記の本発明の第1の実施の形態で
は、樹脂パターンは積層する基板の内層回路の両方に形
成したが、片方の基板の内層回路面だけに形成してもよ
い。
In the first embodiment of the present invention, the resin pattern is formed on both the inner layer circuits of the substrates to be laminated. However, the resin pattern may be formed only on the inner layer circuit surface of one of the substrates.

【0025】次に、本発明の多層プリント配線板の製造
方法の第2の実施の形態について図面を参照して説明す
る。
Next, a second embodiment of the method for manufacturing a multilayer printed wiring board according to the present invention will be described with reference to the drawings.

【0026】図4は、本発明の多層プリント配線板の第
2の実施の形態の製造方法の工程を説明するための基板
要部の断面図であり、図5は図4(e)に続く工程を説
明するための基板要部の断面図である。ここでは、4層
多層プリント配線板を製造する場合について説明する。
なお、図中、符号が図1および図2に同じものは同じも
のを示す。本実施の形態は、内層回路間を予め絶縁層で
埋め、基板表面を平坦化しておく場合である。薄いプリ
プレグを使用して、板厚の均一な多層プリント配線板を
得ることができるために、本実施の形態は、薄板多層プ
リント配線板を製造する場合に有効である。
FIG. 4 is a sectional view of a main part of a substrate for explaining steps of a method of manufacturing a multilayer printed wiring board according to a second embodiment of the present invention, and FIG. 5 is continued from FIG. It is sectional drawing of the principal part of a board | substrate for demonstrating a process. Here, a case in which a four-layer multilayer printed wiring board is manufactured will be described.
In the drawings, the same reference numerals in FIGS. 1 and 2 denote the same components. In the present embodiment, the space between the inner layer circuits is filled with an insulating layer in advance, and the substrate surface is flattened. The present embodiment is effective when a thin multilayer printed wiring board is manufactured because a multilayer printed wiring board having a uniform thickness can be obtained using a thin prepreg.

【0027】まず、上記の第1の実施の形態と同様に、
両面に銅箔を貼った絶縁基板1aの片面の銅箔をフォト
リソグラフィ法でパターニングして内層回路2aを形成
し、配線基板10を製造する(図4(a))。エッチン
グしない銅箔は外層銅箔3aとなる。次いで、内層回路
2a間に絶縁層15をスクリーン印刷して基板表面を平
坦化する(図4(b))。
First, as in the first embodiment,
An inner layer circuit 2a is formed by patterning the copper foil on one side of the insulating substrate 1a having copper foils on both sides by photolithography, and the wiring board 10 is manufactured (FIG. 4A). The copper foil that is not etched becomes the outer layer copper foil 3a. Next, the insulating layer 15 is screen-printed between the inner layer circuits 2a to flatten the substrate surface (FIG. 4B).

【0028】絶縁層15の材料としてはエポキシ樹脂や
ポリイミド樹脂系の紫外線硬化性樹脂や熱硬化性樹脂が
通常使用されるが、熱可塑性樹脂も使用することができ
る。この熱可塑性樹脂としては、ポリカボーネート,ポ
リアリレート,ポリアミド,ポリアミドイミド,ポリエ
ステルイミド,ポリフェニレンエーテルやポリテトラフ
ルオロエチレン等の樹脂を使用できる。これらの樹脂を
溶解させる溶剤は適宜選択できる。通常、絶縁層15の
材料としては、絶縁基板1a,1bの材料の種類と同系
の材料が選択されて使用されるが、絶縁層15の材料の
種類は、絶縁基板1a,1bの材料の種類と異なっても
よい。例えば、絶縁基板1a,1bとしてエポキシ樹脂
基板を使用した場合、絶縁層15の材料として通常エポ
キシ樹脂が使用さるが、エポキシ樹脂の代わりにエポキ
シ樹脂よりも誘電率および/または誘電正接の小さな樹
脂を使用することができる。この例としては、上記のポ
リイミド、ビスマレイミドトリアジン脂、ポリフェニレ
ンエーテルやポリテトラフルオロエチレン等の樹脂があ
り、これらの樹脂はエポキシ樹脂よりも誘電率および誘
電正接が小さく、内層回路2a,2bの伝送特性と高周
波特性を改善できる効果がある。
As the material of the insulating layer 15, an epoxy resin or a polyimide resin based ultraviolet curable resin or a thermosetting resin is usually used, but a thermoplastic resin can also be used. As the thermoplastic resin, resins such as polycarbonate, polyarylate, polyamide, polyamideimide, polyesterimide, polyphenylene ether, and polytetrafluoroethylene can be used. Solvents for dissolving these resins can be appropriately selected. Usually, as the material of the insulating layer 15, a material similar to the material type of the insulating substrates 1a and 1b is selected and used, but the material type of the insulating layer 15 is the material type of the insulating substrates 1a and 1b. And may be different. For example, when epoxy resin substrates are used as the insulating substrates 1a and 1b, an epoxy resin is usually used as a material of the insulating layer 15, but a resin having a smaller dielectric constant and / or a lower dielectric tangent than the epoxy resin is used instead of the epoxy resin. Can be used. Examples of this include resins such as the above-mentioned polyimide, bismaleimide triazine resin, polyphenylene ether, and polytetrafluoroethylene. These resins have a smaller dielectric constant and a lower dielectric loss tangent than epoxy resins, and the transmission of the inner layer circuits 2a and 2b. This has the effect of improving the characteristics and high frequency characteristics.

【0029】次いで、図4(c)のように、スクリーン
印刷法によって内層回路2a上に樹脂パターン4cを印
刷して硬化させる。樹脂パターン4cの材料には上記の
第一1の実施の形態と同様にエポキシ樹脂系の熱硬化性
または紫外線硬化性の樹脂インクを使用することができ
る。樹脂パターン4cの厚さと面積は上記の第1の実施
の形態と同様にプリプレグ中の樹脂量と多層プリント配
線板の層間絶縁層の厚さ設計値により決定される。樹脂
パターン4cの厚さはインクの粘度、樹脂量、印刷圧力
等を制御することによりコントロールされる。
Next, as shown in FIG. 4C, a resin pattern 4c is printed on the inner circuit 2a by a screen printing method and cured. As the material of the resin pattern 4c, an epoxy resin-based thermosetting or ultraviolet curable resin ink can be used as in the first embodiment. The thickness and area of the resin pattern 4c are determined by the amount of resin in the prepreg and the design value of the thickness of the interlayer insulating layer of the multilayer printed wiring board as in the first embodiment. The thickness of the resin pattern 4c is controlled by controlling the viscosity of the ink, the amount of the resin, the printing pressure, and the like.

【0030】積層時の基板の周辺と中心での板厚が補正
されるように、樹脂パターン4cの密度が周辺に行くほ
ど大きくなるように樹脂パターン4cを印刷形成する。
The resin pattern 4c is formed by printing so that the density of the resin pattern 4c increases toward the periphery so as to correct the thickness at the periphery and the center of the substrate at the time of lamination.

【0031】樹脂パターン4cは上記の第1の実施の形
態と同様に格子状またはドット状に形成される。格子状
に樹脂パターン4cを形成する場合には、図3と同様に
樹脂パターン4cに開口を設け樹脂パターン4cで区画
された領域を連結し、積層時のプリプレグの流動が適切
に制御できるようにする。
The resin pattern 4c is formed in the form of a lattice or dots, as in the first embodiment. When the resin pattern 4c is formed in a lattice shape, openings are provided in the resin pattern 4c as in FIG. 3 to connect the regions partitioned by the resin pattern 4c so that the flow of the prepreg during lamination can be appropriately controlled. I do.

【0032】また、樹脂パターン4cの厚さは周辺に行
くほど大きくすることが望ましく、上記の第1の実施の
形態と同様な方法が使用できる。
It is desirable that the thickness of the resin pattern 4c be increased toward the periphery, and the same method as in the first embodiment can be used.

【0033】次に、上記の配線基板10製造工程と同様
な工程によって絶縁基板1b上に内層回路2bを有する
配線基板20を準備し、図4(d)のように、プリプレ
グ5の両側に両基板を配置した後、図4(e)のよう
に、積層プレスで加熱加圧してプリプレグ5を溶融させ
て両基板をプリプレグ5で接着させ、シールド板50を
製造する。図中、符号6aはプリプレグ5中の半硬化状
態の樹脂が再溶融して硬化した絶縁層を示し、符号4d
は樹脂パターンを示す。
Next, a wiring board 20 having an inner layer circuit 2b on an insulating substrate 1b is prepared by a process similar to the above-described manufacturing process of the wiring board 10, and both sides of the prepreg 5 are provided as shown in FIG. After arranging the substrates, as shown in FIG. 4E, the prepreg 5 is melted by heating and pressing with a laminating press, and the two substrates are adhered to each other with the prepreg 5, and the shield plate 50 is manufactured. In the drawing, reference numeral 6a denotes an insulating layer in which the semi-cured resin in the prepreg 5 is re-melted and cured, and reference numeral 4d
Indicates a resin pattern.

【0034】次に、図5(a)のように、シールド板5
0にドリリングして貫通孔11aを形成した後、図5
(b)のように、無電解銅めっきと電気銅めっきによっ
て貫通孔を含むシールド板の全面に銅めっき膜12aを
形成する。
Next, as shown in FIG.
After forming the through hole 11a by drilling to 0, FIG.
As shown in (b), a copper plating film 12a is formed on the entire surface of the shield plate including the through holes by electroless copper plating and electrolytic copper plating.

【0035】次いで、フォトリソグラフィ法によって銅
めっき膜12aをパターニングし、図5(c)のよう
に、スルーホール13aと外層回路14aを形成し、層
間厚が均一に維持された多層プリント配線板60が製造
される。
Next, the copper plating film 12a is patterned by photolithography to form a through hole 13a and an outer layer circuit 14a as shown in FIG. Is manufactured.

【0036】本実施の形態の多層プリント配線板の製造
方法では、予め内層回路間を絶縁層15で埋めて基板の
表面を平坦化するために薄いプリプレグを使って多層プ
リント配線板の層間絶縁層の厚さのバラツキを低減でき
る効果がある。なお、上記の本発明の第2の実施の形態
では、樹脂パターンは積層する基板の内層回路の両方に
形成したが、片方の基板の内層回路面だけに形成しても
よい。
In the method of manufacturing a multilayer printed wiring board according to the present embodiment, the interlayer insulating layer of the multilayer printed wiring board is formed using a thin prepreg in order to fill the inner layer circuits in advance with the insulating layer 15 and flatten the surface of the substrate. Has the effect of reducing variations in thickness. In the above-described second embodiment of the present invention, the resin pattern is formed on both the inner layer circuits of the substrates to be laminated, but may be formed only on the inner layer circuit surface of one of the substrates.

【0037】また、上記の本発明の実施の形態では、4
層板について説明したが、4層を越える多層板の製造方
法に本発明が適用できることはいうまでもない。また、
両面に回路が形成された配線基板の両側にプリプレグを
介して片面あるいは両面配線板を積層する多層プリント
配線板の製造方法にも本発明が適用できることはいうま
でもない。
In the above-described embodiment of the present invention, 4
Although the laminated plate has been described, it goes without saying that the present invention can be applied to a method for producing a multilayered plate having more than four layers. Also,
It goes without saying that the present invention is also applicable to a method for manufacturing a multilayer printed wiring board in which a single-sided or double-sided wiring board is laminated via prepregs on both sides of a wiring board having circuits formed on both sides.

【0038】[0038]

【発明の効果】以上説明したように、本発明の多層プリ
ント配線板の製造方法では、プリプレグの接着面の内層
回路面に予めドット状または開口を有する格子状の樹脂
パターンを基板の周辺に行くほど該パターン密度を高く
形成しておくことによって次の効果が得られる。 (1)積層時の再溶融したプリプレグの流動を基板周辺
に行くほど小さくできるために基板周辺部と基板中心部
の絶縁層の厚みの差を低減でき、多層プリント配線板の
板厚の均一性が向上する。その結果、多層プリント配線
板の特性インピーダンスの精度が向上する。 (2)特に、基板周辺に行くほど樹脂パターンの厚さを
厚く形成することによって、さらに多層プリント配線板
の板厚の均一性を向上させることができる。 (3)内層回路間(ギャップ)に樹脂を予め塗布して平
坦化する方法との併用によって薄いプリプレグ材を使用
して板厚の均一性が向上するために、板厚のバラツキの
小さな薄板多層プリント配線板の製造ができる。
As described above, in the method of manufacturing a multilayer printed wiring board according to the present invention, a grid-like resin pattern having dots or openings in advance on the inner circuit surface of the adhesive surface of the prepreg is provided around the substrate. The following effect can be obtained by forming the pattern density as high as possible. (1) Since the flow of the remelted prepreg during lamination can be reduced toward the periphery of the substrate, the difference in the thickness of the insulating layer between the periphery of the substrate and the center of the substrate can be reduced, and the uniformity of the thickness of the multilayer printed wiring board can be reduced. Is improved. As a result, the accuracy of the characteristic impedance of the multilayer printed wiring board is improved. (2) In particular, by forming the resin pattern thicker toward the periphery of the substrate, the thickness uniformity of the multilayer printed wiring board can be further improved. (3) In order to improve the uniformity of the thickness by using a thin prepreg material in combination with the method of pre-coating and flattening the resin between the inner layer circuits (gap), a thin multi-layer with a small thickness variation is used. Manufacture of printed wiring boards.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明の多層プリント配線板の第1の実施の形
態の製造方法の工程を説明するための基板要部の断面図
である。
FIG. 1 is a sectional view of a main part of a substrate for describing steps of a method for manufacturing a multilayer printed wiring board according to a first embodiment of the present invention.

【図2】本発明の多層プリント配線板の第1の実施の形
態の製造方法の図1(d)に続く工程を説明するための
基板要部の断面図である。
FIG. 2 is a cross-sectional view of a substantial part of the substrate for explaining a step following the step shown in FIG. 1D of the method for manufacturing the multilayer printed wiring board according to the first embodiment of the present invention;

【図3】本発明の多層プリント配線板の第1の実施の形
態の製造方法における樹脂パターンの例を示す平面図で
ある。
FIG. 3 is a plan view illustrating an example of a resin pattern in the method for manufacturing the multilayer printed wiring board according to the first embodiment of the present invention.

【図4】本発明の多層プリント配線板の第2の実施の形
態の製造方法の工程を説明するための基板要部の断面図
である。
FIG. 4 is a cross-sectional view of a main part of a substrate for describing steps of a method for manufacturing a multilayer printed wiring board according to a second embodiment of the present invention.

【図5】本発明の多層プリント配線板の第2の実施の形
態の製造方法の図4(e)に続く工程を説明するための
基板要部の断面図である。
FIG. 5 is a cross-sectional view of a substantial part of the substrate for explaining a step following the step shown in FIG. 4E of the method for manufacturing the multilayer printed wiring board according to the second embodiment of the present invention;

【図6】本発明の多層プリント配線板の製造方法におけ
る樹脂パターンの形成方法をセ説明するための基板要部
の断面図である。
FIG. 6 is a cross-sectional view of a main part of the substrate for describing a method of forming a resin pattern in the method of manufacturing a multilayer printed wiring board according to the present invention.

【符号の説明】[Explanation of symbols]

1a,1b,1c 絶縁基板 2a,2b,2c 内層回路 3a,3b,3c 外層銅箔 4a,4b,4c,4d,4e 樹脂パターン 5 プリプレグ 6,6a,15 絶縁層 30,50 シールド板 10,20 配線基板 11,11a 貫通孔 12,12a 銅めっき膜 13,13a スルーホール 14,14a 外層回路 40,60 多層プリント配線板 70 鏡板 1a, 1b, 1c Insulating substrate 2a, 2b, 2c Inner layer circuit 3a, 3b, 3c Outer layer copper foil 4a, 4b, 4c, 4d, 4e Resin pattern 5 Prepreg 6, 6a, 15 Insulating layer 30, 50 Shield plate 10, 20 Wiring board 11, 11a Through hole 12, 12a Copper plating film 13, 13a Through hole 14, 14a Outer circuit 40, 60 Multilayer printed wiring board 70 End plate

───────────────────────────────────────────────────── フロントページの続き Fターム(参考) 5E346 AA12 AA38 CC08 CC09 CC10 CC32 DD02 DD03 DD12 EE09 FF15 GG15 HH02 HH24  ──────────────────────────────────────────────────続 き Continued on the front page F term (reference) 5E346 AA12 AA38 CC08 CC09 CC10 CC32 DD02 DD03 DD12 EE09 FF15 GG15 HH02 HH24

Claims (11)

【特許請求の範囲】[Claims] 【請求項1】 配線基板の上にプリプレグと導体層基板
を重ねて加熱加圧して多層配線板を製造する工程を備
え、前記プリプレグの両側の少なくとも一方の基板表面
には前記加熱加圧する前に予め格子状または島状の樹脂
パターンが該基板の中心部から周辺に行くほどパターン
密度が大きくなるように印刷され、該樹脂パターンが硬
化されることを特徴とする多層プリント配線板の製造方
法。
1. A step of manufacturing a multilayer wiring board by superposing a prepreg and a conductor layer substrate on a wiring board and heating and pressurizing the circuit board, wherein at least one substrate surface on both sides of the prepreg is heated and pressurized before the heating and pressurization. A method of manufacturing a multilayer printed wiring board, wherein a lattice-shaped or island-shaped resin pattern is printed in advance so that the pattern density increases from the center of the substrate toward the periphery, and the resin pattern is cured.
【請求項2】 前記格子状に形成された前記樹脂パター
ンによって区画された前記基板表面領域が、前記樹脂パ
ターンに設けられた開口により連結されるように前記樹
脂パターンが形成されることを特徴とする請求項1記載
の多層プリント配線板の製造方法。
2. The resin pattern is formed such that the substrate surface region defined by the resin pattern formed in the lattice shape is connected by an opening provided in the resin pattern. The method for producing a multilayer printed wiring board according to claim 1.
【請求項3】 前記開口の前記樹脂パターンの長さ方向
の幅が前記基板中心部から周辺に行くほど小さく形成さ
れることを特徴とする請求項2記載の多層プリント配線
板の製造方法。
3. The method for manufacturing a multilayer printed wiring board according to claim 2, wherein the width of the opening in the length direction of the resin pattern is reduced from the center of the substrate toward the periphery.
【請求項4】 前記樹脂パターンを形成する樹脂として
熱硬化性樹脂または紫外線硬化性樹脂を使用することを
特徴とする請求項1,2または3記載の多層プリント配
線板の製造方法。
4. The method for producing a multilayer printed wiring board according to claim 1, wherein a thermosetting resin or an ultraviolet curable resin is used as a resin for forming the resin pattern.
【請求項5】 前記樹脂パターンを前記基板の中心部か
ら周辺に行くほど厚く形成することを特徴とする請求項
1〜4のいずれかに記載の多層プリント配線板の製造方
法。
5. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein said resin pattern is formed to be thicker from a central portion to a periphery of said substrate.
【請求項6】 前記樹脂パターンを印刷する工程におい
て、前記樹脂パターンの形状間のピッチが小さくなるよ
うに前記樹脂パターンが印刷され、該樹脂パターンの密
度が前記基板中心部から周辺に行くほど大きくなるよう
に制御されることを特徴とする請求項1記載の多層プリ
ント配線板の製造方法。
6. In the step of printing the resin pattern, the resin pattern is printed such that the pitch between the shapes of the resin pattern is reduced, and the density of the resin pattern increases from the center to the periphery of the substrate. 2. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein the control is performed so as to be as follows.
【請求項7】 熱硬化性樹脂を使用して前記樹脂パター
ンを前記基板上に印刷した後、該熱硬化性樹脂を半硬化
させ、次いで該樹脂上に、凸球面状の面を有する鏡板を
押し当て加圧することにより前記樹脂パターンの厚さを
前記基板の中心部から周辺に行くほど厚く形成すること
を特徴とする請求項5記載の多層プリント配線板の製造
方法。
7. After printing the resin pattern on the substrate using a thermosetting resin, the thermosetting resin is semi-cured, and then a mirror plate having a convex spherical surface is formed on the resin. 6. The method for manufacturing a multilayer printed wiring board according to claim 5, wherein the thickness of the resin pattern is increased from the center to the periphery of the substrate by pressing and pressing.
【請求項8】 紫外線硬化性樹脂を前記基板上に塗布し
た後、該紫外線硬化樹脂を前記基板中心部から周辺に行
くほど紫外線の透過率が大きいマスクを使用して露光し
た後、現像し、前記樹脂パターンを前記基板の中心部か
ら周辺に行くほど厚く形成することを特徴とする請求項
5記載の多層プリント配線板の製造方法。
8. After applying an ultraviolet-curable resin on the substrate, the ultraviolet-curable resin is exposed using a mask having a higher transmittance of ultraviolet rays from the center of the substrate toward the periphery, and then developed. 6. The method for manufacturing a multilayer printed wiring board according to claim 5, wherein the resin pattern is formed to be thicker from the center to the periphery of the substrate.
【請求項9】 前記プリプレグの接着面に前記プリプレ
グの両側の前記基板が導体回路を有し、該導体回路間が
前記加熱加圧する前に、予め絶縁層で充填され、前記基
板表面が平坦化されることを特徴とする請求項1記載の
多層プリント配線板の製造方法。
9. The substrate on both sides of the prepreg has a conductive circuit on an adhesive surface of the prepreg, and the space between the conductive circuits is filled with an insulating layer before the heating and pressurizing, and the surface of the substrate is planarized. 2. The method for manufacturing a multilayer printed wiring board according to claim 1, wherein:
【請求項10】 前記絶縁層が熱硬化性樹脂,紫外線硬
化性樹脂または熱硬化性樹脂で形成されることを特徴と
する請求項9記載の多層プリント配線板の製造方法。
10. The method according to claim 9, wherein the insulating layer is formed of a thermosetting resin, an ultraviolet curable resin, or a thermosetting resin.
【請求項11】 前記絶縁層の誘電率および/または誘
電正接の値が前記基板よりも小さいことを特徴とする請
求項9または10記載の多層プリント配線板の製造方
法。
11. The method according to claim 9, wherein a value of a dielectric constant and / or a dielectric loss tangent of the insulating layer is smaller than that of the substrate.
JP2001104925A 2001-04-03 2001-04-03 Method of manufacturing multilayer printed wiring board Pending JP2002299819A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001104925A JP2002299819A (en) 2001-04-03 2001-04-03 Method of manufacturing multilayer printed wiring board

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100920824B1 (en) 2007-09-14 2009-10-08 삼성전기주식회사 Manufacturing method of printed circuit board and electromagnetic bandgap structure
KR101497446B1 (en) * 2013-12-19 2015-03-03 한국생산기술연구원 Rotation Stackable Prepreg and Prepreg Product Manufacturing Method Using the Same
JP2016004994A (en) * 2014-06-16 2016-01-12 恆勁科技股▲ふん▼有限公司 Package device and method for manufacturing the same
CN114867230A (en) * 2022-05-27 2022-08-05 江西省航宇电子材料有限公司 Method for keeping thickness of stainless steel-based copper-clad plate consistent

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100920824B1 (en) 2007-09-14 2009-10-08 삼성전기주식회사 Manufacturing method of printed circuit board and electromagnetic bandgap structure
KR101497446B1 (en) * 2013-12-19 2015-03-03 한국생산기술연구원 Rotation Stackable Prepreg and Prepreg Product Manufacturing Method Using the Same
JP2016004994A (en) * 2014-06-16 2016-01-12 恆勁科技股▲ふん▼有限公司 Package device and method for manufacturing the same
CN114867230A (en) * 2022-05-27 2022-08-05 江西省航宇电子材料有限公司 Method for keeping thickness of stainless steel-based copper-clad plate consistent

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