JP2002299353A - Copying device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To enhance ease of setup and realize cost reduction by simplifying the structure. SOLUTION: A copying device 19 is composed of a device base plate 10, having a concave semicircular face and a rocker 20 capable of relative rotation to the device base plate 10 and having a convex semicircular face. A coil spring 42 as a means of lightening for making the unbalanced load falling on the work by the rocker 20 light in weight, when the rocker 20 abuts on a work is arranged at the copying device 19.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a copying apparatus.

[0002]

2. Description of the Related Art For example, a copying apparatus is used for a chip mounter for transferring a diced semiconductor chip onto a lead frame of a die bonding apparatus. In this copying apparatus, an oscillator having a convex hemisphere is rotatably supported on an apparatus base having a concave hemisphere. Then, when a work contact surface (copying surface) of the oscillator at the center of curvature of the convex and concave hemispheres is brought into contact with a specific surface of the semiconductor chip as an object, the oscillators are orthogonal to each other on the same plane. It rotates around the X axis and the Y axis. By this rotation, the work contact surface of the oscillator is tilted so as to be parallel to the specific surface of the semiconductor chip. That is, the workpiece contact surface of the oscillator follows the specific surface of the semiconductor chip.

[0003]

However, in the conventional copying apparatus, when the oscillator is tilted in the copying state, an eccentric load due to its own weight acts on the semiconductor chip in the tilting direction. Then, the semiconductor chip may be damaged under the influence. As a method of solving such a problem, it is conceivable to reduce an uneven load applied to the semiconductor chip by using an elastic force of a spring or the like.

[0004] When a spring or the like is used to reduce the unbalanced load, the spring constant is determined by:
This is important when designing a copying apparatus. Specifically, the spring constant is determined according to the unbalanced load. However, as the spring constant is determined, the size of the spring,
That is, the dimensions such as the outer diameter, the wire diameter, and the length of the spring are determined to some extent. However, depending on the place where the spring is assembled, the size of the spring is restricted, which hinders the design. As a result, there arises a problem that the structure of the copying apparatus becomes complicated, resulting in an increase in cost.

The present invention has been made by paying attention to such problems existing in the prior art. The purpose is
It is an object of the present invention to improve the ease of assembly by simplifying the structure and to reduce the cost.

[0006]

According to a first aspect of the present invention, there is provided a first member having a concave hemispherical surface, a first member having a concave hemispherical surface, and being rotatable relative to the first member. The copying apparatus main body is configured from the second member having the convex hemispherical surface, and one of the two members is brought into contact with the specific surface of the object, so that the contact surface is specified by the object. In the copying apparatus configured to follow the surface so as to be parallel to the surface, one of the first and second members that contacts the object rotates around an axis perpendicular to the contact surface. Detent means for restricting movement, and when the one member abuts on the object, a reducing means for reducing an unbalanced load applied to the object by one member,
When the one member is not in contact with the object, origin position return means for returning the one member to the center of the other member is provided, and the reduction means is arranged in the copying apparatus main body. And

According to a second aspect of the present invention, in the copying apparatus according to the first aspect, the mitigating means may be configured such that one of the two members abutting on a specific surface of the object is positioned at the center of the copying apparatus main body. The gist of the present invention is that the elastic body is configured to have a plurality of elastic bodies that provide a force for returning the elastic bodies to each other, and the elastic bodies are arranged to face each other in the horizontal direction.

According to a third aspect of the present invention, in the copying apparatus according to the second aspect, the elastic body is a coil spring, and one end of the coil spring is connected to the first member side and the second member side. The gist is that it is fixed to one of them.

The "action" of the present invention will be described below. According to the first aspect of the present invention, the first member and the second member
When one of the members is brought into contact with the specific surface of the object, one of the members rotates according to the inclination of the specific surface. Thereby, the contact surface of one member and the specific surface of the object are parallel to each other. At this time, rotation of one member around an axis perpendicular to the contact surface is restricted by the rotation preventing means. Therefore, high-accuracy copying can be performed. In addition, as one member rotates, an unbalanced load due to its own weight of one member is applied to the object.
However, the unbalanced load applied to the object is reduced by the reducing means, and the object can be prevented from being damaged by the unbalanced load. Further, the mitigating means is arranged in the copying apparatus main body composed of the first member and the second member. In other words, the reducing means is arranged in the copying apparatus main body having a relatively simple structure. Therefore, there is no difficulty in designing the lightening means, and the configuration of the entire copying apparatus can be simplified. On the other hand, when one of the first member and the second member does not abut on the specific surface of the object, one member is returned to the center of the other member by the origin position return unit.

According to the second aspect of the present invention, a plurality of elastic bodies constituting the reducing means are provided, and the elastic bodies are arranged so that the elastic bodies face each other in the horizontal direction. From this, when one of the first member and the second member that abuts on the specific surface of the object is separated from the object, the origin position when one member does not abut the object That is, it is easy to quickly and accurately return one member to the center of the other member. The reason why one of the members can be quickly returned to the origin position is that a sufficient elastic force can be obtained because of the plurality of elastic bodies. The reason why one of the members can be accurately returned to the origin position is that the elastic force can be uniformly applied to one of the members because the respective elastic bodies are uniformly arranged.

According to the third aspect of the present invention, since each of the elastic members is constituted by a coil spring, it can contribute to simplifying the structure of the copying apparatus. Therefore,
The cost of the copying apparatus can be more reliably prevented. Furthermore, since the coil spring has a low component cost, the copying apparatus can be more reliably prevented from becoming more expensive.

[0012]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS (First Embodiment) Hereinafter, a first embodiment of the present invention will be described in detail with reference to the drawings. The up-down (vertical) direction of the copying apparatus F is defined as a Z-axis direction, and directions perpendicular to the Z-axis direction and orthogonal to each other on the same horizontal plane are defined as an X-axis direction and a Y-axis direction.

As shown in FIGS. 1 to 3, an apparatus base 10 as a first member (the other member) includes a fixed block 11.
And an annular porous material 12 having a concave semi-spherical surface 12a provided on the lower surface thereof. Annular porous material 1
As a material for forming 2, a metal material such as sintered aluminum, sintered copper, or sintered stainless steel can be used. In addition, synthetic resin materials such as sintered trifluoride resin, sintered tetrafluoride resin, sintered nylon resin, sintered polyacetal resin, and the like, sintered carbon, sintered ceramics, and the like can be used.

One side surface of the fixed block 11 (left side in FIG. 1)
Is formed with a port 13, and this port 13 is connected to a pressure supply source (not shown). The port 13 has an annular groove 1 formed in the fixed block 11 through an air passage 13a.
4 is connected. The annular groove 14 is opened on the back surface of the annular porous material 12. A pressurized air as a pressurized fluid is supplied from a pressure supply source (not shown) to the port 1.
3. It is ejected from the entire surface of the annular porous material 12 through the air passage 13a and the annular groove 14.

An annular groove 17 for suction is formed on the lower surface of the fixed block 11. A vacuum port 18 is formed on the other side surface (the right side in FIG. 1) of the fixed block 11, and a suction pump (not shown) is connected to the vacuum port 18. The evacuation port 18 communicates with the suction annular groove 17 via an air passage 18a. Then, air is sucked from the suction pump through the vacuum port 18 and the air passage 18a, and a suction force by the air acts along the suction annular groove 17.

A metal oscillating body 20 as a second member (one member) is provided on the concave semi-spherical surface 12a of the annular porous material 12.
Is provided. A convex hemisphere 20a is formed on the upper surface of the oscillating body 20, and the radius of curvature of the convex hemisphere 20a is the same as the radius of curvature of the concave hemisphere 12a. Therefore, the convex hemisphere 20a of the oscillator 20 is engaged with the concave hemisphere 12a of the annular porous material 12 so as to overlap. In the present embodiment, the device base 10 as the first member and the oscillator 2 as the second member
0 constitutes the copying apparatus main body 19.

A suction holder 21 for sucking a work W as an object is protruded from a lower surface of a central portion of the oscillating body 20. The oscillating body 20 and the suction holder 21 are integrally movable. Therefore, in the present embodiment, a swing member is constituted by the swing body 20 and the suction holder 21. In addition, the code | symbol R shown in FIG. 1 shows the curvature radius of the convex hemisphere 20a and the concave hemisphere 12a. The tip end surface of the suction holder 21 is a work contact surface, a so-called copying surface, on which the center of rotation C of the oscillating body 20 is located. Incidentally, the angle at which the rocking body 20 is rotatable around the X axis and the Y axis (scanning angle) is set to ± 0.5 ° assuming that the normal state of the balance is 0 °.

A screw 21 a is formed at the base end of the suction holder 21, and the screw 21 a is detachably screwed to the oscillating body 20. Therefore, a plurality of types of suction holders 21 having different lengths can be freely replaced. A port 22 is provided on the outer peripheral surface of the suction holder 21. The port 22 is formed with an air passage 23 whose outer end is opened at a tip end surface (hereinafter, referred to as a work contact surface) 21b of the suction holder 21. This air passage 23
Is connected to a suction pump (not shown). Then, air is sucked from the suction pump through the port 22 and the air passage 23.

A detent device 25 as detent means is provided above the fixed block 11. The detent device 25 includes a fixed casing 26 as a fixed base member having a rectangular box shape (rectangular shape) having an open lower surface. Inside the fixed casing 26, a movable casing (first movable body) 27 in the shape of a rectangular box having an open lower surface is accommodated.

On the outer surface of the movable casing 27 in the X-axis direction, a first porous material 28 as first pressurized fluid supply means is provided. Almost no gap is formed between the surface of the first porous material 28 and the inner surface of the fixed casing 26. Therefore, the movable casing 27 is allowed to move only in the Y-axis and Z-axis directions with respect to the fixed casing 26. The first porous material 28 is formed in a plate shape, and is made of the same material as the annular porous material 12. In the present embodiment, the distance between the surface of the first porous material 28 and the inner surface of the fixed casing 26 is 5 to 10
It is set to μm.

A movable block 37 is accommodated in the movable casing 27 as a second movable body. On the inner surface of the movable casing 27 in the Y-axis direction, a second porous material 38 is provided as second pressurized fluid supply means. A concave portion 39 communicating with the air passage 30 is formed on the inner surface of the movable casing 27 on the back side of the second porous material 38.

A gap is hardly formed between the surface of the second porous material 38 and the outer surface of the movable block 37. Therefore, the movable block 37 is
7 is allowed to move only in the X-axis and Z-axis directions. In the present embodiment, the distance between the surface of the second porous material 38 and the outer surface of the movable block 37 is 5 to 10 μm.
Is set to

An air inlet 29 as a fluid inlet is formed at a location on the air passage 30 at the center of each first porous material 28. Each air inlet 29 communicates with the air passage 30 via a concave portion 31 formed on the back surface of the first porous material 28. On both sides of the fixed casing 26, air supply ports 36 that communicate with the air introduction ports 29 and have a larger diameter than the introduction ports 29 are formed at locations facing the respective air introduction ports 29. The two air supply ports 36 are fixed casing 2
6 are communicated with each other via a flow path 35 formed in. One of the two air supply ports 36 (the left air supply port shown in FIG. 1) is opened to the outside of the fixed casing 26,
An air supply tube 36a connected to a pressure supply source (not shown) is connected to the opening.

Pressurized air sent from the pressure supply source is supplied from each air supply port 36 to the air passage 30 through the air introduction port 29 and each recess 31 in a non-contact state. Then, the pressurized air is jetted from the entire surface of the first porous material 28, so that a static pressure is applied to the interface between the fixed casing 26 and the movable casing 27 in the X-axis direction. Therefore,
The pressurized air in the air passage 30 can be supplied in a state where the air supply port 36 and the air introduction port 29 are not in contact with each other. Therefore, in the present embodiment, the first porous material 28 having the air inlet 29 constitutes a third pressurized fluid supply unit. In short, the first porous material 28 doubles as the first pressurized fluid supply unit and the third pressurized fluid supply unit. In addition, since the pressurized air is ejected from the entire surface of the second porous material 38, a static pressure is generated at the interface between the movable casing 27 and the movable block 37 in the Y-axis direction.

A third porous material 46 is provided on the inner surface of the movable casing 27 in the Z-axis direction. A certain gap is formed between the surface of the third porous material 46 and the upper surface of the movable block 37. Third porous material 4
A recess 47 communicating with the air passage 30 is formed in the movable casing 27 on the back side of the casing 6. And
Pressurized air is supplied from the air supply tube 36 a to the air supply port 3.
6, the third porous material 46 via the air passage 30 and the recess 47
It is squirted from the entire surface. Thereby, a static pressure is applied to the interface between the movable casing 27 and the movable block 37 in the Z-axis direction.

The movable block 37 is formed integrally with the oscillating body 20 via a connecting block 44 projecting from the lower surface thereof. The connection block 44 is loosely inserted into a communication hole 45 formed at the center of the fixed block 11. Thereby, the movable block 37 and the rocking body 20 can move integrally.

A plurality of spring support arms 40 extending vertically are provided on the X-axis side surface and the Y-axis side surface of the fixed block 11. Each spring support arm 40
Are arranged so as to face each other in the X-axis direction and the Y-axis direction. A through screw hole 40a is formed at the tip of each spring support arm 40 located near the side surface of the oscillating body 20. In the oscillating body 20, each through screw hole 40
A spring receiving hole 41 is formed in a recessed portion at a position opposite to a, and a coil spring 42 as an elastic body is received in the spring receiving hole 41. Therefore, in the present embodiment, the coil spring 42 is disposed on the copying apparatus main body 19. The coil spring 42 always applies an elastic force to the oscillating body 20 toward the center thereof, and the fixed block 11
Has the function of making the center axis of the oscillator 20 coincide with the center axis of.

The coil spring 42 is moved in the X-axis direction and in the Y-axis direction.
They are arranged in a positional relationship facing each other in the axial direction. The coil springs 42 are arranged at equal intervals on the same circumference. In the present embodiment, the coil spring 4
Since two coils 2 are provided, the coil springs 42 are arranged at intervals of 90 °. The spring constant of each coil spring 42 is set to be the same. Therefore, since the coil springs 42 are evenly arranged,
The elastic force of the coil spring 42 is uniformly applied to the oscillator 20.

One end of the coil spring 42 is fitted in a locking projection 41a as a first locking portion formed on the inner surface of the spring receiving hole 41. On the other hand, the other end of the coil spring 42 is supported by an inner end surface of a spring pressure adjusting screw 43 screwed into the through screw hole 40a. A locking projection 43 as a second locking portion is provided on the inner end surface of the spring pressure adjusting screw 43.
The locking projection 43a is fitted in the other end of the coil spring 42. The other end of the coil spring 42 is connected to the spring pressure adjusting screw 43 by the locking projection 43a.
It is fixed to. The elastic force of each coil spring 42 can be adjusted by moving each spring pressure adjusting screw 43 forward and backward. In addition, a plurality of elastic bodies,
That is, the plurality of coil springs 42 constitute a reduction means and an origin position return means. In the present embodiment, the plurality of coil springs 42 serve both as the reducing means and the origin position returning means.

Next, the copying apparatus F configured as described above
In order to transport a work as an object by using the method, the following is performed. Before the work W is sucked, pressurized air is supplied from the port 13 via the air passage 13a, and the pressurized air is jetted from the entire surface of the annular porous material 12 toward the upper surface of the oscillator 20. Thereby, the oscillator 20 is separated from the annular porous material 12. At the same time, air is sucked from the evacuation port 18 via the air passage 18a, and the inside of the annular groove 17 becomes negative pressure. Then, a suction force to the concave hemispheric surface 12a acts near the center of the rocking body 20, and the rocking body 20 is drawn to the fixed block 11. Therefore, the force with which the oscillator 20 separates from the concave semi-spherical surface 12a of the annular porous material 12 and the force with which the oscillator 20 is drawn toward the annular porous material 12 are balanced, so that the oscillator 20 is Is rotatably supported in a non-contact state.

The pressurized air sent by each air supply tube 36a flows directly from one air supply port 36 (left side in FIG. 1) to one air introduction port 29 and the flow path 3
5 and the other air supply port (right side in FIG. 1) 36 to the other air introduction port 29. And each air supply port 3
Air is supplied from 6 to the air passage 30. At this time, not all of the supplied pressurized air is introduced into the air introduction port 29, but leaks slightly from between each first porous member 28 and the inner surface of the fixed casing 26. The leaked pressurized air is discharged to the outside via an exhaust port (not shown) formed in the fixed casing 26.

When the pressurized air is supplied from each air supply port 36 through the air passage 30, the pressurized air is supplied from the entire surface of each first porous member 28 toward the inner surface in the X-axis direction of the fixed casing 26. Is squirted. Then, a static pressure is generated between the fixed casing 26 and the movable casing 27 in the X-axis direction. Then, the movable casing 27 can move smoothly along the Y-axis and Z-axis directions with respect to the fixed casing 26. Further, the static casing generated between the fixed casing 26 and the movable casing 27 in the X-axis direction makes the fixed casing 26 and the movable casing 27 non-contact. In this state, pressurized air is continuously supplied from each air supply port 36 to each air introduction port 29.

At the same time, pressurized air is blown from the entire surface of the second porous material 38 toward the inner surface of the movable block 37 in the Y-axis direction. Then, a static pressure is generated between the movable casing 27 and the movable block 37 in the Y-axis direction.
Then, the movable block 3 is moved with respect to the movable casing 27.
7 can smoothly move along the X-axis and Z-axis directions.

Here, as shown in FIG. 4A, in addition to the absence of friction at the interface between the device base 10 and the oscillating body 20, the center of gravity G of the oscillating body 20 is more than the center of rotation C thereof. It is located above. Therefore, the posture balance of the oscillating body 20 is poor, and the oscillating body 20 and the suction holder 21 tend to tilt due to their own weight. When the oscillating body 20 is tilted along the X-axis direction, the movable block 37 is tilted on the coil spring (FIG. 4).
The movable block 37 is pushed back to the position before tilting by the elastic force of the spring 42 on the right side in (a).
At the same time, the oscillating body 20 is returned to the position before the oscillating body 20 by the elastic force of the coil spring 42 (the spring on the left side in FIG. 4A) on the side opposite to the side where the oscillating body 20 is inclined.

Therefore, the oscillating body 20 is held in a state where the center of gravity G and the central axis Z are coincident by the elastic force of the coil spring 42. In short, when the copying operation is not performed, the rocking body 20 is held at the center of the fixed block 11 in a stable state without shaking. Oscillator 2
Similarly, in the case where 0 is tilted in the Y-axis direction, the oscillating body 20 is stably held at the center of the fixed block 11 by the elastic force of the coil spring 42 in the Y-axis direction.

Next, when the entire copying apparatus F descends and approaches the work W, the work contact surface 21b of the suction holder 21 is moved.
Contacts the workpiece W. Then, if the upper surface (specific surface) of the work W is inclined along the Y-axis direction, the oscillator 20 rotates around the X-axis so as to follow the inclination. This is because the movable casing 27 is allowed to move only in the Y-axis and Z-axis directions with respect to the fixed casing 26.

On the other hand, if the upper surface of the work W is inclined along the X-axis direction, the oscillating body 20 rotates around the Y-axis so as to follow the inclination angle. This is because the movable block 37 is allowed to move only in the X-axis and Z-axis directions with respect to the movable casing 27. As described above, the rocking body 20 follows the work W so that the work contact surface 21b of the suction holder 21 is parallel to the work W without rotating about the Z axis.

In this copying state, as shown in FIG. 4B, a rotational moment M by its own weight acts in the direction in which the oscillating body 20 and the suction holder 21 rotate. At this time, due to the elastic force of the coil spring (the spring on the right side in FIG. 4B) 42 on which the rocking body 20 rotates, the rocking body 20 is moved to the center portion (the counter-rotation side) of the device base 10. Trying to be pushed back. At the same time, a coil spring on the side opposite to the side on which the oscillator 20 rotates (see FIG.
Due to the elastic force of the spring 42 on the left side in (b), the oscillating body 20 tends to be pulled back toward the center of the device base 10. As a result, the rotational moment M in the X-axis direction
Is reduced.

When the rocking body 20 rotates in the Y-axis direction, the rotational moment M is reduced by the elastic force of the coil spring 42 in the Y-axis direction, similarly to the case in which the rocking body 20 rotates in the X-axis direction. . As described above, by reducing the rotational moment M in the X-axis direction and the Y-axis direction,
The offset load mg applied to the work W can be reduced. Incidentally, the offset load mg can theoretically be zero.

The rotational moment M increases in proportion to the inclination angle θ of the upper surface of the work W, the weight of the oscillating body 20 and the suction holder 21, and the axial length of the oscillating body 20 and the suction holder 21. Similarly, the elastic force of the coil spring 42 also increases in proportion to the inclination angle θ of the upper surface of the work W.

Further, in order to further reduce the unbalanced load mg applied to the work W, it is necessary to adjust the posture balance of the oscillator 20. As this adjustment method, the spring load of the coil spring 42 is changed. That is, to change the spring load of the coil spring 42, the spring pressure adjusting screw 4
Move 3 forward and backward. Specifically, the coil spring 4
In order to increase the spring load of No. 2, the spring pressure adjusting screw 43 is screwed. On the other hand, to reduce the spring load of the coil spring 42, the spring pressure adjusting screw 43 is screwed back.

After the copying operation is completed, the supply of the pressurized air to the port 13 is stopped, and the ejection of the pressurized air from the surface of the annular porous material 12 is stopped. On the other hand, the evacuation of the air from the evacuation port 18 is continued. Therefore, the force for separating the oscillator 20 from the annular porous material 12 becomes zero, and only the force for attracting the oscillator 20 to the annular porous material 12 acts. This allows
The rocking body 20 is pressed against the device base 10. Therefore, since the rocking body 20 is fixed so as not to rotate, the suction holder 21 is held in a state of following.

In this state, when air is evacuated from the port 22 provided in the suction holder 21 via the air passage 23, the work W is sucked on the work contact surface 21b of the suction holder 21. Then, the entire copying apparatus F is raised,
When the workpiece W is transported to a predetermined position, the copying apparatus F descends. Thereafter, the evacuation of the air from the port 22 is stopped, and the work W is separated from the suction holder 21.

The center of rotation C of the oscillating body 20, that is, the center of curvature of the convex hemispherical surface 20a, coincides with the workpiece contact surface (copying surface) 21b of the suction holder 21 for highly accurate copying. It is desirable in doing. However, the rotation center C of the oscillating body 20 may not coincide with the workpiece contact surface 21b of the suction holder 21 due to an error in the processing accuracy. In this case, as described above, the swing holder 20 is replaced with the suction holder 21 having an appropriate length.

Therefore, according to the present embodiment, the following effects can be obtained. (1) When the oscillator 20 is brought into contact with a specific surface of the workpiece W,
The rocking body 20 rotates according to the inclination of the specific surface. Thereby, the contact surface of the oscillating body 20 and the specific surface of the workpiece W become parallel to each other. At this time, since the rotation of the oscillating body 20 around the Z axis is restricted by the rotation preventing device 25, it is possible to perform high-accuracy copying.

(2) As the rocking body 20 rotates,
Although the unbalanced load due to the own weight of the oscillating body 20 tends to be applied to the work W, the unbalanced load applied to the work W can be reduced by the elastic force of the coil spring 42. Therefore, when the work W is made of a brittle material such as a glass substrate, it is possible to prevent the work W from being damaged.

(3) Since the coil spring 42 is disposed in the copying apparatus main body 19, which has a simpler structure than the detent device 25, the copying apparatus F can be easily designed, and
The entire structure of the copying apparatus F does not become complicated. Therefore, the assembling work of the copying apparatus F becomes easy, and the cost can be reduced. In addition, it becomes easy to mount the coil spring 42 on the existing copying apparatus F.

(4) Since a plurality of coil springs 42 are provided, a sufficient elastic force can be applied to the oscillator 20. Therefore, the oscillating body 20 has the work W
When the oscillator 20 is moved away from the
0 can be quickly returned to the center.

(5) Since the plurality of coil springs 42 are arranged at equal intervals on the same circumference, a uniform elastic force can always be applied to the oscillator 20. Therefore, even if the rocking body 20 rotates in an arbitrary direction, the unbalanced load can be reliably reduced.

(6) Since the uneven load applied to the work W is reduced by using the versatile and low-cost coil spring 42, the structure of the copying apparatus F can be further simplified.

(7) Fixed casing 2 in X-axis direction
At the interface between the movable casing 6 and the movable casing 27, a first porous material 28 for supplying pressurized air for generating a static pressure is provided. The first porous material 28 has an air supply port 36.
An air introduction port 29 for introducing pressurized air ejected from the air passage 30 into the air passage 30 is provided. Therefore, by the static pressure generated between the fixed casing 26 and the movable casing 27 in the X-axis direction, the compressed air is supplied to the air passage 30 while the air supply ports 36 and the air introduction ports 29 are in a non-contact state. Can be supplied. Therefore, the air supply tube 36a is attached to the movable casing 27 and the air passage 3
The influence of the tension by the air supply tube 36a is smaller than that in the case where the pressurized air is supplied to the movable casing 2.
7 does not receive. As a result, the copying accuracy can be improved.

(8) Since the air supply ports 36 are formed on both sides of the fixed casing 26, pressurized air is supplied to the air passage 30 from both sides of the movable casing 27. Therefore, the air pressure ejected from each first porous material 28 can be made uniform.

(9) The pressurized air is supplied to the air passage 30 by bringing the air supply port 36 and the air introduction port 29 into a non-contact state by the first porous material 28, and the movable casing is generated by generating a static pressure. It also serves to smooth the movement of 27. Therefore, the number of parts can be reduced,
The structure of the rotation preventing device 25 can be simplified, and the manufacturing cost can be further reduced.

(10) The suction holder 2 with respect to the oscillator 20
1 is detachable. Therefore, a plurality of types of suction holders 21 having different lengths are prepared, and a suction holder 21 having an appropriate length can be selected from these and attached. Thereby, the posture balance of the oscillator 20 can be adjusted. In addition, since the length of the suction holder 21 can be changed, the rotation center C can be moved to the work contact surface 21b.
Can be matched. As a result, accurate copying can be performed.

(11) The plurality of coil springs 42 have a function of reducing the bias load exerted by the oscillator 20 on the work when the oscillator 20 comes into contact with the work, and the function of the oscillator 20 being applied to the work. There is a function of returning the rocking body 20 to the center of the fixed block 11 when not in contact. In short, the plurality of coil springs 42 serve both as the reducing means and the origin position returning means. Therefore, it is possible to prevent the number of parts from increasing, and to prevent the structure of the copying apparatus F from becoming complicated.

(Second Embodiment) Next, a second embodiment of the present invention will be described focusing on parts different from the first embodiment.

In this second embodiment, as shown in FIGS. 5 and 6, the outer peripheral surface of the
Are provided (four in this embodiment). Each parallel pin 51 is arranged so as to face the spring support arm 40. The distal end of each parallel pin 51 is loosely inserted into a through hole 52 as an engaging portion formed on the spring support arm 40. By this loose insertion, the rocking body 20 moves around the Z-axis ±
Rotation is allowed in the range of 1 °. In other words,
The rotation of the oscillating body 20 is restricted in a range exceeding ± 1 ° around the Z axis. Therefore, in the present embodiment, these parallel pins 51 constitute a simple detent means.

Each of the parallel pins 51 has a coil spring 4
2 are each extrapolated. Each coil spring 42
Is inserted and locked in a spring engagement step 53 formed at the tip of each spring support arm 40. In contrast,
The other end of the coil spring 42 is
It is inserted and locked in another spring engaging step 54 formed at a position located around the parallel pin. The outer peripheries of both ends of each coil spring 42 are in contact with the inner peripheral surfaces of the respective engaging step portions 53 and 54. When the coil spring 42 in the Y-axis direction is elastically bent and deformed, the oscillator 20 rotates around the X-axis. In addition, the rocking body 20 rotates around the Y axis by the elastic deformation of the coil spring 42 in the X axis direction.

Therefore, in the present embodiment, the coil spring 42 as an elastic body constituting the lightening means is disposed in the copying apparatus main body 19 as in the first embodiment. Therefore, the work of assembling the coil spring 42 is simplified. A parallel pin 51 projecting from the rocking body 20 is loosely inserted into a through hole 52 provided in the spring support arm 40. With such a simple configuration, rotation of the rocking body 20 around the Z axis can be restricted, so that the cost of the rotation preventing device can be reduced.

In this embodiment, the suction holder 2
A tool 55 is provided on the oscillating body 20 instead of 1. The tool 55 is for crimping a semiconductor chip on a glass substrate as an object.

(Third Embodiment) As shown in FIGS. 7 and 8, four sets of elastic bodies are provided at equal intervals on the same circumference in the copying apparatus main body 19, and each elastic body is provided with two coil springs. 42. 2 that make up each elastic body
The two coil springs 42 are arranged at a predetermined distance on both sides of the parallel pin 51. One end of each coil spring 42 is inserted and locked in a spring accommodating recess 61 formed at the tip of each spring support arm 40.
On the other hand, the other end of each coil spring 42 is inserted and locked in another spring accommodating recess 62 formed on the outer peripheral surface of the oscillating body 20.

The outer periphery of both ends of each coil spring 42 is
The respective spring accommodating recesses 61 and 62 are in contact with the inner peripheral surfaces thereof. Then, the coil spring 42 in the Y-axis direction
Is elastically bent and deformed, so that the oscillator 20
Rotate around an axis. Further, the coil spring 42 in the X-axis direction is elastically bent and deformed, so that the oscillator 2
0 rotates around the Y axis.

Therefore, in this embodiment, the parallel pin 51 is disposed between the two coil springs 42 constituting the elastic body. Therefore, the shape of the through hole 52 formed in the spring support arm 40 for mounting the coil spring 42 does not become complicated. Therefore, the cutting cost of the through hole 52 can be reduced, and the cost can be further reduced.

The embodiment of the present invention may be modified as follows. A plurality of fluid blowing arms are provided on the side surface in the X-axis direction and the side surface in the Y-axis direction of the fixed block 11 so as to extend in the up-down direction and have a distal end facing the outer peripheral surface of the oscillator 20. A fluid outlet from which a fluid such as air blows out may be provided. Then, the fluid pressure of the fluid ejected from the fluid outlet may be a force for returning the oscillating body 20 to the central portion of the device base 10. When this configuration is adopted, a sensor for detecting the rotation angle of the oscillating body 20 is provided, of course, and the fluid pressure is variably controlled based on a detection signal from the sensor. May be.

In the above-described embodiment, the coil spring 42 is used to pull the oscillator 20 toward the center of the device base 10. Instead of the coil spring 42, an elastic body made of rubber, synthetic resin, or the like, or a magnet or the like may be used.

In the above embodiment, the fixed block 11
Is provided with an annular porous material 12. Alternatively, the oscillator 20 may be provided with the annular porous material 12. Further, both the fixed block 11 and the oscillating body 20 are provided with an annular porous material 12.
May be provided to face each other.

In the above embodiment, the elastic body is constituted by one or two coil springs 42, but may be constituted by three or more coil springs 42. -The positional relationship between the through-hole 52 and the parallel pin 51 shown in the second and third embodiments may be changed. That is, a parallel pin 51 is protruded from the spring support arm 40, and the parallel pin 5 is provided on the outer peripheral surface of the oscillator 20 corresponding to the parallel pin 51.
A hole for loosely inserting 1 may be provided.

In the above embodiments, the plurality of coil springs 42 are arranged so as to face each other in the X-axis direction or the Y-axis direction. In addition to this configuration, for example, if the number of coil springs 42 is odd (five) and they are arranged at equal intervals on the same circumference, each coil spring 4
The force for returning the oscillating body 20 to the central portion of the device base 10 can be uniformly applied without causing the two to face each other.

In each of the above embodiments, only the other end of the coil spring 42 is fixed to the spring support arm 40. Alternatively, only one end of the coil spring 42 may be fixed to the oscillator 20.

In the above embodiment, the fixed block 11
Although the concave hemisphere 12a is provided on the side and the convex hemisphere 20a is provided on the oscillator 20 side, the relationship may be reversed. That is, a convex hemisphere may be provided on the fixed block 11 side, and a concave hemisphere engaged with the convex hemisphere may be provided on the oscillator 20 side.

Next, in addition to the technical idea described in the claims, the technical idea grasped by the above-described embodiment will be described below. (1) The copying apparatus according to any one of claims 1 to 3, wherein each elastic body is disposed so as to face a line orthogonal to a center line of the other member.

(2) In any one of claims 1 to 3 and (1), at least one of the first member and the second member has a concave hemispherical surface and a convex hemispherical surface. A copying apparatus provided with a porous material for ejecting pressurized air, wherein the first member and the second member can be brought into a non-contact state by the pressurized air ejected from the porous material. With this configuration, since the pressurized fluid is ejected between the first and second members, the static pressure provided by the pressurized fluid acts between the two members. As a result, the two members are not in contact with each other, so that little sliding resistance acts between the two members. Therefore, it is possible to rotate one of the two members to make the contact surface parallel to the specific surface of the object.

(3) Claims 1-3, (1),
In any one of (2), the detent means may be provided on one of the first and second members that is in contact with a specific surface of the object, and on the other member. And a parallel pin loosely inserted into the engaging portion. According to this configuration, it is possible to restrict the rotation of one of the first and second members abutting on the object, despite the simple configuration.

(4) In any one of claims 3 and (1) to (3), one of the first and second members, which is in contact with a specific surface of the object, has a side surface of the coil spring. A copying apparatus provided with a first locking portion for engaging one end portion and a second locking portion for engaging the other end portion of the coil spring on a spring support member provided on the other member; .
With this configuration, the spring can be easily assembled.

(5) a first member having a concave hemispherical surface;
A second member having a convex hemispherical surface is provided so as to be relatively rotatable,
In a copying apparatus configured to cause one of the two members to abut on a specific surface of an object to cause the abutting surface to be parallel to the specific surface of the object, A copying apparatus provided with reducing means for reducing an unbalanced load applied to the object by one of the first and second members when one of the members comes into contact with the object. .

(6) a first member having a concave hemispherical surface;
A second member having a convex hemispherical surface is provided so as to be relatively rotatable,
In a copying apparatus configured to cause one of the two members to abut on a specific surface of an object to cause the abutting surface to be parallel to the specific surface of the object, A detent means for restricting rotation of one of the first and second members contacting the object about an axis perpendicular to the contact surface is provided, and the one member is Copying, characterized in that a mitigating means for reducing an unbalanced load applied to the object by one of the members when contacting the object is provided, and the mitigating means is arranged at a location other than the detent means. apparatus.

(7) In claim 1, the reducing means is constituted by a plurality of elastic members for applying a force to return one of the two members, which is in contact with a specific surface of the object, to the copying apparatus main body. Copying equipment.

(8) The copying apparatus according to any one of claims 1 to 3, wherein the reducing means also serves as the origin position returning means. With this configuration, the structure of the copying apparatus can be simplified.

(9) In the copying apparatus according to claim 1, the reducing means applies a force for returning one of the two members, which is in contact with a specific surface of the object, to the center of the copying apparatus main body. It is composed of a plurality of elastic bodies, and each elastic body is arranged at equal intervals on the same circumference. A plurality of elastic bodies constituting the lightening means are provided, and the elastic bodies are arranged at equal intervals on the same circumference. From this, when one of the first member and the second member that abuts on the specific surface of the object is separated from the object, the origin position when one member does not abut the object That is, it is easy to quickly and accurately return one member to the center of the other member. The reason why one of the members can be quickly returned to the origin position is that a sufficient elastic force can be obtained because of the plurality of elastic bodies. In addition, one of the members can be accurately returned to the origin position because the elastic members are uniformly arranged on the same circumference, so that the elastic force can be uniformly applied to the one member. Because.

[0080]

As described in detail above, according to the present invention,
By simplifying the structure, the ease of assembly can be improved and the cost can be reduced.

[Brief description of the drawings]

FIG. 1 is a cross-sectional view of a copying apparatus according to a first embodiment.

FIG. 2 is a sectional view taken along line 2-2 of FIG.

FIG. 3 is a sectional view taken along line 3-3 in FIG. 1;

4A is an explanatory view of the copying apparatus in a balanced state, and FIG. 4B is an explanatory view of the copying apparatus in a copying state.

FIG. 5 is a sectional view of a copying apparatus according to a second embodiment.

FIG. 6 is a sectional view taken along line 6-6 in FIG. 5;

FIG. 7 is a sectional view of a copying apparatus according to a third embodiment.

FIG. 8 is a sectional view taken along line 8-8 in FIG. 7;

[Explanation of symbols]

10: Device base (first member, other member), 12a: concave hemisphere, 19: copying apparatus main body, 20: rocking body (second member, one member), 20a: convex hemisphere, 25 ... Detent device (rotation means), 42: coil spring (elastic body, reduction means, origin position return means), mg: offset load, W: work (object).

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Claims (3)

[Claims] 1. A copying apparatus main body comprising a first member having a concave hemispheric surface and a second member rotatable relative to the first member and having a convex hemisphere, and specifies an object. In a copying apparatus in which one of the two members abuts on a surface, the abutting surface is copied so as to be parallel to a specific surface of the object. Detent means for restricting rotation of one of the second members contacting the object about an axis orthogonal to the contact surface, and the one member contacting the object. And when the one member does not come into contact with the object, the one member is returned to the center of the other member when the one member is not in contact with the object. Origin position return means, and Copying apparatus characterized by being arranged in the copying apparatus main body. 2. The lightening means comprises a plurality of elastic bodies for applying a force to return one of the two members, which is in contact with a specific surface of an object, to the center of the copying apparatus main body. The copying apparatus according to claim 1, wherein the copying apparatuses are arranged so as to face each other in a horizontal direction. 3. The copying apparatus according to claim 2, wherein the elastic body is a coil spring, and one end of the coil spring is fixed to one of the first member side and the second member side. .