JP2002299311A - Leakage cutoff method for gas in vessel and vessel equipped with leakage cutoff structure - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vessel equipped with a leakage cutoff structure for internal gas which can surely prevent internal gas from leaking out, and also have a lid body attached and detached readily in a short time, etc. SOLUTION: The container 2 is composed of a container body 3 has an opening atop and has fixed internal capacity and the lid body 21, which is mounted on the container body 3 and closes the opening part 11. An annular recessed groove part 21, having an opening atop is formed at the outer periphery of the upper end part 10 of the container body 3, and liquid pooled in the recessed groove part; and a hanging part, which hangs from the peripheral edge part of the lid body 21, is formed at the peripheral edge and fitted onto the upper end part 10 of the container body 3, while being dipped in the liquid in the recessed groove 12.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] The present invention relates to a method for manufacturing a semiconductor device,
In a container composed of a container body having a constant internal volume, and a lid placed on the container body and closing the opening, a method for blocking gas from leaking from inside the container, and The present invention relates to a container provided with a structure for blocking leakage of internal gas.

[0002]

2. Description of the Related Art For example, a TFT substrate constituting a liquid crystal substrate is manufactured through various processes. In each process, a developing solution or a resist film is applied, and a chemical solution for removing the resist film, an etching solution or a cleaning solution is applied. Various processing liquids are applied to the TFT substrate.

For example, in the etching step, for example, a supporting means for supporting the substrate, an etching liquid jetting means which is disposed above the substrate and jets an etching liquid to the substrate, and the like are appropriately disposed in a predetermined container. An etching apparatus having the above configuration is used. The supporting means includes a means for rotating the supported substrate horizontally and a means for transferring the substrate in the horizontal direction.

In such an etching apparatus, it is necessary to periodically clean dirt inside the container and clean the inside of the container. Need to replace this. Therefore, in order to perform such maintenance work, the container constituting the etching apparatus has a structure having an open top and a structure in which this opening is closed by a lid, and the maintenance is performed from the upper opening. Work can be performed.

[0005] The etching solution used for the above-described etching is highly corrosive and has a property of being easily vaporized. Further, when the etching solution is jetted from the etching solution jetting means, it forms a mist. When the vaporized etching gas or mist leaks out of the container, it adversely affects machines, instruments, and human bodies around the apparatus.

Therefore, conventionally, a sealing member such as packing is interposed at a contact portion between the periphery of the opening of the container and the lid,
In this state, the container and the lid are fastened with a number of bolts to prevent the vaporized gas and mist from leaking out of the container.

[0007]

However, in the structure in which the container and the lid are fastened by a large number of bolts as described above, although the vapor gas and the mist can be prevented from leaking out, the above-mentioned structure has a corresponding effect. When performing maintenance work, it is necessary to remove and refasten a large number of bolts, which makes the work extremely complicated. Also,
For this reason, a long time is required for the maintenance work, and as a result, there arises a problem that the operation rate of the etching apparatus is reduced.

The present invention has been made in view of the above circumstances, and it is possible to reliably prevent internal gas from leaking, and to easily attach and detach a cover in a short time. It is an object of the present invention to provide a method for blocking leakage of gas in a container and a container provided with a structure for blocking leakage of internal gas.

[0009]

Means for Solving the Problems and Their Effects According to the invention described in claim 1 of the present invention for solving the above problems, a container body having an open upper portion and a constant internal volume, And a lid configured to close the opening, wherein the container is configured to block gas from leaking from the inside of the container. Forming a recessed annular groove to store liquid in the groove, and forming a hanging part hanging down from the peripheral part on the periphery of the lid, and forming the hanging part at the lower end thereof. The part is externally fitted to the upper end of the container body so that the part is immersed in the liquid in the groove, and the atmosphere in the container and the external atmosphere are shut off by the liquid in the groove. The invention relates to a method for shutting off leakage of gas in a container.

Further, according to the invention described in claim 4 of the present invention, a container body having an opening at an upper portion and having a constant internal volume;
A lid placed on the container body and comprising a lid closing the opening, wherein an annular concave groove having an open top is formed on an outer periphery of an upper end of the container body; While storing the liquid in the groove, at the periphery of the lid,
A hanging part hanging downward from the peripheral part is formed, and the hanging part can be externally fitted to an upper end part of the container main body with its lower end part immersed in the liquid in the concave groove part. The present invention relates to a container provided with an internal gas leakage blocking structure.

According to the above inventions, the hanging part formed on the peripheral edge of the lid is fitted to the upper end of the container body such that the lower end is immersed in the liquid stored in the concave groove. Thereby, the atmosphere in the container and the external atmosphere are shut off by the liquid in the groove. The atmosphere in the container can come into contact with the liquid in the groove from the gap between the container body and the lid, but does not directly communicate with the external atmosphere. This reliably prevents the gas in the container from leaking to the outside. In addition, since the lid is merely placed on the container body, it is easy to remove the lid, and the lid can be removed in a short time.

By the way, when a vaporized gas or liquid is in the form of a mist in the container, if the vaporized gas or the mist is soluble in the liquid in the groove, the gas or the mist contacts the liquid in the groove. However, the vaporized gas and mist in the container do not leak to the outside as it is. Therefore, even if it is extremely corrosive such as a developing solution, an etching solution or a stripping solution, it does not adversely affect machines, instruments and human bodies around the container.

In this case, as in the invention according to claim 5, a second hanging portion is formed on the lower surface inside the outer peripheral edge of the lid along the hanging portion and hanging downward from the lower surface, It is preferable that the second hanging portion is fitted inside the upper end of the container body. With this configuration, a labyrinth structure in which the upper end portion of the container body is inserted between the hanging portion of the lid and the second hanging portion is formed, and the vaporized gas and mist in the container body are removed by the concave groove. Harder to reach due to the liquid inside.

According to a third aspect of the present invention, there is provided an annular sealing member made of an elastic material and provided in an airtight manner on an inner surface of the lid at an upper edge portion of the container body.
The invention according to claim 6 relates to a method for shutting off leakage of gas in a container, characterized in that the gas inside the container body is prevented from leaking to the outside by the seal member. The invention relates to a container provided with an internal gas leakage blocking structure, wherein an edge is provided with an annular seal member made of an elastic body and abutting against the inner surface of the lid in an airtight manner. According to this, the annular seal member provided on the upper edge portion of the container body prevents the gas in the container body from leaking to the outside. Therefore, even when the vaporized gas or mist exists inside the container, the vaporized gas or mist is less likely to reach the liquid in the concave groove.

According to the invention described in claim 2 of the present invention, the liquid in the groove is continuously supplied while the liquid in the groove is continuously discharged, and the liquid in the groove is continuously discharged. The invention described in claim 7 relates to a method for shutting off leakage of gas in a container, characterized in that the liquid is replaced in the container and that the stored amount is kept constant. And a liquid discharging means for discharging the liquid in the concave groove.

As described above, when the vaporized gas or mist is present in the container, if the vaporized gas or mist is soluble in the liquid in the groove, the vaporized gas or mist is dissipated when it comes into contact with the liquid in the groove. Melts. Therefore, if this is left untreated, the concentration of the vaporized gas component and the mist component dissolved in the liquid in the groove increases.

According to the second and seventh aspects of the present invention, since the liquid in the groove is continuously replaced by a new liquid, the vaporized gas that is melted in the liquid in the groove. It is possible to prevent the concentration of the component or the mist component from increasing.

In addition, the above-mentioned outer fitting means that the hanging part is fitted to the upper end of the container body exactly,
Including the case where the fitting is performed with considerable play, the inner fitting similarly has the second hanging portion with respect to the upper end portion of the container body.
In addition to the case where the fitting is performed exactly, the case where the fitting is performed with considerable play is included.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, specific embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a plan view showing an etching apparatus according to an embodiment of the present invention, FIG. 2 is a cross-sectional view in the direction of arrows BB in FIG. 1, and FIG. It is the enlarged view which expanded and showed.

The etching apparatus 1 of this embodiment is an apparatus for performing an etching process on a TFT substrate. As shown in FIGS. 1 and 2, a container body (hereinafter, referred to as a tank body) 3 having an open top and a tank Lid 2 for closing opening 11 of body 3
A container (hereinafter, referred to as an etching tank) 2 comprising: an etching solution spraying device 40 disposed in the tank body 3;
And a transfer device 50 for transferring the substrate K in the horizontal direction. Further, as shown in FIG. 1, a plurality of the etching apparatuses 1 according to the present embodiment are arranged in a straight line.

As shown in FIG. 1 to FIG.
Is composed of a rectangular bottom plate 8, side plates 4, 5, 6 and 7 erected on the periphery of the bottom plate 8, and a top plate 9 disposed above and opposed to the bottom plate 8. And has a predetermined internal volume surrounded by the bottom plate 8, the side plates 4, 5, 6, 7 and the top plate 9.

The side plates 4, 5, 6, and 7 are provided so as to extend upward from the top plate 9, respectively.
In FIG. 2 and FIG. 2, reference numerals 4a, 5a, 6a,
7a is attached. The top plate 9 has a rectangular opening 11, and an edge plate 10 is provided upright on the periphery of the opening 11. Thus, these extension portions 4a,
An annular groove 12 is formed around the opening 11 by 5a, 6a, 7a, the top plate 9 and the edge plate 10. A packing 30 having an H-shaped cross section is attached to the upper end of the edge plate 10.
An O-ring 31 is provided inside a.

The closing lid 20 has a lid body 21 having a rectangular shape.
A first hanging portion 22 hanging down from the periphery of the lid body 21, and a lower surface inside the periphery of the lid body 21 hanging down along and parallel to the first hanging portion 22. It is made up of a second hanging part 23 that is stiffened. And
The lid 20 is in a state where the edge plate 10 of the tank body 3 is inserted between the first hanging portion 22 and the second hanging portion 23, that is, the first hanging portion 22.
The hanging part 22 is fitted on the edge plate 10 and the second hanging part 23
Is fitted in the edge plate 10 and the lower surface thereof is
1 is placed on the O-ring 31 so as to be in contact with the O-ring 31 in an airtight manner, and closes the opening 11 of the tank body 3.

A handle 24 is fixed on the upper surface of the lid body 21, and the handle 20 is gripped so that the lid 20 can be attached to and detached from the tank body 3. In addition, a viewing window 25 closed by a transparent plate material is formed in the lid body 21, and the inside of the tank body 3 can be observed from the viewing window 25.

A water discharge portion 35 connected to a water supply source (not shown) is provided in the groove 12 of the tank body 3, and water is discharged from the water discharge portion 35 into the groove 12. It has become so. In the groove 12, a drainage part 36 is provided.
The water is discharged from the water discharge part 35 into the concave groove 12 and the stored water is drained from the drain part 36. The amount of water stored in the concave groove 12 is maintained such that the water level is located above the lower end of the first hanging portion 22.

As shown in FIG. 2, the transfer device 50 comprises:
The substrate K is provided with conveying rollers 51 and 52 arranged vertically one above another and arranged in multiple rows in a direction orthogonal to the paper surface.
Is transported in a direction perpendicular to the sheet of paper (the direction indicated by the arrow C in FIG. 1) in a state of being sandwiched between the transport rollers 51 and 52.

As shown in FIG. 2, the etching liquid ejecting apparatus 40 includes a plurality of etching liquid ejecting nozzles 41,
An etching solution supply means (not shown) for supplying a pressurized etching solution to the etching solution spray nozzle 41 is provided. The etching liquid jet nozzles 41 are arranged along the width direction and the transport direction above the substrate K transported by the transport rollers 51 and 52, and
The etching liquid is sprayed on the upper surface of the substrate K conveyed by 52. Cleaning liquid jet nozzles 42 connected to cleaning liquid supply means (not shown) are arranged on both sides of the substrate K in the transport direction. The cleaning liquid is sprayed toward the lower surface and the second hanging part 23.

According to the etching apparatus 1 of the present embodiment having the above-described configuration, the substrate K is transported in the transport direction by the transport rollers 51 and 52, and the etchant is sprayed from the etchant spray nozzle 41 onto the upper surface of the transported substrate K. Is injected. Note that the substrate K is an etching apparatus 1 that is linearly connected in series.
, And are etched in each of the etching apparatuses 1.

By the way, the etching liquid has a property that it is easily vaporized, and when the etching liquid is jetted from the etching liquid jet nozzle 41, it forms a mist. Then, the etching gas or mist vaporized in this way fills the inside of the tank body 3. Such a vaporized etching gas or mist is extremely corrosive, and if leaked from the tank body 3 to the outside, it adversely affects machines, instruments, and human bodies around the apparatus.

According to the etching apparatus 1 of the present embodiment, the packing 30 is mounted on the upper end of the edge plate 10 constituting the tank main body 3, and the O-ring 3 is inserted into the upper groove 30a of the mounted packing 30.
1 and the lid 20 is placed on the O-ring 31 in a state of being in airtight contact with the O-ring 31. The atmosphere is shut off by the O-ring 31.
Therefore, leakage of the etching gas or mist from the inside of the tank body 3 to the outside is primarily prevented by the O-ring.

In the etching apparatus 1 of this embodiment, an annular groove 12 is formed around the opening 11 of the tank body 3, and water is stored in the groove 12. Since the lower end of the hanging part 22 has a structure immersed in the water, the atmosphere in the tank body 3 and the outside atmosphere are shut off by the water in the concave groove 12. Lid 2
Since 0 is only placed on the O-ring 31,
The airtightness between the lid main body 21 and the O-ring 31 is not always sufficient, and the etching gas and mist in the tank main body 3 are exposed to the outside from the gap generated between the lower surface of the lid main body 21 and the O-ring 31. May leak. However, in the etching apparatus 1 of the present embodiment, as described above, the atmosphere surrounded by the first hanging portion 22, the edge plate 10, the packing 30, and the O-ring 31 is changed to the external atmosphere by the water stored in the concave groove 12. Since the gas is blocked, the etching gas and mist leaked from the gap between the lower surface of the lid body 21 and the O-ring 31 to the outside are prevented from leaking to the outside by water in the groove 12.
It is subsequently stopped. Thus, the cooperative action of the water in the concave groove 12 and the O-ring 31 prevents leakage of the etching gas and mist existing in the tank body 3 to the outside.

The lower surface of the lid body 21 and the O-ring 31
Etching gas and mist leaked from the gap between
If it is soluble in the water in the concave groove 12, it melts when it comes into contact with the water in the concave groove 12, but such an etching gas or mist does not leak to the outside as it is. Therefore, even if it is extremely corrosive, it does not adversely affect machines, instruments and human bodies around the container.

On the other hand, if this is left, the concentration of the etching gas or mist component dissolved in the water in the groove 12 will increase. In the present example, the water is discharged from the water discharging portion 35 to the concave groove 12.
While the water is supplied to the inside, the water stored in the groove 12 is drained from the drainage portion 36, and the water in the groove 12 is continuously replaced with new water. It is possible to prevent an increase in the concentration of the etching gas or the mist component that is dissolved in the water inside.

Also, since the edge plate 10 of the tank body 3 is inserted between the first hanging portion 22 and the second hanging portion 23 of the lid 20, a labyrinth structure is formed by these. The etching gas and the mist in the main body 3 are hard to reach due to the gap generated between the lower surface of the lid main body 21 and the O-ring 31. Therefore, even with this structure, the leakage of the etching gas and the mist in the tank main body 3 to the outside is prevented.

In this embodiment, the cleaning liquid is jetted from the cleaning liquid jet nozzle 42 toward the lower surface of the lid main body 21 and the second hanging portion 23 before the lid main body 21 is removed. As a result, the etchant attached to the lower surface of the lid body 21 and the second hanging portion 23 is washed away, and when the lid body 21 is removed, the etchant is prevented from being taken out.

Further, since the lid 20 is merely placed on the tank body 3, it can be easily removed, and can be removed in a short time. Therefore,
Maintenance work in the etching apparatus 1 can be easily performed.

As described above, one embodiment of the present invention has been described. However, specific embodiments that can be adopted by the present invention are not limited thereto. For example, in the above example, the present invention is embodied in an etching apparatus. However, the present invention is not limited to this. For example, the present invention also includes a developing solution applying apparatus, a resist film forming apparatus, a resist film removing apparatus, The present invention can be applied to various devices such as a device.

[Brief description of the drawings]

FIG. 1 is a plan view showing an etching apparatus according to an embodiment of the present invention.

FIG. 2 is a cross-sectional view in the direction of arrows BB in FIG.

FIG. 3 is an enlarged view showing a portion A in FIG. 2 in an enlarged manner.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Etching apparatus 2 Etching tank (container) 3 Tank main body (container main body) 4, 5, 6, 7 Side plate 8 Bottom plate 9 Top plate 10 Edge plate 11 Opening 12 Groove 20 Closed lid 21 Lid main body 22 1st hanging part 23 Second hanging part 30 Packing 31 O-ring 35 Water discharging part 36 Drainage part 40 Etching liquid ejecting device 50 Transporting device

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Shunji Matsumoto 1-10 Fuso-cho, Amagasaki City, Hyogo Prefecture F-term in Sumitomo Precision Industries, Ltd. (Reference) 3E084 AA05 AA14 AB10 BA02 CA03 CB04 DA03 FA09 GA08 GB12 GB17 HA03 HA04 HA10 HB08 HD01 3J040 AA02 AA17 BA02 BA05 CA04 EA06 EA16 EA25 FA05 HA01 HA03 HA07 5F043 AA10 AA22 DD13 EE03 EE15

Claims (7)

[Claims] 1. A container comprising a container main body having an open upper part and having a constant internal volume, and a lid placed on the container main body and closing the opening, wherein a gas in the container is provided. A method of blocking leakage of the liquid to the outside, wherein an annular concave groove having an open top is formed on the outer periphery of an upper end portion of the container body, and liquid is stored in the concave groove, and the lid body is formed. A hanging portion is formed on the periphery of the container, and the hanging portion is formed on the upper end of the container body so that the lower end is immersed in the liquid in the groove. A method for shutting off leakage of gas in a container, wherein the container is fitted so as to shut off the atmosphere inside the container and the outside atmosphere by the liquid in the concave groove. 2. A liquid is continuously supplied into the concave groove, and the liquid in the concave groove is continuously discharged to replace the liquid in the concave groove continuously. 2. The method for shutting off leakage of gas in a container according to claim 1, wherein said method is kept constant. 3. An annular seal member made of an elastic body and airtightly abutting on an inner surface of the lid is provided at an upper edge portion of the container main body to prevent gas in the container main body from leaking to the outside. 3. The method according to claim 1, wherein the leakage is prevented by a sealing member. 4. A container, comprising: a container main body having an opening at an upper portion and having a constant internal volume; and a lid placed on the container main body and closing the opening. On the outer periphery of the upper end portion, an annular concave groove having an open upper part is formed, and a liquid is stored in the concave groove part.At the periphery of the lid, a drooping part hanging downward from the periphery is formed. A container provided with an internal gas leakage blocking structure, wherein the hanging portion can be externally fitted to an upper end portion of the container body in a state where a lower end portion of the hanging portion is immersed in the liquid in the concave groove portion. . 5. A second hanging part which is formed to extend downward from the lower surface along the hanging part on a lower surface inside the outer peripheral edge of the lid, and the second hanging part is an upper end part of the container body. 5. A container provided with an internal gas leakage blocking structure according to claim 4, wherein the container can be fitted inside the container. 6. The inner part according to claim 4, wherein an annular seal member made of an elastic body and hermetically contacting an inner surface of the lid is provided on an upper edge portion of the container body. A container provided with a gas leakage blocking structure. 7. The liquid supply device according to claim 4, further comprising a liquid supply means for supplying a liquid into the groove, and a liquid discharge means for discharging the liquid from the groove. Container with internal gas leakage blocking structure.