JP2002299153A - Method for manufacturing laminated ceramic electronic component - Google Patents

Method for manufacturing laminated ceramic electronic component

Info

Publication number
JP2002299153A
JP2002299153A JP2001096604A JP2001096604A JP2002299153A JP 2002299153 A JP2002299153 A JP 2002299153A JP 2001096604 A JP2001096604 A JP 2001096604A JP 2001096604 A JP2001096604 A JP 2001096604A JP 2002299153 A JP2002299153 A JP 2002299153A
Authority
JP
Japan
Prior art keywords
ceramic
cutting
image
row
ceramic laminate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001096604A
Other languages
Japanese (ja)
Inventor
Hiroki Sato
博樹 佐藤
Hiroshi Yagi
弘 八木
Takeshi Takashima
剛 鷹島
Kazunori Chiba
和規 千葉
Masaaki Kaneko
正明 金子
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TDK Corp
Original Assignee
TDK Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TDK Corp filed Critical TDK Corp
Priority to JP2001096604A priority Critical patent/JP2002299153A/en
Publication of JP2002299153A publication Critical patent/JP2002299153A/en
Pending legal-status Critical Current

Links

Abstract

PROBLEM TO BE SOLVED: To calculate a position with high precision, where a ceramic laminate is desired to be cut, and cut the ceramic laminate accurately as a laminated ceramic element assembly of component unit, even if irregularities due to deformation or the like exist among ceramic laminates. SOLUTION: A visible light is irradiated to the ceramic laminate 1 from a light source 2, and an image formed by the visible light-penetrating a body of the ceramic laminate 1 is captured by an imaging camera 3. Cutting position data per column are obtained from an image of an internal electrode for every one column in the captured image, by using an image analysis processing device 4. A cutting device 5 is moved and controlled, by using the cutting position data for every column, and the ceramic laminate 1 is cut.

Description

【発明の詳細な説明】DETAILED DESCRIPTION OF THE INVENTION

【0001】[0001]

【発明の属する技術分野】本発明は、部品複数個取り用
のセラミック積層体を部品単位の積層セラミック素体に
切断するのに適用される積層セラミック電子部品の製造
方法に関するものである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method for manufacturing a multilayer ceramic electronic component which is applied to cutting a ceramic laminate for obtaining a plurality of components into a multilayer ceramic body for each component.

【0002】[0002]

【従来の技術】一般に、積層セラミックコンデンサを例
示すると、複数の内部電極を縦横並べて同じセラミック
グリーンシートの平面上に印刷し、そのセラミックグリ
ーンシートを内部電極と交互に複数積層させて部品複数
個取り用のセラミック積層体を作製し、このセラミック
積層体を相隣り合う内部電極の縁間幅中央に位置合わせ
させてXY方向に切断することにより、部品単位の積層
セラミック素体を得ることが行なわれている。
2. Description of the Related Art In general, in the case of a multilayer ceramic capacitor, for example, a plurality of internal electrodes are vertically and horizontally printed on a plane of the same ceramic green sheet, and the ceramic green sheets are alternately laminated with the internal electrodes to obtain a plurality of components. A ceramic laminated body for each component is manufactured, and the ceramic laminated body is aligned with the center of the width between the edges of adjacent internal electrodes and cut in the XY direction to obtain a laminated ceramic body for each component. ing.

【0003】その積層セラミック素体は焼成工程に送り
込んで焼成処理を施し、これを部品本体として端子電極
の形成工程に送り込み、互い違い交互の内部電極と電気
的に接続する端子電極を部品本体の両端部に設けること
により積層セラミックコンデンサとして製造されてい
る。
[0003] The laminated ceramic body is fed to a firing step and subjected to a firing process, which is sent to a terminal electrode forming step as a component body, and terminal electrodes electrically connected to alternately alternating internal electrodes are provided at both ends of the component body. This is manufactured as a multilayer ceramic capacitor by providing it in a portion.

【0004】従来、その製造工程中で部品複数個取り用
のセラミック積層体を部品単位に切断するには、セラミ
ック積層体の最外層表面に予め印刷した位置決めマーク
やセラミック積層体の外周縁を基準に、相隣り合う内部
電極の縁間幅中央位置を想定することからセラミック積
層体の切断位置を決定し、数枚のテスト切断を行って実
際の内部電極と切断位置とを調整することによりマージ
ンの規定値を確保するようにされている。
Conventionally, in order to cut a ceramic laminate for taking out a plurality of components into parts during the manufacturing process, a positioning mark preprinted on the outermost layer surface of the ceramic laminate or an outer peripheral edge of the ceramic laminate is used as a reference. In addition, the cutting position of the ceramic laminate is determined by assuming the center position between the edges of adjacent internal electrodes, and several test cuttings are performed to adjust the actual internal electrodes and the cutting position to obtain a margin. The specified value is ensured.

【0005】然し、これではテスト切断に用いられるセ
ラミック積層体が無駄となるばかりでなく、内部電極の
位置が余り大きくバラ付いていないことを前提としてい
るため、それが大きくバラ付いていると、テスト切断を
何枚行っても、切断位置を決定できない事態が生ずる。
そのマージンの規定値が確保されていないと、内部電極
の露出による絶縁不良等が発生する原因となるため、マ
ージンの規定値を正確に保ってセラミック積層体を部品
単位に切断する必要がある。
[0005] However, this not only wastes the ceramic laminate used for the test cutting, but also presupposes that the positions of the internal electrodes do not vary so much. No matter how many test cuts are made, the cutting position cannot be determined.
If the specified value of the margin is not ensured, it causes insulation failure or the like due to the exposure of the internal electrode. Therefore, it is necessary to cut the ceramic laminate into parts while maintaining the specified value of the margin accurately.

【0006】その切断の正確性を期するため、X線,超
音波光線等の透過光線をセラミック積層体に向けて透過
光線を光線照射装置より照射し、この透過光線により得
られる内部電極の画像からセラミック積層体を切断する
XY方向の切断位置を画像解析処理装置で測定し、画像
解析処理装置の測定データにより切断装置を作動させて
セラミック積層体を部品単位の積層セラミック素体に切
断することが提案されている(特開2000―2168
0号)。
In order to ensure the accuracy of the cutting, a transmitted light such as an X-ray or an ultrasonic light is directed toward the ceramic laminate, and the transmitted light is irradiated from a light irradiation device, and an image of the internal electrode obtained by the transmitted light is obtained. Measuring the cutting position in the X and Y directions of cutting the ceramic laminate from the image analysis processing device, and operating the cutting device based on the measurement data of the image analysis processing device to cut the ceramic laminate into a multilayer ceramic body in component units Has been proposed (JP-A-2000-2168).
No. 0).

【0007】そのセラミック積層体の切断方法において
は、セラミック積層体を複数集中的に管理するべく、画
像解析処理装置の測定データをデータ記録媒体に入力
し、このデータ記録媒体を用いて測定データを切断装置
の端末機に入力すると共に、切断装置を端末機より出力
する測定データで作動制御するよう設定されている。
In the method for cutting a ceramic laminate, in order to centrally manage a plurality of ceramic laminates, measurement data of an image analysis processing device is input to a data recording medium, and the measurement data is transferred using the data recording medium. It is set so as to be input to the terminal of the cutting device and to control the operation of the cutting device based on measurement data output from the terminal.

【0008】また、画像解析処理装置の測定データをデ
ータ記録媒体に入力し、且つ、その画像解析処理装置の
測定データを再現させて切断装置を作動制御する必要か
ら、画像処理装置を備え、セラミック積層体の最外層に
形成したターゲットマークを撮像カメラで捉え、セラミ
ック積層体の平面におけるXY方向の座標X,Yを予め
求め、この座標X,Yに基づいてセラミック積層体の搬
送テーブルにおけるXY方向並びにθ方向の位置ズレを
補正することにより切断を行うよう設定されている。
Also, since it is necessary to input the measurement data of the image analysis processing device to the data recording medium and reproduce the measurement data of the image analysis processing device to control the operation of the cutting device, an image processing device is provided. The target mark formed on the outermost layer of the laminate is captured by an imaging camera, and the coordinates X and Y in the XY directions on the plane of the ceramic laminate are obtained in advance. Based on the coordinates X and Y, the XY directions in the transfer table of the ceramic laminate are determined. The cutting is performed by correcting the positional deviation in the θ direction.

【0009】然し、上述したセラミック積層体の切断方
法ではX線,超音波光線等を透過光線として用いるた
め、装置の安全性を考慮する必要があり、装置全体とし
て機構的に複雑なものとなる。また、切断位置をターゲ
ットマークによる座標X,Yで計算し、XY方向並びに
θ方向の位置ズレを補正しながら切断するため、想定要
素を含む切断となってしまう。
However, in the above-described method for cutting a ceramic laminate, since X-rays, ultrasonic beams and the like are used as transmitted beams, it is necessary to consider the safety of the device, and the device as a whole becomes mechanically complicated. . Further, since the cutting position is calculated based on the coordinates X and Y based on the target mark, and the cutting is performed while correcting the positional deviation in the XY direction and the θ direction, the cutting includes an assumed element.

【0010】その内部電極の撮像によるものの他に、う
ず電流式,静電容量式,超音波式の電気センサーをセラ
ミック積層体の上で移動し、内部電極が存在する部分で
生ずる電圧と内部電極が存在しない部分で生ずる電圧,
更には両者間を移動する段階で生ずる電圧の差から求め
られる波形により切断位置を検出することが提案されて
いる(特公平7ー97537号)。
In addition to the image pickup of the internal electrodes, an eddy current type, a capacitance type, or an ultrasonic type electric sensor is moved on the ceramic laminate, and the voltage generated at the portion where the internal electrodes exist and the internal electrode Voltage generated in the area where no
Further, it has been proposed to detect a cutting position by a waveform obtained from a voltage difference generated at a stage of moving between the two (Japanese Patent Publication No. 7-97537).

【0011】その切断位置を電気的に検出することでは
微妙に変化する波形から切断位置を決定しなければなら
ない。このため、熟練した技術が必要となり、特に、小
型の積層セラミック電子部品用を高精度に切断するには
対応が難しい。
By electrically detecting the cutting position, the cutting position must be determined from a subtly changing waveform. For this reason, skilled techniques are required, and it is particularly difficult to cut small multilayer ceramic electronic components with high precision.

【0012】[0012]

【発明が解決しようとする課題】本発明は、セラミック
積層体の切りたい位置を高精度に割り出し、また、セラ
ミック積層体の間で変形等によるバラ付きがあっても、
セラミック積層体を正確に切断可能な積層セラミック電
子部品の製造方法を提供することを目的とする。
SUMMARY OF THE INVENTION According to the present invention, a position to be cut of a ceramic laminate is determined with high precision.
An object of the present invention is to provide a method for manufacturing a multilayer ceramic electronic component capable of accurately cutting a ceramic laminate.

【0013】[0013]

【課題を解決するための手段】本発明の請求項1に係る
積層セラミック電子部品の製造方法においては、複数の
内部電極を縦横に並べて同じセラミックグリーンシート
の平面上に印刷し、そのセラミックグリーンシートを内
部電極と交互に複数積層させて部品複数個取り用のセラ
ミック積層体を形成し、このセラミック積層体を内部電
極の電極位置に応じて切断することにより部品単位の積
層セラミック素体を得るのに、可視光をセラミック積層
体に向けて光源より照射し、そのセラミック積層体の体
内を透過する可視光による画像を撮像カメラで捉え、こ
の撮像カメラで捉えた画像中の一列ずつの内部電極の画
像から当該一列分の切断位置データを画像解析処理装置
で求め、その画像解析処理装置で求めた一列毎の切断位
置データにより切断装置を移動制御させてセラミック積
層体を切断するようにされている。
According to a first aspect of the present invention, there is provided a method of manufacturing a multilayer ceramic electronic component, wherein a plurality of internal electrodes are arranged vertically and horizontally and printed on a plane of the same ceramic green sheet. Are alternately laminated with internal electrodes to form a ceramic laminate for obtaining a plurality of components, and the ceramic laminate is cut in accordance with the electrode positions of the internal electrodes to obtain a multilayer ceramic body for each component. Then, the visible light is emitted from the light source toward the ceramic laminate, an image of the visible light transmitted through the body of the ceramic laminate is captured by an imaging camera, and the internal electrodes of each row in the image captured by the imaging camera are captured. From the image, the cutting position data for one row is obtained by the image analysis processing device, and the cutting is performed using the cutting position data for each row obtained by the image analysis processing device. Device movement is controlled by being adapted to cut the ceramic laminate.

【0014】本発明の請求項2に係る積層セラミック電
子部品の製造方法においては、撮像カメラで捉えた画像
中の相隣り合う一列ずつの内部電極の画像から縁間幅の
中央位置を当該一列分の切断位置データとして画像解析
処理装置で求めるようにされている。
In the method for manufacturing a multilayer ceramic electronic component according to a second aspect of the present invention, the center position of the width between the edges is determined by the image of the internal electrodes in each adjacent row in the image captured by the imaging camera. Is obtained by the image analysis processing device as the cutting position data.

【0015】本発明の請求項3に係る積層セラミック電
子部品の製造方法においては、撮像カメラで捉えた画像
中の一列ずつの内部電極の画像から縁位置を当該一列分
の切断位置データとして画像解析処理装置で求めるよう
にされている。
According to a third aspect of the present invention, in the method of manufacturing a multilayer ceramic electronic component, the edge position is determined from the image of the internal electrodes in each row in the image captured by the imaging camera as cutting position data for the single row. It is required to be determined by the processing device.

【0016】[0016]

【発明の実施の形態】以下、添付図面を参照して説明す
ると、図1は積層セラミックコンデンサ等の積層セラミ
ック電子部品を製造するべく、部品複数個取り用のセラ
ミック積層体1を部品単位の積層セラミック素体として
切断する工程を示す。このセラミック積層体の切断工程
では、セラミック層によるマージンを取る積層セラミッ
ク素体の側部切断と、内部電極を露出する積層セラミッ
ク素体の端部切断とが個別に行われる。
DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Referring to the accompanying drawings, FIG. 1 shows a laminated ceramic laminate 1 for taking a plurality of components in order to manufacture a multilayer ceramic electronic component such as a multilayer ceramic capacitor. The process of cutting as a ceramic body is shown. In the cutting process of the ceramic laminated body, side cutting of the laminated ceramic body taking a margin by the ceramic layer and end cutting of the laminated ceramic body exposing the internal electrodes are individually performed.

【0017】その被切断物であるセラミック積層体1
は、複数の内部電極を縦横並べてセラミックグリーンシ
ートの平面内に印刷し、このセラミックグリーンシート
を内部電極と交互に複数積層すると共に、内部電極の形
成されていないセラミックグリーンシートを最外層に積
層させて加圧プレスすることにより切断処理工程前に形
成されている。
The ceramic laminate 1 as the object to be cut
Are printed in a plane of a ceramic green sheet by arranging a plurality of internal electrodes vertically and horizontally, and laminating a plurality of the ceramic green sheets alternately with the internal electrodes, and laminating a ceramic green sheet having no internal electrodes formed on the outermost layer. It is formed before the cutting process step by pressing under pressure.

【0018】そのセラミック積層体1の切断工程では、
セラミック積層体1を切断テーブル(図示せず)のテー
ブル上に載せ、可視光をセラミック積層体1に向けて光
源2より裏面側から照射し、このセラミック積層体1の
体内を透過する可視光による画像を撮像カメラ3で捉
え、その画像中の一列ずつの内部電極の画像から当該一
列分の切断位置データを画像解析処理装置4で求め、こ
の一列毎の切断位置データにより切断装置5を移動制御
させてセラミック積層体1を切断することが行われてい
る。
In the cutting step of the ceramic laminate 1,
The ceramic laminate 1 is placed on a table of a cutting table (not shown), and visible light is emitted from the light source 2 toward the ceramic laminate 1 from the back side, and the visible light is transmitted through the body of the ceramic laminate 1. The image is captured by the imaging camera 3, and the cutting position data for one row is obtained from the image of the internal electrode for each row in the image by the image analysis processing device 4, and the movement of the cutting apparatus 5 is controlled by the cutting position data for each row. The ceramic laminate 1 is cut in this way.

【0019】茲で用いられる可視光は、380nm〜7
50nm程度の波長のものであり、その可視光をセラミ
ック積層体1に照射すると、図2で示すようなセラミッ
ク積層体1の体内を透過する可視光による内部電極10
a,10b…の画像がセラミック層11の画像と鮮明に
区分けすることにより得られる。また、この可視光によ
ると、波長が短くなるに従い、赤,だいだい,黄色,
緑,青,藍,紫の色調を帯びた画像が得られる。
The visible light used here is 380 nm to 7 nm.
When the visible light is applied to the ceramic laminate 1, the internal electrode 10 is made of visible light transmitted through the body of the ceramic laminate 1 as shown in FIG.
are obtained by clearly separating the images of a, 10b,... from the image of the ceramic layer 11. Also, according to this visible light, as the wavelength becomes shorter, red, orange, yellow,
Images with green, blue, indigo and purple tones can be obtained.

【0020】その撮像カメラ3の画像に基づき、セラミ
ック層によるマージンを取る積層セラミック素体の側部
を切断するときは、画像中の相隣り合う一列ずつの内部
電極の画像10a,10b、10c,10d…における
縁点f,f、f,fから縁間幅Wを求め、この
縁間幅Wの中央位置Cを当該一列分の切断位置データ
として画像解析処理装置4で求める。その一列毎の切断
位置データにより切断装置5を移動制御し、一列ずつの
切りたい方向に沿って並ぶ内部電極の間を切断する。
When cutting the side of the laminated ceramic body taking a margin by the ceramic layer based on the image of the imaging camera 3, images 10a, 10b, 10c, The inter-edge width W is determined from the edge points f 1 , f 2 , f 3 , f 4 at 10d..., And the center position C 1 of the inter-edge width W is determined by the image analysis processing device 4 as the cutting position data for one row. . The movement of the cutting device 5 is controlled based on the cutting position data for each row, and the cutting is performed between the internal electrodes arranged in the cutting direction for each row.

【0021】また、内部電極を露出する積層セラミック
素体の両端部を切断するときは、撮像カメラ3で捉えた
画像中の一列ずつの内部電極の画像10a,10b、1
0c,10d…から各縁位置C,Cを当該一列分の
切断位置データとして画像解析処理装置4で求める。こ
の場合も同様に、一列毎の切断位置データにより切断装
置5を移動制御し、一列ずつの切りたい方向に並ぶ内部
電極の縁に沿って切断する。
When cutting both ends of the laminated ceramic body exposing the internal electrodes, the images 10a, 10b, 1
.. 0c, 10d,..., Each edge position C 2 , C 3 is determined by the image analysis processing device 4 as the cutting position data for one row. In this case as well, similarly, the movement of the cutting device 5 is controlled based on the cutting position data for each row, and the cutting is performed along the edges of the internal electrodes lined up in the direction desired to be cut row by row.

【0022】その切断装置5は、パルスモータ等で回動
するXY方向の駆動軸並びにθ方向の回転軸を備えた制
御台に搭載することにより、画像10a,10b、10
c,10d…の中央位置Cまたは各縁位置C,C
の切断位置データに応じて位置移動させられる。なお、
この切断装置5としては回転刃で切断するダイシングソ
ーまたは押切り刃で切断するナイフカッターを適用でき
る。
The cutting device 5 is mounted on a control table having a drive shaft in the X and Y directions rotated by a pulse motor or the like and a rotation axis in the θ direction, so that the images 10a, 10b, 10
c, the center position C 1 or the edge of the 10d ... position C 2, C 3
The position is moved according to the cutting position data. In addition,
As the cutting device 5, a dicing saw that cuts with a rotary blade or a knife cutter that cuts with a pressing blade can be applied.

【0023】このようにセラミック積層体を切断すれ
ば、セラミック積層体の切断位置を内部電極の画像から
高精度に決定でき、また、一列毎に切断位置を決定する
ことから、セラミック積層体の間で変形等によるバラ付
きがあっても、セラミック積層体1を正確に切断でき
る。このため、規定値のマージンを確実に確保する部品
単位の積層セラミック素体として切断できる。
By cutting the ceramic laminate in this manner, the cutting position of the ceramic laminate can be determined with high accuracy from the image of the internal electrode. Further, since the cutting position is determined for each row, the cutting position between the ceramic laminates can be reduced. Therefore, even if there is a variation due to deformation or the like, the ceramic laminate 1 can be cut accurately. For this reason, it can be cut as a multilayer ceramic body in component units that reliably secures a specified value margin.

【0024】[0024]

【発明の効果】以上の如く、本発明に係る積層セラミッ
ク電子部品の製造方法に依れば、可視光をセラミック積
層体に向けて光源より照射し、そのセラミック積層体の
体内を透過する可視光による画像を撮像カメラで捉え、
この画像中の一列ずつの内部電極の画像から当該一列分
の切断位置データを画像解析処理装置で求め、その一列
毎の切断位置データにより切断装置を移動制御させてセ
ラミック積層体を切断するため、セラミック積層体の切
断位置を安定よく高精度に割り出せ、規定値のマージン
を有する積層セラミック素体として正確に切断でき、ま
た、一列毎に切断位置を決定することから、セラミック
積層体の間で変形等によるバラ付きがあっても、セラミ
ック積層体を正確に切断できて歩留を向上できる。
As described above, according to the method for manufacturing a multilayer ceramic electronic component of the present invention, visible light is emitted from a light source toward a ceramic laminate, and visible light transmitted through the body of the ceramic laminate. Captured by the camera,
In order to cut the ceramic laminated body by controlling the movement of the cutting device according to the cutting position data for each row from the image of the internal electrodes in each row in this image by the image analysis processing device, and controlling the cutting device based on the cutting position data for each row, The cutting position of the ceramic laminate can be determined stably and with high precision, and it can be cut accurately as a laminated ceramic body with a specified value margin, and since the cutting position is determined for each row, deformation between the ceramic laminates Even if there are variations due to the above, the ceramic laminate can be cut accurately and the yield can be improved.

【図面の簡単な説明】[Brief description of the drawings]

【図1】本発明に係る積層セラミック電子部品の製造方
法を適用する装置を概略的に示す説明図である。
FIG. 1 is an explanatory view schematically showing an apparatus to which a method for manufacturing a multilayer ceramic electronic component according to the present invention is applied.

【図2】同装置の撮像カメラで得られる内部電極並びに
セラミック層の画像を示す説明図である。
FIG. 2 is an explanatory diagram showing images of internal electrodes and a ceramic layer obtained by an imaging camera of the device.

【符号の説明】[Explanation of symbols]

1 セラミック積層体 2 可視光の光源 3 撮像カメラ 4 画像解析処理装置 5 切断装置 10a,10b… 内部電極の画像 11 セラミック層の画像 W 隣り合う電極画像の縁間幅 C 隣り合う電極画像の中央位置 C,C 電極画像の縁位置DESCRIPTION OF SYMBOLS 1 Ceramic laminated body 2 Visible light source 3 Imaging camera 4 Image analysis processing apparatus 5 Cutting apparatus 10a, 10b ... Image of an internal electrode 11 Image of a ceramic layer W Width between edges of adjacent electrode images C 1 Center of adjacent electrode images Position C 2 , C 3 Electrode image edge position

───────────────────────────────────────────────────── フロントページの続き (72)発明者 鷹島 剛 秋田県由利郡仁賀保町平沢字前田151 テ ィーディーケイ エムシーシー株式会社内 (72)発明者 千葉 和規 東京都中央区日本橋一丁目13番1号 ティ ーディーケイ株式会社内 (72)発明者 金子 正明 東京都中央区日本橋一丁目13番1号 ティ ーディーケイ株式会社内 Fターム(参考) 5E001 AB03 AH01 AH06 AJ01 5E082 AB03 BC38 EE04 EE35 FG06 FG26 LL01 LL03 MM04 MM21 ────────────────────────────────────────────────── ─── Continuing on the front page (72) Inventor Tsuyoshi Takashima 151 Maeda, Hirasawa, Nikaho-cho, Yuri-gun, Akita Prefecture Inside TDCMC C.C. Within TDK Corporation (72) Inventor Masaaki Kaneko 1-1-13 Nihonbashi, Chuo-ku, Tokyo F-term within TDK Corporation 5E001 AB03 AH01 AH06 AJ01 5E082 AB03 BC38 EE04 EE35 FG06 FG26 LL01 LL03 MM04 MM21

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】 複数の内部電極を縦横に並べてセラミッ
クグリーンシートの平面上に印刷し、そのセラミックグ
リーンシートを内部電極と交互に複数積層させて部品複
数個取り用のセラミック積層体を形成し、このセラミッ
ク積層体を内部電極の電極位置に応じて切断することに
より部品単位の積層セラミック素体を得るのに、 可視光をセラミック積層体に向けて光源より照射し、そ
のセラミック積層体の体内を透過する可視光による画像
を撮像カメラで捉え、この撮像カメラで捉えた画像中の
一列ずつの内部電極の画像から当該一列分の切断位置デ
ータを画像解析処理装置で求め、その画像解析処理装置
で求めた一列毎の切断位置データにより切断装置を移動
制御させてセラミック積層体を切断するようにしたこと
を特徴とする積層セラミック電子部品の製造方法。
1. A plurality of internal electrodes are vertically and horizontally arranged and printed on a plane of a ceramic green sheet, and the plurality of ceramic green sheets are alternately laminated with the internal electrodes to form a ceramic laminate for obtaining a plurality of components. In order to obtain a multilayer ceramic body for each component by cutting the ceramic multilayer body according to the electrode position of the internal electrode, visible light is irradiated from a light source toward the ceramic multilayer body, and the inside of the ceramic multilayer body is illuminated. An image by the transmitted visible light is captured by the imaging camera, and the cutting position data for the one row is obtained by the image analysis processing apparatus from the image of the internal electrode of each row in the image captured by the imaging camera, and the image analysis processing apparatus performs the processing. The ceramic laminate is characterized by cutting the ceramic laminate by controlling the movement of the cutting device based on the obtained cutting position data for each row. Click method of manufacturing an electronic component.
【請求項2】 撮像カメラで捉えた画像中の相隣り合う
一列ずつの内部電極の画像から縁間幅の中央位置を当該
一列分の切断位置データとして画像解析処理装置で求め
るようにしたことを特徴とする請求項1に記載の積層セ
ラミック電子部品の製造方法。
2. The method according to claim 1, wherein the center position of the width between the edges is obtained from the image of the internal electrodes in each adjacent row in the image captured by the imaging camera as cutting position data for the single row by the image analysis processing device. The method for manufacturing a multilayer ceramic electronic component according to claim 1.
【請求項3】 撮像カメラで捉えた画像中の一列ずつの
内部電極の画像から縁位置を当該一列分の切断位置デー
タとして画像解析処理装置で求めるようにしたことを特
徴とする請求項1に記載の積層セラミック電子部品の製
造方法。
3. The image analysis processing device according to claim 1, wherein an edge position is obtained from the image of the internal electrode in each row in the image captured by the imaging camera as cutting position data for the row. A manufacturing method of the multilayer ceramic electronic component according to the above.
JP2001096604A 2001-03-29 2001-03-29 Method for manufacturing laminated ceramic electronic component Pending JP2002299153A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001096604A JP2002299153A (en) 2001-03-29 2001-03-29 Method for manufacturing laminated ceramic electronic component

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001096604A JP2002299153A (en) 2001-03-29 2001-03-29 Method for manufacturing laminated ceramic electronic component

Publications (1)

Publication Number Publication Date
JP2002299153A true JP2002299153A (en) 2002-10-11

Family

ID=18950502

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001096604A Pending JP2002299153A (en) 2001-03-29 2001-03-29 Method for manufacturing laminated ceramic electronic component

Country Status (1)

Country Link
JP (1) JP2002299153A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7171095B2 (en) 2003-08-28 2007-01-30 Canon Kabushiki Kaisha Optical device and method of manufacturing the same
CN100336142C (en) * 2003-09-19 2007-09-05 株式会社村田制作所 Cutting device and method

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7171095B2 (en) 2003-08-28 2007-01-30 Canon Kabushiki Kaisha Optical device and method of manufacturing the same
CN100336142C (en) * 2003-09-19 2007-09-05 株式会社村田制作所 Cutting device and method

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