JP2002294481A - Electrolysis apparatus for manufacturing metal foil - Google Patents
Electrolysis apparatus for manufacturing metal foilInfo
- Publication number
- JP2002294481A JP2002294481A JP2001095612A JP2001095612A JP2002294481A JP 2002294481 A JP2002294481 A JP 2002294481A JP 2001095612 A JP2001095612 A JP 2001095612A JP 2001095612 A JP2001095612 A JP 2001095612A JP 2002294481 A JP2002294481 A JP 2002294481A
- Authority
- JP
- Japan
- Prior art keywords
- rotating cathode
- metal foil
- electrolytic
- plate
- supply port
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011888 foil Substances 0.000 title claims abstract description 87
- 239000002184 metal Substances 0.000 title claims abstract description 86
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 86
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 39
- 238000005868 electrolysis reaction Methods 0.000 title abstract description 6
- 239000008151 electrolyte solution Substances 0.000 claims abstract description 33
- 239000007788 liquid Substances 0.000 claims abstract description 23
- 238000006243 chemical reaction Methods 0.000 claims abstract description 6
- 230000008021 deposition Effects 0.000 claims abstract description 3
- 239000003792 electrolyte Substances 0.000 claims description 37
- 230000002093 peripheral effect Effects 0.000 claims description 15
- 238000004070 electrodeposition Methods 0.000 claims description 9
- 238000000151 deposition Methods 0.000 claims description 2
- 239000000243 solution Substances 0.000 abstract description 2
- 239000002659 electrodeposit Substances 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 24
- 239000011889 copper foil Substances 0.000 description 24
- 230000002159 abnormal effect Effects 0.000 description 8
- 238000009826 distribution Methods 0.000 description 8
- 238000001556 precipitation Methods 0.000 description 7
- 239000000463 material Substances 0.000 description 6
- 238000005192 partition Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000011835 investigation Methods 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 230000003068 static effect Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- 230000001174 ascending effect Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910000365 copper sulfate Inorganic materials 0.000 description 1
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
- C25D1/00—Electroforming
- C25D1/04—Wires; Strips; Foils
-
- C—CHEMISTRY; METALLURGY
- C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
- C25C—PROCESSES FOR THE ELECTROLYTIC PRODUCTION, RECOVERY OR REFINING OF METALS; APPARATUS THEREFOR
- C25C1/00—Electrolytic production, recovery or refining of metals by electrolysis of solutions
- C25C1/12—Electrolytic production, recovery or refining of metals by electrolysis of solutions of copper
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、金属箔の電解製造
装置に関し、特に、金属箔の箔幅方向における厚みの均
一化を図る製造技術に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a metal foil electrolytic manufacturing apparatus, and more particularly, to a manufacturing technique for uniforming the thickness of a metal foil in a foil width direction.
【０００２】[0002]
【従来の技術】近年、金属箔は、プリント配線板材料で
ある電解銅箔を代表として、様々な用途に利用されて、
大量に製造されている。このような金属箔の製造方法と
しては、電解反応を利用したものが知られている。2. Description of the Related Art In recent years, metal foils have been used in various applications, such as electrolytic copper foils as printed wiring board materials.
It is manufactured in large quantities. As a method for producing such a metal foil, a method utilizing an electrolytic reaction is known.
【０００３】この電解反応を利用した金属箔の電解製造
装置としては、例えば、図４に示すドラム状の回転陰極
を用いて、金属箔を連続的に製造するものが用いられ
る。この図４に示す金属箔電解製造装置１は、金属箔を
電着させるドラム状の回転陰極２と、該回転陰極２の周
面形状に沿って対向配置した陽極３と、回転陰極２と陽
極３との間に回転陰極２の下方側から電解液を供給する
電解液供給口４を有する液供給手段５とを備え、この液
供給手段５から電解液を供給しながら電解反応により回
転陰極２周面に金属を電着し、電着した金属箔６を回転
陰極２から連続的に剥がし取るようにされたものであ
る。As an apparatus for electrolytically producing metal foil utilizing this electrolytic reaction, for example, an apparatus for continuously producing metal foil using a drum-shaped rotating cathode shown in FIG. 4 is used. A metal foil electrolytic production apparatus 1 shown in FIG. 4 includes a drum-shaped rotating cathode 2 for electrodepositing a metal foil, an anode 3 disposed to face the peripheral surface of the rotating cathode 2, a rotating cathode 2 and an anode. A liquid supply means 5 having an electrolytic solution supply port 4 for supplying an electrolytic solution from below the rotating cathode 2 between the rotating cathode 2 and the rotating cathode 2 by an electrolytic reaction while supplying the electrolytic solution from the liquid supplying means 5. A metal is electrodeposited on the peripheral surface, and the electrodeposited metal foil 6 is continuously peeled off from the rotating cathode 2.
【０００４】このような電解製造装置により得られる金
属箔は、各用途に対応できる強度、表面性状、厚み均一
性等の多くの特性要求があり、それらを満足したものを
製造しなければならない。特に、プリント配線板材料と
して用いられる銅箔では、強度特性や表面性状はもとよ
り、箔厚みの均一性が金属箔の品質として非常に重要な
ものとされる。[0004] The metal foil obtained by such an electrolytic manufacturing apparatus has many characteristic requirements such as strength, surface properties, thickness uniformity, etc., which can be used for various applications, and it is necessary to produce a metal foil satisfying these requirements. In particular, in a copper foil used as a material for a printed wiring board, uniformity of the foil thickness as well as the strength characteristics and surface properties are very important as the quality of the metal foil.
【０００５】この金属箔電解製造装置により得られる金
属箔は、回転陰極に電析した金属を連続的に剥がし取る
ことで、長尺の金属箔をロール状にして製造されること
が多い。このような場合、長手方向における金属箔の厚
みは、回転陰極の回転速度をコントロールすることによ
り比較的容易に均一制御できるものの、金属箔の幅方向
おいて、その厚みを均一に制御することは容易ではな
い。[0005] In many cases, the metal foil obtained by the metal foil electrolytic manufacturing apparatus is manufactured by continuously stripping the metal deposited on the rotating cathode to make a long metal foil into a roll. In such a case, the thickness of the metal foil in the longitudinal direction can be relatively easily and uniformly controlled by controlling the rotation speed of the rotating cathode, but it is not possible to uniformly control the thickness in the width direction of the metal foil. It's not easy.
【０００６】従来より、この金属箔電解製造装置により
得られる金属箔の幅方向における厚み均一性を向上する
ために、回転陰極と対向する陽極を幅方向に分割し、電
解電流の供給を幅方向で制御する対策が提案されてい
る。Conventionally, in order to improve the thickness uniformity in the width direction of a metal foil obtained by this metal foil electrolytic manufacturing apparatus, the anode facing the rotating cathode is divided in the width direction to supply the electrolytic current in the width direction. There is proposed a countermeasure to control by.
【０００７】しかしながら、このような電流供給方法の
改善は、金属箔の幅方向における厚みの均一性をある程
度は制御できるものの、十分に満足できるものではな
い。また、分割した陽極に異なる電解電流を供給できる
ようにするためには、金属箔電解製造装置構造が複雑に
なり、装置設計的にも好ましくない。However, such an improvement in the current supply method can control the uniformity of the thickness of the metal foil in the width direction to some extent, but is not sufficiently satisfactory. Further, in order to supply different electrolytic currents to the divided anodes, the structure of the metal foil electrolytic manufacturing apparatus becomes complicated, which is not preferable in terms of apparatus design.
【０００８】更に、昨今の金属箔に対する品質要求は、
各用途の技術進歩に伴い厳しくなってきており、特に、
薄い箔厚みの金属箔を強く要望する傾向がある。例え
ば、プリント配線板材料として用いられている電解銅箔
で見ると、従来３５μｍ、１８μｍの箔厚みが主流であ
ったが、最近では、１２μｍ、９μｍという極薄銅箔の
要求が高まっている。このような極薄銅箔を上記金属箔
電解製造装置で製造する場合、幅方向の厚み均一性が精
密に維持されていないと、回転陰極から金属箔を剥がし
て巻き取りする際、箔にシワを生じてしまい製品として
使用が困難となる。従来提案されている金属箔幅方向の
厚みの均一性を図るための対応では、このような極薄の
金属箔を製造するために必要な幅方向厚みの均一性を精
密に制御することが難しい。そのため、極薄銅箔のよう
な薄い厚みの金属箔を安定して市場に供給するには、従
来よりも更に精密に幅方向厚みを均一化できる金属箔電
解製造技術を確立することが必要不可欠なものといえ
る。Further, quality requirements for metal foils in recent years are as follows:
It is getting stricter with the technical progress of each application.
There is a tendency to strongly demand a metal foil having a small foil thickness. For example, in the case of electrolytic copper foil used as a material for a printed wiring board, a foil thickness of 35 μm or 18 μm has conventionally been the mainstream, but recently, a demand for an ultra-thin copper foil of 12 μm or 9 μm has been increasing. When such an ultra-thin copper foil is manufactured by the above-mentioned metal foil electrolytic manufacturing apparatus, if the thickness uniformity in the width direction is not precisely maintained, when the metal foil is peeled off from the rotating cathode and wound up, the foil is wrinkled. And it becomes difficult to use it as a product. It is difficult to precisely control the uniformity of the thickness in the width direction required for manufacturing such an ultrathin metal foil in the conventional measures for achieving the uniformity of the thickness in the width direction of the metal foil. . Therefore, in order to stably supply thin metal foil such as ultra-thin copper foil to the market, it is essential to establish a metal foil electrolytic manufacturing technology that can make the width direction thickness more uniform than before. It can be said that.
【０００９】本発明は、上記のような事情を背景になさ
れたもので、ドラム状の回転陰極を用いて電析により金
属箔を連続的に製造する場合において、金属箔の幅方向
における箔厚みを精密に均一制御できる金属箔電解製造
装置の提供を目的としている。SUMMARY OF THE INVENTION The present invention has been made in view of the above-mentioned circumstances, and when a metal foil is continuously manufactured by electrodeposition using a drum-shaped rotating cathode, the foil thickness in the width direction of the metal foil is reduced. It is an object of the present invention to provide a metal foil electrolytic manufacturing apparatus capable of precisely and uniformly controlling the production.
【００１０】[0010]
【課題を解決するための手段】上記課題を解決するため
に、本発明者等は、ドラム状の回転陰極を用いる金属箔
電解製造装置を詳細に検討をしたところ、回転陰極と陽
極との間に供給する電解液の液流動状態が、金属箔の幅
方向における厚みの均一性に大きく影響することに着目
し、本発明を想到するに至った。Means for Solving the Problems In order to solve the above-mentioned problems, the present inventors have studied in detail a metal foil electrolytic production apparatus using a drum-shaped rotating cathode, and found that a metal foil electrolytic manufacturing apparatus is provided between the rotating cathode and the anode. The present invention was conceived, focusing on the fact that the liquid flow state of the electrolytic solution supplied to the metal foil greatly affects the uniformity of the thickness of the metal foil in the width direction.
【００１１】本発明は、金属箔を電着させるドラム状の
回転陰極と、該回転陰極の周面形状に沿って対向配置し
た陽極と、回転陰極と陽極との間に回転陰極の下方側か
ら電解液を供給する電解液供給口を有する液供給手段と
を備え、液供給手段から電解液を供給しながら電解反応
により回転陰極周面に金属を電着し、電着した金属箔を
回転陰極から連続的に剥がし取るものである金属箔電解
製造装置において、液供給手段は、電解液供給口の上方
に、回転陰極幅方向にわたる板状ダンパー体を備えたも
のとした。The present invention provides a rotating cathode in the form of a drum on which a metal foil is electrodeposited, an anode opposed to the rotating cathode along the peripheral shape thereof, and a rotating cathode disposed between the rotating cathode and a lower side of the rotating cathode. A liquid supply means having an electrolytic solution supply port for supplying an electrolytic solution, wherein a metal is electrodeposited on a rotating cathode peripheral surface by an electrolytic reaction while supplying the electrolytic solution from the liquid supplying means, and the electrodeposited metal foil is placed on the rotating cathode. In the metal foil electrolytic production apparatus which is continuously peeled off from the electrode, the liquid supply means has a plate-shaped damper body extending in the width direction of the rotating cathode above the electrolyte supply port.
【００１２】金属箔を電着させるドラム状の回転陰極と
該回転陰極の周面形状に沿って対向配置した陽極との間
に、回転陰極の下方側からに電解液を供給する場合、図
４の破線矢印で示すように、供給される電解液は、電解
液供給口と対向する位置の回転陰極表面に衝突し、回転
陰極の周面形状に沿って二方向に分かれて上昇する液流
動を形成する。When an electrolytic solution is supplied from below the rotating cathode between a rotating cathode in the form of a drum on which a metal foil is electrodeposited and an anode arranged along the peripheral surface of the rotating cathode, FIG. As indicated by the dashed arrow, the supplied electrolyte collides with the surface of the rotating cathode at a position facing the electrolyte supply port, and separates the liquid flow rising in two directions along the peripheral surface shape of the rotating cathode. Form.
【００１３】この電解液供給口と対向する位置の回転陰
極表面近傍では、電解液が回転陰極表面に衝突するた
め、渦流状態を生じやすく、回転陰極周面形状に沿って
上昇する液流動状態と比べ、非常に複雑な液流動とな
る。また、この電解液供給口と対向する位置の回転陰極
表面では、新たな電解液が連続的に供給されるので、電
析に供することになる金属イオンは常に十分に供給され
ている状態である。このことを考慮すると、電解液供給
口と対向する位置の回転陰極表面では、その液流動は複
雑なため、他の回転陰極表面に比べ、幅方向で見た場合
の電解液の供給量は不均一になり易いものと考えられ
る。そして、電解液が衝突する回転陰極表面では、電析
に供する金属イオンが常時十分に供給されているため、
金属箔の幅方向における厚みの不均一を引き起こす電析
が生じているものと、本発明者等は推測したのである。In the vicinity of the surface of the rotating cathode opposite to the electrolyte supply port, the electrolyte collides with the surface of the rotating cathode, so that a vortex state is easily generated, and the liquid flowing state rises along the peripheral surface of the rotating cathode. In comparison, the liquid flow becomes very complicated. Further, on the surface of the rotating cathode opposite to the electrolyte supply port, new electrolyte is continuously supplied, so that metal ions to be subjected to electrodeposition are always sufficiently supplied. . In consideration of this, the flow of the electrolyte is complicated on the surface of the rotating cathode facing the electrolyte supply port, so that the supply amount of the electrolyte when viewed in the width direction is smaller than that on the other rotating cathode surfaces. It is considered that it is easy to be uniform. Then, on the rotating cathode surface where the electrolyte collides, metal ions to be used for electrodeposition are always sufficiently supplied,
The present inventors have presumed that electrodeposition causing unevenness of the thickness of the metal foil in the width direction has occurred.
【００１４】そこで、本発明者等は、この電解液供給口
と対向する位置の回転陰極表面で生じる複雑な液流動状
態を解消すべく、電解液供給口の上方に、回転陰極幅方
向にわたる板状ダンパー体を設けるようにしたのであ
る。この板状ダンパー体を設けて、電解液供給口と対向
する位置の回転陰極表面付近で生じる複雑な液流動状態
を解消した結果、本発明者等の推測通り、幅方向におけ
る厚みの均一性が大きく向上できることを見出したので
ある。そして、この板状ダンパー体を設置することで、
金属箔表面に生じる異常析出も低減される効果が有るこ
とも判明したのである。In order to eliminate the complicated liquid flowing state generated on the surface of the rotating cathode at a position facing the electrolyte supply port, the present inventors set a plate extending in the width direction of the rotating cathode above the electrolyte supply port. A damper body was provided. By providing this plate-shaped damper body, as a result of eliminating a complicated liquid flow state generated near the surface of the rotating cathode at a position facing the electrolyte supply port, the uniformity of the thickness in the width direction is reduced as estimated by the present inventors. They found that it could be greatly improved. And by installing this plate-shaped damper body,
It has also been found that there is an effect of reducing abnormal precipitation that occurs on the metal foil surface.
【００１５】本発明に係る金属箔電解製造装置の板状ダ
ンパー体は、電解液供給口から回転陰極表面に向けて供
給される電解液が、直接的に回転陰極表面に衝突するよ
うな液流動状態となることを解消できればよく、その形
状、配置等に制約はない。要するに、電解供給口と回転
陰極表面との間に、回転陰極幅方向にわたって設けられ
た板状ダンパー体が、電解液供給口から回転陰極表面に
向けて供給される電解液の流動方向を妨げる状態となる
ものであれば、どのような形状、配置を行っても構わな
いものである。[0015] The plate-like damper body of the metal foil electrolytic manufacturing apparatus according to the present invention has a liquid flow such that the electrolyte supplied from the electrolyte supply port toward the rotating cathode surface directly collides with the rotating cathode surface. It is only necessary that the state can be eliminated, and there is no restriction on the shape, arrangement, and the like. In short, a state in which the plate-shaped damper body provided across the width of the rotating cathode between the electrolytic supply port and the rotating cathode surface obstructs the flow direction of the electrolyte supplied from the electrolyte supply port toward the rotating cathode surface. Any shape and arrangement may be used as long as
【００１６】そして、本発明に係る金属箔電解製造装置
の板状ダンパー体には、板幅中心に、板長手方向に延び
る分流用突起部を設けることが望ましい。電解液供給口
の上方に板状ダンパー体を設けると、供給される電解液
は板状ダンパー体に直接衝突し、その部分で渦流等の複
雑な液流動を形成しやすい。そこで、この板状ダンパー
体の板幅中心に、分流用の突起部を板長手方向に設けて
おけば、板状ダンパー体に直接衝突する電解液は分流用
突起部により２方向に分けられ、回転陰極周面形状に沿
ってスムーズに上昇することになる。この分流用突起部
を板状ダンパー体へ設けることにより、金属箔の幅方向
における厚み均一性をより確実に向上できるものとな
る。It is desirable that the plate-shaped damper body of the metal foil electrolytic manufacturing apparatus according to the present invention be provided with a flow dividing protrusion extending in the plate longitudinal direction at the plate width center. When the plate-shaped damper body is provided above the electrolyte supply port, the supplied electrolyte directly collides with the plate-shaped damper body, and a complicated liquid flow such as a vortex flow is easily formed at that portion. Therefore, if a diverting protrusion is provided in the longitudinal direction of the plate at the center of the plate width of the plate-shaped damper body, the electrolyte that directly collides with the plate-shaped damper body is divided into two directions by the diverting protrusion. It will rise smoothly along the rotating cathode peripheral surface shape. By providing the flow dividing projections on the plate-shaped damper body, the thickness uniformity of the metal foil in the width direction can be more reliably improved.
【００１７】また、本発明に係る金属箔電解製造装置で
は、電解液供給口が回転陰極幅方向に複数に分割されて
おり、分割された電解液供給口から供給する電解液流量
を調整できるものであることが好ましい。このようにす
ると、金属箔の幅方向における厚みの均一性をより精密
に制御することが容易となる。本発明に係る金属箔電解
製造装置は、高い生産効率を実現するため、比較的大型
の回転陰極や陽極を使用されることが多いが、このよう
な大型の金属箔電解製造装置では、装置を構成する回転
陰極や陽極の材質を均一に形成することが難しく、大型
になるほど、装置毎の電析の偏りが生じやすい。そのた
め、製造される金属箔の幅方向における厚みバラツキ
も、装置毎に異なる傾向がある。このような装置毎の電
析の偏りがある場合であっても、各装置での箔幅方向の
厚みバラツキに合わせて、分割された電解液供給口から
供給する電解液の流量を調節するようにすると、本発明
に係る板状ダンパー体の効果と相乗して、金属箔幅方向
における厚みの均一性を精密に制御することが容易に行
えることになる。In the metal foil electrolytic manufacturing apparatus according to the present invention, the electrolytic solution supply port is divided into a plurality in the width direction of the rotating cathode, and the flow rate of the electrolytic solution supplied from the divided electrolytic solution supply port can be adjusted. It is preferred that This makes it easier to more precisely control the uniformity of the thickness of the metal foil in the width direction. The metal foil electrolytic manufacturing apparatus according to the present invention often uses a relatively large rotating cathode or anode in order to achieve high production efficiency. It is difficult to uniformly form the materials of the rotating cathode and the anode that constitute the rotating cathode and the anode. Therefore, the thickness variation in the width direction of the manufactured metal foil also tends to be different for each device. Even in such a case where the electrodeposition is biased for each device, the flow rate of the electrolytic solution supplied from the divided electrolytic solution supply ports is adjusted according to the thickness variation in the foil width direction in each device. Then, the uniformity of the thickness in the metal foil width direction can be easily controlled precisely in synergy with the effect of the plate-shaped damper body according to the present invention.
【００１８】[0018]
【発明の実施の形態】以下、本発明の好適な実施形態に
ついて説明する。DESCRIPTION OF THE PREFERRED EMBODIMENTS Preferred embodiments of the present invention will be described below.
【００１９】本実施形態の金属箔電解製造装置は、従来
から使用されている装置と基本的に同様な構造で、その
断面概略を図４に示している。金属箔電解製造装置１
は、金属箔を電着させるドラム状の回転陰極２と、回転
陰極２の周面形状に沿って対向配置した陽極３とを備え
ている。この回転陰極２と陽極３とは、図示せぬ給電装
置と接続されている。そして、回転陰極２は、容積のほ
ぼ半分が電解液に浸漬するようにされている。陽極３
は、二分割されており、その分割された陽極３の間に
は、回転陰極２下方から電解液を供給するための電解液
供給口４を有する電解液供給手段５が設けられている。
この電解液供給口４から回転陰極２に向けて電解液を供
給すると、図４の破線で示すように、電解液は回転陰極
２周面形状に沿って上昇するように流動し、電解槽７に
オーバーフローするようになっている。回転陰極２周面
に電析した金属箔６は、回転陰極２から剥がされ、ガイ
ドロール８を介して巻き取りロール９に巻き取られる。The apparatus for electrolytically manufacturing a metal foil according to this embodiment has a structure basically similar to that of a conventionally used apparatus, and FIG. 4 shows a schematic sectional view thereof. Metal foil electrolytic production equipment 1
Is provided with a drum-shaped rotating cathode 2 on which a metal foil is electrodeposited, and an anode 3 opposed to the rotating cathode 2 along the peripheral surface shape of the rotating cathode 2. The rotating cathode 2 and the anode 3 are connected to a power supply device (not shown). And, about half of the volume of the rotating cathode 2 is immersed in the electrolytic solution. Anode 3
Is divided into two, and between the divided anodes 3 is provided an electrolytic solution supply means 5 having an electrolytic solution supply port 4 for supplying an electrolytic solution from below the rotating cathode 2.
When the electrolytic solution is supplied from the electrolytic solution supply port 4 toward the rotating cathode 2, the electrolytic solution flows so as to rise along the peripheral surface shape of the rotating cathode 2, as shown by the broken line in FIG. Overflow. The metal foil 6 deposited on the peripheral surface of the rotating cathode 2 is peeled off from the rotating cathode 2 and wound up on a winding roll 9 via a guide roll 8.
【００２０】図１には、図４のＡで囲まれた部分を拡大
した斜視図を示している。電解液供給手段５の電解液供
給口４は、回転陰極２の幅方向に複数分割されており、
この分割された各電解液供給口４’、４’・・・・に
は、図示を省略するが、供給する電解液の流量を調整す
る流量調整手段がそれぞれ備えられている。FIG. 1 is an enlarged perspective view of a portion surrounded by A in FIG. The electrolyte supply port 4 of the electrolyte supply means 5 is divided into a plurality in the width direction of the rotating cathode 2,
Each of the divided electrolytic solution supply ports 4 ′, 4 ′,... Is provided with flow rate adjusting means for adjusting the flow rate of the supplied electrolytic solution, although not shown.
【００２１】図２には、本実施形態における金属箔電解
製造装置１に板状ダンパー体を電解液供給口４の上部に
配置した断面拡大図を示している。また、図３は、その
板状ダンパー体を部分的に拡大して斜視図として示して
いる。板状ダンパー体１０は、回転陰極２の幅と略等し
い長さで、電解液供給口４の幅よりも若干長い板幅を有
したものであり、その板幅中央に、分流用突起部１１が
板長手方向にわたって形成されている。また、板状ダン
パー体１０の下面側、即ち、電解液供給口４に対面する
側には、分割された電解液供給口４’に合わせて仕切壁
１２が設けられている。そして、この仕切壁１２は、電
解液供給口４の両側に位置する固定板１３に立設されて
いる。従って、板状ダンパー体１０の下部には、分割さ
れた電解液供給口４’、４’・・・に合わせて液流出口
１４を形成するようになっている。FIG. 2 is an enlarged cross-sectional view of the metal foil electrolytic manufacturing apparatus 1 according to the present embodiment, in which a plate-shaped damper is disposed above the electrolyte supply port 4. FIG. 3 is a partially enlarged perspective view of the plate-shaped damper body. The plate-shaped damper body 10 has a length substantially equal to the width of the rotating cathode 2 and has a plate width slightly longer than the width of the electrolyte supply port 4. Are formed over the longitudinal direction of the plate. In addition, a partition wall 12 is provided on the lower surface side of the plate-shaped damper body 10, that is, on the side facing the electrolyte supply port 4 in accordance with the divided electrolyte supply port 4 '. The partition wall 12 is erected on a fixed plate 13 located on both sides of the electrolyte supply port 4. Therefore, a liquid outlet 14 is formed in the lower part of the plate-shaped damper body 10 in accordance with the divided electrolytic solution supply ports 4 ', 4',....
【００２２】この図２及び図３で示す板状ダンパー体１
０を電解液供給口４の上部に配置すると、図２の矢印で
示すように、電解液供給口４から供給される電解液は、
板状ダンパー体１０に衝突することになり、また、分流
用突起部１１により、その流動方向を変更し二方向に分
かれ、回転陰極２周面形状に沿って上昇する液流動状態
を形成することになる。The plate-like damper 1 shown in FIGS. 2 and 3
When 0 is disposed above the electrolyte supply port 4, the electrolyte supplied from the electrolyte supply port 4 as shown by the arrow in FIG.
Collision with the plate-shaped damper body 10 and formation of a liquid flowing state in which the flow direction is changed by the branching projection 11 to be divided into two directions and ascending along the peripheral surface shape of the rotating cathode 2. become.
【００２３】次ぎに、本実施形態に係る金属箔電解製造
装置により、金属箔として銅箔を製造し、製造された銅
箔の箔幅方向における厚み分布及び表面性状を調査した
結果について説明する。Next, a description will be given of the results obtained by producing a copper foil as a metal foil using the metal foil electrolytic production apparatus according to the present embodiment, and examining the thickness distribution and surface properties of the produced copper foil in the foil width direction.
【００２４】金属箔として銅箔を製造する場合、周面表
面がＴｉ製のドラム状回転陰極（直径３ｍ、幅１．３５
ｍ）と、ＤＳＡと呼ばれる不溶性陽極とを用い、回転陰
極と不溶性陽極との間隙が約２０ｍｍとなるように配置
した銅箔電解製造装置を使用した。そして、分流用突起
部を設けた板状ダンパー体はＴｉ材により形成し（仕切
板、固定板もＴｉ材にて形成）、回転陰極と陽極との間
の中間位置で、電解液供給口の上方に配置した。この板
状ダンパー体の設置は、陽極と固定板との間に絶縁材を
介在させて行い、板状ダンパー体に電解電流が流れない
ようにした。また、電解液には硫酸銅溶液を用いた。In the case of producing a copper foil as a metal foil, a drum-shaped rotating cathode whose peripheral surface is made of Ti (diameter 3 m, width 1.35)
m) and an insoluble anode called DSA, and a copper foil electrolytic production apparatus arranged so that a gap between the rotating cathode and the insoluble anode was about 20 mm. Then, the plate-shaped damper body provided with the branching projection is formed of a Ti material (the partition plate and the fixing plate are also formed of the Ti material), and at an intermediate position between the rotating cathode and the anode, the electrolyte supply port is provided. Arranged above. The plate-shaped damper was installed with an insulating material interposed between the anode and the fixed plate so that no electrolytic current flowed through the plate-shaped damper. Further, a copper sulfate solution was used as an electrolytic solution.
【００２５】この銅箔電解製造装置において、板状ダン
パー体を配置した場合と配置してない場合とで、それぞ
れ電解処理をして銅箔を製造し、銅箔幅方向における厚
み分布及び表面性状を比較調査した。In this copper foil electrolytic manufacturing apparatus, a copper foil is manufactured by performing an electrolytic treatment in each of the case where the plate-shaped damper body is arranged and the case where the plate-shaped damper body is not arranged, and the thickness distribution and surface texture in the copper foil width direction are produced. Was compared.
【００２６】まず、銅箔幅方向における厚み分布を測定
した結果について述べる。この幅方向における厚み分布
測定は、回転陰極を静止した状態で電解液を供給して電
解処理した銅箔によって行った。幅方向の厚み分布状態
を測定したサンプルは、厚さ７０μｍ相当の銅箔が形成
されるように電解処理を行い、電解処理停止後、回転陰
極の半周面に電析した銅箔を剥がし取ったものを用い
た。この静止電解により得られたサンプルから、回転陰
極周面の円周方向で、長さ１５０ｍｍ×幅１３５０ｍｍ
（回転陰極幅）の帯状試料を、電解液供給口と対向する
部分を中心に、前後２枚ずつ、合計４枚切り出した（Ａ
〜Ｄ）。First, the result of measuring the thickness distribution in the copper foil width direction will be described. The measurement of the thickness distribution in the width direction was performed using a copper foil subjected to electrolytic treatment by supplying an electrolytic solution while the rotating cathode was stationary. The sample for which the thickness distribution in the width direction was measured was subjected to electrolytic treatment so as to form a copper foil equivalent to a thickness of 70 μm, and after the electrolytic treatment was stopped, the copper foil deposited on the half circumferential surface of the rotating cathode was peeled off. Was used. From the sample obtained by this static electrolysis, a length of 150 mm × a width of 1350 mm was obtained in the circumferential direction of the rotating cathode circumferential surface.
(Rotating cathode width) A total of four strips were cut out, two at the front and two at the part facing the electrolyte supply port (A).
~ D).
【００２７】そして、この切り出した各帯状試料は、さ
らに、幅１０ｍｍ×長さ１００ｍｍの短冊状に細分し
た。この細分により帯状試料は、幅方向に８４個の短冊
に分割された。そして、この短冊の各質量を測定するこ
とで、質量厚み（ｇ／ｍ２）を算出し、この値を銅箔の
厚みとした。Each of the cut-out strip-shaped samples was further subdivided into strips having a width of 10 mm and a length of 100 mm. By this subdivision, the strip sample was divided into 84 strips in the width direction. Then, the mass thickness (g / m 2 ) was calculated by measuring each mass of the strip, and this value was defined as the thickness of the copper foil.
【００２８】静止電解から切り出した４つ帯状試料（Ａ
〜Ｄ）について、８４分割した短冊の各質量を測定し、
その幅方向位置に合わせてプロットしたものを図５及び
図６に示す。Four strip samples (A) cut out from the static electrolysis
-D), the mass of each of the 84 divided strips was measured,
FIGS. 5 and 6 show plots corresponding to the position in the width direction.
【００２９】図５は板状ダンパー体を配置した場合であ
り、図６は板状ダンパー体を配位置していない場合を示
している。この帯状試料Ａ〜Ｄにおいて、帯状試料Ｂと
Ｃとの間が電解液供給口に対向する部分に相当する位置
である。尚、図５及び図６では、帯状試料から８４分割
した短冊のうち最大質量厚み値を特定し、各短冊の質量
厚み値と最大質量厚み値との差をそれぞれ計算し、各質
量厚み差を最大質量厚み値で割ることより、各厚み比率
（％）値を算出して、その値をプロットしている。FIG. 5 shows a case where a plate-shaped damper is arranged, and FIG. 6 shows a case where no plate-shaped damper is arranged. In these band-shaped samples A to D, a portion between the band-shaped samples B and C is a position corresponding to a portion facing the electrolyte supply port. In FIGS. 5 and 6, the maximum mass thickness value of the strip divided into 84 pieces from the strip sample is specified, the difference between the mass thickness value of each strip and the maximum mass thickness value is calculated, and each mass thickness difference is calculated. By dividing by the maximum mass thickness value, each thickness ratio (%) value is calculated, and the values are plotted.
【００３０】板状ダンパー体を配置していない場合、Ａ
〜Ｄの帯状試料の全てで見ると、最大１４．２％の質量
厚みの相違が生じており、平均６．５％の質量厚みの相
違があった。また、図６を見ると判るように、板状ダン
パー体を配置しないと、Ａ〜Ｄの各帯状試料における幅
方向の質量厚みにかなりのバラツキが生じており、この
ときの標準偏差は３．０５（Ａ〜Ｄの全てのデータより
算出した値）であった。When no plate-shaped damper is provided, A
In all of the band-shaped samples Nos. To D, there was a difference in mass thickness of 14.2% at the maximum, and there was a difference in mass thickness of 6.5% on average. As can be seen from FIG. 6, when the plate-shaped damper bodies are not arranged, the mass in the width direction of each of the band-shaped samples A to D varies considerably, and the standard deviation at this time is 3. 05 (value calculated from all data of A to D).
【００３１】一方、板状ダンパー体を配置した場合、最
大でも１０．８％の質量厚みの相違に低減しており、平
均３．４％の質量厚みの相違となっていた。そして、図
５を見ると判るように、板状ダンパー体を配置すると、
Ａ〜Ｄの各帯状試料における幅方向の質量厚みは非常に
均一となり、標準偏差も１．８９（Ａ〜Ｄの全てのデー
タより算出した値）となっていることが確認された。
尚、本実施形態での幅方向の厚み分布調査は、幅１０ｍ
ｍ×長さ１００ｍｍの短冊に細分化したものより行って
いるが、銅箔幅方向でこのような精密なレベルで分割し
た場合において、標準偏差１．８９という低いバラツキ
に制御できたことは、従来の銅箔製造装置で全く成し得
なかったことである。On the other hand, when the plate-shaped damper body was disposed, the difference in the mass thickness was reduced to 10.8% at the maximum, and the difference in the mass thickness was 3.4% on average. Then, as shown in FIG. 5, when the plate-shaped damper body is arranged,
It was confirmed that the mass in the width direction of each of the strip samples A to D was very uniform, and the standard deviation was 1.89 (a value calculated from all data from A to D).
In the present embodiment, the thickness distribution in the width direction was measured to be 10 m width.
It is performed from a strip divided into mx 100 mm long strips, but when divided at such a precise level in the copper foil width direction, it was possible to control the dispersion to a low standard deviation of 1.89. This is something that could not be achieved at all with a conventional copper foil manufacturing apparatus.
【００３２】続いて、銅箔の表面性状調査を行った結果
について述べる。表面性状の比較調査は、厚さ３５μｍ
の銅箔を長さ１０ｍ製造して、得られた銅箔の粗面（マ
ット面；電析終了面に相当する表面）における異常析出
を観察することで行った。この異常析出とは、製造され
る金属箔表面の電析終了面側において、周辺よりも異常
に突起した状態で析出している部分をいうものである。
この表面性状の調査は、製造した銅箔から１００ｍｍ×
１００ｍｍ角のサンプルをランダムに採取して、そのサ
ンプルの粗面側を実体顕微鏡で観察し、異常析出の存在
有無を確認することによって行った。Next, the results of an investigation of the surface properties of the copper foil will be described. The comparative examination of the surface properties is 35 μm thick
Was manufactured by observing abnormal precipitation on the rough surface (mat surface; surface corresponding to the electrodeposition finished surface) of the obtained copper foil. The abnormal deposition refers to a portion on the surface of the metal foil to be manufactured, on which the electrodeposition is completed, which is deposited in a state of being abnormally protruded from the periphery.
Investigation of this surface property was carried out by measuring 100 mm x
A sample of 100 mm square was randomly sampled, and the rough surface side of the sample was observed with a stereoscopic microscope to confirm the presence or absence of abnormal precipitation.
【００３３】その結果、板状ダンパー体を設けていない
場合の銅箔では、殆どすべてのサンプルにおいて、異常
析出と見られるものが多く確認された。一方、板状ダン
パー体を設けた場合の銅箔では、どのサンプルにおいて
も、異常析出と見られるものは非常に少なく、板状ダン
パー体が異常析出の低減に効果的であることが確認され
た。As a result, in the copper foil without the plate-shaped damper body, almost all of the samples were found to have abnormal precipitation. On the other hand, in the case of the copper foil provided with the plate-shaped damper body, in any of the samples, the number of abnormal precipitations was very small, and it was confirmed that the plate-shaped damper body was effective in reducing abnormal precipitation. .
【００３４】[0034]
【発明の効果】本発明によれば、ドラム状の回転陰極を
用いて電析により金属箔を連続的に製造する場合におい
て、金属箔の幅方向における厚みの均一性を精密に制御
することができ、金属箔表面に生じる異常析出の発生を
抑制することも可能となる。According to the present invention, it is possible to precisely control the uniformity of the thickness of a metal foil in the width direction when the metal foil is continuously produced by electrodeposition using a drum-shaped rotating cathode. It is also possible to suppress the occurrence of abnormal precipitation occurring on the surface of the metal foil.
【図１】金属箔電解製造装置の部分拡大斜視図。FIG. 1 is a partially enlarged perspective view of a metal foil electrolytic manufacturing apparatus.
【図２】板状ダンパー体を配置した金属箔電解製造装置
の部分拡大断面図。FIG. 2 is a partially enlarged cross-sectional view of a metal foil electrolytic manufacturing apparatus in which a plate-shaped damper body is arranged.
【図３】板状ダンパー体の部分拡大斜視図。FIG. 3 is a partially enlarged perspective view of a plate-shaped damper body.
【図４】金属箔電解製造装置の概略断面図。FIG. 4 is a schematic sectional view of a metal foil electrolytic manufacturing apparatus.
【図５】板状ダンパー体を配置した場合の幅方向厚み分
布グラフ。FIG. 5 is a width-direction thickness distribution graph when a plate-shaped damper body is arranged.
【図６】板状ダンパー体を配置しない場合の幅方向厚み
分布グラフ。FIG. 6 is a width-direction thickness distribution graph when a plate-shaped damper body is not arranged.
１ 金属箔電解製造装置 ２ 回転陰極 ３ 陽極 ４、４’ 電解液供給口 ５ 液供給手段 ６ 金属箔 ７ 電解槽 ８ ガイドロール ９ 巻き取りロール １０ 板状ダンパー体 １１ 分流用突起 １２ 仕切壁 １３ 固定板 １４ 液流出口 DESCRIPTION OF SYMBOLS 1 Metal foil electrolytic manufacturing apparatus 2 Rotating cathode 3 Anode 4, 4 'Electrolyte supply port 5 Liquid supply means 6 Metal foil 7 Electrolysis tank 8 Guide roll 9 Winding roll 10 Plate damper body 11 Dividing projection 12 Partition wall 13 Fixed Plate 14 Liquid outlet
───────────────────────────────────────────────────── フロントページの続き (72)発明者 藤田 悟 埼玉県上尾市鎌倉橋656−２ 三井金属鉱 業株式会社銅箔事業本部銅箔事業部内 (72)発明者 坂田 龍義 埼玉県上尾市鎌倉橋656−２ 三井金属鉱 業株式会社銅箔事業本部銅箔事業部内 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Satoru Fujita 652-2 Kamakurabashi, Ageo-shi, Saitama Pref. 656-2Mitsui Metal Mining Co., Ltd.
Claims (3)
と、該回転陰極の周面形状に沿って対向配置した陽極
と、回転陰極と陽極との間に回転陰極の下方側から電解
液を供給する電解液供給口を有する液供給手段とを備
え、 液供給手段から電解液を供給しながら電解反応により回
転陰極周面に金属を電着し、電着した金属箔を回転陰極
から連続的に剥がし取るものである金属箔電解製造装置
において、 液供給手段は、電解液供給口の上方に、回転陰極幅方向
にわたる板状ダンパー体を備えたことを特徴とする金属
箔電解製造装置。1. A rotating cathode in the form of a drum on which a metal foil is electrodeposited, an anode disposed to face the peripheral surface of the rotating cathode, and an electrolytic solution between the rotating cathode and the anode from below the rotating cathode. A liquid supply means having an electrolyte supply port for supplying a metal, electrodeposition of a metal on the peripheral surface of the rotating cathode by an electrolytic reaction while supplying an electrolytic solution from the liquid supplying means, and continuous deposition of the electrodeposited metal foil from the rotating cathode. A metal foil electrolytic manufacturing apparatus, wherein the liquid supply means includes a plate-like damper body extending in a width direction of the rotating cathode, above the electrolyte supply port.
方向に延びる分流用突起部を設けたものである請求項１
に記載の金属箔電解製造装置。2. The plate-shaped damper body is provided with a diverting projection extending in the plate longitudinal direction at the plate width center.
4. The metal foil electrolytic production apparatus according to claim 1.
に分割されており、分割された電解液供給口から供給す
る電解液流量を調整できるものである請求項１又は請求
項２に記載の金属箔電解製造装置。3. The electrolytic solution supply port is divided into a plurality of portions in the width direction of the rotating cathode, and the flow rate of the electrolytic solution supplied from the divided electrolytic solution supply port can be adjusted. The metal foil electrolytic manufacturing apparatus according to the above.
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001095612A JP4426127B2 (en) | 2001-03-29 | 2001-03-29 | Metal foil electrolytic manufacturing equipment |
| TW091104071A TW567249B (en) | 2001-03-29 | 2002-03-05 | Apparatus for electrolytically manufacturing metal foil |
| US10/275,289 US20030102209A1 (en) | 2001-03-29 | 2002-03-20 | Metal foil electrolytic manufacturing apparatus |
| PCT/JP2002/002650 WO2002079547A1 (en) | 2001-03-29 | 2002-03-20 | Metal foil electrolytic manufacturing apparatus |
| KR1020027014971A KR100864753B1 (en) | 2001-03-29 | 2002-03-20 | Metal Foil Electrolytic Manufacturing Apparatus |
| CNB028008383A CN1272473C (en) | 2001-03-29 | 2002-03-20 | Metal foil electrolytic mfg. apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001095612A JP4426127B2 (en) | 2001-03-29 | 2001-03-29 | Metal foil electrolytic manufacturing equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JP2002294481A true JP2002294481A (en) | 2002-10-09 |
| JP4426127B2 JP4426127B2 (en) | 2010-03-03 |
Family
ID=18949632
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001095612A Expired - Fee Related JP4426127B2 (en) | 2001-03-29 | 2001-03-29 | Metal foil electrolytic manufacturing equipment |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US20030102209A1 (en) |
| JP (1) | JP4426127B2 (en) |
| KR (1) | KR100864753B1 (en) |
| CN (1) | CN1272473C (en) |
| TW (1) | TW567249B (en) |
| WO (1) | WO2002079547A1 (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004090197A1 (en) * | 2003-04-03 | 2004-10-21 | Fukuda Metal Foil & Powder Co., Ltd. | Electrolytic copper foil with low roughness surface and process for producing the same |
| KR100813353B1 (en) * | 2006-03-14 | 2008-03-12 | 엘에스전선 주식회사 | Electrolyzing machine for manufacturing metal foil capable of reducing transverse deviation of weight |
| JP2008121033A (en) * | 2006-11-08 | 2008-05-29 | Akahoshi Kogyo Kk | Apparatus for electrolytically manufacturing metal foil |
| WO2012121020A1 (en) * | 2011-03-04 | 2012-09-13 | Jx日鉱日石金属株式会社 | Electrolytic copper foil having high strength and less projections due to abnormal electrodeposition and method for manufacturing same |
| CN114657607A (en) * | 2022-03-01 | 2022-06-24 | 广东嘉元科技股份有限公司 | Electronic copper foil manufacturing device |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100700799B1 (en) * | 2006-03-20 | 2007-03-28 | 엘에스전선 주식회사 | Continuous winding methods of copper foil |
| JP4642120B2 (en) * | 2009-04-01 | 2011-03-02 | 三井金属鉱業株式会社 | Electrolytic metal foil manufacturing apparatus, method for manufacturing thin plate insoluble metal electrode used in electrolytic metal foil manufacturing apparatus, and electrolytic metal foil obtained using the electrolytic metal foil manufacturing apparatus |
| KR101037245B1 (en) * | 2010-11-16 | 2011-05-26 | 경북대학교 산학협력단 | Apparatus for sterilization disposal of shoes |
| KR101343951B1 (en) * | 2011-06-23 | 2013-12-24 | 코닉이앤씨 주식회사 | Manufacturing method and manufacturing apparatus of metal foil |
| JP5175992B1 (en) * | 2012-07-06 | 2013-04-03 | Ｊｘ日鉱日石金属株式会社 | Ultrathin copper foil, method for producing the same, and ultrathin copper layer |
| CN103233249A (en) * | 2013-05-09 | 2013-08-07 | 南京顺捷机械设备有限公司 | Upper-electrolyte-inlet copper foil all-in-one equipment |
| CN104087977B (en) * | 2014-07-06 | 2016-05-11 | 湖北中一科技有限公司 | A kind of electrolytic copper foil feed arrangement and method with mixing feed integrative-structure |
| KR102045630B1 (en) * | 2017-11-28 | 2019-11-15 | 주식회사 포스코 | Electroforming Device |
| KR102209616B1 (en) * | 2018-12-05 | 2021-01-28 | 주식회사 포스코 | Electroforming Apparatus |
| CN109652826A (en) * | 2019-02-22 | 2019-04-19 | 圣达电气有限公司 | The electrolytic copper foil the thickness uniformity control method of cathode roll |
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Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4318794A (en) * | 1980-11-17 | 1982-03-09 | Edward Adler | Anode for production of electrodeposited foil |
| US4529486A (en) * | 1984-01-06 | 1985-07-16 | Olin Corporation | Anode for continuous electroforming of metal foil |
| US4647345A (en) * | 1986-06-05 | 1987-03-03 | Olin Corporation | Metallurgical structure control of electrodeposits using ultrasonic agitation |
| US5228965A (en) | 1990-10-30 | 1993-07-20 | Gould Inc. | Method and apparatus for applying surface treatment to metal foil |
-
2001
- 2001-03-29 JP JP2001095612A patent/JP4426127B2/en not_active Expired - Fee Related
-
2002
- 2002-03-05 TW TW091104071A patent/TW567249B/en not_active IP Right Cessation
- 2002-03-20 US US10/275,289 patent/US20030102209A1/en not_active Abandoned
- 2002-03-20 KR KR1020027014971A patent/KR100864753B1/en not_active IP Right Cessation
- 2002-03-20 WO PCT/JP2002/002650 patent/WO2002079547A1/en not_active Application Discontinuation
- 2002-03-20 CN CNB028008383A patent/CN1272473C/en not_active Expired - Fee Related
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2004090197A1 (en) * | 2003-04-03 | 2004-10-21 | Fukuda Metal Foil & Powder Co., Ltd. | Electrolytic copper foil with low roughness surface and process for producing the same |
| KR100813353B1 (en) * | 2006-03-14 | 2008-03-12 | 엘에스전선 주식회사 | Electrolyzing machine for manufacturing metal foil capable of reducing transverse deviation of weight |
| JP2008121033A (en) * | 2006-11-08 | 2008-05-29 | Akahoshi Kogyo Kk | Apparatus for electrolytically manufacturing metal foil |
| KR101071329B1 (en) * | 2006-11-08 | 2011-10-07 | 아카호시 가부시키가이샤 | Metal foil electrolytic manufacturing apparatus |
| WO2012121020A1 (en) * | 2011-03-04 | 2012-09-13 | Jx日鉱日石金属株式会社 | Electrolytic copper foil having high strength and less projections due to abnormal electrodeposition and method for manufacturing same |
| CN114657607A (en) * | 2022-03-01 | 2022-06-24 | 广东嘉元科技股份有限公司 | Electronic copper foil manufacturing device |
Also Published As
| Publication number | Publication date |
|---|---|
| US20030102209A1 (en) | 2003-06-05 |
| CN1272473C (en) | 2006-08-30 |
| WO2002079547A1 (en) | 2002-10-10 |
| TW567249B (en) | 2003-12-21 |
| KR100864753B1 (en) | 2008-10-22 |
| JP4426127B2 (en) | 2010-03-03 |
| CN1460133A (en) | 2003-12-03 |
| KR20030007594A (en) | 2003-01-23 |
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