JP2002286560A - Method and device for inspecting temperature sensor - Google Patents

Abstract

PROBLEM TO BE SOLVED: To accurately enhance precision for evaluation of a temperature sensor, in a temperature sensor inspecting method and device capable of inspecting a temperature sensor product without being affected by an ambient temperature. SOLUTION: An output value output from a measured temperature sensor 15 is measured when the temperature sensor 15 is evaluated. A temperature of a turn table 13 is measured by a contactless temperature sensor 16 to make the temperature serve as a temperature of the measured temperature sensor 15. A normal output value in the temperature (the temperature of the measured temperature sensor 15) measured by the contactless temperature sensor 16 is found based on a temperature-output value characteristic preliminarily found by a normal temperature sensor stored in a memory 23. The output value output from the measured temperature sensor 15 is compared with the normal output value to evaluate quality of the measured sensor 15.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for inspecting a temperature sensor, and more particularly to a method and an apparatus for inspecting a temperature sensor capable of inspecting a product of a temperature sensor without being affected by an environmental temperature.

[0002]

2. Description of the Related Art A temperature sensor constituted by a semiconductor is:
Due to its function, it has a characteristic that an output value (output voltage) changes linearly in response to a change in environmental temperature. Therefore, when performing a product inspection on a manufactured temperature sensor, in order to prevent a change in the environmental temperature from affecting the output of the temperature sensor, the environmental temperature must be kept constant during the inspection, or the Accurate temperature measurements have been made. If the environmental temperature is not taken into consideration, whether the fluctuation of the measured output voltage value of each temperature sensor to be measured (hereinafter referred to as the measured temperature sensor) is due to the fluctuation of the environmental temperature, or It becomes impossible to determine whether the measurement temperature sensor is caused by characteristic variations.

However, in the method of keeping the environmental temperature constant at the time of inspection or measuring the environmental temperature accurately every time of inspection, the inspection equipment becomes complicated and the inspection efficiency is reduced. Therefore, conventionally, as shown in FIG. 7, the temperature sensor 5 to be measured is evaluated by the detecting device 1 provided with the reference temperature sensor 6 in which the change of the output voltage value (temperature gradient) with respect to the change of the environmental temperature matches the specification. Was being done.

The detecting device 1 includes a detecting device main body 2, a turntable 3, a reference temperature sensor 6, and the like. The turntable 3 is provided with a plurality of chucks 4 (only one chuck 4 is shown in the figure for convenience).
The temperature sensor 5 to be measured is mounted on the upper part of the chuck 4 as shown in an enlarged manner in FIGS. The chuck 4 is provided with a connection terminal (not shown) that is electrically connected to a terminal of the temperature sensor 5 to be measured, and the temperature sensor 5 to be measured is connected to the detection device main body 2 via the turntable 3. It is the configuration that was done.

In order to test the temperature sensor 5 to be measured,
By rotating the turntable 3, the measured temperature sensor 5 is moved to a position facing the reference temperature sensor 6. 8 and 9 show a state in which the measured temperature sensor 5 has moved to a position facing the reference temperature sensor 6. FIG. As shown in each drawing, in this state, the temperature sensor 5 to be measured and the reference temperature sensor 6 are in close proximity, and the sensors 5 and 6 are located in the same temperature environment.

In this state, the output voltage of the measured temperature sensor 5 is compared with the output voltage (reference voltage) of the reference temperature sensor 6 so that the output voltage of the measured temperature sensor 5 falls within a predetermined range with respect to the reference voltage. , A non-defective product is evaluated. If the output voltage of the measured temperature sensor 5 is equal to or more than a predetermined range with respect to the reference voltage, a defective product is evaluated.

The temperature sensor 5 to be measured is mounted on the turntable 3 because the turntable 3 is rotated so that a plurality of temperature sensors 5 to be measured mounted on the turntable 3 are easily referenced. This is because the sheet can be transported to a position facing the temperature sensor 6 and the inspection efficiency can be improved.

[0008]

As described above, in the conventional temperature sensor inspection method, when the temperature sensor 5 to be measured and the reference temperature sensor 6 face each other,
Are located in the same temperature environment, so that each sensor 5,
It was believed that the effect of environmental temperature on 6 was the same. Therefore, when the sensors 5 and 6 face each other,
The temperature sensor 5 to be measured was evaluated by comparing the output voltages of the sensors 5 and 6.

However, the measured temperature sensor 5 is turned in a state where both sides and the bottom surface are fixed to the chuck 4 of the turntable 3, that is, the measured temperature sensor 5 is in thermal contact with the chuck 4 in a wide area. Since it is mounted on the table 3, it is greatly affected by the temperature of the turntable 3.

On the other hand, in the prior art, the temperature of the turntable 3 was not taken into consideration, and only the sensors 5 and 6 were positioned in the same temperature environment. In addition, there is a problem that the temperature fluctuations of the measured temperature sensor 5 do not match, and an error occurs in the evaluation of the measured temperature sensor 5.

The present invention has been made in view of the above points, and an object of the present invention is to provide a temperature sensor inspection method and an inspection apparatus capable of accurately evaluating a temperature sensor.

[0012]

Means for Solving the Problems In order to solve the above problems, the present invention is characterized by taking the following means.

According to a first aspect of the present invention, there is provided a method for inspecting a temperature sensor, comprising the steps of: measuring an output value output by a measured temperature sensor to be inspected to be inspected; Measuring the temperature of the measured temperature sensor, and, based on the temperature-output value characteristic previously obtained by the normal temperature sensor, the normal output at the temperature of the measured temperature sensor to be measured measured by the non-contact temperature sensor. Determining the value of the measured temperature sensor by comparing the output value output by the measured temperature sensor to be inspected with the regular output value. is there.

According to a second aspect of the present invention, in the temperature sensor inspection method according to the first aspect, the measured temperature sensor to be inspected is mounted on a base, and the non-contact temperature sensor is mounted on the base. The temperature of the measured temperature sensor to be inspected is measured by measuring the temperature.

According to a third aspect of the present invention, there is provided a temperature sensor inspection device, comprising: a measurement device for measuring an output value output from a measured temperature sensor to be inspected; and a temperature sensor for measuring the temperature of the measured temperature sensor. A non-contact temperature sensor for substantially measuring, a storage device for storing a temperature-output value characteristic obtained in advance by a proper temperature sensor, and the measuring device based on the temperature-output value characteristic stored in the storage device. By obtaining a normal output value at the temperature of the measured temperature sensor to be measured measured by, and comparing the output value of the measured temperature sensor to be measured and the regular output value obtained by the measuring device, And a sensor evaluation means for evaluating the temperature sensor to be measured.

According to a fourth aspect of the present invention, in the temperature sensor inspection apparatus according to the third aspect, a base on which the measurement target temperature sensor is mounted is provided, and the non-contact temperature sensor is mounted on the base. Characterized in that the temperature is measured.

Each of the above components functions as follows.

According to the first and second aspects of the present invention, the evaluation of the measured temperature sensor is performed by comparing the output value output by the measured temperature sensor to be inspected with the regular output value. (Defective product evaluation). here,
The normal output value serving as the evaluation reference of the measured temperature sensor is determined by the temperature of the measured temperature sensor measured by the non-contact temperature sensor based on the temperature-output value characteristic obtained in advance by the normal temperature sensor. Is done.

Due to its function, the output value of the temperature sensor changes in accordance with the change in the ambient temperature in which it is placed. Therefore, when the measured temperature sensor under test is evaluated, the normal output value determined based on the temperature-output value characteristic of the normal temperature sensor uses the value at the environmental temperature where the measured temperature sensor under test is placed. There is a need to.

Therefore, in the invention according to the present invention, the temperature of the measured temperature sensor to be inspected is substantially measured by the non-contact temperature sensor, and the output value corresponding to the measured temperature of the measured temperature sensor to be inspected is converted to the temperature. -Obtained from the output value characteristic, and set this as a normal output value. This makes it possible to compare the output value of the measured temperature sensor to be inspected with the normal output value under the same temperature condition, and to perform accurate evaluation.

Further, since the temperature of the measured temperature sensor to be inspected is substantially measured by the non-contact temperature sensor, the environmental temperature is regarded as the temperature of the measured temperature sensor to be inspected. , The accuracy of the evaluation can be improved.

Here, "substantially measure the temperature of the measured temperature sensor to be inspected" means that the temperature of the measured temperature sensor to be inspected is directly measured and the temperature of the measured temperature sensor is measured at the same temperature. This means that it also includes measuring the temperature of a component other than a certain measured temperature sensor to be inspected. Furthermore,
Since the non-contact temperature sensor measures the temperature of the temperature sensor to be measured in a non-contact manner, the temperature sensor to be measured is not damaged at the time of temperature measurement. Further, since the temperature measurement by the non-contact temperature sensor is possible even in a state where the measured temperature sensor to be inspected is moving, the inspection processing of the measured temperature sensor to be inspected can be performed efficiently.

In the inventions according to the second and fourth aspects, the non-contact temperature sensor is configured to measure the temperature of the base on which the temperature sensor to be measured is mounted. In the experiment of the present inventor, it was found that the temperature of the measured temperature sensor to be inspected is more affected by the temperature of the base on which the measured temperature sensor to be inspected is mounted at the time of inspection than the ambient temperature of the environment. That is, the temperature of the base and the temperature of the temperature sensor to be measured are substantially the same. Therefore, by measuring the temperature of the base, the temperature of the temperature sensor to be measured can be measured. Also,
In a configuration in which the temperature of the measured temperature sensor to be inspected is directly measured by the non-contact temperature sensor, the process of positioning the non-contact temperature sensor to the measured temperature sensor to be inspected becomes difficult because the shape of the measured temperature sensor to be inspected is small. On the other hand, since the base has a larger shape than the temperature sensor to be measured, the temperature can be easily measured by the non-contact temperature sensor.

[0024]

Next, embodiments of the present invention will be described with reference to the drawings.

FIG. 1 and FIG. 2 are views for explaining a temperature sensor inspection apparatus 10 according to one embodiment of the present invention and a temperature sensor inspection method using the same. Detection device 10
, The detection device body 12 and the turntable 1
3 and a non-contact temperature sensor 16 and the like. The turntable 13 is provided with a plurality of chucks 14 made of, for example, ceramic (only one is shown in the figure for convenience).

The temperature sensor 15 to be inspected (measured temperature sensor to be inspected) is mounted on the chuck 14 as shown in FIG. The chuck 14 is provided with a connection terminal (not shown) that is electrically connected to a terminal of a temperature sensor 15 (hereinafter, referred to as a temperature sensor to be measured).
And is connected to the detection device main body 12 via the.

Further, as described above, the measured temperature sensor 15 is disposed on the chuck 4 of the turntable 13 with both side surfaces and the bottom surface fixed, so that the measured temperature sensor 15 is wider than the chuck 14. Contact by area.
Further, since the chuck 14 is fixed to the turntable 13, the chuck 14 is thermally connected to the turntable 13. For this reason, the measured temperature sensor 15 is configured to be thermally connected to the turntable 3.
It is greatly affected by the temperature of the turntable 3.

The non-contact temperature sensor 16 is, for example, an infrared radiation thermometer, and is configured to be able to measure the temperature of the measurement object in a non-contact manner. As shown in an enlarged manner in FIG. 2, in the present embodiment, the non-contact temperature sensor 16 is disposed at a position facing the turntable 13. Therefore, the non-contact temperature sensor 16 is configured to measure the temperature of the turntable 13.

The detection device main body 12 includes a sensor output measurement circuit 20, a turntable temperature measurement circuit 21, a sensor evaluation device 22, a storage device 23, an output device 24, and the like. The sensor output measurement circuit 20 is connected to the measured temperature sensor 15 via the turntable 13, and is configured to receive the output of the measured temperature sensor 15. The sensor output measuring circuit 20 measures an output voltage value output from the measured temperature sensor 15.

The turntable temperature measuring circuit 21 is connected to the non-contact temperature sensor 16 and
6 is input. This turntable temperature measuring circuit 21 measures the temperature of the turntable 13 based on the output of the non-contact temperature sensor 16.

The storage device 23 stores a temperature-output value characteristic obtained in advance by a proper temperature sensor. FIG. 4 shows an example of a temperature-output value characteristic obtained in advance by a proper temperature sensor stored in the storage device 23. Here, a legitimate temperature sensor is a sensor whose output matches the predetermined specification through experiments. Therefore, by comparing the temperature-output value characteristics of the normal temperature sensor with the characteristics of the measured temperature sensor 15, it is possible to evaluate whether the measured temperature sensor 15 is a good product or a defective product. it can.

In the example shown in FIG. 4, the horizontal axis indicates temperature, and the vertical axis indicates temperature. Then, a temperature change is given to the normal temperature sensor, and a change in the sensor output voltage (hereinafter, referred to as a normal output value) at each temperature at this time is measured, and this is shown in FIG. In the following description, when it is necessary to display the temperature-output value characteristic obtained from the normal temperature sensor as a function, V = f
(T). Here, V is a normal output value, and T is a temperature. The output device 24 outputs a result of a sensor evaluation process described later. Specifically, the output device 24 is a display, a printer, or the like.

Next, the sensor evaluation device 22 will be described. The sensor evaluation device 22 includes the circuits 20 and 2 described above.
1 and the device 23, and the output device 24. Therefore, the sensor evaluation device 22 receives the output voltage of the measured temperature sensor 15 (hereinafter, referred to as sensor output Vx) from the sensor output measurement circuit 20, and outputs the temperature Tx of the turntable 3 from the turntable temperature measurement circuit 21. Is substantially the temperature of the temperature sensor to be measured 15, hereinafter referred to as a turntable temperature Tx). Further, the storage device 23
, The temperature-output value characteristic obtained from the stored normal temperature sensor is input.

The sensor evaluation device 22 has a sensor output Vx,
Based on the turntable temperature Tx and the temperature-output value characteristic, the quality of the measured temperature sensor 15 is evaluated. FIG.
Is the measured temperature sensor 1 implemented by the sensor evaluation device 22.
5 shows an evaluation process. When the evaluation process of the measured temperature sensor 15 shown in FIG.
First, in step 10 (the step is abbreviated as S in the figure), the sensor output V of the measured temperature sensor 15
x is input from the sensor output measurement circuit 20. In the following step 11, the sensor evaluation device 22 uses the non-contact temperature sensor 1
6 receives the turntable temperature Tx detected from the sensor output measurement circuit 20.

When the sensor output Vx and the turntable temperature Tx are input as described above, the sensor evaluation device 22 reads V = f (T) indicating the temperature-output value characteristic from the storage device 23 in the following step 12. By substituting the turntable temperature Tx into this, the normal output value V
Calculate r (Vr = f (Tx)). This step 12
Is the output value (output voltage) obtained from the normal temperature sensor when the normal temperature sensor is mounted on the chuck 14. Therefore, the regular output value Vr and the sensor output Vx
By comparing with the above, it is possible to evaluate the quality of the measured temperature sensor 15.

Accordingly, in the following step 13, the sensor evaluation device 22 outputs the sensor output V of the temperature sensor 15 to be measured.
It is determined whether or not x is within a predetermined range with respect to the normal output value Vr. In the present embodiment, the measured temperature sensor 15
Is determined as (Vr-α), and the upper limit is determined as (Vr + α). Is a constant that is appropriately changed depending on the sensitivity of the temperature sensor to be measured.

If an affirmative determination is made in step 13, the process proceeds to step 14, where the sensor evaluation device 22
Performs a non-defective evaluation on the measured temperature sensor 15 and displays it on the output device 24. On the other hand, if a negative determination is made in step 13, the process proceeds to step 15, where the sensor evaluation device 22 performs a defective evaluation on the measured temperature sensor 15, and displays this on the output device 24.

As described above, the present embodiment is configured to evaluate the measured temperature sensor 15 by comparing the sensor output Vx output by the measured temperature sensor 15 with the regular output value Vr. At this time, the regular output value Vr serving as the evaluation reference of the measured temperature sensor 15 is determined in Step 1
By performing the processing of 2, the measured temperature sensor 15
(That is, the turntable temperature Tx). This makes it possible to evaluate the measured temperature sensor 15 under the same temperature condition, and to accurately evaluate the measured temperature sensor 15.

In this embodiment, the non-contact temperature sensor 1
6, the temperature of the measured temperature sensor 15 is substantially measured (in this embodiment, the measured temperature of the measured temperature sensor 15 is measured by measuring the turntable temperature Tx of the turntable 13).
Is measured), the accuracy of evaluation can be improved as compared with the conventional evaluation method in which the environmental temperature is regarded as the temperature of the temperature sensor to be inspected and the evaluation process is performed.

Since the non-contact temperature sensor 16 measures the temperature of the temperature sensor 15 to be measured in a non-contact manner, the temperature of the turntable 13, the chuck 14, and the temperature sensor 15 to be measured are not damaged. Will not occur. Further, the temperature measurement by the non-contact temperature sensor 16 is possible even when the turntable 13 is rotating and the measured temperature sensor 15 is moving, so that the inspection process of the measured temperature sensor 15 is efficiently performed. be able to.

In this embodiment, the non-contact temperature sensor 16
FIG. 5 measures the temperature of the turntable 13 and thereby measures the temperature of the temperature sensor 15 to be measured.
As shown in FIG. 7, the non-contact temperature sensor 16 may measure the temperature of the chuck 14. For the same reason as described above, the temperature of the chuck 14 is substantially the same as the temperature of the measured temperature sensor 15. Therefore, the measured temperature sensor 15 can be evaluated by measuring the temperature of the chuck 14.

Further, as shown in FIG. 6, the temperature of the non-contact temperature sensor 16 or the temperature of the temperature sensor 15 to be measured may be directly measured. However, in a configuration in which the non-contact temperature sensor 16 directly measures the measured temperature sensor 15, the measured temperature sensor 15 has a small shape.
Processing for positioning the temperature sensor to be measured 15 and the non-contact temperature sensor 16 becomes difficult. On the other hand, the turntable 13 or the chuck 14 is
In the method of measuring the temperature of the above, since the turntable 13 and the chuck 14 have a larger shape than the temperature sensor 15 to be measured, the temperature can be easily measured.

[0043]

According to the present invention as described above, the following various effects can be realized.

According to the first and second aspects of the present invention, it is possible to compare the output value of the measured temperature sensor to be inspected with the normal output value under the same temperature condition, and perform accurate evaluation. Becomes possible. Further, the accuracy of the evaluation can be improved as compared with the conventional evaluation method in which the evaluation process is performed by regarding the environmental temperature as the temperature of the temperature sensor to be measured. In addition, by using the non-contact temperature sensor, it is possible to prevent the inspection target temperature sensor from being damaged at the time of temperature measurement, and to efficiently perform the inspection processing of the inspection target temperature sensor.

According to the second and fourth aspects of the present invention, the temperature of the temperature sensor to be measured can be measured by measuring the temperature of the base. Because it has a large shape to
Temperature measurement by the non-contact temperature sensor can be easily performed.

[Brief description of the drawings]

FIG. 1 is a configuration diagram for explaining a temperature sensor inspection apparatus and an inspection method according to an embodiment of the present invention.

FIG. 2 is an enlarged view showing the vicinity of a non-contact temperature sensor in FIG.

FIG. 3 is a flowchart illustrating a sensor evaluation process performed by the sensor evaluation device.

FIG. 4 is a diagram showing an example of a temperature-output value characteristic obtained in advance by a proper temperature sensor.

FIG. 5 is a view showing another arrangement example of the non-contact temperature sensor (part 1).

FIG. 6 is a view showing another arrangement example of the non-contact temperature sensor (part 2).

FIG. 7 is a configuration diagram for explaining a temperature sensor inspection apparatus and an inspection method, which are one example of the related art.

8 is an enlarged view of the vicinity of a reference temperature sensor in FIG. 7 (a state in which the chuck is viewed from the front).

FIG. 9 is an enlarged view of the vicinity of a reference temperature sensor in FIG. 7 (a state in which the chuck is viewed from the side).

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Detecting device 2 Detecting device main body 3 Turntable 4 Chuck 5 Measured temperature sensor 6 Reference temperature sensor 11 Detecting device 12 Detecting device main body 13 Turntable 14 Chuck 15 Measured temperature sensor 16 Non-contact temperature sensor 20 Sensor output measuring circuit 21 turn Table temperature measurement circuit 22 Sensor evaluation device 23 Storage device 24 Output device

Claims (4)

[Claims] 1. A step of measuring an output value output by a measured temperature sensor to be inspected to be inspected; a step of substantially measuring a temperature of the measured temperature sensor to be inspected by a non-contact temperature sensor; A step of obtaining a normal output value at the temperature of the measured temperature sensor under test measured by the non-contact temperature sensor, based on a temperature-output value characteristic previously obtained by a temperature sensor; Evaluating the temperature sensor to be measured by comparing the output value to be output with the regular output value. 2. The temperature sensor inspection method according to claim 1, wherein the measured temperature sensor to be inspected is mounted on a base, and the non-contact temperature sensor measures the temperature of the base by measuring the temperature of the base. An inspection method for a temperature sensor, comprising measuring a temperature of an inspection measurement temperature sensor. 3. A measuring device for measuring an output value output from a measured temperature sensor to be inspected, a non-contact temperature sensor for substantially measuring the temperature of the measured temperature sensor, and a regular temperature sensor. A storage device for storing a temperature-output value characteristic obtained in advance, based on the temperature-output value characteristic stored in the storage device,
A normal output value at the temperature of the measured temperature sensor under test measured by the measuring device is obtained, and the output value of the measured temperature sensor under test obtained by the measuring device is compared with the normal output value. And a sensor evaluation means for evaluating the temperature sensor to be measured. 4. The temperature sensor inspection apparatus according to claim 3, further comprising: a base on which the temperature sensor to be measured is mounted, and wherein the non-contact temperature sensor measures the temperature of the base. An inspection device for a temperature sensor.