JP2002285258A - Metal-ceramic composite material and production method therefor - Google Patents
Metal-ceramic composite material and production method thereforInfo
- Publication number
- JP2002285258A JP2002285258A JP2001083921A JP2001083921A JP2002285258A JP 2002285258 A JP2002285258 A JP 2002285258A JP 2001083921 A JP2001083921 A JP 2001083921A JP 2001083921 A JP2001083921 A JP 2001083921A JP 2002285258 A JP2002285258 A JP 2002285258A
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- Japan
- Prior art keywords
- composite material
- ceramic
- metal
- powder
- thermal conductivity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- Manufacture Of Alloys Or Alloy Compounds (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】本発明は、金属−セラミック
ス複合材料及びその製造方法に関し、特に熱伝導の良好
な金属−セラミックス複合材料及びその製造方法に関す
る。The present invention relates to a metal-ceramic composite material and a method for producing the same, and more particularly, to a metal-ceramic composite material having good heat conductivity and a method for producing the same.
【０００２】[0002]
【従来の技術】最近、半導体製造装置や液晶製造装置等
にセラミックス粉末またはセラミックス繊維を強化材と
し、アルミニウムまたはアルミニウム合金をマトリック
スとする金属−セラミックス複合材料が使われ始められ
ている。2. Description of the Related Art Recently, a metal-ceramic composite material using a ceramic powder or a ceramic fiber as a reinforcing material and aluminum or an aluminum alloy as a matrix has begun to be used in a semiconductor manufacturing apparatus, a liquid crystal manufacturing apparatus and the like.
【０００３】この複合材料の製造方法、特に金属として
アルミニウムをマトリックスとする複合材料の製造方法
としては、粉末冶金法、高圧鋳造法、真空鋳造法等の方
法が従来から知られている。しかし、これらの方法で
は、強化材であるセラミックスの含有率を高くできな
い、あるいは大型の加圧装置が必要である、もしくはニ
アネットの成形が困難である、コストが極めて高いなど
の理由によりいずれも満足できるものではなかった。[0003] As a method for producing this composite material, particularly a method for producing a composite material using aluminum as a matrix as a metal, methods such as powder metallurgy, high pressure casting, and vacuum casting have been conventionally known. However, in these methods, the content of the ceramics as a reinforcing material cannot be increased, or a large-sized pressing device is required, or it is difficult to form a near net, and the cost is extremely high. It was not satisfactory.
【０００４】そこで最近では、上記問題を解決する製造
方法として、米国ランクサイド社が開発した非加圧金属
浸透法（ＰｒｉｍｅｘTM）がある。この方法は、ＳｉＣ
やＡｌ2Ｏ3などのセラミックス粉末で形成されたプリフ
ォームにＭｇを含むアルミニウム合金を接触させ、これ
をＮ2雰囲気炉中で７００〜９００℃の温度に加熱して
溶融したアルミニウム合金を浸透させる方法である。こ
れは、Ｍｇの化学反応を利用してセラミックス粉末と溶
融金属との濡れ性を改善し、機械的な加圧を行わなくて
もプリフォーム中に浸透できるという特徴があるので、
加圧装置が不要な優れた方法である。[0004] Recently, as a manufacturing method for solving the above problem, there is a non-pressurized metal infiltration method (Primex ™ ) developed by Rankside Co., USA. This method uses SiC
, Al 2 O 3, or the ceramic powder preforms formed by the contacting the aluminum alloy containing Mg, such as, to which the permeate of aluminum was melted by heating to a temperature of 700 to 900 ° C. in a N 2 atmosphere furnace in the alloy Is the way. This has the feature that the wettability between the ceramic powder and the molten metal is improved by utilizing the chemical reaction of Mg, and that it can penetrate into the preform without performing mechanical pressing.
This is an excellent method that does not require a pressurizing device.
【０００５】[0005]
【発明が解決しようとする課題】しかしながら、これら
の方法で作製された複合材料は、アルミニウムとの複合
材料であるので、熱伝導性はかなり良好とはいうもの
の、放熱板やヒータープレート、あるいは宇宙を含む真
空中で用いられる材料などに必要とされる２００Ｗ／ｍ
・℃以上の高熱伝導率を有する熱伝導の極めて良好な複
合材料は得られないという問題があった。However, since the composite material produced by these methods is a composite material with aluminum, the thermal conductivity is quite good, but the heat radiation plate, the heater plate, or the space 200W / m required for materials used in vacuum including
There was a problem that a composite material having a high thermal conductivity of not less than ° C. and having extremely good thermal conductivity could not be obtained.
【０００６】本発明は、上述した金属−セラミックス複
合材料が有する課題に鑑みなされたものであって、その
目的は、２００Ｗ／ｍ・℃以上の高熱伝導率を有する熱
伝導の極めて良好な金属−セラミックス複合材料を提供
し、その製造方法をも提供することにある。The present invention has been made in view of the above-mentioned problems of the metal-ceramic composite material, and an object of the present invention is to provide a metal having a high thermal conductivity of 200 W / m · ° C. or more and having excellent thermal conductivity. An object of the present invention is to provide a ceramic composite material and a method for producing the same.
【０００７】[0007]
【課題を解決するための手段】本発明者等は、上記目的
を達成するため鋭意研究した結果、使用するセラミック
ス粉末とその含有率を特定することにより、２００Ｗ／
ｍ・℃以上の高熱伝導率を有する熱伝導の極めて良好な
複合材料が得られるとの知見を得て本発明を完成するに
至った。Means for Solving the Problems The present inventors have conducted intensive studies to achieve the above object, and as a result, by specifying the ceramic powder to be used and the content thereof, 200 W /
The inventors have found that a composite material having a high thermal conductivity of at least m · ° C. and a very good thermal conductivity can be obtained, and the present invention has been completed.
【０００８】即ち、本発明は、（１）セラミックス粉末
またはセラミックス繊維を強化材とし、アルミニウムま
たはアルミニウム合金をマトリックスとする金属ーセラ
ミックス複合材料において、該セラミックス粉末が、純
度を９９％以上とし、フリーカーボンの含有率を０．０
４ｗｔ％未満とするＳｉＣ粉末であり、該複合材料が、
３０体積％以上のＳｉＣ粉末を含み、２００Ｗ／ｍ・℃
以上の熱伝導率を有する複合材料であることを特徴とす
る金属−セラミックス複合材料（請求項１）とし、
（２）純度が９９％以上で、フリーカーボンの含有率が
０．０４ｗｔ％未満のＳｉＣ粉末で３０体積％以上の粉
末充填率を有するプリフォームを形成し、そのプリフォ
ーム中に窒素雰囲気中で７００〜９００℃の温度で溶融
したアルミニウムまたはアルミニウム合金を非加圧で浸
透させることにより、熱伝導率が２００Ｗ／ｍ℃以上の
複合材料を作製することを特徴とする金属−セラミック
ス複合材料の製造方法（請求項２）とすることを要旨と
する。以下さらに詳細に説明する。That is, the present invention provides (1) a metal-ceramic composite material using ceramic powder or ceramic fiber as a reinforcing material and aluminum or an aluminum alloy as a matrix; 0.0% carbon content
SiC powder having a content of less than 4 wt%, wherein the composite material is
200 W / m · ° C containing 30% by volume or more of SiC powder
A metal-ceramic composite material (claim 1), which is a composite material having the above thermal conductivity,
(2) A preform having a powder filling rate of 30% by volume or more is formed from SiC powder having a purity of 99% or more and a free carbon content of less than 0.04% by weight, and the preform is formed in a nitrogen atmosphere. Manufacturing a metal-ceramic composite material characterized by producing a composite material having a thermal conductivity of 200 W / m ° C. or more by infiltrating non-pressurized aluminum or aluminum alloy at a temperature of 700 to 900 ° C. The gist of the present invention is a method (claim 2). This will be described in more detail below.
【０００９】上記で述べたように、本発明の複合材料と
して、複合材料中のセラミックス粉末を９９％以上の純
度を有し、フリーカーボンの含有率を０．０４ｗｔ％未
満とするＳｉＣ粉末とすることにより、不純物、特にフ
リーカーボンが少ないことから、アルミニウムと反応し
て生成する熱伝導率の低いＡｌ4Ｃ3の生成が少なくなり
熱伝導性が改善され、そのＳｉＣ粉末の複合材料中の含
有率を３０体積％以上とすることにより、熱伝導性の良
好なＳｉＣ粉末の増加によってさらに熱伝導性が改善さ
れ、その結果、２００Ｗ／ｍ℃以上の高熱伝導率を有す
る熱伝導の極めて良好な複合材料となる。As described above, as the composite material of the present invention, the ceramic powder in the composite material is SiC powder having a purity of 99% or more and a free carbon content of less than 0.04 wt%. Thereby, since the amount of impurities, particularly free carbon, is small, the production of Al 4 C 3 having low thermal conductivity generated by reacting with aluminum is reduced, and the thermal conductivity is improved, and the content of SiC powder in the composite material is improved. By setting the rate to 30% by volume or more, the thermal conductivity is further improved by increasing the SiC powder having good thermal conductivity, and as a result, the thermal conductivity having a high thermal conductivity of 200 W / m ° C. or more is extremely good. It becomes a composite material.
【００１０】その製造方法としては、セラミックス粉末
に純度が９９％以上で、フリーカーボンの含有率が０．
０４ｗｔ％未満のＳｉＣ粉末を用いることにより、先と
同様熱伝導性が改善され、それによって形成されたプリ
フォームに溶融したアルミニウムまたはアルミニウム合
金を浸透させることにより、複合材料中のＳｉＣ粉末の
含有率を３０体積％以上とすることができ、その結果、
２００Ｗ／ｍ℃以上の高熱伝導率を有する熱伝導の極め
て良好な複合材料が得られる製造方法となる。As a method for producing the ceramic powder, the ceramic powder has a purity of 99% or more and a free carbon content of 0.1%.
By using less than 04 wt% of SiC powder, the thermal conductivity is improved as before, and the preform formed thereby is infiltrated with molten aluminum or aluminum alloy, so that the content of SiC powder in the composite material is improved. Can be 30% by volume or more, and as a result,
This is a manufacturing method capable of obtaining a composite material having a high thermal conductivity of 200 W / m ° C. or higher and a very good thermal conductivity.
【００１１】[0011]
【発明の実施の形態】本発明の複合材料の製造方法をさ
らに詳しく述べると、先ず強化材として純度が９９％以
上で、フリーカーボンの含有率が０．０４ｗｔ％未満の
ＳｉＣ粉末を用意する。一方、マトリックスとする金属
としてＭｇを含むアルミニウム合金のインゴットも用意
する。BEST MODE FOR CARRYING OUT THE INVENTION The method for producing a composite material according to the present invention will be described in further detail. First, SiC powder having a purity of 99% or more and a free carbon content of less than 0.04 wt% is prepared as a reinforcing material. On the other hand, an ingot of an aluminum alloy containing Mg as a metal to be a matrix is also prepared.
【００１２】用意したＳｉＣ粉末で３０体積％以上の粉
末充填率を有するプリフォームを形成する。得られたプ
リフォームに用意したアルミニウム合金のインゴットを
接触させ、それを窒素雰囲気中で７００〜９００℃の温
度で溶融したアルミニウム合金をプリフォーム中に非加
圧で浸透させて３０体積％以上の含有率を有する複合材
料を作製する。A preform having a powder filling rate of 30% by volume or more is formed from the prepared SiC powder. The obtained preform is brought into contact with an ingot of the prepared aluminum alloy, and the aluminum alloy melted at a temperature of 700 to 900 ° C. in a nitrogen atmosphere is permeated into the preform by non-pressurization to obtain 30% by volume or more. A composite material having a content is produced.
【００１３】以上の方法で金属−セラミックス複合材料
を作製すれば、２００Ｗ／ｍ℃以上の高熱伝導率を有す
る熱伝導の極めて良好な複合材料が得られる。When a metal-ceramic composite material is produced by the above method, a composite material having a high thermal conductivity of 200 W / m.degree.
【００１４】[0014]
【実施例】以下本発明の実施例を比較例と共に具体的に
挙げ、本発明をより詳細に説明する。EXAMPLES Hereinafter, the present invention will be described in more detail with reference to Examples of the present invention and Comparative Examples.
【００１５】（実施例１） （１）金属−セラミックス複合材料の作製 強化材として信濃電気精錬社製の純度が９９、４％でフ
リーカーボンの含有率が０．０２ｗｔ％のＳｉＣ粉末に
バインダーとしてコロイダルシリカ液をシリカ固形分が
２重量部となる量を添加し、それにさらにイオン交換水
を２４重量部加え、ポットミルで１２時間混合した。Example 1 (1) Preparation of Metal-Ceramic Composite Material As a reinforcing material, SiC powder having a purity of 99, 4% and a free carbon content of 0.02 wt% manufactured by Shinano Electric Refining Co., Ltd. was used as a binder. The colloidal silica liquid was added in such an amount that the silica solid content became 2 parts by weight, and 24 parts by weight of ion-exchanged water was further added thereto, followed by mixing in a pot mill for 12 hours.
【００１６】得られたスラリーを１００×１００×５０
ｍｍの成形体が得られるゴム型に流し込み、それを２４
時間静置し、ＳｉＣ粉末を沈殿させ、上澄み液を布など
で除去した後、それを冷凍室に入れ、３０時間冷凍させ
て脱型した。得られた成形体を１０００℃の温度で焼成
してＳｉＣ粉末の充填率が７０体積％のプリフォームを
形成した。The obtained slurry is 100 × 100 × 50
mm into a rubber mold from which a molded product of
After standing for a while, the SiC powder was precipitated, and the supernatant was removed with a cloth or the like. Then, it was placed in a freezer, frozen for 30 hours and demolded. The obtained molded body was fired at a temperature of 1000 ° C. to form a preform having a filling ratio of SiC powder of 70% by volume.
【００１７】得られたプリフォームにＡｌ−１２Ｓｉ−
３Ｍｇ組成のアルミニウム合金のインゴットを接触さ
せ、それを窒素雰囲気中で８２５℃の温度で溶融したア
ルミニウム合金をプリフォーム中に浸透させた後、冷却
してＳｉＣ粉末の含有率が７０体積％の複合材料を作製
した。The obtained preform is made of Al-12Si-
An ingot of an aluminum alloy having a 3Mg composition was brought into contact with the ingot, and the aluminum alloy melted at 825 ° C. in a nitrogen atmosphere was infiltrated into a preform, and then cooled to form a composite having a SiC powder content of 70% by volume. Materials were made.
【００１８】（２）評価 得られた複合材料からφ１５×ｔ３ｍｍの試験片を切り
出し、レーザーフラッシュ法で熱伝導率を測定した。そ
の結果、熱伝導率は２１０Ｗ／ｍ・℃で２００Ｗ／ｍ・
℃以上であった。(2) Evaluation A test piece of φ15 × t3 mm was cut out from the obtained composite material, and the thermal conductivity was measured by a laser flash method. As a result, the thermal conductivity was 210 W / m · ° C and 200 W / m ·
° C or higher.
【００１９】（実施例２）プリフォームのＳｉＣ粉末の
充填率を５５体積％とした他は実施例１と同様に複合材
料を作製し、評価した。その結果、熱伝導率は２０５Ｗ
／ｍ・℃で２００Ｗ／ｍ・℃以上であった。このこと
は、実施例１を含めて述べると、本発明の製造方法とす
れば、２００Ｗ／ｍ℃以上の高熱伝導率を有する熱伝導
の極めて良好な複合材料が得られる製造方法とすること
ができることを示している。Example 2 A composite material was prepared and evaluated in the same manner as in Example 1 except that the filling rate of the SiC powder of the preform was 55% by volume. As a result, the thermal conductivity was 205 W
/ W · m · ° C. This is described in connection with Example 1. According to the manufacturing method of the present invention, a manufacturing method capable of obtaining a composite material having a high thermal conductivity of 200 W / m.degree. Indicates that you can do it.
【００２０】（比較例）比較のために、ＳｉＣ粉末をそ
の純度が９７％でフリーカーボンの含有率が０．０５ｗ
ｔ％のＳｉＣ粉末とした他は実施例１と同様に複合材料
を作製し、評価した。その結果、熱伝導率は１６８Ｗ／
ｍ・℃で実施例よりかなり低くなり、２００Ｗ／ｍ・℃
を下回っていた。(Comparative Example) For comparison, SiC powder having a purity of 97% and a free carbon content of 0.05 watts was used.
A composite material was prepared and evaluated in the same manner as in Example 1, except that t% of SiC powder was used. As a result, the thermal conductivity was 168 W /
m / ° C, considerably lower than the example, 200 W / m · ° C
Was below.
【００２１】[0021]
【発明の効果】以上の通り、本発明の金属−セラミック
ス複合材料の製造方法であれば、２００Ｗ／ｍ℃以上の
高熱伝導率を有する熱伝導の極めて良好な複合材料が得
られる製造方法とすることができるようになった。この
ことにより、高熱伝導率が必要な放熱板やヒータープレ
ートなどへの用途が大きく広がった。As described above, according to the method for producing a metal-ceramic composite material of the present invention, a method for producing a composite material having a high thermal conductivity of 200 W / m.degree. Now you can do it. This has greatly expanded the applications to heat sinks and heater plates that require high thermal conductivity.
Claims (2)
維を強化材とし、アルミニウムまたはアルミニウム合金
をマトリックスとする金属ーセラミックス複合材料にお
いて、該セラミックス粉末が、純度を９９％以上とし、
フリーカーボンの含有率を０．０４ｗｔ％未満とするＳ
ｉＣ粉末であり、該複合材料が、３０体積％以上のＳｉ
Ｃ粉末を含み、２００Ｗ／ｍ・℃以上の熱伝導率を有す
る複合材料であることを特徴とする金属−セラミックス
複合材料。1. A metal-ceramic composite material using ceramic powder or ceramic fiber as a reinforcing material and aluminum or an aluminum alloy as a matrix, wherein the ceramic powder has a purity of 99% or more;
S to reduce free carbon content to less than 0.04 wt%
iC powder, wherein the composite material contains 30% by volume or more of Si
A metal-ceramic composite material comprising C powder and having a thermal conductivity of 200 W / m · ° C. or more.
含有率が０．０４ｗｔ％未満のＳｉＣ粉末で３０体積％
以上の粉末充填率を有するプリフォームを形成し、その
プリフォーム中に窒素雰囲気中で７００〜９００℃の温
度で溶融したアルミニウムまたはアルミニウム合金を非
加圧で浸透させることにより、熱伝導率が２００Ｗ／ｍ
℃以上の複合材料を作製することを特徴とする金属−セ
ラミックス複合材料の製造方法。2. A 30% by volume SiC powder having a purity of 99% or more and a free carbon content of less than 0.04 wt%.
A preform having the above-mentioned powder filling rate is formed, and aluminum or an aluminum alloy melted at a temperature of 700 to 900 ° C. in a nitrogen atmosphere is introduced into the preform in a non-pressurized manner so that the thermal conductivity is 200 W. / M
A method for producing a metal-ceramic composite material, which comprises producing a composite material at a temperature of at least 100 ° C.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001083921A JP2002285258A (en) | 2001-03-23 | 2001-03-23 | Metal-ceramic composite material and production method therefor |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001083921A JP2002285258A (en) | 2001-03-23 | 2001-03-23 | Metal-ceramic composite material and production method therefor |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002285258A true JP2002285258A (en) | 2002-10-03 |
Family
ID=18939674
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2001083921A Pending JP2002285258A (en) | 2001-03-23 | 2001-03-23 | Metal-ceramic composite material and production method therefor |
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2006299304A (en) * | 2005-04-15 | 2006-11-02 | Sumitomo Electric Ind Ltd | Magnesium based composite material |
| CN100432252C (en) * | 2005-01-05 | 2008-11-12 | 中国科学院长春光学精密机械与物理研究所 | Method for preparing nanometer SiC reinforced aluminum base composite material |
| JP2010090436A (en) * | 2008-10-08 | 2010-04-22 | Sumitomo Electric Ind Ltd | Magnesium-based composite material and production method of the same |
| JP2010106365A (en) * | 2009-12-11 | 2010-05-13 | Sumitomo Electric Ind Ltd | Method for producing magnesium-based composite material |
| JP2010106366A (en) * | 2009-12-11 | 2010-05-13 | Sumitomo Electric Ind Ltd | Method for producing magnesium-based composite material |
| JP2014062329A (en) * | 2013-12-11 | 2014-04-10 | Sumitomo Electric Ind Ltd | Magnesium-base composite material |
| US9028959B2 (en) | 2008-10-03 | 2015-05-12 | Sumitomo Electric Industries, Ltd. | Composite member |
| JP5739873B2 (en) * | 2010-04-02 | 2015-06-24 | 住友電気工業株式会社 | Magnesium-based composite member, heat dissipation member, and semiconductor device |
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2001
- 2001-03-23 JP JP2001083921A patent/JP2002285258A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100432252C (en) * | 2005-01-05 | 2008-11-12 | 中国科学院长春光学精密机械与物理研究所 | Method for preparing nanometer SiC reinforced aluminum base composite material |
| JP2006299304A (en) * | 2005-04-15 | 2006-11-02 | Sumitomo Electric Ind Ltd | Magnesium based composite material |
| JP4720981B2 (en) * | 2005-04-15 | 2011-07-13 | 住友電気工業株式会社 | Magnesium matrix composite |
| US9028959B2 (en) | 2008-10-03 | 2015-05-12 | Sumitomo Electric Industries, Ltd. | Composite member |
| JP2010090436A (en) * | 2008-10-08 | 2010-04-22 | Sumitomo Electric Ind Ltd | Magnesium-based composite material and production method of the same |
| JP2010106365A (en) * | 2009-12-11 | 2010-05-13 | Sumitomo Electric Ind Ltd | Method for producing magnesium-based composite material |
| JP2010106366A (en) * | 2009-12-11 | 2010-05-13 | Sumitomo Electric Ind Ltd | Method for producing magnesium-based composite material |
| JP5739873B2 (en) * | 2010-04-02 | 2015-06-24 | 住友電気工業株式会社 | Magnesium-based composite member, heat dissipation member, and semiconductor device |
| US9556501B2 (en) | 2010-04-02 | 2017-01-31 | Sumitomo Electric Industries, Ltd. | Magnesium-based composite member, heat radiation member, and semiconductor device |
| JP2014062329A (en) * | 2013-12-11 | 2014-04-10 | Sumitomo Electric Ind Ltd | Magnesium-base composite material |
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