JP2002278656A - Method for charging computer system for component housing box and device for the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To realize the stable continuous utilization of a computer system by always maintaining the stable charging capacity of the battery of the computer system for a component housing box. SOLUTION: Box placing plates 20A-20N faced to working devices 12A-12N are formed with charging systems 28A-28N, and a component housing box 18 is successively carried and set on the box placing plates 20A-20N according to the order of the working processes of components, and a battery 247 of a computer 26 arranged in the component housing box 18 is connected to charging systems 28A-28N so as to be charged each time the component housing box 18 is set on the box placing plates 20A-20N.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a method and an apparatus for charging a battery of a computer system for managing component information incorporated in a box for storing and transporting semiconductor wafers and other components. More particularly, the present invention relates to a method and an apparatus for charging a computer system for a component storage box, which can be charged in parallel with a component processing step without disturbing the component processing.

[0002]

2. Description of the Related Art For example, in a semiconductor manufacturing apparatus, a wafer storage box 1 used for transporting and storing semiconductor wafers includes a cassette 3 for aligning and storing a plurality of semiconductor wafers 2 as shown in FIG. A box 4 in which the cassette 3 is stored, and a lid 5 for closing an opening of the box 4. An IC having a small liquid crystal display unit 6 and an input unit 7 is provided on the side surface of the box 4.
A card-type computer system 8 is assembled.

The computer system 8 manages information such as lot numbers and working conditions of the semiconductor wafers 2 stored in the wafer storage box 1 and includes a primary battery or a secondary battery (not shown) and a semiconductor manufacturing apparatus. A communication means for communicating with a host computer system for production execution support that manages a processing step is built-in, and is communicably connected to the host computer system when the wafer storage box 1 is transported and installed in a processing apparatus of a semiconductor manufacturing facility. Information such as lot numbers and work conditions for semiconductor wafers is exchanged between the host computer system and the computer system 8.

[0004]

In the computer system 8 incorporated in the wafer storage box 1, when the display function and the processing function are low and the power consumption is small, the battery is removed during the processing of the semiconductor wafer. There is almost no need to replace or recharge the secondary battery, but the display unit is enlarged with the expansion of the display function, the amount of communication information with the host computer system is increased, and the storage capacity is increased. As a result, when the power consumption of the computer system 8 increases, all the semiconductor wafers in the wafer storage box are continuously used until several hundred processing steps have passed without replacing the batteries or recharging the secondary batteries. Are limited, and are not suitable especially in the case of a relatively long lead time such as in semiconductor manufacturing.

Therefore, it is conceivable to mount a battery having a large capacity that can withstand continuous use for a long time in the wafer storage box. However, in this case, the battery becomes large and its storage space becomes large, and the wafer storage box itself becomes large. There is a problem of increasing the size and weight. In addition, if the battery capacity is reduced to avoid increasing the size and weight of the wafer storage box, it is necessary to remove the battery from the computer storage unit or replace the primary battery or recharge the secondary battery. In addition to this, it takes time and money for the replacement, and since the function of the computer system is stopped while the primary battery is replaced or the secondary battery is charged, malfunctions such as a stagnation of semiconductor production occur during this time. In addition, there is a problem that when the battery is made to last long, functions of the computer system such as a display function and a storage capacity are sacrificed.

SUMMARY OF THE INVENTION The present invention has been made to solve the above-described conventional problems, and a battery of a computer system incorporated in a component storage box such as a semiconductor wafer can be used in parallel with a component processing step. Provided is a method and an apparatus for charging a computer system for a component storage box, in which a battery is always maintained at a stable charge capacity by automatically charging without hindering processing, thereby enabling stable and continuous use of the computer system. The purpose is to do.

[0007]

SUMMARY OF THE INVENTION In order to achieve the above object, the present invention is directed to a component storage for accommodating a plurality of parts processed by a plurality of processing apparatuses and sequentially transporting the parts to a box installation location for each processing apparatus. A method for charging an operation battery of a computer system provided in a box and managing information of parts processed by each of the processing devices, wherein a charging system is provided in at least one of the plurality of box installation locations, The battery is connected to the charging system and charged each time a component storage box is installed at a box installation location having the charging system.

Further, the present invention is provided in a parts storage box which accommodates a plurality of parts processed by a plurality of processing apparatuses and is sequentially transported to a box installation location of each processing apparatus. A device for charging an operation battery of a computer system that manages information of parts to be performed, a charging system provided in at least one of the box installation locations, a battery receiving terminal provided in the computer system, A power supply terminal that is provided in the charging system and that is connected to the power receiving terminal and supplies charging power from the charging system to the battery every time the component storage box is installed in a box installation location having the charging system. It is characterized by the following.

In the charging method of the present invention, when the component storage box is installed in the box installation location having the charging system, the processing of the box installation location processing device until all the components of the component storage box are processed. The battery of the computer system can be automatically charged by the charging system. Therefore, the battery can always be maintained at a stable charge capacity without requiring any manpower, and the computer system can be stably used continuously.

Further, in the charging apparatus of the present invention, when the component storage box is installed at the box installation location having the charging system, the battery receiving terminal of the computer system is connected to the power supply terminal of the charging system. Until all the components in the component storage box are completely processed by the processing device, the battery of the computer system can be automatically charged by supplying power to the battery from the charging system. Therefore, the battery can always be maintained at a stable charge capacity without requiring any manpower, and the computer system can be stably used continuously.

[0011]

Embodiments of the present invention will be described below in detail with reference to the drawings. FIG. 1 is an explanatory view showing a schematic configuration of an entire semiconductor manufacturing process when a charging apparatus of a computer system for a component storage box according to the charging method of the present invention is installed in a semiconductor manufacturing line. FIG. FIG. 3 is a block diagram showing an internal configuration of a computer system according to the present invention, and FIG. 4 is a component provided corresponding to each product processing apparatus of a semiconductor manufacturing line. It is a perspective view showing an example of a storage box mounting base and a battery charging system provided on this mounting base.

In FIG. 1, a semiconductor manufacturing line includes, for example, respective processing steps A to N required for wafer processing such as thin film formation, oxidation, doping, annealing, resist processing, exposure, etching, and cleaning on a semiconductor wafer. And inspection devices 14A to 14N corresponding to the processing devices 12A to 12N and measuring and inspecting the processing results in the order of the processing steps. Further, in parallel with the semiconductor manufacturing line, component storage box transport means 16 is provided, and further, in the vicinity of the processing devices 12A to 12N and the inspection devices 14A to 14N, component storage transported by the transport means 16 is provided. Box mounting tables 20A to 20N and 2 for mounting boxes 18
2A to 22N (corresponding to the box installation location in the claims)
Is provided. The component storage box 18 follows the processing process A to N in order, and each time the predetermined processing and inspection in the processing device 12A to 12N and the inspection device 14A to 14N in each processing process A to N are completed, the next stage processing device And it is configured to be transported by the transport means 16 to the box installation location of the inspection device.

As shown in FIG. 2, the component storage box 18 includes a cassette (not shown) for aligning and storing a plurality of semiconductor wafers (not shown) as in the conventional case.
A box 181 in which the cassette is stored;
And a lid 182 for closing one opening. A computer system 24 mounted on a board 248 that is detachable from the box 181 is provided on a side surface of the box 181.

The computer system 24 manages information such as predetermined processing and inspection results in the processing devices 12A to 12N and the inspection devices 14A to 14N, and exchanges information with the production execution support host computer system 26. As shown in FIG. 2 and FIG. 3, in addition to being provided with a liquid crystal display unit 241 and an input unit 242, it stores information such as a lot number of a semiconductor wafer, working conditions, and a processing result and an inspection result of a part. A storage unit 243, a communication unit 244 for communicating with the host computer system 26 shown in FIG. 1 via a communication line 27 such as a LAN, and a CPU 245 for controlling and managing these units are provided. And a power receiving terminal 247 connected to the battery 246. The host computer system 26 includes a processing step for processing apparatuses 12A to 12N and an inspection apparatus 14A to 14N.
The control process and the processing / measurement result information are exchanged with the computer system 24 via the communication line 27.

A charging system 2 for charging a battery 246 of the computer system 24 is provided on the box mounting tables 20A to 20N facing the processing devices 12A to 12N.
8A to 28N are provided respectively. As shown in FIG. 4, the charging systems 28A to 28N include a board 281 fixed on the box mounting tables 20A to 20N, and a box installation mat 282 fixed on the board 281.
A power supply terminal 283 provided on the substrate 281 in the vicinity of one side edge of the box installation mat 282; And a converter (power adapter) 284 for outputting to the power supply terminal 283, and the input side of the converter 284 is connected via a power supply coat 285.
It is configured to be connected to an AC power outlet 286 provided in the box mounting tables 20A to 20N. Note that AC
The power outlet 286 is provided at the box mounting table 2
The area is not limited to 0A to 20N and may be these peripheral parts.

In the semiconductor manufacturing line equipped with the charging device configured as described above, the component storage box 18 is moved in accordance with the control information from the host computer system 26 in accordance with the order of the machining process and the order of the inspection process.
20N and 22A to 22N are sequentially transported and installed, and the processing devices 12A to 12N and the inspection device 14A at the installation locations are provided.
14N, predetermined processing and inspection are performed on each component of the component storage box 18 based on the component information and the production execution support information uploaded from the computer system 24. Then, the information of the processing result and the inspection result is transmitted to the host computer system 26 through the communication means 244 and the communication line 27.

On the other hand, according to the order of processing of the parts, the parts storage box 18 is provided with the box mounting mats 282 of the box mounting tables 20A to 20N having the charging systems 28A to 28N.
When installed on the upper side, the battery receiving terminal 247 of the computer system 24 comes into contact with the power supply terminal 283 of the charging system, and both are electrically connected. As a result, the components of the component storage box 18 are
Charge system 2 until all processing is completed in 2A-12N
The battery 246 is automatically charged by supplying power to the battery 246 from 8A to 28N. That is,
Each time the component storage box 18 is installed on the box mounting tables 20A to 20N, the batteries 246 of the computer system 24 charge the respective charging systems 28A to 28N.
Is supplementarily charged.

Therefore, according to the present embodiment, the battery 246 of the computer system 24 incorporated in the component storage box 18 can be automatically transferred in parallel with the component processing process without interfering with the component processing. , The battery 246 can always be maintained at a stable charge capacity without any need for manual operation, and the computer system 24 can be stably used continuously.
As a result, the battery 246 mounted on the computer system 24 can be reduced in size and capacity, and the component storage box 18 can be reduced in size and weight. It is suitable for a long case. Further, in the present embodiment, even if the capacity of the battery 246 is reduced, it is not necessary to remove the battery 246 from the wafer storage box for battery replacement or battery charging as in the related art. ,
Moreover, the computer system 2 for charging the battery
4 can be prevented beforehand, such as a malfunction or a stagnation in semiconductor production. Computer system 2
Since the board 4 and the board 248 can be separated from the component storage box 18, repair of the computer system 24 and cleaning of the component storage box 18 can be easily performed.

The charging method of the present invention uses the semiconductor wafer component storage box 18 as shown in the above embodiment.
Not limited to this, for example, used for storage boxes used for production of polytainers and color liquid crystal TFTs for storing recording media (sticks) with built-in ICs, or for local cleaning called mini-environment that isolates products from contamination sources The present invention can also be applied to a cassette to be used.
Further, the external power supply used in the charging systems 28A to 28N of the present invention is not limited to the commercial power supply shown in the embodiment,
For example, a photoelectric conversion unit that converts light energy such as sunlight or illumination light into electric power can be used as a power supply. Further, the computer system 24 of the present invention
May not be separated from the component storage box 18.

In the above-described embodiment, the charging system is connected to the box mounting table 2 facing the processing apparatuses 12A to 12N.
0A to 20N, but the present invention is not limited to this, and the inspection devices 14A to 14N
N may be installed on the box mounting tables 22A to 22N opposed to N. In addition, the charging system does not necessarily need to be installed in all of the box mounting tables 20A to 20N and 22A to 22N. In short, the charging systems are provided with enough charging systems to sufficiently charge the battery.
What is necessary is just to install in any of 20N and 22A-22N.

[0021]

As described above, according to the method and the apparatus for charging a computer system for a parts storage box of the present invention, each time the parts storage box is installed at a box installation location having a charging system, the battery of the computer system is discharged. Since the battery is connected to the charging system for charging, the battery can always be maintained at a stable charging capacity without any need for human intervention, and the computer system can be used stably and continuously. This makes it possible to reduce the size and capacity of the battery mounted on the computer system, thereby reducing the size and weight of the component storage box, and is also suitable for cases where the lead time is relatively long as in semiconductor manufacturing. And has the effect that the labor and cost for charging can be greatly reduced.

[Brief description of the drawings]

FIG. 1 is an explanatory diagram showing a schematic configuration of an entire semiconductor manufacturing process when a charging device of a computer system for a component storage box according to a charging method of the present invention is installed in a semiconductor manufacturing line.

FIG. 2 is an external view showing an example of a component storage box in which the charging method according to the present invention is applied to semiconductor manufacturing.

FIG. 3 is a block diagram showing an internal configuration of a computer system according to the present invention.

FIG. 4 is a perspective view showing an example of a component storage box mounting table provided for each product processing apparatus of the semiconductor manufacturing line and a battery charging system provided on the mounting table in the embodiment of the present invention. is there.

FIG. 5 is an explanatory perspective view of a conventional wafer storage box.

[Explanation of symbols]

A to N processing steps, 12A to 12N processing apparatus, 1
4A to 14N: inspection apparatus, 16: transport means, 18:
... parts storage box, 181 ... box, 182 ... lid,
20A to 20N and 22A to 22N: box mounting table, 24: computer system, 241: liquid crystal display unit, 242 ... input unit, 243 ... storage unit, 244 ...
... communication means, 245 ... CPU, 246 ... battery,
247: power receiving terminal, 26: host computer system, 27: communication line, 28A to 28N: charging system, 281: board, 282: box installation mat, 283: power supply terminal, 284: converter 28
5 ... power cord, 286 ... AC power outlet.

Claims (8)

[Claims] 1. A component storage box which accommodates a plurality of parts processed by a plurality of processing apparatuses and is sequentially transported to a box installation location of each processing apparatus. A method for charging an operation battery of a computer system that manages information, wherein a charging system is provided in at least one of the plurality of box installation locations, and the component storage box is installed in a box installation location having the charging system. Charging the computer system for a parts storage box, wherein the battery is connected to the charging system each time the battery is charged. 2. The computer system, comprising: a display unit;
2. The component storage according to claim 1, further comprising: an input unit, a storage unit, and a communication unit that transmits and receives information regarding components to and from a host computer system for production execution support that manages a machining process of each of the machining devices. How to charge a computer system for a box. 3. A component storage box for accommodating a plurality of parts processed by a plurality of processing apparatuses and sequentially transporting the parts to a box installation location of each processing apparatus. An apparatus for charging an operation battery of a computer system that manages information, comprising: a charging system provided in at least one of the box installation locations; a battery power receiving terminal provided in the computer system; A power supply terminal that is connected to the power receiving terminal and supplies charging power from the charging system to the battery every time the component storage box is installed in a box installation location having the charging system. Charger for computer system for parts storage box. 4. The charging device for a computer system for a component storage box according to claim 3, wherein the computer system including the battery and the power receiving terminal is detachably provided in the component storage box. 5. The computer system, comprising: a display unit;
4. The component storage according to claim 3, further comprising a communication unit configured to transmit and receive information regarding components to and from an input unit, a storage unit, and a production execution support host computer system that manages a processing process of each of the processing devices. Charging device for box computer system. 6. The component storage according to claim 3, wherein the charging system includes a converter that converts power supplied from an external power supply into DC power suitable for charging the battery and supplies the DC power to the battery. Charging device for box computer system. 7. The charging device according to claim 3, wherein the external power supply is a commercial power supply. 8. The charging device according to claim 3, wherein the external power supply is a photoelectric conversion unit that converts light energy into electric power.