JP2002269852A - Optical information recording medium manufacturing device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To improve an yield and to improve a device working rate in the manufacturing process of an optical recording medium using a dielectric layer, especially an MO, an MD, a CD-RW and a DVD-RW/+RW/-RAM disk. SOLUTION: For this optical information recording medium manufacturing device, in a polygonal vacuum film deposition device manufacturing the thin film of the optical recording medium, a deposition shield plate is provided on a holder part holding the optical recording medium and the deposition shield plate is attachable and detachable at a part other than a vacuum film formation vessel.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a method and an apparatus for manufacturing an optical recording medium, particularly an optical recording medium using a dielectric film, and more particularly to a magneto-optical recording disk, a rewritable compact disk (CD-RW) and It is applied to a method and an apparatus for manufacturing a digital video disk (DVD-RW / + RW / -RAM).

[0002]

2. Description of the Related Art As one of optical memory media capable of recording, reproducing and erasing by irradiation of electromagnetic waves, especially laser beams, a so-called phase-change type recording medium utilizing a transition between a crystal and an amorphous phase or between a crystal and a crystal phase is known. well known.
In particular, research and development on magneto-optical memories have recently been active because overwriting with a difficult single beam is possible and the optical system is simpler than the optical system on the drive side.

On the other hand, with the rapid spread of CDs (compact discs) in recent years, write-once write-once compact discs (CD-Rs) that can be written only once have been developed and have begun to spread on the market. However, in the case of a CD-R, if the write operation fails even once, it cannot be corrected, and the disk becomes unusable and must be discarded. Therefore, there has been a long-awaited demand for a rewritable compact disc that can compensate for the disadvantage.

As an example of research and development to date, there is a rewritable compact disk using a magneto-optical disk. However, it is difficult to overwrite and a CD-RO.
Due to its drawbacks such as difficulty in compatibility with M and CD-R, practical development of phase-change optical disks, which is advantageous in principle for ensuring compatibility, has been activated. In October 1996, a rewritable compact disc (CD-RW)
As Orange Book Part III (Ver. 1.0)
However, in September 1998, Ve for 1x to 4x records
r. 2.0 has been issued.

Generally, many phase-change optical recording media such as a magneto-optical recording medium and a CD-RW disk have a multilayer structure in which a recording layer is sandwiched between dielectric layers above and below. Usually, as a method for manufacturing these recording media, a manufacturing method is used in which each layer is laminated on a substrate such as polycarbonate by sputtering. In particular, recently, single-wafer sputtering apparatuses have become mainstream because of their high throughput, compactness and low cost.

Further, it is no exaggeration to say that cost performance is very important in a recording medium, and that sales performance is influenced by cost performance. Therefore, the price is of great concern to consumers among similar media, and the key to the manufacturer is how cheap it can be made. The rewritable recording medium has an industrial aspect because it requires expensive manufacturing equipment called a film forming apparatus. Therefore, in order to make it cheap, it is necessary to keep equipment depreciation costs low. In order to reduce equipment depreciation costs, it is necessary to have high tact, high occupancy rates, and low purchase costs. Compactness is also advantageous in terms of land costs per unit floor area (including buildings).

[0007] Balzers' Big Sp Sputtering Apparatus has been commercialized so far.
writer, Cube, SMO manufactured by Nihon Vacuum Co., Ltd.
-01 type. In recent years, a sputtering apparatus having a merit of both a single-wafer sputtering apparatus and a revolving-type sputtering apparatus has been commercialized (OCTAVA manufactured by Shibaura Mechatronics Co., Ltd.). Although these devices are excellent in various points, they have fundamental problems in manufacturing rewritable optical recording media.

[0008] Sputtering employs a method in which an inert gas such as Ar collides with a material called a target, and a film is formed from the material that comes out. Therefore, when the number of targets decreases, replacement must be performed, and downtime during that time greatly affects the operation rate of the apparatus. Therefore, in order to raise the operation rate as much as possible, it is common to exchange targets simultaneously.

Normally, to reduce downtime, a thick target is used or the use efficiency of the target is improved. Normally, a rewritable recording medium uses a dielectric material for a lower protective layer and an upper protective layer, and a magneto-optical recording medium uses SiN,
In a phase change recording medium, ZnS / SiO ₂ is generally used as a dielectric layer. The material of the deposition-preventing plate is made of metal, which is excellent in terms of heat conduction, workability, and handling. However, this dielectric layer has poor adhesion to the anti-adhesion plate, and easily peels off. If peeling occurs, the yield will be significantly reduced, and the shield plate must be replaced.

The adhesion can be improved by performing various surface treatments, but there is a limit to this, and peeling starts when the dielectric film has a certain thickness. In the case of a single-wafer type vacuum film forming apparatus, a large amount adheres to a deposition prevention plate around a substrate, and since the deposition prevention plate is mounted in a vacuum deposition tank, the apparatus is stopped when replacing, and the vacuum is released. There is a problem that it must be broken.

In a sputtering apparatus having a merit of both a single-wafer sputtering apparatus and a revolving-type sputtering apparatus, since a film is formed on a plurality of disks at once, the film is remarkably adhered to a central portion thereof. This replacement cannot be performed unless the device is stopped. The time until the replacement of the shield plate is significantly shorter than the time until the replacement of the target. At present, the cycle of the shield plate replacement defines the downtime cycle of the apparatus.

[0012]

SUMMARY OF THE INVENTION Accordingly, an object of the present invention is to solve all of the above-mentioned problems in the prior art, and to provide an optical recording medium using a dielectric layer, particularly MO, MD, and CD-R.
An object of the present invention is to improve the yield and the device operation rate in the manufacturing process of W and DVD-RW / + RW / -RAM disks.

[0013]

Means for Solving the Problems The inventors of the present invention have conducted intensive studies on the improvement of the method and apparatus for manufacturing an optical recording medium, and as a result, have found a method and apparatus for manufacturing an optical recording medium that meets the above-mentioned object. Was. That is, the above object is achieved by (1) a polygonal vacuum film forming apparatus for producing a thin film of an optical recording medium, wherein a holder for holding the optical recording medium is provided with an anti-adhesion plate, An optical information recording medium manufacturing apparatus characterized in that the plate is detachable in a part other than the vacuum film forming tank, (2) that the plate is detachable in a load lock chamber for detaching the substrate; Features (1)
(3) Optical information recording medium producing apparatus according to (1) or (2), wherein the adhesion preventing plate is held in a holder portion by a magnetic force of a magnet. (4) The optical information recording medium according to any one of (1) to (3), wherein the adhesion preventing plate is detached from a holder portion by a magnetic force of a magnet. Device ".

[0014]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail with reference to the drawings. FIG. 1 shows a single wafer type vacuum film forming apparatus 1 according to the present invention.
An example is shown, wherein (1) represents an inner mask, (2) represents a substrate, (3) represents an outer mask, (4) represents an adhesion-preventing plate, and (5) represents a disk holder. FIG. 2 shows an example of a vacuum deposition apparatus for taking a plurality of (three) sheets, and FIG. 3 shows an example of a vacuum deposition apparatus for taking a plurality of (four) sheets.
(The description is omitted because it is the same symbol.)

In general, vacuum deposition methods include vacuum deposition, ion plating, and sputtering, but sputtering is preferred in terms of cost and productivity. As a sputtering method, there are an RF method, a DC method, and the like.
The method that can be used is determined according to the material characteristics, but DC sputtering is more preferable because of simplification of the apparatus, sputtering rate and controllability.

Among the rewritable recording media, those having established the technology capable of DC sputtering of SiN like the magneto-optical recording media have the same structure of all the vacuum film forming tanks.
However, the phase change recording medium uses Zn on the lower and upper protective layers.
In general, S / SiO ₂ is used, and ZnS /
Since SiO ₂ is a dielectric, DC sputtering is not possible at present and RF sputtering is used. DC or RF sputtering is used for the other recording layer, and DC sputtering is used for the reflective layer. Therefore, the number and configuration of the vacuum film forming tanks are fixed to some extent from the beginning.

In general, the number of vacuum film forming tanks is preferably equal to or more than the number of layers of the optical recording medium to be manufactured. Generally, rewritable optical recording media that are widely used generally have a four-layer structure, and therefore four or more tanks are preferable. When there are a plurality of load lock chambers and the load lock chamber has a structure of three or more, more than four vacuum film forming tanks are arranged between each load lock chamber, and the size of the apparatus is increased, and productivity and equipment cost are increased. Above is also not preferred. Therefore, the number of load lock chambers is preferably one or two.

It is desirable that the deposition-preventing plate is made of non-magnetic material such as SUS or aluminum alloy. However, the deposition-preventing plate at the center of the plural sheets may be a martensitic material such as SUS410 due to the area. In the case of a single-wafer type, since the film adheres to the periphery of the disk, it adheres best to the deposition-preventing plate around the disk. For this reason, the deposition-preventing plate at the peripheral portion can be detached and attached to a part other than the vacuum film forming tank. At that time, it is preferable to provide a load lock chamber separate from the substrate attachment / detachment because it is effective for shortening the time required for evacuation and release of the vacuum in the normal operation. In the case of FIG. 1, a non-magnetic material is preferable from the viewpoint of the size of the attachment-preventing plate to be detached and the position outside the disk. Magnetic force may be used.

Also, in the case of taking a plurality of sheets as shown in FIGS. 2 and 3, it adheres best to the central portion between the disks. For this reason, this adhesion-preventing plate can be detached and attached in places other than the vacuum film forming tank. At this time, it is preferable that the substrate is attached and detached in the same load lock chamber because it is advantageous in terms of the size of the apparatus and the cost. At this time, a magnetic material may be used depending on the size of the attachment / detachment prevention plate and the positional relationship between the attachment prevention plate and the disk. It is preferable to use the magnetic force of a magnet for holding the deposition-preventing plate because of its size, but a mechanical holding method may be used.

When the attachment plate is detached from the load lock section, the inside of the vacuum chamber is kept at a vacuum. In the case of a single-wafer type, it is preferable to be mechanically held by a detacher, but a magnetic force by a magnet may be used. In the case of taking a plurality of sheets, it is preferable that the sheet is held by the detacher by the magnetic force of the magnet, but it may be mechanically held by the detacher.

[0021]

As is apparent from the detailed and concrete description above, by using the apparatus of the present invention, an optical recording medium using a dielectric layer, in particular, MO, MD, CD-RW and DVD-RW / It is possible to achieve an improvement in the yield in the manufacturing process of the + RW / -RAM disk and an improvement in the operation rate of the device.

[Brief description of the drawings]

FIG. 1 is a view showing one example of a single wafer type vacuum film forming apparatus of the present invention.

FIG. 2 is a view showing another example of the single-wafer vacuum film forming apparatus of the present invention.

FIG. 3 is a view showing still another example of the single wafer type vacuum film forming apparatus of the present invention.

[Explanation of symbols]

 DESCRIPTION OF SYMBOLS 1 Inner mask 2 Substrate 3 Outer mask 4 Protective plate 5 Disk holder

Claims (4)

[Claims] 1. A polygonal vacuum film forming apparatus for producing a thin film of an optical recording medium, wherein a holder for holding the optical recording medium is provided with a deposition-preventing plate, and the deposition-preventing plate is other than a vacuum deposition tank. An optical information recording medium manufacturing apparatus, which is detachable at a part. 2. The optical information recording medium manufacturing apparatus according to claim 1, wherein the attachment-preventing plate is detachable in a load lock chamber for detaching a substrate. 3. The optical information recording medium producing apparatus according to claim 1, wherein the attachment-preventing plate is held at a holder portion by a magnetic force of a magnet. 4. The apparatus according to claim 1, wherein said attachment-preventing plate is detached from said holder by magnetic force of a magnet.
The optical information recording medium manufacturing apparatus according to any one of the above.