JP2002267822A - Method for manufacturing mirror - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing a mirror which includes a process of vapor-depositing a reflective film on one surface of a glass base plate with a large area and dividing the resultant plate into individual pieces, dispenses with an air-blow washing after the dividing required besides a washing work after polishing process performed before the vapor deposition, thereby enables prevention of the lowering of productivity and increase in cost due to increase in the number of processes. SOLUTION: The method is composed of a finishing process in which at least one face of a glass plate 2A is polished, a scribing process in which scribed grooves 4 having a prescribed depth are formed on the polished face with a scribing device, a washing process in which the glass plate for which the scribing process has been completed is washed, a vapor-deposition process in which a reflective film is formed by vapor-deposition on the one face of the glass plate for which the washing process has been completed, and a dividing process in which the glass plate for which the vapor-deposition process has been completed is divided along the scribed grooves.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manufacturing method suitable for mass-producing a mirror as an optical component having a reflection film formed on a surface of a glass plate by vapor deposition by batch processing.

[0002]

2. Description of the Related Art In a drive apparatus for recording and reproducing optical disks such as CDs and DVDs, an optical pickup composed of a plurality of optical components and the like is used as recording and reproducing means. That is, the optical pickup is configured to guide outgoing light from a semiconductor laser light source that generates laser light to a recording surface of an optical disk via a plurality of optical components. As one of these optical components, a mirror in which a reflective film is formed by vapor deposition on one side of a flat glass plate is used. This mirror 1 has a vertical and horizontal dimension of 5.8 mm and a wall thickness of 1.4 m, for example, as shown in FIG.
m is a small configuration in which the reflective film 3 is deposited on one surface of the glass flat plate 2, and thus is not suitable for manufacturing in individual pieces, and after a predetermined process is performed on the large-area glass plate base material 2 </ b> A. It is manufactured by a batch process through a procedure of dividing into individual pieces.

FIG. 4 is a process diagram showing a conventional method for manufacturing a mirror. First, in the process shown in FIG. 4 (a), both surfaces of a large-area glass base material 2A are polished and then washed. This removes oil stains and dust adhering to the surface. Subsequently, in the step (b), a reflective film 3A is deposited on one surface of the base material 2A, and in the step (c), a scribe groove 4 of a required depth extending vertically and horizontally on the surface on which the reflective film 3A is formed is illustrated. Notches are formed by a scribing device that is not used, and then cleaning by air blowing is performed to remove chips. Thereafter, in the step (d), the individual pieces 1 are divided along the scribe grooves 4 by hand or using a dividing device. Thereafter, as shown in FIG. Transfer to and pack.

However, in the above-mentioned conventional post-deposition scribing method, in addition to performing the operation of cleaning the glass base material in the step (a), cleaning by air blow is also performed after vapor deposition for removing chips generated after the scribing. More work is required. For this reason, there has been a problem that productivity is reduced and cost is increased.

[0005]

SUMMARY OF THE INVENTION The present invention has been made in view of the above, and has been made in consideration of the above circumstances, and includes a step of forming a reflective film on one surface of a large-area glass plate base material by vapor deposition and dividing the mirror into individual pieces. In the manufacturing method, in addition to the cleaning operation after the polishing step performed before the vapor deposition, a method for manufacturing a mirror capable of preventing a decrease in productivity and an increase in cost due to an increase in the number of steps by performing air blow cleaning after division is provided. The task is to

[0006]

In order to solve the above-mentioned problems, a first aspect of the present invention is a polishing step of polishing at least one surface of a glass plate base material, and a scribing device on the polished one surface by a scribing device. A scribing step of forming a scribe groove, a cleaning step of cleaning the glass plate preform after the scribing step, and a vapor deposition step of vapor-depositing and forming a reflective film on the one surface of the glass plate preform after the cleaning step. A dividing step of dividing the glass plate base material after the vapor deposition step into individual pieces along the scribe grooves.

[0007]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, the present invention will be described in detail with reference to embodiments shown in the drawings. FIGS. 1A to 1E are process diagrams for explaining a manufacturing method according to an embodiment of the present invention. First, both surfaces of a large-area glass plate base material 2A in a process shown in FIG. Polished and then
In the step (b), a scribe groove 4 having a required depth extending vertically and horizontally is cut and formed on one surface of the base material 2A by a scribe device (not shown), and then washed to remove chips, oil, and dust. In the following step (c),
The reflective film 3A is deposited, and in the step (d), the pieces are divided into individual pieces 1 along the scribe grooves 4 by hand or using a dividing device, and then the individual pieces are separated by the vacuum suction device 6 as shown in (e). Adsorbed, transferred to tray 7, and packed. As described above, according to the present embodiment, the removal of the chips by the scribe device and the cleaning before the vapor deposition can be performed in one step at a time, so that one step can be reduced, the productivity is increased, and the cost is reduced. Can be achieved. In addition, since the mirror manufactured by the manufacturing method of the present invention has a deposited film formed inside the scribe groove 4, it is easy to distinguish the mirror from the mirror manufactured by the conventional method.

Next, in another embodiment of the present invention, FIG.
By forming the scribe groove under a new condition in the scribe step (b), it is possible to solve a problem frequently occurring under the conventional scribe condition. First, the cutting conditions of the glass plate base material by the conventional scribing apparatus are as shown in FIG.
That is, the thickness of the glass plate base material 2A: t1.4 mm, the scribe speed: 200 mm / sec, the cutting amount:
0.15 mm Blade load: 0.10 MPa Penet blade 10 Specifications: Penet SC 2.0 × 0.
65 × 0.8 Angle 125 ° When the scribe grooves are formed under the above-described conditions using the penet edge 10 having the above-described configuration, the vertical cracks do not penetrate in the thickness direction of the glass plate base material. (D)
2B, the peripheral edge, particularly the corner, of the individual piece 1 obtained after the division shown in FIG. 2B has a size exceeding the specification (250 μm or less) as shown in FIG. .

In order to solve such disadvantages of the prior art, in the present invention, the scribe speed and the cutting edge load under the above-mentioned conditions are respectively improved as follows. Scribe speed: 80 mm / sec, edge load: 0.1
6MPa As a result of setting the scribing conditions in this way, it is possible to reduce the amount of shaping and chipping formed on the peripheral edge after division within the range of the specification (250 μm).
m or less), and the rejection rate can be greatly reduced. The method for manufacturing the mirror can be applied not only to a mirror for an optical pickup, but also to a method for manufacturing a mirror used for another purpose, for example, a panel for a liquid crystal display.

[0010]

As described above, according to the present invention, a scribing groove having a required depth is formed on one surface of a polished glass base material by a scribing device, and then the glass base material is washed. A mirror is formed by vapor-depositing a reflective film on the one surface of the glass plate preform and then dividing the mirror. In the manufacturing method of (1), in addition to the cleaning operation after the polishing step performed before the vapor deposition, the necessity of performing the air blow cleaning after the division is eliminated, and the reduction in productivity and the increase in cost due to an increase in the number of steps can be prevented.

[Brief description of the drawings]

FIGS. 1A to 1E are process diagrams for explaining a manufacturing method according to an embodiment of the present invention.

FIGS. 2A and 2B are explanatory views of another embodiment of the present invention.

FIG. 3 is a perspective view of an example of a mirror.

FIGS. 4A to 4E are process diagrams showing a conventional manufacturing method.

[Explanation of symbols]

1 Mirror (piece), 2 glass plate, 2A glass plate base material, 3 reflective film, 4 scribe grooves, 6 vacuum emptying device, 7 tray, 10 penet edge.

 ────────────────────────────────────────────────── ─── Continued on the front page (72) Inventor Daichi Wakatsuki 2-1-1 Kotani, Samukawa-cho, Koza-gun, Kanagawa F-term in Toyo Tsushinki Co., Ltd. (reference) 2H042 DC02 DC09 DC10 DC10 4G015 FA03 FA04 FB01 FC10

Claims (1)

[Claims] 1. A finishing step of polishing at least one surface of a glass sheet base material, a scribing step of forming a scribe groove having a required depth on the polished surface by a scribing device, and a glass sheet mother having completed the scribing step. A cleaning step of cleaning the material, a vapor deposition step of vapor-depositing and forming a reflective film on the one surface of the glass plate preform after the cleaning step, and breaking the glass plate preform after the vapor deposition step into individual pieces along the scribe grooves. A method of manufacturing a mirror, comprising: a dividing step of dividing.