JP2002265282A - Vessel for calcination - Google Patents
Vessel for calcinationInfo
- Publication number
- JP2002265282A JP2002265282A JP2001065641A JP2001065641A JP2002265282A JP 2002265282 A JP2002265282 A JP 2002265282A JP 2001065641 A JP2001065641 A JP 2001065641A JP 2001065641 A JP2001065641 A JP 2001065641A JP 2002265282 A JP2002265282 A JP 2002265282A
- Authority
- JP
- Japan
- Prior art keywords
- coating film
- srzro
- zro
- spray coating
- thermal spray
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Landscapes
- Coating By Spraying Or Casting (AREA)
- Furnace Housings, Linings, Walls, And Ceilings (AREA)
- Furnace Charging Or Discharging (AREA)
Abstract
Description
【０００１】[0001]
【発明の属する技術分野】被加熱物が載置される焼成用
容器に係わり、特に、セラミックコンデンサ、ソフトフ
ェライト等の電子部品用セラミック材料の焼成、熱処理
工程に使用される焼成用容器に関する。BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a firing container on which an object to be heated is placed, and more particularly to a firing container used for firing and heat-treating ceramic materials for electronic components such as ceramic capacitors and soft ferrite.
【０００２】[0002]
【従来の技術】従来、電子部品の焼成温度は、一般に１
０００〜１７００℃の温度域で行われるため、被焼成
（加熱）物が載置される焼成用容器としては、耐熱性に
優れたＡｌ２Ｏ３−ＳｉＯ２質、Ａｌ２Ｏ３−ＳｉＯ２
−ＭｇＯ質、ＭｇＯ−Ａｌ２Ｏ３−ＺｒＯ２質、ＳｉＣ
質等のセラミックス基材が使用される。2. Description of the Related Art Conventionally, the firing temperature of electronic parts is generally 1
Since the firing is performed in a temperature range of 000 to 1700 ° C., the firing container on which the object to be fired (heated) is placed is made of Al 2 O 3 —SiO 2 , Al 2 O 3 —SiO 2 having excellent heat resistance.
-MgO quality, MgO-Al 2 O 3 -ZrO 2 quality, SiC
A ceramic substrate of quality or the like is used.
【０００３】これらの焼成用容器上に直接焼成物を載置
させ焼成用容器成分との反応が起こる場合は、離反応性
のＺｒＯ２等の素材からなるセッター、もしくは容器表
面に離反応性の同様の素材でコーティングを施した焼成
用容器（道具材）が使用される。例えば、セラミックコ
ンデンサの場合にはＺｒＯ２が使用され、ソフトフェラ
イト（Ｍｎ−Ｚｎ系等）の場合にはＡｌ２Ｏ３、ＺｒＯ
２あるいは被焼成物と同組成のセッターもしくはコーテ
ィング品が使用される。When a fired product is directly placed on these firing containers and reacts with the firing container components, a setter made of a material such as ZrO 2 having a release reactivity, or a release reactivity on the surface of the container is used. A firing container (tool material) coated with a similar material is used. For example, ZrO 2 is used for a ceramic capacitor, and Al 2 O 3 , ZrO 2 is used for a soft ferrite (Mn—Zn type or the like).
2 or a setter or coating having the same composition as the object to be fired is used.
【０００４】このコーティングによる被覆膜を形成する
方法としては、セラミックススラリーを塗布した後，
高温で焼きつける方法、ＣＶＤ法および溶射法等が
あるが、耐久性、経済性に優れる溶射法でコーティン
グした製品の使用割合が近年増加している。[0004] As a method of forming a coating film by this coating, after a ceramic slurry is applied,
There are a baking method at a high temperature, a CVD method, a thermal spraying method, and the like, and the use ratio of a product coated by a thermal spraying method, which is excellent in durability and economy, has been increasing in recent years.
【０００５】この溶射法を用いて製造される焼成用容器
として、特開昭６３−３３５５１号公報に記載されてい
るようなアルミナ・シリカ質基材にＡｌ２Ｏ３溶射被覆
膜を形成する焼成用容器、特開平７−２７４８７号公報
に記載されているようなアルミナ・シリカ質基材にイッ
トリア安定化ジルコニア質溶射被覆膜を形成する焼成用
容器、あるいは、アルミナ・シリカ質基材にＺｒＯ２と
ＣａＯを主成分とし鉱物組成がジルコン酸カルシウムで
ある溶射被覆膜を形成する焼成用容器がある。As a firing vessel manufactured by using this thermal spraying method, an Al 2 O 3 thermal spray coating film is formed on an alumina-silica base material as described in JP-A-63-33551. A firing container, a firing container for forming a spray-coated yttria-stabilized zirconia coating film on an alumina-siliceous substrate as described in JP-A-7-27487, or an alumina-siliceous substrate. There is a baking container for forming a thermal spray coating having ZrO 2 and CaO as main components and a mineral composition of calcium zirconate.
【０００６】[0006]
【発明が解決しようとする課題】しかし、これら従来の
焼成用容器を用い、ＢａＴｉＯ３等を主成分とするセラ
ミックコンデンサや誘電体フィルタを積載して焼成を行
なうと、溶射被覆膜の剥離や、溶射被覆膜の体積膨張に
よるソリ（基材も含めた）等が発生し使用不可能になる
問題が多く発生する。このような問題は主として、被焼
成物に含まれる成分が、溶射被覆膜側に拡散、浸透した
結果溶射被覆膜が体積膨張したり、基材まで浸透した成
分が基材を変質させることが原因である。However, when a ceramic capacitor or a dielectric filter containing BaTiO 3 or the like as a main component is mounted and fired using these conventional firing containers, the thermal spray coating film may be peeled off. In addition, warpage (including the base material) due to the volume expansion of the thermal spray coating film and the like are caused, and there are many problems that the thermal spray coating film becomes unusable. Such problems are mainly caused by the fact that the components contained in the material to be fired diffuse and permeate to the spray coating film side, and as a result, the spray coating film expands in volume, and the components penetrating to the base material deteriorate the base material. Is the cause.
【０００７】そこで、溶射被覆膜の剥離や、溶射被覆膜
の体積膨張によるソリ（基材も含めた）等の発生をなく
した焼成用容器が要望されており、本発明は上述した事
情を考慮してなされたもので、溶射被覆膜の剥離や、溶
射被覆膜の体積膨張によるソリ（基材も含めた）等の発
生をなくした焼成用容器を提供することを目的とする。Therefore, there is a need for a baking container that eliminates the occurrence of warpage (including the base material) due to peeling of the thermal spray coating film and volume expansion of the thermal spray coating film. It is an object of the present invention to provide a firing container which eliminates the occurrence of warpage (including a base material) due to the peeling of the thermal spray coating film and the volume expansion of the thermal spray coating film. .
【０００８】[0008]
【課題を解決するための手段】本発明者等は、上記目的
実現のために、鋭意研究した結果、溶射製品の寿命を決
める剥離やソリの発生を抑制するための方法として、被
焼成物と溶射膜間の反応を抑える観点から、セラミック
コンデンサ等の主成分であるＢａＴｉＯ３と溶射被覆膜
間の物質移動に着目して検討した結果、表面の溶射成分
としてＳｒＺｒＯ３を用いることでＢａＴｉＯ３との反
応性を減少させ、剥離やソリ等の不具合を抑制し溶射製
品の寿命の向上が図れることを見出し、本発明をするに
至った。Means for Solving the Problems The present inventors have conducted intensive studies to achieve the above object, and as a result, as a method for suppressing the occurrence of peeling or warpage that determines the life of a sprayed product, the method for producing a material to be fired has been described. From the viewpoint of suppressing the reaction between the sprayed films, BaTiO 3 which is a main component of a ceramic capacitor or the like and the mass transfer between the sprayed coating films were examined. As a result, BaTiO 3 was obtained by using SrZrO 3 as the surface sprayed component. The present invention has been found to reduce the reactivity with, suppress defects such as peeling and warping, and to improve the life of the sprayed product, and have accomplished the present invention.
【０００９】すなわち、上記目的を達成するためになさ
れた本願請求項１の発明は、セラミック基材の表面に、
ＳｒＺｒＯ３単独、もしくはＳｒＺｒＯ３にＺｒＯ２お
よびＡｌ２Ｏ３の少なくとも一つを加えた溶射被覆膜を
有することを特徴とする焼成用容器であることを要旨と
している。[0009] That is, the invention of claim 1 of the present invention, which has been made to achieve the above-mentioned object, provides a ceramic substrate with
The gist of the present invention is to provide a firing container characterized by having a thermal spray coating film of SrZrO 3 alone or SrZrO 3 to which at least one of ZrO 2 and Al 2 O 3 is added.
【００１０】本願請求項２の発明では、上記溶射被覆膜
のＳｒＺｒＯ３の割合が２５％以上であることを特徴と
する請求項１に記載の焼成用容器であることを要旨とし
ている。In the invention of claim 2 of the present application, the gist of the present invention is the firing container according to claim 1, wherein the ratio of SrZrO 3 in the thermal spray coating is 25% or more.
【００１１】本願請求項３の発明では、上記溶射被覆膜
の表面粗さＲａが１０μｍ以上であることを特徴とする
請求項１または２に記載の焼成用容器であることを要旨
としている。[0011] In the invention of claim 3 of the present application, the gist of the present invention is the firing container according to claim 1 or 2, wherein the surface roughness Ra of the thermal spray coating film is 10 µm or more.
【００１２】[0012]
【発明の実施の形態】本発明に係わる焼成用道具材の一
実施の形態について説明する。DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS One embodiment of a firing tool according to the present invention will be described.
【００１３】焼成用道具材は、Ａｌ２Ｏ３−ＳｉＯ
２質、Ａｌ２Ｏ３−ＳｉＯ２−ＭｇＯ質、ＭｇＯ−Ａｌ
２Ｏ３−ＺｒＯ２質、ＳｉＣ質から一つ選択されたセラ
ミック基材の表面２ａに、ＳｒＺｒＯ３単独、もしくは
ＳｒＺｒＯ３にＺｒＯ２およびＡｌ２Ｏ３の少なくとも
一つを加えて溶射し表面被覆膜を形成するものである。The firing tool material is Al 2 O 3 —SiO
2 quality, Al 2 O 3 -SiO 2 -MgO quality, MgO-Al
The 2 O 3 -ZrO 2 quality surface 2a of the ceramic substrate which is one selected from SiC membrane, the sprayed surface in addition SrZrO 3 alone or in SrZrO 3 at least one of ZrO 2 and Al 2 O 3 A cover film is formed.
【００１４】セラミック基材は、Ａｌ２Ｏ３−ＳｉＯ２
質、Ａｌ２Ｏ３−ＳｉＯ２−ＭｇＯ質、ＭｇＯ−Ａｌ２
Ｏ３−ＺｒＯ２質、ＳｉＣ質のいずれか一つからなる。The ceramic substrate is made of Al 2 O 3 —SiO 2
Quality, Al 2 O 3 -SiO 2 -MgO quality, MgO-Al 2
It is made of one of O 3 -ZrO 2 and SiC.
【００１５】表面被覆膜はＳｒＺｒＯ３単独で用いても
よく、また、このＳｒＺｒＯ３にＺｒＯ２およびＡｌ２
Ｏ３の少なくとも一つを加えて、一般に用いられる溶射
法により溶射して形成する。また、表面被覆膜は基材上
に形成されたＡｌ２Ｏ３の中間溶射被覆膜上に、ＳｒＺ
ｒＯ３単独、もしくは、ＳｒＺｒＯ３にＺｒＯ２を加え
て溶射し形成してもよい。The surface coating may be used SrZrO 3 alone or, ZrO 2 and Al 2 into the SrZrO 3
At least one of O 3 is added, and thermal spraying is performed by a commonly used thermal spraying method. In addition, the surface coating film is formed on the intermediate spray coating film of Al 2 O 3 formed on the base material by SrZ.
rO 3 may be used alone, or may be formed by adding ZrO 2 to SrZrO 3 and spraying.
【００１６】いずれの場合も表面被覆膜のＳｒＺｒＯ３
の割合は２５％以上であるのが好ましい。この割合が２
５％より小さいと、ＢａＴｉＯ３との反応性を十分減少
させることができず、剥離やソリ等の不具合を十分抑制
できない。In each case, the surface coating film SrZrO 3
Is preferably 25% or more. This ratio is 2
If it is less than 5%, the reactivity with BaTiO 3 cannot be sufficiently reduced, and defects such as peeling and warping cannot be sufficiently suppressed.
【００１７】ＳｒＺｒＯ３の割合が大きいほど重量変化
が小さく反応性が低くなるが、コスト面から、ＳｒＺｒ
Ｏ３原料は生産量が少なくジルコニアに比較してコスト
が高いため、使用条件に応じて耐久性とコストのバラン
スを考慮して、ＳｒＺｒＯ３とジルコニアとの混合割合
を決定するのが好ましい。The larger the ratio of SrZrO 3, the smaller the change in weight and the lower the reactivity.
Since the amount of O 3 raw material is small and the cost is high as compared with zirconia, it is preferable to determine the mixing ratio of SrZrO 3 and zirconia in consideration of the balance between durability and cost according to the use conditions.
【００１８】表面被覆膜の表面粗さＲａが１０μｍ以上
であるのが好ましい。Ｒａが１０μｍより小さいと、溶
射による重量変化が大きくなり、反応性が大きくなる。
溶射原料の平均粒径としては、例えば７０μｍのものを
用いれば、表面粗さＲａはほぼ１２μｍになる。また、
表面被覆膜の厚さは、例えば２００μｍである。It is preferable that the surface roughness Ra of the surface coating film is 10 μm or more. When Ra is smaller than 10 μm, the weight change due to thermal spraying increases, and the reactivity increases.
If the average particle diameter of the thermal spraying material is, for example, 70 μm, the surface roughness Ra becomes approximately 12 μm. Also,
The thickness of the surface coating film is, for example, 200 μm.
【００１９】上記のようにＳｒＺｒＯ３の割合が２５％
以上の表面被覆膜は、表面の溶射成分としてＳｒＺｒＯ
３を用いることでセラミックコンデンサ等の主成分であ
るＢａＴｉＯ３との反応性が小さくなり、剥離やソリ等
の不具合を抑制し溶射製品の寿命の向上が図れる。As described above, the ratio of SrZrO 3 is 25%
The above surface coating film is made of SrZrO
3 that reactivity with the main component BaTiO 3 ceramic capacitors is decreased by using, thereby improving the life of the spray product to suppress problems such peeling and warpage.
【００２０】[0020]
【実施例】形状および材質が下記のような基材に各種の
溶射被覆膜を施したテストピースを作製し、このテスト
ピース上にＢａＴｉＯ３を主成分とするコンデンサ原料
を用いたテストピース（大きさ１１０×２０×３ｍｍ、
重さ２０ｇ）を積載して、１３５０℃で０〜８０時間熱
処理を行い、１３５０℃での保持時間に対する重量変
化、外観の変化を調査した。EXAMPLE A test piece was prepared by applying various thermal spray coatings to a base material having the following shape and material, and a test piece using a capacitor material containing BaTiO 3 as a main component was formed on the test piece. Size 110 × 20 × 3mm,
A weight of 20 g) was loaded and heat-treated at 1350 ° C. for 0 to 80 hours, and changes in weight and changes in appearance with respect to the holding time at 1350 ° C. were examined.
【００２１】基材材質：Ａｌ２Ｏ３−ＳｉＯ２質（Ａｌ
２Ｏ３＝８７％、ＳｉＯ２＝１２％）、 形状：１５０×４０×４ｍｍ） （実施例１） 方法：ＺｒＯ２とＳｒＯが１ｍｏｌ：１ｍｏｌ、原料平
均粒径が７０μｍの電融法を用いて作製したＳｒＺｒＯ
３を溶射原料として水プラズマ溶射法により溶射被覆膜
を基材表面に形成した。表１に示すように、被覆膜の厚
さは、２００μｍ、被覆膜表面粗さはＲａ＝１２μｍで
ある。このテストピースを用いて上記のような反応試験
を行った。Base material: Al 2 O 3 —SiO 2 (Al
( 2O 3 = 87%, SiO 2 = 12%), shape: 150 × 40 × 4 mm) (Example 1) Method: ZrO 2 and SrO 1 mol: 1 mol, using an electrofusion method with a raw material average particle diameter of 70 μm. SrZrO prepared by
Using No. 3 as a spraying material, a sprayed coating film was formed on the substrate surface by a water plasma spraying method. As shown in Table 1, the thickness of the coating film was 200 μm, and the surface roughness of the coating film was Ra = 12 μm. Using this test piece, the above-described reaction test was performed.
【００２２】結果：表１に示す。Results: shown in Table 1.
【００２３】重量変化は１３５０℃、４０時間で０．０
１ｇ増加、１３５０℃、８０時間で０．０４ｇ増加、試
験後の外観はわずかに斑点状の着色が見られる程度であ
り、良好であった。The weight change is 10.0 ° C. at 40 ° C.
It increased by 1 g and increased by 0.04 g at 1350 ° C. for 80 hours. The appearance after the test was good, with slight spot-like coloring being observed.
【００２４】（実施例２） 方法：実施例１と同様にしてＳｒＺｒＯ３の被覆膜を形
成するが、表１に示すように、中間層としてＡｌ２Ｏ３
の層を１００μｍ形成し、この上にＳｒＺｒＯ ３被覆膜
を１００μｍ形成する。このテストピースを用いて実施
例１と同様の反応試験を行った。(Example 2) Method: SrZrO3Shaped coating film
However, as shown in Table 1, Al was used as the intermediate layer.2O3
Is formed to a thickness of 100 μm, and SrZrO 3Coating film
Is formed to 100 μm. Performed using this test piece
The same reaction test as in Example 1 was performed.
【００２５】結果：表１に示す。Results: shown in Table 1.
【００２６】重量変化は１３５０℃、４０時間で０．０
１ｇ増加、１３５０℃、８０時間で０．０５ｇ増加、試
験後の外観はわずかに斑点状の着色が見られる程度であ
り、良好であった。The change in weight was 0.0
Increased by 1 g, increased by 0.05 g at 1350 ° C. for 80 hours, and the appearance after the test was good with slight spot-like coloring being observed.
【００２７】（実施例３および実施例５） 方法：表１に示すように、ＺｒＯ２（８ｗｔ％Ｙ２Ｏ３
部分安定化ジルコニア）とＳｒＺｒＯ３を混合して溶射
を行い、表面層を形成する。混合比は実施例３が５０：
５０、実施例５が２５：７５である。(Examples 3 and 5) Method: As shown in Table 1, ZrO 2 (8 wt% Y 2 O 3)
Partially stabilized zirconia) and SrZrO 3 are mixed and sprayed to form a surface layer. The mixing ratio of Example 3 was 50:
50, Example 5 is 25:75.
【００２８】結果：ＳｒＺｒＯ３の割合が減少すると、
重量変化は大きくなる傾向にあるが、ＳｒＺｒＯ３を含
有しないＺｒＯ２（８ｗｔ％Ｙ２Ｏ３部分安定化ジルコ
ニア）を単独で溶射（比較例１）と比較すると明らかに
重量変化は少ない。また、実施例３および実施例５共、
試験後の外観はわずかに斑点状の着色が見られる程度で
あり、良好であった。Result: When the ratio of SrZrO 3 decreases,
Although the change in weight tends to be large, the change in weight is clearly smaller when ZrO 2 containing no SrZrO 3 (8 wt% Y 2 O 3 partially stabilized zirconia) alone is compared with thermal spraying (Comparative Example 1). Further, in both Example 3 and Example 5,
The appearance after the test was good, with slight spot-like coloring being observed.
【００２９】（実施例４） 方法：表１に示し、実施例２と同様の方法により、粒径
の細かい原料を用いて溶射し、被覆膜表面の表面粗さを
Ｒａ＝６μｍにする。(Example 4) Method: In the same manner as in Example 2 shown in Table 1, thermal spraying is performed by using a raw material having a small particle size to make the surface roughness of the coating film surface Ra = 6 μm.
【００３０】結果：表面粗さが大きい試料（実施例３、
Ｒａ＝１３μｍ）に比較して重量変化の割合は大きくな
るが、外観はわずかに斑点状の着色が見られる程度であ
り、良好であった。Result: A sample having a large surface roughness (Example 3,
(Ra = 13 μm), but the rate of weight change was large, but the appearance was good, with a slight spot-like coloration being observed.
【００３１】（比較例１および比較例２） 方法：各実施例に用いたと同様の基材にＺｒＯ２（８ｗ
ｔ％Ｙ２Ｏ３部分安定化ジルコニア）を単独で溶射し
た。比較例１は表面粗さＲａ＝１４μｍと大きくし、比
較例２は表面粗さＲａ＝６μｍと小さくした。(Comparative Example 1 and Comparative Example 2) Method: ZrO 2 (8w) was applied to the same base material as used in each Example.
t% Y 2 O 3 partially stabilized zirconia) was sprayed alone. Comparative Example 1 had a large surface roughness Ra = 14 μm, and Comparative Example 2 had a small surface roughness Ra = 6 μm.
【００３２】結果：ＳｒＺｒＯ３を含有する被覆膜が形
成された各実施例に比較して、重量変化が大きく、外観
も大きく変色していた。また、表面粗さの小さい比較例
２では被覆膜にひび割れが発生していた。Result: The weight change was large and the appearance was significantly discolored as compared with the examples in which the coating film containing SrZrO 3 was formed. In Comparative Example 2 having a small surface roughness, cracks occurred in the coating film.
【００３３】[0033]
【表１】 [Table 1]
【００３４】[0034]
【発明の効果】本発明に係わる焼成用容器によれば、溶
射被覆膜の剥離や、溶射被覆膜の体積膨張によるソリ
（基材も含めた）等の発生をなくした焼成用容器を提供
することができる。According to the firing container according to the present invention, there is provided a firing container in which peeling of a thermal spray coating and generation of warpage (including a substrate) due to volume expansion of the thermal spray coating are eliminated. Can be provided.
【００３５】すなわち、セラミック基材の表面に、Ｓｒ
ＺｒＯ３単独、もしくはＳｒＺｒＯ ３にＺｒＯ２および
Ａｌ２Ｏ３の少なくとも一つを加えた溶射被覆膜を有す
る焼成用容器であるので、セラミックコンデンサ等の主
成分であるＢａＴｉＯ３との反応性を減少させて、剥離
やソリ等の不具合を抑制し溶射製品の寿命の向上が図れ
る。That is, Sr is applied to the surface of the ceramic substrate.
ZrO3Single or SrZrO 3To ZrO2and
Al2O3With a thermal spray coating to which at least one of
Since it is a firing container,
BaTiO as a component3Reduces reactivity with and removes
To improve the life of sprayed products by suppressing defects such as heat and warpage
You.
【００３６】また、表面被覆膜のＳｒＺｒＯ３の割合が
２５％以上であるので、セラミックコンデンサ等の主成
分であるＢａＴｉＯ３との反応性を確実に減少させて、
剥離やソリ等の不具合を抑制することができる。Further, since the ratio of SrZrO 3 in the surface coating film is 25% or more, the reactivity with BaTiO 3 which is a main component of a ceramic capacitor or the like is surely reduced, and
Problems such as peeling and warping can be suppressed.
【００３７】また、表面被覆膜の表面粗さＲａが１０μ
ｍ以上であるので、重量変化の割合を抑制できて反応性
を低くすることができる。The surface roughness Ra of the surface coating film is 10 μm.
m or more, the rate of weight change can be suppressed and the reactivity can be reduced.
フロントページの続き (51)Int.Cl.7 識別記号 ＦＩ テーマコート゛(参考） Ｃ０４Ｂ 35/64 Ｊ Continued on the front page (51) Int.Cl. 7 Identification symbol FI Theme coat II (Reference) C04B 35/64 J
Claims (3)
単独、もしくはＳｒＺｒＯ３にＺｒＯ２およびＡｌ２Ｏ
３の少なくとも一つを加えた溶射被覆膜を有することを
特徴とする焼成用容器。1. SrZrO 3 on a surface of a ceramic substrate
ZrO 2 and Al 2 O alone or in SrZrO 3
3. A firing container having a thermal spray coating to which at least one of the above ( 3 ) is added.
２５％以上であることを特徴とする請求項１に記載の焼
成用容器。2. The firing container according to claim 1, wherein the ratio of SrZrO 3 in the thermal spray coating is 25% or more.
ｍ以上であることを特徴とする請求項１または２に記載
の焼成用容器。3. The thermal spray coating has a surface roughness Ra of 10 μm.
The firing container according to claim 1 or 2, wherein the length is at least m.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001065641A JP2002265282A (en) | 2001-03-08 | 2001-03-08 | Vessel for calcination |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2001065641A JP2002265282A (en) | 2001-03-08 | 2001-03-08 | Vessel for calcination |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JP2002265282A true JP2002265282A (en) | 2002-09-18 |
Family
ID=18924253
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
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| Country | Link |
|---|---|
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007045641A (en) * | 2005-08-08 | 2007-02-22 | Toshiba Ceramics Co Ltd | Container for firing |
| JP2010111566A (en) * | 2008-10-07 | 2010-05-20 | Ngk Insulators Ltd | Setter for firing |
| KR101530097B1 (en) * | 2008-08-04 | 2015-06-18 | 엔지케이 인슐레이터 엘티디 | Setter for firing |
| CN110818409A (en) * | 2019-12-25 | 2020-02-21 | 内蒙古工业大学 | Preparation of SrZrO3And SrZrO3Ceramic material |
| WO2022100562A1 (en) * | 2020-11-10 | 2022-05-19 | 山东鲁阳节能材料股份有限公司 | Construction method for fiber lining surface of ethylene cracking furnace |
-
2001
- 2001-03-08 JP JP2001065641A patent/JP2002265282A/en not_active Withdrawn
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007045641A (en) * | 2005-08-08 | 2007-02-22 | Toshiba Ceramics Co Ltd | Container for firing |
| JP4713981B2 (en) * | 2005-08-08 | 2011-06-29 | コバレントマテリアル株式会社 | Ceramic electronic component firing container |
| KR101530097B1 (en) * | 2008-08-04 | 2015-06-18 | 엔지케이 인슐레이터 엘티디 | Setter for firing |
| JP2010111566A (en) * | 2008-10-07 | 2010-05-20 | Ngk Insulators Ltd | Setter for firing |
| CN110818409A (en) * | 2019-12-25 | 2020-02-21 | 内蒙古工业大学 | Preparation of SrZrO3And SrZrO3Ceramic material |
| CN110818409B (en) * | 2019-12-25 | 2022-03-08 | 内蒙古工业大学 | Preparation of SrZrO3And SrZrO3Ceramic material |
| WO2022100562A1 (en) * | 2020-11-10 | 2022-05-19 | 山东鲁阳节能材料股份有限公司 | Construction method for fiber lining surface of ethylene cracking furnace |
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