JP2002261156A5 - - Google Patents

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Publication number
JP2002261156A5
JP2002261156A5 JP2001057711A JP2001057711A JP2002261156A5 JP 2002261156 A5 JP2002261156 A5 JP 2002261156A5 JP 2001057711 A JP2001057711 A JP 2001057711A JP 2001057711 A JP2001057711 A JP 2001057711A JP 2002261156 A5 JP2002261156 A5 JP 2002261156A5
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001057711A
Other languages
Japanese (ja)
Other versions
JP2002261156A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2001057711A priority Critical patent/JP2002261156A/ja
Priority claimed from JP2001057711A external-priority patent/JP2002261156A/ja
Publication of JP2002261156A publication Critical patent/JP2002261156A/ja
Publication of JP2002261156A5 publication Critical patent/JP2002261156A5/ja
Pending legal-status Critical Current

Links

JP2001057711A 2001-03-02 2001-03-02 基板処理装置 Pending JP2002261156A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001057711A JP2002261156A (ja) 2001-03-02 2001-03-02 基板処理装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2001057711A JP2002261156A (ja) 2001-03-02 2001-03-02 基板処理装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2007163389A Division JP2007294990A (ja) 2007-06-21 2007-06-21 基板処理装置

Publications (2)

Publication Number Publication Date
JP2002261156A JP2002261156A (ja) 2002-09-13
JP2002261156A5 true JP2002261156A5 (enExample) 2007-08-23

Family

ID=18917549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001057711A Pending JP2002261156A (ja) 2001-03-02 2001-03-02 基板処理装置

Country Status (1)

Country Link
JP (1) JP2002261156A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6852512B2 (ja) * 2017-03-30 2021-03-31 株式会社デンソー ウェハ支持装置
US11955362B2 (en) * 2017-09-13 2024-04-09 Applied Materials, Inc. Substrate support for reduced damage substrate backside

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