JP2002257550A - Piezoelectric vibration gyro - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a piezoelectric vibration gyro having high sensitivity, little dispersion and deterioration of the performance, and a connection support structure capable of easy assembly and mounting. SOLUTION: In the connection support structure formed by connecting, supporting and fixing a long cylindrical piezoelectric vibrator 11 which is a bending vibrator extending in the uniaxial direction on a frame body 14 by using plural conductive support members 12, the shape of each support member 12 is improved, to have a flat plate shape on which the whole body is arranged on one plane, which is formed integrally by center joined-piece parts 12a joined to the surface near bending vibration nodes N1, N2 of the piezoelectric vibrator 11, linear bent-piece parts 12b linearly bent and extended so that local parts extending in the direction vertical to the uniaxial direction on one plane including the uniaxial direction respectively from both sides of the center joined-piece parts 12a, and end side joined-piece parts 12c provided respectively on the end sides of the linear bent-piece parts 12b, and joined to conductive parts 25 disposed on prescribed spots of the frame body 24. The frame body 24 also has a flat plate shape as a whole.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric vibrating gyroscope utilizing a bar-shaped bending vibration belonging to a gyroscope mainly used in an automobile navigation system or a camera shake prevention device of a camera-integrated VTR. The present invention relates to a piezoelectric vibrating gyroscope having an improved connection support structure in which a rod-shaped piezoelectric vibrator, which is a vibrator, is connected and supported to a frame using a support member.

[0002]

2. Description of the Related Art Conventionally, a piezoelectric vibrating gyroscope of this kind is a gyroscope utilizing a mechanical phenomenon in which when a rotating object is given a rotational angular velocity, a Coriolis force is generated in a direction perpendicular to the vibration direction. Are known.

In general, in a piezoelectric vibrating gyroscope, in a complex vibration system configured to be able to excite and detect two different directions orthogonal to each other, a vibrating body (piezoelectric vibrator) is excited in a state where one vibration is excited. When the body itself is rotated around an axis parallel to the line where the two vibration planes intersect, a force acts in a direction perpendicular to this vibration by the action of the Coriolis force described above, and the other vibration is newly generated in that direction. Vibrated. Since the magnitude of this new vibration is proportional to the magnitude of the vibration on the input side and the rotational angular velocity applied to the vibrating body, when the input voltage is constant, the magnitude of the rotational angular velocity is calculated from the magnitude of the output voltage. You can ask. Incidentally, when the electrode pattern is formed on the vibrating body, the magnitude of the vibration on the input side indicates the amplitude of the driving vibration generated by the driving voltage as the input voltage applied to the driving electrode of the vibrating body, and the output voltage is It becomes the detection voltage obtained from the detection electrode.

FIG. 3 shows a piezoelectric vibrator 31 constituting a main part of a conventional piezoelectric vibrating gyroscope 30 using a supporting member 32 to form a frame 3.
FIG. 4 is a perspective view of the entire external appearance showing a connection support structure formed by connection and fixation at 4.

[0005] The connection support structure here serves as a surface in the vicinity of bending vibration nodes N1 and N2 of a columnar piezoelectric vibrator 31, which is a bending vibrator extending uniaxially, and extends along a uniaxial direction at a local portion of the outer peripheral side surface. At predetermined intervals on electrodes (not shown) provided in a band shape substantially opposed to each other.
For the locations (however, there may be a total of four locations including opposing portions on the upper and lower surfaces of the piezoelectric vibrator 31), they are integrally formed at substantially the center of the support member 32 made of a conductive elastic material. The whole of the rectangular central joining piece 32a is joined by soldering or a conductive adhesive, and extends linearly from the central joining piece 32a on both sides, including a height direction bent portion 32b '. The entirety of the end-side joining piece 32c formed on the end side of the linear bent piece 32b is formed at a predetermined position on the flat surface of the non-conductive frame 34 (however, a pair of support members in the range shown in the drawing are also shown). In addition to the four locations corresponding to the two ends of the frame 32, the total may be eight locations including opposing portions on the upper and lower surfaces of the frame 34). By the piezoelectric Doko 31 respectively with the support member 32 is made by connecting the support fixed to the frame 34.

That is, each of the support members 32 is made of a conductive elastic material, and is joined to the surface of the piezoelectric vibrator 31 near the bending vibration nodes N1 and N2.
A rectangular central joining piece portion 32a extending in a uniaxial direction and widened widely, and local portions extending from both ends of the central joining piece portion 32a in directions perpendicular to the uniaxial direction on a plane including the uniaxial direction, respectively; An elongated linear bent piece 32b that is linearly bent and includes a height direction bent portion 32b ′ that extends in a height direction defined by a direction perpendicular to the one plane;
Each of the linear bent piece portions 32b is provided at an end side thereof and is joined to a conductive portion 35 provided at a predetermined position of the frame body 34, and extends in a uniaxial direction to have a widened rectangular end. The side joining piece 32c is integrally formed. The frame body 34 has a flange portion extending in a height direction defined by a direction perpendicular to one plane from opposite sides extending along the uniaxial direction outside the conductive portion 35. .

[0007] Such a connection support structure is provided by each support member 3.
2 are attached to the frame 34. At this time, it is necessary to obtain a stable gyro characteristic by reducing the restraint by the support members 32 against the bending motion of the piezoelectric vibrator 31. The material is an elastic material having elasticity.

When the piezoelectric vibrating gyroscope 30 is manufactured as a finished product, electrodes provided as electrode patterns on the outer peripheral surface of the piezoelectric vibrator 31 (specifically, driving electrodes,
A drive / detection circuit as an electric circuit system is connected to the detection electrode and the common ground electrode via lead wires or the like.

[0009]

In the case of the above-described piezoelectric vibrating gyroscope, each support member used in the connection support structure is not flat, but is flat so as to include a height-direction bending portion in a linear bending piece. Since it has a shape that is bent in the height direction with respect to the surface, it is necessary to perform a bending process when forming the support member, but the bending process tends to cause a variation in the shape of the support member, and such The use of a supporting member having a variation causes a problem in that the stress applied to the piezoelectric vibrator changes, which causes a deterioration in performance.

In the case of the above-described piezoelectric vibrating gyroscope, each support member itself is handled for positioning and mounting at the time of assembly and mounting. However, it is very difficult to position each support member by this handling, and often In addition to the problem that it is not easy to assemble and mount it, for example, it is necessary to cut an unnecessary part immediately before mounting, and each supporting member is easily deformed by handling, and in such a case, the sensitivity is easily reduced. There is also a problem.

SUMMARY OF THE INVENTION The present invention has been made to solve such a problem, and its technical problem is to provide a piezoelectric device having a connection support structure which is highly sensitive, has little performance variation and deterioration, and can be easily assembled and mounted. An object of the present invention is to provide a vibrating gyro.

[0012]

According to the present invention, a rod-shaped piezoelectric vibrator, which is a bending vibrator extending in one axis direction, is connected and supported on a frame by using a plurality of conductive support members. In the piezoelectric vibrating gyroscope having a connection supporting structure, the plurality of supporting members are a central joint piece joined to a surface near a bending vibration node of the piezoelectric vibrator, and a plane including an axial direction from both sides of the central joint piece. A linear bent piece extending linearly so as to include a local portion extending in a direction perpendicular to the uniaxial direction, and a predetermined portion of the frame body provided at an end side of the linear bent piece; An end-side joining piece that is joined to the conductive portion disposed at the location is integrally formed, and the entirety of the center joining piece, the linear bent piece, and the end-side joining piece is the It is a flat plate shape arranged on one plane, and the frame body is
A piezoelectric vibrating gyroscope having a flat plate shape as a whole is obtained.

According to the present invention, in the piezoelectric vibrating gyroscope, the plurality of support members integrally include a positioning fixing portion extending from the end-side joining piece in a direction perpendicular to the one axis direction on one plane. The frame body has a flange portion extending in a height direction defined by a direction perpendicular to the plane from an opposing side portion extending along the uniaxial direction outside the conductive portion,
In addition, a piezoelectric vibrating gyroscope having a cutout formed in the flange portion to support the positioning and fixing portion is obtained.

[0014]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS A piezoelectric vibrating gyroscope according to the present invention will be described in detail with reference to the drawings.

FIG. 1 shows a piezoelectric vibrating gyroscope 10 according to one embodiment of the present invention.
FIG. 3 is a perspective view of the entire external appearance showing a connection support structure formed by connecting and fixing the frame to a frame body 14 using the same 2.

The connection support structure here serves as a surface near the bending vibration nodes N1 and N2 of the columnar piezoelectric vibrator 11, which is a bending vibrator extending in the uniaxial direction, along the uniaxial direction at a local portion of the outer peripheral side surface. At predetermined intervals on electrodes (not shown) provided in a band shape substantially opposed to each other.
At four locations (here, a total of four locations including opposing portions on the upper surface and the lower surface of the piezoelectric vibrator 11) may be integrally formed at a substantially central portion of the support member 12 made of a conductive elastic material. Rectangular central joint piece 12a
Are joined together by soldering or a conductive adhesive, and end joining pieces formed on the end side of a linear bent piece portion 12b which is bent linearly to both sides from the central joining piece portion 12a. The entire portion 12c is located at a predetermined location on the flat surface of the non-conductive frame 14 (however, except for the four locations corresponding to both ends of the pair of support members 12 in the illustrated range as well,
(There may be a total of eight locations including opposing portions on the upper and lower surfaces of the piezoelectric vibrator 11) by soldering or bonding with a conductive adhesive to the conductive portions 15 using the support members 12 respectively. It is connected and supported and fixed to the frame 14.

However, in the case of the connection support structure here, the entire support member 12, which is formed integrally with the center joint piece 12a, the linear bent piece 12b, and the end joint piece 12c, is one plane. The frame 14 has a flat plate shape so as to be disposed thereon, and the entire frame body 14 has a flat plate shape.

That is, each of the support members 12 is made of a conductive elastic material, and is joined to the surface of the piezoelectric vibrator 11 near the bending vibration nodes N1 and N2.
Includes a rectangular central joint piece 12a that extends in a uniaxial direction and is widened widely, and local parts that extend from both ends of the central joint piece 12a in directions perpendicular to the uniaxial direction on one plane including the uniaxial direction. Linear bent pieces 12b which are bent and extended linearly as described above, and these linear bent pieces 12
b is joined to the conductive portion 15 provided at a predetermined position of the frame body 14 at the end side thereof, and a rectangular-shaped end-side joining piece portion 12c extending in a uniaxial direction and widened is formed. It is integrally formed in a flat plate shape so as to be arranged on one plane. Further, the frame body 14 has a flange portion extending in a height direction defined by a direction perpendicular to one plane from opposing side portions extending along the uniaxial direction outside the conductive portion 15. Instead, the whole including the opposing sides on the outer side of the conductive portion 15 has a flat plate shape.

In the case of a connection support structure using each of the support members 12 and the frame body 14 having such a configuration, the center joint piece 12a, the linear bent piece 12b, and the end-side joint piece 12c of each support member 12 are provided. Is formed in a flat plate shape so that the whole is arranged on one plane, and does not have a height direction bent portion defined in a direction perpendicular to the one plane, thereby forming the support member 12. When the support member 32 needs to be bent, the processing becomes much simpler, and the shape can be easily mass-produced and the piezoelectric vibration caused by the shape variation of the support member 12 can be easily achieved. The performance degradation of the child 11 can be prevented. In addition, since the entire support member 12 has a flat shape, and the frame body 14 also has a flat plate shape, it is not necessary to handle the support member 12 itself for positioning and mounting during assembly and mounting. In addition, the positioning of each support member 12 is simplified, and there is almost no need to finally cut an unnecessary portion immediately before mounting, so that assembly and mounting can be easily performed. This makes it difficult to be deformed, and can solve the problem of sensitivity reduction often occurring at such times.

Therefore, if the piezoelectric vibrating gyroscope 10 is manufactured by applying such a connection supporting structure, it is possible to easily assemble and mount the piezoelectric vibrating gyroscope with high sensitivity and little variation and deterioration of the performance. The gyro 10 can be easily and efficiently mass-produced.

FIG. 2 shows a connection support structure in which a piezoelectric vibrator 21 which is a main part of a piezoelectric vibratory gyroscope 20 according to another embodiment of the present invention is connected and fixed to a frame 24 using a support member 22. It is the perspective view of the whole appearance shown.

In this connection support structure, the support member 22 has a center joint piece 22a, a linear bent piece 22b, and an end joint piece 22c as compared with the first embodiment.
The point that the positioning fixing portion 22d extending in the direction perpendicular to the uniaxial direction on one plane from the end side joining piece portion 22c is integrally provided, and the frame body 24 is uniaxially outside the conductive portion 25. A flange extending in a height direction defined by a direction perpendicular to the plane from each of the opposite sides extending along the flange, and a notch cut into the flange to support the positioning fixing portion 22d. The difference is that the notch 26 is formed.

In other words, the connection support structure here is used as a surface near the bending vibration nodes N1 and N2 of the columnar piezoelectric vibrator 21, which is a bending vibrator extending in the uniaxial direction, in a local portion of the outer peripheral side surface in the uniaxial direction. At two predetermined intervals on an electrode (not shown) provided in a band shape substantially opposed to each other (although the upper surface of the piezoelectric vibrator 21 and
On the other hand, there may be a total of four places including the opposing part on the lower surface), and the entire rectangular central joint piece 22a integrally formed at the substantially central part of the support member 22 made of a conductive elastic material is soldered. The entirety of the end-side joining piece portion 22c formed on the end side of the linear bent piece portion 22b which is linearly bent to both sides from the center joining piece portion 22a while being attached or joined by a conductive adhesive. At a predetermined location on the flat surface of the non-conductive frame 24 (however, except for four locations corresponding to both ends of the pair of support members 22 in the range shown in FIG.
(A total of eight locations including opposing portions on the upper surface and the lower surface of the frame body 24 may be used.) When soldering or bonding with a conductive adhesive to the conductive portion 25 disposed at
The positioning fixing portion 22d extending from 2c is supported by a notch 26 formed in the flange of the frame 24 (however, when the above-described additional configuration is applied, the notch 26 is formed on the upper surface side as shown in the figure). In addition to the configuration having the formed flange portion, the lower surface side may have a configuration in which a notch portion 26 is similarly formed), so that positioning and mounting during assembly and mounting can be performed very easily. The piezoelectric vibrators 21 are connected and supported and fixed to the frame 24 by using the support members 22 by being joined together.

That is, each of the support members 22 is made of a conductive elastic material, and is joined to the surface of the piezoelectric vibrator 21 near the bending vibration nodes N1 and N2.
Includes a rectangular central joint piece 22a that extends in a uniaxial direction and is widened widely, and local parts that extend from both ends of the central joint piece 22a in a direction perpendicular to the uniaxial direction on a plane including the uniaxial direction. Linear bent pieces 22b that are bent in a linear manner as described above, and these linear bent pieces 22
b, and is joined to the conductive portion 25 disposed at a predetermined position of the frame body 24, and extends in the uniaxial direction and is widened to a rectangular end-side joining piece portion 22c.
And a positioning fixing portion 22d extending in a direction perpendicular to the uniaxial direction on one plane from each of the end side joining pieces 22c, and is integrally formed in a flat plate shape so as to be arranged on one plane. Has been made. In addition, the frame 24 has a flange portion extending in a height direction defined by a direction perpendicular to one plane from opposing sides extending along the uniaxial direction outside the conductive portion 25. As described above, the flange portion is formed with the notch 26 cut out to support the positioning and fixing portion 22d.

In the case of a connection support structure using each of the support members 22 and the frame 24 having such a configuration, the center joint piece 22a, the linear bent piece 22b, the end-side joint piece 22c, And a flat plate shape so that the whole by the positioning and fixing portion 22d is arranged on one plane, and by a shape having no height bending portion defined in a direction perpendicular to the one plane, Although the processing for forming the support member 22 is somewhat complicated as compared with the case where the support member 12 is formed, the conventional support member 32 which requires bending is used.
Is simpler than in the case of forming the support member 22 and the mass can be easily mass-produced without variation in the shape.
The performance deterioration of the piezoelectric vibrator 11 due to the variation in the shape of the piezoelectric vibrator can be prevented. In addition, the entire support member 22 has a flat shape, and a notch 26 for supporting the positioning and fixing portion 22d of each support member 22 is formed in the flange of the frame 24, so that assembly is possible. At the time of mounting, the positioning and fixing portion 22d of each support member 22 is supported by the notch 26 formed in the flange portion of the frame 24, positioning and mounting are automatically performed, and it is necessary to handle each support member 22 itself. And the positioning of each support member 22 becomes very easy,
It is extremely easy to assemble and mount, for example, it is not necessary to cut an unnecessary portion immediately before mounting. In addition, since each support member 22 is not deformed by handling, a problem of sensitivity reduction occurs. Can be completely eliminated.

Therefore, when the piezoelectric vibrating gyroscope 20 is manufactured by applying such a connection supporting structure, the piezoelectric vibrating gyroscope 10 is more highly sensitive than the piezoelectric vibrating gyroscope 10 in one embodiment, and has less variation in performance and is easily assembled. The piezoelectric vibrating gyroscope 20 having higher performance (sensitivity) than the piezoelectric vibrating gyroscope 10 can be easily and efficiently mass-produced.

In each of the piezoelectric vibrating gyroscopes 10 and 20 of the above-described embodiments, the case where cylindrical vibrators 11 and 21 extending in a uniaxial direction are used has been described. A configuration may be adopted in which the shape is changed to an extended prism-shaped piezoelectric vibrator, and the piezoelectric vibrator is connected and supported to the frames 14 and 24 using the support members 12 and 22. However, in the case of this connection support structure, the respective support members 12 and 22 are joined to the surface near the bending vibration node on the side surface of the piezoelectric vibrator in the shape of a prismatic rod. In each embodiment, each support member 12, 2
2 has been described as being connected and fixed to a predetermined location on the electrodes provided on the piezoelectric vibrators 11 and 21. Instead, the supporting members 12 and 22 may be bent other than the electrodes on the piezoelectric vibrators 11 and 21. It may be configured to be connected and fixed to the surface near the vibration node. Further, each of the support members 12, 2 described in each of the embodiments is used.
The detailed shape of 2 is only a specific example,
As long as the basic configuration that the whole is arranged on one plane is satisfied, it can be appropriately changed according to the application and the shape of the piezoelectric vibrator.

[0028]

As described above, according to the piezoelectric vibrating gyroscope of the present invention, a rod-shaped piezoelectric vibrator, which is a bending vibrator extending uniaxially, is formed on a frame by using a plurality of conductive support members. Improving the connection support structure that is connected and fixed, the central joint piece that is joined to the surface near the bending vibration node of the piezoelectric vibrator, and on one plane including the uniaxial direction from both sides of this central joint piece Linear bent pieces which are bent in a linear manner so as to include a local portion extending in a direction perpendicular to the uniaxial direction, and predetermined portions of the frame provided at the end sides of these linear bent pieces, respectively. The shape of each support member integrally formed by the end-side joining piece portion joined to the conductive portion disposed on the flat portion is formed as a flat plate shape in which the whole is arranged on one plane, and the frame body is also Either a flat plate as a whole, or the shape of each support And a positioning fixing portion extending in a direction perpendicular to the uniaxial direction on one plane, and the shape of the frame body extends along the uniaxial direction outside the conductive portion. In any case, a notch cut out to support the positioning and fixing portion is formed in a flange portion extending in a height direction defined in a direction perpendicular to the plane from the opposite side portion, and in any case, Also, each support member is supported by having a flat plate shape so that it is arranged on one plane, and having no height bending portion defined in a direction perpendicular to the one plane. In addition to simplifying the processing when creating the members, it is possible to prevent the performance of the piezoelectric vibrator from deteriorating due to variations in its shape. In the case of the former configuration, each support member itself is used for positioning and mounting during assembly and mounting. Handle The support member can be easily positioned, and the assembly and mounting can be easily performed.In the case of the latter configuration, the support member is formed on the flange of the frame at the time of assembly and mounting. The positioning and fixing part of each support member is supported by the notched part, so positioning and mounting are automatically performed at the time of assembly and mounting, and it is very easy to position each support member without having to handle each support member itself As a result, assembly and mounting can be further facilitated. Therefore, if a piezoelectric vibrating gyroscope is manufactured by applying such a connection support structure, it is possible to easily assemble and mount the piezoelectric vibrating gyroscope with high sensitivity and little variation and deterioration in performance. Mass production can be easily and efficiently performed (the latter configuration is more remarkable than the former configuration).

[Brief description of the drawings]

FIG. 1 is a perspective view of an entire external appearance showing a connection support structure in which a piezoelectric vibrator, which is a main part of a piezoelectric vibratory gyroscope according to one embodiment of the present invention, is connected and fixed to a frame using a support member. is there.

FIG. 2 is a perspective view of an entire external appearance showing a connection support structure in which a piezoelectric vibrator constituting a main part of a piezoelectric vibrating gyroscope according to another embodiment of the present invention is connected and supported on a frame using a support member. It is.

FIG. 3 is a perspective view of the entire external appearance showing a connection support structure in which a piezoelectric vibrator, which is a main part of a conventional piezoelectric vibrating gyroscope, is connected and supported to a frame using a support member.

[Explanation of symbols]

 10, 20, 30 Piezoelectric vibrating gyroscope 11, 21, 31 Piezoelectric vibrator 12, 22, 32 Supporting members 12a, 22a, 32a Central joining pieces 12b, 22b, 32b Linear bent pieces 12c, 22c, 32c End joining One part 14, 24, 34 Frame 15, 25, 35 Conductive part 22d Positioning and fixing part 26 Notch part 32b 'Height direction bending part N1, N2 Bending vibration node

 ──────────────────────────────────────────────────続 き Continuing on the front page (72) Inventor Osamu Yamazaki 231 Sukazawa, Yamazaki-cho, Shiso-gun, Hyogo Prefecture Tokin Ceramics Co., Ltd. F-term (reference) 2F105 AA02 AA08 BB02 BB15 CC08 CD13

Claims (2)

[The claims] 1. A piezoelectric vibrating gyroscope having a connection support structure in which a rod-shaped piezoelectric vibrator, which is a bending vibrator extending in a uniaxial direction, is connected and supported to a frame using a plurality of conductive support members. The plurality of support members are a central joint piece joined to a surface near a bending vibration node of the piezoelectric vibrator, and the uniaxial direction on one plane including the uniaxial direction from both sides of the central joint piece. A linearly bent piece that is bent in a linear manner so as to include a local portion extending in a vertical direction, and is provided at a predetermined position of the frame provided at an end side of the linearly bent piece. And the end-side joining piece to be joined is integrally formed, and the center joining piece,
The entirety of the linear bent piece portion and the end-side joining piece portion is a flat plate shape arranged on the one plane, and the frame body is a flat plate shape as a whole. Piezoelectric vibration gyro. 2. The piezoelectric vibrating gyroscope according to claim 1, wherein the plurality of support members integrally include a positioning fixing portion extending from the end-side joining piece in a direction perpendicular to the one axis direction on the one plane. The frame body extends in a height direction defined in a direction perpendicular to the one plane from opposing sides extending along the uniaxial direction outside the conductive portion. A piezoelectric vibratory gyroscope having a flange portion, wherein a notched portion is formed in the flange portion to support the positioning and fixing portion.