JP2002248759A - Ink-jet recording head and ink-jet recording apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ink-jet recording head capable of achieving a high density while maintaining the basic performance, and an ink-jet recording apparatus. SOLUTION: Recess parts 12 elongating in the longitudinal direction of the pressure generating chambers are formed at a position corresponding to the pressure generating chambers in the nozzle plate of an ink-jet recording head 100 comprising a nozzle plate 10 with a plurality of nozzle openings 11 formed, and a channel forming substrate 30 with a plurality of pressure generating chambers 31 each communicating with the nozzle openings, or the like formed. Thereby, even in the case the channel forming substrate is made thinner for achieving a high density of the ink-jet recording head, since the cross-sectional area of the recess part is added to the cross-sectional area of the pressure generating chambers, reduction of the cross-sectional area of the pressure generating chambers can be reduced so that the attenuation characteristic of the ink meniscus at the nozzle openings can be maintained preferably.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an ink jet recording head for pressurizing ink stored in a pressure generating chamber and discharging the ink as ink droplets from nozzle openings, and an ink jet for printing information on a recording medium using the head. The present invention relates to an expression recording device.

[0002]

2. Description of the Related Art In general, an ink jet recording head communicates with a nozzle opening and the nozzle opening.
The pressure generating chamber has a substantially rectangular parallelepiped pressure generating chamber partially constituted by a diaphragm, and a piezoelectric element connected to the diaphragm of the pressure generating chamber. In such a configuration, information is recorded on the recording medium by driving and displacing the piezoelectric element to deform the diaphragm, pressurizing the ink stored in the pressure generating chamber and discharging the ink as ink droplets from the nozzle openings. It is supposed to.

As the ink jet type recording head, a type using a longitudinal vibration mode piezoelectric element which expands and contracts in the axial direction has been put to practical use. According to the ink jet recording head of this type, the volume of the pressure generating chamber can be changed by bringing the end face of the piezoelectric element into contact with the diaphragm, so that it can be suitable for high-density printing. However, in the manufacturing process of disposing the piezoelectric element on the diaphragm, the piezoelectric element is cut into a comb shape in accordance with the arrangement pitch of the nozzle openings, and the cut and divided piezoelectric element is positioned and fixed in the pressure generating chamber. There is a problem that difficult work is required.

On the other hand, as another type of ink jet recording head, a type using a flexural vibration mode piezoelectric element has been put to practical use. According to the ink jet recording head of this type, the piezoelectric element can be disposed on the diaphragm by a relatively simple operation of merely sticking and firing a green sheet made of a piezoelectric material in accordance with the shape of the pressure generating chamber and firing the green sheet. Therefore, the above problem can be solved.
However, since the flexural vibration is used, a certain area of the piezoelectric element is required, and there is a problem that high-density arrangement is difficult.

In order to solve this problem, an ink jet recording head utilizing a film forming technique has been proposed. That is, a piezoelectric material layer is formed uniformly over the entire surface of the vibration plate, and this piezoelectric material layer is cut into a shape corresponding to the pressure generation chambers by lithography, and the piezoelectric elements are formed independently for each pressure generation chamber. I do. According to this, the piezoelectric element can be disposed on the diaphragm by a precise and simple method called lithography, so that the work of attaching the piezoelectric element to the diaphragm becomes unnecessary, and the thickness of the piezoelectric element is further reduced. There is an advantage that high-speed driving becomes possible.

FIG. 6 is a schematic sectional view showing an ink jet recording head utilizing a conventional film forming technique. In this ink jet recording head, a flow path forming substrate 3 having a piezoelectric element 2 formed on a nozzle plate 1 is joined, a reservoir forming substrate 4 is joined on the flow path forming substrate 3, and the reservoir forming substrate 4 A sealing plate 5 and a drive circuit (driver IC) 6 for the piezoelectric element 2 are joined thereon, and these are covered with a case head 7.

The pressure generating chamber 3a and the ink supply path 3b for supplying ink to the pressure generating chamber 3a are formed in the flow path forming substrate 3, and the pressure generating chamber 3a is formed in the nozzle plate 1.
There is formed a nozzle opening 1a for discharging ink stored therein as ink droplets. And the pressure generating chamber 3
a is formed by anisotropically etching the flow path forming substrate 3, the ink supply path 3b is formed by half-etching the flow path forming substrate 3 after the above-described anisotropic etching, and the nozzle opening 1a is formed. Is the nozzle plate 1
Is formed by dry etching.

[0008]

In order to increase the density of the above-mentioned ink jet recording head, it is necessary to make the flow path forming substrate 3 thin for crosstalk. However, when the flow path forming substrate 3 is made thinner, the cross-sectional area of the pressure generating chamber 3a is inevitably reduced, so that the inertance M of the pressure generating chamber 3a (= ρl / S, where ρ: density, l: pressure generating chamber) 3a, S: sectional area) increases, and the meniscus attenuation characteristic of the ink at the nozzle opening 1a ΔR / 2M
(R = 8 μl / ab ³ x when the cross section is substantially rectangular)
(However, μ: viscosity, x: coefficient, 2a × 2b: substantially rectangular cross-sectional area (a> b)) is deteriorated.

In order to make the flow path forming substrate 3 thin and increase the cross-sectional area of the pressure generating chambers 3a, it is necessary to make the partition walls provided between the pressure generating chambers 3a thin. However, if the partition walls provided between the pressure generating chambers are made thinner, the rigidity of the partition walls decreases, and there is a possibility that adjacent crosstalk may occur. In addition, the partition may be broken when an external force or the like is applied.

SUMMARY OF THE INVENTION The present invention has been made in view of the above problems, and an object of the present invention is to provide an ink jet recording head and an ink jet recording apparatus capable of achieving high density while maintaining basic performance. It is in.

[0011]

In order to achieve the above object, in the ink jet recording head according to the first aspect of the present invention, a nozzle plate having a plurality of nozzle openings is provided;
A plurality of pressure generating chambers respectively communicating with the nozzle openings, and a flow path forming substrate formed with an ink supply path for supplying ink to each of the pressure generating chambers, wherein the ink stored in the pressure generating chambers is In an ink jet recording head that pressurizes and discharges ink droplets from the nozzle openings, a concave portion extending in the longitudinal direction of the pressure generating chamber is formed at a position corresponding to the pressure generating chamber in the nozzle plate. And

Thus, even if the flow path forming substrate is thinned in order to increase the density of the ink jet recording head, the cross sectional area of the recess formed in the nozzle plate is added to the cross sectional area of the pressure generating chamber. Therefore, a decrease in the cross-sectional area of the pressure generating chamber can be suppressed, and the meniscus attenuation characteristic of the ink at the nozzle opening can be favorably maintained. Furthermore, since it is not necessary to make the partition provided between each pressure generating chamber thin in order to increase the cross-sectional area of the pressure generating chamber, the rigidity of the partition can be maintained, and adjacent crosstalk can be prevented. . In addition, breakage of the partition wall when external force or the like is applied can be prevented.

According to a second aspect of the present invention, in the ink jet recording head according to the first aspect, the concave portion is
The pressure generating chamber is divided into a plurality of parts in the longitudinal direction. As a result, the cross-sectional area of the pressure generating chamber does not increase uniformly, so that the flow path resistance in the pressure generating chamber does not decrease. Therefore, the meniscus damping characteristic is improved by reducing the inertance of the pressure generating chamber when the cross-sectional area of the pressure generating chamber increases uniformly, and the pressure generation chamber when the cross-sectional area of the pressure generating chamber increases uniformly It is possible to prevent the decrease in the meniscus damping characteristic due to the decrease in the flow path resistance.

According to a third aspect of the present invention, in the ink jet recording head according to the first or second aspect, the width of the recess in the direction perpendicular to the longitudinal direction of the pressure generating chamber is equal to the longitudinal direction of the pressure generating chamber. It is characterized in that it is formed so as to be narrower than the width in the direction orthogonal to. As a result, the width of the partition provided between the recesses is wider than the width of the partition provided between the pressure generating chambers, and the partition between the pressure generating chambers is located above the partition between the recesses. Will be surely supported. Therefore, the rigidity of the partition wall between the pressure generating chambers can be maintained, and breakage of the partition wall when an external force or the like is applied can be prevented.

According to a fourth aspect of the present invention, in the ink jet recording head according to any one of the first to third aspects, the recess is formed in the nozzle plate formed of a silicon single crystal substrate having a plane orientation of (100). It is characterized by being formed. This makes it possible to easily form a recess having a triangular or substantially trapezoidal cross section by etching.

According to a fifth aspect of the present invention, in the ink jet recording head according to any one of the first to fourth aspects, the recess is formed in the nozzle plate in which two plates made of different materials are bonded to each other. It is characterized in that it is formed on one of the plate members. Thus, since the etching rates of the respective plate members are different, the concave portion can be formed with high accuracy on only one of the plate members.

To achieve the above object, an ink jet recording apparatus according to claim 6 of the present invention includes the ink jet recording head according to any one of claims 1 to 5,
It is characterized in that information is printed on a recording medium using the head. According to the above-described respective operations, it is possible to provide a recording apparatus including an ink jet recording head capable of achieving high density while maintaining basic performance.

[0018]

Embodiments of the present invention will be described below in detail with reference to the drawings.

FIG. 1 is a perspective view showing a configuration example of an ink jet printer which is one of the ink jet recording apparatuses according to the embodiment of the present invention. In this ink jet printer, an ink jet print (recording) head 100, a head driving mechanism 102, and an automatic sheet feeder (automatic continuous paper feed mechanism) 103 are provided in a main body 101, and a tray 104 is provided at the upper rear of the main body 101. Have been.

Ink jet print head 100
Is provided with a total of four color ink cartridges 105, for example, yellow, magenta, cyan, and black, and is configured to be capable of full-color printing. The ink ejection timing of the inkjet print head 100 and the scanning of the head drive mechanism 102 are controlled by a dedicated controller board or the like built in the main body 101, and high-precision ink dot control, halftone processing, and the like are executed. It has become.

The recording paper 106 fed to the tray 104 is automatically sent out by the automatic sheet feeder 103 and discharged from a paper discharge port 107 provided on the front of the main body 101. . As the recording paper 106, plain paper, special paper, recommended OHP sheet, glossy paper, glossy film, label sheet, postcard made by government, etc. can be used.

FIG. 2 is an exploded perspective view showing a schematic configuration example of the ink jet print head 100 of FIG. In this figure, only one color head is shown for convenience. In the ink jet type print head 100, a flow path forming substrate 30 in which the piezoelectric element 20 is formed on the nozzle plate 10 is joined, and a reservoir forming substrate 40 is joined on the flow path forming substrate 30 to form a reservoir. A sealing plate 50 and a drive circuit (driver IC) 60 for the piezoelectric element 20 are joined on the substrate 40, and these are covered with a case head 70.

FIG. 3 is a sectional view showing details when the ink jet print head 100 of FIG. 2 is assembled. In this figure, only the head for one color is shown for convenience. The nozzle plate 10 has a thickness of, for example, 0.1
It is made of a silicon single crystal substrate having a plane orientation of (100) mm to 1 mm. As shown in FIG. 3, the nozzle plate 10 has a plurality of nozzle openings 11 arranged in two rows. Further, a concave portion 12 which is a characteristic part of the present invention and which will be described in detail later is formed on the surface of the nozzle plate 10 facing the flow path forming substrate 30.

The flow path forming substrate 30 has a thickness of, for example, 50 μm.
It is made of a silicon single crystal substrate having a length of m to 200 μm and a plane orientation of (110). As shown in FIG. 3, the surface of the flow path forming substrate 30 facing the nozzle plate 10 is formed as an opening surface, and the surface of the flow path forming substrate 30 facing the reservoir forming substrate 40 has a thickness of silicon dioxide previously formed by thermal oxidation. An elastic film (not shown) of 1 μm to 2 μm is formed.
As shown in FIG. 3, a piezoelectric element 20 is further formed.

As shown in FIG. 3, pressure generating chambers 31 defined by a plurality of partition walls are arranged in the width direction on the opening surface of the flow path forming substrate 30 by anisotropic etching. As shown in FIG. 2 and FIG. 3, a communication part 32 that forms a part of a reservoir 80 that communicates with a reservoir part 41 of a reservoir forming substrate 40 to be described later and serves as a common ink chamber of each pressure generation chamber 31 is formed. Formed by anisotropic etching,
Each of the pressure generating chambers 31 is communicated with one longitudinal end thereof via an ink supply path 33. The ink supply path 33 is also partitioned by a partition wall, similarly to the pressure generating chamber 31.

As shown in FIG. 3, a nozzle opening 11 communicating with the pressure generating chamber 31 on the side opposite to the ink supply path 33 is formed in the opening side of the flow path forming substrate 30. The nozzle plate 10 is fixed via an adhesive or a heat welding film. For this reason, the nozzle plate 10
One of the surfaces also functions as a reinforcing plate that entirely covers one surface of the flow path forming substrate 30 and protects it from impact and external force. The nozzle plate 10 and the flow path forming substrate 30 are formed of the same material as a silicon single crystal substrate, and the nozzle plate 10 and the flow path forming substrate 30 have the same deformation due to heat. It is possible to easily and surely join using an adhesive or the like.

On the other hand, as shown in FIGS. 2 and 3, a lower electrode film having a thickness of about 0.2 μm is formed on the elastic film on the side opposite to the opening surface of the flow path forming substrate 30. For example, about 1
A piezoelectric element 20 composed of a piezoelectric layer having a thickness of μm and an upper electrode film having a thickness of, for example, about 0.1 μm is laminated by a thin film forming process. Generally, one of the electrodes of the piezoelectric element 20 is used as a common electrode, and the other electrode and the piezoelectric layer are patterned for each of the pressure generating chambers 31. And
The lead electrode 21 extends from the vicinity of one longitudinal end of the upper electrode film of the piezoelectric element 20 to a region facing the peripheral wall of the pressure generating chamber 31.

The reservoir forming substrate 40 has a thickness of, for example, 1
It is made of a silicon single crystal substrate having a size of 50 μm to 300 μm and a plane orientation of (110). Thus, similarly to the case of the nozzle plate 10 described above, the flow path forming substrate 30 and the reservoir forming substrate 40 can be easily and reliably bonded using a thermosetting adhesive or the like.

As shown in FIGS. 2 and 3, the reservoir forming substrate 40 communicates with a portion of a reservoir 80 which serves as a common ink chamber for the pressure generating chambers 31 of the flow path forming substrate 30 described above. The reservoir section 41 communicating with the section 32 is arranged in the width direction by anisotropic etching. As shown in FIG. 3, an ink introduction path 42 communicating with an ink introduction port 51 of a sealing plate 50 described later is anisotropic. It is formed by reactive etching.

The piezoelectric element 2 of the reservoir forming substrate 40
In the area corresponding to 0, as shown in FIG.
A sealable space 43 is formed by anisotropic etching so as not to hinder the movement of zero, and a communication hole (not shown) for communicating the space 43 with the outside is provided by anisotropic etching. In addition, a drive circuit 60 and a wiring pattern 61 for the piezoelectric element 20 are provided on the surface opposite to the surface on which the space 43 is formed, as shown in FIGS.

The space 43 is filled with a dry fluid such as an inert gas through a communication hole and sealed. The inside of this space 43 is sealed at a pressure lower than the atmosphere,
Thus, the piezoelectric element 20 is securely sealed in the dry fluid atmosphere and is isolated from the external environment. As the drying fluid, a reducing gas can be used in addition to the inert gas. Conversely, by including an oxidizing gas, an environment for preventing the deterioration of the piezoelectric layer can be formed. . When such an inert gas is used, it is desirable to reduce the vapor pressure (partial pressure) of water therein as much as possible.

As shown in FIGS. 2 and 3, between the reservoir 41 of the reservoir forming substrate 40 and the space 43, the drive circuit 60 is arranged from the side where the piezoelectric element 20 is disposed.
And a plurality of wirings 6 penetrating the lead surface 21 of the piezoelectric element 20 and the drive circuit 60.
A through-groove 44 through which 2 passes is formed by anisotropic etching.

The sealing plate 50 is made of, for example, a laminate of a PPS film and a stainless steel plate. This sealing plate 5
0 has a role of sealing the reservoir 80. Also,
As shown in FIG. 3, the ink introduction slot 51 communicating with the ink introduction path 42 of the reservoir forming substrate 40 is formed on the sealing plate 50 as described above. The case head 70 has a role of covering and protecting the above-described components, and forming a space for injecting the sealing resin 71 of the drive circuit 60 and the wiring 62 as shown in FIG.

FIGS. 4A, 4B, and 4C are a cross-sectional view taken along line AA, a plan view, and a cross-section taken along line BB showing the nozzle plate 10 and the flow path forming substrate 30 around the pressure generating chamber 31. FIG. At positions corresponding to the respective pressure generating chambers 31 in the nozzle plate 10, 2 extend in the longitudinal direction of the pressure generating chambers 31.
The two concave portions 12 are formed side by side in the longitudinal direction of the pressure generating chamber 31. The width w1 of the recess 12 in the direction orthogonal to the longitudinal direction is formed to be smaller than the width w2 of the pressure generating chamber 31 in the direction orthogonal to the longitudinal direction.

As described above, the recess 12 is formed in the nozzle plate 10.
Is formed, the cross-sectional area of the recess 12 is added to the cross-sectional area of the pressure generating chamber 31 even if the flow path forming substrate 30 is thinned in order to increase the density of the ink jet print head 100. The reduction in the cross-sectional area of the generation chamber 31 can be suppressed. Therefore, the meniscus attenuation characteristics of the ink at the nozzle openings 11 can be maintained well. Further, since it is not necessary to reduce the thickness of the partitions provided between the pressure generating chambers 31 in order to increase the cross-sectional area of the pressure generating chambers 31, the rigidity of the partitions can be maintained, and adjacent crosstalk is prevented. be able to. In addition, breakage of the partition wall when external force or the like is applied can be prevented.

In addition, the two concave portions 12 are formed side by side in the longitudinal direction of the pressure generating chamber 31. That is, instead of forming one concave portion from one end to the other end in the longitudinal direction of the pressure generating chamber 31, the two concave portions 12 are formed by two. Since the pressure generating chamber 31 is formed in a divided shape, the cross-sectional area of the pressure generating chamber 31 does not increase uniformly, and the flow path resistance in the pressure generating chamber 31 does not decrease. Therefore, the meniscus damping characteristic is improved by reducing the inertance of the pressure generating chamber 31 when the cross-sectional area of the pressure generating chamber 31 is uniformly increased, and the pressure when the cross-sectional area of the pressure generating chamber 31 is uniformly increased. It is possible to prevent a decrease in the meniscus attenuation characteristic due to a decrease in the flow path resistance in the generation chamber 31 and the offset.

Since the width of the partition provided between the recesses 12 is wider than the width of the partition provided between the pressure generating chambers 31, the partition between the pressure generating chambers 31 is 12 will be reliably supported on the upper part of the partition wall.
Therefore, the rigidity of the partition wall between the pressure generating chambers 31 can be maintained, and breakage of the partition wall when an external force or the like is applied can be prevented.

Further, since the nozzle plate 10 made of a silicon single crystal substrate having a plane orientation of (100) is used, the recess 12 having a triangular or substantially trapezoidal cross section can be easily formed by etching. . In addition, 1
The same effect can be obtained even if an arbitrary number is formed as long as the number of the concave portions 12 formed in one pressure generating chamber 31 is two or more.

FIGS. 5A, 5B, and 5C show a nozzle plate 10 'around a pressure generating chamber 31 in a different form from FIG.
FIG. 3 is a cross-sectional view taken along the line AA, a plan view, and a line BB of the flow path forming substrate 30. Nozzle plate 1 in this example
0 ′ is composed of two plate members 13 and 14 made of different kinds of materials adhered by an adhesive. The recess 12 ′ is connected to one of the plate members 1 in the nozzle plate 10 ′.
3, that is, two pieces are formed on the plate 13 on the side of the flow path forming substrate 30 so as to extend in the longitudinal direction of the pressure generating chamber 31 and to be arranged in the longitudinal direction of the pressure generating chamber 31. This recess 12 ′ also
The width w1 in the direction orthogonal to the longitudinal direction is the pressure generation chamber 3
1 is formed to be narrower than a width w2 in a direction orthogonal to the longitudinal direction.

The recess 12 'is formed by bonding the two plate members 13 and 14 with an adhesive and then anisotropically etching only the plate member 13. The plate material 13 on which the concave portion 12 'is formed has a thickness of, for example, 0.0
The plate 14 is made of, for example, a stainless plate having a thickness of, for example, 0.05 mm to 0.5 mm. The plate 13 is not limited to a silicon single crystal substrate, and a metal plate or a glass plate other than a stainless steel plate can be used. As described above, since the type of each of the plate members 13 and 14 is different, the etching rate is also different.
3 can be formed with high precision.

In the above-described embodiment, a printer has been described as an example. However, the present invention is not limited to this, and the present invention is also applicable to an ink jet recording apparatus such as a facsimile apparatus and a copying apparatus.

As described above, the present invention has been described with respect to various embodiments. However, the present invention is not limited to the above embodiments, and other embodiments may be included within the scope of the invention described in the claims. It goes without saying that also applies.

[0043]

As described above, according to the ink jet type recording head and the ink jet type recording apparatus of the present invention, even if the flow path forming substrate is thinned in order to increase the density of the head, the ink jet recording head and the ink jet type recording head can be used. Since the cross-sectional area of the formed concave portion is added to the cross-sectional area of the pressure generating chamber, a decrease in the cross-sectional area of the pressure generating chamber can be suppressed, and the ink meniscus attenuation characteristics at the nozzle opening can be favorably maintained. Can be. Furthermore, since it is not necessary to make the partition provided between each pressure generating chamber thin to increase the cross-sectional area of the pressure generating chamber, the rigidity of the partition can be maintained,
Adjacent crosstalk can be prevented. In addition, breakage of the partition wall when external force or the like is applied can be prevented.

[Brief description of the drawings]

FIG. 1 is a perspective view showing a configuration example of an ink jet printer which is one of the ink jet recording apparatuses according to an embodiment of the present invention.

FIG. 2 is an exploded perspective view showing a schematic configuration example of the inkjet print head of FIG.

FIG. 3 is a sectional view showing details when the ink jet print head of FIG. 2 is assembled.

FIG. 4 is a view showing a nozzle plate and a flow path forming substrate around a pressure generating chamber of the ink jet type print head of FIG. 2;
It is the sectional view on the A line, the top view, and the BB line sectional view.

5 is a sectional view taken along line AA, a plan view, and a sectional view taken along line BB of a nozzle plate and a flow path forming substrate around a pressure generating chamber in another form of the ink jet print head of FIG. 2; .

FIG. 6 is a schematic sectional view showing an ink jet recording head using a conventional film forming technique.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 10 Nozzle plate 11 Nozzle opening 12, 12 'recess 20 Piezoelectric element 30 Flow path forming substrate 31 Pressure generating chamber 32 Communication part 33 Ink supply path 40 Reservoir forming substrate 41 Reservoir part 42 Ink introduction path 43 Space 44 Penetration groove 50 Sealing plate Reference Signs List 51 Ink introduction roller 60 Drive circuit (driver IC) 70 Case head 71 Sealing resin 80 Reservoir 100 Ink jet recording head 101 Main body 102 Head driving mechanism 103 Auto sheet feeder (Automatic continuous paper feeding mechanism) 104 Tray 105 Ink cartridge 106 Recording paper 107 paper exit

Claims (6)

[Claims] 1. A nozzle plate having a plurality of nozzle openings formed therein, a plurality of pressure generating chambers communicating with the nozzle openings, and a flow path forming an ink supply path for supplying ink to each of the pressure generating chambers. A substrate, and pressurizes the ink stored in the pressure generation chamber and discharges the ink as ink droplets from the nozzle openings. In the nozzle plate, at a position corresponding to the pressure generation chamber in the nozzle plate, An ink jet recording head, wherein a concave portion extending in the longitudinal direction of the pressure generating chamber is formed. 2. The ink jet recording head according to claim 1, wherein the recess is divided into a plurality of portions in a longitudinal direction of the pressure generating chamber. 3. The width of the recess in the direction perpendicular to the longitudinal direction of the pressure generating chamber is formed to be smaller than the width of the pressure generating chamber in the direction perpendicular to the longitudinal direction. The ink jet recording head according to claim 1 or 2, wherein: 4. The ink jet recording according to claim 1, wherein the concave portion is formed in the nozzle plate formed of a silicon single crystal substrate having a plane orientation of (100). head. 5. The nozzle plate according to claim 1, wherein the recess is formed in one of the plate members of the nozzle plate in which two plate members made of different materials are bonded to each other.
The inkjet recording head according to any one of the above. 6. An ink jet recording apparatus comprising the ink jet recording head according to claim 1, wherein information is printed on a recording medium using the head.