JP2000190497A - Ink jet type recording head and ink jet type recording apparatus - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ink jet type recording head and an ink jet type recording apparatus which have a structure whereby a compliance is applied to a reservoir highly accurately and easily. SOLUTION: A reservoir form substrate 20 having a reservoir part 21 constituting at least part of a reservoir 100 for supplying ink to pressure generation chambers 12 is joined to a face at the side of piezoelectric elements 300 of a channel form substrate 10 where the pressure generation chambers 12 communicating with nozzle openings are defined. A penetrating part 18 penetrating without communicating with the pressure generation chamber 12 is set to the channel form substrate 10 of an area corresponding to the reservoir part 21, and a flexible film 110 having a flexibility is set between the penetrating part 18 and reservoir part 21.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a part of a pressure generating chamber which communicates with a nozzle opening for discharging ink droplets, which is constituted by a vibrating plate. The present invention relates to an ink jet recording head and an ink jet recording apparatus that eject ink droplets by displacement.

[0002]

2. Description of the Related Art A part of a pressure generating chamber communicating with a nozzle opening for discharging ink droplets is constituted by a vibrating plate, and the vibrating plate is deformed by a piezoelectric element to pressurize the ink in the pressure generating chamber to pass through the nozzle opening. Two types of ink jet recording heads that eject ink droplets have been commercialized, one using a longitudinal vibration mode piezoelectric actuator that expands and contracts in the axial direction of the piezoelectric element, and the other using a flexural vibration mode piezoelectric actuator. ing.

In the former method, the volume of the pressure generating chamber can be changed by bringing the end face of the piezoelectric element into contact with the diaphragm, so that a head suitable for high-density printing can be manufactured. There is a problem in that a difficult process of cutting into a comb shape in accordance with the arrangement pitch of the openings and an operation of positioning and fixing the cut piezoelectric element in the pressure generating chamber are required, and the manufacturing process is complicated.

On the other hand, in the latter, a piezoelectric element can be formed on a diaphragm by a relatively simple process of sticking a green sheet of a piezoelectric material according to the shape of a pressure generating chamber and firing the green sheet. In addition, there is a problem that a certain area is required due to the use of flexural vibration, and that high-density arrangement is difficult.

On the other hand, in order to solve the latter disadvantage of the recording head, a uniform piezoelectric material layer is formed by a film forming technique over the entire surface of the diaphragm as disclosed in Japanese Patent Application Laid-Open No. 5-286131. A proposal has been made in which the piezoelectric material layer is cut into a shape corresponding to the pressure generating chambers by a lithography method, and a piezoelectric element is formed so as to be independent for each pressure generating chamber.

[0006] According to this, the operation of attaching the piezoelectric element to the diaphragm becomes unnecessary, and not only can the piezoelectric element be manufactured by a precise and simple method called lithography, but also the thickness of the piezoelectric actuator can be reduced. There is an advantage that it can be made thin and can be driven at high speed. In this case,
By providing at least only the upper electrode for each pressure generating chamber while keeping the piezoelectric material layer on the entire surface of the diaphragm, the piezoelectric actuator corresponding to each pressure generating chamber can be driven.

[0007] In such an ink jet recording head, a reservoir serving as a common ink chamber for each pressure generating chamber is generally formed by laminating a plurality of substrates. Is supplied with ink. Further, in order to keep the internal pressure of the reservoir at a certain value or less, the reservoir is provided with a compliance section that absorbs a change in pressure during driving of the piezoelectric element by deformation.

[0008]

However, a method of forming such a compliance portion using a thin film formed on a reservoir substrate having a reservoir, for example, is used. However, in this case, the number of manufacturing steps is increased. There is a problem that the working efficiency is low and the cost is high.

In view of such circumstances, an object of the present invention is to provide an ink jet type recording head and an ink jet type recording apparatus having a structure which can easily and precisely provide compliance to a reservoir.

[0010]

According to a first aspect of the present invention, there is provided a flow path forming substrate in which a pressure generating chamber communicating with a nozzle opening is defined, and one surface of the flow path forming substrate. And a piezoelectric element having at least a lower electrode, a piezoelectric layer, and a piezoelectric element having an upper electrode, provided on a surface of the flow path forming substrate on the side on which the piezoelectric element is formed. A reservoir forming substrate having a reservoir part that constitutes at least a part of a reservoir that communicates with the pressure generating chambers and supplies ink to each pressure generating chamber is joined, and the flow path formation in a region corresponding to the reservoir part is performed. The substrate is provided with a penetrating portion penetrating without communicating with the pressure generating chamber, and a flexible film having flexibility is provided between the penetrating portion and the reservoir portion. Inkjet In the door type recording head.

In the first aspect, the flexible film provided between the penetrating portion and the reservoir portion functions as a compliance portion that absorbs a change in the internal pressure of the reservoir by elastically deforming it.

According to a second aspect of the present invention, there is provided the ink jet recording head according to the first aspect, wherein the flexible film includes a layer having a tensile stress.

According to the second aspect, the flexible film can be prevented from being broken without buckling.

According to a third aspect of the present invention, in the first or second aspect, the flexible film has only the film constituting the diaphragm and the piezoelectric element. It is in.

According to the third aspect, when forming the piezoelectric element, the flexible film can be easily formed together therewith.

According to a fourth aspect of the present invention, in any one of the first to third aspects, the reservoir portion is formed in a width direction of the plurality of pressure generating chambers arranged in parallel. The feature is the ink jet recording head.

In the fourth aspect, ink is supplied from a reservoir common to each pressure generating chamber.

According to a fifth aspect of the present invention, in any one of the first to fourth aspects, the through portion is formed in a width direction of the plurality of pressure generating chambers arranged in parallel. The feature is the ink jet recording head.

In the fifth aspect, the flexible film is formed with an area which can function as a compliant part.

According to a sixth aspect of the present invention, in any one of the first to fifth aspects, a beam comprising a ridge extending in a plane direction is provided on a surface of the flexible film on the flow path forming substrate side. The ink jet recording head is characterized in that the ink jet recording head is provided with a portion.

According to the sixth aspect, the strength of the flexible film is increased by the beam portion, and the durability is improved.

A seventh aspect of the present invention is the ink jet recording head according to the sixth aspect, wherein the beam portions are formed in a lattice shape.

In the seventh aspect, the strength of the flexible film is increased and the durability is improved by the lattice-shaped beams.

According to an eighth aspect of the present invention, in the ink jet recording head according to any one of the first to seventh aspects, the penetrating portion is formed by etching together with the pressure generating chamber. is there.

In the eighth aspect, the flexible film serving as the compliance portion can be easily formed.

According to a ninth aspect of the present invention, in any one of the first to eighth aspects, the pressure generation chamber is formed in a silicon single crystal substrate by anisotropic etching, and each layer of the piezoelectric element is formed of a thin film and a lithography. An ink jet recording head characterized by being formed by a method.

In the ninth aspect, an ink jet recording head having high-density nozzle openings can be manufactured in a large amount and relatively easily.

According to a tenth aspect of the present invention, there is provided an ink jet recording apparatus comprising the ink jet recording head according to any one of the first to ninth aspects.

According to the tenth aspect, it is possible to realize an ink jet recording apparatus having improved head characteristics.

[0030]

DESCRIPTION OF THE PREFERRED EMBODIMENTS The present invention will be described below in detail based on embodiments.

(Embodiment 1) FIG. 1 is an exploded view showing an ink jet recording head according to Embodiment 1 of the present invention, and FIG. 2 is a plan view and a sectional view of FIG.

As shown in the figure, the flow path forming substrate 10 is a single crystal silicon substrate having a plane orientation of (110) in this embodiment. As the flow path forming substrate 10, usually 150 to 3
A thickness of about 00 μm is used.
Those having a thickness of about 0 to 280 μm, more preferably about 220 μm are suitable. This is because the arrangement density can be increased while maintaining the rigidity of the partition wall between the adjacent pressure generating chambers.

One surface of the flow path forming substrate 10 is an opening surface, and the other surface is formed with an elastic film 50 having a thickness of 1 to 2 μm and made of silicon dioxide previously formed by thermal oxidation.

On the other hand, the opening surface of the flow path forming substrate 10 is anisotropically etched on a silicon single crystal substrate,
The pressure generating chambers 12 divided by the plurality of partition walls 11 are provided in parallel in the width direction, and on the outside in the longitudinal direction, a common ink chamber of each pressure generating chamber 12 communicates with a reservoir portion of a reservoir forming substrate described later. A communication portion 13 forming a part of the reservoir 100 is formed, and is communicated with one end of each pressure generating chamber 12 in the longitudinal direction via an ink supply path 14. On the opposite side of the communication section 13 of the flow path forming substrate 10 from the pressure generating chamber 12, the flow path forming substrate 10 is anisotropically etched together with the pressure generating chamber 12 and the like, so that the elastic film 50 is formed.
Is formed over the width direction of the pressure generating chambers 12 arranged side by side.

Here, in the anisotropic etching, when a silicon single crystal substrate is immersed in an alkaline solution such as KOH, it is gradually eroded, and the first (111) plane perpendicular to the (110) plane and the first (111) plane A second (1) which forms an angle of about 70 degrees with the (111) plane and forms an angle of about 35 degrees with the (110) plane.
11) plane, and the etching rate of the (111) plane is about 1/1 compared to the etching rate of the (110) plane.
This is performed using the property of being 80.
By such anisotropic etching, two first (11
Precision processing can be performed based on depth processing of a parallelogram formed by the 1) plane and two oblique second (111) planes, and the pressure generating chambers 12 can be arranged at high density. it can.

In this embodiment, the long side of each pressure generating chamber 12 is formed by the first (111) plane, and the short side is formed by the second (111) plane. The pressure generating chamber 12 is provided on the flow path forming substrate 1.
It is formed by etching until it reaches the elastic film 50 almost through 0. Here, the elastic film 50 is
The amount attacked by the alkaline solution for etching the silicon single crystal substrate is extremely small. Each of the ink supply passages 14 communicating with one end of each of the pressure generating chambers 12 is formed shallower than the pressure generating chambers 12 and maintains a constant flow resistance of the ink flowing into the pressure generating chambers 12. That is, the ink supply path 14 is formed by partially etching (half-etching) the silicon single crystal substrate in the thickness direction. Note that the half etching is performed by adjusting the etching time.

On the opening side of the flow path forming substrate 10,
A nozzle plate 16 provided with a nozzle opening 15 communicating with the pressure supply chamber 12 on the side opposite to the ink supply path 14 is fixed via an adhesive, a heat welding film, or the like. The nozzle plate 16 has a thickness of, for example, 0.1 mm.
Made of stainless steel. The nozzle plate 16 entirely covers one surface of the flow path forming substrate 10 on one surface, and also serves as a reinforcing plate for protecting the silicon single crystal substrate from impact and external force. In addition, the nozzle plate 16 is used for the passage forming substrate 1.
More preferably, it is formed of a material having substantially the same thermal expansion coefficient as zero. In this case, since the deformation of the flow path forming substrate 10 and the nozzle plate 16 due to heat become substantially the same, it is possible to easily join them using a thermosetting adhesive or the like.

Here, the size of the pressure generating chamber 12 for applying the ink droplet ejection pressure to the ink and the size of the nozzle opening 15 for ejecting the ink droplet depend on the amount of the ejected ink droplet, the ejection speed, and the ejection frequency. Optimized. For example,
When recording 360 ink droplets per inch, the nozzle openings 15 need to be formed with a diameter of several tens of μm with high accuracy.

On the other hand, the thickness of the elastic film 50 on the side opposite to the opening surface of the flow path forming substrate 10 is, for example, about 0.5 μm.
A lower electrode film 60, a piezoelectric film 70 having a thickness of, for example, about 1 μm, and an upper electrode film 80 having a thickness of, for example, about 0.1 μm are formed by lamination in a process to be described later.
0. Here, the piezoelectric element 300 refers to a portion including the lower electrode film 60, the piezoelectric film 70, and the upper electrode film 80. Generally, one of the electrodes of the piezoelectric element 300 is used as a common electrode, and the other electrode and the piezoelectric film 70 are patterned for each pressure generating chamber 12. Here, a portion which is constituted by one of the patterned electrodes and the piezoelectric film 70 and in which a piezoelectric strain is generated by applying a voltage to both electrodes is referred to as a piezoelectric active portion 320. In the present embodiment, the lower electrode film 60 is used as a common electrode of the piezoelectric element 300 and the upper electrode film 80 is used as an individual electrode of the piezoelectric element 300. In any case, the piezoelectric active portion is formed for each pressure generating chamber. Also, here
The combination of the piezoelectric element 300 and the vibration plate whose displacement is generated by driving the piezoelectric element 300 is referred to as a piezoelectric actuator. In the example described above, the elastic film 50 and the lower electrode film 6
Although 0 functions as a diaphragm, the lower electrode film may also serve as an elastic film.

The piezoelectric element 300 of the flow path forming substrate 10
On the side, a reservoir forming substrate 20 having a reservoir portion 21 constituting at least a part of the reservoir 100 is bonded to, for example, the lower electrode film 60. The material of the reservoir forming substrate 20 is preferably, for example, a material substantially the same as the coefficient of thermal expansion of the flow path forming substrate 10, such as glass or ceramic material. In the present embodiment, the same material as the flow path forming substrate 10 is used. The reservoir forming substrate 20 was formed using the silicon single crystal substrate of FIG. As a result, as in the case of the nozzle plate 16 described above, the two can be reliably bonded even when they are bonded at a high temperature using a thermosetting adhesive. Therefore, the manufacturing process can be simplified.

In this embodiment, the reservoir portion 21 formed on the reservoir forming substrate 20 is formed to penetrate the reservoir forming substrate 20 in the thickness direction, and the width of the plurality of pressure generating chambers 12 arranged in parallel is formed. It is provided over the direction. The reservoir 100 communicates with the communication portion 13 of the flow path forming substrate 10 and serves as a common ink chamber for each pressure generating chamber 12.

The passage forming substrate 10 in the area corresponding to the reservoir 21 is provided with the penetrating portion 18 as described above, and at least the penetrating portion 18 and the reservoir 2
2, a flexible film 1 elastically deformable in its thickness direction.
Blocked at 10.

When a pressure change occurs in the reservoir 100 due to the driving of the piezoelectric element 300 or the like, the flexible film 110 absorbs the pressure change by elastically deforming.
Thereby, the internal pressure of the reservoir 100 is always suppressed to a certain value or less, and the ink ejection characteristics are favorably maintained.

In this embodiment, the elastic film 50 and the lower electrode film 60, the piezoelectric film 70, and the upper electrode film 80, which constitute the piezoelectric element 300, are formed on the flow path forming substrate 10 in a region corresponding to the reservoir portion 21. These films become the flexible films 110 in a region opposed to the penetrating portion 18. The thickness of the flexible film 110 having such a film configuration is about 3 μm, and functions sufficiently as a compliance part.

It is preferable that the flexible film 110 includes a film having a tensile stress in all plane directions. In particular,
It is preferable that the stress of the entire film constituting the flexible film 110 is strong in the tensile direction and the flexible film 110 does not buckle. Thereby, excessive deformation of the flexible film 110 is suppressed, and breakage of the flexible film 110 can be prevented.

In the present embodiment, the flexible film 110 includes the elastic film 50, the lower electrode film 60, the piezoelectric film 70, and the upper electrode film 80, but is not limited thereto. And at least one layer constituting the piezoelectric element 300. In any case, any film may be used as long as it is flexible and has a predetermined strength. However,
When the elastic film is formed of silicon dioxide as in the present embodiment, it is not preferable to use only the elastic film because the strength is low. Needless to say, a film made of another material may be separately provided as the flexible film 110.

The flexible film 110 may be formed by any method. For example, the lower electrode film 60, the piezoelectric film 70, and the upper electrode film 80 are formed on the entire surface of the elastic film 50. rear,
When patterning these films to form the piezoelectric element 300, the film corresponding to the reservoir portion 22 may be left without being removed, and can be easily formed.

A sealing plate 30 is bonded to the surface of the reservoir forming substrate 20 opposite to the flow path forming substrate 10, and one surface of the reservoir 100 is sealed. This sealing plate is made of a hard material such as metal, for example, stainless steel (S
US) or the like.

In addition, an ink inlet 25 for supplying ink to the reservoir 100 is formed in the sealing plate 30 substantially outside the central portion in the longitudinal direction of the reservoir 100. Further, the reservoir forming substrate 20 is provided with an ink introduction path 26 that communicates the ink introduction port 25 with the side wall of the reservoir 100. In the present embodiment, the reservoir 10 is formed by one ink introduction port 25 and the ink introduction path 26.
Although the ink is supplied to 0, it is not limited to this. For example, a plurality of ink introduction ports and ink introduction paths may be provided according to a desired ink supply amount, or The opening area of the opening may be increased to enlarge the ink flow path.

Normally, the reservoir 10 is
When the ink is supplied to 0, a pressure change occurs in the reservoir 100 due to, for example, a flow of the ink when the piezoelectric element 300 is driven or ambient heat. However, as described above, the flexible film 110 on one side of the reservoir 100 bends to absorb the pressure change. Therefore, the inside of the reservoir 100 is always maintained at a pressure equal to or lower than a certain value.

On the other hand, the piezoelectric element 3 of the reservoir forming substrate 20
In a region opposed to the piezoelectric element 300, a piezoelectric element holding portion 24 capable of sealing the space is provided with a space that does not hinder the movement of the piezoelectric element 300, and at least the piezoelectric active portion 320 of the piezoelectric element 300 is provided. Are sealed in the piezoelectric element holding portion 24.

The piezoelectric film 70 and the upper electrode film 8 of the piezoelectric element 300 sealed by the piezoelectric element holding portion 24
0 extends from one end of the pressure generating chamber 12 in the longitudinal direction to the outside of the reservoir forming substrate 20 on the flow path forming substrate 10,
On the exposed portion 10a where the surface of the flow path forming substrate 10 on the joining side with the reservoir forming substrate is exposed, the flow path forming substrate 10 is connected to an external wiring 40 such as a flexible cable.

The ink jet type recording head of this embodiment takes in ink from the ink inlet 25 connected to external ink supply means (not shown),
After filling the inside with ink from 00 to the nozzle opening 15, each lower electrode film 60 corresponding to the pressure generating chamber 12 is made according to a recording signal from an external driving circuit (not shown).
A voltage is applied between the pressure generating chamber 12 and the upper electrode film 80 to deflect and deform the elastic film 50, the lower electrode film 60, and the piezoelectric film 70.
5 ejects ink droplets.

As described above, in the present embodiment, the reservoir portion 21 formed on the reservoir forming substrate 20 and the through portion 18 provided on the flow path forming substrate 10 in a region corresponding to the reservoir portion 21 are flexible. Is closed by the flexible film 110 having. Thereby, the change in the internal pressure of the reservoir 100 is absorbed by the elastic deformation of the flexible film 110, and the internal pressure in the reservoir 100 can be constantly maintained at a certain value or less. The flexible film 110 includes the elastic film 50 and a film constituting the piezoelectric element 300.
0, and the penetrating portion 18 can be formed by etching together with the pressure generating chamber 12, so that it can be easily formed without increasing the number of manufacturing steps.

In the present embodiment, the flexible film 110 is provided between the reservoir 21 of the reservoir forming substrate 20 and the penetrating portion 18 of the flow path forming substrate 10 to serve as a compliance portion. There is also a method of attaching a film or the like to the opposite side of the flow path forming substrate 10 of the substrate 20 to form a compliance portion. However, this embodiment is more preferable in terms of reduction in the number of parts and cost.

(Embodiment 2) FIG. 3 is a cross-sectional view of a main part of an ink jet recording head according to Embodiment 2.

In the present embodiment, as shown in FIG. 3, a beam portion 111 composed of a ridge extending in the surface direction is provided on the surface of the flexible film 110 on the side of the flow path forming substrate. Same as 1.

The beams 111 increase the strength of the flexible film 110. For example, in this embodiment, as shown in FIG. Is provided. The area of the beam portion 111 may be appropriately determined according to conditions such as the material and the thickness of the flexible film 110 so as to obtain a desired strength. At this time, in order to reliably absorb a change in internal stress in the reservoir 100,
It is preferable that the flexible portion 112 of the flexible film 110 where the beam portion 111 is not formed has an area at least about 10 times as large as the pressure generating chamber.

The method of forming the beam portion 111 is not particularly limited.
When forming 8, a portion where a part of the flow path forming substrate 10 remains may be used as the beam portion 111 by etching using a predetermined mask pattern.

As described above, the beam portion 111 is formed on the flexible film 110.
Is provided, the strength of the flexible film 110 can be increased. Therefore, by adjusting the area of the beam portion 111, the strength and compliance of the flexible film 110 can be easily and accurately adjusted.

The shape of the beam portion 111 is not limited to a lattice shape, but may be any other shape such as an oblique lattice as long as it has a predetermined strength and can maintain a predetermined compliance. Good. Also, of course, the strength and compliance of the flexible film 110 may be adjusted by changing the size of the penetrating portion 18.

(Other Embodiments) The embodiments of the present invention have been described above, but the basic configuration of the ink jet recording head is not limited to the above.

For example, in the above-described embodiment, the sealing plate 30 is joined to one surface of the reservoir forming substrate 20 to seal the reservoir portion 21. However, the present invention is not limited to this. And the sealing plate 30 may be integrally formed. That is, similarly to the piezoelectric element holding portion 24, the reservoir portion 21 may be formed by removing a part of the reservoir forming substrate 20 in the thickness direction.

Further, for example, in the above-described embodiment, the nozzle plate 16 is joined to one surface of the flow path forming substrate 10 as a nozzle forming member having the nozzle openings 15. However, the present invention is not limited to this. For example, the nozzle forming member may have a multilayer structure including another substrate having a nozzle communication hole or the like that communicates the nozzle opening with the pressure generating chamber.

In each of the above embodiments, a thin film type ink jet recording head manufactured by applying a film forming and lithography process has been described as an example. However, the present invention is not limited to this. The present invention can also be applied to a thick-film type ink jet recording head formed by a method such as attaching a sheet.

The ink jet recording head of each of these embodiments constitutes a part of a recording head unit having an ink flow path communicating with an ink cartridge or the like, and is mounted on an ink jet recording apparatus. FIG.
FIG. 2 is a schematic view illustrating an example of the ink jet recording apparatus.

As shown in FIG. 5, the recording head units 1A and 1B having ink jet recording heads are provided with detachable cartridges 2A and 2B constituting ink supply means.
The carriage 3 on which B is mounted is provided movably in the axial direction on a carriage shaft 5 attached to the apparatus main body 4. The recording head units 1A and 1B are, for example,
Each of them ejects a black ink composition and a color ink composition.

The driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears and a timing belt 7 (not shown), so that the carriage 3 on which the recording head units 1A and 1B are mounted moves along the carriage shaft 5. Moved. On the other hand, a platen 8 is provided on the apparatus main body 4 along the carriage shaft 5, and a recording sheet S, which is a recording medium such as paper fed by a paper feed roller (not shown), is wound around the platen 8. It is designed to be transported.

[0069]

As described above, according to the present invention, a reservoir forming substrate having a reservoir portion forming a part of the reservoir is provided on one surface of the flow path forming substrate, and the reservoir portion and the reservoir portion are provided. Since a flexible film having flexibility is provided between the flow path forming substrate and the through-hole provided in the flow path forming substrate, when the pressure changes in the reservoir, the flexible film is elastically deformed. As a result, the pressure in the reservoir can always be maintained at a certain value or less. In addition, when the flexible film is formed of an elastic film and a film constituting the piezoelectric element, the flexible film can be easily formed without increasing the number of manufacturing steps. Further, the strength of the flexible membrane can be increased by providing beams on the surface. That is, by changing the area of the beam,
There is an effect that the strength and compliance of the flexible film can be easily and precisely adjusted.

[Brief description of the drawings]

FIG. 1 is an exploded perspective view of an ink jet recording head according to a first embodiment of the present invention.

FIG. 2 is a plan view and a cross-sectional view of the inkjet recording head according to the first embodiment of the present invention.

FIG. 3 is a sectional view of an ink jet recording head according to a second embodiment of the present invention.

FIG. 4 is a diagram schematically showing a beam portion according to a second embodiment of the present invention.

FIG. 5 is a schematic diagram of an ink jet recording apparatus according to an embodiment of the present invention.

[Explanation of symbols]

 Reference Signs List 10 flow path forming substrate 12 pressure generating chamber 13 communication part 14 ink supply path 15 nozzle opening 16 nozzle plate 20 reservoir forming substrate 21 reservoir part 30 sealing plate 60 lower electrode film 70 piezoelectric film 80 upper electrode film 100 reservoir 110 flexible Film 111 Beam 300 Piezoelectric element

Claims (10)

[Claims] 1. A flow path forming substrate in which a pressure generating chamber communicating with a nozzle opening is defined, and at least one of a lower electrode, a piezoelectric layer and an upper electrode provided on one surface of the flow path forming substrate via a vibration plate. An ink jet recording head comprising: a piezoelectric element having electrodes; and a surface on the side of the flow path forming substrate on which the piezoelectric element is formed, supplying ink to each pressure generating chamber in communication with the pressure generating chamber. A reservoir forming substrate having a reservoir part constituting at least a part of the reservoir to be joined is joined, and a penetrating part penetrated without communicating with the pressure generating chamber is formed in the flow path forming substrate in a region corresponding to the reservoir part And an ink jet recording head having a flexible film between the penetrating portion and the reservoir portion. 2. The ink jet recording head according to claim 1, wherein the flexible film includes a layer having a tensile stress. 3. The ink jet recording head according to claim 1, wherein the flexible film has only a film constituting the vibration plate and the piezoelectric element. 4. The ink jet recording head according to claim 1, wherein the reservoir is formed over a width direction of the plurality of pressure generating chambers arranged in parallel. 5. The ink jet recording head according to claim 1, wherein the penetrating portion is formed in a width direction of the plurality of pressure generating chambers arranged in parallel. 6. The method according to claim 1, wherein a beam portion formed of a ridge extending in a plane direction is provided on a surface of the flexible film on the side of the flow path forming substrate. Characteristic inkjet recording head. 7. The ink jet recording head according to claim 6, wherein the beam portions are formed in a lattice shape. 8. An ink jet recording head according to claim 1, wherein said penetrating portion is formed by etching together with said pressure generating chamber. 9. The pressure generating chamber according to claim 1, wherein the pressure generating chamber is formed on a silicon single crystal substrate by anisotropic etching, and each layer of the piezoelectric element is formed by a thin film and a lithography method. An ink jet recording head, characterized in that: 10. An ink jet recording apparatus comprising the ink jet recording head according to claim 1.