JP2003127358A - Ink jet recording head and ink jet recording device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide an ink jet recording head which properly keeps ink discharging characteristics and prevents fluctuation of the ink discharging characteristics, and also to provide an ink jet recording device. SOLUTION: The ink jet recording device is provided with a flow passage forming substrate 10 in which a pressure generating chamber 12 communicating with a nozzle opening is formed, and piezoelectric elements 300 which are arranged on one side of the flow passage forming substrate 10 through a diaphragm and creates a change in pressure inside the pressure generating chamber 12. There are provided a plurality of common lead electrodes 65 which are drawn out up to the outside of the pressure generating chamber 12 from common electrodes 60 arranged in an area corresponding to the pressure generating chamber 12 and common to a plurality of the piezoelectric elements 300, and these common lead electrodes are extended in the same direction as that in which an individual lead electrode 90 drawn out from an individual electrode 80 of the piezoelectric elements 300 is extended.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a piezoelectric element, in which a part of a pressure generating chamber communicating with a nozzle opening for ejecting ink droplets is composed of a vibrating plate, and a piezoelectric element is formed on the surface of the vibrating plate. The present invention relates to an inkjet recording head and an inkjet recording device that eject ink droplets by displacement.

[0002]

2. Description of the Related Art A part of a pressure generating chamber that communicates with a nozzle opening for ejecting ink droplets is composed of a vibrating plate, and the vibrating plate is deformed by a piezoelectric element to pressurize ink in the pressure generating chamber to eject it from the nozzle opening. Two types of inkjet recording heads that eject ink droplets have been put into practical use: one that uses a longitudinal vibration mode piezoelectric actuator that expands and contracts in the axial direction of a piezoelectric element, and one that uses a flexural vibration mode piezoelectric actuator. ing.

The former allows the volume of the pressure generating chamber to be changed by bringing the end face of the piezoelectric element into contact with the vibrating plate, and a head suitable for high-density printing can be manufactured. There is a problem in that the manufacturing process is complicated because a difficult process of matching the array pitch of the openings and cutting into comb teeth or a work of positioning and fixing the cut piezoelectric element in the pressure generating chamber are required.

On the other hand, in the latter, the piezoelectric element can be formed on the vibration plate by a relatively simple process of sticking a green sheet of a piezoelectric material in conformity with the shape of the pressure generating chamber and firing it. However, due to the use of flexural vibration, a certain area is required, and there is a problem that high-density arrangement is difficult.

On the other hand, in order to eliminate the disadvantage of the latter recording head, a uniform piezoelectric material layer is formed over the entire surface of the diaphragm by a film forming technique as disclosed in Japanese Patent Laid-Open No. 5-286131. It has been proposed that the piezoelectric material layer is cut into a shape corresponding to the pressure generating chamber by a lithographic method and a piezoelectric element is formed so as to be independent for each pressure generating chamber.

According to this, the work of attaching the piezoelectric element to the diaphragm becomes unnecessary, and not only the piezoelectric element can be densely formed by a precise and simple method such as a lithography method, but also the piezoelectric element. The advantage is that the thickness can be reduced and high speed driving is possible.

[0007]

However, in the ink jet recording head in which the piezoelectric elements are arranged in high density, when a large number of piezoelectric elements are simultaneously driven to eject a large number of ink droplets, a voltage drop occurs. As a result, the amount of displacement of the piezoelectric element becomes unstable and the ink ejection characteristics deteriorate.

Moreover, the applied voltage is likely to be lower as the piezoelectric element is located farther from the connection portion to which the external wiring is connected. For this reason, there is a problem that even if the piezoelectric elements are arranged side by side in a row, the ink ejection characteristics vary depending on the distance from the connection portion.

In view of such circumstances, it is an object of the present invention to provide an ink jet type recording head and an ink jet type recording apparatus which can maintain good ink ejection characteristics and prevent variations in ink ejection characteristics.

[0010]

According to a first aspect of the present invention for solving the above-mentioned problems, there is provided a flow path forming substrate in which a pressure generating chamber communicating with a nozzle opening is formed, and one surface side of the flow path forming substrate. An ink jet recording head having a piezoelectric element that is provided via a vibration plate to generate a pressure change in the pressure generating chamber, and is common to a plurality of piezoelectric elements provided in a region corresponding to the pressure generating chamber. There are a plurality of common lead electrodes that are drawn out from the electrodes to the outside of the pressure generating chamber, and these common lead electrodes are extended in the same direction as the extending direction of the individual lead electrodes that are drawn out from the individual electrodes of the piezoelectric element. Inkjet recording heads characterized in that

In the first aspect, by pulling out the plurality of common lead electrodes from the common electrode, the resistance value of the common electrode can be substantially reduced, and the voltage drop even if a large number of piezoelectric elements are driven at the same time. Since the ink does not occur, the ink ejection characteristics are stable. Further, by extending the common lead electrode in the same direction as the individual lead electrodes, it is possible to easily extend the plurality of common lead electrodes without increasing the size of the head.

A second aspect of the present invention is the ink jet recording head according to the first aspect, wherein the common lead electrode is formed of the same layer as the layer forming the common electrode. is there.

In the second aspect, the common lead electrode can be formed relatively easily.

A third aspect of the present invention is the ink jet recording head according to the first aspect, wherein the common lead electrode is formed of the same layer as the layer forming the individual lead electrodes. It is in.

In the third aspect, the resistance value of the common electrode can be effectively reduced, and even if a large number of piezoelectric elements are driven at the same time, no stable voltage drop occurs and stable ejection characteristics can always be obtained. You can

A fourth aspect of the present invention is characterized in that, in any one of the first to third aspects, the common lead electrode is provided in a ratio of one to n individual lead electrodes. It is in an inkjet recording head.

In the fourth aspect, since the difference in the distance between each piezoelectric element and the common lead electrode is small, even if a voltage drop occurs due to the driving of a large number of piezoelectric elements at the same time, the variation in the displacement amount is suppressed to a small level. To be

A fifth aspect of the present invention is the drive circuit for driving the piezoelectric element according to any one of the first to fourth aspects, in the vicinity of the respective end portions of the individual lead electrode and the common lead electrode. Is a connection portion to which external wiring connected to is connected, these connection portions are arranged side by side in a row along the column direction of the pressure generating chambers, and the pitch of the connection portions is greater than the pitch of the pressure generating chambers. The ink jet recording head is characterized by being short.

In the fifth aspect, since the connection portions are arranged in a line, the external wiring can be easily connected. Moreover, the individual lead electrodes and the common lead electrodes can be extended in a relatively narrow space, and the head can be miniaturized.

According to a sixth aspect of the present invention, in any one of the first to fourth aspects, a drive circuit for driving the piezoelectric element near the respective end portions of the individual lead electrode and the common lead electrode. Are connecting portions to which external wirings connected to are connected, these connecting portions are provided at different positions in the longitudinal direction of the pressure generating chamber, and the pitch of the individual lead electrodes is substantially equal to the pitch of the pressure generating chamber. The ink jet recording head is characterized by being the same.

In the sixth aspect, since the area of the connecting portion to which the external wiring is connected can be increased, the reliability of the connection of the external wiring can be improved.

According to a seventh aspect of the present invention, in any one of the first to sixth aspects, the flow passage forming substrate is provided with two rows of the pressure generating chambers defined by a plurality of partition walls. The ink jet recording head is characterized in that the individual lead electrodes and the common lead electrodes are extended in regions corresponding to the rows of the pressure generating chambers.

In the seventh aspect, the common lead electrode can be efficiently extended from the common electrode in the region corresponding to each of the two rows of pressure generating chambers, and the size of the head can be reduced.

In an eighth aspect of the present invention according to any one of the first to seventh aspects, each of the common lead electrodes is electrically connected by a wiring electrode extending outside the pressure generating chamber. Inkjet recording heads characterized in that

In the eighth aspect, the connection with the external wiring can be facilitated, the connection resistance can be reduced, and the ink ejection characteristics can be stabilized.

In a ninth aspect of the present invention, in any one of the first to eighth aspects, the pressure generating chamber is formed in a silicon single crystal substrate by anisotropic etching, and each layer of the piezoelectric element is formed and formed. The inkjet recording head is characterized by being formed by a lithography method.

In the ninth aspect, a large amount of ink jet recording head having high density nozzle openings can be manufactured relatively easily.

A tenth aspect of the present invention is an ink jet recording apparatus comprising the ink jet recording head according to any one of the first to ninth aspects.

In the tenth aspect, it is possible to realize an ink jet recording apparatus with stable ink ejection characteristics and improved reliability.

[0030]

BEST MODE FOR CARRYING OUT THE INVENTION The present invention will be described in detail below based on embodiments.

(Embodiment 1) FIG. 1 is an exploded perspective view showing an ink jet recording head according to Embodiment 1 of the present invention, and FIG. 2 is a sectional view of FIG.

As shown in the figure, the flow path forming substrate 10 is a silicon single crystal substrate having a plane orientation (110) in this embodiment. The flow path forming substrate 10 is usually 150 to 3
A thickness of about 00 μm is used, preferably 18
The thickness is preferably about 0 to 280 μm, more preferably about 220 μm. This is because the array density can be increased while maintaining the rigidity of the partition wall between the adjacent pressure generating chambers.

One surface of the flow path forming substrate 10 is an opening surface, and the other surface is provided with an elastic film 50 made of silicon dioxide formed by thermal oxidation in advance and having a thickness of 1 to 2 μm.

On the other hand, on the opening surface of the flow path forming substrate 10, a silicon single crystal substrate is anisotropically etched,
The pressure generating chambers 12 partitioned by the plurality of partition walls 11 are arranged side by side in the width direction, and on the outer side in the longitudinal direction, the pressure generating chambers 12 communicate with the reservoir portion 31 of the reservoir forming substrate 30 described later, and the common ink of each pressure generating chamber 12 is provided. A communication portion 13 that forms a part of a reservoir serving as a chamber is formed, and communicates with one end portion in the longitudinal direction of each pressure generation chamber 12 via an ink supply passage 14.

Here, anisotropic etching is performed by utilizing the difference in etching rate of the silicon single crystal substrate. For example, in this embodiment, the silicon single crystal substrate is set to K.
When it is dipped in an alkaline solution such as OH, it is gradually eroded and the first (111) plane perpendicular to the (110) plane and the first (111) plane
Forms an angle of about 70 degrees with the (111) plane of
A second (111) plane that makes an angle of about 35 degrees with the (0) plane appears, and the etching rate of the (111) plane is about 1/180 of the etching rate of the (110) plane. Is done using. By such anisotropic etching, it is possible to perform precision machining based on the depth machining of the parallelogram shape formed by the two first (111) planes and the two diagonal second (111) planes. The pressure generating chambers 12 can be arranged in high density.

In this embodiment, the long side of each pressure generating chamber 12 is formed by the first (111) plane, and the short side is formed by the second (111) plane. The pressure generating chamber 12 is provided in the flow path forming substrate 1
It is formed by etching through almost 0 to reach the elastic film 50. Here, the elastic film 50 is
The amount of the alkaline solution that etches the silicon single crystal substrate is extremely small. Further, each ink supply passage 14 communicating with one end of each pressure generation chamber 12 is formed shallower than the pressure generation chamber 12, and keeps the flow resistance of the ink flowing into the pressure generation chamber 12 constant. That is, the ink supply path 14 is formed by etching the silicon single crystal substrate halfway in the thickness direction (half etching). The half etching is performed by adjusting the etching time.

On the opening surface side of the flow path forming substrate 10,
A nozzle plate 20 having a nozzle opening 21 that communicates with the pressure generating chamber 12 on the side opposite to the ink supply path 14 is fixed via an adhesive or a heat-welding film. The nozzle plate 20 has a thickness of, for example, 0.1 to 1
mm, a coefficient of linear expansion of 300 ° C. or less, for example, 2.5 to
It is made of glass ceramics of 4.5 [× 10 ⁻⁶ / ° C.] or rust-free steel. The nozzle plate 20 entirely covers one surface of the flow path forming substrate 10 with one surface, and also serves as a reinforcing plate that protects the silicon single crystal substrate from impact and external force. Further, the nozzle plate 20 is used as the flow path forming substrate 10.
It may be made of a material having substantially the same thermal expansion coefficient. In this case, since the flow path forming substrate 10 and the nozzle plate 20 have substantially the same deformation due to heat, they can be easily joined using a thermosetting adhesive or the like.

Here, the size of the pressure generating chamber 12 that applies the ink droplet ejection pressure to the ink and the size of the nozzle opening 21 that ejects the ink droplet depend on the amount of the ejected ink droplet, the ejection speed, and the ejection frequency. Optimized. For example,
When recording 360 ink drops per inch, it is necessary to accurately form the nozzle openings 21 with a diameter of several tens of μm.

On the other hand, a thickness of, for example, about 0.2 μm is formed on the elastic film 50 on the side opposite to the opening surface of the flow path forming substrate 10.
The lower electrode film 60, the piezoelectric layer 70 having a thickness of, for example, about 1 μm, and the upper electrode film 80 having a thickness of, for example, about 0.1 μm are laminated in a process described below to form the piezoelectric element 30.
Configures 0. Here, the piezoelectric element 300 refers to a portion including the lower electrode film 60, the piezoelectric layer 70, and the upper electrode film 80. Generally, one of the electrodes of the piezoelectric element 300 is used as a common electrode, and the other electrode and the piezoelectric layer 70 are patterned for each pressure generating chamber 12. Further, here, a portion which is composed of one of the patterned electrodes and the piezoelectric layer 70 and in which piezoelectric strain is generated by applying a voltage to both electrodes is referred to as a piezoelectric active portion. In the present embodiment, the lower electrode film 60 is the common electrode of the piezoelectric element 300, and the upper electrode film 80 is the individual electrode of the piezoelectric element 300.
There is no problem in reversing this due to the driving circuit and wiring.
In any case, the piezoelectric active portion is formed for each pressure generating chamber. Further, here, the piezoelectric element 300 and the vibration plate that is displaced by the driving of the piezoelectric element 300 are collectively referred to as a piezoelectric actuator.

Here, as shown in FIG. 3, the piezoelectric element 30
Each upper electrode film 80, which is an individual electrode of 0, extends from the vicinity of the end opposite to the ink supply path 14 to the vicinity of the end of the flow path forming substrate 10, for example, from gold (Au) or the like. Is connected to the individual lead electrode 90.
In the vicinity of the end portion of the, there is a connection portion 100 to which external wiring is connected.

On the other hand, the lower electrode film 60, which is a common electrode of the piezoelectric element 300, extends in the region facing the pressure generating chamber 12 in the direction in which the pressure generating chambers 12 are arranged in parallel. Also,
A plurality of common lead electrodes 65 are provided at the end of the lower electrode film 60 opposite to the ink supply path 14.

In the present embodiment, each of these common lead electrodes 65 is made of the same layer as the layer forming the lower electrode film 60, and a flow path is formed between the end portion of the lower electrode film 60 and the individual lead electrode 90. It is extended to the vicinity of the end of the substrate 10. That is, each of these common lead electrodes 65 extends in the same direction as the extending direction of the individual lead electrodes 90.

Further, the vicinity of the end of the common lead electrode 65 is a connecting portion 100A to which external wiring is connected, and the connecting portion 10A between the connecting portion 100A and the individual lead electrode 90 is formed.
0 is provided so as to form a line in the direction in which the pressure generating chambers 12 are arranged in parallel.

Thus, the lower electrode film 60 which is the common electrode
By extending a plurality of common lead electrodes 65 from the above, the resistance value of the lower electrode film 60 can be substantially reduced, and a voltage drop can be prevented when a large number of piezoelectric elements are simultaneously driven. It is possible to obtain stable ink ejection characteristics.

By extending the common lead electrode 65 in the same direction as the extending direction of the individual lead electrodes 90, the area of the flow path forming substrate 10 is not increased, that is, the head is not enlarged. The plurality of common lead electrodes 65 can be extended to stabilize the ink ejection characteristics.

Since the connecting portions 100 and 100A are provided in a line in the direction in which the pressure generating chambers 12 are arranged in parallel, external wiring can be easily connected to the connecting portions 100 and 100A.

Here, such a common lead electrode 65 is formed.
Are preferably provided at a constant interval, for example, one for n individual lead electrodes 90, and one for at least 20 individual lead electrodes 90.

By providing the common lead electrodes 65 at regular intervals in this way, the distance difference between each piezoelectric element 300 and the common lead electrode 65 becomes small, so that a voltage drop occurs when a large number of piezoelectric elements 300 are simultaneously driven. Even if the occurrence occurs, the variation in the displacement amount of each piezoelectric element 300 is small and the variation in the ink ejection characteristics can be suppressed to be small.

The pitch of the connecting portion 100A of the common lead electrode 65 and the connecting portion 100 of the individual lead electrode 90 is preferably shorter than the pitch of the pressure generating chambers 12. That is, each connection unit 100, 100
By making the pitch of A relatively short so as not to short-circuit each other and extending the common lead electrode 65 and the individual lead electrode 90 in a relatively narrow region, the head can be miniaturized.

In the present embodiment, the common lead electrode 6
Although 5 is formed in the same layer as the layer forming the lower electrode film 60, it is not limited to this and may be formed in the same layer as the individual lead electrode 90, for example. Of course, the common lead electrode 65 may be provided separately from the lower electrode film 60 or the individual lead electrodes 90.

In any case, by providing the common lead electrode 65, the resistance value of the lower electrode film 60 can be substantially reduced, and the piezoelectric effect can be generated even if a large number of piezoelectric elements are driven at the same time. It is possible to always obtain stable ejection characteristics.

Further, in the flow path forming substrate 10 on which the piezoelectric element 300 as described above is formed, each pressure generating chamber 12 is further provided.
The reservoir forming substrate 30 having the reservoir portion 31 forming at least a part of the reservoir 110 serving as the common ink chamber is joined. In the present embodiment, the reservoir portion 31 is formed through the reservoir forming substrate 30 in the thickness direction and across the width of the pressure generating chamber 12, and is a through hole provided through the elastic film 50. The pressure generating chambers 12 are connected to the communication portion 13 of the flow path forming substrate 10 via 51.
A reservoir 110 that serves as a common ink chamber of the above is configured.

As the reservoir forming substrate 30, it is preferable to use a material having substantially the same coefficient of thermal expansion as that of the passage forming substrate 10, such as glass or a ceramic material. It was formed using a silicon single crystal substrate of the same material.

Further, the piezoelectric element 3 of the reservoir forming substrate 30
In a region facing 00, a piezoelectric element holding portion 32 that can seal the space is provided in a state where a space that does not hinder the movement of the piezoelectric element 300 is secured, and the piezoelectric element 300 includes the piezoelectric element holding portion 32. It is sealed inside.

The reservoir forming substrate 30 has a compliance substrate 4 including a sealing film 41 and a fixing plate 42.
0 is joined. Here, the sealing film 41 is made of a material having low rigidity and flexibility (for example, a polyphenylene sulfide (PPS) film having a thickness of 6 μm),
One surface of the reservoir section 31 is sealed by the sealing film 41. The fixing plate 42 is made of a hard material such as metal (for example, stainless steel (SUS) having a thickness of 30 μm).
Etc.). The area of the fixing plate 42 facing the reservoir 110 is the opening 4 completely removed in the thickness direction.
Therefore, the one surface of the reservoir 110 is sealed only by the sealing film 41 having flexibility, and is a flexible portion 33 that can be deformed by a change in internal pressure.

The ink jet recording head of this embodiment as described above takes in ink from an external ink supply means (not shown), and the nozzle opening 2 from the reservoir 110.
After filling the inside with ink up to 1, a voltage is applied between the lower electrode film 60 and the upper electrode film 80 corresponding to the pressure generating chamber 12 via the external wiring in accordance with a recording signal from a drive circuit (not shown). Is applied to the elastic film 50 and the lower electrode film 60.
By flexurally deforming the piezoelectric layer 70, the pressure inside each pressure generating chamber 12 increases and ink droplets are ejected from the nozzle openings 21.

(Second Embodiment) FIG. 4 is a plan view showing a wiring pattern of an ink jet recording head according to a second embodiment.

In the present embodiment, as shown in FIG. 4, the connecting portion 100 of the individual lead electrode 90 and the connecting portion 100A of the common lead electrode 65 are provided at different positions in the longitudinal direction of the pressure generating chamber 12, and are individually provided. Connection part 100 of lead electrode 90
Is similar to that of the first embodiment except that it is provided at a pitch substantially the same as the pitch of the pressure generating chambers 12.

With such a structure, of course, the same effect as that of the first embodiment can be obtained. Further, in the configuration of the present embodiment, the area of the connecting portions 100 and 100A to which the external wiring is connected can be increased, so that the reliability of the connection of the external wiring can be improved.

(Third Embodiment) FIG. 5 is a plan view showing a wiring pattern of an ink jet recording head according to a third embodiment.

In this embodiment, as shown in FIG. 5, the flow path forming substrate 10 is provided with two rows of pressure generating chambers 12 defined by a plurality of partition walls. Then, the individual lead electrodes 90 and the common lead electrodes 65 are respectively extended in the regions facing the columns of the pressure generating chambers 12, and the common lead electrodes 65 are disposed between the columns of the pressure generating chambers 12. It is electrically connected by the extended wiring electrode 120. In the present embodiment, the portion where the common lead electrode 65 is connected to the wiring electrode 120 is the connecting portion 100A to which the external wiring is connected.

With such a configuration, when the rows of the pressure generating chambers 12 are arranged side by side, the common lead electrode 65 can be extended without increasing the size of the head, and like the above-described embodiment, it is always possible. Stable ink ejection characteristics can be obtained.

(Other Embodiments) Although the respective embodiments of the present invention have been described above, the basic structure of the ink jet recording head is not limited to the above.

For example, in each of the above-mentioned embodiments, the thin film type ink jet recording head manufactured by applying the film formation and the lithographic process is taken as an example. However, the present invention is not limited to this. The present invention can also be applied to a thick film type ink jet recording head formed by a method such as attaching a sheet.

Further, the ink jet recording head of each of these embodiments constitutes a part of a recording head unit having an ink flow path communicating with an ink cartridge or the like, and is mounted on an ink jet recording apparatus. Figure 6
It is a schematic diagram showing an example of the ink jet type recording device.

As shown in FIG. 6, in the recording head units 1A and 1B having an ink jet recording head, the cartridges 2A and 2B constituting the ink supply means are detachably provided, and the recording head units 1A and 1B.
The carriage 3 on which B is mounted is provided on a carriage shaft 5 attached to the apparatus body 4 so as to be movable in the axial direction. The recording head units 1A and 1B are, for example,
The black ink composition and the color ink composition are respectively discharged.

The driving force of the driving motor 6 is transmitted to the carriage 3 via a plurality of gears (not shown) and the timing belt 7, so that the carriage 3 having the recording head units 1A and 1B mounted thereon is arranged along the carriage shaft 5. Be moved. On the other hand, a platen 8 is provided on the apparatus main body 4 along the carriage shaft 5, and a recording sheet S, which is a recording medium such as paper fed by a feed roller (not shown), is conveyed on the platen 8. It is like this.

[0068]

As described above, according to the present invention, a plurality of common lead electrodes drawn from a common electrode common to a plurality of piezoelectric elements are extended in the same direction as the individual lead electrodes drawn from individual electrodes of the piezoelectric element. I decided to do so,
This common lead electrode can substantially reduce the resistance value of the common electrode without increasing the size of the head. Therefore, even if a large number of piezoelectric elements are driven at the same time, a voltage drop does not occur, and stable ink ejection characteristics can always be obtained.

[Brief description of drawings]

FIG. 1 is an exploded perspective view of an ink jet recording head according to a first embodiment of the invention.

FIG. 2 is a sectional view of the ink jet recording head according to the first embodiment of the invention.

FIG. 3 is a plan view showing a wiring pattern of the ink jet recording head according to the first embodiment of the invention.

FIG. 4 is a plan view showing a wiring pattern of an ink jet recording head according to a second embodiment of the invention.

FIG. 5 is a plan view showing a wiring pattern of an ink jet recording head according to a third embodiment of the invention.

FIG. 6 is a schematic diagram of an inkjet recording apparatus according to an embodiment of the present invention.

[Explanation of symbols]

10 Flow path forming substrate 12 Pressure generation chamber 20 nozzle plate 21 nozzle opening 30 Reservoir forming substrate 40 compliance board 60 Lower electrode film 65 Common lead electrode 70 Piezoelectric layer 80 Upper electrode film 90 individual lead electrodes 100,100A connection 110 reservoir 300 Piezoelectric element

Continued front page    (72) Inventor Shiro Yazaki             Seiko, 3-3-3 Yamato, Suwa City, Nagano Prefecture             -In Epson Corporation F-term (reference) 2C057 AF34 AF83 AG12 AG92 AG93                       AP34 AP51

Claims (10)

[Claims] 1. A flow passage forming substrate in which a pressure generating chamber communicating with a nozzle opening is formed, and a pressure change is generated in the pressure generating chamber provided on one surface side of the flow passage forming substrate via a vibration plate. In an ink jet recording head including a piezoelectric element, a plurality of common lead electrodes that are provided in a region corresponding to the pressure generating chamber and are drawn to the outside of the pressure generating chamber from a common electrode that is common to a plurality of piezoelectric elements are provided. An ink jet recording head, wherein the common lead electrodes extend in the same direction as the extending direction of the individual lead electrodes drawn out from the individual electrodes of the piezoelectric element. 2. The ink jet recording head according to claim 1, wherein the common lead electrode is formed of the same layer as a layer forming the common electrode. 3. The ink jet recording head according to claim 1, wherein the common lead electrode is formed of the same layer as the layer forming the individual lead electrodes. 4. The ink jet recording head according to claim 1, wherein the common lead electrode is provided in a ratio of one for every n individual lead electrodes. 5. The external wiring connected to a drive circuit for driving the piezoelectric element according to claim 1, wherein the respective end vicinities of the individual lead electrode and the common lead electrode are connected to an external wiring. An inkjet characterized in that the connecting portions are arranged in a line along the row direction of the pressure generating chambers, and the pitch of the connecting portions is shorter than the pitch of the pressure generating chambers. Recording head. 6. The external wiring connected to a drive circuit for driving the piezoelectric element according to any one of claims 1 to 4, in the vicinity of respective end portions of the individual lead electrode and the common lead electrode. Connection parts, these connection parts are provided at different positions in the longitudinal direction of the pressure generating chamber, and the pitch of the individual lead electrodes is substantially the same as the pitch of the pressure generating chamber. Inkjet recording head. 7. The flow passage forming substrate according to claim 1, wherein two rows of the pressure generating chambers defined by a plurality of partition walls are provided, and the individual lead electrode and the common lead electrode are provided. Is extended in a region corresponding to the space between the rows of the pressure generating chambers. 8. The inkjet according to claim 1, wherein each of the common lead electrodes is electrically connected by a wiring electrode extending outside the pressure generating chamber. Recording head. 9. The pressure generating chamber according to claim 1, wherein the pressure generating chamber is formed in a silicon single crystal substrate by anisotropic etching, and each layer of the piezoelectric element is formed by film formation and a lithography method. An ink jet recording head characterized by being present. 10. An ink jet recording apparatus comprising the ink jet recording head according to claim 1.