JP2002246117A - Microconnector and fitting determining method using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a microconnector capable of easily and surely confirming the fitting, and a fitting determining method using the same. SOLUTION: In this microconnector 1 formed on a board by the micromachining technology, fitting determining terminals 3f, 5f are mounted, in parallel with connector terminals 3e, 5e, and the fitting determining terminals 3f, 5f can transmit a contact signal at a position, where the connector terminals 3e, 5d are fitted.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

[0001] 1. Field of the Invention [0002] The present invention relates to a micro connector for making an electrical connection between circuits, devices, and the like, and a method for determining a fitting using the same.

[0002]

2. Description of the Related Art In recent years, with the development of semiconductor IC technology, the development of small, lightweight, high-performance electronic devices using the semiconductor IC technology is urgent. Along with this, there is a demand for further miniaturization of the connection connector used in the device. The minimum pitch of a connector formed by press working or injection molding is about 300 micrometers, and a smaller connector is demanded.

Recently, a micro connector having a pitch of 80 micrometers has been manufactured on a trial basis using a LIGA process based on processes such as X-ray lithography, plating, and mold formation. Regarding the circumstances in this area, see JP-A-10-18916
This is described in No. 8. Also, Japanese Patent Application Laid-Open No. 10-18916
No. 8 itself proposes a pin connector of a superposition type as a micro connector in view of its strength.

[0004]

However, in a micro connector formed on a substrate by using a micromachining technique, it has been confirmed that the terminal has been inserted to a position where the terminal can be sufficiently fitted. It is often difficult to do this visually.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a micro connector which can easily and surely confirm a fitting and a fitting determining method using the same.

[0006]

In order to achieve the above object, according to the present invention, in a micro connector formed on a substrate by using micro machining technology, a fitting judgment terminal is provided in parallel with a connector terminal. At the position where the connector terminal is fitted, the fitting determination terminal is set to transmit a contact signal, so that it can be confirmed that the micro connector is securely fitted.

When the connector terminal has a plug-side plug terminal and a socket-side socket terminal that can be fitted with the plug-side terminal, the fitting-judgment terminal is provided with at least one plug-in terminal provided in parallel with the plug terminal. If at least one fitting determination socket terminal provided in parallel with the fitting determining plug terminal and the socket terminal and capable of fitting to the fitting determining plug terminal is provided, the fitting determining terminal on the board is provided. Can be easily formed, and the fitting state of the plug terminal and the socket terminal and the fitting state of the fitting determination plug terminal and the fitting determination socket terminal can be made close to each other, so that a reliable fitting determination can be made. Can be made possible.

Further, if one of the fitting determination plug terminal and the fitting determination socket terminal is an open terminal and the other is a short-circuiting terminal, circuit means for determining the fitting can be changed to a plug or socket open terminal. It is possible to arrange them collectively on the holding side, and it is possible to perform a reliable fitting determination.

[0009] Further, if one of the fitting determination plug terminal and the fitting determination socket terminal is disposed with its leading end being drawn in more than the parallel plug terminal or socket terminal, the plug terminal and the socket terminal are connected to each other. After the fitting of the terminals, the fitting of the fitting determination plug terminal and the fitting determination socket terminal starts, so that reliable fitting determination can be made.

Further, a guide portion having a ratchet structure that can be fitted to each other is provided on the first substrate on which the plug terminal is formed and on the second substrate on which the socket terminal is formed. In addition, it is possible to ensure reliable fitting and stable fitting.

Further, if the fitting judgment terminals are provided on both side ends of the connector terminal, more reliable judgment of fitting can be made.

Further, when all the transmission states of the contact signals from the fitting determination terminals are completed, a fitting completion signal is transmitted, so that more reliable fitting determination can be made.

[0013] Further, after reaching the position where the connector terminal row is sufficiently fitted using the micro connector, all of the fitting determination terminals are in a contact signal transmitting state, and a fitting completion signal is transmitted. If the fitting determination method for the connector terminal for performing the fitting completion display is used, a reliable fitting determination method can be obtained.

(Operation) A micro connector formed on a substrate by using micro machining technology, wherein a fitting determination terminal provided in parallel with the connector terminal is brought into contact at a position where the connector terminal is fitted, The fitting determination terminal is in the state of transmitting the contact signal. Using this signal, the fitting of the connector terminal is confirmed.

[0015]

Embodiments of the present invention will be described below with reference to the drawings.

FIG. 1 shows the configuration of an embodiment of a micro connector according to the present invention.

FIGS. 1A and 1B are explanatory views of the overall configuration of the micro connector 1, wherein FIG. 1A is a plan view and FIG. 1B is an elevation view. Figure 1
In (a), the first substrate 3a is made transparent and the first substrate 3a
Only the upper formation is shown, and in FIG.
a is indicated by a two-dot chain line. In FIG. 1A, the central portion of the micro connector 1 is omitted as shown by a broken line.

The micro connector 1 includes a plug 3 and a socket 5. The plug 3 has a first substrate 3a,
The plug terminal 3e on one side of the connector terminal (electrode terminal) and the fitting determination plug terminal 3f, 3f are formed by batch processing, here, a microprocess using a micromachining technology.
And second guides 3h, 3h, and a separately prepared housing 7 is fixedly provided. The socket 5 is connected to the second substrate 5a.
A socket terminal 5e on the other side of the connector terminal (electrode terminal) is formed by batch processing, here a microprocess using a micromachining technique like the plug 3 described above,
Fitting determination socket terminals 5f, 5f and second guides 5h, 5
and h. In this example, the side surfaces 5g and 5g of the second substrate 5a also have a function as a first guide.

Each of the first guides 7g provided on the housing 7 has a slope 7c, and the first guide 5g of the socket 5 is inserted by being guided by the slope 7c. The guide range of the first guide 7g is on the order of millimeters, for example, ± 350 micrometers (700 micrometers in range), or ± 500 micrometers (1000 in range).
(Micrometers). Guide portions 3k, 3 of second guide 3h on plug 3 side
k, here a U-shape, and the guide portions 5k, 5k of the second guide 5h on the socket 5 side opposed thereto have slope portions 5i at both ends, respectively, and the second guide 3h of the plug 3
And is guided by the guide portion 3k. 2nd guide 5h
Is in the micrometer order, for example, ± 1
The slope portion 5i is formed so as to be 00 micrometers (200 micrometers in a range).

Each of the second guides 3h on the plug 3 side is provided with a fitting determination plug terminal 3f extending therefrom. Further, a ratchet portion 3m is provided in the middle of the guide portion 3k. On the other hand, each second guide 5h on the socket 5 side
Has a ratchet portion 5m extending therefrom. Here, the fitting determination plug terminal 3f is a short-circuit piece terminal, and the other fitting determination socket terminal 5f has a fork shape at the tip and is formed so as to fit each other. Here, the fitting determination terminal includes a fitting determination plug terminal 3f and a fitting determination socket terminal 5f.

The ratchet portion 3m and the ratchet portion 5m form a ratchet structure that can be click-fitted with each other. FIG. 2 shows an enlarged example of this ratchet structure. Although the arrangement is slightly different from the example of the ratchet structure shown in FIG. 1, the basic principle is the same.
2A and 2B are plan views showing a fitting state of a guide portion having a ratchet structure, where FIG. 2A shows a state at the time of starting fitting, FIG. 2B shows a state at the time of fitting, and FIG. The state of is shown. The ratchet portion 5m is formed in a ladder shape to enhance elasticity.

The plug terminal 3e of the plug 3 has a flat pin shape, while the socket terminal 5e on the socket 5 has a fork shape at the tip. As a result, an electrode terminal structure having a long effective fitting length with an insertion feeling (click feeling) can be obtained.

Here, the first substrate 3a and the second substrate 5a are made of a silicon substrate, and the electrode terminals 3
e, 5e and the second guides 3h, 5h are formed with high precision by a microprocess using a micromachining technology described later. Here, the housing 7 is made of an alumina substrate, on which first guides 7g, 7g are integrally formed.

The arrangement of the first guide, the second guide, and the electrode terminals is such that when the socket is inserted into the plug, contact is started in this order. Further, the tip of each of the fitting determination plug terminals 3f, 3f is formed so as to be drawn away from the tip of the plug terminal 3e by a distance H, and as described later, after the contact of the connector terminals (3e and 5e), the fitting determination terminal (3f).
And 5f) are arranged to be in contact with each other.

In use, both the plug 3 and the socket 5 have the input ends of the electrode terminals connected to other wires. Here, the plug 3 is connected to the printed circuit board 9 and the socket 5.
Are connected to the wiring leads 11 by an alternate long and two short dashes line.

The fitting determination socket terminals 5f, 5f are connected to the switch S together with the fitting determination plug terminals 3f, 3f, respectively.
1 and S2. FIG. 3 shows an example of a circuit for determining a fit using the micro connector 1 described above. The switches S1 and S2 on the micro connector 1 are connected in series, and are also connected in series with a power source 20, a resistor 21 for adjustment, and an LED 23 for indicating completion of fitting. Even if these circuit elements and wirings are other than the switches S1 and S2, it is desirable that part of them be mounted on the substrate of the micro connector 1 and others be mounted on equipment connected by the wiring leads 11. Take only power supply 20 from the connected equipment and
D23 may be mounted on the substrate or the exterior of the micro connector 1.

Next, a method for manufacturing the micro connector will be described.

FIG. 4 shows the connector terminals 3e and 5e, the second guides 3h and 5h, the fitting determination plug terminal 3f forming a part of the second guides 3h and 5h, the ratchet 3m and the ratchet 5m, and further the fitting determination. The manufacturing process of the socket terminal 5f is shown.

The connector terminals 3e, 5e on the plug 3 side and the socket 5 side and the second guide 3 are placed on one silicon substrate.
h and 5h are formed simultaneously, and then separated into plugs and sockets by a wafer cutting device such as a dicer. As a result, a connector having a placement accuracy and a fitting accuracy that is not affected by subtle changes in process conditions can be obtained. In the mass production process, a plurality of plugs and sockets are simultaneously formed on one silicon substrate.

(1) A silicon substrate is prepared, and in steps 1 to 3 of FIG. 4, after removing a natural oxide film, a silicon oxide film is formed on the surface.

(2) The contact portion (fork-shaped portion) of the socket terminal 5e of the socket, and the socket terminal 5
A gap is provided between the bottom surface of the contact portion and the substrate so that the contact portion (fork-shaped portion) and the ratchet portion 5m have elasticity and are movable. Therefore, a sacrificial layer is formed in steps 4 to 16 in FIG. First, the sacrificial layer, the electrode terminals, and the second
Cr / Ni or Cr / Cu is deposited as an electroforming seed layer of the guide. The patterning of the sacrificial layer is performed by a photolithography process. In step 7, a resist is applied, and in steps 9 to 10, exposure and development are performed via a photomask for forming a sacrificial layer. Here, copper is selected for the sacrifice layer in consideration of the selectivity of etching with the material nickel for the electrode terminals, and copper is electroformed and plated in step 14 to form a sacrifice layer.
Thereafter, the resist applied in step 7 is removed.

(3) Next, in steps 17 to 27 of FIG. 4, the connector terminals 3e and 5e, the fitting determination socket terminal 5f, and the left and right second guides 3h and 5h are formed. Nickel was selected as the material of the connector terminal, the fitting determination socket terminal and the left and right second guides in order to ensure the contact pressure of the connector terminal and the fitting determination socket terminal. The patterning of the connector terminal, the fitting determination socket terminal and the left and right second guides is performed by a photolithography process. In step 19, a thick film resist is applied, and in steps 21 to 22, exposure is performed through a photomask for forming a connector terminal, a fitting determination socket terminal and second guides on the left and right sides thereof, and development is performed. In step 24, nickel is electroformed and plated to form a connector terminal, a fitting determination socket terminal, and second guides on the left and right sides thereof. Thereafter, the resist applied in step 19 is removed.

(4) Further, steps 28 to 30 in FIG.
Then, the sacrificial layer and the seed layer are removed, and gold plating is applied to the connector terminal, the fitting determination socket terminal, and the fitting determination plug terminal of the second guide on the plug side in step 31 in order to reduce the contact resistance of the contact and prevent corrosion. Apply. After washing in step 32, the connector terminals 3e, 5e and the second guides 3h, 5h on the substrate, the fitting determination plug terminal 3f forming a part of the second guides 3h, 5h, the ratchet portion 3m, the ratchet portion 5m, Further, the formation of the fitting determination socket terminal 5f is completed.

(5) Thereafter, as described above, the wafer is cut into individual plugs and sockets by a wafer cutting device such as a dicer. With this, the socket is basically completed.

(6) Separately, a first guide 7g is formed on a housing 7 formed of an alumina substrate as shown in FIG. 1, and the first guide side is bonded to the first substrate 3a of the plug 3. Thereby, the plug is basically completed.

The plug 3 and socket 5 completed above are
The wiring portion of the printed circuit board 9 and the wiring leads 11 are connected and used. The socket 5 has a connector terminal 3e and a connector terminal 3e in a space formed by the plug substrate 3a and the housing 7.
5e is inserted with the surfaces formed thereon facing each other. Upon insertion, the first guides 7g and 5g come into contact with each other, and when the insertion is further continued, the second guides 3h and 5h are brought into contact and finally the connector terminals 3e and 5e come into contact. First guide 5g
Insertion is completed when the tip of the bottom of the first guide 7g hits the bottom,
The plug and the socket are in a completely connected state.

Until the connection is completed, the plug terminal 3e
After the contact with the socket terminal 5e starts, the distance H (FIG. 1)
With a delay only, the insertion of the fitting determination plug terminal 3f starts between the fitting determination socket terminals 5f. With further delay, the ratchet portion 3m and the ratchet portion 5m start contacting. The distance H is determined so that the plug terminal 3e and the socket terminal 5e are sufficiently inserted and the contact is secured, and then the fitting determination plug terminal 3f starts to contact the fitting determination socket terminal 5f. By the contact between the fitting determination plug terminal 3f and the fitting determination socket terminal 5f, the fitting determination terminals 5f, 3f
In the state shown in FIG. 3, when the contact signal is transmitted and all of the fitting determination terminals 5f and 3f on the left and right are in the state of transmitting the contact signal, the circuit shown in FIG. Perform completion display. The ratchet portion 3m and the ratchet portion 5m that have started contacting further later cross each other as shown in FIGS. 2A to 2C and engage with each other to notify the completion of the fitting with a click feeling.

Although the ratchet mechanism is provided in the above embodiment, the plug and the socket are fully inserted even if the ratchet mechanism is not provided.
It is possible to easily and surely check whether or not the connector is sufficiently fitted.

The plug 3 and the socket 5 are separated by pulling out the socket from the plug.

In the above-mentioned manufacturing process, patterning can be realized by using any light from infrared to X-rays as long as it is lithography. However, in this embodiment, the electrical connector is manufactured using UV photolithography. did.

[0041]

As described above, in the present invention, the fitting determination terminal is provided in parallel with the connector terminal of the micro connector, and the fitting determination terminal transmits a contact signal at a position where the connector terminal is fitted. It is possible to easily and surely check whether or not the micro connector is fitted.

[Brief description of the drawings]

FIG. 1 shows a micro-circuit showing one embodiment of the present invention.
FIG. 4 is an explanatory view of the entire configuration of the connector, where (a) is a plan view and (b)
Is an elevation view.

FIG. 2 shows a fitting of a guide part having a ratchet structure formed on a first substrate on which plug terminals are formed and on a second substrate on which socket terminals are formed, according to an embodiment of the present invention. 5A is a plan view showing a state, FIG. 5A shows a state at the start of fitting, FIG. 5B shows a state at the time of fitting, and FIG.

FIG. 3 shows a circuit diagram for utilizing a micro connector according to an embodiment of the present invention.

FIG. 4 is an explanatory view showing a process of manufacturing a connector terminal of a micro connector, a guide portion having a ratchet structure, and a fitting determination terminal on a substrate according to an embodiment of the present invention.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 Micro connector, 3 plugs, 3a first substrate, 3e plug terminal, 3f fitting determination plug terminal, 3
h 2nd guide, 3k, 5k Guide part, 3m, 5m
Ratchet part, 5 socket, 5a second substrate, 5e
Socket terminal, 5f Mating socket terminal, 5g
Side of the second substrate, 5h second guide, 5i slope,
7 Housing, 7g First guide, 7c Slope, 9
Printed circuit board, 11 wiring leads, 20 power supply,
21 resistors, 23 LEDs.

Continued on the front page (72) Inventor Toshinori Unno 3-7-3 Yaguchi, Ota-ku, Tokyo F-term within Daiko Electric Co., Ltd. 5E021 FA05 FA11 FA14 FA16 FB01 FB07 FB13 FC38 HC09 KA03 KA09 MA02 MA06 MA19

Claims (8)

[Claims] 1. A micro connector formed on a substrate by using micro machining technology, wherein a fitting determination terminal is provided in parallel with a connector terminal, and the fitting is performed at a position where the connector terminal is fitted. A micro connector, wherein the determination terminal transmits a contact signal. 2. The method according to claim 1, wherein the connector terminal has a plug-side plug terminal and a socket-side socket terminal engageable with the plug-side terminal, and the fitting-judgment terminal is provided in at least one of the plug-terminals. The electrical connector according to claim 1, further comprising at least one fitting determination socket terminal provided in parallel with the fitting determining plug terminal and the socket terminal and capable of fitting with the fitting determining plug terminal. 3. The micro connector according to claim 2, wherein one of the fitting determination plug terminal and the fitting determination socket terminal is an open terminal, and the other is a short-circuiting terminal. 4. The plug terminal according to claim 1, wherein one of the plug terminal and the socket terminal is disposed such that a tip end thereof is retracted from the parallel plug terminal or the socket terminal. Item 4. The micro connector according to item 2 or 3. 5. A guide portion having a ratchet structure that can be fitted to each other is provided on the first substrate on which the plug terminal is formed and on the second substrate on which the socket terminal is formed. The micro connector according to any one of claims 2 to 4, wherein: 6. The micro connector according to claim 1, wherein the fitting determination terminals are provided on both side ends of the connector terminal. 7. The micro connector according to claim 1, wherein when all the transmission states of the contact signals of the fitting determination terminals are completed, a fitting completion signal is transmitted. 8. Using the micro connector according to any one of claims 1 to 7, after reaching the position where the connector terminal row is sufficiently fitted, all of the fitting determination terminals are in a state of transmitting a contact signal. Wherein a mating completion signal is transmitted and a mating completion display is performed.