JP2002239774A - Tool for laser beam machining - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a tool for laser beam machining which is universally used for various machining patterns in a boring or cutting work of a sheet member, and in which the risk of the deterioration of boring accuracy or of a damage of the sheet member is small even for such a soft sheet member as a green sheet. SOLUTION: The tool for a laser beam machining of the sheet member by the use of a laser beam is provided with a tool base in which a space having an opening plane which envelops the machining zone of the sheet member is formed, and a supporting member on which the sheet member is mounted, the upper face of the end part of the supporting member has a slender shape, the side face which hangs down from the upper face is formed vertically or in an inclining shape at an acute angle, and the supporting member is so disposed in the space part that the height of the end part is nearly equal to the upper face of the too base.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

The present invention relates to a processing jig for processing a sheet member with a laser.

[0002]

2. Description of the Related Art Conventionally, processing a metal plate with a laser has been frequently used in terms of flexibility in processing shape and high speed. Recently, however, ceramic green sheets and resin films for laminated electronic parts have been used. This technology is applied to flexible sheet members such as piercing, and is used for punching and cutting. When drilling a green sheet, it is important not only that the hole position and the hole shape have good accuracy, but also that the processing dust does not adhere to the hole or the green sheet, and that the green sheet is not damaged or deteriorated. . For this reason, the processing jig for the green sheet can hold the green sheet flat, and scattered matter during processing adheres to the periphery of the hole, and the laser light penetrating the processing hole is reflected on the back of the green sheet. It is desired to have a structure that does not affect the heat and does not reflect the processed hole.

A technique for solving this problem is disclosed in, for example, Japanese Patent Application Laid-Open No. H11-58061. This is, in a processing apparatus using a laser beam, a table having a space including a hole processing area or a cutting area,
A non-flexible support plate mounted on the space of the table and provided with a plurality of through holes corresponding to the positions of the holes or the cutting positions and allowing the passage of laser light. The hole processing or the cutting processing is performed in a state where the sheet member is placed on the support plate. The through holes in the support plate are formed using a processing hole position data by using a processing hole forming laser device.

[0004]

In the above-mentioned known example, a through hole is formed in the support plate corresponding to each of the processing holes.
Laser light and flying objects can be escaped, and drilling can be performed well. However, it is necessary to prepare a dedicated support plate in which a through hole is formed in accordance with the position and size of the processing hole of the target sheet member, and the support plate must be replaced when the setup is changed. Further, the support plate is required to have a predetermined thickness such that it hardly bends even if it receives a suction force for sucking and fixing the sheet member or a pressing force of the assist gas from the surface. For example, since a large number of processed holes, for example, hundreds to tens of thousands, are often formed, it takes time to manufacture. As described above, a large number of support plates must be manufactured, a changeover time is required, and a sheet member working rate of an expensive laser beam machine is reduced, which leads to an increase in product cost.

[0005] By the way, in processing a metal plate, a jig of a type for supporting only a few places on the back surface of the metal plate is often used. The jig of this type can open a large part of the back surface of the metal plate other than the support surface widely, and is suitable for widely supporting various processing patterns. However, when applying to green sheets, the unique issues must be solved. That is,
Since the green sheet has much lower rigidity than the metal plate, supporting several places will deform it by its own weight, suction force and pressure, and it will be out of focus of the laser, degrading hole shape accuracy and position accuracy Problem.
For this purpose, it is sufficient to support the green sheet at as many places as possible, and it is conceivable to use a jig-shaped jig in which a large number of pins are densely provided. However, the more pins are provided, and the more pins are used for various processing hole patterns, the more pins are exposed to the processing hole. These pins are irradiated with the laser beam that has passed through the processing hole, and the tip member sublimates and breaks, and does not come into contact with the green sheet. Therefore, the problem of deformation of the green sheet cannot be solved only by providing the pins closely.

The laser light penetrating the processing hole reaches the jig bottom surface and is reflected. However, since the back surface of the green sheet is open except for the pin contact portion, the reflected laser light is applied to the back surface of the sheet member and the processing hole. , The accuracy of the machined hole is degraded, and the risk of the back surface of the green sheet being damaged is increased. Therefore, the present invention can be generally used for various processing patterns when punching or cutting a sheet member, and the hole processing accuracy is deteriorated even for a soft sheet member such as a green sheet. It is another object of the present invention to provide a laser processing jig which is less likely to damage a sheet member.

[0007]

SUMMARY OF THE INVENTION The present invention relates to a laser processing jig for processing a sheet member by using a laser beam, wherein a space portion having an opening including a processing region of the sheet member is formed. A support member on which the sheet member is placed, the support member is formed such that the top surface of the tip is elongated and the side surface falling from the top surface is inclined vertically or at an acute angle. The height is arranged in the space so as to be substantially the same as the upper surface of the jig stand. The processing described here includes not only a spot-like processing such as a round hole shape but also a continuous processing such as a long groove shape and a processing for cutting a sheet member. The top surface width of the tip of the support member in the present invention is 1/2 to 2 of the diameter of the processing hole.
Desirably 1/20. The processing hole in this case is a round hole. When processing a round hole in a green sheet or the like used for a laminated electronic component, the diameter is usually 200 μm.
The width is as small as about m to 50 μm, the minimum width of the upper surface of the tip is 2.5 μm, and substantially includes the ridge line.
According to the present invention, the surface of the support member is provided with an anti-absorption measure for reflecting 90% or more of the used laser beam, and the surface of the member on which the support member is provided is provided with 80% of the used laser beam.
It is preferable that anti-reflection measures for absorbing the above be provided. Further, the present invention can be applied to a green sheet as a sheet member, in this case, a support member,
The upper surface of the distal end is the same as the upper surface of the distal end of the adjacent support member.
It is arranged so as to have a gap of about 5 mm. As described above, the green sheet processing hole is small, and if it is a gap in the above range, the bending that normally affects the hole processing accuracy can be ignored. However, it is preferable to use an appropriate numerical value according to properties such as the thickness and flexibility of the green sheet.

[0008]

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, a laser processing jig of the present invention (hereinafter referred to as a laser processing jig (hereinafter referred to as a jig) will be described in which a large number of holes having a diameter of several tens to several hundreds of microns are formed in a green sheet having a thickness of several tens to several hundreds of microns. The jig (abbreviated as jig) 10 will be described. FIG. 1 shows an embodiment of the present invention, which is mounted on a drive table (not shown) and is position-controlled in the X-axis direction and the Y-axis direction according to an NC program.
A well-known laser beam irradiation device is provided above the jig 10, and a hole can be formed in the sheet member 1 by, for example, a CO ₂ laser oscillating in a pulse shape.

The jig 10 includes a jig base 11 having a space 2 having an opening surface that covers the entire hole processing region of the sheet member 1 and a base member 15 on which a plurality of support members 12 are erected. Have. The base member 15 is disposed inside the space 2, and the support member 12 is disposed such that the height of the tip at that time is the same as the upper surface of the jig stand 11. Therefore,
The sheet member 1 is supported flat by the front end of the support member 12 and the upper surface of the jig stand 11. A suction passage 13 is provided below the jig base 11 to open into the space 2 and decompress the space.
Are connected to a reduced pressure suction device (not shown) by piping. A large number of suction holes 16 are provided on the upper surface of the jig stand 11 for vacuum-sucking and fixing the peripheral portion of the sheet member 1, and one suction hole 16 is a hole provided inside the jig stand 11. And a pipe connection to a vacuum suction device (not shown).

In order to achieve the above-mentioned object, the supporting member 1
No. 2 satisfies the following conditions. 1) The sheet member can be kept flat without bending. 2) Even when it comes to the machined hole, the tip is hard to be broken. 3) Even if the leading end is lost, the function of keeping the sheet member flat is not immediately lost. 4) It does not become a hindrance to escape flying objects. 5) The reflected light of the irradiation laser light should not be directed toward the sheet member as much as possible.

In order to meet the above conditions 1) to 4), the tip portion is made of a material which is hardly damaged by laser light, and the upper surface which comes into contact with the sheet member has a holding action in a wide range as much as possible. It is preferable to adopt a shape such as a linear shape, a rectangular shape, or a ring shape, from which an abutting surface can be obtained to a certain extent. 4) ~
In order to meet the condition of 5), the front end has a shape in which the upper surface abuts the sheet member as small as possible, and the surface falling from the upper surface is vertically or acutely inclined and does not form a closed space. In order to make the bending of the sheet member negligible with respect to the hole machining accuracy, the gap between the upper surfaces of the leading end portions is set to be within several millimeters. Although it may be attached to a tool, it may be unitized. The unitization simplifies the handling even when directly attached to the base member 15 or the jig.

FIG. 2 shows an example of the support member 12. FIG.
(A) and (b) are examples of a single product form, and FIG. 2 (c) is an example of a unit form. FIG. 2A shows an example in which a pin serving as a base member mounting portion 12b is formed as an integral or assembling structure on a rectangular (W <L) plate material having a top surface dimension of W × L as a tip portion 12a. FIG. 2B shows an example in which a ring-shaped member having a thickness W and an inner diameter d is used, and is inserted into the base member 15. Notches are provided on the side for escape of flying objects. In this case, the circumferential length corresponds to the length L. FIG. 2 (c) shows an example in which a plurality of plate members having an upper surface dimension of W × L as the distal end portion 12a are attached to the base material as the base member attaching portion 12b in a grid pattern at a pitch p.

The width W is preferably smaller than the hole diameter, preferably 0.5 to 0.05 times, more preferably 0.05 to 0.1 times the hole diameter. The more you do, the more difficult it is to make. For this purpose, FIG. 2 (d) shows an example of the top surface side surface of the tip portion.
It is preferable to perform chamfering in a blade shape so that In this case, the chamfer angle θ is smaller than 45 °, preferably 20 ° or less so that the reflected light goes downward even when the laser light is irradiated from above. Further, the support member 12 may be appropriately disposed so that the gap between the adjacent upper surface portions is about 2 to 5 mm in accordance with the properties of the sheet member and the specification of the processing hole, but only the same form is used. Instead, they can be used in appropriate combinations.

The jig of the present invention is a general-purpose jig, and it is acceptable that the laser beam penetrating the sheet member 1 is irradiated to some extent on the upper surface and the side surface of the member constituting the support member 12. Therefore, the support member 12 reflects the laser light by 90% or more so as not to be easily damaged by the laser light. In the case of a CO ₂ laser, copper or brass is preferably used.
The laser light irradiated on the side surface of the support member 12 from above is
Although it is reflected almost downward and reaches the base member 15 and is absorbed as described later, it is preferable that the irradiation amount hitting the side surface is small. Further, the supporting member 12 is preferably shaped so as to form an escape space for the deposit so that scattered matter such as a sheet member generated during processing does not deposit and reflect the laser beam. Accordingly, the height dimension H of the distal end portion 12a is reduced so that the area of the side surface is reduced, and the base member 15 is provided with a small number of mounting portions 12b.
It is desirable to have a structure that can be connected to.

The laser light that has passed through the sheet member 1 reaches the base member 15, and the reflected light is applied to the base member 15 so as to prevent the processing holes and the back surface of the sheet member 1 from being damaged. Take action. That is, when the base member 15 is made of, for example, a tin plate, a PET (polyethylene terephthalate) material or an acrylic material that absorbs 80% or more of a CO ₂ laser, or when it is made of an aluminum material, it is treated with black alumite or black molybdenum disulfide. And so on to absorb the irradiated laser light.
The support member 12 may be directly attached to the space of the jig base 11 without being attached to the base member 15.
It is better to take the same antireflection measures for laser light on the inner wall surface which constitutes the above.

(Example) A round hole having a diameter of 0.15 mm was formed on a ceramic green sheet 1 having a carrier film having a plane size of 160 mm square and a thickness of 0.1 mm by about 5,000.
Individually processed. The support member 12 has a width W of 1 mm, a length L of 30 mm, a height H of 15 mm, a width portion of a brass plate, an upper surface width T in contact with the sheet member of 0.01 mm, and a chamfer angle θ of about 30 °. Processed into blade shape, length 30mm, width 5mm
9 units were attached to the base material in parallel at a pitch of 3 mm to form a unit. Since the plane size of the space 2 of the jig stand 11 was 150 mm square, the support member 12 was not attached to the base member 15, and as shown schematically in FIG. And a total of 2
Five (only nine are shown in FIG. 3) are disposed directly in the space 2. At this time, the tip surface of the support member 12 and the upper surface of the jig stand 11 were made to be the same height.

The sheet member 1 is placed at a predetermined position so as to cover the space 2, and is vacuum-sucked from the suction hole 16 of the jig stand 11 to fix the periphery thereof.
Then, suction was performed under reduced pressure from No. 3 to bring the hole processing region into contact with the front end surface of the support member 12. The sheet member 1 was sequentially irradiated with laser light to drill a round hole. At this time, it was confirmed that some of the distal end surfaces of the support member 12 were irradiated with laser light after forming the processing holes. The scattered matter generated from the sheet member 1 escaped to the space 2 through the processing hole by suction from the suction passage 13 and was almost discharged to the outside. 500 sheets were processed with the jig provided with the new support member 12, but there was no problem with the accuracy of the processing holes of all the sheets, and there was no problem with the attachment of foreign substances to the sheet member surface and no damage.

As described above, since the laser beam after the formation of the processing hole irradiates the distal end surface of a part of the support member 12, the part was slightly missing. However, the sheet member 1 that is no longer supported is only the processed hole portion, and the peripheral portion thereof is supported, so that the sheet member 1 is kept flat. When the hole processing specification of the sheet member changes, the part where the tip of the support member may be broken also changes, and the number of places where the sheet member cannot be supported gradually increases, but as described above, there is no need to replace immediately, and the life is long. long. If the damage is severe, the support member 1
Since only two need be replaced, it is possible to contribute to a reduction in manufacturing cost.

It is needless to say that the present invention can be applied not only to drilling holes such as round holes, elliptical holes, groove-shaped holes, and free-form surface holes, but also to cutting various shapes. Also,
As the sheet member, in addition to the ceramic green sheet with the carrier film, only the ceramic green sheet may be used, another resin sheet may be used, and a case where the sheet is continuously supplied from a roll-shaped material may be applied. . In addition, it is of course applicable to a metal plate.

[0020]

As described above, according to the present invention, there is no need to manufacture a jig plate for each hole pattern or change the setup, and it can be used for general purposes. In addition, even when a part of the support portion that comes into contact with the sheet member is lost, the function of maintaining the flat state of the sheet member is not immediately reduced, so that the life is long. In addition, since the proportion of the laser beam that has passed through the sheet member and reflected to irradiate the back surface of the sheet member is small, it is possible to suppress the occurrence of problems such as deterioration in hole accuracy, damage to the sheet member, and adhesion of foreign matter. Accordingly, the jig and tool costs are reduced, the equipment operation rate is increased, and the yield of the sheet members is improved, so that the manufacturing cost can be reduced.

[Brief description of the drawings]

FIG. 1 is a diagram showing a basic configuration of a laser processing jig of the present invention.

FIG. 2 shows various forms of a support member.

FIG. 3 is a diagram illustrating an example of disposing a support member;

[Description of Signs] 1 ... Sheet member, 2 ... Space, 10 ... Jig, 11
... Jig stand, 12 ... Support member, 13 ... Suction passage, 15
... Base member

Claims (4)

[Claims] 1. A laser processing jig for processing a sheet member using a laser beam, comprising: a jig table in which a space having an opening surface including a processing region of the sheet member is formed; Is provided, the support member has an elongated shape at the top surface of the tip,
The laser processing is characterized in that the side surface falling from the upper surface is formed to be vertical or inclined at an acute angle, and is disposed in the space so that the height of the tip is substantially the same as the upper surface of the jig stand. jig. 2. The laser processing jig according to claim 1, wherein the width of the upper surface of the tip of the support member is 1/2 to 1/20 of the diameter of the processing hole. 3. A laser beam to be used is applied to the surface of the support member.
The laser processing according to claim 1, wherein an anti-absorption measure for reflecting 0% or more is provided, and an anti-reflection measure for absorbing 80% or more of a laser beam to be used is provided on a surface of the member on which the support member is provided. jig. 4. The sheet member is a green sheet, and the support member is disposed such that a top surface of a tip portion thereof has a gap of 2 to 5 mm from a top surface of a tip portion of an adjacent support member. The laser processing jig according to 2 or 3.