JP2002231803A - Substrate transfer container, opening/closing apparatus for substrate transfer container, and method for storing substrate - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a substrate transfer container of a vacuum sealing type, which is compatible with a SMIF pod and can open by using a common opening/closing apparatus. SOLUTION: The substrate transfer container of a vacuum sealing type, which has a container body 2, shaped like a box which one side is open, and a base lid 3, vacuum-sucked to the container body 2 in a blocking state of an opening of the container body 2, comprises a vacuum suction release valve 34, which is composed of an opening/closing chamber 35 provided in the base lid 3 in a communicating state to a vacuum groove 33, being a vacuum suction portion with the container main body 3, a punched hole 36 provided so as to communicate to the opening/closing chamber 35 from a surface formed outside the base lid 3 in a blocking state of the container body 2, and an opening/closing valve member 42 for blocking the punched hole 36 in a pressed state against an inner wall of the opening/closing chamber 35 by means of an elastic body 41.

Description

DETAILED DESCRIPTION OF THE INVENTION

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a substrate transport container, a substrate transport container opening / closing device, and a substrate storage method, and more particularly to a substrate transport for storing an electronic substrate such as a semiconductor wafer or a liquid crystal substrate which requires high cleanliness. Container and
The present invention relates to an opening / closing device for the substrate transport container and a method for storing a substrate using the substrate transport container.

[0002]

2. Description of the Related Art Electronic devices using electronic substrates (hereinafter, referred to as substrates) such as semiconductor wafers, liquid crystal substrates, and magnetic disks are manufactured in a clean room free of dust. On the other hand, when transferring a substrate between the respective substrate processing apparatuses, the transfer is performed in a state where the substrate held in the cassette is stored in a portable and sealable local cleaning container (that is, a substrate transport container). This makes it possible to transport the substrate inside and outside the clean room without exposing the substrate to dust in the atmosphere. Such a substrate transport container is disclosed in, for example, Japanese Patent Publication No. 7-46694,
It is commercially available under the trade name SMIF (Standard Mechanical Interface) pod (Assist Technology).

FIG. 10 shows such a substrate transport container (hereinafter, typically referred to as an SMIF pod) and this SM
Substrate transfer device for IF pod (referred to as SMIF loader)
FIG. The SMIF pod shown in this figure is
It is composed of a box-shaped container body 100 having an open side, and a bottom cover 200 for closing the opening of the container body 100. The container main body 100 is formed in a stepped shape in which an opening edge 101 is greatly widened, and a latch groove 102 is provided on an inner wall of the widened opening edge 101. The bottom lid 200 is provided with the opening edge 10 of the container body 100.
1 and the latch groove 102
A latch 201 that can freely protrude from the side periphery of the bottom cover 200 in a state where the latch 201 is inserted into the bottom cover 200; Also, this bottom cover 200
A packing 203 is provided on the peripheral edge of the container body 100 so as to be pressed over the entire periphery of the opening edge 101 of the container main body 100 in a state where the container main body 100 is closed.

In the SMIF pod having such a configuration, the latch 201 is operated from the side periphery of the bottom cover 200 by operating the latch operation section 202 with the bottom cover 200 fitted to the opening edge 101 of the container body 100. Protrudes and is inserted into the latch groove 102 of the container body 100. At this time, when the tip of the latch 201 projects obliquely downward, the bottom cover 200 is pressed against the container body 100 side, and the inside of the container body 100 is sealed via the packing 203.

[0005] A SMIF loader used to store the wafer W held in the cassette 8 in the SMIF pod having such a configuration is a mounting table on which the SMIF pod is mounted while supporting the bottom cover 200. And a latch opening / closing unit 302 for operating a latch operation unit 202 of the SMIF pod placed on the mounting table 301 in a predetermined state. Although not shown here, positioning pins for mounting the SMIF pod in a predetermined state on the mounting table 301 are provided so as to protrude from the mounting table 201.

In recent years, in the production of high value-added, highly integrated devices, molecular adsorption contamination on the substrate surface adversely affects device and process characteristics. Therefore, when a substrate such as a semiconductor wafer that requires particularly high cleanliness is transferred, the inside of the substrate transfer container storing the substrate is filled with argon (Ar) or nitrogen gas (N ₂ ).
Or other inert gas (hereinafter referred to as inert gas), and the substrate is contaminated with molecules such as organic substances, boron, and phosphorus,
The formation of a natural oxide film on the substrate surface is prevented.

However, although the above SMIF pod is hermetically sealed at a level at which dust (particles) in the atmosphere does not enter, oxygen, water,
Low molecules such as volatile organic substances easily enter the inside of the packing from the gap between the packing disposed between the container body and the bottom cover. Especially when the container body is lifted,
Since the bottom lid is pressed down by the weight of the stored items and the weight of the bottom lid, a minute gap is formed between the container and the container body, and this gap causes the growth of the natural oxide film and the chemical contamination as described above. Small molecules invade. Therefore, it has become difficult to maintain the yield of devices formed on this substrate.

Accordingly, a vacuum-sealed substrate transport container (hereinafter, referred to as a vacuum-sealed container) as shown in FIG. 11 has been proposed and disclosed in Japanese Patent Application Laid-Open Nos. 10-56050 and 11-121602. Container body 400 of this vacuum sealed container
Is provided with a flange 401 having a sufficient width at the opening edge. The bottom lid 500 has a double O around its entire periphery.
A ring groove 501 is provided, in which an O-ring 502 is provided.
Inside to form a double packing. Further, a vacuum groove 503 is provided between the O-ring grooves 501. The vacuum groove 503 communicates with a pipe 504 drawn out of the bottom cover 500, and a valve body 505 for opening and closing the pipe 504 is provided on an outer surface of the bottom cover 500. The valve body 505 is pressed from outside the bottom cover 500 by a coil spring (not shown) in a state of closing the pipe 504.

In the container opening / closing device used for storing the wafer W held in the cassette 8 in the vacuum sealed container having such a configuration, the vacuum sealed container is mounted with the bottom lid 500 being supported. A mounting table 601 is provided, and a pipe 602 and a valve opening / closing mechanism 603 provided on the mounting table 601 are provided. The pipe 602 is connected to the pipe 504 of the bottom lid 500 of the vacuum sealed container, and is connected to the exhaust pump 602a and a gas supply unit (not shown). Further, the valve opening / closing mechanism 603 includes:
A valve element 505 provided on a pipe 504 of a vacuum sealed container
The opening and closing of the lifting and lowering rotation unit 603a,
A hook arm member 603b is provided at the tip (see JP-A-11-121602).

The opening and closing of the vacuum sealed container using the opening and closing device having such a structure is performed for the following purposes. First, the vacuum-sealed container in which the bottom lid 500 is placed in a state of closing the opening of the container body 400 and the inside of the vacuum groove 503 is depressurized and the bottom lid 500 is vacuum-sucked to the container body 400 is placed on a mounting table. 601. At this time, the mounting table 601
The opening of the pipe 602 of the bottom lid 500 and the opening of the pipe 504 of the bottom lid 500 are aligned. Next, the elevating rotating unit 6 of the valve opening / closing mechanism 603 is used.
03a, the tip of the hook arm 603b is hooked on an engaging portion (not shown) of the valve body 505 of the bottom lid 500. Next, the lifting arm 603b is pulled down by operating the lifting / lowering rotating part 603a.
Is pulled down against the coil spring and the piping 6
02 and the pipe 504 of the bottom lid 500 are communicated. In this state, gas is introduced from the pipe 504 of the bottom cover 500 into the vacuum groove 503 of the bottom cover 500, thereby
The vacuum suction state of the bottom cover 500 with respect to 00 is released. When the bottom lid 500 is vacuum-adsorbed to the container body 400, the reverse procedure is performed.

[0011]

Here, in a manufacturing plant using a substrate W, a SMIF pod and a corresponding substrate transfer device (a so-called SMIF loader) are already used for transporting substrates between all the processing devices. In such a case, a vacuum sealed container is used only in a process in which chemical contamination of organic substances or the like and formation of a natural oxide film are to be prevented. In this case, it becomes necessary to transport the vacuum-sealed container to the SMIF loader, open the bottom cover, and take out the internal cassette.

However, the SMIF loader is not provided with an opening / closing device having a valve opening / closing mechanism for opening / closing the vacuum holding valve of the vacuum sealed container. For this reason,
With the SMIF loader, the wafer stored in the vacuum sealed container cannot be taken out. For this reason, in the case of using a vacuum sealed container in a manufacturing factory using the substrate W, a substrate transfer device provided with an opening / closing device for the vacuum sealed container for each processing device used in a series of manufacturing processes. It has to be attached, which is a factor that increases the manufacturing cost.

Accordingly, the present invention provides a vacuum-sealed substrate transport container capable of taking out a wafer by using a SMIF loader, an opening / closing device for the substrate transport container, and a substrate using the substrate transport container. It is intended to provide a storage method.

[0014]

According to a first aspect of the present invention, there is provided a substrate transport container having a box-shaped container body having an opening on one side, and a container body with the opening closed. A vacuum-sealed substrate transport container having a bottom lid for vacuum-sucking the container body, the vacuum-sealing substrate transfer container having a vacuum-sucking release valve including an opening / closing chamber provided with a hole and an opening / closing valve member provided in the opening / closing chamber. I have. The opening / closing chamber is provided in the bottom lid in a state where the opening / closing chamber communicates with a vacuum suction portion with the container body. The perforation is provided so as to communicate with the opening / closing chamber from a surface outside the bottom lid with the container body closed. The on-off valve member is provided so as to close the perforation while being pressed against the inner wall of the on-off chamber by the elastic body.

In the substrate transport container having such a configuration,
By pressing the opening / closing valve member from the perforation against the elastic body pressing the opening / closing valve member, the opening / closing chamber and the outside of the bottom lid communicate with each other through the perforation, and a vacuum is generated from the opening / closing chamber. The outside air is supplied to the suction section, and the vacuum suction state of the bottom lid with respect to the container body is released. Thus, for example, SM
Even in the case of a substrate transfer device for a non-vacuum-sealed type substrate transfer container such as an IF pod, the present substrate transfer container is mounted so that the positioning pins provided on the mounting table are inserted into the holes. By doing so, the vacuum suction state of the bottom lid with respect to the container body in the substrate transport container is released, and the substrate stored inside can be taken out.

A substrate transport container opening / closing device according to the present invention is an open / close device for a substrate transport container having the above-described configuration, and includes a mounting table on which the substrate transport container is mounted while supporting the bottom cover. A vacuum release pin that is inserted into a hole in the bottom lid supported on a mounting table and lifts the open / close valve member up and down so as to be able to move up and down, and further through the hole in the bottom lid supported on the mounting table, And an exhaust pipe communicating with the opening / closing chamber.

In the substrate transport container opening / closing device having such a configuration, by raising the vacuum release pin while the substrate transport container is mounted on the mounting table, the vacuum release pin is inserted from the hole of the substrate transport container. The opening / closing valve member is pushed up against the elastic body, and the opening / closing chamber is communicated with the outside through the perforation. Since the exhaust pipe communicating with the opening / closing chamber is provided, exhaust is performed from the exhaust pipe in a state where the opening / closing chamber and the outside are in communication with each other. The gas in the vacuum suction part is exhausted, and the gas is disposed so as to close the container body, and the bottom lid is vacuum-sucked to the container body. Further, by lowering the vacuum release pin, the perforation of the bottom lid of the substrate transport container mounted on the mounting table is closed by the opening / closing valve member, and the communication state between the opening / closing chamber and the outside through the perforation is established. Will be shut off.

The substrate storing method of the present invention is a substrate storing method using the substrate transport container of the present invention. First, the opening of the container body storing the substrate is closed with the bottom cover. The opening / closing valve member is pushed up by the pressing force from the perforation, and the opening / closing chamber communicates with the outside from the perforation side. In this state, the space between the bottom cover and the container body is exhausted from the perforation through the opening / closing chamber through the perforation to reduce the pressure, whereby the bottom cover is vacuum-sucked to the container body. Thereafter, by releasing the pressing pressure on the on-off valve member, the on-off valve member is pressed against the perforation to close the perforation. Further, in a state where the on-off valve member is pushed up by pushing up from the perforation,
A gas is supplied between the bottom cover and the container body from the perforation via the opening / closing chamber, and the vacuum suction of the bottom cover with respect to the container body is released.

[0019]

DESCRIPTION OF THE PREFERRED EMBODIMENTS Hereinafter, embodiments of the present invention will be described with reference to a substrate transport container, an opening / closing device for the substrate transport container,
The substrate storage method using the substrate transport container will be described in the order.

<Substrate Transport Container> FIG. 1 is a schematic configuration diagram of a substrate transport container according to an embodiment and an opening / closing device for the substrate transport container. FIG. 2 is a cross-sectional view of the container body. FIG. It is a top view of a main body. FIG.
Is a view of the container body with the top plate removed. FIG. 4 is a perspective view showing an example of the cassette 8 stored in the substrate transport container.

The substrate transport container 1 shown in these figures is
This is a vacuum-sealed substrate transport container, which includes a container body 2 for storing a substrate (for example, a semiconductor wafer) W held in a cassette 8 and a bottom lid 3.

The container body 2 is formed to have a capacity as small as possible within a range capable of accommodating the cassette 8 holding a plurality of substrates W, and an opening 21 for inserting and removing the cassette 8 is provided on the bottom side. I have. This opening 2
The peripheral edge portion 1 is formed in a stepped shape in which the front end is greatly widened over the entire circumference. A portion of the container body 2 that is bent outward in a direction parallel to the top plate 22 is configured as a flange 23, and a tip of the flange 23 is further bent in a direction substantially parallel to the side peripheral wall 24 of the container body 2. Is provided with a latch groove 25.

Further, as shown in FIG.
The diameter r of the opening edge portion (diameter of the outer periphery of the opening edge) is the diameter of the opening edge portion of the SMIF pod (conventional technology, see FIG. 10) in which a cassette having the same standard dimensions as the substrate transport container 1 is stored. It is designed identically. And flange 2
Reference numeral 3 indicates that the flange surface 23a on the latch groove 25 side is formed to have a predetermined width d such that vacuum suction of the bottom cover described later can be reliably performed.

Here, the container body 2 is formed by injection molding, and its side peripheral wall 24 has a top plate 22 so that a mold can be pulled out during injection molding.
From the opening 21 toward the opening 21. However, in this case, in particular, a part of the inner side surface of the container body 2 (the inner surface of the side peripheral wall 24) is formed to be perpendicular to the top plate 22 and the flange surface 23a. Hereinafter, on the inner peripheral surface of the container body 2, the inclined portion is referred to as a first inner peripheral surface 26a,
The vertically formed portion is referred to as a second side inner surface 26b.

Here, the second inner peripheral surface 26b is provided with the cassette 8 in a state where the cassette 8 is stored in the container body 2.
Is a part into which the protrusion is inserted. The thickness of the side peripheral wall 24 corresponding to the first side peripheral inner surface 26a is substantially the same from the top plate 22 to the opening 21, and the side peripheral wall 24 corresponding to the second side peripheral inner surface 26b. Has a thickness gradually increasing from the top plate 22 toward the opening 21.

As shown in FIG. 4, the cassette 8 is formed by arranging a plurality of guide grooves 82 on the inner wall surface of a case body having an opening 81 for taking in and out the substrate W. The plurality of substrates W are housed in a stacked state in a state of being bridged between the guide grooves 82 arranged in a vertical direction.
Two rows of flanges 83 are provided on the periphery of the opening 81 of the cassette 8 along the direction in which the guide grooves 82 are arranged. Further, two rows of legs 84 serving as support portions when the cassette 8 is installed with the opening 81 facing upward are provided on the bottom surface portion facing the opening 81 along the arrangement direction of the guide grooves 82.

When the cassette 8 is stored in the container body 2, the container body 2 is placed from above on the cassette 8 arranged with the wall portions 85 at both ends in the arrangement direction of the guide grooves 82 in the vertical direction. . For this reason, when the cassette 8 is stored in the container main body 2, the flange 83 and the leg 84 of the cassette 8 project toward the inner peripheral surface of the container main body 2 as shown in FIG.
These flanges 83 and legs 84 serve as the above-mentioned protrusions.

Therefore, the second
As shown in FIG. 3A, two rows of flanges 83 and two rows of legs 8 of the cassette 8 in a state where the cassette 82 is stored in the container main body 2 as shown in FIG.
4 will be inserted. In addition, among the two-dot chain lines in FIG. 3, the inner two-dot chain line indicates the upper end of the inner side surface (the portion intersecting with the top plate 22), and the outer two-dot chain line indicates the lower end (opening 21) of the inner peripheral surface. Is shown.

On the other hand, the bottom cover 3 of the substrate transport container 1
Has a size to close the opening 21 of the container body 2.

FIG. 5 is an enlarged view of a main part of the substrate transport container 1. As shown in this figure, the container body 2 is attached to the bottom lid 3 with the opening 21 of the container body 2 closed.
A double O-ring groove 31 is formed over the entire periphery of the bottom cover 3 in the peripheral portion abutting on the flange surface 23a. The O-ring groove 31 has an O-ring 3 inside.
2 is provided inside, and has a double packing structure. Also,
At a position sandwiched between the double O-ring grooves 31, a vacuum groove 33 is provided over the entire circumference of the bottom cover 3. When the pressure in the vacuum groove 33 is reduced, the bottom cover 3 is vacuum-adsorbed to the container body 2.

A hollow opening / closing chamber 35 communicating with the vacuum groove 33 is provided inside the bottom cover 3. Further, the bottom cover 3 is provided with a perforation 36 that communicates with a surface (hereinafter referred to as a lower surface) 3a outside the bottom cover 3a in a state in which the container main body 2 is closed, to the opening / closing chamber 35. Here, the opening / closing room 35
Are formed in a concave portion provided on the lower surface 3a side of the bottom cover 3 by a perforation 36.
It is assumed that the space is a space obtained in a state in which the lid is covered with a perforated member 37 provided with the fixing member 38 and the perforated member 37 is fixed to the bottom lid 3 by a stopper 38. In order to ensure the close contact between the perforated member 37 and the lower surface 3a of the bottom cover 3, an annular groove 39 is provided on the contact surface between the perforated member 37 and the bottom cover 3, and an O-ring 40 is provided therein. I do. In addition, although the case where the annular groove 39 is provided on the lower surface 3 a of the bottom cover 3 is shown in the drawings, the annular groove 39 may be provided on the perforated member 37 side.

In such an opening / closing chamber 35, an elastic body 41 is provided.
An opening / closing valve member 42 for closing the perforation 36 while being pressed against the inner wall of the opening / closing chamber 35 is provided. The on-off valve member 42 has a flat plate shape.
In order to ensure the close contact between the opening / closing chamber 2 and the inner wall of the opening / closing chamber 35, an annular groove 4 is formed on the contact surface between the opening / closing valve member 42 and the inner wall of the opening / closing chamber 35.
3 and an O-ring 44 is provided therein. In addition, although the case where the annular groove 43 is provided on the opening / closing valve member 42 side is shown in the drawings, the annular groove 43 may be provided on the inner wall side of the opening / closing chamber 35.

Here, the elastic body 41 is attached to the container body 2 by vacuum suction of the bottom cover 3 with respect to the container body 2.
In a state in which the vacuum groove 33 is closed by the flange surface 23a, that is, in a state in which the vacuum groove 33 and the inside of the opening / closing chamber 35 are depressurized, the opening / closing chamber is opposed to the pressure on the opening / closing valve member 42 from the perforation 36 side. The opening / closing valve member 42 has elasticity capable of closing the perforation 36 by pressing the opening / closing valve member 42 against the inner wall. Therefore, based on the difference between the pressure in the open / close chamber 35 and the pressure on the outside (perforation 36 side) when the bottom lid 3 is vacuum-sucked to the container body 2 and the pressure receiving area of the open / close valve member 42, The pressure applied to the valve member 42 from the perforation 36 side is calculated, and the opening / closing valve member 42 can be pressed against the inner wall of the opening / closing chamber 35 with a pressure sufficiently larger than this pressure.
The material and configuration of the elastic body 41 are appropriately selected and used. For example, when the elastic body 41 is a compression coil spring, an oil-tempered wire, stainless steel, JIS hard steel,
By using a JIS piano wire or the like and appropriately setting the diameter of these materials and the diameter of a coil formed of the material, the elastic body 41 can be used.

The opening / closing chamber 35, the perforation 36, and the opening / closing valve member 42 described above constitute a vacuum suction release valve 34.

FIG. 6 is a plan view of the lower surface 3a side of the bottom cover 3. As shown in FIG. As shown in this figure, it is assumed that a positioning pin housing hole 45 is provided on the lower surface 3a side of the bottom lid 3 in addition to the vacuum suction release valve 34.

FIG. 7 is a plan view of the mounting table of the SMIF loader described with reference to FIG. 10 in the related art. As shown in FIGS. 7 and 6, when three positioning pins are provided on the mounting table 301 of the SMIF loader, when the substrate transport container 1 is mounted on the mounting table 301 in a predetermined state, At least one of the three positioning pins 303 is provided with a hole 3 in the vacuum suction release valve 34.
6, the vacuum suction release valve 34 and the positioning pin storage hole 45 are arranged on the lower surface 3a side of the bottom cover 3 so that the other two are inserted into the positioning pin storage hole 45.

Further, although illustration in FIG. 5 is omitted, FIG.
As shown in FIG. 7, the bottom cover 3 is provided in such a manner that the bottom cover 3 is fitted in the latch groove 25 of the container body 2 and is provided so as to be able to protrude from the side periphery of the bottom cover 3, and the protrusion of the latch 46 is operated. It is assumed that a latch operation section 47 is provided.
Note that the latch operation section 47 is provided on the lower surface 3a side of the bottom cover 3 similarly to the SMIF pod (see FIG. 6).

The substrate transport container 1 constructed as described above
Since the second inner peripheral surface 26b, which is a part of the inner peripheral surface of the container body 2, is formed perpendicular to the flange 23, the opening diameter is the same, and the entire inner peripheral surface of the container body 2 is the same. The volume of the container body is increased as compared with a container body in which the minute portion is inclined with the inner diameter increased toward the opening. In particular, in the substrate transport container 1 of the embodiment, the second inner peripheral surface 26b is formed by the protrusion (the flange 83 and the leg 8) of the cassette 8 stored in the container main body 2.
4) is provided at the position where it is inserted. For this reason, even if the outer shape of the side peripheral wall of the container body 2 is reduced, the side peripheral inner wall of the portion where these protrusions are inserted is partially enlarged, so that the standardized cassette 8
Can be stored inside. Therefore, even if the diameter r of the opening edge portion is the same as that of the SMIF pod, it is possible to secure the flange width d of the container body 2 by reducing the outer shape of the side peripheral wall 24. Also,
It can be placed on the placement table 301 of the SMIF loader. As a result, the substrate transport container 1
Although it is a vacuum sealed type requiring a flange 23 wider than the F pod, the mounting table 301 of the SMIF loader
It can be placed on top.

The substrate transport container 1 presses the opening / closing valve member 42 constituting the vacuum suction release valve 34 of the bottom cover 3 from the perforation 36 against the elastic body. As a result, the open / close chamber 35 communicates with the outside of the bottom cover 3, and outside air is supplied from the open / close chamber 35 into the vacuum groove 33, and the vacuum suction state of the bottom cover 3 with respect to the container body 2 can be released. become.

Therefore, even in the case of a substrate transfer device for a substrate transfer container that is not a vacuum-sealed type such as a SMIF pod, as shown in FIG. 8, positioning is performed by positioning pins 303 provided on the mounting table 301. By mounting the substrate transport container 1 on the mounting table 301 in the state of being pressed, the positioning pins 303 are inserted into the perforations 36 of the bottom cover 3, and the reduced pressure state in the vacuum groove 33 of the bottom cover 3 is released. Thus, the substrate W stored inside can be taken out.

Further, since the substrate transport container 1 is of a vacuum-sealed type, it has excellent hermeticity inside the container.
In addition to oxygen and moisture, it is possible to prevent a gas such as a volatile organic substance that causes molecular adsorption contamination from entering the inside of the container. Therefore, the reliability of prevention of contamination is high. As a result, while maintaining the quality of the substrate W and improving the yield by using such a vacuum-sealed substrate transport container 1, it is possible to suppress an increase in the cost of the manufacturing apparatus by using the conventional SMIF loader as it is. It becomes.

Further, the substrate transport container 1 has S
Like the MIF pod, the latch 46 and the latch operation unit 4
Since the bottom cover 3 is provided, the bottom cover 3 can be fixed to the container body 2 by the SMIF loader, and the substrate W can be stored inside.

As shown in FIG. 6, the positioning pin of the SMIF loader is not inserted into the perforation 36 of the vacuum suction release valve 34 on the lower surface 3a side of the bottom cover 3 of the substrate transport container 1. The positioning pin insertion hole 45 ′ may be provided along with the positioning pin 45 so that the transport container 1 can be mounted on the mounting table of the SMIF loader. By providing such a positioning pin insertion hole 45 ', it is possible to prevent the elastic body 41 pressing the opening / closing valve member 42 of the vacuum suction release valve 34 from being constantly pressed by the positioning pin as shown in FIG. Thus, the elasticity of the elastic body 41 can be maintained.

<Substrate Transport Container Opening / Closing Device> Next, the configuration of a substrate transport container opening / closing device (hereinafter, simply referred to as an opening / closing device) 5 used for storing the substrates W in the substrate transport container 1 having such a configuration will be described. , FIG. 1 and FIG.

The opening / closing device 5 is provided in a substrate transfer device that is provided alongside a processing device (not shown). The opening / closing device 5 includes a mounting table 51 on which the substrate transport container 1 is placed in a state of supporting the bottom lid 3 of the substrate transport container 1 and which moves up and down with the bottom lid 3 of the substrate transport container 1 placed thereon. I have.

It is assumed that positioning pins (not shown) are arranged on the mounting table 51 at the same positions as those of the above-described mounting table 51 of the SMIF loader. By storing these positioning pins in the positioning pin storage holes 45 (see FIG. 6) of the substrate transport container 1, when the substrate transport container 1 is mounted on the mounting table 51 in a predetermined state, the bottom cover is closed. 3 so as to communicate with the perforations 36,
A gas introduction pipe 52 and an exhaust pipe 53 are fixed to the mounting table 51, and the exhaust pipe 53 is provided with an exhaust pump 54.

Here, on the mounting table 51, the perforated member 37 fixed to the lower surface 3 a of the bottom cover 3 in a state where the substrate transport container 1 is mounted in a state of being positioned as described above. A recess 55 for accommodating the stopper 38 is formed, and the gas introduction pipe 52 and the exhaust pipe 53 are configured to communicate with the perforation 36 of the bottom cover 3 via the recess 55. An annular groove 56 surrounding the recess 55 is provided on the mounting surface of the mounting table 51.
By housing the O-ring 57 in the inside 6, airtightness in the concave portion 55 is maintained.

Further, the mounting table 51 is inserted into the hole 36 of the bottom cover 3 supported on the mounting table 51 so as to be able to move up and down while being positioned as described above. A vacuum release pin 58 is provided to push up the cylinder 42 freely. The vacuum release pin 58 is provided so as to maintain airtightness in the recess 55.

Further, the mounting table 51 is provided with a latch opening / closing section 59 for operating the latch operation section 47 of the bottom cover 3 (see FIG. 1). The latch opening / closing portion 59 is
It is assumed to be the same as the latch opening / closing part (302) of the F loader.

Incidentally, as shown in FIG.
The (opening / closing device 5) is disposed in a housing 60 having a diameter larger than that of the bottom cover 3 and having an upper surface opened. This housing 60 is
With the substrate transport container 1 mounted on the mounting table 51,
The outermost peripheral portion of the opening edge portion of the container body 2 is
The container body 2 is configured to be supported by the upper end of the housing 0 and to close the opening on the upper surface of the housing 60.
Although not shown here, the housing 60 is communicated with the substrate introduction chamber of the processing apparatus, and is provided with an exhaust pipe and an inert gas introduction pipe.

<Substrate Storage Method> Next, a procedure for storing a substrate W in the substrate transport container 1 using the opening / closing device 5 having the above-described configuration will be described with reference to FIGS.

Here, the substrate W, which has been processed by the processing apparatus, is placed on the mounting table 51 lowered into the housing 60 while being held in the cassette 8 on the bottom cover 3. And that. In this state, the hole 36 of the bottom cover 3 is connected to the gas introduction pipe 52 and the exhaust pipe 53. At this time, it is assumed that the container main body 2 is placed on the housing 60 of the opening and closing device 5 with the opening edge portion of the container main body 2 being supported on the upper end of the housing 60. The vacuum release pin 58 is, for example, as shown in FIG.
As shown in FIG.
5 and inserted into the perforation 36 to push up the on-off valve member 42 in the on-off chamber 35.

First, the container body 2 and the housing 60
The inside is sufficiently replaced with an inert gas, or the pressure is reduced. Thereafter, the mounting table 51 on which the substrate W is mounted is raised. As a result, the cassette 8 is housed in the container body 2 maintained in an inert gas atmosphere or a reduced pressure state, the opening 21 of the container body 2 is closed by the bottom cover 3, and the flange surface 23 a of the container body 2 The O-ring groove 31 and the vacuum groove 33 of the bottom cover 3 are closed.

Next, the latch operating section 47 of the bottom cover 3 is operated by the latch opening / closing section 59 provided on the mounting table 51, and the latch 46 is projected from the side periphery of the bottom cover 3 so that the container body 2
The tip of the latch 46 is inserted into the latch groove 25 of FIG. Thus, the bottom cover 3 is fixed to the container body 2.

Thereafter, the vacuum pump 54 provided in the exhaust pipe 53 is operated. Thereby, the exhaust pipe 53,
The gas in the vacuum groove 33 is evacuated and decompressed through the recess 55, the perforation 36, and the opening / closing chamber 35, and the bottom cover 3 is vacuum-adsorbed to the container body 2. This also allows the O of the bottom cover 3 to be
The ring 32 is pressed against the flange surface 23a to ensure a sealed state in the container body 2.

Thereafter, as shown in FIG. 9A, the vacuum release pin 58 is lowered, and the opening / closing valve member 42 closes the perforation 36. At the same time, the exhaust by the exhaust pump 54 is stopped. As a result, the substrate W is hermetically stored in the substrate transport container 1 maintained in an inert gas atmosphere (or a reduced pressure state).

Then, the substrate transport container 1 in which the substrate W is hermetically stored is detached from the substrate transfer device 5 and transported. At this time, if the inside of the housing 60 is in a reduced pressure state, the inside of the housing 60 is returned to the atmospheric pressure, thereby releasing the close contact state of the substrate transport container 1 with the housing 60. afterwards,
The substrate transport container 1 is transported to the next step.

When the substrate W sealed and stored in the substrate transport container 1 as described above is unloaded from the substrate transport container 1, the following is performed.

First, the substrate transport container 1 is mounted on the mounting table 51 of the opening / closing device 5 attached to the next process processing apparatus in a state where it is positioned at a predetermined state. Thus, the perforations 6 of the bottom cover 3 are connected to the gas introduction pipe 52 and the exhaust pipe 53 via the recess 55 of the mounting table 51.
Then, as shown in FIG. 9 (2), the vacuum release pin 58 is raised to raise the on-off valve member 42, and the gas introduction pipe 52
Then, the inert gas is supplied into the vacuum groove 33 through the concave portion 55, the perforation 56, and the opening / closing chamber 35. Thereby, the inside of the vacuum groove 33 is pressurized, and the vacuum suction state of the bottom cover 3 to the flange surface 23a of the container body 2 is released.

Further, the latch operation section 47 of the bottom cover 3 is operated by the latch opening / closing section 59 to store the latch 46 in the bottom cover 37. Thereby, the fixed state of the bottom cover 3 to the container body 2 is released. After the above, the mounting table 51 of the opening / closing device 5 is lowered. Thus, the bottom cover 3 is placed on the mounting table 5 while the container body 2 is supported on the upper end of the housing 60.
The substrate W is lowered into the housing 60 together with the substrate 1, and the substrate W is carried out from the container main body 2 into the housing 60.

In the above-described opening / closing device and the substrate storage method using the same, in the vacuum-sealed substrate transport container 1 that can be opened and closed using the substrate transfer device common to the SMIF pod, Vacuum the bottom cover 3
Further, the vacuum suction state of the bottom cover 3 with respect to the container body 2 can be released. Therefore, the substrate W can be stored in the container body 1 kept in an airtight state.

[0062]

As described above, according to the substrate transport container of the present invention, although it is a vacuum sealed type in which the bottom lid is vacuum-sucked to the container body, for example, without using a dedicated opening / closing device, The vacuum state can be released using a general substrate transfer device such as an SMIF loader. As a result, it becomes possible to use this substrate transport container together with the SMIF pod in the production line,
By storing the substrate W in an inert gas using such a vacuum-sealed type substrate transport container, the conventional SMIF can be maintained while maintaining the substrate quality and improving the yield.
By using the loader as it is, it is possible to suppress an increase in manufacturing apparatus cost.

Further, according to the opening / closing device for a substrate transport container and the substrate storage method of the present invention, a vacuum-sealed substrate transporter capable of releasing the vacuum suction state of the bottom lid with respect to the container body using the SMIF loader. For containers
The substrate can be stored while keeping the inside airtight.

[Brief description of the drawings]

FIG. 1 is a schematic configuration diagram for describing an embodiment.

FIG. 2 is a cross-sectional view of a container main body for describing a configuration of the substrate transport container of the embodiment in detail.

FIG. 3 is a top view of a container main body for describing a configuration of the substrate transport container of the embodiment in detail.

FIG. 4 is a perspective view showing an example of a cassette stored in a substrate transport container.

FIG. 5 is a sectional view of a main part for describing in detail a configuration of the substrate transport container of the embodiment.

FIG. 6 is a plan view of the bottom cover of the substrate transport container according to the embodiment as viewed from a lower surface side.

FIG. 7 is a top view of a mounting table of the SMIF loader.

FIG. 8 is a diagram illustrating a method of opening a substrate transport container of the present invention using a SMIF loader.

FIG. 9 is an enlarged view of a main part for describing a substrate transport container opening / closing device and a substrate storage method using the same according to the embodiment.

FIG. 10 is a schematic configuration diagram illustrating a configuration of a SMIF pod and a SMIF loader.

FIG. 11 is a schematic configuration diagram illustrating the configuration of a conventional vacuum-sealed type substrate transport container and its opening / closing device.

[Explanation of symbols]

DESCRIPTION OF SYMBOLS 1 ... Substrate transfer container, 2 ... Container body, 3 ... Bottom cover
8 cassette, 21 opening, 22 top plate, 23 flange, 24 side peripheral wall, 25 latch groove, 26a first inner peripheral surface, 26b second inner peripheral surface, 31 O-ring Groove, 32 O-ring, 33 Vacuum groove, 34 Vacuum suction release valve, 35 Open / close chamber, 36 Perforation, 42 Open / close valve member, 46 Latch, 47 Latch operating part, 58 Vacuum release pin, 83: cassette flange, 84: cassette leg, W: substrate

Claims (8)

[Claims] 1. A vacuum-sealed substrate transport container having a box-shaped container main body having an open surface on one side and a bottom lid for vacuum-sucking the container main body in a state in which the container main body is closed. An opening / closing chamber provided in the bottom lid in a state where it is communicated with a vacuum suction portion with the container body; and an opening / closing chamber communicating with the opening / closing chamber from a surface outside the bottom lid with the container body closed. A substrate transport container, comprising: a perforated hole provided by an operator; and an open / close valve member for closing the perforated hole while being pressed against an inner wall of the opening / closing chamber by an elastic body. 2. The substrate transport container according to claim 1, wherein the container body has a side peripheral wall inclined so as to increase an inner diameter from a top plate toward an opening, and an opening edge of the side wall is substantially equal to the top plate. In addition to providing a flange that extends outward in parallel, a part of the inner peripheral surface is formed perpendicular to the flange, and the bottom cover has a packing and a vacuum groove communicating with the opening and closing chamber. A substrate transport container, wherein the container main body is closed in a state where a provided peripheral portion is in contact with the flange. 3. The substrate transport container according to claim 2, wherein a cassette supporting a substrate is housed in the container main body at the side inner peripheral portion formed perpendicular to the flange. A substrate transport container, wherein a projecting portion of a cassette is inserted. 4. The substrate transport container according to claim 1, wherein an opening edge of the container body is formed in a stepped shape expanding outward, and a plurality of latch grooves are provided on an inner wall of the expanded opening edge. The bottom lid has a size that fits into the opening edge of the container body, and a latch that can freely protrude from a side circumference of the bottom lid in a state of being fitted into the latch groove and a projection of the latch. A substrate transport container, comprising: a latch operating section for operating. 5. An opening and closing device provided in the bottom cover in a state in which the bottom cover is vacuum-adsorbed to the container body in a state of closing the opening of the container body and communicated with a vacuum suction portion with the container body. Chamber, a perforation provided in communication with the opening / closing chamber from a surface outside the bottom lid in a state where the container body is closed, and the perforation in a state where the perforation is pressed against the inner wall of the opening / closing chamber by an elastic body. What is claimed is: 1. An opening and closing device for a substrate transport container having a vacuum suction release valve comprising an on-off valve member for closing, wherein a mounting table on which the substrate transport container is mounted while supporting the bottom cover, Inserted into the perforation of the bottom lid supported,
A vacuum release pin that pushes up and down the open / close valve member, and an exhaust pipe that communicates with the open / close chamber of the bottom cover through a hole in the bottom cover supported on the mounting table. Substrate transport container opening and closing device. 6. The opening / closing device for a substrate transport container according to claim 5, wherein the mounting table has a latch opening / closing section for operating a projection of the latch for fixing the bottom lid, the latch being provided to be able to protrude from the bottom lid. A substrate transport container opening / closing device, comprising: 7. An opening and closing device provided in the bottom cover in a state where the bottom cover is vacuum-sucked to the container body in a state of closing the opening of the container body and communicated with a vacuum suction portion with the container body. Chamber, a perforation provided in communication with the opening / closing chamber from a surface outside the bottom lid in a state where the container body is closed, and the perforation in a state where the perforation is pressed against the inner wall of the opening / closing chamber by an elastic body. A method for storing a substrate using a substrate transfer container having a vacuum suction release valve comprising an opening / closing valve member for closing, wherein the opening from the container body in which a substrate is stored is closed by the bottom lid, and the substrate is pushed from the hole. Pushing up the open / close valve member by pressure to communicate the open / close chamber to the outside from the perforation side; and discharging the space between the bottom lid and the container body from the perforate through the open / close chamber. And depressurizing the container to cause the bottom lid to be vacuum-sucked to the container body, and by releasing the pressing pressure on the on-off valve member, presses the on-off valve member against the perforation and presses the perforation. Performing a closing step. 8. The substrate storage method according to claim 7, wherein, in a state where the on-off valve member is pushed up by pushing up from the perforation, between the bottom cover and the container body from the perforation through the opening / closing chamber. A gas is supplied to the container, and the vacuum suction of the bottom cover to the container body is released.